JPH0921465A - Vacuum device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To save trouble in attaching/detaching a lid member for sealing a vacuum device main body. SOLUTION: A lid member 3 is so formed that an end face 3a of the lid member 3 and the end face 2a of a vacuum device main body 2 are precisely opposed to each other by a guide member 5, a guide groove 6, and a positioning pin 8 penetrating through a pin support member 7 and inserted into a long hole 2d so that the both end faces 2a, 3a are held in such a position as approximately stuck tight to each other. When the vacuum device main body 2 is drawn by vacuum force, the lid member 3 surely seals the vacuum device main body 2 by its suction force. When the inside of the vacuum device main body 2 is bent, the positioning pin 8 is pulled out from the long hole 2d and then the lid member 3 is taken out from the vacuum device main body 2 according to guidance of the guide member 5 and the guide groove 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum device, such as an ion implantation device, whose internal atmospheric pressure changes from a vacuum state in which the atmospheric pressure is lower than atmospheric pressure to a state in which the atmospheric pressure is approximately equal to the external atmospheric pressure, and more particularly to a connecting portion of the vacuum device. It is a thing.

[0002]

2. Description of the Related Art A vacuum apparatus such as an ion implantation apparatus for performing various kinds of processing in a processing chamber maintained at a pressure lower than atmospheric pressure is
Widely used than before. Generally, in these vacuum devices, the processing chamber has an opening for maintenance or the like. In these conventional vacuum devices, the sealing member that seals the opening is attached by a claw clamp, a clamp ring, or the like, or by directly screwing.

An example of a connecting portion of a vacuum device, which has been conventionally used and directly screws a sealing member, will be described with reference to FIG. That is, the vacuum device
A vacuum device main body 52 having a substantially square tubular opening is provided, and a substantially square plate-like lid member 53 that is in close contact with the opening surface of the opening. An O-ring groove 52b is formed around the square hole 52a formed on the opening surface of the vacuum apparatus main body 52, and an O-ring groove 52b is coated with grease.
A ring 54 is attached. Further, screw holes 55 are formed at the four corners of the opening surface of the vacuum device body 52, and screws 56 are inserted through the round holes 57 formed at the four corners of the lid member 53 to form the screw holes 55. The lid member 53 is brought into close contact with the vacuum apparatus main body 52 by being screwed into each.
As a result, the inside of the vacuum device body 52 is sealed.

As another conventional example, an example of a vacuum device for mounting a sealing member using a claw clamp will be described below with reference to FIG. For convenience of explanation, members having the same functions as the members shown in FIG. 4 showing the conventional example are designated by the same reference numerals, and the description thereof will be omitted.

That is, the lid member 53 is the vacuum device body 5.
It is formed in a substantially rectangular plate shape having a width smaller than that of the second opening surface. A clamp groove 53a is formed on the surface of the lid member 53 on the opposite side of the vacuum device main body 52 in the vertical direction along the side edge. Clamp groove 53a
One of the protruding end portions 58a of the claw 58 formed in a substantially U-shape is engaged with the other, and the other protruding end portion 5 is
8b is arranged along the side end surface of the lid member 53. Further, a round hole 57 is formed through the projecting end portion 58b in a direction perpendicular to the opening surface of the vacuum apparatus main body 52. The screws 56 ... Insert the round holes 57 ...
By being respectively screwed into the ...
Is closely attached to the vacuum device main body 52. As a result, the lid member 53 meshed with the claws 58 is also brought into close contact with the vacuum apparatus body 52, and the inside of the vacuum apparatus body 52 is sealed.

[0006]

However, in the above-mentioned conventional vacuum device, the sealing member is attached by a clamp, a clamp ring, or the like, or by directly screwing. In any case, since it has a member for screwing, it is necessary to attach and detach the screw when attaching and detaching the sealing member of the vacuum device. As a result, there is a problem that workability is poor and time is required when the sealing member is attached and detached. In addition, a tool is often required to attach and detach the sealing member. In particular, when the sealing member is frequently attached and detached, this problem has a great influence, and it is desired to solve the problem.

The present invention has been made in view of the above problems, and an object thereof is to realize a vacuum device having a sealing member which can be easily attached and detached without using a tool.

[0008]

In order to solve the above-mentioned problems, a vacuum device according to the present invention is a hollow container having an opening, and is closely attached to the opening of the container via an elastic seal member. A detachable sealing member for sealing the container, and an atmospheric pressure control means for changing the atmospheric pressure in the container sealed by the sealing member from a state substantially equal to the external atmospheric pressure to a state lower than the external atmospheric pressure. The vacuum device having the above is characterized by including the following members.

That is, a guide member is projectingly provided on one of the joint surfaces of the container and the sealing member, and the guide member is fitted on the other joint surface to attach the sealing member to the container. A guide groove for guiding to a predetermined position of the opening is formed, and a first positioning hole is formed on the upper surface or the side surface of one of the container and the sealing member, and the other is formed with a container. A pin support member that extends to a position where the first positioning hole is formed when the joining surfaces with the sealing member are overlapped with each other and a second positioning hole that penetrates the position that corresponds to the first positioning hole extends. The pin support member is provided with a positioning pin which is inserted into the first positioning hole through the second positioning hole.

According to the structure of the present invention, in a vacuum apparatus, such as an ion implantation apparatus, which performs various kinds of processing in a processing chamber maintained at a pressure lower than atmospheric pressure, the processing chamber is set before the ion implantation processing or the like. It is necessary to seal the container to be formed with a sealing member.

That is, when the sealing member approaches the container, the guide member protruding from the joint surface of either the sealing member or the container is fitted into the guide groove formed in the other. Are combined. The guide member and the guide groove guide the sealing member to a position where it comes close to or abuts the container.

When the sealing member moves and the container and the sealing member come close to or come into contact with each other via the elastic sealing member, the positioning pin is inserted through the second positioning hole formed in the pin supporting member to move to the first position. 1 Insert into the positioning hole. Due to the inserted positioning pin, the sealing member does not move away from the container. Further, even if the sealing member tries to move along the joint surface, the sealing member is locked by the guide member and the guide groove. As a result, the sealing member is locked at a position close to or in contact with the container.

Then, the inside of the container is evacuated by using an air pressure control means such as a vacuum pump, and the gas inside the container is sucked. Since the joint surface of the container and the sealing member is close to or abuts via the elastic sealing member, the sealing member is
Aspirated towards the container. By the suction of the sealing member to the container side, the adhesion between the sealing member and the container is improved,
The suction force with respect to the sealing member is further improved. The more suction is performed, the higher the degree of adhesion between the two becomes, so that the inside of the container is reliably sealed by the sealing member. In this state, the atmospheric pressure inside the container is kept lower than the atmospheric pressure, so that it is not easy to remove the sealing member along the guide between the guide member and the guide groove.

When the processing such as the ion implantation processing is completed,
The inside of the container is vented by the atmospheric pressure control means. Then, after the positioning pin is taken out from the first positioning hole, the sealing member is removed from the container according to the guide of the guide member and the guide groove. In a state where the atmospheric pressure and the external atmospheric pressure in the container are substantially equal, the sealing member is not pressed in the container direction,
The sealing member is easily removed along the guide of the guide member and the guide groove.

Therefore, the sealing member can seal the container so that the inside of the vacuum device is in a vacuum state, and when the atmospheric pressure in the vacuum device is substantially equal to the external atmospheric pressure, it is attached and detached only by attaching and detaching the positioning pin. . Since the screwing which is conventionally required is not required, the sealing member can be easily attached and detached without using a tool. Further, the guide member and the guide groove can guide the sealing member to a correct position with respect to the container.

In addition, when the pressure inside the container becomes undesirably higher than the atmospheric pressure when venting the inside of the vacuum device, the sealing member moves to form a gap between the container and the container, The internal pressure can be reduced to almost the same as the external atmospheric pressure.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to FIGS.
That is, the vacuum apparatus according to the present embodiment is used, for example, in an ion source used in an ion implantation apparatus, and the inside is brought to a high vacuum state by a vacuum pump or the like.

As shown in FIG. 1, a vacuum device 1 includes a vacuum device main body 2 having an opening whose end portion is formed into a substantially rectangular column shape.
The container includes a container and a removable lid member 3 (sealing member) that is coupled to the opening, and is sealed by the lid member 3 by an air pressure control means such as a vacuum pump or a vent gas introduction system (not shown). The inside of the vacuum device main body 2 is maintained in a high vacuum state or a state substantially equal to the external pressure. In addition, the vacuum device main body 2, for example, so that the joint surface with the lid member 3 is substantially perpendicular to the ground,
It is installed almost horizontally.

Here, the X, Y and Z directions shown in each figure are defined as follows. That is, the direction from the lid member 3 toward the vacuum apparatus body 2 is the X direction, and the lid member 3 is perpendicular to the X direction.
The direction from the bottom to the top is the Y direction. Also, X
The direction perpendicular to both the direction and the Y direction is indicated by the Z direction.

In the central portion of the end surface 2a of the vacuum apparatus body 2 on the side of the lid member 3, a square hole 2b leading to a processing chamber in the vacuum apparatus body 2 is formed.
Are formed. An O-ring groove 2c is provided in the end surface 2a around the square hole 2b. An O-ring 4 having elasticity coated with grease is attached to the groove 2c. Further, a columnar guide member 5 having a substantially rectangular cross section is erected on the lower portion of the end surface 2a. Also,
An elongated hole (first positioning hole) 2d is formed along the Y direction near the end surface 2a side of the upper surface of the vacuum apparatus body 2. The depth of the elongated hole 2d is set so as not to exceed the thickness of the outer wall of the vacuum apparatus body 2.

On the other hand, the lid member 3 is formed in a substantially rectangular column shape. Note that the lid member 3 is
It may be solid or hollow as long as the suction force is applied in the X direction.

On the lower surface of the lid member 3, a guide groove 6 having a rectangular cross section is formed along the X direction so that the guide member 5 can be fitted therein. In addition, a pin support member 7 formed in a substantially square pole is attached to the center of the upper surface of the lid member 3 along the X direction. The pin support member 7 extends in the X direction beyond the end surface 3a of the lid member 3 on the vacuum device body 2 side. Further, a round hole (second positioning hole) penetrating in the Y direction is formed at the center of the tip portion of the pin support member 7 in the Z direction.
7a are formed. A positioning pin 8 is inserted through the round hole 7a. It does not matter whether or not the tip of the positioning pin 8 is detachable from the pin support member 7 as long as the tip of the positioning pin 8 can be retracted from the lower surface of the pin support member 7.

As shown in FIGS. 2 and 3, the length of the pin support member 7 and the positions of the long hole 2d and the round hole 7a formed on the upper surface of the vacuum device body 2 are determined by the position of the vacuum device body 2. When the end surface 2a and the end surface 3a of the lid member 3 are in a position where they are close to or in contact with each other (hereinafter referred to as a locking position), the positioning pin 8 is inserted through the round hole 7a, and the long hole 2
It is set so that it can be inserted into d. In this embodiment, the distance d between the end faces of the both end faces 2a, 3a when the lid member 3 is in the locking position is set to about 0.5 mm. The distance between the end surface of the round hole 7a on the X direction side and the end surface of the elongated hole 2d on the opposite X direction side along the X direction is determined by the positioning pin when the vacuum device body 2 and the lid member 3 are in the locking position. It is set to be substantially equal to the outer diameter of 8. As a result, as shown in FIG.
Is inserted into the round hole 7a and the long hole 2d, the X-direction end surface of the round hole 7a and the reverse X-direction end surface of the long hole 2d can no longer approach each other, and the lid member 3 is locked at the locking position. Is locked so as not to move in the reverse X direction. Further, when the lid member 3 is moved in the direction in which the both end surfaces 2a and 3a are completely adhered to each other, the elongated hole 2d is formed in the X direction so that the positioning pin 8 inserted into the elongated hole 2d does not become a hindrance. Length is Z
It is set longer than the length in the direction. As a result, the lid member 3 is directly moved from the locking position where the both end faces 2a and 3a come close or abut to the position where the both end faces 2a and 3a are completely in contact with each other while the positioning pin 8 is inserted into the elongated hole 2d. it can.

Next, in the above structure, the operation when the lid member 3 is attached to and detached from the vacuum apparatus main body 2 will be described with reference to FIGS.
The explanation is based on the following.

That is, as shown in FIG. 1, when the vacuum apparatus main body 2 and the lid member 3 are separated from each other, the inside of the vacuum apparatus main body 2 is not sealed, and the internal atmospheric pressure becomes equal to the external atmospheric pressure. There is. Subsequently, the lid member 3 is brought close to the vacuum device body 2. The positioning pin 8 is removed from the pin support member 7 or pulled up so as not to interfere with the movement of the lid member 3.

When the lid member 3 approaches the vacuum apparatus body 2,
The guide member 5 is fitted into a guide groove 6 formed on the lower surface of the lid member 3. As a result, the end surface 3 of the lid member 3
a and the end surface 2a of the vacuum apparatus body 2 exactly face each other.

The lid member 3 is guided by the guide member 5 and the guide groove 6 and further moves linearly in the X direction. As a result, as shown in FIG. 2, the lid member 3 has the both end surfaces 2a.
3a reaches the locking position where they are opposed to and close to each other.
When the lid member 3 is in the locking position, the positioning pin 8 is inserted through the round hole 7a of the pin support member 7 and into the elongated hole 2d provided on the upper surface of the vacuum apparatus body 2. Since the lid member 3 is locked by the positioning pin 8, the both end surfaces 2
The distance d between the end faces of a and 3a is kept below a predetermined length. Further, since the guide member 5 of the vacuum device main body 2 is fitted in the guide groove 6 of the lid member 3, the both end surfaces 2a and 3 are formed.
a is held exactly opposite. Although the guide groove 6 is formed so as to open downward, the lid member 3 does not easily move upward due to the weight of the lid member 3. As a result, the lid member 3 is locked at the locking position.

As shown in FIG. 3, when the lid member 3 is in the locking position, the O-ring 4 attached to the vacuum apparatus body 2 is
It is in close contact with the end surface 3 a of the lid member 3. As described above, since the lid member 3 is locked at the locking position, the parallelism of the contact surfaces where the O-ring 4 contacts the vacuum device body 2 and the lid member 3 is maintained. Since the O-ring 4 is attached to the outer periphery of the square hole 2b of the vacuum device body 2, the vacuum device body 2
The inside is substantially sealed by the vacuum device body 2, the O-ring 4, and the lid member 3.

In this embodiment, the O-ring 4
Since grease is applied to the non-contact surface between the vacuum device main body 2, the lid member 3 and the O-ring 4, the remaining non-contact surface is small.

In this state, when the inside of the vacuum apparatus body 2 is evacuated by a vacuum pump or the like (not shown), the lid member 3
Is sucked toward the vacuum device body 2, so that the lid member 3 and the vacuum device body 2 are further in close contact with each other. As a result, the lid member 3, the vacuum device main body 2, and the O-ring 4 which are slightly left remain.
The non-contact surface between and also comes into contact, and the suction force with respect to the lid member 3 is further increased, so that the two members 2 and 3 come into closer contact with each other. As a result, the inside of the vacuum device main body 2 is sealed as it is when the lid member 3 is closed with a screw or the like, and vacuuming can be performed. After the evacuation is performed, a process such as ion implantation is performed.

When the inside of the vacuum device body 2 is in a vacuum state, the lid member 3 is caused by the difference in atmospheric pressure inside and outside the vacuum device body 2.
Is pressed in the X direction, it is not easy to remove the lid member 3 in the reverse X direction by following the guidance of the guide member 5 and the guide groove 6.

Then, after the processing is completed, the inside of the vacuum apparatus main body 2 is vented, and the atmospheric pressure inside the vacuum apparatus main body 2 becomes substantially equal to the external atmospheric pressure. As a result, the force that presses the lid member 3 in the X direction due to the pressure difference disappears, so that the lid member 3
The adhesion between the vacuum device main body 2 and the vacuum device main body 2 becomes weak. As a result, the lid member 3 can be easily removed from the vacuum apparatus main body 2 after the positioning pin 8 is pulled out from the elongated hole 2d.

As described above, the lid member 3 can be attached and detached by simply removing the positioning pin 8. Since the attachment / detachment of the lid member 3 can be performed extremely easily without using a tool, workability is significantly improved, and the time and labor required for the work can be significantly reduced.

When the air pressure inside the vacuum device body 2 undesirably rises and becomes higher than the outside air pressure during the venting, there is no contact between the vacuum device body 2, the lid member 3 and the O-ring 4. Parts are formed. Since the gas escapes through the non-contact portion, it is possible to suppress an increase in the atmospheric pressure inside the vacuum apparatus main body 2. Normally, it is necessary to provide a safety valve in order to suppress an unnecessary rise in atmospheric pressure, or use a pressure sensor to control the atmospheric pressure inside the vacuum apparatus main body 2 to be substantially equal to the external atmospheric pressure. In such a vacuum device 1, it is possible to suppress an increase in atmospheric pressure without providing them. As a result, the structure of the vacuum device 1 can be simplified.

The distance d between the end faces when the lid member 3 is in the locking position is the O-ring 4 attached to the vacuum apparatus body 2.
By setting such that a slight gap is formed between the cover member 3 and the lid member 3 so as not to affect the vacuuming, it is possible to more reliably suppress the increase in the atmospheric pressure.

In the vacuum apparatus 1 according to this embodiment, the end surface 2a of the vacuum apparatus body 2 and the end surface 3a of the cover member 3 are moved from the locking position to the lid member 3 by the suction force of the atmospheric pressure control means such as a vacuum pump (not shown). Move to a position where and are in close contact. Therefore, the displacement of the vacuum pump during rough evacuation is
The size and weight of the lid member 3 and the shape and O in the vicinity of the joint surface between the lid member 3 and the vacuum apparatus body 2 and the O-ring 4 in the locked position so that the lid member 3 can be moved.
It is set according to the conductance of the joint surface, which is determined by the amount of grease applied to the ring 4, and the like.

Further, when the lid member 3 is in the locking position, O
The larger the contact area of the ring 4 is, the larger the suction force with respect to the lid member 3 is. Therefore, the end surface 3a of the lid member 3 and the vacuum in the locking position have a contact area corresponding to the exhaust amount of the vacuum pump. The distance from the end surface 2a of the device body 2 is set.

Further, in order to assist the movement of the lid member 3, in the vacuum device 1, the lid member 3 and the vacuum device main body 2 are located at substantially the same height, or the lid member 3 is located above the vacuum device main body 2. It is desirable that it is installed so that it is located above.

Further, in the vacuum device 1 according to this embodiment, the guide member 5 is formed so that its cross section is substantially rectangular, and the movement of the lid member 3 in the Y direction is suppressed by its own weight. However, it is not limited to this. For example, the cross section of the guide member 5 is formed in a trapezoidal shape in which the upper side is longer than the lower side, and the guide groove 6 is also formed in accordance with this, so that the movement of the lid member 3 in the Y direction can also be suppressed. it can.

In the present embodiment, the first positioning hole is formed as an elongated hole 2d extending in the X direction so that the lid member 3 can be moved linearly in the X direction while the positioning pin 8 is inserted. However, it is not limited to this. When the vacuum device body 2 and the lid member 3 come into close contact with each other, the positioning pin 8
Any hole can be inserted. For example, when the first positioning hole is a hole having a diameter slightly larger than the diameter of the positioning pin 8 (a hole having substantially the same diameter as the second positioning hole), positioning is performed with the lid member 3 pressed against the vacuum apparatus body 2. It is necessary to insert the pin 8 into the first positioning hole. In this case, the pressed lid member 3 is reversed X due to the repulsive force of the O-ring 4.
I try to move straight in the direction. However, since only the upper portion of the lid member 3 is locked by the positioning pin 8, the lid member 3 is slightly inclined so that the distance between the end surface 2a of the vacuum apparatus body 2 and the end surface 3a of the lid member 3 becomes longer as it goes downward. . Therefore, the degree of adhesion between the O-ring 4 and the lid member 3 is lower in the lower part. Even in this case, the lid member 3 is sucked by vacuuming the vacuum apparatus main body 2 and the end surface 2a of the vacuum apparatus main body 2 and the end surface 3a of the lid member 3 come into close contact with each other. Is obtained.

However, by forming the elongated hole 2d in the vacuum device body 2, it is not necessary to press the lid member 3 against the vacuum device body 2 when inserting the positioning pin 8, and the parallelism of the O-ring 4 is maintained. be able to. As a result, the O-ring 4 and the lid member 3 are easily brought into close contact with each other, so that the suction force of the vacuum pump is not wasted. You can stop.

In this embodiment, the guide member 5 is projectingly provided on the end surface 2a of the vacuum apparatus body 2 and the guide groove 6 is formed on the lid member 3. However, the guide member 5 is provided on the lid member 3. The guide groove 6 may be formed in the vacuum device body 2.
Alternatively, the vacuum device body 2 may be provided with the pin support member 7 and the lid member 3 may be provided with the elongated hole 2d. Further, in the present embodiment, the elongated hole 2d is formed on the upper surface of the vacuum device main body 2, but it is not limited to this and may be formed on the side surface. In this case, the pin support holding member 7 is provided at a position corresponding to the elongated hole 2d.

[0043]

As described above, in the vacuum device according to the present invention, the guide member is projected on the joint surface of one of the container and the sealing member, and the above-mentioned guide member is formed on the other joint surface. The guide member is fitted to form a guide groove for guiding the sealing member to a predetermined position of the opening of the container, and the first positioning is performed on the upper surface or the side surface of either one of the container and the sealing member. A hole is formed, and on the other side, when the joining surfaces of the container and the sealing member are overlapped with each other, the hole extends to the formation position of the first positioning hole, and the second positioning is performed at a position corresponding to the first positioning hole. A pin support member having a hole extending therethrough is provided, and a positioning pin is inserted into the first positioning hole through the second positioning hole of the pin support member.

Therefore, the sealing member can seal the container so that the inside of the vacuum device is in a vacuum state, and when the atmospheric pressure inside the vacuum device is substantially equal to the outside atmospheric pressure, the sealing member is simply attached and detached by the positioning pin. Can be removed. Since the screwing which is conventionally required is not required, the sealing member can be easily attached and detached without using a tool. As a result, the workability in attaching and detaching the sealing member is significantly improved, and the time and labor required for the work can be significantly reduced. Further, when the sealing member is attached, the sealing member can be guided to the correct position by the guide member and the guide groove, so that the workability is further improved.

In addition, when the pressure inside the container becomes undesirably higher than the atmospheric pressure when venting the inside of the vacuum device, the sealing member moves to form a gap between the container and the inside of the container. The pressure of can be reduced to almost the same as the atmospheric pressure. As a result, it is not necessary to provide any other means for lowering the pressure such as providing a safety valve, and the structure of the vacuum device can be simplified.

[Brief description of drawings]

FIG. 1 shows an embodiment of the present invention and is a perspective view showing a vacuum device.

FIG. 2 is a perspective view showing the vacuum device and showing a case where the inside of the vacuum device is sealed.

3 is a view showing the vicinity of a connecting portion of the vacuum device in a state where a lid member of the vacuum device is in a locking position, AA of FIG.
FIG.

FIG. 4 shows a conventional example, and is a perspective view showing a connecting portion of a vacuum device.

FIG. 5 shows another conventional example, and is a perspective view showing a connecting portion of a vacuum device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vacuum device 2 Vacuum device main body (container) 2d oblong hole (first positioning hole) 3 lid member (sealing member) 5 guide member 6 guide groove 7 pin support member 7a round hole (second positioning hole) 8 positioning pin

Claims (1)

[Claims] 1. A hollow container having an opening, a removable sealing member which seals the container by closely contacting the opening of the container with an elastic sealing member, and sealing by the sealing member. In a vacuum device provided with an atmospheric pressure control means for changing the atmospheric pressure inside the stopped container from a state substantially equal to the external atmospheric pressure to a state lower than the external atmospheric pressure, a joint surface of either the container or the sealing member. A guide member is provided on the other side, and a guide groove for fitting the guide member to guide the sealing member to a predetermined position of the opening of the container is formed on the other joint surface. The first positioning hole is formed on the upper surface or the side surface of either one of the sealing member and the sealing member, and on the other side, the first positioning is performed when the joining surfaces of the container and the sealing member are overlapped with each other. Extends to the hole formation position and corresponds to the first positioning hole A pin support member having a second positioning hole extending therethrough, and the first support member is inserted through the second positioning hole of the pin support member.
A vacuum device comprising a positioning pin to be inserted into a positioning hole.