JPH09214012A - Piezoelectric transformer and its manufacturing method - Google Patents

Piezoelectric transformer and its manufacturing method

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Publication number
JPH09214012A
JPH09214012A JP1392496A JP1392496A JPH09214012A JP H09214012 A JPH09214012 A JP H09214012A JP 1392496 A JP1392496 A JP 1392496A JP 1392496 A JP1392496 A JP 1392496A JP H09214012 A JPH09214012 A JP H09214012A
Authority
JP
Japan
Prior art keywords
internal electrodes
electrodes
rectangular plate
piezoelectric transformer
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1392496A
Other languages
Japanese (ja)
Inventor
Yoshiaki Fuda
良明 布田
Yukifumi Katsuno
超史 勝野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP1392496A priority Critical patent/JPH09214012A/en
Publication of JPH09214012A publication Critical patent/JPH09214012A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To improve conversion efficiency of electro-mechanical energy and facilitate matching with load resistance by connecting a plurality of internal electrodes with a common external electrode at first and second side surfaces on alternate electrodes so as to form counter electrodes. SOLUTION: In a piezoelectric transformer using a resonance mode in the length direction of a piezoelectric ceramic rectangular plate 11 a plurality of internal electrodes 12 are provided at a substantially half part of the rectangular plate 11 in the length direction of the same perpendicularly to the length direction. The internal electrodes 12 are connected with a common external electrodes 13 at first and second side surfaces on alternate electrodes so as to form counter electrodes. A remaining half part of the rectangular plate 11 in the length direction includes an end surface electrode or a plurality of internal electrodes 14. The internal electrodes 14 are connected with a common external electrode 15 at first and second side surfaces on alternate electrodes so as to form counter electrodes. Hereby, there is useable a piezoelectric longitudinal effect in the length direction.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、圧電性セラミック
スを用いた圧電トランスに関し、特に圧電セラミックス
矩形板の内部と表面に分極用と入出力用の電極を形成
し、矩形板の長さ方向の共振を利用した圧電トランスに
関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric transformer using piezoelectric ceramics, and in particular, electrodes for polarization and input / output are formed inside and on the surface of a rectangular plate of piezoelectric ceramics, and the electrodes are arranged in the longitudinal direction of the rectangular plate. The present invention relates to a piezoelectric transformer that utilizes resonance.

【0002】[0002]

【従来の技術】携帯電話機やノート型パーソナルコンピ
ュータ等のバッテリー駆動の携帯機器の普及に伴い、乾
電池等のバッテリーを入力電源とし、3VのIC駆動や
6Vのモータ駆動、12Vのバックライト点灯等の入力
電源電圧とは異なる電圧で駆動する電子部品のために、
DCDCコンバータが多用されている。現在、これらの
DCDCコンバータには電磁式トランスが変圧用として
用いられているが、発生電磁ノイズの低減や低消費電力
化、高効率化、機器の小型低背化などの要求により、電
磁式トランスに代わって圧電トランスの実用化の検討が
なされつつある。
2. Description of the Related Art With the spread of battery-powered portable devices such as mobile phones and notebook personal computers, a battery such as a dry battery is used as an input power source, 3V IC drive, 6V motor drive, 12V backlight lighting, etc. For electronic components driven by a voltage different from the input power supply voltage,
DC / DC converters are often used. Currently, electromagnetic transformers are used for these DC / DC converters as transformers, but due to demands such as reduction of generated electromagnetic noise, low power consumption, high efficiency, and small and low profile of equipment, electromagnetic transformers are being used. In place of the above, the practical application of piezoelectric transformers is being studied.

【0003】図3は、従来のローゼンタイプλモード圧
電トランスに用いられている圧電振動子の構造の概略斜
視図である。図3において、圧電セラミックス矩形板3
1には、長さ方向のおよそ半分の部分に厚さ方向に対向
する入力部表面電極32が形成されている。また、圧電
セラミックス矩形板31の入力部表面電極32が形成さ
れた部分とは反対側の長さ方向の端面に出力部表面電極
33が形成されている。圧電セラミックス矩形板31
は、矢印で示すように入力部表面電極32の部分は矩形
板厚さ方向に分極され、出力部表面電極33の間の部分
は、矢印で示すように、圧電セラミックス矩形板の長さ
方向に分極されている。
FIG. 3 is a schematic perspective view of the structure of a piezoelectric vibrator used in a conventional Rosen type λ mode piezoelectric transformer. In FIG. 3, the piezoelectric ceramic rectangular plate 3
1, an input surface electrode 32 is formed at a position approximately half of the length of the input part 1 so as to face the thickness direction. Further, an output surface electrode 33 is formed on the end face in the length direction on the side opposite to the portion where the input surface electrode 32 is formed on the piezoelectric ceramic rectangular plate 31. Piezoelectric ceramic rectangular plate 31
Indicates that the portion of the input surface electrode 32 is polarized in the thickness direction of the rectangular plate as indicated by the arrow, and the portion between the output surface electrodes 33 is aligned in the length direction of the piezoelectric ceramic rectangular plate as indicated by the arrow. It is polarized.

【0004】また、圧電トランスとしては、セラミック
矩形板の振動に影響の少ない振動の節点で支持し、かつ
節点で入出力電極を取り出す必要がある。41,41
は、λモードの振動の節点を示す。図4は図3の圧電振
動子を用いたλモード共振駆動の圧電トランスの動作原
理の説明図であり、図4(a)は圧電セラミックス矩形
板の断面図、図4(b)は圧電セラミックス矩形板が長
さ方向振動の1波長共振モードで振動している場合の変
位分布であり、図4(c)はその時の歪分布を示してい
る。図4(a)において電極32に圧電セラミックス矩
形板の長さ方向の1波長共振モードの共振周波数に等し
い周波数の電圧を印加すると、矩形板は、図4(b)及
び(c)に示すように振動する。この時、電極32と電
極33の間には圧電縦効果により電圧が発生する。ここ
で、電極32に印加した入力電圧と電極33間に発生し
た出力電圧について説明すると、電極32の対向電極間
隔は電極32,33との間隔に比べ十分に小さく、電極
32の面積は電極33の面積より十分に大きいため、入
力側の静電容量は出力側の静電容量に比べ十分大きな値
となる。従って、入力側に低い電圧を印加して振動子を
振動した場合、出力側に入力側電極間隔と入力側電極と
出力側電極間の間隔の比、および入出力側の静電容量の
比に比例した大きな電圧が発生する。
Further, as the piezoelectric transformer, it is necessary to support it at a vibration nodal point which has less influence on the vibration of the ceramic rectangular plate and take out the input / output electrodes at the nodal point. 41, 41
Indicates a node of vibration in the λ mode. 4A and 4B are explanatory views of the operation principle of a λ-mode resonance drive piezoelectric transformer using the piezoelectric vibrator of FIG. 3, FIG. 4A is a cross-sectional view of a piezoelectric ceramic rectangular plate, and FIG. 4B is a piezoelectric ceramic. FIG. 4C is a displacement distribution when the rectangular plate is vibrating in the one-wavelength resonance mode of longitudinal vibration, and FIG. 4C shows the strain distribution at that time. When a voltage having a frequency equal to the resonance frequency of the one-wavelength resonance mode in the length direction of the piezoelectric ceramic rectangular plate is applied to the electrode 32 in FIG. 4 (a), the rectangular plate becomes as shown in FIGS. 4 (b) and 4 (c). Vibrate to. At this time, a voltage is generated between the electrodes 32 and 33 due to the piezoelectric vertical effect. Here, the input voltage applied to the electrode 32 and the output voltage generated between the electrodes 33 will be described. The interval between the counter electrodes of the electrode 32 is sufficiently smaller than the interval between the electrodes 32 and 33, and the area of the electrode 32 is the area of the electrode 33. Since it is sufficiently larger than the area, the capacitance on the input side becomes a value sufficiently larger than the capacitance on the output side. Therefore, when a low voltage is applied to the input side to vibrate the vibrator, the ratio of the input side electrode spacing to the output side and the spacing between the input side electrode and the output side electrode, and the capacitance ratio of the input and output sides are A large proportional voltage is generated.

【0005】[0005]

【発明が解決しようとする課題】図3で説明した圧電ト
ランスでは、入力部表面電極32の部分は矩形板厚み方
向に分極し、長さ方向の共振を振動しているので、矩形
板の振動方向と入力側の電界方向が直交し、いわゆる圧
電横効果が使用されている。圧電トランスの入力部にお
いて、電気的入力エネルギーを機械的振動のエネルギー
に変換する割合は圧電横効果の電気機械結合係数にほぼ
比例する。ここで圧電効果には前述の圧電横効果と振動
方向と電界方向が等しい圧電縦効果が存在し、通常の等
方的なセラミックスにおいては、圧電縦効果の電気機械
結合係数の大きさは圧電横効果の電気機械結合係数の約
二倍である。従って、図3に示した入力側に圧電横効果
を用いた圧電トランスにおいて、電気的入力エネルギー
を機械的振動のエネルギーに交換する割合が圧電縦効果
の場合のほぼ半分しか得られないという問題点が有る。
In the piezoelectric transformer described in FIG. 3, the input surface electrode 32 is polarized in the thickness direction of the rectangular plate and vibrates the resonance in the length direction. The direction and the electric field direction on the input side are orthogonal to each other, and the so-called piezoelectric lateral effect is used. In the input part of the piezoelectric transformer, the rate at which electrical input energy is converted into mechanical vibration energy is approximately proportional to the electromechanical coupling coefficient of the piezoelectric lateral effect. Here, the piezoelectric effect includes the above-described piezoelectric transverse effect and the piezoelectric longitudinal effect in which the vibration direction and the electric field direction are the same. In ordinary isotropic ceramics, the magnitude of the electromechanical coupling coefficient of the piezoelectric longitudinal effect is the piezoelectric transverse effect. It is about twice the electromechanical coupling coefficient of the effect. Therefore, in the piezoelectric transformer using the piezoelectric lateral effect on the input side shown in FIG. 3, the rate of exchanging the electric input energy with the energy of mechanical vibration is only about half that in the case of the piezoelectric longitudinal effect. There is.

【0006】また、図3に示した圧電トランスの出力側
は圧電縦効果を用いているので、機械的振動のエネルギ
ーを電気的出力エネルギーに変換する圧電効果としては
十分であるが、圧電トランスの出力抵抗は負荷抵抗との
インピーダンスマッチングが重要であり、マッチングが
良いとき機械的振動のエネルギーを効率良く電気的出力
エネルギーに変換することが出来る。圧電トランスの出
力抵抗は共振角周波数の逆数と出力部の制動容量の逆数
の積で決まり、図3に示した圧電トランスでは、その出
力抵抗は矩形板の外形寸法にのみ依存し、負荷抵抗が変
化したときインピーダンスマッチングが得られず、出力
効率が低下してしまうという問題点がある。
Also, since the output side of the piezoelectric transformer shown in FIG. 3 uses the piezoelectric longitudinal effect, it is sufficient as a piezoelectric effect for converting the energy of mechanical vibration into electrical output energy, but The impedance matching with the load resistance is important for the output resistance, and when the matching is good, the energy of mechanical vibration can be efficiently converted into electrical output energy. The output resistance of the piezoelectric transformer is determined by the product of the reciprocal of the resonance angular frequency and the reciprocal of the braking capacity of the output section. In the piezoelectric transformer shown in FIG. 3, the output resistance depends only on the external dimensions of the rectangular plate, and the load resistance is When there is a change, impedance matching cannot be obtained, and the output efficiency decreases.

【0007】そこで、本発明の目的は、入力部および出
力部に圧電縦効果を使用して電気機械エネルギーの変換
効率を高め、かつ負荷抵抗とのマッチングが容易にとれ
る構造の圧電トランスおよびその製造方法を提供するこ
とにある。
Therefore, an object of the present invention is to provide a piezoelectric transformer having a structure in which a piezoelectric longitudinal effect is used for an input portion and an output portion to enhance the conversion efficiency of electromechanical energy, and a matching with a load resistance can be easily achieved, and the manufacturing thereof. To provide a method.

【0008】[0008]

【課題を解決するための手段】本発明によれば、圧電性
セラミック矩形板の長さ方向の共振モードを利用した圧
電トランスにおいて、矩形板の長さ方向のほぼ半分の部
分に、長さ方向に直交して、複数の内部電極を有し、該
内部電極は対向電極となるように一層置きに第1の側面
と第2の側面でそれぞれ共通の外部電極に接続し、矩形
板の長さ方向の残り半分の部分は長さ方向に直交して、
端面電極または複数の内部電極を有し、該内部電極は対
向電極となるように一層置きに第1の側面と第2の側面
でそれぞれ共通の外部電極に接続した構造を特徴とする
圧電トランスが得られる。
According to the present invention, in a piezoelectric transformer utilizing the longitudinal resonance mode of a piezoelectric ceramic rectangular plate, the longitudinal direction is provided at approximately half the length of the rectangular plate. Has a plurality of internal electrodes orthogonal to each other, and the internal electrodes are connected to a common external electrode on each of the first side surface and the second side surface so as to be a counter electrode, and the length of the rectangular plate The other half of the direction is orthogonal to the length direction,
A piezoelectric transformer having a structure in which an end face electrode or a plurality of internal electrodes are provided, and the internal electrodes are alternately connected to common external electrodes on the first side surface and the second side surface so as to be opposed electrodes, respectively. can get.

【0009】また、長さ方向に直交する端面電極または
複数の内部電極を有し、該内部電極は対向電極となるよ
うに一層置きに第1の側面と第2の側面でそれぞれ共通
の外部電極に接続する第1の部材と、長さ方向に直交す
る端面電極または複数の内部電極を有し、該内部電極は
対向電極となるように一層置きに第1の側面と第2の側
面でそれぞれ共通の外部電極に接続する第2の部材とを
それぞれの長さ方向の端面で固着する方法を特徴とする
前記圧電トランスの製造方法が得られる。
Further, there is an end face electrode or a plurality of internal electrodes which are orthogonal to the lengthwise direction, and the internal electrodes are arranged in a single layer so as to be opposed electrodes, and the external electrodes common to the first side surface and the second side surface, respectively. And a first member connected to each other and an end face electrode or a plurality of internal electrodes that are orthogonal to the lengthwise direction, and the internal electrodes are placed one by one on the first side surface and the second side surface so as to be opposed electrodes, respectively. A method for manufacturing a piezoelectric transformer is obtained, which is characterized in that a second member connected to a common external electrode is fixed to each end face in the longitudinal direction.

【0010】更に、本発明によれば、圧電性セラミック
矩形板の長さ方向の共振モードを利用した圧電トランス
において、矩形板の長さ方向のほぼ半分の部分に、圧電
トランス入力部として厚さ方向に直交して、複数の内部
電極を有し、該内部電極は対向電極となるように一層置
きに第1の側面と第2の側面でそれぞれ共通の外部電極
に接続し、矩形板の長さ方向の残り半分の部分は、圧電
トランス出力部として厚さ方向に直交して、複数の内部
電極を有し、該内部電極は対向電極となるように一層置
きに第1の側面と第2の側面でそれぞれ共通の外部電極
に接続した構造を特徴とする圧電トランスが得られる。
Further, according to the present invention, in the piezoelectric transformer utilizing the resonance mode in the lengthwise direction of the piezoelectric ceramic rectangular plate, the thickness of the piezoelectric transformer input portion is formed in approximately half the lengthwise direction of the rectangular plate. It has a plurality of internal electrodes orthogonal to the direction, and the internal electrodes are connected to a common external electrode on each of the first side surface and the second side surface so as to be a counter electrode and connected to a common external electrode. The remaining half portion in the vertical direction has a plurality of internal electrodes as a piezoelectric transformer output portion that are orthogonal to the thickness direction, and the internal electrodes are arranged in a single layer so that the internal electrodes are opposite electrodes and the first side surface and the second side electrode. A piezoelectric transformer having a structure in which each side is connected to a common external electrode is obtained.

【0011】更に、本発明によれば、圧電性セラミック
矩形板の長さ方向の共振モードを利用した圧電トランス
において、矩形板の長さ方向のほぼ半分の部分に、圧電
トランス入力部として厚さ方向に直交して、複数の内部
電極を有し、該内部電極は対向電極となるように一層置
きに第1の側面と第2の側面でそれぞれ共通の外部電極
に接続し、矩形板の長さ方向の残り半分の部分は、圧電
トランス出力部として長さ方向に直交して、複数の内部
電極を有し、該内部電極は対向電極となるように一層置
きに第1の側面と第2の側面でそれぞれ共通の外部電極
に接続した構造を特徴とする圧電トランスが得られる。
Further, according to the present invention, in the piezoelectric transformer utilizing the resonance mode in the lengthwise direction of the piezoelectric ceramic rectangular plate, the thickness of the piezoelectric transformer as an input portion is formed in approximately half the lengthwise direction of the rectangular plate. It has a plurality of internal electrodes orthogonal to the direction, and the internal electrodes are connected to a common external electrode on each of the first side surface and the second side surface so as to be a counter electrode and connected to a common external electrode. The remaining half portion in the vertical direction has a plurality of internal electrodes that are orthogonal to the length direction as a piezoelectric transformer output portion, and the internal electrodes are arranged in a single layer so that the internal electrodes are opposite electrodes and the first side surface and the second side surface. A piezoelectric transformer having a structure in which each side is connected to a common external electrode is obtained.

【0012】[0012]

【作用】矩形板の長さ共振モードを利用した圧電トラン
スにおいて、入力電圧の低電圧化のため入力部を矩形板
の厚み方向に直交して対向内部電極を複数積層した構造
は特願平6−280590号等において、すでに提示さ
れている。しかし該構造では入力電圧の電界方向と振動
方向が直交するので、入力側は圧電横効果を利用してい
る。また、入力部に圧電縦効果を利用し、かつ入力電圧
の低電圧化をはかった構造の圧電トランスは実願平6−
9377号において提案されている。しかし該構造の圧
電トランスは圧電板の厚み方向の共振モードを利用した
ものであり、その入力部は厚み方向に直交する複数の対
向内部電極により構成されているので、矩形板の長さ方
向の共振を使用し、長さ方向に直交する複数の対向内部
電極により構成されている本発明とは基本的構造に異な
るものである。本発明の構造のように矩形板の長さ方向
のほぼ半分の部分に、長さ方向に直交して、端面電極ま
たは複数の内部電極を有し、該内部電極は対向電極とな
るように一層置きに第1の側面と第2の側面でそれぞれ
共通の外部電極に接続することにより、長さ方向に圧電
縦効果を利用することが可能となる。
In a piezoelectric transformer using the length resonance mode of a rectangular plate, a structure in which a plurality of opposing internal electrodes are laminated in a direction orthogonal to the thickness direction of the rectangular plate in order to reduce the input voltage is a structure of Japanese Patent Application No. 6-242. -280590 and the like have already been presented. However, in this structure, since the electric field direction of the input voltage and the vibration direction are orthogonal to each other, the piezoelectric lateral effect is used on the input side. In addition, a piezoelectric transformer having a structure in which a piezoelectric vertical effect is used in the input section and an input voltage is lowered is disclosed in Japanese Patent Application No.
9377. However, the piezoelectric transformer of this structure utilizes the resonance mode in the thickness direction of the piezoelectric plate, and since the input part is composed of a plurality of opposed internal electrodes that are orthogonal to the thickness direction, The fundamental structure is different from the present invention which uses resonance and is constituted by a plurality of opposed internal electrodes which are orthogonal to the length direction. As in the structure of the present invention, an end face electrode or a plurality of internal electrodes are provided in a substantially half portion of the rectangular plate in the lengthwise direction at right angles to the lengthwise direction. On the other hand, the piezoelectric vertical effect can be utilized in the length direction by connecting the common external electrodes to the first side surface and the second side surface.

【0013】圧電縦効果を利用した積層型振動子として
は積層型圧電アクチュエータがすでに商品化されてい
る。しかし該アクチュエータは直流電圧や非共振周波数
の交流電圧で使用するのが一般的で、印加電圧により発
生する変位や応力の機械的エネルギーを使用するもので
あり、共振現象を利用して電気的入力エネルギーを振動
の機械的エネルギーに変換し、それをまた電気的エネル
ギーに変換する圧電トランスとは振動の利用形態が全く
異なるものである。さらに、ここで前述の圧電トランス
に於いて負荷抵抗とのインピーダンスマッチングを良く
するため圧電トランスの出力抵抗は共振角周波数の逆数
と出力部の制動容量の逆数の積で決まり、共振角周波数
は振動子の長さ寸法に依存するので、負荷抵抗が変化し
たとき制動容量と共振角周波数を変化させてインピーダ
ンスマッチングをとる必要がある。すなわち振動子の長
さ寸法がインピーダンスマッチングには重要な要素であ
るが、一般に市販されている積層型圧電アクチュエータ
の長さ寸法は20mm程度が限界であり、インピーダン
スマッチングの範囲が狭い。そこで、本発明の製造方法
のように圧電縦効果を利用するように対向内部電極を有
する2個の部材をその長さ方向の端面で固着することで
長さ寸法に選択性が得られ、共振角周波数を調整しイン
ピーダンスマッチングが容易になる。
A laminated piezoelectric actuator has already been commercialized as a laminated vibrator utilizing the piezoelectric longitudinal effect. However, the actuator is generally used with a DC voltage or an AC voltage with a non-resonant frequency, and uses mechanical energy of displacement or stress generated by an applied voltage. The usage mode of vibration is completely different from that of a piezoelectric transformer that converts energy into mechanical energy of vibration and then into electrical energy. Further, here, in order to improve the impedance matching with the load resistance in the above-mentioned piezoelectric transformer, the output resistance of the piezoelectric transformer is determined by the product of the reciprocal of the resonance angular frequency and the reciprocal of the braking capacitance of the output section, and the resonance angular frequency vibrates. Since the length depends on the length of the child, it is necessary to change the damping capacitance and the resonance angular frequency when the load resistance changes to achieve impedance matching. That is, the length of the vibrator is an important factor for impedance matching, but the limit of the length of the commercially available laminated piezoelectric actuator is about 20 mm, and the impedance matching range is narrow. Therefore, as in the manufacturing method of the present invention, two members having opposing internal electrodes are fixed to each other at their end faces in the longitudinal direction so as to utilize the piezoelectric longitudinal effect, thereby obtaining selectivity in the length dimension and resonance. Adjusting the angular frequency facilitates impedance matching.

【0014】[0014]

【発明の実施の形態】本発明の実施の形態について実施
例の項で図面を参照して詳細に説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail in the section of Examples with reference to the drawings.

【0015】[0015]

【実施例】本発明の4つの実施例を以下に順次説明す
る。
EXAMPLES Four examples of the present invention will be sequentially described below.

【0016】(実施例1)矩形板の長さ方向に直交する
複数の内部電極を有する寸法長さ40mm、幅10m
m、厚さ2.0mmのPZT系圧電セラミックス積層体
を試作した。入力部である矩形板の半分の部分は、一層
置きに側面で共通の外部電極に接続する銀−パラジウム
の内部電極がセラミック層の厚み200μmの間隔で1
0層積層し、出力部である矩形板の残り半分の部分は、
一層置きに側面で共通の外部電極に接続する銀−パラジ
ウムの内部電極がセラミック層の厚み0.5mmの間隔
で4層積層した。
(Embodiment 1) Dimensions having a plurality of internal electrodes orthogonal to the length direction of a rectangular plate 40 mm long and 10 m wide
A PZT-based piezoelectric ceramics laminate having a thickness of 2.0 mm and a thickness of 2.0 mm was experimentally manufactured. In the half part of the rectangular plate which is the input part, the silver-palladium internal electrodes connected to the common external electrode on the side surface every other layer are arranged at intervals of 200 μm in the thickness of the ceramic layer.
0 layers are stacked, and the remaining half of the rectangular plate that is the output section is
Four layers of internal electrodes of silver-palladium, which are connected to a common external electrode on the side surface of every other layer, were laminated at intervals of a ceramic layer thickness of 0.5 mm.

【0017】試作した圧電トランスの外観斜視図を図1
に示した。11は圧電セラミック矩形板、12は圧電ト
ランスの入力側の内部電極、13は入力側の側面の外部
電極、14は圧電トランスの出力側の内部電極、15は
出力側の側面の外部電極をそれぞれ示す。
FIG. 1 is an external perspective view of a prototype piezoelectric transformer.
It was shown to. Reference numeral 11 is a piezoelectric ceramic rectangular plate, 12 is an internal electrode on the input side of the piezoelectric transformer, 13 is an external electrode on the side surface on the input side, 14 is an internal electrode on the output side of the piezoelectric transformer, and 15 is an external electrode on the side surface on the output side. Show.

【0018】試作した圧電トランスの1波長共振モード
を利用し、矩形板の長さ方向の端面から四分の一の10
mmの位置を支持して、入力電圧10V、負荷抵抗10
0kΩの時の圧電トランス特性を測定した。測定結果を
同一寸法の図3に示した従来構造と比較して下記の表1
に示した。
By utilizing the one-wavelength resonance mode of the trial-produced piezoelectric transformer, one quarter of the length from the end face of the rectangular plate in the longitudinal direction is used.
mm position, input voltage 10V, load resistance 10
The piezoelectric transformer characteristic at 0 kΩ was measured. Table 1 below compares the measurement results with the conventional structure shown in FIG.
It was shown to.

【0019】[0019]

【表1】 [Table 1]

【0020】表1より本発明の実施例1の圧電トランス
は、昇圧比が従来構造と同程度であるが、効率と発熱の
点で優れていることが明らかである。
From Table 1, it is clear that the piezoelectric transformer of Example 1 of the present invention has a boosting ratio similar to that of the conventional structure, but is excellent in efficiency and heat generation.

【0021】(実施例2)矩形板の長さ方向に直交する
複数の内部電極を有する寸法長さ20mm、幅10m
m、厚さ2.0mmのPZT系圧電セラミックス積層体
を試作した。入力部となる圧電セラミックス積層体は一
層置きに側面で共通の外部電極に接続する銀−パラジウ
ムの内部電極がセラミック層の厚み200μmの間隔で
100層積層した。出力部となる圧電セラミックス積層
体は矩形板の厚さ方向に直交する複数の内部電極を有
し、一層置きに側面で共通の外部電極に接続する銀−パ
ラジウムの内部電極がセラミック層の厚み0.5mmの
間隔で4層積層した。これらの圧電セラミックス積層体
を幅10mm、厚さ2.0mmの端面でエポキシ接着剤
で固着し、寸法長さ40mm、幅10mm、厚さ2.0
mmの圧電トランスを試作した。
(Embodiment 2) Dimensions having a plurality of internal electrodes orthogonal to the length direction of a rectangular plate Length 20 mm, width 10 m
A PZT-based piezoelectric ceramics laminate having a thickness of 2.0 mm and a thickness of 2.0 mm was experimentally manufactured. The piezoelectric ceramic laminate serving as the input part was laminated every 100 layers, and 100 layers of silver-palladium internal electrodes connected to common external electrodes on the side surfaces were laminated at intervals of 200 μm in thickness of the ceramic layers. The piezoelectric ceramic laminate serving as the output portion has a plurality of internal electrodes that are orthogonal to the thickness direction of the rectangular plate, and the silver-palladium internal electrodes connected to the common external electrode on the side surface every other layer have a ceramic layer thickness of 0. Four layers were laminated at intervals of 0.5 mm. These piezoelectric ceramics laminates are fixed at the end face with a width of 10 mm and a thickness of 2.0 mm with an epoxy adhesive, and have a length of 40 mm, a width of 10 mm and a thickness of 2.0.
mm trial production of a piezoelectric transformer.

【0022】試作した圧電トランスの外観斜視図を図2
に示した。21は圧電セラミック矩形板、22は圧電ト
ランスの入力側の内部電極、23は入力側の側面の外部
電極、24は圧電トランスの出力側の内部電極、25は
出力側の側面の外部電極、26は矩形板中央部の接着部
をそれぞれ示す。
FIG. 2 is a perspective view showing the appearance of a prototype piezoelectric transformer.
It was shown to. Reference numeral 21 is a piezoelectric ceramic rectangular plate, 22 is an internal electrode on the input side of the piezoelectric transformer, 23 is an external electrode on the side surface on the input side, 24 is an internal electrode on the output side of the piezoelectric transformer, 25 is an external electrode on the side surface on the output side, 26 Indicates the bonded portion at the center of the rectangular plate.

【0023】試作した圧電トランスの外観斜視図を図2
に示した。試作した圧電トランスの1波長共振モードを
利用し、矩形板の長さ方向の端面から四分の一の10m
mの位置を支持して、入力電圧10V、負荷抵抗50k
Ωの時の圧電トランス特性を測定した。圧電トランス中
央部の接着した部位は振動の腹にあたり、圧電トランス
駆動時の破壊防止のため振動振幅は最大であるが、応力
は最少の位置にあたる。測定結果を同一寸法の図3に示
した従来構造と比較して下記の表2に示した。
FIG. 2 is a perspective view showing the appearance of a prototype piezoelectric transformer.
It was shown to. Using the one-wavelength resonance mode of the prototype piezoelectric transformer, a quarter of 10m from the end face in the length direction of the rectangular plate
Supporting position m, input voltage 10V, load resistance 50k
The piezoelectric transformer characteristic when Ω was measured. The bonded portion of the central portion of the piezoelectric transformer corresponds to the antinode of vibration, and the vibration amplitude is maximum to prevent damage when the piezoelectric transformer is driven, but stress is at the minimum position. The measurement results are shown in Table 2 below in comparison with the conventional structure having the same dimensions as shown in FIG.

【0024】[0024]

【表2】 [Table 2]

【0025】表2より本発明の実施例2の製造方法によ
る圧電トランスは、昇圧比が従来構造と同程度である
が、効率と発熱の点で優れていることが明らかである。
From Table 2, it is apparent that the piezoelectric transformer manufactured by the manufacturing method of Embodiment 2 of the present invention has a step-up ratio comparable to that of the conventional structure, but is excellent in efficiency and heat generation.

【0026】(実施例3)PZT系圧電セラミックス矩
形板の厚さ方向に直交する複数の内部電極を有する寸法
長さ40mm、幅10mm、厚さ1.5mmの圧電トラ
ンスを試作した。入力部である矩形板の半分の部分は一
層置きに側面で共通の外部電極に接続する銀−パラジウ
ムの内部電極をセラミック層の厚み100μmの間隔で
15層積層し、出力部である矩形板の残り半分の部分は
一層置きに側面で共通の外部電極に接続する銀−パラジ
ウムの内部電極をセラミック層の厚み150μmの間隔
で10層積層した。
(Embodiment 3) A PZT piezoelectric ceramic rectangular plate having a plurality of internal electrodes orthogonal to the thickness direction, and having a dimension of 40 mm, a width of 10 mm, and a thickness of 1.5 mm was manufactured as a prototype. The half portion of the rectangular plate which is the input portion is laminated every other layer with 15 layers of silver-palladium internal electrodes which are connected to the common external electrode at the side surfaces at a ceramic layer thickness of 100 μm, and the rectangular portion which is the output portion of the rectangular plate. In the other half, every other layer, ten internal electrodes of silver-palladium, which are connected to a common external electrode on the side surface, were laminated at a ceramic layer thickness of 150 μm.

【0027】試作した圧電トランスの外観斜視図を図1
に示した。
FIG. 1 is an external perspective view of a prototype piezoelectric transformer.
It was shown to.

【0028】試作した圧電トランスの共振周波数と出力
側の制動容量から計算した最適負荷抵抗値を下記の表3
に示した。また、試作した圧電トランスの1波長共振モ
ードを利用し、矩形板の長さ方向の端面から四分の一の
10mmの位置を支持して、入力電圧3V、負荷抵抗5
0Ωの時の圧電トランス特性を測定した。測定結果を同
一寸法の図3に示した従来構造と比較して下記の表3に
示した。
The optimum load resistance value calculated from the resonance frequency of the prototype piezoelectric transformer and the braking capacity on the output side is shown in Table 3 below.
It was shown to. Also, by utilizing the one-wavelength resonance mode of the prototype piezoelectric transformer, a position of a quarter of 10 mm from the end face in the length direction of the rectangular plate is supported, and an input voltage of 3 V and a load resistance of 5
The piezoelectric transformer characteristic at 0Ω was measured. The measurement results are shown in Table 3 below in comparison with the conventional structure having the same dimensions as shown in FIG.

【0029】[0029]

【表3】 [Table 3]

【0030】(実施例4)PZT系圧電セラミックス矩
形板の長さ方向に直交する複数の内部電極と矩形板の厚
さ方向に直交する複数の内部電極を有する寸法長さ50
mm、幅15mm、厚さ2mmの圧電トランスを試作し
た。入力部となる圧電セラミックス積層体の長さ方向の
ほぼ半分には、一層置きに側面で共通の外部電極に接続
する銀−パラジウムの内部電極がセラミック層の厚み2
00μmの間隔で120層積層した。出力部となる長さ
方向残り半分の圧電セラミックス積層体は、一層置きに
側面で共通の外部電極に接続する銀−パラジウムの内部
電極がセラミック層の厚み200μmの間隔で10層積
層した。試作した圧電トランスの外観斜視図を図2に示
した。試作した圧電トランスの共振周波数と出力側の制
動容量から計算した最適負荷抵抗値を表3に示した。ま
た、試作した圧電トランスの1波長共振モードを利用
し、矩形板の長さ方向の端面から四分の一の10mmの
位置を支持して、入力電圧10V、負荷抵抗10Ωの時
の圧電トランス特性を測定した。測定結果を表3に示し
た。
(Embodiment 4) Dimensional length 50 having a plurality of internal electrodes orthogonal to the length direction of a PZT-based piezoelectric ceramic rectangular plate and a plurality of internal electrodes orthogonal to the thickness direction of the rectangular plate.
A piezoelectric transformer having a size of 15 mm, a width of 15 mm, and a thickness of 2 mm was prototyped. In almost half of the length direction of the piezoelectric ceramics laminate serving as the input part, silver-palladium internal electrodes connected to the common external electrodes at the side surfaces are placed every other layer and the thickness of the ceramic layer is 2
120 layers were laminated at intervals of 00 μm. In the remaining half of the piezoelectric ceramics laminate in the length direction, which is the output part, 10 layers of silver-palladium internal electrodes, which are connected to the common external electrodes on the side surfaces every other layer, were laminated at a ceramic layer thickness of 200 μm. An external perspective view of the prototype piezoelectric transformer is shown in FIG. Table 3 shows the optimum load resistance value calculated from the resonance frequency of the prototype piezoelectric transformer and the braking capacitance on the output side. In addition, the one-wavelength resonance mode of the prototype piezoelectric transformer was used to support the position of a quarter of 10 mm from the end face in the length direction of the rectangular plate, and the piezoelectric transformer characteristics when the input voltage was 10 V and the load resistance was 10 Ω. Was measured. Table 3 shows the measurement results.

【0031】表3より本発明の実施例3、4の圧電トラ
ンスは昇圧比が4〜5倍であり、入力電圧が1.5〜3
V程度のバッテリーの入力電圧を6〜15V程度に昇圧
する事が可能で、かつインピーダンスのマッチングが良
好のため90%以上の高効率が達成されている。従来構
造ではインピーダンスのマッチングが得られず、DCD
Cコンバータ用トランスとしての特性は得られないこと
が明らかである。
From Table 3, the piezoelectric transformers of Examples 3 and 4 of the present invention have a step-up ratio of 4-5 times and an input voltage of 1.5-3.
The input voltage of a battery of about V can be boosted to about 6 to 15 V, and the impedance matching is good, so that a high efficiency of 90% or more is achieved. Impedance matching cannot be obtained with the conventional structure, and DCD
It is clear that the characteristics as the transformer for the C converter cannot be obtained.

【0032】[0032]

【発明の効果】以上の説明から明らかなように、本発明
によれば、昇圧比は従来技術と同程度であるが、効率と
発熱の点で優れた圧電トランスおよびその製造方法を提
供することができる。また、本発明によれば、昇圧比は
従来技術の数倍で、効率が90%以上の優れた圧電トラ
ンスを提供することができる。
As is apparent from the above description, according to the present invention, there is provided a piezoelectric transformer having a step-up ratio comparable to that of the prior art, but excellent in efficiency and heat generation, and a manufacturing method thereof. You can Further, according to the present invention, it is possible to provide an excellent piezoelectric transformer having a step-up ratio several times that of the conventional technique and an efficiency of 90% or more.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例1と実施例3に係る圧電トラン
スの斜視図である。
FIG. 1 is a perspective view of a piezoelectric transformer according to first and third embodiments of the present invention.

【図2】本発明の実施例2と実施例4に係る圧電トラン
スの斜視図である。
FIG. 2 is a perspective view of a piezoelectric transformer according to examples 2 and 4 of the present invention.

【図3】従来の1波長共振モードの圧電トランスの概略
斜視図である。
FIG. 3 is a schematic perspective view of a conventional one-wavelength resonance mode piezoelectric transformer.

【図4】図3の圧電セラミック矩形板を示し、(a)は
断面図、(b)は圧電セラミック矩形板が長さ方向1波
長共振モードで振動している場合の変位分布、(c)は
そのときの歪分布である。
FIG. 4 shows the piezoelectric ceramic rectangular plate of FIG. 3, (a) is a cross-sectional view, (b) is a displacement distribution when the piezoelectric ceramic rectangular plate is vibrating in a longitudinal one-wavelength resonance mode, (c) Is the strain distribution at that time.

【符号の説明】[Explanation of symbols]

11 圧電セラミック矩形板 12 入力側の内部電極 13 入力側の側面の外部電極 14 出力側の内部電極 15 出力側の側面の外部電極 21 圧電セラミック矩形板 22 入力側の内部電極 23 入力側の側面の外部電極 24 出力側の内部電極 25 出力側の側面の外部電極 26 矩形板中央部の接着部 31 圧電セラミック矩形板 32 入力部表面電極 33 出力部表面電極 41 振動の節点 11 piezoelectric ceramic rectangular plate 12 internal electrode on the input side 13 external electrode on the side surface on the input side 14 internal electrode on the output side 15 external electrode on the side surface on the output side 21 piezoelectric ceramic rectangular plate 22 internal electrode on the input side 23 side surface on the input side External electrode 24 Internal electrode on the output side 25 External electrode on the side surface on the output side 26 Adhesive part at the center of the rectangular plate 31 Piezoelectric ceramic rectangular plate 32 Input surface electrode 33 Output surface electrode 41 Vibration node

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 圧電性セラミック矩形板の長さ方向の共
振モードを利用した圧電トランスにおいて、矩形板の長
さ方向のほぼ半分の部分に、長さ方向に直交して、複数
の内部電極を有し、該内部電極は対向電極となるように
一層置きに第1の側面と第2の側面でそれぞれ共通の外
部電極に接続し、矩形板の長さ方向の残り半分の部分は
長さ方向に直交して、端面電極または複数の内部電極を
有し、該内部電極は対向電極となるように一層置きに第
1の側面と第2の側面でそれぞれ共通の外部電極に接続
した構造を特徴とする圧電トランス。
1. A piezoelectric transformer using a resonance mode in a length direction of a piezoelectric ceramic rectangular plate, wherein a plurality of internal electrodes are provided at approximately half of the length direction of the rectangular plate in a direction orthogonal to the length direction. The internal electrodes are connected to the common external electrodes on the first side surface and the second side surface in alternate layers so as to be opposed electrodes, and the remaining half of the rectangular plate in the longitudinal direction is in the longitudinal direction. Characterized by having an end face electrode or a plurality of internal electrodes orthogonal to, and alternately connecting the internal electrodes to a common external electrode on the first side surface and the second side surface so as to be opposite electrodes. And a piezoelectric transformer.
【請求項2】 長さ方向に直交する端面電極または複数
の内部電極を有し、該内部電極は対向電極となるように
一層置きに第1の側面と第2の側面でそれぞれ共通の外
部電極に接続する第1の部材と、長さ方向に直交する端
面電極または複数の内部電極を有し、該内部電極は対向
電極となるように一層置きに第1の側面と第2の側面で
それぞれ共通の外部電極に接続する第2の部材とをそれ
ぞれの長さ方向の端面で固着する方法を特徴とする請求
項1記載の圧電トランスの製造方法。
2. An external electrode having an end face electrode or a plurality of internal electrodes which are orthogonal to the lengthwise direction, wherein the internal electrodes are placed in one layer so as to be opposed electrodes and are common to the first side surface and the second side surface, respectively. And a first member connected to each other and an end face electrode or a plurality of internal electrodes that are orthogonal to the lengthwise direction, and the internal electrodes are placed one by one on the first side surface and the second side surface so as to be opposed electrodes, respectively. 2. The method for manufacturing a piezoelectric transformer according to claim 1, further comprising a method of fixing a second member connected to a common external electrode at each end face in the length direction.
【請求項3】 圧電性セラミック矩形板の長さ方向の共
振モードを利用した圧電トランスにおいて、矩形板の長
さ方向のほぼ半分の部分に、圧電トランス入力部として
厚さ方向に直交して、複数の内部電極を有し、該内部電
極は対向電極となるように一層置きに第1の側面と第2
の側面でそれぞれ共通の外部電極に接続し、矩形板の長
さ方向の残り半分の部分は、圧電トランス出力部として
厚さ方向に直交して、複数の内部電極を有し、該内部電
極は対向電極となるように一層置きに第1の側面と第2
の側面でそれぞれ共通の外部電極に接続した構造を特徴
とする圧電トランス。
3. A piezoelectric transformer utilizing a resonance mode in the length direction of a piezoelectric ceramic rectangular plate, wherein a piezoelectric transformer input portion is orthogonal to the thickness direction at approximately half of the rectangular plate in the length direction. A plurality of internal electrodes are provided, and the internal electrodes are arranged in a single layer so as to be opposed electrodes and the first side surface and the second electrode.
Connected to a common external electrode on each side surface, and the remaining half of the rectangular plate in the length direction has a plurality of internal electrodes that are orthogonal to the thickness direction as piezoelectric transformer output parts, and the internal electrodes are The first side surface and the second
A piezoelectric transformer characterized by a structure in which each side is connected to a common external electrode.
【請求項4】 圧電性セラミック矩形板の長さ方向の共
振モードを利用した圧電トランスにおいて、矩形板の長
さ方向のほぼ半分の部分に、圧電トランス入力部として
厚さ方向に直交して、複数の内部電極を有し、該内部電
極は対向電極となるように一層置きに第1の側面と第2
の側面でそれぞれ共通の外部電極に接続し、矩形板の長
さ方向の残り半分の部分は、圧電トランス出力部として
長さ方向に直交して、複数の内部電極を有し、該内部電
極は対向電極となるように一層置きに第1の側面と第2
の側面でそれぞれ共通の外部電極に接続した構造を特徴
とする圧電トランス。
4. A piezoelectric transformer utilizing a resonance mode in a length direction of a piezoelectric ceramic rectangular plate, wherein a piezoelectric transformer input section is orthogonal to the thickness direction at a substantially half portion of the rectangular plate in the length direction, A plurality of internal electrodes are provided, and the internal electrodes are arranged in a single layer so as to be opposed electrodes and the first side surface and the second electrode.
Connected to a common external electrode on each side, and the other half of the rectangular plate in the longitudinal direction has a plurality of internal electrodes that are orthogonal to the piezoelectric transformer output portion in the longitudinal direction. The first side surface and the second
A piezoelectric transformer characterized by a structure in which each side is connected to a common external electrode.
JP1392496A 1996-01-30 1996-01-30 Piezoelectric transformer and its manufacturing method Pending JPH09214012A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7794063B2 (en) 2006-03-15 2010-09-14 Brother Kogyo Kabushiki Kaisha Liquid-droplet jetting head and liquid-droplet jetting apparatus
KR20160134363A (en) * 2015-05-15 2016-11-23 삼성전기주식회사 Piezoelectric transformer and electronic device having the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7794063B2 (en) 2006-03-15 2010-09-14 Brother Kogyo Kabushiki Kaisha Liquid-droplet jetting head and liquid-droplet jetting apparatus
KR20160134363A (en) * 2015-05-15 2016-11-23 삼성전기주식회사 Piezoelectric transformer and electronic device having the same

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