JPH09211333A - Scanning type sample measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the effect of the deterioration of S/N, to enhance the stability of obtained data and to always execute an accurate measurement action by integrating a signal outputted from a variable gain type level varying means according to integration information. SOLUTION: Gain information corresponding to a small range in the midst of a scanning action is read out from a gain information storage means 22 synchronously with the scanning action by a two-dimensional scanning means 5. Based on the gain information, the gain of the variable gain type level varying means is controlled by a gain control means 20. Therefore, the level of a detection signal is adjusted by the gain corresponding to the reflectivity of the range two-dimensionally scanned at present. Besides, the integration information corresponding to the small range in the midst of the scanning action is read out from an integration information storage means 25 synchronously with the scanning action by the scanning means 5. Based on the integration information, the signal outputted from the variable gain type level varying means is integrated by an integration control means 24. Therefore, the S/N is improved by an integration effect by setting an integrating number so as to be increased when the range whose reflectivity is low is two-dimensionally scanned.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning sample measuring device used for measuring surface information of an observation sample.

[0002]

2. Description of the Related Art A scanning confocal microscope is one of scanning sample measuring devices for measuring surface information of an observation sample. A scanning confocal microscope is a detector with a pinhole aperture that illuminates the surface of an observation sample in a point-like manner with a point-like light source and again collects the transmitted light or reflected light from the illuminated sample surface into a point-like shape. It is a microscope in which the image is formed on the image and the density information of the image is obtained by this detector.

FIG. 11 shows the principle configuration of a general scanning confocal microscope. In the same figure, the point light emitted from the point light source 91 passes through the half mirror 92 and is then point-formed on the surface of the observation sample 94 by the objective lens 93 whose aberration is corrected. Then, the sample 94 of this point illumination
The reflected light by the laser beam passes through the objective lens 93 again, is reflected by the half mirror 92, and is condensed at a predetermined position. A pinhole 95 is arranged at this condensing position, and the reflected light that has passed through this pinhole 95 is detected by a photodetector 96.

Such point illumination is performed over the entire measurement area on the surface of the sample 94 by two-dimensional scanning such as raster scanning, and the detection signal of the reflected light by the photodetector 96 is displayed as an image, so that the sample 94 is illuminated. A two-dimensional image of the surface is obtained.

By the way, the entire surface of the sample 94 is not always flat. For example, as shown by the broken line in FIG. 11, the reflected light from the surface of the objective lens 93 at a position deviated from the condensing position is not condensed on the pinhole 95. Therefore, such reflected light cannot pass through the pinhole 95 and is not detected by the photodetector 96. That is,
The scanning confocal microscope can measure only the optical image of the sample surface existing at the converging position of the objective lens 93, that is, the in-focus position, so that an extremely highly accurate image can be acquired.

Here, it is assumed that a sample 94 'having a plurality of observation planes A, B and C having different heights is observed with a conventional scanning confocal microscope as shown in FIG. When attempting to observe such a sample 94 ', when the observation plane A is focused, the optical images on the other observation planes B and C are blurred. Therefore, it is impossible to simultaneously observe the focused images of all the observation planes A, B, and C. Therefore, the observation planes A, B, and C are sequentially focused, the focused images are sequentially stored in the image memory, and these focused images are combined by the arithmetic processing to synthesize all the observation planes A,
There is a technique for obtaining an observation image focused on B and C. However, there is a possibility that a good image may not be obtained by the above-described observation method for a sample in which a measurement target surface has sites having different reflectances.

The applicant of the present application filed for a scanning confocal microscope capable of performing measurement without being affected by the difference in reflectance when there is a portion having different reflectance on the surface to be measured of the sample. A patent application has been filed as Hei 7-35474. The scanning confocal microscope disclosed herein divides the measurement target range of the sample into a plurality of small ranges according to the reflectance of the sample, and stores gain information preset for each of these small ranges as gain information storage. Memorize. Then, in accordance with the scanning operation of at least one of the two-dimensional scanning and the optical axis scanning,
The gain control means reads the gain information corresponding to the small range being scanned from the gain information storage means, and variably controls the gain according to the gain information.

[0008]

However, when the optimum gain information is stored for each small range and the gain is controlled, the following problems will occur. In the above-described observation method, the optimum gain information preset for each of a plurality of portions having different reflectances of the sample surface is stored in the gain information storage means, and when the surface of the sample is measured, the scanning position of the focused light is set. Accordingly, the optimum gain information is read from the gain information storage means and the gain is variably controlled. Therefore, the signal level of the detection signal can be changed by the optimum gain value for each part, regardless of which part of the sample is obtained.

However, as shown in FIG. 13A, when a glass surface having a low reflectance and a mirror surface having a high reflectance are mixed on the surface of the sample, the optimum gain is set for each of a plurality of portions having different reflectances. The detection signal level is as shown in FIG. Even if there is no problem with the detection signal obtained on the mirror surface with a low gain setting, the detection signal obtained on the glass surface has a considerably higher gain setting than that of the mirror surface.
Deterioration of N occurs.

Also, as shown in FIG. 14, when the height position of the sample surface, which has a step on the surface and has a mirror surface on the upper side and a glass surface on the lower side, is measured using a scanning confocal microscope. In the upper stage (mirror surface) of the sample, a sharp peak value can be obtained without any problem in the intensity distribution in the Z direction of the mirror surface as shown in FIG. 15 (a), but in the lower stage (glass surface), a high gain setting is used. As shown in FIG. 15 (b), noise is increased and the sharpness near the in-focus position is lacking, making it impossible to accurately determine the in-focus position.

The present invention has been made in view of the above situation, and reduces the influence of the deterioration of S / N caused by the high gain setting on the low reflectance surface of the sample and enhances the stability of the acquired data. An object of the present invention is to provide a scanning sample measuring device that can always perform highly accurate measurement.

[0012]

In order to achieve the above object, the present invention takes the following measures. According to the present invention, which corresponds to claim 1, an objective optical system for irradiating a sample with focused light, a two-dimensional scanning means for moving and scanning the focused light and the sample relatively in a two-dimensional direction, and The photodetector means receives the reflected light or the transmitted light and outputs a detection signal according to the received light intensity, and the variable gain type level varying means for varying the signal level of the detection signal output from the photodetecting means. In the scanning sample measuring device, the measurement target range of the sample is divided into a plurality of small ranges according to the reflectance of the sample, and gain information corresponding to each reflectance is stored corresponding to each of these small ranges. Gain information storage means, integrated information storage means for storing integrated information corresponding to each reflectance corresponding to each of the small ranges, and small range during scanning in synchronization with the scanning operation by the two-dimensional scanning means. The gain information corresponding to Gain control means for reading the gain information storage means and controlling the gain of the variable gain type level varying means in accordance with the gain information, and corresponding to a small range during scanning in synchronization with the scanning operation by the two-dimensional scanning means. The integrated control means reads out the integrated information from the integrated information storage means, and integrates the output signal from the variable gain type level varying means according to the integrated information.

According to the scanning sample measuring apparatus of the present invention, 2
Gain information corresponding to a small range during scanning is read from the gain information storage means in synchronization with the scanning operation by the dimensional scanning means, and the gain control means controls the gain of the variable gain type level varying means based on the gain information. To do. Therefore, the level of the detection signal is adjusted with a gain according to the reflectance of the range currently two-dimensionally scanned. Further, in synchronization with the scanning operation by the two-dimensional scanning means, the integrated information corresponding to the small range being scanned is read out from the integrated information storage means, and the integrated control means is operated from the variable gain type level varying means based on the integrated information. The output signals of are integrated. Therefore, when the range where the reflectance is low is two-dimensionally scanned, the S / N can be improved by the integration effect by increasing the integration number.

According to a second aspect of the present invention, an objective optical system for irradiating a sample with focused light, and a two-dimensional scanning means for moving and scanning the focused light and the sample relatively in a two-dimensional direction, An optical axis scanning unit that relatively moves and scans the focus position of the objective optical system and the position of the sample in the optical axis direction, and receives a reflected light or a transmitted light of the sample and outputs a detection signal corresponding to the received light intensity. In a scanning sample measuring device provided with a photodetecting means for outputting and a variable gain type level varying means for varying the signal level of the detection signal outputted from the photodetecting means, the measurement target range of the sample is high in the sample. Gain information storage means for storing gain information corresponding to the respective reflectances corresponding to the height regions by dividing the regions into a plurality of regions in the optical axis direction to which the different heights belong, and the heights. Each reflection corresponding to the area And the gain information corresponding to the height region being scanned in synchronization with the scanning operation by the optical axis scanning unit, and the gain thereof. The gain control means for controlling the gain of the variable gain type level varying means according to the information, and the accumulated information storing means for accumulating the accumulated information corresponding to the height region being scanned in synchronization with the scanning operation by the optical axis scanning means. And an integration control means for integrating the output signal from the variable gain type level varying means according to the integration information.

According to the scanning sample measuring apparatus of the present invention, the gain information corresponding to the height region being scanned is read from the gain information storage means in synchronization with the scanning operation by the optical axis scanning means, and the gain information is read. The gain of the variable gain type level changing means is controlled in accordance with. Therefore, the optimum gain adjustment is made for the focused area in the current height area. Further, in synchronization with the scanning operation by the optical axis scanning means, the integrated information corresponding to the height region being scanned is read from the integrated information storage means, and the output signal from the variable gain type level varying means according to the integrated information. Is accumulated. Therefore, if the reflectance of the focused area in the current height area is low, the S / N can be improved by the integration effect by setting the integration number to be large.

According to a third aspect of the present invention, an objective optical system for irradiating a sample with focused light, and a two-dimensional scanning means for moving the focused light and the sample relatively in a two-dimensional direction are provided. Optical axis scanning means for relatively moving and scanning the focal point position of the objective optical system and the position of the sample in the optical axis direction, light quantity adjusting means for adjusting the light quantity of the light with which the sample is irradiated, and reflection of the sample Scanning provided with light detection means for receiving light or transmitted light and outputting a detection signal according to the received light intensity, and variable gain type level changing means for changing the signal level of the detection signal output from this light detection means Type sample measuring device,
A dimming information storage unit that divides the measurement target range of the sample into a plurality of small ranges according to the reflectance of the sample, and stores dimming information corresponding to each of the small ranges corresponding to each of these small ranges. Scanning in synchronization with the scanning operation of at least one of the two-dimensional scanning means and the optical axis scanning means, and the cumulative information storage means in which cumulative information corresponding to each reflectance corresponding to each of the small ranges is stored. Light control information for reading the light control information corresponding to the small range in the medium from the light control information storage means, and controlling the light control means in accordance with the light control information, and the two-dimensional scanning means or the optical axis scanning The integrated information corresponding to the small range being scanned is read from the integrated information storage means in synchronization with the scanning operation of at least one of the means, and the output signal from the variable gain type level variable means is integrated according to the integrated information. Do And a calculation control means.

According to the scanning type sample measuring device according to the third aspect, the light amount is automatically adjusted according to the reflectance of the scanning range, and the integration number is increased in the region of low reflectance. The S / N can be improved by the integration effect.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below. (First Embodiment) FIG. 1 shows the system configuration of a scanning confocal microscope according to the first embodiment. This scanning confocal microscope has a microscope main body 1, a control processing unit 2, a computer 3 and a monitor 4 as main constituent elements. The microscope body 1 includes a two-dimensional scanning mechanism 5 having an X-axis direction scanning galvanometer mirror and a Y-axis direction scanning galvanometer mirror on the observation optical path. Laser light from the laser light source 6 enters the two-dimensional scanning mechanism 5 through the optical element 7 for adjusting the light intensity, the mirror 8 and the half mirror 9. The two-dimensional scanning mechanism 5 is a mechanism for two-dimensionally scanning the laser light from the laser light source 6, and by swinging the galvanomirror in the X-axis direction and the Y-axis direction, the optical path of the spot light with respect to the objective lens 10 is changed in the XY directions. Can be shaken. The optical element 7 is an element that adjusts the intensity of laser light from the laser light source 6, and is a disk-shaped ND filter whose transmittance changes continuously, or a plurality of ND filters having different transmittances.
It can consist of a filter placed on a turret. These are rotated by a motor (not shown), and the intensity of the laser light can be electrically adjusted from the computer 3. The objective lens 10 is attached to the revolver 11. The revolver 11 is a mechanism capable of holding a plurality of objective lenses 10 having different magnifications at the same time and inserting any objective lens into the observation optical path. The stage 12 on which the sample S is placed can be moved up and down in the optical axis direction by an elevating mechanism connected to the handle 28.

Among the plurality of objective lenses 10, one having a desired magnification can be set in the observation optical path of the microscope by switching the revolver 11. Through this set objective lens 10, the spot light from the two-dimensional scanning mechanism 5 can be applied to the sample 11 on the stage S while performing two-dimensional scanning.

The reflected light from the sample S returns to the two-dimensional scanning mechanism 5 through the objective lens 10 and returns from the two-dimensional scanning mechanism 5 to the half mirror 9. Since the half mirror 9 is provided on the emission optical path of the laser light source 6 with respect to the two-dimensional scanning mechanism 5 as described above, the reflected light is guided to the detection system from the sample S obtained via the two-dimensional scanning mechanism 5. It will be. The lens 13 provided in this detection system is a lens that collects the reflected light from the two-dimensional scanning mechanism 5 via the half mirror 9. The pinhole plate 14 is formed by opening a pinhole having a required diameter, and is arranged in front of the light receiving surface of the photodetector 15 and at the focal position of the lens 13 with the pinhole. The photodetector 15 converts the light obtained through the pinhole into an electric signal corresponding to the light amount.

The control processing unit 2 includes a two-dimensional scan drive control circuit 16 for controlling the two-dimensional scan mechanism 5 and a Z scan drive control circuit 17 for controlling a focusing mechanism for moving the stage 12 up and down.
And an image processing unit 18 for processing the signal from the photodetector 15.

The Z scan drive control circuit 17 is a circuit which is controlled by the computer 3 and performs control so as to move the stage 12 in its height direction, that is, the Z axis direction, in units of reference width. The image processing unit 18 includes a counter circuit 19,
A variable gain amplifier circuit 20, a D / A converter 21, a gain data memory 22, an A / D converter 23, an integration control circuit 24, an integrated number data memory 25, and a display memory 26 are provided. The counter circuit 19 receives the timing signal from the two-dimensional scanning drive circuit 16 and, for example, the current position of the spot light from the gain data memory 22 and the integrated number data memory 25 which are 512 × 512 × 8 bits and are set for one frame. The reading of the gain data and the accumulated number of sheets data corresponding to is controlled. The gain data read from the gain data memory 22 is converted into an analog voltage by the D / A converter 21 and then given to the variable gain amplifier circuit 20.
The variable gain amplifier circuit 20 variably controls the detection signal level output from the photodetector 15, that is, the signal level of the analog image signal. The integration control circuit 24 is A /
The image signals digitized by the D converter 23 are integrated based on the integrated number data read from the integrated number data memory 25, for example, a display of the latter stage is made with 512 × 512 × 8 bit configuration for one frame. It is stored in the memory 26 for use.

The computer 3 controls the two-dimensional scan drive control circuit 16, the Z scan drive control circuit 17, and the image processing unit 18, and saves and reproduces image data.
It plays a central role in control processing such as editing. The monitor 4 is an image display terminal of the computer 3, and is used to display necessary information and images.

The operation of the embodiment configured as described above will be described according to the control procedure of the computer 3. Prior to the measurement, the computer 3 executes the control for supporting the initial setting operation of the measurement parameter by the operator. The computer 3 causes the monitor 4 to display the control screen.

FIG. 2 shows an example of the control screen. As shown in the figure, the control screen is provided with a scan start switch 31, a scan stop switch 32, a measurement start switch 33, and various parameter setting switches. As measurement parameters, gain, offset, dimming, and integration values can be set. The measurement parameter setting switch includes a parameter item display area 34 and a set value display area 3
5 and three increase / decrease switches 36a and 36b.

In the first laser scanning for displaying the image of the sample S, since the reflectance of the sample S is unknown, parameters such as gain, offset, dimming, and integration are set to predetermined values or final values. Set to the value when used for. In the example shown in FIG. 2, the gain is set to 1, the offset is set to 0%, the dimming is set to 100%, and the integration is not performed.

The observer selects the scanning start switch 31 to perform the first laser scanning. Computer 3
When it is detected that the scan start switch 31 is selected,
Image capture is executed based on the measurement parameters displayed in the set value display area 35 of FIG. That is, the computer 3 gives a drive instruction to the two-dimensional scan drive control circuit 16 by a scan start signal. as a result,
A drive signal is output from the two-dimensional scanning drive control circuit 16 to the two-dimensional scanning mechanism 5, whereby the sample S is two-dimensionally scanned with laser light. The analog image signal of the sample S detected by the photodetector 15 during the two-dimensional scanning is level-adjusted by the variable gain amplifier circuit 20, and then the A / D converter 2
It is digitized in 3 and passed through the integration control circuit 24 and stored in the display memory 26 once. Two for one screen of sample S
When the two-dimensional image is stored in the display memory 26, the two-dimensional image is read by the computer 3 and displayed on the monitor 4. While the scan start switch 31 is selected, laser scanning is repeatedly executed and the image of the sample S is displayed on the monitor 4.

If an image of the in-focus sample cannot be obtained, the handle 28 of the microscope main body 1 is rotated to move the stage 12 up and down to adjust the focus position. After the focus position adjustment is completed, the image brightness is adjusted. This brightness adjustment is performed by changing each parameter value of gain, offset, and dimming. The parameter values are changed using the control screen shown in FIG. Increase / decrease switch (triangle mark part) 36a for each parameter
Or you can change the value by clicking 36b. For example, when the right triangle increase / decrease switch 36b is clicked once, the numerical value increases, and the left triangle increase / decrease switch 36b increases.
It is controlled so that the numerical value becomes smaller when a is clicked once. The same applies to other increase / decrease switches. The computer 3 sequentially supplies the values of the parameters set on the control screen to the corresponding portions (gain data memory 22, integrated number data memory, light amount data memory (not shown), etc.) and reflects them on the display image.

Here, the gain indicates a rate at which the electric signal from the photodetector 15 is amplified, and the larger the value is, the larger the electric signal is amplified. The offset is the photodetector 15
The ratio of adjusting the DC component of the electric signal from is shown. The larger the value, the smaller the DC component of the electric signal. The dimming indicates the ratio of adjusting the light amount of the laser applied to the sample 11, and the larger the value, the larger the laser light amount.

There are various parameter adjustment orders, but the dimming value is maximized when the image is dark. That is, the amount of laser light is maximized. If the image is still dark, increase the gain value. On the contrary, if the image is bright even if the gain is minimum, the value of dimming is reduced. Then, when the originally black portion becomes whitish, the offset is increased to adjust it to black. Since the integration takes a longer time to display an image as the number of integrations increases, it is not often used for a sample having a high reflectance. However, if the sample has a low reflectance and there is too much noise, use it.
Check the number of times that the noise reduction effect by integration is effective. In any case, the operator decides whether to use the integration.

By the above processing, the image quality adjustment parameters for the entire image of the sample S are determined. Next, the image of the sample S is divided into small ranges, and various parameters for image quality adjustment are determined for each range.

FIG. 4 shows the flow of processing for dividing the image of the sample S into small areas and determining various image quality adjustment parameters for each area. In order to obtain an optimum two-dimensional scan image of the sample S, a region for each region of the sample S having different reflectance is displayed in a state of being displayed on the two-dimensional scan image monitor 4 of the sample S as initialization control for initializing parameter information. Control to specify and the optimum gain for each specified area,
The control for setting the dimming, offset, the presence / absence of integration, and the number of sheets is executed.

First, control is performed to specify a region for each portion of the sample S having different reflectance. On the monitor 4, as shown in FIG. 5, a frame PM for designating an area is displayed so as to be superimposed on the two-dimensional image IM, and a control information column CM is displayed. FIG. 6 shows specific display contents of the control information column CM. As shown in FIG. 6, in the control information column CM, the designated gain value and the presence or absence of integration (and the number of integrations) are associated with each of the plurality of divided areas.
, An offset value, and a dimming value are respectively displayed in an area 41 and switches 42a, 42 for inputting those values.
b is provided.

Here, it is assumed that the sample S has a glass surface and a mirror surface as shown in FIG. 13, and its two-dimensional image is displayed on the monitor 4 as shown in FIG. In order to specify the area, the operator operates the input section (not shown) to align the upper left edge P1 of the frame PM with the upper left edge of the glass surface image and the lower right edge P2 with the lower right edge of the glass surface image. The computer 3 attaches a region number (first region) to the region designated by the coordinate values P1 and P2, and stores the data together with the region number as data representing the coordinate values P1 and P2 of the first region. Similarly, the operator continues to select the upper left end P1 of the frame PM.
Is aligned with the upper left edge of the mirror image, and the lower right edge P2 is aligned with the lower right edge of the mirror image to be determined. Then, the computer 3 stores the coordinate values of P1 and P2 as data representing the second area. Since the operator can arbitrarily set the size of the frame PM, the size of the frame can be changed according to the size of the region.

When the processing for dividing the area according to the reflectance of the sample S is completed as described above, the setting of parameters for each divided area is accepted. Inputting the numerical values of the parameters using the display screen in which the control information column CM shown in FIG. 6 is displayed is the same as in the above case. That is, the switch 36a, 36b for each parameter item is associated with each area number divided in the above processing in the control information column CM.
Is displayed, the selection of the area in which parameter input is to be performed is accepted. Input of parameters is accepted for the selected area. This is done by clicking the switch 36a or 36b of the corresponding parameter and inputting a numerical value.

When the input is completed for all the parameter items in a certain area, the same processing is executed for the next area, and finally the input of the numerical values for all the parameter items is accepted for all the areas. As a result, the data set as shown in FIG. 3 is acquired.
The computer 3 uses these parameters as a gain data memory 22, an integrated number data memory 25, a light quantity data memory,
The offset data is transferred to the pixel position corresponding to each pixel of the two-dimensional image IM and stored in the offset data memory.

The dimming information is transferred to a light quantity data memory provided in a control unit (not shown) that controls the optical element 7, and the offset information is adjusted in image quality provided at the output stage of the photodetector 15. Transfer to the offset data memory arranged in the unit.

The actual measurement is executed after the above initial setting is completed. When the measurement start button 33 is selected on the control screen of FIG. 2, the computer 3 gives a drive instruction to the two-dimensional scan drive control circuit 16. As a result, the two-dimensional scanning of the sample 11 is started. The analog image signal detected by the photodetector 15 during the two-dimensional scanning is level-adjusted by the variable gain amplification circuit 20, then digitized by the A / D converter 23, processed by the integration control circuit, and displayed. It is stored in the memory 26 at a pixel position corresponding to the current position of the spot light.

At this time, the counter circuit 19 receives the timing signal from the two-dimensional scan drive control circuit 16, and the gain data and the gain data corresponding to the current position of the spot light from the gain data memory 22 and the integrated number data memory 25, respectively. The number data is being read. The gain of the variable gain amplifier circuit 20 is variably set by the analog voltage converted by the D / A converter 21 according to the change of the gain data. For example, at the beginning of scanning in the X direction, the variable gain amplifier circuit 2
The gain value “5” is set to 0. The analog image signal obtained on the glass surface is level-controlled according to this gain value "5". Then, when the scanning position in the X direction reaches the mirror surface from the glass surface, the gain data to be read changes and the gain value “1” is set in the variable gain amplifier circuit 20. The analog image signal obtained on the mirror surface is level-controlled according to this gain value "1". Then, when the scanning position in the X direction reaches the end of the mirror surface and returns to the start of the glass surface, the read gain data changes and the gain value "5" is set in the variable gain amplifier circuit 20 again.

Thereafter, the gain of the variable gain amplifying circuit 20 is similarly changed to the gain value for the designated area with the movement of the scanning position. Therefore, for the analog image signal obtained on the glass surface, the optimum gain value "5" for this glass surface is obtained.
The analog image signal obtained on the mirror surface is level-controlled according to the optimum gain value "1" for this mirror surface.

Similarly to the gain, the integrated number data is read out as a value corresponding to the designated area, and the integration control circuit 24 receives this and generates an image as follows. First, when the cumulative number data for a pixel is received, the cumulative number data for the pixel is compared with the current frame number internally counted at that time. If the accumulated number data ≧ the current number of frames, the pixel position data corresponding to the position of the current spot light one frame before in the display memory 26 and the current data digitized by the A / D converter 23 are calculated. The averaged values are averaged and stored in the pixel position corresponding to the current position of the spot light in the display memory 26. On the other hand, if the accumulated number data <the current number of frames, no calculation is performed and the current data digitized by the A / D converter 23 is unnecessary at that pixel position and therefore is not written in the display memory 26. .

For example, in the setting example shown in FIG. 6, since the integrated number data read out while scanning the glass surface is "3", the average value of the scanning from the first frame to the third frame is the display memory 26. Memorized in. On the other hand, on the mirror surface, the cumulative number data read during scanning is “1”.
Therefore, only the data of the first frame is stored in the display memory 26 as it is (the display memory 2 immediately before the start of scanning).
The data of 6 is initialized to 0). Then, the data of the second and subsequent frames are discarded.

By doing so, for the pixels in the area for which the cumulative number is designated, the designated number of cumulative image data remains in the display memory 26. By performing integration, even if a high gain is set, for example, when scanning a glass surface, the influence of deterioration of S / N can be reduced and the stability of acquired data can be improved.

Further, with respect to the light quantity and the offset, similar processing is executed based on the data stored in the light quantity data memory and the offset data memory. As described above, according to the present embodiment, in the initial setting prior to the surface measurement of the sample S, the sample S having a plurality of portions having different reflectances is used.
The area is set for each part of, and the optimum gain value is set for each area, and the number of times of integration is specified, and the control data (gain value, number of times of integration) corresponding to the scanning position during two-dimensional scanning is set. , Light amount value, offset value), the gain value of the variable gain amplifier circuit 20 is changed, the light amount control value in the optical element 7 is changed, the offset value of the detection signal is changed, and integration is performed in an arbitrary area. I try to give an effect.

Therefore, according to the present embodiment, when the surface of the sample S having a plurality of portions having different reflectances is two-dimensionally scanned and the measurement is performed, the image signal is always obtained at any portion of the sample S. It is variably controlled by the optimum gain value, and the influence of the deterioration of S / N in the high gain setting area is also reduced by integration, the stability of the acquired data is improved, and it is possible to always obtain highly accurate measurement results. Becomes

(Second Embodiment) FIG. 7 shows the system configuration of a scanning confocal microscope according to the second embodiment. In the figure, the same parts as those in FIG. 1 are designated by the same reference numerals and detailed description thereof will be omitted.

In this embodiment, the Z scan drive control circuit 1 is used.
7'drives the revolver 11 in the optical axis direction. The Z-scan drive control circuit 17 'is a circuit that is controlled by the computer 3 and drives the revolver 11 to move in the optical axis direction, that is, the Z-axis direction in units of reference width. The revolver 11 is attached to the Z scan drive control circuit 17 '.
The function of incrementing the count by one each time movement control is performed in the axial direction by the reference width, and this count value are performed by the image processing unit 1.
It has the function given to 8 '.

The image processing unit 18 'includes a variable gain amplifier circuit 20, a D / A converter 21, a gain data memory 22,
An A / D converter 23, an integration control circuit 24 ', an integrated number data memory 25, a display memory 26, and a height data memory 27.

The integration control circuit 24 'includes the A / D converter 23.
The image signals from are integrated based on the integrated number data. Further, the integration processing result of the integration control circuit 24 'indicates that the level of the image signal at the spot light position in the current frame is higher than that of the image signal at the current spot light position one frame before, It is stored in the display memory 26 as storage information of the pixel position. The computer 3 performs comparison between image signal level frames and writing control. By such writing control of the output of the integration control circuit 24 ', it is possible to add images having different height positions.

The height data memory 27 counts information in the Z scanning direction, specifically, how many times the revolver 11 has moved from the Z scanning drive control circuit 17 'to the pixel position corresponding to the current position of the spot light. When the image signal at the current spot light position has a higher level than the image signal at the current spot light position one frame before, the count value at that time is It is updated and stored as the storage information of the position. That is, the revolver movement count value at each pixel position when the maximum brightness data is shown at that pixel position is stored as information in the Z scanning direction at that pixel position (this information indicates the height position). .

The operation of the second embodiment configured as described above will be described according to the control procedure of the computer 3. Prior to the measurement, the computer 3 executes the control for supporting the initial setting operation of the measurement parameter by the operator. FIG. 8 shows a configuration example of a control screen for such initial setting operation support control. Only the necessary functions are displayed in the figure, and the same functions as those in the control screen of FIG. 2 are given the same numbers.

Movement switch 41 indicated by a triangle mark
By clicking a and 41b, the revolver 11 can be moved in the optical axis direction to adjust the focus. This is a function realized by the movement switches 41a and 41b and the computer 3 which has detected the number of clicks, by issuing a drive instruction to the Z scan drive control circuit 17 '. A number indicating the position of the revolver 11 is displayed in the display area 42 sandwiched between the movement switches 41a and 41b. Here, when the numerical value = 0, the revolver 11 is set at the position farthest from the sample. By clicking the movement switches 41a and 41b, the numerical value of the display area 42 is changed.

Since the reflectance and height of the sample S'are unknown, the parameters such as gain, offset, dimming, integration, and levitation drive set on the control screen are set to predetermined initial values or used at the end. It is the value when it was done. Specifically, gain = 1 time, offset = 0%, dimming = 100
%, Cumulative number of sheets = none, and Revo drive = 1200.

When the scan start button 31 is selected, the sample S'is laser-scanned on the basis of such parameters, and the image of the sample 'is displayed on the monitor 4 by the same operation as in the first embodiment. . If a focused sample image cannot be obtained, the handle 28 of the microscope body 1 is rotated to move the stage 12 up and down to adjust the focus position.

The sample S ′ assumed in this embodiment is
As shown in FIG. 10, the sample has a step and the reflectance of each step surface is different. Of the two step surfaces formed by the step, the lower step surface is made of a glass surface and the upper step surface is made of a mirror surface. Therefore, the area is not set within one screen as in the first embodiment, but the area is set for each area in the optical axis direction.

The stepped surface of the sample S'was in focus 2
With the three-dimensional scan image displayed on the monitor 4, a region in the optical axis direction is set for each portion of the sample S ′ having different reflectance.
In addition, an optimum gain value, the presence / absence of integration, and the number of sheets are set for each setting area, and control is performed to set parameters for dimming and offset.

At this time, the control information column CM 'displayed on the monitor 4 so as to be superimposed on the two-dimensional scanning image is used. FIG. 9 shows a configuration example of the control information column CM '. As shown in FIG. 9, the moving range of the revolver 11 is input and displayed corresponding to each of the plurality of areas in the Z direction, the designated gain value of each area, the presence or absence of integration, and the number of integration are input and displayed, and further other parameters are set. Buttons and a display area for inputting and displaying are provided.

The operation for the sample S'in FIG. 10 will be described. First, in order to display the mirror surface portion of the sample S ′,
The objective lens 10 is focused on the mirror surface portion. Revolver 11 by changing the number of the Revo drive until it comes into focus.
To move. When the objective lens 10 is focused, the revolver 11 is moved up and down by the revolver drive movement switch 41a or 41b using the control screen shown in FIG.

The computer 3 gives a drive instruction to the Z scan drive control circuit 17 'based on the number of clicks of the movement switch 41a or 41b, and the Z scan drive control circuit 17'.
The revolver 11 is moved in the height direction, that is, the Z-axis direction by the reference width unit. At this time, since the two-dimensional scanning is still performed, the two-dimensional image of the sample S'corresponding to the position in the Z-axis direction at that time is displayed on the monitor 4.

When the operator comes to a position where the mirror surface portion of the sample S'is in focus, the operator sets the numerical values of the parameters (gain, integrated number, offset, dimming) as in the first embodiment. To do. In this embodiment, the numerical value set using the control screen of FIG. 8 is the control information column CM ′.
Is reflected in. For example, if the user clicks on the first area of the control information column CM 'and then clicks on the gain and integrated number input section, the numerical values of the parameters set on the control screen of FIG. 8 are set and displayed.

The setting of the Z range will be described. Since the sample S ′ to be measured has a plurality of measuring surfaces having different heights, it is necessary to set the measuring range of the entire sample and the position for switching the numerical values of the parameters within the measuring range. Since the highest position of the measurement start position is the mirror surface part, ideally the measurement should be started from this position. However, in reality, it is necessary to consider an error such as a variation in the revolving drive position reproducibility. Therefore, generally, a margin is provided and measurement is performed from a position slightly higher than the mirror surface portion.

After setting the numerical values of the respective parameters on the mirror surface portion, the position of the revolver 11 is slightly raised. Since this position (200) is the measurement start position (upper limit), the Revo upper limit set button 43 is clicked in FIG. Since this position becomes the start position of the Z range of the first area at the same time, the input section (start position input section) on the left side of the Z range in the control information column CM 'is clicked.

In response to such an operation input, the computer 3 stores the data of the Z range starting position = 200 for the first area, and stores the Z area of the Z area corresponding to the first area in the control information column CM '. The character "200" is displayed in the start position input section as the numerical value for the drive.

Next, the operator again operates the movement switches 41a and 41b by using the control screen of FIG. 8 to bring the revolver 11 closer to the sample S ', but before the focus is on the glass surface, the parameter of You have to change the numbers. This change may be made at any height between the mirror surface and the glass surface. It is expected that it will take time on the glass surface because the number of integrations will increase. Therefore, here, switching is performed near the glass surface. That is, revolver 1
When 1 is moved and the image on the glass surface starts to be displayed, the revolver 11 is moved slightly in the opposite direction to set the position as the switching position. Therefore, in the control information column CM ', the input section (end position input section) on the right side of the Z range corresponding to the first area is clicked. At this position, it is assumed that the numerical value of the Revo drive is 400.

The computer 3 detects that the end position input portion of the Z range of the first area is clicked, and the first
The data of the end position of the Z range = 400 is stored for the area No., and the numerical value of "400" is displayed as the value of the revo drive in the end position input section of the Z range of the first area of the control information column CM '.

Furthermore, this position (numerical value = 400) is the second
Since it corresponds to the start position of the Z range of the area, the computer 3 similarly stores 400 as the start position data of the Z range of the second area, and the Z range of the second area of the control information column CM ′. The numerical value of “400” is displayed as the numerical value of the evo drive in the start position input section of.

The revolver 11 is again operated by the same operation as above.
Close to the glass surface. Objective lens 10 on the glass surface
When the focus is on, each parameter (gain, integrated number, offset, dimming) is set in the same manner as the mirror surface part. Then, when the glass surface is moved a little too far, the REVO lower limit button 44 is selected to set this position as the measurement end position (lower limit). This position (450) is also the end position of the second area.

With the above, the initial setting of the measurement parameter is completed, and the computer 3 stores the parameter in the gain data memory by associating the previously set gain value with the accumulated information in each area in the Z direction thus set. 22 and the integrated number data memory 25, and stores the Z range data together with the address data of each area.

After the parameters are optimally set in each area as described above, the actual measurement is performed. The measurement is started by selecting the measurement start button 33. When the computer 3 detects that the measurement start button 33 has been selected on the control screen, the Z scan drive control circuit 1
A drive instruction is given to 7 ', and the revolver 11 is set to the start position (= 200) of the first area. In addition, a drive instruction is given to the two-dimensional scan drive control circuit 16, and a drive signal is output from the two-dimensional scan drive control circuit 16 to the two-dimensional scan mechanism 5.
Thereby, the sample S ′ is two-dimensionally scanned with the laser light.

The analog image signal of the sample S ′ detected by the photodetector 15 during the two-dimensional scanning is level-adjusted by the variable gain amplifier circuit 20, then digitized by the A / D converter 23, and integrated. Display memory 26 processed by the control circuit
Is stored in the pixel position corresponding to the current position of the spot light. The two-dimensional image is displayed on the monitor 4, and when the two-dimensional image is obtained, the computer 3 subsequently gives a drive instruction to the Z scan drive control circuit 17 'and lowers the revolver 11 step by step.

In obtaining a two-dimensional image, the control data is read from the gain data memory 22 and the integrated number data memory 25 based on the count value in the Z direction given from the Z scanning drive control circuit 17 '. In the area, the gain value “1” and the integrated number “1” are read out,
The same value continues to be output until the end position (= 400) of the area. That is, the level of the analog image signal obtained in the first area is controlled according to the optimum gain value "1" for this area.

When the revolver 11 reaches the start position of the second area, the gain data memory 22 is set in the second area.
And the gain value “5” and the accumulated number “3” are read from the accumulated number data memory 25, and the end position (= 45) of the second area is read.
The same value continues to be output until 0). That is, the level of the analog image signal obtained in the second area is controlled according to the optimum gain value "5" for this area.

Then, the integration control circuit 24 performs integration processing based on the control data from the integration number data memory 25 over the entire area in the Z direction, while performing image processing at the current spot light position one frame before. If the level of the image signal at the current position of the spot light is higher, it is stored in the display memory 26 as the storage information of the pixel position. By doing so, it is possible to add images having different height positions. The height data memory 27 is
Information about the Z scanning direction is given to the pixel position corresponding to the current position of the spot light, specifically, the Z scanning drive control circuit 17 ′ gives a value of the number of times that the revolver 11 has moved, and one frame is given. When the image signal at the current spot light position has a higher level than the image signal at the previous current spot light position, the value of the number of times is updated, stored and stored as the storage information of the pixel position. That is, the value of the number of times of revolver movement at each pixel position when there is data indicating the maximum brightness at that pixel position is stored as information in the Z scanning direction (this information indicates the height position).

When the revolver 11 reaches the end position (= 450) of the second area, the computer 3 ends the measurement control and returns to the standby state. By doing this, the images finally obtained are the additions of the images that were in focus at different height positions, and for the pixels in the Z direction area for which integration was specified, the specified number of images is added. The image data thus created remains in the display memory 26.
By performing integration, even if a high gain is set, for example, when scanning a glass surface, the influence of deterioration of S / N can be reduced and the stability of acquired data can be improved. As the height data, since the revolver movement count value corresponding to the data showing the maximum brightness at each pixel position is stored as the information in the Z scanning direction, similarly to the height data, when the glass surface is scanned, a high gain is obtained. S / N even if set to
If the influence of the deterioration of is reduced, the determination error when comparing the level of the image data is reduced, and the stability of the data can be improved.

As described above, according to this embodiment, in the initial setting prior to the measurement, a region is set in the Z-axis direction for each stepped portion of the sample S'having a plurality of portions having different reflectances and a step. Then, the optimum gain value is set for each of these areas and the integration is designated, and two-dimensional scanning is performed while moving the revolver 11 in the Z-axis direction to generate control data corresponding to the Z scanning position. Thus, the gain value of the variable gain amplifier circuit 20 is changed so that the integrating effect can be given to an arbitrary region.

Therefore, when measuring a sample S'having a plurality of portions having different reflectances and a step, the image signal is always variably controlled by the gain value at any portion and the step of the sample S, and a high gain is obtained. The influence of the deterioration of the S / N of the set portion is also reduced by the integration, the stability of the acquired data is enhanced, and it becomes possible to always obtain a highly accurate measurement result.

The present invention is not limited to the above embodiment. For example, in the above-described embodiment, the sample is moved in the Z direction by moving the revolver 11 up and down, but it may be moved by moving the stage 12 side up and down. Alternatively, both the revolver 11 and the stage 12 may be moved up and down at the same time. Further, in the above-described embodiment, the case where the operator performs the initial setting operation and the computer 3 supports the setting operation is described. However, even if the computer 3 automatically performs all the initial setting control. good. Others, computer 3
The initial setting control means and the control contents thereof, the measurement control procedure and the control contents thereof, the configuration of the microscope main body, the configuration of the control processing unit, etc. can be modified and implemented without departing from the scope of the present invention.

The present invention has been described above based on the embodiments, but includes the following inventions. (1) An objective optical system for irradiating a sample with focused light, a two-dimensional scanning means for moving and scanning the focused light and the sample relatively in a two-dimensional direction, a focal position of the objective optical system, and the sample Optical axis scanning means for moving and scanning the position relative to the optical axis in the optical axis direction, offset adjusting means for adjusting the offset of the detection signal, and received reflected light or transmitted light of the sample according to the received light intensity. A light detecting means for outputting a detection signal,
Variable gain type level varying means for varying the signal level of the detection signal output from the light detecting means, and the measurement target range of the sample is divided into a plurality of small ranges according to the reflectance of the sample, and each of these small ranges is divided. Offset information storage means that stores offset information corresponding to each reflectance corresponding to, integrated information storage means that stores integrated information corresponding to each reflectance corresponding to each small range, Offset information corresponding to a small range during scanning is read from the offset information storage means in synchronization with the scanning operation of at least one of the two-dimensional scanning means and the optical axis scanning means, and the offset adjustment is performed according to the offset information. Offset control means for controlling the means and at least one of the two-dimensional scanning means and the optical axis scanning means in a small range during scanning in synchronization with the scanning operation. Reading the accumulated information response from the integration-information storage unit, and a scanning sample measurement apparatus having an integrating control means for integrating the output signal from the variable gain level varying means in accordance with the accumulated information. (2) A method of setting control data such as gain, integrated number of sheets, dimming, and offset of the scanning sample measuring device, the step of two-dimensionally scanning the sample to display the sample image, and the displayed sample image. Dividing into small ranges according to reflectance, storing pixel addresses of the divided small ranges, setting the control data according to reflectance for the small ranges, and storing the set control data And a step of: (3) A method of setting control data such as gain, integrated number of sheets, dimming, and offset of the scanning sample measuring device by moving the focus position of the objective optical system and the sample position relatively in the optical axis direction. And a step of focusing on each measurement surface having a different height position of the sample, and displaying a sample image on which each measurement surface is focused, and setting control data according to the reflectance for each sample image. Including a step, a step of setting a height area including each of the measurement surfaces, and a step of storing control data of the measurement surface included in the area corresponding to the data of the height area. Become.

[0079]

According to the present invention, even when there is a portion having different reflectance on the surface to be measured of the sample, the influence of the deterioration of S / N caused by the high gain setting on the low reflectance surface of the sample is reduced. Thus, it is possible to provide a scanning sample measuring device capable of improving the stability of acquired data and always performing highly accurate measurement.

[Brief description of drawings]

FIG. 1 is a system configuration diagram of a scanning confocal microscope according to a first embodiment.

FIG. 2 is a diagram showing a configuration example of a control screen in the first embodiment.

FIG. 3 is a diagram showing a setting state of various parameters.

FIG. 4 is a flowchart showing a parameter initial setting operation in the first embodiment.

5 is a diagram showing a display example on a monitor in the system shown in FIG.

FIG. 6 is a diagram showing an example of display contents of control information.

FIG. 7 is a system configuration diagram of a scanning confocal microscope according to a second embodiment.

FIG. 8 is a diagram showing a configuration example of a control screen according to the second embodiment.

FIG. 9 is a diagram showing an example of setting a region in the Z direction.

FIG. 10 is a diagram showing an example of a sample having steps and surfaces having different reflectances.

FIG. 11 is a schematic configuration diagram of a general scanning confocal microscope.

FIG. 12 is a diagram showing an example of a sample having surfaces with different steps.

FIG. 13 is a diagram showing an example of a sample having surfaces having different reflectances and a detection signal level thereof.

FIG. 14 is a diagram showing an example of a sample having steps and surfaces having different reflectances.

FIG. 15 is a diagram showing a detection signal level of an image obtained by laser scanning a surface having different reflectance.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Microscope main body 2 ... Control processing part 3 ... Computer 4 ... Monitor 5 ... Two-dimensional scanning mechanism 16 ... Two-dimensional scanning drive control circuit 17 ... Z scanning drive control circuit 18 ... Image processing unit 20 ... Variable gain amplification circuit 22 ... Gain Data memory 24 ... Accumulation control circuit 25 Accumulation number data memory 26 ... Display memory.

Claims (3)

[Claims] 1. An objective optical system for irradiating a sample with focused light, two-dimensional scanning means for moving and scanning the focused light and the sample relatively in a two-dimensional direction, and reflected light or transmitted light of the sample. Scanning sample measuring device provided with a photo-detecting means for receiving light and outputting a detection signal according to the intensity of the received light, and a variable gain type level varying means for varying the signal level of the detection signal output from the photo-detecting means. In the above, a measurement range of the sample is divided into a plurality of small ranges according to the reflectance of the sample, and gain information storage means stores gain information corresponding to the respective reflectances corresponding to the respective small ranges. Integrated information storage means for storing integrated information corresponding to the respective reflectances corresponding to the respective small ranges, and gain information corresponding to the small ranges being scanned in synchronization with the scanning operation by the two-dimensional scanning means. The gain information memory hand Gain control means for reading from the stage and controlling the gain of the variable gain type level varying means according to the gain information; and integrated information corresponding to a small range during scanning in synchronization with the scanning operation by the two-dimensional scanning means. Is read from the integrated information storage means, and integrated control means for integrating the output signal from the variable gain type level varying means according to the integrated information is provided. 2. An objective optical system for irradiating a sample with focused light, a two-dimensional scanning means for moving and scanning the focused light and the sample relatively in a two-dimensional direction, and a focus position of the objective optical system. An optical axis scanning means for moving and scanning the position of the sample in the optical axis direction relative to each other; and a light detecting means for receiving the reflected light or the transmitted light of the sample and outputting a detection signal according to the received light intensity, In a scanning sample measuring device provided with a variable gain type level varying means for varying the signal level of a detection signal output from a light detecting means, a measuring object range of the sample is a light to which each surface having different heights belongs. Gain information storage means that is divided into a plurality of regions in the axial direction and stores gain information corresponding to respective reflectances corresponding to these height regions, and respective reflections corresponding to the height regions. Accumulated information according to the rate is stored And a gain information corresponding to a height region being scanned in synchronization with the scanning operation by the optical axis scanning means, and the variable gain type according to the gain information. Gain control means for controlling the gain of the level varying means, and integrated information corresponding to the height region being scanned in synchronization with the scanning operation by the optical axis scanning means is read from the integrated information storage means, and the integrated information is stored in the integrated information. Accordingly, a scanning sample measuring device is provided, which further comprises integration control means for integrating the output signals from the variable gain level variation means. 3. An objective optical system for irradiating a sample with focused light, a two-dimensional scanning means for moving and scanning the focused light and the sample relatively in a two-dimensional direction, and a focus position of the objective optical system. An optical axis scanning unit that relatively moves and scans the position of the sample in the optical axis direction, a light amount adjustment unit that adjusts the light amount of the light that irradiates the sample, and receives the reflected light or the transmitted light of the sample. In a scanning sample measuring device equipped with a photodetector that outputs a detection signal according to the intensity of received light and a variable gain type level varying device that varies the signal level of the detection signal output from the photodetector, A dimming information storage unit in which the measurement range is divided into a plurality of small ranges according to the reflectance of the sample, and dimming information corresponding to each of the small ranges is stored, and Each reflectance corresponding to each small range The dimming information corresponding to a small range being scanned is synchronized with the scanning operation of at least one of the two-dimensional scanning unit and the optical axis scanning unit, and the dimming information corresponding to a small range is stored. A light amount control unit that reads out from the information storage unit and controls the light amount adjustment unit according to the dimming information, and a scanning operation of at least one of the two-dimensional scanning unit and the optical axis scanning unit, is being scanned. A scan comprising: integration information corresponding to a small range, read from the integration information storage means, and integration control means for integrating the output signal from the variable gain type level varying means according to the integration information. Type sample measuring device.