JPH09196816A - Inspecting device for liquid crystal display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to inspect the quality of image in the more stabilized temperature condition by controlling the temperature of a liquid crystal display at the time of inspection to be at a constant temperature. SOLUTION: A temperature control unit 6 drives for control a cold air supplying unit 2 and a hot air supplying unit 3 on the basis of a result of comparison between the temperature detected by a temperature detecting unit 5 and a previously set temperature. As a result, temperature inside a mixing chamber 4, namely, the temperature of the gaseous mixture, which is obtained by mixing the cold air supplied from the cold air supplying unit 2 and the hot air supplied from the hot air supplying unit 3, is controlled for feedback so as to be at the set temperature. Furthermore, a total flow of the hot air and the cold air to be supplied to the mixing chamber 4 is adjusted at a constant value by an input reversing function of a flow control circuit 18 and a flow compensating function of a speed controller 23. A constant flow of the gaseous mixture, of which temperature is adjusted at a set temperature level in the mixing chamber 4, is fed from the mixing chamber 4 to a blowing nozzle 1.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device inspection apparatus suitable for use in inspecting an image quality defect in an inspection process of a liquid crystal display device such as a liquid crystal panel.

[0002]

2. Description of the Related Art Conventionally, as one of the methods for inspecting an image defect of a liquid crystal display device after assembly, a display screen of the liquid crystal display device is driven so that an optical image of the liquid crystal display device is solid-state such as CCD (charge coupled device). It is known that an image is captured by an image sensor, the captured image is displayed on the screen of a cathode ray tube (CRT), and the image is visually inspected.

In an inspection device for a liquid crystal display device used in this type of method, a liquid crystal panel as an object to be inspected is placed on an inspection stage and driven, and light emitted from a light source is applied to the liquid crystal panel. At this time, the optical image obtained by passing through the liquid crystal panel is captured by a television camera having a solid-state image sensor such as CCD, and the captured image is enlarged and displayed on a display device such as CRT. Thereby, the inspector visually inspects the image quality defect of the liquid crystal panel based on the image displayed on the display device.

By the way, it is customary to carry out a functional test of electronic components including a liquid crystal display device under a predetermined temperature condition. For example, the following two methods are mainly used when performing a functional inspection of electronic components in a high temperature environment. One is called a chamber method, which is a type in which an object to be inspected is put in a sealed space kept in a high temperature environment to perform a function inspection, and a typical one is an aging device. The other is a method of directly heating an object to be inspected via a heat transfer medium, which is a type in which an object to be inspected is placed on a plate heated by a heater or the like to perform a functional inspection.

[0005]

However, in the inspection of the liquid crystal display device, the light from the light source is applied to the liquid crystal display device, and the optical image obtained by passing through the liquid crystal display device is the object of inspection. If the liquid crystal display device is placed in a closed space like the former chamber type, it becomes impossible to allow light to enter the liquid crystal display device or to take out an optical image from the liquid crystal display device. For these reasons, the chamber system cannot be adopted for the inspection device of the liquid crystal display device. In the latter method using a heating plate, it is necessary to make a hole in the plate in order to secure an optical axis for irradiating the liquid crystal display device with light. Then, the contact area between the plate and the liquid crystal display device is reduced by the amount of the hole for the optical axis, and the heat transfer efficiency between the two is reduced. As a result, the temperature of the liquid crystal display device becomes unstable with respect to the set temperature or temperature unevenness occurs, and it becomes difficult to inspect the image quality at a substantially constant temperature. Furthermore, during image quality inspection, a large amount of light is emitted from the light source to the liquid crystal display device, so the temperature of the liquid crystal display device rises above the set temperature due to the heat of the light. It was a big bottleneck to do.

The present invention has been made to solve the above problems, and an object of the present invention is to provide an inspection device for a liquid crystal display device capable of performing image quality inspection under more stable temperature conditions. Especially.

[0007]

SUMMARY OF THE INVENTION The present invention has been made to achieve the above object, and irradiates a liquid crystal display device set at an inspection position with light from a light source and transmits the liquid crystal display device. In an inspection device of a liquid crystal display device for inspecting an image quality defect based on the optical image obtained by the above, a blowout nozzle having an air outlet arranged toward an inspection position, and a cool air and a warm air supplied from a cold air supply unit. The mixing chamber that mixes the warm air supplied from the air supply unit and sends the mixed air to the blowing nozzle, the temperature detector that detects the temperature in this mixing chamber, and the detected temperature detected by this temperature detector And a preset temperature setting, and a temperature control unit for driving and controlling the cold air supply unit and the warm air supply unit based on the comparison result. You have me.

In the liquid crystal display inspecting device having the above structure, when the temperature detected by the temperature detector is lower than the preset temperature, the temperature control unit raises the temperature in the mixing chamber. When the detected temperature is higher than the set temperature, conversely, the cold air supply unit and the warm air supply unit are drive-controlled, and the cold air supply unit and the warm air supply unit are drive-controlled in order to lower the temperature in the mixing chamber. As a result, the temperature in the mixing chamber is adjusted to match the set temperature, and the adjusted air, that is, the mixed air mixed in the chamber, is sent to the blowout nozzle. Further, the mixed air sent to the blowing nozzle is blown to the liquid crystal display device set at the inspection position. As a result, in the image quality inspection of the liquid crystal display device, the temperature of the liquid crystal display device depends on the temperature of the mixed air blown from the blowing nozzle even if a large amount of light is emitted from the light source.

[0009]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a functional block diagram showing an embodiment of an inspection device for a liquid crystal display device according to the present invention, which shows the configuration of a temperature control system for controlling the temperature of the liquid crystal display device during an image quality inspection. . The illustrated temperature control system is mainly composed of an outlet nozzle 1, a cold air supply unit 2, a warm air supply unit 3, a mixing chamber 4, a temperature detector 5, and a temperature control unit 6.
And a sequencer 7.

The blow-out nozzle 1 blows a mixed air (described later) adjusted to a predetermined temperature onto a liquid crystal display device as an object to be inspected, and an air outlet 8 opened at the tip of the nozzle is also shown in FIG. Panel 9 as a liquid crystal display device
It is arranged toward. A warming heater 10 is attached to the blowing nozzle 1. This heat insulation heater 10
Is for suppressing the temperature fluctuation of the mixed air when the high temperature mixed air flows in the blowout nozzle 1.

The cold air supply unit 2 generates cold air,
This is supplied to the mixing chamber 4, and has a cold air generator (Colder: product name) 11 and an electropneumatic valve 12. The cold air generator 11 generates cold air in proportion to the flow rate of the input air supplied through the electropneumatic valve 12, and as shown in FIG. 2, the input air from the electropneumatic valve 12 is taken into the main body portion. Then, the cold air converted into the cold air is supplied to the mixing chamber 4, and at the same time, the air not converted into the cold air is exhausted from the rear end opening. The electropneumatic valve 12 adjusts the pressure of the input air supplied from the compressed air generation source 13 via the regulator 14 by the opening / closing operation of the valve body, so that the cold air generator 1
It controls the flow rate of the input air to 1. The electropneumatic valve 12 adjusts the air pressure according to the drive current supplied from the temperature control unit 6, and outputs the air having a flow rate proportional to the drive current to the cold air generator 11 as the input air.

The hot air supply unit 3 produces hot air,
This is supplied to the miking chamber 4, and has a warm air generator 15 having a built-in heater and an electropneumatic valve 16. The warm air generator 15 heats the input air supplied through the electropneumatic valve 16 with a heater to generate hot air. As shown in FIG. 2, the input air from the electropneumatic valve 16 is supplied to the hot air generator 15. The hot air produced by the heat of the heater is introduced into the main body portion and is supplied to the mixing chamber 4. The electropneumatic valve 16 adjusts the pressure of the input air supplied from the compressed air generation source 13 common to the cold air supply unit 2 through the regulator 14 by the opening / closing operation of the valve element, so that the warm air generator 15 can be supplied. It controls the flow rate of input air. Also in the case of the electropneumatic valve 16, similarly to the above, the air pressure is adjusted according to the drive current supplied from the temperature control unit 6, and the flow rate of air proportional to the drive current is used as the input air to generate the warm air generator 15. Output to.

As shown in FIG. 2, the mixing chamber 4 has a housing structure in which, for example, a heat insulating wall is assembled in a box shape, and one side wall portion has a cold air / warm air intake port (not shown). Is provided, and the cold air generator 11 and the warm air generator 15 are connected to the intake port. A blowout port (not shown) for the mixed air is provided on the side wall of the chamber on the opposite side, and the blowout nozzle 1 is connected to the blowout port. The mixing chamber 1 mixes the cold air supplied from the cold air supply unit 2 and the warm air supplied from the warm air supply unit 3 inside (inside the chamber) and sends the mixed air to the blowout nozzle 1. .

The temperature detector 5 is the mixing chamber 4
It is for detecting the internal temperature, and its output signal (temperature detection signal) is given to the temperature control unit 6. In the present embodiment, as shown in FIG. 2, a thermocouple having a temperature detecting function is adopted as the temperature detector 5, and the temperature detector 5 is inserted and arranged in the mixing chamber 4 via the warm air generator 15. ing. Further, the output signal line 5a drawn from the temperature detector 5 is connected to the temperature control unit 6 so that the temperature inside the missing chamber 4 (the temperature of the mixed air) can be read on the temperature control unit 6 side.

The temperature control unit 6 supplies a drive current to the electric power control circuit 17 for controlling the electric power supplied to the heater incorporated in the warm air generator 15 and the electropneumatic valves 12, 16 to control the air flow rate. And a two-output type temperature controller 19 for applying a control current to the power control circuit 17 and the flow rate control circuit 18 according to the output signal from the temperature detector 5.

Of these, if the temperature controller 19 supplies a control current of, for example, 4 to 20 mA, the power control circuit 17 supplies power proportional to the control current to the hot air generator 1.
5 is given to the heater. Therefore, the temperature controller 19
The larger the control current given from the hot air generator 15
The heating effect in the is increased, and hot air of higher temperature is generated. On the other hand, if the flow controller 18 is supplied with a control current of, for example, 4 to 20 mA from the temperature controller 19, the flow control circuit 18 has a drive current (4 to 4) proportional to the control current.
20 mA) is supplied to the cold air side electropneumatic valve 12, and at the same time, a drive current (20 to 4 mA) obtained by reversing the control current is supplied to the warm air side electropneumatic valve 16.

On the other hand, the temperature controller 19 outputs the output signal from the temperature detector 5 (in this case, the thermoelectromotive force generated by the thermocouple).
The detected temperature obtained by the above is compared with the set temperature communicated from the sequencer 7, and a control current is output to the power control circuit 17 and the flow rate control circuit 18 based on the comparison result.

The sequencer 7 performs a control operation according to a control program given in advance. In the temperature control system, the control computer 20 which controls the entire inspection apparatus transmits a transmission interface (RS-232C).
Information of the set temperature communicated via the temperature controller 19
To the heat retention heater 1 via the voltage switching circuit 21.
It functions to control the drive voltage applied to 0. The control computer 20 has a digital switch 22 that allows an inspector (operator) to arbitrarily set a temperature for image quality inspection.
It also has a manual setting function such as the above, a function of storing the temperature condition for each type of the liquid crystal display device, and a function of changing the temperature condition for each type as necessary. In addition, as the ready-made control devices, the one in which the temperature controller 19 is integrally incorporated in the sequencer 7 is also commercially available, and if such a device is used, it is not necessary to configure both of them independently.

Further, in the temperature control system of this embodiment, the electropneumatic valves 12, 16 are drive-controlled as described above as means for controlling the flow rate of the mixed air sent from the mixing chamber 4 to the blowout nozzle 1 at a constant level. In addition to the flow rate control circuit 18, a speed controller (speed control valve etc.) 23 is provided on the conduit of the warm air supply unit 3. The speed controller 23 is for eliminating the difference in the flow rate of the output air from the warm air / cold air supply units 2 and 3 due to the difference in the tube resistance or the like, and is a tube between the hot air generator 15 and the electropneumatic valve 16. It is built in the middle of the road.

Here, on the cold air supply unit 2 side, even if a drive current of the same level is applied to each of the electropneumatic valves 12, 16, the difference in conduit resistance between them, especially the air flow in the cold air generator 11, is increased. Due to the exhaust, the flow rate of air supplied to the mixing chamber 4 becomes smaller than that on the warm air supply unit 3 side. So the speed controller 23
In consideration of the air loss on the cold air supply unit 2 side, the air flow rate on the warm air supply unit 3 side is appropriately adjusted by the opening of the throttle valve.

As a result, when a drive current of the same level is applied to the electropneumatic valves 12 and 16, almost the same amount of air is also output from the hot / cold air supply units 2 and 3. When different drive currents are applied to the electropneumatic valves 12 and 16 by the input reversing operation of the flow rate control circuit 18, the warm air / cold air supply units 2 and 3 are correspondingly supplied.
The flow rate of air from is changed. as a result,
Since the total flow rate of the warm air / cool air supplied to the mixing chamber 4 is always adjusted to be constant, it is possible to control the flow rate of the mixed air sent from the mixing chamber 4 to the blowout nozzle 1 to be constant.

Now, various characteristics of the temperature control system having the above structure will be described. FIG. 3 shows the input / output characteristics of the warm air supply unit, in which the vertical axis represents the output flow rate of the warm air generator 15 and the horizontal axis represents the drive current of the electropneumatic valve 16. The input / output data shown in the figure is for the speed controller 2
3 is data measured without adjusting the flow rate. In FIG. 3, the output flow rate of the warm air generator 15 is the electropneumatic valve 16
The driving current is increased in proportion to the driving current and the driving current is about 120 l / min at 12 mA. And the drive current is 12
In the range of up to 20 mA, the output flow rate is saturated at around 120 l / min. This is due to the piping resistance in the warm air supply unit 3.

FIG. 4 shows the input / output characteristics of the cold air generator 11, where the vertical axis represents the output flow rate from the cold air generator 11 and the horizontal axis represents the input flow rate to the cold air generator 11. In FIG. 4, the input flow rate and the output flow rate are in a proportional relationship, and the input flow rate is 40 l / min, the output flow rate is about 20 l / min, the input flow rate is 140 l / min, and the output flow rate is about 80 l / mi.
It is n. That is, in the cold air generator 11, an output flow rate of approximately 50 to 60% of the input flow rate is obtained.

FIG. 5 shows the input / output characteristics of the cold air supply unit 2. The vertical axis shows the output flow rate of the cold air generator 11, and the horizontal axis shows the drive current of the electropneumatic valve 12. In FIG. 5, the output flow rate of the cold air generator 11 increases in a manner proportional to the drive current of the electropneumatic valve 12, and the valve drive current is 8 m.
At A, the output flow rate is about 60 l / min and the valve drive current is 1
The output flow rate is about 90 l / min at 4 mA.

FIG. 6 shows the output characteristic of the mixing chamber 4 with respect to the valve drive current. The vertical axis shows the chamber output flow rate, and the horizontal axis shows the drive current of each electropneumatic valve 12, 16. In addition, among the valve drive currents indicated on the horizontal axis, the upper side shows the drive current of the warm air side electropneumatic valve 16, and the lower side shows the drive current of the cold air side electropneumatic valve 12. In FIG. 6, when the drive currents of the electropneumatic valves 12 and 16 are input and inverted between 4 and 20 mA, the output flow rate of the mixing chamber 4 at each current level changes to around 100 l / min. From this, it can be seen that the output flow rate from the mixing chamber 4 is controlled to be substantially constant regardless of the combination of the valve drive currents whose inputs are inverted by the flow rate control circuit 18.

FIG. 7 shows the output characteristics of the mixing chamber 4 with respect to the set temperature. The vertical axis represents the chamber output flow rate and the horizontal axis represents the temperature. In FIG. 7, when the set temperature is changed between −10 and + 50 ° C., the output flow rate of the mixing chamber 4 changes in the vicinity of 100 l / min. From this, it is understood that the output flow rate from the mixing chamber 4 is controlled to be substantially constant regardless of the set temperature in the temperature control system.

Next, a procedure for actually performing an image quality inspection using the inspection device for a liquid crystal display device having the above temperature control system will be described. First, when inspecting the image quality of a liquid crystal display device, an inspection position provided on the inspection device, for example, a predetermined position on a transparent inspection stage or a plate having a hole for an optical axis is used as a liquid crystal display device as an inspection object. The liquid crystal panel 9 is set, and the liquid crystal panel 9 is connected to a device board for driving liquid crystal and driven. Next, a light source (not shown) is turned on to irradiate the liquid crystal panel 9 with light, and an optical image obtained by passing through the liquid crystal panel 9 is captured in, for example, a video camera (not shown) and enlarged displayed on the display screen. Alternatively, a lens system or a mirror system is used to display the image on the screen, and an inspector visually inspects the image quality of the liquid crystal panel 9 based on the displayed image.

When inspecting the image quality of such a liquid crystal display device, the above-mentioned temperature control system operates and functions as follows.
First, the control computer 20 calls a set temperature from a memory or the like according to the type of liquid crystal display device to be inspected, and communicates the called set temperature to the sequencer 7. In response to this, the sequencer 7 communicates the set temperature instructed by the control computer 20 to the temperature controller 19. As a result, the set temperature given by the sequencer 7 is set in the temperature controller 19 as the target temperature.

When the target temperature is set in this way, the temperature controller 19 reads the temperature in the mixing chamber 4 via the temperature detector 5, and the detected temperature detected by the temperature detector 5 and the sequencer 7 give it. And the set temperature (target temperature).

At this time, when it is determined that the detected temperature is lower than the set temperature, the temperature controller 19 causes the power control circuit 17 to operate.
Flow rate control circuit 18 while increasing the control current supplied to
The control current given to is reduced. As a result, the heater power supplied from the power control circuit 17 to the warm air generator 15 is increased, so that the heating action of the heating heater in the warm air generator 15 is enhanced. Further, as the drive current supplied from the flow rate control circuit 18 to the cold air side electro-pneumatic valve 12 becomes smaller, the drive current supplied to the warm air side electro-pneumatic valve 16 becomes larger, and the hot air generator 15 causes the missing. The flow rate of warm air supplied to the chamber 4 is increased. as a result,
The hot air heated to a higher temperature is supplied to the mixing chamber 4 in a larger amount.

On the other hand, when it is determined that the detected temperature is higher than the set temperature, the temperature controller 19 decreases the control current supplied to the power control circuit 17 and increases the control current supplied to the flow rate control circuit 18. As a result, the heater power supplied from the power control circuit 17 to the warm air generator 15 is reduced, so that the heating action of the heating heater in the warm air generator 15 is suppressed. At this time, if the temperature difference is extremely large, the supply of heater power may be stopped. Further, since the drive current supplied from the flow rate control circuit 18 to the warm air side electropneumatic valve 16 is reduced, the cold air side electropneumatic valve 1 is reduced.
The driving current given to 2 increases and the cold air generator 11
The flow rate of cold air supplied to the mixing chamber 4 is increased. As a result, a larger amount of cold air is supplied to the mixing chamber 4.

As described above, the temperature control unit 6 drives the cold air supply unit 2 and the hot air supply unit 3 based on the comparison result of the detected temperature detected by the temperature detector 5 and the preset temperature. Control. as a result,
Feedback control is performed so that the temperature in the mixing chamber 4, that is, the temperature of the mixed air obtained by mixing the cool air supplied from the cold air supply unit 2 and the hot air supplied from the warm air supply unit 3 matches the set temperature (target temperature). To be done. Further, in the present temperature control system, the input inverting function of the flow rate control circuit 18 and the speed controller 2 are used as described above.
Since the total flow rate of the hot air / cool air supplied to the Mishinkin chamber 4 is adjusted to be constant by the flow rate correction function of No. 3, the mixed air adjusted to the set temperature level in the chamber blows out from the mixing chamber 4. It is sent to 1 at a constant flow rate.

As a result, the mixed air of the set temperature level is blown from the blow-out port 8 of the blow-out nozzle 1 toward the liquid crystal panel 9 set at the inspection position at a constant flow rate.
Therefore, in the image quality inspection of the liquid crystal display device, even when a large amount of light is emitted from the light source to the liquid crystal panel 9, the temperature of the liquid crystal panel 9 depends on the temperature of the mixed air blown from the blowout nozzle 1. . As a result, at the time of inspection, the liquid crystal panel 9 is maintained at a constant temperature by blowing the mixed air, so that the image quality inspection of the liquid crystal panel 9 can be performed under more stable temperature conditions. Further, since the temperature control unit 6 drives and controls the cold air supply unit 2 and the hot air supply unit 3 so that the temperature in the mixing chamber 4 becomes the set temperature, a desired temperature condition is selected from a wide temperature range, By changing the set temperature in the temperature control unit 6 according to the selected temperature condition, the image quality inspection of the liquid crystal panel 9 can be performed at a constant temperature under the desired temperature condition.

In order to suppress the temperature rise of the liquid crystal panel 9 due to the irradiation of light from the light source, the mixing chamber 4
Even if the flow rate of the mixed air sent from the blowout nozzle 1 to the blowout nozzle 1 is not controlled to be constant, it can be realized only by defining the lower limit flow rate. However, it is better to control the flow rate of the mixed air to be constant as in the present embodiment. The temperature of the liquid crystal display panel 9 at that time can be more stabilized, which is extremely preferable.

FIG. 8 shows the temperature characteristics in the mixing chamber 4, where the vertical axis represents temperature and the horizontal axis represents time. In FIG. 8, as the temperature characteristic on the warm air side, the set temperature (shown by the solid line in the figure) is 5 within the range of +30 to + 80 ° C.
The set temperature is +2 as the chamber temperature (indicated by the broken line in the figure) characteristics when changed in ° C and the temperature characteristics on the cold air side.
It also shows the chamber temperature characteristics when the temperature is changed by 5 ° C in the range of 5 to -10 ° C. It can be seen from FIG. 8 that the chamber temperature accurately follows the set temperature on both the warm air side and the cold air side. Also, although it does not appear in the figure, in the actual data,
The stability of each temperature level on the warm air side was within ± 1 ° C, and the stability of each temperature level on the cold air side was within ± 3 ° C. The difference between the set temperature and the chamber temperature becomes larger as the set temperature becomes higher and lower, but such a temperature difference can be corrected by correcting the set temperature at the time of inspection in consideration of the difference at each temperature level. It can be resolved.

[0036]

As described above, according to the present invention, the temperature control unit controls the cold air supply unit and the hot air supply based on the result of comparison between the temperature detected by the temperature detector and the preset temperature. By controlling the drive of the unit, the temperature of the mixed air mixed in the mixing chamber is adjusted to the set temperature level, and the adjusted mixed air is blown to the liquid crystal display device through the blowing nozzle. At this time, even if a large amount of light is emitted from the light source, the liquid crystal display device can be held in a constant temperature state corresponding to the set temperature. As a result, the image quality inspection of the liquid crystal display device can be performed under a more stable temperature condition, so that the reliability of the inspection result under various temperature conditions can be improved.

[Brief description of drawings]

FIG. 1 is a functional block diagram showing an embodiment of an inspection device for a liquid crystal display device according to the present invention.

FIG. 2 is a perspective view of a main part of a temperature control system in the embodiment.

FIG. 3 is a diagram showing input / output characteristics of a warm air supply unit.

FIG. 4 is a diagram showing input / output characteristics of a cold air generator.

FIG. 5 is a diagram showing input / output characteristics of a cold air supply unit.

FIG. 6 is a diagram showing an output characteristic of a mixing chamber with respect to a valve drive current.

FIG. 7 is a diagram showing an output characteristic of a mixing chamber with respect to a set temperature.

FIG. 8 is a diagram showing temperature characteristics in the mixing chamber.

[Explanation of symbols]

1 Blowing Nozzle 2 Cold Air Supply Unit 3 Hot Air Supply Unit 4 Mixing Chamber 5 Temperature Detector 6
Temperature control unit 7 Sequencer 8 Air outlet 9 Liquid crystal panel (liquid crystal display) 11 Cold air generator 12 Electropneumatic valve 13 Compressed air source 15 Hot air generator 16 Electropneumatic valve 17 Power control circuit 18 Flow control circuit 19 Temperature controller 20 Control computer

Claims (2)

[Claims] 1. A liquid crystal display device for inspecting an image quality defect based on an optical image obtained by transmitting light from a light source to a liquid crystal display device set at an inspection position and transmitting the liquid crystal display device. In the inspection device, a blow-out nozzle having an air outlet arranged toward the inspection position, cold air supplied from a cold air supply unit and warm air supplied from a hot air supply unit are mixed, and the mixed air is A mixing chamber sent to the blow-out nozzle, a temperature detector for detecting the temperature in the mixing chamber, and a detection temperature detected by the temperature detector and a preset temperature are compared, and based on the comparison result. An inspection apparatus for a liquid crystal display device, comprising: a temperature control unit that drives and controls the cold air supply unit and the warm air supply unit. 2. The inspection apparatus for a liquid crystal display device according to claim 1, further comprising a flow rate control means for controlling a constant flow rate of the mixed air sent from the mixing chamber to the blowout nozzle.