JPH05126901A - Semiconductor testing device - Google Patents

Abstract

PURPOSE:To obtain a power-saving type semiconductor testing device by suppressing the noise and room temperature rises caused by direct exhaust from a measuring instrument and, at the same time, using the exhaust heat from the measuring instrument as the auxiliary heat source of a constant temperature oven. CONSTITUTION:The exhaust heat produced from a measuring device 1 is fed to a constant temperature oven 2 through an air supplying/discharging duct 10 connecting the instrument 1 to the oven 2 and used for controlling the temperature of the oven 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor test device, and more particularly to a semiconductor test device for reducing power consumption in an electronic circuit measuring device such as a semiconductor integrated circuit.

[0002]

2. Description of the Related Art In a conventional semiconductor test device, a measuring device for detecting a test operation of a semiconductor under test and a constant temperature bath for keeping a constant temperature during the test are independent. For example, in a burn-in device for testing a semiconductor device at a high temperature, the measuring device for monitoring and the burn-in furnace, or the measuring device and the high-temperature handler have electrical signal connections, but thermal coupling is considered. There wasn't.

[0003]

Since the conventional semiconductor test device is constructed as described above, when the measuring device generates heat during the test, forced evacuation is required as a countermeasure against this heat generation, but it is forced evacuation. The temperature of the air, that is, the rise in room temperature due to exhaust heat is unavoidable. On the other hand, the exhaust heat from the measurement device is exhausted without being effectively used even though a heat source is required in the adjacent thermostatic chamber. In addition, there is a problem that noise is generated from a fan used for forced exhaust from the measuring device.

The present invention has been made to solve the above problems, and by effectively utilizing the exhaust heat of the measuring device, it is possible to save the power consumption for raising the temperature of the constant temperature bath, and An object of the present invention is to obtain a semiconductor test device capable of suppressing fan noise.

[0005]

A semiconductor test apparatus according to the present invention comprises a supply / exhaust duct for connecting a measuring device and a constant temperature bath, and supplies exhaust heat generated in the measuring device to the constant temperature bath through the supply / exhaust duct. It is used for temperature control in a constant temperature bath.

[0006]

In the semiconductor test according to the present invention, the temperature of the constant temperature bath is supplementarily raised by the supply of exhaust heat from the measuring device, so that the electric power used for raising the temperature of the constant temperature bath can be saved. By sealing and connecting the exhaust port of the measuring device and the air supply port of the thermostatic chamber with the supply / exhaust duct, it is possible to take measures against noise.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing the appearance of a semiconductor test apparatus according to an embodiment of the present invention, in which a measuring apparatus and a constant temperature bath are shown. In the figure, 1 is a measuring device for measuring the operating conditions during the test performed in this semiconductor test device, 2 is a thermostatic chamber for maintaining a desired temperature according to the contents of the test being performed, and 3 and 7 are the measuring device 1 respectively. , Constant temperature bath 2
Exhaust fan, 4 is an exhaust port of the measuring device 1, and 5 is a thermostatic chamber 2.
Of the constant temperature tank 2, 6 is an air supply port of the constant temperature tank 2, 8 is an exhaust duct of the constant temperature tank 2, 9 is a temperature control heater for keeping the temperature of the constant temperature tank 2 at a desired temperature, and 10 is exhaust of the measuring device 1. It is an air supply / exhaust duct that connects the port 4 and the air supply port 6 of the constant temperature bath 2.

Next, the operation will be described. Air heated by the measuring device 1 due to heat generation during the test is forcedly exhausted from the exhaust port 4 by using the exhaust fan 3. On the other hand, in the constant temperature bath 2, the heated exhaust gas exhausted from the measuring apparatus 1 is forcibly supplied from the air supply port 5 using the air supply fan 6.

As described above, in the above embodiment, the measuring device 1
The exhaust port 4 and the air supply port 6 of the thermostatic chamber 2 to the air supply / exhaust duct 10
The temperature of the temperature control heater 9 and the exhaust fan 7 is set to a desired temperature by connecting the temperature control heater 9 and the exhaust fan 7 to each other by using the exhaust heat supplied from the measuring device 1 to make the temperature of the constant temperature bath 2 auxiliary. By operating it, the constant temperature bath 2 can be set to an appropriate temperature.

Further, by connecting the exhaust port 4 of the measuring apparatus 1 and the air supply port 6 of the thermostatic chamber 2 from the air supply / exhaust duct 10, the exhaust port 4 and the air supply port 6 are sealed. The noise of the exhaust fans 3 and 7 can be shielded, and the noise can be suppressed.

In the above embodiment, the measuring device 1 and the constant temperature bath 2 are connected by the air supply / exhaust duct 10,
Although the exhaust heat from the measuring device 1 was directly used, the same effect can be obtained even if the measuring device 1 is provided with cooling equipment and the exhaust heat due to the heat generated during the operation of the cooling device is supplied to the constant temperature bath 2. can get.

Further, when the semiconductor test apparatus in the above embodiment is a burn-in apparatus, if the constant temperature bath 2 is used as a burn-in furnace, it becomes a watching burn-in apparatus, which can be constructed as an integrated apparatus. Further, even if the constant temperature bath 2 is used as a preheating device in a high temperature handler or a constant temperature bath of a high temperature handler, the same effect can be obtained.

[0013]

As described above, according to the semiconductor test apparatus of the present invention, the exhaust port 4 of the measuring apparatus 1 and the air supply port 6 of the thermostatic chamber 2 are hermetically connected by the air supply / exhaust duct 10. With this configuration, the exhaust heat generated from the measuring device 1 is effectively used to raise the temperature for setting the temperature in the constant temperature bath 2. Therefore, the noise of the fan due to the exhaust gas from the measuring device 1 is shielded and the room temperature rises. There is an effect that the power consumption can be saved as well as being suppressed.

[Brief description of drawings]

FIG. 1 is a diagram showing an external view of a semiconductor test apparatus according to an embodiment of the present invention.

[Explanation of symbols] 1 measuring device 2 constant temperature bath 3, 7 exhaust fan 4 exhaust port 5 air supply fan 6 air supply port 8 exhaust duct 9 temperature control heater 10 supply / exhaust duct

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[Procedure amendment]

[Submission date] February 13, 1992

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction content]

Next, the operation will be described. Air heated by the measuring device 1 due to heat generation during the test is forcedly exhausted from the exhaust port 4 by using the exhaust fan 3. On the other hand, in the thermostatic chamber 2, the heated exhaust gas exhausted from the measuring device 1 is forcibly supplied from the air supply port 6 using the air supply fan 5 .

Claims (1)

[Claims] 1. A semiconductor test device comprising a measuring device for measuring the operation of a semiconductor device during a test, and a thermostat which is provided in parallel with the measuring device and which keeps a test temperature at a predetermined temperature. A semiconductor test device, comprising: an air supply / exhaust duct for connecting to a tank, wherein exhaust heat generated in a measuring device is supplied to the constant temperature tank through the air supply / exhaust duct and used for temperature control in the constant temperature tank.