JPH0466882A - Thermostat apparatus for testing ic - Google Patents

Abstract

PURPOSE:To simplify an operation for returning a low temperature running to a normal temperature state by providing a control section to automate a series of working for returning to the normal temperature running. CONSTITUTION:Under a control operation program of a control section 90, in a low- temperature running, a cooling means 20 in a thermostat cools the inside of the thermostatic cell 10 with a heating by a heater 40 for preventing dew formation and a dehumidified air blowing means 50 blows a dehumidified air to the thermostat 10. Here, when a normal temperature return processing switch 71 is turned ON, the control section 90 stops the cooling of the inside of the thermostat by the means 20 and starts heating of the inside of the thermostat while the heating 40 for preventing dew formation and the blowing 50 of the dehumidified air are continued. Then, the temperature in the thermostat 10 is determined with a temperature sensor 60 to reach a specified value, the heater 30 is controlled to maintain the inside of the thermostat 10 at a specified temperature. At the same time, with a judgment that a specified time passes after the reaching of the specified temperature, the heating with the heaters 30 and 40 and the blowing of the dehumidified air are stopped and the end of the normal temperature return processing is displayed 80. Thus, the turning ON of the switch 71 lets the control section 90 perform a series of workings automatically to return the low-temperature running to the normal temperature state.

Description

Detailed Description of the Invention "Industrial Application Field" This invention relates to a constant temperature chamber device for IC testing, in which ICs (semiconductor integrated circuits) are placed in a constant temperature chamber and tested at low temperatures, especially when the constant temperature chamber is operated at a low temperature. It relates to a mechanism for returning the temperature to room temperature.

"Prior art" In a constant temperature chamber device for IC testing, in which an IC is placed in a constant temperature chamber and tested at a low temperature of -30 degrees Celsius, the constant temperature chamber is returned to normal temperature of 25 degrees Celsius from a low temperature operating state. Conventionally, the mechanism used is that the inside of the thermostatic chamber is cooled by an internal cooling means such as vaporizing liquid nitrogen and supplying it into the thermostatic chamber, the outside of the thermostatic chamber is heated by a heater to prevent condensation, and the temperature is maintained by a dehumidifying air blowing means. In a low-temperature operating state where dehumidified air is blown into the tank from the outside, the operator first turns off the temperature control on/off switch, which stops cooling the inside of the constant temperature tank by the tank cooling means, and heats the condensation prevention heater. At the same time, the blowing of dehumidified air by the dehumidifying air blowing means to the thermostatic chamber stops, and then the operator switches the control temperature setting switch from the low temperature side to the room temperature side, thereby setting the control unit to 25°C. When the worker turns on the above-mentioned temperature control on/off switch, the inside of the thermostatic chamber is heated by the chamber heating heater, and the worker then turns on the temperature inside the thermostatic chamber using the temperature display. The temperature inside the thermostat is 25°C.
By turning off the temperature control on/off switch when the temperature reaches a predetermined temperature, the heating of the heater for heating the inside of the tank is stopped.

``Problems to be Solved by the Invention'' However, in the above-mentioned conventional constant temperature chamber equipment for JCiil' experimental constant temperature chamber, in order to return to normal temperature from a low temperature operating state, the temperature control on/off switch is turned off, and the control temperature setting switch is turned off. Switch from the low temperature side to the room temperature side, turn on the temperature control on/off switch, monitor the temperature inside the thermostatic oven,
In addition to requiring a series of complicated operations by a person, such as turning off the temperature control on/off switch, when returning to normal temperature from low temperature operation, cooling in the thermostatic chamber stops and at the same time a condensation prevention device is turned off. The heater will stop heating and the blowing of dehumidified air to the thermostat will stop.
There is a risk of condensation forming in the thermostatic chamber during the process of returning to room temperature.

Therefore, the present invention provides a mechanism for returning a constant temperature chamber from a low temperature operating state to normal temperature, especially in a constant temperature chamber device for IC testing in which ICs are placed in a constant temperature chamber and tested at low temperatures. It is possible to return to normal temperature from a low-temperature operating state with a simple operation of turning it on, and it also prevents condensation from forming in the thermostatic chamber during the process of returning to normal temperature.

"Means for Solving the Problems" In the present invention, there is provided a constant temperature chamber in which an IC to be tested is arranged, an in-bath cooling means for cooling the inside of the constant temperature chamber, and an in-bath heater for heating the inside of the constant temperature chamber. a dew condensation prevention heater that heats the outside of the thermostatic oven; a dehumidifying air blower that blows dehumidified air into the thermostatic oven from the outside; a temperature sensor disposed within the thermostatic oven; and a normal temperature return processing switch;
A display section and a control section having the following configuration are provided.

The control unit is configured to operate the thermostatic chamber in a low-temperature operating state in which the inside of the thermostatic chamber is cooled by the chamber cooling means, the dew condensation prevention heater is heated, and dehumidified air is blown onto the thermostatic chamber by the dehumidifying air blowing means. When the normal temperature return processing switch is turned on, cooling of the thermostatic chamber by the chamber cooling means is stopped, the chamber heating heater is heated, the dew condensation prevention heater continues to be heated, and the dehumidification is performed. Continuing to blow dehumidified air into the constant temperature chamber by the air blowing means, and determining whether or not the inside of the constant temperature chamber has reached a predetermined temperature based on the output of the temperature sensor, and when it is determined that the predetermined temperature has been reached. , controlling the heater for heating the inside of the chamber to maintain the inside of the thermostatic chamber at a predetermined temperature, and determining whether or not a predetermined period of time has elapsed since the inside of the thermostatic chamber reached a predetermined temperature; When it is determined, the heater for heating the inside of the tank and the heater for preventing condensation stop heating, the blowing of dehumidified air to the thermostatic chamber by the dehumidifying air blowing means is stopped, and the normal temperature return process is displayed on the display section. Configure it to display that it has finished.

"Function" In the constant temperature chamber device for IC testing of the present invention configured as described above, initially, when the operator turns on the normal temperature return processing switch, the subsequent operations are automatically carried out by the control unit. The thermostatic chamber can be returned to normal temperature from a low temperature operating state by a simple operation of turning on the normal temperature return processing switch once. In addition, even if the room temperature return processing switch is turned on, the temperature will not be reset until a predetermined time has elapsed after the temperature inside the thermostatic chamber reaches the predetermined temperature due to heating by the heater for heating the chamber.
Since the heating of the dew condensation prevention heater does not stop and the blowing of dehumidified air to the thermostatic chamber does not stop, dew condensation does not occur in the thermostatic chamber during the process of returning to normal temperature.

"Example" FIG. 1 shows an example of a constant temperature chamber device for IC testing of the present invention.

An IC placement section 11 is provided in the thermostatic chamber 10, and although not shown, an IC to be tested is placed therein. Constant temperature bath 1
0, for example, vaporize liquid nitrogen and install it in a constant temperature bath 10.
An in-tank cooling means 20 is provided which cools the inside of the constant temperature bath 10 to a low temperature of -30° C. by supplying water to the inside. Inside the constant temperature bath 10, a heater 30 for heating the inside of the constant temperature bath 10 is provided. A dew condensation prevention heater 4o that heats the outside of the thermostatic oven 10 is provided outside the thermostatic oven 10. Moreover, a dehumidifying air blowing means 50 for blowing dehumidified air onto the constant temperature chamber 10 is provided outside the constant temperature chamber 10 . - By way of example, the dehumidifying air blowing means 50 comprises a compressed air source 5
Compressed air from 1 passes through valve 52 to air dryer 5
The dehumidified air from the air dryer 53 is blown from the nozzle 54 to the thermostatic chamber 10 and heated by the air heater 55, and the heated dehumidified air is blown from the nozzle 56 to the thermostatic chamber 10. The configuration is as follows.

A temperature sensor 60 is arranged inside the constant temperature bath IO.

Further, outside the constant temperature oven 10, an operation panel 70 to which a normal temperature return processing switch 71 and a light emitting diode 72 are attached is provided, and a display section 80 is also provided.

The display unit 80 includes, for example, a blue lamp 81B and a yellow lamp 81.
It is configured to include a signal tower 81 having Y and red lamps 81R, a chime 82, and a plasma display 83. A control unit 90 shown in FIG. 2 and executing a control operation program as described below is provided.

That is, in the low-temperature operation state of the thermostatic oven 10, the interior of the thermostatic oven 10 is cooled to a low temperature of 130° C. by the in-tank cooling means 20, the dew condensation prevention heater 40 is heated, and the dehumidifying air blowing means is heated. The valve 52 of 50 is opened, the air dryer 53 is driven, and the air heater 55 is heated, so that unheated dehumidified air and heated dehumidified air are blown into the thermostatic chamber 10. , the control unit 90 first determines in decision 91 whether or not the normal temperature return processing switch 71 is turned on.

When the operator turns on the room temperature return processing switch 71 and the decision 91 determines that the room temperature return processing switch 71 has been turned on, the control section 90 then proceeds to process 92 to control the tank cooling means. 20
The cooling in the constant temperature bath 10 is stopped, the heater 30 for heating the bath is heated, and the heater 40 for preventing condensation is continued to be heated.The valve 52 of the dehumidifying air blowing means 50 is kept open, and the air dryer 53 is By continuing to drive and keeping the air heating heater 55 heated, unheated dehumidified air and heated dehumidified air continue to be blown to the thermostatic chamber 10.

Next, the process proceeds to decision 93, where it is determined from the output of the temperature sensor 60 whether or not the temperature inside the constant temperature chamber 10 has reached 25°C. When it is determined that the temperature has reached 25°C, process 9
Proceed to step 4, and control the heater 30 for heating the inside of the chamber to heat the constant temperature chamber 1.
Maintain temperature within 0 at 25°C.

Next, proceed to dension 95, and the temperature inside the thermostatic chamber 1G is 2.
It is determined whether 5 minutes have elapsed since the temperature reached 5° C., and when it is determined that 5 minutes have elapsed, the process proceeds to process 96 to stop heating the tank internal heater 30 and the dew condensation prevention heater 40. , valve 5 of dehumidifying air blowing means 50
2, the driving of the air dryer 53 is stopped, and the heating of the air heating heater 55 is stopped.
The blowing of unheated dehumidified air and heated dehumidified air to the air is stopped, and the process further proceeds to process 97 where the yellow lamp 81Y of the signal tower 81 of the display section 80 is blinked, the chime 82 is sounded, and the plasma display 83 is turned on and off.
A message indicating that the normal temperature return process has been completed is displayed at the top, and the light emitting diode 72 on the operation panel 70 is turned on.

As described above, in the Ic test constant temperature chamber apparatus of the present invention, when the operator initially turns on the normal temperature return processing switch 71, a series of operations are automatically performed by the control unit 90, and the normal temperature return processing is performed. The thermostatic chamber 10 can be returned to normal temperature from the low temperature operating state by a simple operation of turning on the switch 71 once. Furthermore, even if the room temperature return processing switch 71 is turned on, the heating of the dew condensation prevention heater 40 does not stop until a predetermined period of time has elapsed after the inside of the thermostatic chamber 10 reaches a predetermined temperature due to heating by the in-tank heater 30. At the same time, since the blowing of dehumidified air to the thermostatic oven 10 does not stop, no dew condensation occurs on the thermostatic oven 10 during the process of returning to normal temperature.

"Effects of the Invention" As described above, according to the present invention, it is possible to return the thermostatic chamber from a low-temperature operation state to normal temperature by a simple operation of turning on the normal temperature return processing switch once, and also to return to normal temperature. There is no condensation in the thermostatic chamber during the process.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing an example of a constant temperature chamber apparatus for Ic testing of the present invention, and FIG. 2 is a flowchart showing an example of a control operation program executed by the control section thereof.

Claims (1)

[Claims] (1) A constant temperature chamber in which the IC to be tested is placed, an internal chamber cooling means for cooling the inside of the constant temperature chamber, an internal heater for heating the inside of the constant temperature chamber, and a dew condensation that heats the outside of the constant temperature chamber. A prevention heater, a dehumidified air blowing means for blowing dehumidified air into the thermostatic oven from the outside, a temperature sensor disposed in the thermostatic oven, a normal temperature return processing switch, a display section, and a control section, The control unit is configured to control the control unit to operate at the normal temperature in a low temperature operating state in which the inside of the thermostatic chamber is cooled by the chamber cooling means, the condensation prevention heater is heated, and dehumidified air is blown onto the thermostatic chamber by the dehumidifying air blowing means. When the recovery processing switch is turned on, cooling of the thermostatic chamber by the chamber cooling means is stopped, the chamber heating heater is heated, the dew condensation prevention heater continues to be heated, and the dehumidified air is heated. Continuing to blow dehumidified air into the constant temperature chamber by the blowing means, and determining whether or not the inside of the constant temperature chamber has reached a predetermined temperature based on the output of the temperature sensor, and when it is determined that the predetermined temperature has been reached, The heater for heating the inside of the chamber is controlled to maintain the inside of the thermostatic chamber at a predetermined temperature, and it is determined whether a predetermined period of time has passed since the inside of the thermostatic chamber reached a predetermined temperature, and it is determined that the predetermined period of time has elapsed. When this happens, the heating of the tank internal heater and the dew condensation prevention heater are stopped, the dehumidifying air blowing means stops blowing dehumidified air to the thermostatic chamber, and the display section indicates that the normal temperature return process has been completed. A constant temperature chamber device for IC testing that displays what has been done.