JPH09195079A - Electrolytic cell for producing electrolyzed water - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrolytic cell for producing electrolyzed water which obviates the intrusion of metallic components and has the practicable use life to allow the production of acidic water and alkaline water usable for washing electronic devices. SOLUTION: The electrode material of at least either of the anode 5 and cathode 6 of the electrolytic cell 1 segmented to an anode chamber 3 and cathode chamber 4 by an ion exchange membrane 2 is composed of non-porous carbon. An unusual carbon having the intrinsic fragility and non-porous ameliorated in the fragility is used for the electrode material of the carbon electrode and, therefore, the electrolytic cell for producing the electrolyzed water which has the long practicable use life, obviates the intrusion of the metallic components and is capable of producing the acidic water and alkaline water usable for washing the electronic devices is provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrolytic cell for producing electrolyzed water having a long life and capable of producing highly pure electrolyzed water, and more specifically, used for cleaning electronic devices such as semiconductor devices and liquid crystal panels. The present invention relates to an electrolytic cell for producing electrolyzed water for producing high-purity alkaline water and acidic water using diluted salt water or pure water as a raw material.

[0002]

2. Description of the Related Art For cleaning in the manufacturing process of electronic parts such as semiconductor devices and liquid crystal panels, organic solvents, sulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid, etc. which have been specially prepared for the above-mentioned uses have been used. Inorganic acids and oxidants such as ozone water and hydrogen peroxide have been used. These will continue to be used depending on the application, but they were obtained by specially refining the products manufactured by the respective chemical processes.
The operation for removing the metal components mixed in from the catalyst in the manufacturing process is complicated, resulting in an expensive product. Further, even if the refining operation is carefully performed, it is not always possible to sufficiently cope with the decrease in the allowable amount of impurities due to the sophistication of electronic devices, and a new alternative method is required.

Further, these chemicals are not only dangerous, but organic solvents may cause environmental problems such as destruction of the ozone layer, and other inorganic acids and salts require much time and labor for wastewater treatment. There is a problem that it costs money.
Further, a device cleaned using these cleaning agents has a drawback that a large amount of ultrapure water is required to remove the cleaning agents. Similarly, in the fields of medical treatment and food, which are other uses, a large amount of cleaning agent is required for sterilization and cleaning, and a large amount of water is required for removing the cleaning agent. In order to solve these problems, an electrolytic cell divided into an anode chamber and a cathode chamber by an ion exchange membrane is used to electrolyze water or an electrolytic solution to which a trace amount of an electrolyte such as hydrochloric acid, salt or ammonium chloride is added. Thus, a method of obtaining weakly acidic acidic water having a high redox potential (ORP), that is, extremely high oxidizing property on the anode side, and weakly basic alkaline water having a low ORP, that is, extremely reducing property, on the cathode side is provided. Has been done.

A titanium electrode coated with platinum is generally used as an electrode in this electrolysis, and the consumption rate of the electrode is 1 to 10 μg / Ah, and when the consumed platinum is dissolved in the electrolytic solution, it is normally 1 About 10 ppb of platinum will be mixed in the electrolyte. Platinum group metal oxides such as iridium oxide may be used instead of platinum.For example, the consumption rate of iridium oxide when producing an aqueous solution of hypochlorous acid of about 100 ppm is about 10 minutes of that of platinum. Although it is 1, it is greatly improved, but this amount of mixing is also a problem for cleaning, and it is necessary to further reduce the mixing amount of the electrode substance.

The present inventors have succeeded in reducing the consumption of the electrode material to about 1/10 by using an ion exchange membrane as a solid electrolyte and adhering it to the electrode.
After all, elution of metal into the electrolyte is unavoidable, and the same problem occurs. In order to solve this, use of ozone water instead of the aforementioned acidic water has been proposed,
There is a problem that the production of ozone water requires a large facility and becomes costly, and that the production of ozone by the discharge method inevitably mixes the electrode material of the ozonizer with ozone water. It's not.

The use of non-metallic materials for the electrodes eliminates the problem of metal contamination and provides a fundamental solution. There is carbon as the non-metallic substance, and the carbon electrode has been used for electrolysis for a long time. However, since ordinary carbon is porous and relatively brittle, it may be destroyed or dissolved as the electrolysis proceeds. Further, when it is used as an anode, there is a problem that a part of it is oxidized into carbon dioxide gas and consumed quickly. When it is used as a cathode, there is a problem in that although bubbles of carbon dioxide do not evaporate, the bubbles of hydrogen produced are smaller than the oxygen produced on the anode side and the destruction of the electrode is likely to proceed.
Although the problem of mixing metal components into the electrolyte does not occur when using a carbon electrode in this way, the brittleness of carbon easily leads to shortening of the service life, and in particular under high current, the tendency becomes large, There is a drawback that acidic water or alkaline water having a satisfactory ORP cannot be obtained.

[0007]

DISCLOSURE OF THE INVENTION The present invention has been made to solve the above-mentioned problems of the prior art. In particular, the carbon electrode is fragile while the metal component of the carbon electrode is not eluted. An object of the present invention is to provide an electrolytic cell for electrolyzed water production which solves the drawbacks and has a relatively long life and can realize a satisfactory ORP with high efficiency when used for production of, for example, acidic water or alkaline water.

[0008]

The present invention relates to an electrolytic cell for producing electrolyzed water, which is divided into an anode chamber having an anode and a cathode chamber having a cathode by an ion exchange membrane, and at least one electrode of the anode and the cathode. The electrolytic cell is characterized in that the substance is made of non-porous carbon, and the electrolytic cell may be of a two-chamber type or a three-chamber type.

Hereinafter, the present invention will be described in detail. The feature of the present invention is that at least one of a plurality of electrodes of an electrolytic cell for producing electrolyzed water is used.
Acidic water and / or alkaline water obtained by using a carbon electrode without elution of metal components as one electrode, for example, as an anode of an electrolytic cell for producing acidic water or as a cathode of an electrolytic cell for producing alkaline water is a metal. It is possible to supply electrolyzed water that is not contaminated with components and has a purity that can be used as it is for cleaning electronic parts, etc., and by making the carbon electrode non-porous, the fragility of conventional carbon electrodes can be reduced. The point is that an improved electrolytic cell for producing electrolyzed water that can supply the above-mentioned high-purity electrolyzed water over a long period of time is configured.

When a platinum electrode is used to electrolyze an electrolytic solution containing a low concentration of chloride ions, the efficiency of hypochlorous acid production is increased. When an iridium oxide electrode is used instead of the platinum electrode, normal water electrolysis is performed. Satisfactory ORP cannot be obtained because oxygen and hydrogen are generated by the reaction. Moreover, in any case, elution of the metal component occurs. On the other hand, when a carbon electrode is used, the anode potential becomes slightly higher, but acidic water having a high ORP can be easily obtained in both pure water and an electrolytic solution to which a low concentration electrolyte is added. It can be inferred that ozone is generated by high-potential electrolysis by performing electrolysis using electrodes. As described above, the carbon electrode has an advantage that no metal component is eluted and that acidic water having a sufficiently high ORP can be produced, but on the other hand, it has the drawback of being brittle as described above. It is intended to overcome this drawback by using a porous carbon electrode.

Non-porous carbon electrodes include graphite and amorphous carbon such as glassy carbon. Graphite is usually porous, but when it is used as the carbon electrode of the present invention, a material having a porosity as low as possible should be selected, and the porous portion should be blocked with a resin or the like to improve the brittleness. Is desirable. Although the blocking agent is not particularly limited, it is preferable to use a fluororesin because it may be used in an extremely strong oxidizing atmosphere, and particularly polytetrafluoroethylene (PTFE) having excellent water repellency.
Use of resin is desirable. Closure of the porous portion using the occluding agent is performed, for example, by coating an aqueous dispersion of a PTFE resin such as J-30 manufactured by DuPont on the surface of a graphite matrix,
This can be achieved by drying at room temperature and then heat-treating at 200 to 350 ° C for 10 to 30 minutes. Due to the blockage of the porous portion, non-porous carbon that is less likely to be destroyed is generated.

Amorphous carbon typified by glassy carbon has the drawback of being inferior in conductivity to graphite, but has far fewer open pores than graphite (porosity 20 to 30%), in other words, low porosity. (Porosity 1 to
5%), which acts more stably than graphite and functions more effectively as the carbon electrode of the present invention. The glassy carbon can be used as it is, but its properties can be modified by impregnating its surface with, for example, fluorine or boron. The conditions of this modification treatment are not particularly limited, but for example, 40 wt% or more of borofluoric acid is used as an electrolytic bath, and the above glassy carbon is used as an anode.
The glassy carbon can be modified by electrolysis at a current density of 1 to 10 A / dm ² for about 1 to 10 hours. The electrode potential of the glassy carbon treated in this way is about 1 V higher than that of graphite.

Electrolysis is performed using an electrode having such non-porous carbon as an electrode material. The carbon electrode is preferably brought into close contact with an ion exchange membrane functioning as a solid electrolyte to conduct electricity. When electrolysis is performed under such conditions, even when the carbon electrode is used as an anode and the anodic reaction is an oxygen generation reaction, the electrolysis can proceed even under a high current density of 1 to 50 A / dm ² , and the electrode The consumption can be maintained at a small value of 5 to 30 μg / Ah. This is because the carbon electrode is non-porous and its fragility is improved, and because the ion exchange membrane has much higher electrical conductivity than pure water, the current distribution becomes uniform and the It can be presumed that this is because the current load at the electrode portion is relatively small. When the carbon electrode is used as an anode, the exhausted carbon is not dissolved in the liquid, but most of it is combined with oxygen to become carbon dioxide gas and volatilize into the air, increasing the amount of solids in the anolyte or causing discoloration. Is not observed. Also, of course, no metal component is mixed.

When the glassy carbon or graphite is used as a carbon electrode and pure water or an electrolyte solution in which a low-concentration electrolyte is dissolved is electrolyzed at a current density of 10 A / dm ² or more, O is generated in the anode chamber.
Acidic water having an RP of 1000 mV or more is obtained, and comparing the glassy carbon electrode and the graphite electrode, the ORP of the acidic water obtained by the latter is slightly smaller. It should be noted that if 1000 ppm of chloride ions are added to pure water in the form of ammonium chloride or hydrochloric acid, ORP can be easily performed at 1100
It is possible to obtain acidic water having an extremely high oxidizing property, which exceeds mV and easily has a pH of less than 3. The consumption rate of the electrode in this case is about 10 to 30 μg / A, which is almost the same as that in the absence of chloride
h.

When the porous carbon electrode is used as a cathode, hydrogen is generated in the cathode chamber to obtain alkaline water having a pH of about 9 to 11 and an ORP of 400 mV or less. Even when electrolysis is continued for 1 month at a current density of 10 A / dm ² using the carbon electrode as a cathode, no change is observed in the appearance of the electrode and no color change occurs in the catholyte. In the present invention, at least one electrode of the electrolytic cell for producing electrolyzed water using a plurality of electrodes is composed of the above-mentioned non-porous carbon electrode. Therefore, for example, if electrolysis is performed using only the anode of a two-chamber electrolysis cell as a non-porous carbon electrode and the cathode as a metal electrode, both electrodes have a relatively long life and can be electrolyzed for a long time without replacement. The obtained anolyte is high-purity acidic water suitable for cleaning electronic devices and the like without elution of metal components, whereas the resulting catholyte contains alkali water that is not suitable for cleaning because metal is eluted. Therefore, of course, it is most desirable to construct all electrodes with non-porous carbon electrodes.

As described above, the electrolytic cell for producing electrolyzed water of the present invention may be a three-chamber type electrolytic cell. In this case, like the conventional three-chamber type electrolytic cell, only the anode chamber and the cathode chamber are respectively provided with an anode. It is also possible to install a cathode and a cathode, but a pair of anode and cathode are also installed in the intermediate chamber through the cathode and the cation exchange membrane of the cathode chamber and the anode and the anion exchange membrane of the anode chamber, respectively. You may install so that it may face via. This intermediate chamber electrode may be energized by electrically connecting both electrodes to the anode chamber anode → intermediate chamber cathode → intermediate chamber anode → cathode chamber cathode, or two power sources. May be used to separately energize between the anode in the anode chamber and the cathode in the intermediate chamber, and between the anode in the intermediate chamber and the cathode in the cathode chamber.

In the former case, the connection of both electrodes during energization is performed by arranging a porous conductor such as highly corrosion-resistant porous titanium or porous carbon in the liquid even if the electrodes are connected outside the electrolytic cell via a current collector. Both electrodes may be connected in the intermediate chamber, which eliminates the potential gradient in the intermediate chamber and allows the ions in the intermediate chamber to move completely freely. Further, the resistance can be ignored even if the width of the intermediate chamber is made large, which is convenient when there is a risk of explosion due to the mixture of oxygen gas and hydrogen gas generated at both electrodes. If there is no danger of explosion, it is desirable to reduce the width of the intermediate chamber, and the generated hydrogen and oxygen are depolarized with each other, so that useless gas generation is suppressed. When there is a slight risk of explosion and the width is set to be narrow, the flow rate of the salt solution supplied to the intermediate chamber may be increased to promptly take out the generated gas from the electrolytic cell. Also, in the latter energization, the energization amount by both power sources can be separately set to the optimum value, and if the acidic water is required in a larger amount than the alkaline water, the energization amount between the anode in the anode chamber and the cathode in the intermediate chamber can be increased. When a large amount of alkaline water is required, the amount of electricity supplied between the anode in the intermediate chamber and the cathode in the cathode chamber can be increased to avoid unnecessary electricity supply and unnecessary energy consumption. Even in the case of this energization, it is desirable to make the width of the intermediate chamber small, and the generated hydrogen and oxygen are depolarized with each other.Therefore, the gas generation amount depends on the difference in the supply current amount between the anode chamber side and the cathode chamber side and the depolarization. Only the generation of hydrogen or oxygen due to insufficient performance.

When pure water is electrolyzed in a two-chamber electrolysis cell to obtain acidic water and alkaline water, pure water may be supplied to either electrolytic chamber. _{2H 2 O → O 2 + 4H} + + 4e or _{3H 2 O → O 3 + 6H} + + 6e of the reaction oxygen or ozone is generated according to formula, in the _{^{cathode, 2H + + 2e → H 2}} O + 2OH - reaction Hydroxide ions are generated according to the formula. When electrolysis is performed while supplying oxygen to the cathode, the cathode reaction becomes O ₂ + H ₂ O + 2e → OH ⁻ + HO ₂ ⁻ . When chloride ions are added to this, in addition to the above-mentioned anodic reaction, a reaction of 2Cl ⁻ → Cl ₂ + 2e also occurs at the anode, the generated chlorine gas is dissolved in the electrolytic solution, and depending on the pH, it is usually Reacts with water to produce hypochlorous acid. In the case of a three-chamber electrolytic cell, pure water or salt solution is supplied to the intermediate chamber, high-purity acidic water is produced in the anode chamber, and high-purity alkaline water is produced in the cathode chamber.

FIG. 1 is a schematic vertical sectional view showing an example of a two-chamber type electrolytic cell according to the present invention, and FIG. 2 is a schematic vertical sectional view showing an example of a three-chamber electrolytic cell. In FIG. 1, a two-chamber electrolytic cell 1 is divided into an anode chamber 3 and a cathode chamber 4 by an ion exchange membrane 2, and a non-porous carbon anode 5 is provided on the anode chamber 3 side of the ion exchange membrane 2 and a cathode chamber 4 side. The non-porous carbon cathodes 6 are in close contact with each other. A pure water or salt solution supply port 7 and an acidic water outlet 8 are provided on the bottom and top of the anode chamber 3, and a pure water supply port 9 and an alkaline water outlet 10 are provided on the bottom and top of the cathode chamber 4. ing. Note that 11 is a packing between the ion exchange membrane 2 and the peripheral portion.

In FIG. 2, the three-chamber electrolytic cell 21 is divided into an anode chamber 23 and an intermediate chamber 24 by a cation exchange membrane 22, and a intermediate chamber 24 and a cathode chamber 26 by a cation exchange membrane 25. . A non-porous carbon anode 27 is in contact with the anion exchange membrane 22 side of the anode chamber 23, and a non-porous carbon cathode 28 is in contact with the cation exchange membrane 22 side of the cathode chamber 26. A pure water supply port 29 and an acidic water outlet 30 are provided on the bottom surface and the top surface of the anode 23.
A salt solution supply port 31 and a salt solution outlet 32 such as ammonium chloride are installed on the bottom surface and the top surface of the intermediate chamber 24, and a pure water supply port 33 and an alkaline water outlet port 34 are installed on the bottom surface and the top surface of the cathode chamber 26, respectively. ing. Reference numeral 35 is a packing between the ion exchange membranes 22 and 25 and the peripheral portion.

In both of the electrolytic cells 1 and 21 shown in FIGS. 1 and 2, pure water or a salt solution supply port 7 or a salt solution supply port 31 is used to supply pure water or a salt solution such as an ammonium chloride aqueous solution or sulfuric acid. When electricity is applied between the carbon electrodes 5, 6 and 27, 28, acidic water is produced in the anode chamber and alkaline water is produced in the cathode chamber without containing metal components. Since each electrode is composed of a non-porous carbon electrode, the fragility peculiar to the carbon electrode is eliminated, and long-term continuous operation is possible while minimizing wear.

[0021]

EXAMPLES Next, examples of producing acidic water and alkaline water using the electrolytic cell for producing electrolyzed water according to the present invention will be described, but the examples do not limit the present invention.

[0022]

Example 1 A Nafion 117 cation exchange membrane manufactured by DuPont was used as an ion exchange membrane, a graphite perforated plate (2 mmφ × 3 mm pitch) having a thickness of 1 mm was used as an anode, and carbon and fluororesin were used as a cathode. The electrolysis cell shown in FIG. 1 was constructed using a conductive sheet obtained by kneading and baking. The perforated plate is placed in a reduced pressure atmosphere with a rotary pump, a PTFE suspension (J30 manufactured by DuPont) is applied dropwise, dried at 60 ° C, and baked at 370 ° C for 15 minutes to make it non-porous. It was a perforated plate which was a carbon electrode. The anode and cathode were pressed from both sides with a mesh made of pure titanium which also served as a current collector. The anode chamber of this electrolytic cell was filled with pure water, and electricity was passed through the titanium mesh at a rate of 3000 coulomb / liter for electrolysis. Current density 5 to 50
Table 1 shows the results of electrolysis performed by changing the range of A / dm ² .

[0023]

[Table 1]

[0024]

Comparative Example 1 When electrolysis was performed under the same conditions as in Example 1 except that platinum-plated titanium was used as the anode,
At current densities exceeding 10 A / dm ² , platinum was consumed so much that it could not be used. In electrolysis at a current density of 10 A / dm ² , pH = 3.2 and ORP = 950 mV, which are almost the same as in Example 1.
Of acidic water was obtained, which contained about 10 ppt platinum. The consumption rate was about 10 μg kA / h, and it was found that the consumed platinum was eluted in the electrolytic solution.

[0025]

Example 2 An electrolytic cell was divided into an anode chamber, an intermediate chamber and a cathode chamber by using two cation exchange membranes (Nafion 115 manufactured by DuPont). Prepare a perforated plate in which 1mm thick glassy carbon is perforated in 3mm pitch with 2mm diameter holes in a staggered pattern.
The porous plate was used as the cathode as it was, and the porous plate was used as the anode in advance in 40% borofluoric acid at 40 ° C. and 1 A / dm ² .
The one that has been subjected to the anodizing treatment for a long time is used.
It was installed so that it adhered closely at kg / cm ² . The intermediate chamber was filled with an ion exchange resin composed of Nafion particles manufactured by DuPont.

The anode chamber and the cathode chamber were filled with so-called ultrapure water having an electric conductivity of 18 MΩcm or less, and electrolysis was performed at a current density of 10 A / dm ² per electrode projection surface. The temperature was 25 ° C. Acid water with pH 4.5 and ORP of 1150 mV (vsAg / AgCl) in the anode chamber, and pH 9.4 and ORP of -24 mV (vsAg / AgCl) in the cathode chamber.
Alkaline water which is Ag / AgCl) was obtained. High O on the anode side
It is considered that the reason why the acidic water of RP was obtained is due to the partial generation of ozone, and the permeation of hydrogen from the cathode side was completely blocked. On the cathode side, it was found that the generated hydrogen caused a sufficient decrease in ORP. The metallic impurities in the acidic water and the alkaline water obtained in the bipolar chambers were both below the detection limit (ND), which was a level that could be sufficiently used for cleaning electronic devices.

[0027]

[Example 3] The same electrolytic cell as in Example 1 was used, and PTFE fiber as a core material prepared by kneading PTFE resin while impregnating fluororesin as an anode was used as the perforated plate of Example 1. Apply and apply pressure of 1 kg / cm ² at 370 ℃ for 15
What was hot pressed for a minute was used. Current collector on the surface
It was converted to an oxide by heat treatment in an oxidizing atmosphere at 600 ° C. Electrolysis was performed at a current density of 10 A / dm ² while supplying an aqueous solution in which ammonium chloride was added to pure water so that the concentration of chloride ions was 1000 ppm, to the anode chamber. The pH in the anode chamber is 3.
2 acid water with ORP of 1200 mV has a pH in the cathode chamber
At 9.5 alkaline water was obtained with an ORP of 330 mV. The consumption rate of the anode was equivalent to 8 μg / Ah.

[0028]

[Example 4] As the anode, the same graphite electrode as that of the perforated plate of Example 3 was used except that no pretreatment was performed, and electrolysis was performed under the same electrolysis conditions as in Example 3. In the cathode chamber, the same alkaline water as in Example 3 having a pH of 9.5 and an ORP of 330 mV was obtained.
Acidic water with a P of 850 mV was obtained. It was speculated that the decrease in ORP compared with Example 3 was due to no ozone generation. The consumption rate of the anode was about 10 times that of Example 3.
It was 95 μg / Ah, and a slight yellow coloration was observed in the resulting electrolyzed water probably because of partial graphite collapse.

[0029]

Example 5 An electrolytic cell having the same structure as in Example 1 was prepared except that porous graphite was used as the cathode. The current density was set to 10 A / dm ^2, and electricity was supplied to the cathode while supplying oxygen gas having a concentration of 95% concentrated from the air by the PSA method. As a result, the pH of the anode chamber is 3.5 and the ORP
Of 950 mV of acidic water and hydrogen peroxide of 20 ppm concentration was obtained in the cathode chamber. The metal content of both the acidic water and the hydrogen peroxide solution was below the detection limit, which was a level that could be sufficiently used for cleaning electronic devices.

[0030]

INDUSTRIAL APPLICABILITY The present invention provides an electrolytic cell for producing electrolyzed water which is divided into an anode chamber having an anode and a cathode chamber having a cathode by an ion exchange membrane, and at least one of the anode and the cathode is made non-porous. It is an electrolytic cell characterized by being composed of carbon. Unlike conventional electrolyzers for electrolyzed water production,
In the present invention, by using a carbon electrode instead of a metal electrode, it is possible to prevent mixing of metal components into electrolyzed water obtained by electrolysis, and acidic water or alkaline water containing almost no metal impurities that can also be used for cleaning electronic devices. It is possible to manufacture.

Further, since the non-porous carbon electrode which does not have the brittleness of the conventional carbon electrode is used as the carbon electrode, the consumption rate is very slow, the practical long life is provided, and the electrolyzed water due to the carbon collapse is used. It is possible to provide an electrolytic cell for producing electrolyzed water in which the above-mentioned contamination hardly occurs. Examples of non-porous carbon include graphite and glassy carbon. Since graphite is relatively porous, a material having a porosity as low as possible is selected, and the porous portion of the surface is made of fluororesin or the like. It is desirable to block and improve vulnerability.

Glassy carbon has a much lower porosity than graphite and is a preferred material for non-porous carbon electrodes. For example, when the surface is used after being electrolytically treated in borofluoric acid to improve conductivity and corrosion resistance, a more desirable non-porous carbon electrode is obtained. The electrolytic cell for producing electrolyzed water according to the present invention may be a three-chamber type electrolytic cell in addition to the two-chamber type electrolytic cell.

[Brief description of the drawings]

FIG. 1 is a schematic vertical sectional view showing an example of a two-chamber type electrolytic cell for producing electrolyzed water according to the present invention.

FIG. 2 is a schematic vertical sectional view showing an example of a three-chamber type electrolytic cell for producing electrolyzed water according to the present invention.

[Explanation of symbols]

1 ... Two-chamber type electrolytic cell 2 ... Ion exchange membrane 3 ...
・ Anode chamber 4 ・ ・ ・ Cathode chamber 5 ・ ・ ・ Non-porous carbon anode 6 ・ ・ ・ Non-porous carbon cathode 7 ・ ・ ・ Pure water or salt solution supply port 8 ・ ・ ・ Acid water outlet 9 ・・ Pure water supply port
10 ・ ・ ・ Alkaline water outlet 11 ・ ・ ・ Packing

Claims (6)

[Claims] 1. In an electrolytic cell for producing electrolyzed water, which is divided into an anode chamber having an anode and a cathode chamber having a cathode by an ion exchange membrane, at least one of the anode and the cathode is made of non-porous carbon. An electrolytic cell characterized in that 2. The electrolytic cell according to claim 1, wherein the non-porous carbon is graphite whose surface is treated with a fluororesin. 3. The electrolytic cell according to claim 1, wherein the non-porous carbon is glassy carbon. 4. The electrolytic cell according to claim 3, wherein the surface of the glassy carbon is electrolyzed in borofluoric acid. 5. A three-chamber electrolyzed electrolytic cell for producing electrolyzed water, which is divided into an anode chamber having an anode and an intermediate chamber by an anion exchange membrane and a cathode chamber having a cathode by a cation exchange membrane, respectively. An electrolytic cell characterized in that at least one electrode material of the anode and the cathode is composed of non-porous carbon pores. 6. An anode chamber and an intermediate chamber are partitioned by an anion exchange membrane, and the intermediate chamber and a cathode chamber are partitioned by a cation exchange membrane, respectively, and an anode for the anode chamber is provided on the anode chamber surface of the anion exchange membrane. An intermediate chamber cathode on the intermediate chamber surface of the anion exchange membrane, an intermediate chamber anode on the intermediate chamber surface of the cation exchange membrane,
And a three-chamber electrolyzed cell for producing electrolyzed water in which a cathode chamber cathode is closely attached to the cathode chamber surface of the cation exchange membrane, the anode chamber anode, intermediate chamber cathode, intermediate chamber anode and cathode chamber An electrolytic cell, wherein at least one electrode of the cathode for use is composed of non-porous carbon holes.