JPH09194549A - Thermosetting resin - Google Patents

Thermosetting resin

Info

Publication number
JPH09194549A
JPH09194549A JP2043696A JP2043696A JPH09194549A JP H09194549 A JPH09194549 A JP H09194549A JP 2043696 A JP2043696 A JP 2043696A JP 2043696 A JP2043696 A JP 2043696A JP H09194549 A JPH09194549 A JP H09194549A
Authority
JP
Japan
Prior art keywords
thermosetting resin
group
benzocyclobutene
resin
polyphenylene ether
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2043696A
Other languages
Japanese (ja)
Inventor
Masanori Mizutani
昌紀 水谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2043696A priority Critical patent/JPH09194549A/en
Publication of JPH09194549A publication Critical patent/JPH09194549A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To obtain a thermosetting resin which comprises a polyphenylene ether resin bearing unsaturated groups and a compound bearing benzocyclobutene groups and is useful in sealing electric and electronic parts because it is excellent in low hygroscopicity heat resistance, mechanical strength and electric properties. SOLUTION: (A) One hundred parts by weight of a poly(phenylene ether) bearing unsaturated groups such as allyl groups are formulated to a compound bearing benzocyclobutene groups (or its partial reaction product), preferably in an amount of 10-1,800 pts.wt. to give this thermosetting resin. In a preferred embodiment, an inorganic powder, for example, silica powder is added to this thermosetting resin.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の技術分野】本発明は、低吸湿性や耐熱性、機械
的特性や電気的特性等に優れて電気・電子部品の封止処
理や固着処理などに好適な熱硬化性樹脂に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermosetting resin which is excellent in low hygroscopicity, heat resistance, mechanical characteristics and electrical characteristics and is suitable for sealing and fixing treatment of electric / electronic parts.

【0002】[0002]

【発明の背景】半導体装置等の電気・電子部品の封止処
理や固着処理に、作業性や電気的特性等の利便性に着目
されてエポキシ系樹脂やポリイミド系樹脂が専ら用いら
れる中、電気・電子部品の高性能化や高機能化等に伴っ
て、低吸湿特性や電気的特性の向上、さらには機械的性
質の高温特性の向上などの、これまでのエポキシ系樹脂
やポリイミド系樹脂では対処できない高度な性能が要求
されている。
BACKGROUND OF THE INVENTION Epoxy-based resins and polyimide-based resins are used exclusively for the sealing and fixing processing of electric and electronic parts such as semiconductor devices because of their convenience in workability and electrical characteristics.・ With the higher performance and higher functionality of electronic components, the conventional epoxy-based resins and polyimide-based resins, such as low moisture absorption characteristics and electrical characteristics, as well as high temperature characteristics of mechanical properties High performance that cannot be dealt with is required.

【0003】[0003]

【発明の技術的課題】従って本発明は、低吸湿性や耐熱
性、機械的特性や電気的特性等に優れて電気・電子部品
の高度な封止処理や固着処理を達成できる樹脂の開発を
課題とする。
SUMMARY OF THE INVENTION Therefore, the present invention aims to develop a resin which is excellent in low hygroscopicity, heat resistance, mechanical properties, electrical properties and the like and which can achieve a high degree of sealing treatment and fixing treatment for electric and electronic parts. It is an issue.

【0004】[0004]

【課題の解決手段】本発明は、不飽和基含有のポリフェ
ニレンエーテル系樹脂と、ベンゾシクロブテン基含有化
合物を成分とすることを特徴とする熱硬化性樹脂を提供
するものである。
The present invention provides a thermosetting resin containing an unsaturated group-containing polyphenylene ether resin and a benzocyclobutene group-containing compound as components.

【0005】[0005]

【発明の効果】上記構成の熱硬化性樹脂を用いることに
より、ポリフェニレンエーテル系樹脂がその不飽和基を
介しシクロブテン基と反応してベンゾシクロブテン基含
有化合物間に介在することとなるためか、ベンゾシクロ
ブテン基含有化合物に基づく低吸湿性や電気的特性、高
温での機械的特性等における高度な性能を維持しつつ脆
くて損壊しやすい性質が緩和され、電気・電子部品等の
高度な封止処理や固着処理を達成できて信頼性の向上を
はかることができる。
EFFECTS OF THE INVENTION By using the thermosetting resin having the above constitution, the polyphenylene ether resin reacts with the cyclobutene group through its unsaturated group and intervenes between the benzocyclobutene group-containing compounds. While maintaining high performance such as low hygroscopicity and electrical properties based on benzocyclobutene group-containing compounds, and mechanical properties at high temperatures, the property of being brittle and easily damaged is mitigated, and advanced sealing of electrical and electronic parts, etc. The stopping treatment and the fixing treatment can be achieved, and the reliability can be improved.

【0006】[0006]

【発明の実施形態】本発明の熱硬化性樹脂は、不飽和基
含有のポリフェニレンエーテル系樹脂と、ベンゾシクロ
ブテン基含有化合物を成分とするものである。そのポリ
フェニレンエーテル系樹脂としては、アリル基等に基づ
く炭素−炭素二重結合や炭素−炭素三重結合等の不飽和
結合基を有する成分を官能基等を介してポリフェニレン
エーテル鎖の側鎖に導入したものなどがあげられる。よ
り具体的には、特公平5−8930号公報や特公平5−
8931号公報、特公平5−8932号公報や特公平5
−8933号公報、特開平5−309785号公報等に
よる教示物などがあげられる。
BEST MODE FOR CARRYING OUT THE INVENTION The thermosetting resin of the present invention comprises an unsaturated group-containing polyphenylene ether resin and a benzocyclobutene group-containing compound as components. As the polyphenylene ether resin, a component having an unsaturated bond group such as a carbon-carbon double bond or a carbon-carbon triple bond based on an allyl group is introduced into a side chain of a polyphenylene ether chain through a functional group or the like. Something is included. More specifically, Japanese Patent Publication No. 5-8930 and Japanese Patent Publication No.
8931, Japanese Patent Publication No. 5-8932, and Japanese Patent Publication No. 5
The teaching materials and the like disclosed in Japanese Patent Application Laid-Open No. 8933, Japanese Patent Application Laid-Open No. 5-309785, and the like can be given.

【0007】ベンゾシクロブテン基含有化合物として
は、分子中にベンゾシクロブテン基を有するモノマータ
イプや、オリゴマーないしポリマー等の部分反応物タイ
プなどの適宜な化合物を用いることができ、その例とし
ては下記の一般式で表されるものなどがあげられる。
As the benzocyclobutene group-containing compound, an appropriate compound such as a monomer type having a benzocyclobutene group in the molecule or a partial reactant type such as an oligomer or a polymer can be used. Examples include those represented by the general formula.

【0008】前記の一般式において、R1は直接結合又
は多価の無機基、あるいは多価の有機基であり、好まし
いR1は基中に下記の化学構造を有するものである。
In the above general formula, R 1 is a direct bond or a polyvalent inorganic group, or a polyvalent organic group, and preferred R 1 is a group having the following chemical structure.

【0009】特に好ましいR1は、基中に下記の化学構
造を有するものである。
Particularly preferred R 1 has the following chemical structure in the group.

【0010】また前記の一般式において、R2は水素、
電子吸引性又は電子供与性の置換基であり、R3、R4
メチル基やエチル基、プロピル基やブチル基、イソブチ
ル基やペンチル基、ヘキシル基等の炭素数が1〜6のア
ルキル基、ハロゲン基、ニトロ基、シアノ基である。
x、y、zは0又は1であり、0であるもの、従ってR
2、R3、R4の各基を有しないものが好ましい。
In the above general formula, R 2 is hydrogen,
An electron-withdrawing or electron-donating substituent, R 3 and R 4 are alkyl groups having 1 to 6 carbon atoms such as methyl group, ethyl group, propyl group, butyl group, isobutyl group, pentyl group, hexyl group, etc. , A halogen group, a nitro group, and a cyano group.
x, y, z are 0 or 1 and are 0, thus R
Those having no groups of 2 , R 3 , and R 4 are preferable.

【0011】分子中に、ベンゾシクロブテン基に基づく
ものとは別個の炭素−炭素不飽和結合を有するベンゾシ
クロブテン基含有化合物は、多量体化して高分子量体と
することも可能であり、本発明においてはかかる多量体
化によりオリゴマーやポリマーとしたものもベンゾシク
ロブテン基含有化合物として用いうる。
The benzocyclobutene group-containing compound having a carbon-carbon unsaturated bond different from that based on the benzocyclobutene group in the molecule can be polymerized into a high molecular weight compound. In the present invention, oligomers or polymers obtained by such multimerization can also be used as the benzocyclobutene group-containing compound.

【0012】本発明において好ましく用いうるベンゾシ
クロブテン基含有化合物は、下記の式(A): で表される化合物又は/及びそのオリゴマーやポリマー
からなる部分反応物である。かかる化合物は、サイクロ
テン3022(商品名、ダウケミカル社製)などとして
市販されている。
The benzocyclobutene group-containing compound preferably used in the present invention is represented by the following formula (A): It is a partial reaction product consisting of the compound represented by and / or its oligomer or polymer. Such a compound is commercially available as Cycloten 3022 (trade name, manufactured by Dow Chemical Co.).

【0013】本発明の熱硬化性樹脂は、不飽和基含有の
ポリフェニレンエーテル系樹脂とベンゾシクロブテン基
含有化合物のそれぞれを1種又は2種以上用いた、粉末
状等の固体混合物や溶媒等による混合溶液などの適宜な
形態物として得ることができる。溶媒としては、例えば
クロロホルムやトリクロロエチレン、トルエンやキシレ
ン等の芳香族炭化水素、塩化メチレンやメチルエチルケ
トン、メチルブチルケトンなどの適宜なものを用いう
る。
The thermosetting resin of the present invention comprises a solid mixture such as a powder, a solvent, etc. containing one or more of each of the unsaturated group-containing polyphenylene ether resin and the benzocyclobutene group-containing compound. It can be obtained as an appropriate form such as a mixed solution. Suitable solvents include, for example, chloroform, trichloroethylene, aromatic hydrocarbons such as toluene and xylene, methylene chloride, methyl ethyl ketone, and methyl butyl ketone.

【0014】また熱硬化性樹脂は、シート等の適宜な形
態に二次成形して実用に供することもできる。シート状
に成形したものは、取扱性に優れ、厚さや形状等の均一
性に優れる接着剤層を容易に付与でき、安定した強度で
信頼性よく固着処理できるシート型接着剤などとして特
に好ましく用いうる。シート状成形物の形成は、例えば
前記した固体混合物の押出成形方式、その加熱溶融物や
混合溶液をセパレータ等の上に展開して冷却又は乾燥さ
せる方式などの適宜な方式で行いうる。シート厚は1〜
200μmが一般的であるが、これに限定されず使用目
的等に応じて適宜に決定することができる。
Further, the thermosetting resin can be put into practical use by secondary molding into an appropriate form such as a sheet. A sheet-shaped adhesive is particularly preferably used as a sheet-type adhesive that has excellent handleability, can easily be provided with an adhesive layer having excellent uniformity in thickness, shape, etc., and can be securely fixed with stable strength. sell. The sheet-shaped molded article can be formed by an appropriate method such as an extrusion molding method of the above-described solid mixture, a method of spreading the heated melt or a mixed solution thereof on a separator or the like, and cooling or drying. Sheet thickness is 1
The thickness is generally 200 μm, but is not limited to this and can be appropriately determined according to the purpose of use and the like.

【0015】前記において、不飽和基含有のポリフェニ
レンエーテル系樹脂とベンゾシクロブテン基含有化合物
の使用割合は、封止時や固着時等における作業性、未硬
化時や硬化後における機械的特性などの点より、ポリフ
ェニレンエーテル系樹脂100重量部に対しベンゾシク
ロブテン基含有化合物5〜2000重量部、就中7〜1
900重量部、特に10〜1800重量部が好ましい。
そのベンゾシクロブテン基含有化合物の使用割合が過少
では溶融粘度が高くて接着面との濡れ性に乏しくなる場
合があり、過多では脆くて割れやすく機械的特性に乏し
くなる場合がある。
In the above, the ratio of the unsaturated group-containing polyphenylene ether resin and the benzocyclobutene group-containing compound used depends on workability at the time of sealing or fixing, mechanical properties at uncured or after curing, and the like. From the point, 5 to 2000 parts by weight of the benzocyclobutene group-containing compound, especially 7-1 to 100 parts by weight of the polyphenylene ether resin.
900 parts by weight, particularly 10 to 1800 parts by weight are preferred.
If the proportion of the benzocyclobutene group-containing compound used is too small, the melt viscosity may be high and the wettability with the adhesive surface may be poor, and if it is too large, the compound may be brittle and easily cracked, resulting in poor mechanical properties.

【0016】本発明の熱硬化性樹脂の形成に際しては、
吸湿性や耐熱性、機械的特性や電気的特性等の性質の調
節などを目的に、あるいは接着力の調節や導電性の付
与、伝熱性の向上等の使用目的に応じた特性の付与など
を目的に、必要に応じて適宜な配合成分も加えることが
できる。
When forming the thermosetting resin of the present invention,
For the purpose of adjusting properties such as hygroscopicity, heat resistance, mechanical properties, electrical properties, etc., or adjusting properties such as adhesion, conductivity, and heat transfer properties, etc. For the purpose, appropriate compounding ingredients can be added if necessary.

【0017】前記配合成分の例としては、スチレン・ブ
タジエンゴムやブタジエンゴム、1,2−ポリブタジエ
ンゴムやエチレン・プロピレンゴム、天然ゴムやイソプ
レンゴム、ニトリルゴムや水素化ニトリルゴム、スチレ
ン・イソプレンブロック共重合体やスチレン・ブタジエ
ンブロック共重合体、スチレン・エチレン・ブチレンブ
ロック共重合体やブチルゴム、アクリルゴムやシリコー
ンゴム、フッ素ゴムやウレタンゴムの如きゴム系ポリマ
ー、不飽和基を含有しないポリフェニレンエーテルやポ
リエーテルイミド、ポリカーボネートやポリエーテルス
ルホン、ポリアリレートやポリスルホン、ポリアミドイ
ミドやポリスチレン、ポリエステルやポリイミド、ポリ
アミドやジアリルフタレート樹脂、エポキシ樹脂やフェ
ノキシ樹脂、トリアリル(イソ)シアヌレート系樹脂の
如きポリマー、あるいはかかるポリマーの各種の変性物
などがあげられる。
Examples of the compounding components include styrene / butadiene rubber, butadiene rubber, 1,2-polybutadiene rubber, ethylene / propylene rubber, natural rubber and isoprene rubber, nitrile rubber and hydrogenated nitrile rubber, and styrene / isoprene block copolymers. Polymers, styrene / butadiene block copolymers, styrene / ethylene / butylene block copolymers, butyl rubber, acrylic rubber and silicone rubber, rubber-based polymers such as fluororubber and urethane rubber, polyphenylene ether and poly containing no unsaturated groups Ether imide, polycarbonate or polyether sulfone, polyarylate or polysulfone, polyamide imide or polystyrene, polyester or polyimide, polyamide or diallyl phthalate resin, epoxy resin or phenoxy resin, tri Such as Lil (iso) cyanurate resins such polymers, or various modified products of such polymers.

【0018】また、例えばアルミニウムや銅、銀や金、
ニッケルやクロム、錫や鉛、亜鉛やパラジウム、半田の
如き金属ないし合金、アルミナやシリカ、マグネシアや
窒化ケイ素の如きセラミック、その他カーボンや各種の
顔料等からなる種々の無機粉末、シラン系やチタン系等
のカップリング剤、ラジカル系等の開始剤や硬化触媒、
表面調整剤や酸化防止剤、染料なども必要に応じて配合
することができる。
Further, for example, aluminum or copper, silver or gold,
Nickel, chromium, tin, lead, zinc, palladium, metals or alloys such as solder, alumina and silica, ceramics such as magnesia and silicon nitride, various inorganic powders such as carbon and various pigments, silane-based and titanium-based Such as coupling agents, radical type initiators and curing catalysts,
Surface modifiers, antioxidants, dyes and the like can be added as required.

【0019】なお上記のポリマー成分の配合割合は、そ
の使用目的に応じて適宜に決定しうるが一般には、不飽
和基含有のポリフェニレンエーテル系樹脂とベンゾシク
ロブテン基含有化合物とに基づく物性を維持する点など
より、不飽和基含有のポリフェニレンエーテル系樹脂と
ベンゾシクロブテン基含有化合物の合計100重量部あ
たり、200重量部以下、就中100重量部以下、特に
80重量部以下とされる。また無機粉末の配合割合も封
止性や接着性などの点より当該合計100重量部あた
り、2000重量部以下、就中1500重量部以下、特
に1000重量部以下とされる。
The mixing ratio of the above-mentioned polymer component can be appropriately determined according to the purpose of use, but generally, the physical properties based on the unsaturated group-containing polyphenylene ether resin and the benzocyclobutene group-containing compound are maintained. Therefore, the total amount of the unsaturated group-containing polyphenylene ether resin and the benzocyclobutene group-containing compound is 200 parts by weight or less, preferably 100 parts by weight or less, and particularly 80 parts by weight or less. In addition, the mixing ratio of the inorganic powder is 2000 parts by weight or less, particularly 1500 parts by weight or less, and particularly 1000 parts by weight or less, per 100 parts by weight in total in view of sealing property and adhesiveness.

【0020】本発明の熱硬化性樹脂は、従来のポキシ系
樹脂やポリイミド系樹脂に匹敵する良好な取扱性ないし
作業性を示し、加熱処理により熱硬化して強固な接着力
等を発現すると共に、低吸湿性の硬化物となる。また通
例、ガラス転移温度が200℃を超え、誘電率が3以下
(1MHz)であるなどの電気特性に優れた硬化物を形
成する。なお加熱による硬化処理は、例えばヒーターや
超音波、紫外線などの適宜な方式で行うことができる。
The thermosetting resin of the present invention exhibits good handleability and workability comparable to those of the conventional poxy resin and polyimide resin, and is heat-cured by heat treatment to exhibit a strong adhesive force and the like. It becomes a cured product with low hygroscopicity. Further, it usually forms a cured product having excellent electrical characteristics such as a glass transition temperature of more than 200 ° C. and a dielectric constant of 3 or less (1 MHz). The curing treatment by heating can be performed by an appropriate method such as a heater, ultrasonic waves, or ultraviolet rays.

【0021】本発明の熱硬化性樹脂は、半導体装置の封
止処理等の各種の成形材料や種々の材料の接着処理など
に好ましく用いうる。特に低吸湿性や耐熱性、機械的特
性や電気的特性等に優れることから信頼性に優れる封止
処理や固着処理が要求される半導体装置やリードフレー
ムなどで代表される電気・電子部品の封止処理や固着処
理に好ましく用いられる。ちなみにリードフレームにダ
イボンドした半導体装置のパッケージを半田実装する際
に、水分の気化膨張によるパッケージクラックの発生を
防止する点などよりは低吸湿性に優れて、水分を含みに
くいことが特に重要な特性となる。
The thermosetting resin of the present invention can be preferably used for various molding materials such as sealing treatment of semiconductor devices and adhesion treatment of various materials. In particular, it has low hygroscopicity, heat resistance, mechanical properties, electrical properties, etc., and is highly reliable. Therefore, it is necessary to seal and fix electric and electronic parts such as semiconductor devices and lead frames that require sticking treatment. It is preferably used for stopping treatment and fixing treatment. By the way, when soldering a package of a semiconductor device die-bonded to a lead frame, it is superior in low moisture absorption and it is particularly important that it does not contain moisture, rather than preventing package cracking due to vaporization expansion of moisture. Becomes

【0022】[0022]

【実施例】【Example】

実施例1 上記式(A)のベンゾシクロブテン基含有化合物及びそ
の部分反応物/アリル化ポリフェニレンエーテル系樹脂
(アリル化率14%)を80/20の重量比でクロロホ
ルムを介して混合溶液とし、それをポリエステルフィル
ムの離形処理面上に塗布し、加熱乾燥させて厚さ20μ
mの熱硬化性樹脂シートを得た。
Example 1 A benzocyclobutene group-containing compound of the above formula (A) and its partial reaction product / allylated polyphenylene ether-based resin (allylation rate 14%) were mixed with chloroform at a weight ratio of 80/20 to form a mixed solution, Apply it to the release-treated surface of polyester film, heat dry to a thickness of 20μ
A thermosetting resin sheet of m was obtained.

【0023】実施例2 ベンゾシクロブテン基含有化合物及びその部分反応物/
アリル化ポリフェニレンエーテル系樹脂を30/70の
重量比で用いたほかは実施例1に準じてシートを得た。
Example 2 Benzocyclobutene group-containing compound and its partial reaction product /
A sheet was obtained in the same manner as in Example 1 except that the allylated polyphenylene ether resin was used in a weight ratio of 30/70.

【0024】実施例3 ベンゾシクロブテン基含有化合物及びその部分反応物/
アリル化ポリフェニレンエーテル系樹脂/スチレン・ブ
タジエンブロック共重合体を60/20/20の重量比
で混合した溶液を用いたほかは実施例1に準じてシート
を得た。
Example 3 Benzocyclobutene group-containing compound and its partial reaction product /
A sheet was obtained in the same manner as in Example 1 except that a solution obtained by mixing the allylated polyphenylene ether resin / styrene / butadiene block copolymer at a weight ratio of 60/20/20 was used.

【0025】実施例4 ベンゾシクロブテン基含有化合物及びその部分反応物/
アリル化ポリフェニレンエーテル系樹脂/ブタジエンゴ
ム/シラン系カップリング剤を60/20/20/1の
重量比で混合した溶液を用いたほかは実施例1に準じて
シートを得た。
Example 4 Benzocyclobutene group-containing compound and its partial reaction product /
A sheet was obtained in the same manner as in Example 1 except that a solution in which an allylated polyphenylene ether resin / butadiene rubber / silane coupling agent was mixed at a weight ratio of 60/20/20/1 was used.

【0026】比較例 ビスフェノールA型エポキシ樹脂/イミダゾール系硬化
剤を96/4の重量比でメチルエチルケトンを介して混
合溶液としたものを用いたほかは実施例1に準じてシー
トを得た。
Comparative Example A sheet was obtained in the same manner as in Example 1 except that a mixed solution of a bisphenol A type epoxy resin / imidazole type curing agent in a weight ratio of 96/4 via methyl ethyl ketone was used.

【0027】評価試験1 実施例、比較例で得た熱硬化性樹脂シートについて下記
の特性を調べた。 剪断接着力 熱硬化性樹脂シートを介して3mm角のシリコンチップを
42アロイ板に所定の条件で仮固着した後、所定の条件
で硬化処理し(本固着)、その250℃における剪断接
着力をプッシュプルゲージにて測定した。前記の仮固着
は、実施例1、比較例では120℃、実施例2では22
0℃、実施例3,4では170℃の加熱条件とし、本固
着(硬化)は、実施例1〜4では250℃で60分間、
比較例では150℃で60分間の加熱条件とした。なお
前記において接着剤の欠如、はみ出しは生じず、均一な
厚さで固着処理できた。
Evaluation Test 1 The following characteristics of the thermosetting resin sheets obtained in Examples and Comparative Examples were examined. Shear adhesive strength A 3 mm square silicon chip is temporarily fixed to a 42 alloy plate through a thermosetting resin sheet under predetermined conditions, and then cured under the predetermined conditions (main fixing), and its shear adhesive strength at 250 ° C is measured. It was measured with a push-pull gauge. The temporary fixing is 120 ° C. in Example 1 and Comparative Example, and 22 in Example 2.
The heating conditions are 0 ° C. and 170 ° C. in Examples 3 and 4, and the main fixation (curing) is 250 ° C. for 60 minutes in Examples 1 to 4.
In the comparative example, the heating conditions were 150 ° C. and 60 minutes. In the above, neither lack of adhesive nor squeeze-out occurred, and fixing treatment could be performed with a uniform thickness.

【0028】ガラス転移温度 本固着処理に準じた加熱処理で得た硬化物について、T
MAにて昇温速度5℃/分の条件下にガラス転移温度を
調べた。
Glass transition temperature T of the cured product obtained by the heat treatment according to the present fixing treatment
The glass transition temperature was examined by MA under the condition of a temperature rising rate of 5 ° C./min.

【0029】吸湿率 本固着処理に準じた加熱処理で得た硬化物を、85℃、
85RH%の条件下に168時間放置した後、微量水分
測定器にてその吸湿量を測定し、それより吸湿率を算出
した。
Moisture absorption rate The cured product obtained by the heat treatment according to this fixing treatment is
After leaving it under the condition of 85 RH% for 168 hours, its moisture absorption amount was measured with a trace moisture meter, and the moisture absorption rate was calculated from it.

【0030】誘電率 本固着処理に準じた加熱処理で得た硬化物について、そ
の1MHzにおける誘電率を調べた。
Dielectric Constant The dielectric constant at 1 MHz of the cured product obtained by the heat treatment according to the main fixing treatment was examined.

【0031】前記の結果を次表に示した。 *:特定できずThe results are shown in the following table. *: Not specified

【0032】評価試験2 上記剪断接着力の場合に準じて12mm角のシリコンチッ
プを42アロイリードフレームに仮着して硬化処理した
後、それを実施例1〜4に準じて得た熱硬化性樹脂の混
合溶液を用いてパッケージし上記本固着処理に準じて硬
化処理して封止し、得られた半導体装置を85℃、85
RH%の条件下に480時間放置して吸湿させ、それを
215℃、30秒のVPS試験を行い、走査型超音波探
傷装置にて外部クラック発生の有無を調べたが、クラッ
クの発生はいずれの場合にも認められなかった。なお外
部クラックとは、パッケージの外部にまで到達したクラ
ックを意味する。
Evaluation Test 2 A 12 mm square silicon chip was temporarily attached to a 42 alloy lead frame and hardened in the same manner as in the case of the shear adhesive strength described above, and then the thermosetting property was obtained according to Examples 1 to 4. The semiconductor device thus obtained was packaged with a mixed solution of resins, cured according to the above-mentioned main fixing treatment, and sealed, and the obtained semiconductor device was heated at 85 ° C.
It was left to stand under RH% conditions for 480 hours to absorb moisture, and then subjected to a VPS test at 215 ° C. for 30 seconds to check for the presence of external cracks with a scanning ultrasonic flaw detector. In the case of, it was not recognized. The external crack means a crack reaching the outside of the package.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 C09J 171/12 JFW C09J 171/12 JFW ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification code Internal reference number FI Technical display location C09J 171/12 JFW C09J 171/12 JFW

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 不飽和基含有のポリフェニレンエーテル
系樹脂と、ベンゾシクロブテン基含有化合物を成分とす
ることを特徴とする熱硬化性樹脂。
1. A thermosetting resin comprising an unsaturated group-containing polyphenylene ether resin and a benzocyclobutene group-containing compound as components.
【請求項2】 請求項1において、ベンゾシクロブテン
基含有化合物が式: で表される化合物又はその部分反応物の一方又は両方を
少なくとも含むものである熱硬化性樹脂。
2. The benzocyclobutene group-containing compound according to claim 1, wherein the compound having the formula: A thermosetting resin containing at least one or both of the compound represented by or a partial reaction product thereof.
【請求項3】 請求項1又は2において、無機粉末を含
有して電気・電子部品の封止処理又は固着処理に用いる
ためのものである熱硬化性樹脂。
3. A thermosetting resin according to claim 1, which contains an inorganic powder and is used for sealing or fixing treatment of electric / electronic parts.
【請求項4】 請求項1〜3において、シート状に成形
してなる熱硬化性樹脂。
4. The thermosetting resin as claimed in claim 1, which is formed into a sheet.
JP2043696A 1996-01-11 1996-01-11 Thermosetting resin Pending JPH09194549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2043696A JPH09194549A (en) 1996-01-11 1996-01-11 Thermosetting resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2043696A JPH09194549A (en) 1996-01-11 1996-01-11 Thermosetting resin

Publications (1)

Publication Number Publication Date
JPH09194549A true JPH09194549A (en) 1997-07-29

Family

ID=12027000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2043696A Pending JPH09194549A (en) 1996-01-11 1996-01-11 Thermosetting resin

Country Status (1)

Country Link
JP (1) JPH09194549A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001058230A1 (en) * 2000-02-02 2001-08-09 The Dow Chemical Company Toughened benzocyclobutene based polymers and their use in building-up printed wiring boards
JP2002226681A (en) * 2001-02-02 2002-08-14 Sumitomo Bakelite Co Ltd Heat resistant resin composition and prepreg and laminate each using the same
JP2002226680A (en) * 2001-02-02 2002-08-14 Sumitomo Bakelite Co Ltd Heat resistant resin composition and prepreg and laminate each using the same
JP2002265762A (en) * 2001-03-08 2002-09-18 Nippon Kayaku Co Ltd Benzocyclobutene resin composition, resin-bonded metallic molded part
JP2003064268A (en) * 2001-08-23 2003-03-05 Sumitomo Bakelite Co Ltd Resin composition, copper foil with resin and multilayer printed circuit board
JP2008244464A (en) * 2007-03-01 2008-10-09 Nitto Denko Corp Heat curing die bond film
KR100912918B1 (en) * 2001-07-13 2009-08-20 스미토모 베이클리트 컴퍼니 리미티드 Metal foil with resin and multilayer printed circuit board
JP2011040603A (en) * 2009-08-12 2011-02-24 Disco Abrasive Syst Ltd Processing method and grinding apparatus of wafer
JP2017122212A (en) * 2015-12-21 2017-07-13 ダウ グローバル テクノロジーズ エルエルシー Arylcyclobutene
CN113563825A (en) * 2021-07-30 2021-10-29 中国航空工业集团公司济南特种结构研究所 Hot-melting preparation method of modified benzocyclobutene resin-based adhesive film
CN113652178A (en) * 2021-07-30 2021-11-16 中国航空工业集团公司济南特种结构研究所 Preparation method of modified benzocyclobutene resin-based adhesive film solvent
CN115433451A (en) * 2022-09-19 2022-12-06 郴州功田电子陶瓷技术有限公司 High-speed low-loss resin composition and application thereof
US20230101785A1 (en) * 2021-09-10 2023-03-30 Elite Electronic Material (Kunshan) Co., Ltd. Resin composition and article made therefrom

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6670101B2 (en) 2000-02-02 2003-12-30 Dow Global Technologies Inc. Toughened benzocyclobutene based polymers and their use in building-up printed wiring boards
US6420093B1 (en) 2000-02-02 2002-07-16 The Dow Chemical Company Toughened benzocyclobutene based polymers and their use in building-up printed wiring boards
WO2001058230A1 (en) * 2000-02-02 2001-08-09 The Dow Chemical Company Toughened benzocyclobutene based polymers and their use in building-up printed wiring boards
JP2002226681A (en) * 2001-02-02 2002-08-14 Sumitomo Bakelite Co Ltd Heat resistant resin composition and prepreg and laminate each using the same
JP2002226680A (en) * 2001-02-02 2002-08-14 Sumitomo Bakelite Co Ltd Heat resistant resin composition and prepreg and laminate each using the same
JP2002265762A (en) * 2001-03-08 2002-09-18 Nippon Kayaku Co Ltd Benzocyclobutene resin composition, resin-bonded metallic molded part
KR100912918B1 (en) * 2001-07-13 2009-08-20 스미토모 베이클리트 컴퍼니 리미티드 Metal foil with resin and multilayer printed circuit board
JP2003064268A (en) * 2001-08-23 2003-03-05 Sumitomo Bakelite Co Ltd Resin composition, copper foil with resin and multilayer printed circuit board
JP2008244464A (en) * 2007-03-01 2008-10-09 Nitto Denko Corp Heat curing die bond film
JP4732472B2 (en) * 2007-03-01 2011-07-27 日東電工株式会社 Thermosetting die bond film
JP2011040603A (en) * 2009-08-12 2011-02-24 Disco Abrasive Syst Ltd Processing method and grinding apparatus of wafer
JP2017122212A (en) * 2015-12-21 2017-07-13 ダウ グローバル テクノロジーズ エルエルシー Arylcyclobutene
CN113563825A (en) * 2021-07-30 2021-10-29 中国航空工业集团公司济南特种结构研究所 Hot-melting preparation method of modified benzocyclobutene resin-based adhesive film
CN113652178A (en) * 2021-07-30 2021-11-16 中国航空工业集团公司济南特种结构研究所 Preparation method of modified benzocyclobutene resin-based adhesive film solvent
US20230101785A1 (en) * 2021-09-10 2023-03-30 Elite Electronic Material (Kunshan) Co., Ltd. Resin composition and article made therefrom
CN115433451A (en) * 2022-09-19 2022-12-06 郴州功田电子陶瓷技术有限公司 High-speed low-loss resin composition and application thereof

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