JPH09192962A - Method of handling workpiece and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily release a condition in which a workpiece is stuck to an adhering surface of a flexible sheet. SOLUTION: A flexible sheet 16 is attached to a support wall part 13 having a flat support surface 14. This flexible sheet 16 fixes the workpiece through adhesion with the use of a frictional force with a flat surface of the workpiece and a boundary force. A plurality of balls projected from the support surface 14, for elastically deforming the flexible sheet 16 are moved by a reciprocating member 13 serving as a drive means, between a position which is substantially coincident with the support surface 14 or which is retreated therefrom, and a position which is protruded from the support surface 14 so as to elastically deform the flexible sheet 16. The workpiece stuck to an adhering surface 26 of the flexible sheet 16 can be taken out from the adhering surface 26 by setting the balls 25 at the protruded position.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work handling technique for transferring or transporting a work from one position to another position or for holding or supporting the work.

[0002]

2. Description of the Related Art When manufacturing a semiconductor integrated circuit device,
After fixing the semiconductor chip on which the semiconductor integrated circuit is formed, that is, the semiconductor pellet, to the lead frame, the electrodes formed on the semiconductor pellet and the leads formed on the lead frame are electrically connected to each other by wires, A resin is used to mold the package for sealing.

In manufacturing such a semiconductor integrated circuit device, a lead frame formed of a strip-shaped long thin plate is cut into a predetermined length, and then a semiconductor pellet is mounted, and this is sealed in a resin molding device. Therefore, the step of transporting the lead frame is unavoidable.

Until now, in order to vacuum-adsorb the lead frame, a porous adsorption plate made of sintered metal has been used to convey the lead frame from the support on which it is placed to the next processing step. ing. When a lead frame is sucked using such a suction plate, a large number of leads and tabs are formed on the lead frame, and as a result, it has a large number of slits. It will enter the adsorption plate.

For this reason, it takes time to reach a predetermined degree of vacuum, so that it takes time not only to adsorb the lead frame, which is a work, but also to suck a large amount of air in order to maintain the adsorbing force. Therefore, a large amount of energy is required for suction. Therefore, a large vacuum generator must be used.

When an ejector is used as the vacuum generating device, the energy efficiency for generating the vacuum is not high, so that there is a problem that the energy efficiency is deteriorated. This also applies to the case where a rubber suction pad is used without using a sintered metal suction plate when a plate-shaped work having slits or holes formed therein is transported.

[0007]

[Problems to be Solved by the Invention] Japanese Patent Publication No.
The publication discloses a tray for holding a semiconductor chip or the like, and a flexible sheet and a work are mutually attached without vacuum suction of the semiconductor chip or the like or by adhering them with an adhesive or an adhesive. The frictional force and the interfacial adhesive force are used for adhesion.

However, in this tray, in order to release the state in which the work is adhered to the flexible sheet, the air chamber formed on the back side of the flexible sheet is evacuated to form a vacuum state. To transform the
In order to form a large number of concave portions on the surface of the flexible sheet, it is necessary to increase the degree of vacuum.

Further, as described above, not only the apparatus for generating a vacuum becomes large, but also in the manufacturing process of a semiconductor device, compressed air is easily used because a compressor is used to operate a pneumatic actuator. Whereas negative pressure air or vacuum cannot be easily obtained.

An object of the present invention is to make it possible to easily release the state in which the work is adhered to the adhesive surface of the flexible sheet.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0012]

SUMMARY OF THE INVENTION Among the inventions disclosed in the present application, the outline of a representative one will be briefly described.
It is as follows.

That is, the work handling method of the present invention comprises a step of adhering a work at its flat surface portion to the adhering surface of the flexible sheet by a frictional force and an interfacial force with the work, and applying the work to the flexible sheet. And a detaching step of releasing the adhered state between the work and the adhering surface by forming a protrusion on the adhering surface of the flexible sheet by pressing the retractable member from the back side.

Further, the work handling apparatus of the present invention comprises a support member having a flat support surface, and an adhesive surface attached to the support surface and bonded to the work by frictional force and interfacial force with the flat surface of the work. A flexible sheet having
A plurality of retractable members protruding from the support surface and elastically deforming the flexible sheet on the support member, and a position in which the tip end surface of each of the retractable members is at substantially the same position as the support surface or at a position retracted therefrom. And a driving unit that moves the respective retractable members between a projecting position where the flexible sheet elastically deforms by projecting from the supporting surface, and is bonded to an adhesive surface of the flexible sheet. The work can be detached from the adhesive surface of the flexible sheet by setting the projecting / retracting member at the projecting position.

[0015]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a diagram showing a work handling device according to an embodiment of the present invention. The work handling device is used as a carrying head for supporting and carrying a work.

The work handling device, that is, the carrying head 1 is attached to a vertical moving member 2, and the vertical moving member 2 is vertically moved by a horizontal moving member 4 which is slidable along a horizontal guide member 3. It is installed freely. Therefore, the transport head 1 moves to the support surface 5 at the second position P2 where the work W is opened and placed after adhering the work W placed at the first position P1 on the support surface 5. Then, the work W is transported. In this way, the carrying head 1 is carried by the vertically moving member 2 and the like.

As the work W that can be handled,
Glass, metal or plastic plates,
Any material such as a lead frame, a semiconductor chip, or a semiconductor wafer may be used as long as it has a flat surface portion.

2 and 3 are sectional views showing the internal structure of the carrying head 1 shown in FIG. 1, and FIG. 4 is a view taken along the line IV-IV in FIG.

As shown in the figure, the carrying head 1 has a base portion 11 attached to the vertical moving member 2, and the base portion 1
A tubular body 12 is attached to 1 by bolts 10. The cylindrical body 12 has a support wall portion 13 at the tip, which constitutes a support member. The support wall portion 13 has a flat support surface 14, and a large number of through holes 15 are formed in the support wall portion 13 as shown in FIG.

A flexible sheet 16 is attached to the support surface 14 so as to cover each through hole 15.
The flexible sheet 16 is attached to the support surface 14 with an adhesive. The flexible sheet 16 is made of silicone rubber. Silicone is a polymer having a repeating siloxane bond as a main chain and having an alkyl group, an aryl group, etc. as a side group, and can be crosslinked to a medium degree with a linear polydimethylsiloxane having a high degree of polymerization or a copolymer thereof. The flexible sheet 16 is formed and has rubber-like elasticity. A gel pack sold by Hakuto Co., Ltd. is used as the flexible sheet 16.

A cylindrical housing hole 17 is formed in the cylindrical body 12, and a reciprocating member 18 is housed in the housing hole 17. An air supply hose 19 for supplying compressed air to the air supply port 19 formed in the base portion 11.
a is connected, and the air supply port 19 is opened to an air pressure chamber 21 formed in the base end surface of the reciprocating member 18. Therefore, the reciprocating member 18 serves as a piston, and when compressed air is supplied from the air supply port 19 into the air pressure chamber 21 between the base end surface of the reciprocating member 18 and the base 11, the downward movement in the drawing will occur. It will move forward toward.

As shown in FIG. 4, the illustrated cylindrical body 12 has a circular outer peripheral surface, and the accommodation hole 17 formed therein is also circular, but the cylindrical body 12 has an outer peripheral surface. The shape of the inner peripheral surface of the accommodation hole 17 for accommodating the reciprocating member 18 may be substantially rectangular.

Reciprocating member 1 when compressed air is discharged
A compression coil spring 23 is mounted between the flange portion 22 formed on the reciprocating member 18 and the support wall portion 13 in order to return 8 to the position shown in FIG. A V-packing 24 is fixed to a groove formed in an annular shape on the outer periphery of the base end portion of the reciprocating member 18, and seals so that the air flowing in from the air supply port 19 does not leak toward the compression coil spring 23. Has been done.

A steel ball, that is, a ball 25 is housed in each through hole 15, and when the reciprocating member 18 reaches the retracted limit position as shown in FIG. 2, the tip end surface of the ball 25 is almost the same as the supporting surface 14. The position is set back or is set back. In this way, when the ball 25 as the retractable member is in the retracted position, the adhesive surface 26 of the surface of the flexible sheet 16 is substantially flat, and under this condition, the work W is placed on the flexible sheet. When the work W is pressed against the adhesive surface 26, the work W is adhered to the adhesive surface 26 by the frictional force and the interfacial force with the work W.

FIG. 3 is a view showing a state in which compressed air is supplied from the air supply port 19, and the reciprocating member 18 moves forward against the elastic force of the compression coil spring 23, whereby the ball 25 is moved. As a result, the flexible sheet 16 is projected from the support surface 14, so that the flexible sheet 16 is deformed irregularly according to the surface shape of the ball 25. Therefore, the contact area between the work W and the flexible sheet 16 is reduced as compared with the case shown in FIG. 2, and the frictional force and the interfacial force between the work W and the adhesive surface 26 are reduced, and the work W can be applied. It can be easily removed from the adhesive surface 26 of the flexible sheet 16. Thus, when the ball 25 is projected from the support surface 14, the flexible sheet 16 can be easily deformed in an uneven manner.
A tapered portion 27 is formed on the supporting surface 14 side of the through hole 15.

The work W is used to move the work W from the first position P1 to the second position P2 shown in FIG.
As shown in FIG.
The carriage sheet 1 is moved down under the condition that the carriage is set to the backward limit position, and the flexible sheet 16 provided on the lower surface thereof is moved.
Is brought into contact with the surface of the work W. The surface of the work W is flat, and the flexible sheet 1 is attached to the adhesive surface 26 of this surface.
When 6 is brought into contact with each other, the work W can be formed without using an adhesive or a pressure-sensitive adhesive due to the frictional force and the interfacial adhesion between them.
Will adhere to the flexible sheet 16.

When the bonding is completed, the transport head 1 is moved up and further horizontally moved to the second position P2. By lowering the transport head 1 in this state, the work W is accurately positioned at the second position P2. When compressed air is supplied from the air supply port 19 into the pneumatic chamber 21 in the positioned state, the balls 25 are moved to the position shown in FIG.
As shown in (3), the adhesive force between the work W and the adhesion surface 26 is reduced by protruding from the support surface 14, and the work W is placed at the position P2 by its own weight.

The ball 25 constitutes a retractable member,
Instead of the ball 25, a plurality of rods may be provided on the tip end surface of the reciprocating member 18, and the rods may be projected to form a protrusion on the adhesive surface 26 of the flexible sheet 16. Further, although the piston as the reciprocating member 18 constitutes the driving means for driving the retractable member, the flexible sheet 16 may be deformed by an electric motor. Further, the outer diameter and the number of the balls 25 are determined by the work W to be handled.
It can be arbitrarily set according to conditions such as size and weight of the.

FIG. 5 is a view showing a work handling device according to another embodiment of the present invention. This work handling device is used as a tray or a carrier for supporting and carrying a work. The carrier 31 is a guide member 32.
The workpiece W is placed on the carrier 31 at the first position P1 shown by the solid line in FIG. Then, the work W is carried to the position P2 while being placed on the carrier 31 by carrying the carrier 31 to the second position P2 indicated by the chain double-dashed line. The work W is removed from the carrier 31 for the next processing step.

In order to carry the work W using the tray shown in FIG. 5, that is, the carrying tool 31, the reciprocating member 18 is set to the retracted limit position without supplying compressed air into the pneumatic chamber 21. When the carrier 31 is located at the first position P1 shown by the solid line in FIG.
The work W is placed and pressed on the adhesive surface 26 of. As a result, the work W is bonded and fixed to the bonding surface 26 of the flexible sheet 16 by frictional force and interfacial force.

The carrying tool 31 can be carried in this state, and the work W can be prevented from shifting or coming off from the bonding surface 26 during the carrying. The carrier 31 is shown in FIG.
If it is transported to the position P2 in
Compressed air is supplied to the inside of the ball 1, and as shown in FIG.
5 is projected from the support surface 14. As a result, a protrusion is formed on the flexible sheet 16, and the work W comes into contact with only the protrusion of the flexible sheet 16 corresponding to the ball 25. The frictional force and interfacial force of the work sheet W are reduced, and the work W can be easily lifted from the flexible sheet 16 and removed therefrom.
At the time of this removal, a vacuum tip (not shown) is used and the work W is vacuumed.

FIG. 6 is a view showing another embodiment of the transport head 41, in which case four flexible sheets 16 are attached to the support member 42. Therefore, the four works W can be adsorbed and conveyed at the same time. As the reciprocating member 18 shown in FIGS. 2 and 3 for deforming each of the flexible sheets 16 using the balls 25, four reciprocating members 18 may be provided corresponding to the number of the flexible sheets 16. The flexible sheet 16 may be simultaneously deformed by one reciprocating member 18. However,
The number of flexible sheets 16 provided on the support member 42 is
The number is not limited to the illustrated case, and can be set to any number.

A plurality of flexible sheets 16 may be similarly provided for the tray shown in FIG.

FIG. 7 is a view showing a work transfer device according to still another embodiment of the present invention, in which the transfer head 45 provided on the arm 44 of the robot 43 is substantially cubic or hexahedral. The flexible sheet 16 is provided on five of the six surfaces of the transport head 45, and the arm 4 of the robot 43 is provided on the remaining one surface.
4 are connected.

The transport head 45 is provided with the reciprocating members 18 shown in FIGS. 2 to 4 corresponding to the number of the flexible sheets 16 in order to operate the respective flexible sheets 16. Therefore, after the works W are sequentially adhered to the flexible sheets 16 on the five surfaces, a maximum of five works W can be simultaneously conveyed by the robot 43.

FIG. 8 is a front view showing another embodiment of the transfer head 45 attached to the robot 43, and FIG.
FIG. 9 is a plan view of FIG. 8. As illustrated, the transport head 45 is an octahedron, and the flexible sheet 16 is provided on seven of the eight surfaces.

Although the invention made by the inventor has been specifically described based on the embodiment, the invention is not limited to the above-described embodiment, and can be variously modified without departing from the gist of the invention. Needless to say, there is.

For example, as the flexible sheet, polystyrene, polyethylene,
A resin material such as polyproprene or polycarbonate can be used.

[0040]

Advantageous effects obtained by typical ones of the inventions disclosed in the present application will be briefly described.
It is as follows.

(1). A work having a flat surface can be reliably bonded by the adhesive force and interfacial force of the flexible sheet without vacuum suction or using an adhesive material, and the bonded state can be easily released. can do.

(2) When releasing the adhered state, the flexible sheet is partially projected to form the protrusions, so that the adhered state can be easily achieved without using negative pressure. Can be canceled.

(3). The work can be held and stopped, and the work can be released if necessary.
It can be used to hold a work on a tray for conveyance, or to convey a work from a predetermined position to a next processing position by a transfer device or a robot.

[Brief description of the drawings]

FIG. 1 is a front view showing a work handling device according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing an internal structure of the work handling device shown in FIG. 1 in a state where works are bonded.

FIG. 3 is a sectional view of a portion similar to FIG. 1, showing a state in which a protrusion is formed on the adhesive surface of a flexible sheet.

FIG. 4 is a view taken along the line IV-IV in FIG.

FIG. 5 is a front view showing a work handling device according to another embodiment of the present invention.

FIG. 6 is a plan view showing a work handling device according to another embodiment of the present invention.

FIG. 7 is a plan view showing a work handling device according to another embodiment of the present invention.

8 is a front view showing another type of transfer head mounted on the robot shown in FIG. 7. FIG.

FIG. 9 is a plan view of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Transport head 2 Vertical movement member 3 Guide member 4 Horizontal movement member 5 Support surface 10 Bolt 11 Base part 12 Cylindrical body 13 Support wall portion 14 Support surface 15 Through hole 16 Flexible sheet 17 Receiving hole 18 Reciprocating member 19 Supply Air port 19a Air supply hose 21 Air pressure chamber 22 Flange portion 23 Compression coil spring 24 V packing 25 Ball 26 Adhesive surface 27 Tapered portion 31 Transport tool 32 Guide member 41 Transport head 42 Support member 43 Robot 44 Arm 45 Transport head W work

Claims (2)

[Claims] 1. A method of handling a work, wherein a work having a flat surface is adhered at a portion of the flat surface, and the adhered state is released when the work is removed from the flat surface. A step of adhering to the adhesive surface of the flexible sheet by a frictional force and an interfacial force with the work, and pressing a retractable member against the flexible sheet from the back side of the flexible sheet to form a protrusion on the adhesive surface of the flexible sheet. And a detaching step of releasing the adhered state between the work and the adhering surface by forming a work. 2. A support member having a flat support surface; a flexible sheet having an adhesive surface attached to the support surface and adhered to the work by frictional force and interfacial force with the flat surface of the work; A plurality of projecting / retracting members projecting from the supporting surface and elastically deforming the flexible sheet to the supporting member; and a position in which the tip end surface of each projecting / retracting member is substantially at the same position as the supporting surface or retracted from the supporting surface, A work bonded to the bonding surface of the flexible sheet, and a drive unit that moves the respective retractable members between a projecting position that projects from the supporting surface and elastically deforms the flexible sheet. The work handling apparatus, wherein the retractable member is set to a protruding position so that the retractable member can be detached from the adhesive surface of the flexible sheet.