JPH11188682A - Pneumatic holding device provided with peeling mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently detach a work to be closely attached to a base without damaging or polluting it by providing a peeling mechanism which generates the negative pressure in a clearance between the mechanism and the work by ejecting air, and is provided with a nozzle to feed air into a back side of the work. SOLUTION: When a work 7 which is placed on a grinding machine 2 wet with water and closed attached to the grinding machine 2 by the surface tension is held and moved by a pneumatic holding device A fitted as a hand of a robot after the grinding work is completed, high pressure air C is fed from an air inlet 1, and ejected toward the work 7, and while high pressure air C passes through a clearance between a working surface 5 and the work 7, the negative pressure is generated by the ejector effect and the Bernoulli effect. High pressure air C is ejected from a nozzle 9 through a high pressure air inlet 8, high pressure air C is fed into a back side of work 7 through a hole in the work 7 to break the surface tension, and the work 7 is adsorbed in this condition.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air holding device used when a hard disk, a semiconductor wafer or the like is separated from a polishing machine and removed.

[0002]

2. Description of the Related Art Conventionally, when a work such as a hard disk or a wafer is polished and taken out from a polishing plate, it can be easily peeled off because it is wet with water and is in close contact with the polishing plate due to surface tension. Instead, it was manually moved and removed on the polishing plate to the point where there was a gap on the polishing plate so as not to damage the surface, or the claw-shaped holder was opened and closed and hooked on the inner hole of the disk.

[0003]

However, the surface of the work is touched, and the end face of the hole is strongly pressed by a nail-like holder, so that scratches and dirt are attached, and the polishing mat is damaged. In addition, there is a disadvantage that it takes a long working time and is inefficient.

[0004]

In order to solve the above problems,
Air having a peeling mechanism in which a negative pressure is generated in a gap between the work and the air by ejecting the air, and an air holder for sucking and holding the work and a nozzle for inserting air into the back of the work are added. The problem can be solved by the holding device.

[0005]

When air is blown toward a work from an air holder placed near a work on a flat plate which is placed on a polishing plate wetted with water and closely adhered by surface tension or vacuum,
The space formed by the air retainer and the work is depressurized because high-speed air flows therethrough, and a suction force acts on the work.

At the same time, high pressure air is blown from a nozzle onto the polishing plate at the end of the work.

The jetted high-pressure air enters between the back surface of the work and the polishing disk, and breaks the surface tension or vacuum between the work and the polishing disk.

[0008] Therefore, the adhesion between the work and the polishing disk is lost, and the work is easily peeled off from the polishing disk by the suction force of the air retainer.

[0009]

Embodiment 1 FIGS. 1 and 2 show an embodiment of an air holding device A having a peeling mechanism according to the present invention.

A cylindrical air retainer B is formed on the bottom surface of the base 3 on the disk.

An air inlet 1 extends through the center of the cylindrical body 6 from above the base 3.

A space is provided below the cylindrical body 6 to form the cushion chamber 4, and an operating surface 5 is formed around the cushion chamber 4.

The air retainer B comprises the air inlet 1, the cushion chamber 4 and the operating surface 5.

A high-pressure air supply port 8 is provided at the center of the base 3, and a nozzle 9 is provided at the lower end thereof.

The nozzle 9 is formed so as to be ejected toward the polishing platen 2 at the end of the disc-shaped work 7 having a hole at the center portion on the side of the center hole.

As described above, the air holding device A having the peeling mechanism is formed.

The work 7 is placed on the polishing plate 2 wet with water after the polishing operation is completed, and is in close contact with the polishing plate 2 by surface tension.

The air holding device A having a peeling mechanism is mounted as a hand of a transfer device such as a robot (not shown), and the movement is performed by the robot.

With the above arrangement, the work 7 on the polishing machine 2
Then, the working surface 5 of the air holder B of the air holding device A equipped with the peeling mechanism mounted on the robot moves to a position close to the work 7.

High-pressure air C is supplied from an air inlet 1 and jets toward a work 7.

The high-pressure air C generates a negative pressure due to the ejector effect and the Bernoulli effect when passing through the air gap between the cushion chamber 4, the operating surface 5, the work 7 and the suction space. Is generated.

However, the work 7 is in close contact with the polishing plate 2 due to the surface tension of water, and does not peel off by suction.

Therefore, the high-pressure air C is supplied from the high-pressure air supply port 8.
Is supplied to the nozzle 9, and high-pressure air C is blown out from the nozzle 9 onto the upper surface of the polishing platen 2 at the lower end of the hole of the work 7, and high-pressure air C is inserted into the back of the work 7 to break the surface tension. Work 7
Is peeled off from the polishing plate 2.

As a result, the work 7 is sucked and held in a non-contact state without contacting the air retainer B, and is conveyed to a predetermined position by the robot in this state.

The air retainer B of the work 7 of the air retainer A having the peeling mechanism may be the air retainer F of the mechanism shown in FIG. -Any function that produces a function of sucking the gas may be used.

Further, the peeling nozzle 9 may be one which blows out toward the outer end of the work 7 as shown in FIG.

The nozzle 9 may have a structure separated from the base 3 without being integrated.

[0028]

FIG. 6 is a side sectional view of another embodiment of the present invention.

A funnel-shaped air retainer E provided with an air suction port 11 penetrating through the upper surface of the base 10 is mounted on the lower surface of the disk-shaped base 10.

The side wall 12 of the air retainer E is formed of a flexible rubber material.

A high-pressure air supply port 8 is provided at an end of the base 10,
A nozzle 9 is provided at its lower end to form an air holding device D having a peeling mechanism.

The air holding device D provided with a peeling mechanism is mounted as a hand of a robot (not shown), and its movement is performed by the robot.

In the above configuration, the air holding device D having a peeling mechanism mounted on the robot on the work 7 on the polishing plate 2
The air retainer E moves and comes into close contact with the work 7.

Air is sucked from the air suction port 11 by a vacuum pump (not shown), and the inside of the air holder E is evacuated to suck the work 7.

However, the work 7 is in close contact with the polishing plate 2 due to the surface tension of water, and does not peel off by suction.

For this reason, the high-pressure air C
Is supplied to the nozzle 9 and high-pressure air C is jetted from the nozzle 9 onto the polishing platen 2 at the lower end of the work 7 to insert the high-pressure air C into the back surface of the work 7 to break the surface tension.

Thus, the work 7 is sucked and held by the air holder E, and is conveyed to a predetermined position by the robot in this state.

The air retainer E may be called a vacuum suction pad.

[0039]

Embodiment 3 FIGS. 7 and 8 show another embodiment of the present invention.

The base 25 is provided with a claw-shaped holder 22 movable in and out (in the direction K).

A boss 23 provided with a nozzle 9 for ejecting high-pressure air C is provided below the base 25 to form an air holding device G having a peeling mechanism.

The air holding device G provided with a peeling mechanism is mounted as a hand of a robot (not shown), and its movement is performed by the robot.

In the above configuration, the air holding device G provided with the peeling mechanism mounted on the robot on the work 7 on the polishing plate 2
Is lowered with the claw-shaped holding member 22 of
It enters the inner hole of the lock 7 and stops.

In this state, high-pressure air C is jetted from the nozzle 9 leading to the high-pressure air C source to the polishing platen 2 at the lower end of the work 7, and the high-pressure air C is inserted into the back of the work 7. The surface tension is destroyed, and the work 7 floats.

At the same time, the claw-like holder 22 is moved outward, and is pressed against the inner hole side end of the work 7 to hold the work 7.

In this way, the work 7 is held by the air holder G, and is transferred to a predetermined position by the robot in this state.

[0047]

[Embodiment 4] FIG. 9 is a view showing a state in which a smooth work 7 closely adhered to a smooth loading table 14 such as a polishing machine is peeled off using an air holding device provided with a peeling mechanism of the present invention, This is a work peeling and conveying system to be transferred above.

In the figure, an air holding device A having a peeling mechanism is shown.
(Or D, G) equipped with a movable piece 16 having a movable piece 16 capable of moving forward and backward and ascending and descending, and an air holding device A equipped with a peeling mechanism are provided with a work 7 on a transfer table 14. When reaching the upper position where suction can be held, an on-off valve 17 and a high-pressure air supply port 8 are provided in the middle of a pipe 19 connecting the high-pressure air source (or vacuum generation source) (not shown) and the air inlet 1. The air is supplied to the air holding device A provided with a peeling mechanism by opening the on-off valve 18 provided in the middle of the pipe 20 connecting the work 7 and the work 7, and the work 7 is sucked and held.

When the sensor 21 detects that the work 7 has been sucked and held by the air holding device A provided with a peeling mechanism, the moving piece 16 rises, and at the same time, the moving tool 15 pivots on the loading table 13 and moves to a predetermined position. , The valves 7 and 18 are closed, the work 7 is detached and loaded on the loading table 13.

The transfer table 14 and the loading table 13 are not fixed, but may be belt-shaped moving bodies.

The moving piece 16 may have only a lifting function, and the moving tool 15 may have only a reciprocating motion.

The air holding device A provided with the above-mentioned peeling mechanism is:
Air holding devices D and G having a peeling mechanism may be used.

[0053]

As described above, according to the present invention, it is possible to efficiently remove a work closely adhered to a table by surface tension or vacuum without damaging or damaging the work. As a result, automation has become possible, and it has become possible to improve manufacturing yield, enable mass production, and reduce costs.

[Brief description of the drawings]

FIG. 1 is a side sectional view of an air holding device provided with a peeling mechanism of the present invention.

FIG. 2 is a bottom plan view of an air holding device provided with a peeling mechanism of the present invention.

FIG. 3 is a side sectional view of another air retainer.

FIG. 4 is a bottom plan view of another air retainer.

FIG. 5 is a side sectional view of an air holding device provided with another peeling mechanism of the present invention.

FIG. 6 is a side sectional view of an air holding device provided with another peeling mechanism of the present invention.

FIG. 7 is a side sectional view of an air holding device provided with another peeling mechanism of the present invention.

FIG. 8 is a bottom plan view of an air holding device provided with another peeling mechanism of the present invention.

FIG. 9 is an explanatory view of a work separation and transport system of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Air inlet 2 Polishing board 3 Base 4 Cushion chamber 5 Working surface 6 Side wall 7 Work 8 High pressure air supply port 9 Nozzle 10 Base 11 Air suction port 12 Side wall 13 Transfer stand 14 Loading stand 15 Transfer tool 16 Transfer piece 17, 18 On-off valve 21 Sensor 22 Holder 23 Boss 25 Substrate A, D, G Air holding device equipped with peeling mechanism B, E, F Air holding device C High pressure air

Claims (4)

[Claims] 1. A peeling method in which a negative pressure is generated in a gap between a workpiece and a workpiece by ejecting air, and a nozzle for inserting air into the back of the workpiece is added to an air retainer for sucking and holding the workpiece. An air holding device with a mechanism. 2. An air holding apparatus having a peeling mechanism in which a nozzle for inserting air into the back surface of a work is added to an air holder for sucking and holding a work by vacuum suction. 3. An air holding device having a peeling mechanism in which a retainer for holding a work by pressing a holder on a side of a work end and a nozzle for inserting air into the back surface of the work are provided. apparatus. 4. A moving tool having a movable piece capable of reciprocating and moving up and down between a loading table on which a work is loaded and a transfer table for transferring the work; A work separation and transport system comprising: an air holding device provided with the separation mechanism according to claim 1 attached to a piece; and an air holding device provided with the separation mechanism.