JPH09178637A - Non-adhesive liquid type sample adhesion method in hardness tester - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attach the very thin sample such as a film tightly to the sample stage of a hardness tester. SOLUTION: A silicon wafer substrate 13 having high smoothness is mounted so as to form a sample mounting surface on a sample stage 10. A minute amount of non-adhesive liquid is supplied on the upper surface of the wafer by a spray nozzle. Then, a sample 1 is mounted. Thus, the very thin sample 1 such as a film can be tightly attached on the sample stage 10 by utilizing the surface tension of the liquid described above. Furthermore, the sample may be directly mounted on the smooth mounting surface in the sample stage 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample contact method for bringing a sample into close contact with a hardness tester, and particularly in a hardness tester suitable for closely fixing an extremely thin sample such as a film to a sample stand. A non-adhesive liquid sample contact method.

[0002]

2. Description of the Related Art Generally, a means for testing a micro region strength of a material by applying a minute load to the material by an indenter, measuring the load applied to the indenter and the amount of intrusion of the indenter into the material are used. ing. In such hardness test, it is considered extremely important from the viewpoint of measurement accuracy that the material is closely fixed to the sample table.

[0003]

Material to be measured (sample)
However, when the sample is flexible and extremely thin like a film, simply placing the sample on the sample table (and then gently pressing it) will cause the sample 1 and the metal sample table 10 to move as shown in FIG. There is a problem that gaps 2, 2 ... Therefore, it has been conventionally proposed to use an adhesive as a means for closely fixing the sample to the sample table.However, when using the adhesive, the thin film layer of the adhesive elastically deforms when the indenter is pushed in from the upper surface of the sample. However, there arises a problem that this causes abnormal data (creep deformation is a negative value). In addition, reference numeral 11 in FIG.
12 shows the sample holders respectively. The present invention is intended to solve the above-mentioned problems in the prior art.

[0004]

A non-adhesive liquid sample adhesion method in a hardness tester of the present invention is such that when a sample is brought into close contact with a sample table of the hardness tester, the sample is placed on the sample mounting surface of the sample table. Before mounting the sample, a small amount of non-adhesive liquid is supplied to the sample (mounting) surface to solve the problem.

Further, the non-adhesive liquid-type sample adhesion method in the hardness tester of the present invention, when the sample is adhered to the sample stand of the hardness tester, the silicon wafer substrate is placed on the sample stand, After supplying a small amount of non-adhesive liquid to the surface of the silicon wafer substrate, the sample is placed on the surface of the silicon wafer substrate to solve the problem. In the above-described method of the present invention, the sample is adhered to the sample mounting surface of the sample table or the surface of the silicon wafer substrate by the action of the surface tension of a small amount of the non-adhesive liquid supplied by the spray nozzle or the like. .

In particular, when the smoothness of the sample mounting surface of the sample table is high, the close contact effect becomes remarkable, and the close contact of the sample (film) to the sample table and the like becomes good. When a spray nozzle is used as the non-adhesive liquid supply means, the trace liquid can be efficiently supplied. As the non-adhesive liquid, water, alcohol, ethylene glycol or the like may be used as it is or appropriately mixed depending on the material of the sample.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION A non-adhesive liquid sample adhesion method in a hardness tester as an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows the vicinity of a sample table for explaining the method. It is a side view. In FIG. 1, the same reference numerals as those in FIG. 2 indicate almost the same members.

In FIG. 1, reference numeral 10 indicates a metal sample table of the hardness tester, and the surface (upper surface) of the metal sample table 10 is shown.
, A silicon wafer substrate 13 with high smoothness is placed,
On the surface (sample mounting surface) of the silicon wafer substrate 13,
A film as a sample is placed. In this embodiment,
In particular, before mounting the sample 1 on the surface of the silicon wafer substrate 13, a small amount of water is supplied to the surface of the silicon wafer substrate 13 by a spray nozzle such as a sprayer, and then the sample 1 is mounted. Reference numeral 14 indicates (a thin layer of) water supplied by the spray nozzle.

As described above, when a small amount of water is supplied to the surface of the silicon wafer substrate 13 and then the sample 1 is placed and pressed, the high smoothness of the surface of the silicon wafer substrate 13 and the surface of the water. By interacting with the tension, an extremely thin sample can be brought into close contact with the silicon wafer substrate 13. The amount of water supplied is about 0.3 mm, for example.
As a result of the experiment, it was found that 0.1 cc / 1 cm ² was an appropriate amount in the case of the above sample. Further, it has been proved by experiments that the addition of an activator to water is more effective and good adhesion can be obtained even with a small amount of water.

In this way, the sample 1 is strongly pressed in the state where the sample is brought into close contact with water on the surface of the silicon wafer substrate 13 placed on the metal sample table 10, that is, after that. Sample holding as before without
After pressing the peripheral portion of the sample 1 with 12 and pressing the indenter 11, a test was performed, and the deviation of the signal (test value) was successfully reduced to 1/2 or a little less than an order of magnitude.

An example of the test results is as follows. Example: 25-point measurement every 1 mm Conventional method (in the case of FIG. 2) h2 (maximum deformation amount unit um) Average value 1.56 standard deviation 0.223 h3 (total of plastic deformation and creep deformation) Average value 0.43 standard deviation 0.078 In the case of the present invention h2 (Pushing depth at end of holding test load) Average value 1.10 standard deviation 0.028 h3 (Pushing depth at end of unloading test load) average value 0.37 Standard deviation 0.030 Not effective for very thin samples. Also a metal sample stand 10
The silicon wafer substrate 13 does not necessarily have to be interposed if the surface of the is finished with high smoothness.

The non-adhesive liquid for adhering the sample can be selected from ordinary tap water, distilled water or pure water, and can be appropriately selected according to the type of sample, such as alcohol, ethylene glycol, acetone, The lacquer thinner or the like is efficiently used when closely adhering a sample such as a metal foil or a magnetic material. Especially for the metal foil that may cause rust, it is preferable to use a non-adhesive liquid other than water.

[0013]

As described above in detail, according to the sample adhesion method in the hardness tester of the present invention, a very simple operation of previously supplying a small amount of non-adhesive liquid to the sample mounting surface can be performed. By adding the sample, an extremely thin sample such as a film can be brought into close contact with the sample mounting surface of the sample table of the hardness tester, and the test accuracy can be improved. In addition, instead of placing the sample directly on the sample table, even if a small amount of non-adhesive liquid is supplied onto the substrate by interposing a silicon wafer substrate, the sample can be placed sufficiently. Adhesion can be obtained. When a spray nozzle is used as the non-adhesive liquid supply means,
A small amount of liquid can be efficiently supplied. Furthermore, as a non-adhesive liquid, depending on the material of the sample besides water,
Alcohol, ethylene glycol, acetone or the like can be appropriately used, and there is an effect that the sample can be adhered to the sample mounting surface of the sample table without adversely affecting the sample.

[Brief description of the drawings]

FIG. 1 is a side view of a sample table for carrying out a non-adhesive liquid sample adhesion method in a hardness tester as one embodiment of the present invention.

FIG. 2 is a side view of a sample table for carrying out a sample adhesion method in a conventional hardness tester.

[Explanation of symbols]

 1 sample 2 void 10 metal sample stand 11 indenter 12 sample holder 13 silicon wafer substrate 14 water (thin layer) supplied by spray nozzle

Claims (7)

[Claims] 1. When bringing a sample into close contact with a sample table of a hardness tester, a small amount of non-adhesive liquid is supplied to a sample mounting surface of the sample table before mounting the sample on the sample table. A non-adhesive liquid-type sample adhesion method in a hardness tester. 2. When the sample is brought into close contact with the sample table of the hardness tester, a silicon wafer substrate is placed on the sample table,
A non-adhesive liquid type sample in a hardness tester, characterized in that the sample is placed on the surface of the silicon wafer substrate after supplying a small amount of the non-adhesive liquid to the surface of the silicon wafer substrate. Adhesion method. 3. The hardness test according to claim 1 or 2, wherein the non-adhesive liquid sample adhering method is characterized in that the non-adhesive liquid is supplied by a spray nozzle. Non-adhesive liquid sample adhesion method in a machine. 4. The non-adhesive liquid sample adhesion method in the hardness tester according to claim 1, wherein the non-adhesive liquid is water. Non-adhesive liquid sample adhesion method in testing machine. 5. The non-adhesive liquid-type sample contacting method in the hardness tester according to claim 1, wherein the non-adhesive liquid is alcohol. Non-adhesive liquid sample adhesion method in testing machine. 6. The non-adhesive liquid sample adhering method in the hardness tester according to claim 1, wherein the non-adhesive liquid is ethylene glycol. Non-adhesive liquid sample adhesion method in a tester. 7. The non-adhesive liquid-type sample contacting method in the hardness tester according to claim 1, wherein the non-adhesive liquid is acetone. Non-adhesive liquid sample adhesion method in testing machine.