JP2012002722A - Indentation tester - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an indentation tester capable of appropriately fixing even a thin specimen on a specimen support using air aspiration force despite its easy production.SOLUTION: In a hardness tester 100 for pressing an indenter 3 to which a predetermined load is applied against a film-shaped specimen S placed on an upper surface of a specimen support 10 to form a depression and for evaluating a predetermined material property of the specimen on the basis of the depression, the specimen support 10 comprises: a chamber 11 in which one portion of its upper surface portion is made up of a specimen adsorption member 14 made of a porous material, and air aspiration means 12 for aspirating air within the chamber 11.

Description

  The present invention relates to an indentation testing machine.

Conventionally, as a material testing machine, an indentation hardness testing machine such as Vickers that evaluates and measures the hardness of a sample based on a depression formed by pushing an indenter loaded with a predetermined load on the surface of the sample is known. .
Also, instead of observing the indentation formed after indentation, in the indentation process, the test force (force applied to the indenter) and the indentation depth (displacement amount of the indenter) are continuously measured and obtained. In addition, a test method called nanoindentation (instrumentation indentation test) for obtaining the mechanical properties of a material by analyzing the indentation curve is known (see, for example, Patent Document 1).

JP 2009-79924 A

In nanoindentation, a slight indentation of the sample is fatal because it measures the indentation depth of the minute indentation, and it is necessary to bring the sample into close contact with the sample stage for correct testing.
However, for a thin sample such as a film material, it is necessary to expose the test part even if it is pressed from above, so this part cannot be pressed, and a gap is apt to be formed between the sample stage.
In addition, even when the Vickers hardness test is performed, the lifting of the sample causes instability in focus shift or indenter indentation when dents are observed.
Therefore, for example, there is a fixing method in which the sample is fixed to the sample table using an adhesive. However, this method may be difficult to bond or may be altered by the adhesive, and the sample may be soiled. It was a problem.
On the other hand, there is a fixing method in which the sample is brought into close contact with the sample stage by air attractive force. However, with this fixing method, if the sample becomes thin, the surface of the sample table may be imitated following the surface irregularities (such as air suction holes), and the air suction holes may be so fine that they do not affect the sample surface. When it was going to provide in, manufacture was difficult.

  An object of the present invention is to provide an indentation tester that can be easily fixed to a sample stage by air attractive force even for a thin sample while being easy to manufacture.

To solve the above problem,
The invention described in claim 1
In the indentation tester that forms a depression by pushing an indenter loaded with a predetermined load against a film-like sample placed on the upper surface of the sample stage.
The sample stage is
A chamber in which a part of the upper surface portion is constituted by a sample adsorbing member made of a porous material;
And air suction means for sucking air inside the chamber.

The invention described in claim 2 is the indentation testing machine according to claim 1,
The sample adsorbing member includes adjusting means for adjusting a suction force exerted on the sample as the air is sucked by the air sucking means.

The invention according to claim 3 is the indentation testing machine according to claim 2,
The adjusting means includes
A shutter member that is in contact with the lower surface of the sample adsorption member and can be opened and closed;
The suction force is adjusted by the opening of the shutter member.

The invention according to claim 4 is the indentation testing machine according to claim 2 or 3,
The adjusting means includes
Measuring means for measuring the flow rate or pressure of air sucked from the inside of the chamber;
The suction force is adjusted based on a measurement value obtained by the measurement unit.

The invention according to claim 5 is the indentation testing machine according to claim 3,
The air suction means includes an air chamber connected to the chamber,
The air chamber includes an elastic portion that can be elastically deformed,
The air chamber is attached to the chamber in a state where the elastic portion is pressed and contracted, and sucks air inside the chamber when the air chamber is expanded by a restoring force of the elastic portion. .

The invention described in claim 6 is the indentation tester according to claim 5,
A coating film for changing the exposed area of the upper surface of the sample adsorption member is detachably mounted on the upper surface of the sample adsorption member.

Further, the invention according to claim 7 is the indentation tester according to claim 3,
Position control means is provided for controlling the position of the sample stage in the horizontal direction so that the formation position of the recess does not overlap with the hole formed in the sample adsorption member.

According to the present invention, since the sample stage includes the sample adsorbing member made of a porous material, even a thin sample can be appropriately fixed to the sample stage without causing irregularities following the surface of the sample stage. Can do.
Moreover, since the sample adsorbing member does not need to be processed and only needs to be installed, the entire apparatus can be easily manufactured.

It is a schematic diagram which shows the hardness tester of 1st Embodiment. It is a principal part enlarged view which shows the sample stand of the hardness tester of 1st Embodiment. It is a block diagram which shows the control structure of the hardness tester of 1st Embodiment. It is a figure for demonstrating the opening / closing operation | movement of the shutter member of a sample stand. It is a schematic diagram which shows the hardness tester of 2nd Embodiment. It is a principal part enlarged view which shows the sample stand of the hardness tester of 2nd Embodiment. It is a block diagram which shows the control structure of the hardness tester of 2nd Embodiment. It is a figure for demonstrating the state to which the coating film was applied in the sample stand of FIG.

Hereinafter, an indentation testing machine according to the present invention will be described in detail with reference to the drawings.
Note that the indentation tester 100 in this embodiment is an instrumented indentation tester that can continuously monitor the test force applied to the indenter 3 and the indentation depth of the indenter 3.
Moreover, this indentation tester 100 is equipped with the structure which can perform a measurement suitably with respect to film-like ultrathin sample S, such as a cellophane, for example.

(First embodiment)
First, the configuration will be described.
As shown in FIGS. 1 to 3, the indentation tester 100 includes a sample table 10 on which the sample S is placed, a tester main body 1 that applies a test force to the sample S on the sample table 10, and the like. It is configured.

(Sample stage)
As shown in FIGS. 1 and 2, the sample stage 10 includes a chamber 11 formed by a sample adsorbing member 14 having a part of an upper surface portion made of a porous material, and an air suction means 12 for sucking air inside the chamber 11. And adjusting means 13 for adjusting the suction force of the air suction means 12.

The chamber 11 is a box having a hollow inside. In addition, the shape of the chamber 11 is not specifically limited, For example, what kind of things, such as a cube, a rectangular parallelepiped, and a cylinder, are applicable.
An opening 11 a for installing the sample adsorbing member 14 is provided on the upper surface of the chamber 11. The side surface of the chamber 11 is provided with an exhaust hole 16 through which air passes.

The opening 11a is formed, for example, in a substantially circular shape when viewed from above, and includes a wall 11b that protrudes downward (inside the chamber 11) from the periphery of the opening 11a. A sample adsorbing member 14 is fitted into the opening 11a, and the side surface of the sample adsorbing member 14 is surrounded by the wall 11b. Note that the wall portion 11b has substantially the same length as the thickness of the sample adsorption member 14.
In addition, a shutter member 15 is provided at the lower end of the wall portion 11b so as to contact the lower surface of the sample adsorption member 14.

  The shape of the opening 11a is not limited to a substantially circular shape when viewed from above. That is, the shape of the opening 11a may be any shape according to the shape of the sample S, and may be, for example, a substantially square shape.

As described above, the sample adsorbing member 14 is disposed in a state of being fitted into the opening 11a, and the side surface thereof is in contact with the wall 11b of the opening 11a. Further, the upper surface of the sample adsorption member 14 is substantially flush with the upper surface of the chamber 11, and the lower surface of the sample adsorption member 14 is in contact with the shutter member 15.
When the sample S is placed on the upper surface thereof, the sample adsorbing member 14 applies a negative pressure (suction force) to the sample S as the air inside the chamber 11 is sucked by the air suction means 12. The sample S is suitably held tightly.

The sample adsorbing member 14 is a plate-like member having a shape corresponding to the shape of the opening portion 11a (here, a columnar shape), and is composed, for example, of a carbon porous material as a main component.
Here, the porous material made of carbon is a material in which pores originally possessed by the carbon material are aligned to a certain size and adjusted to a uniform density. Since this porous material has continuous pores, it has a property of transmitting fluid such as gas.
In addition, since this porous material is made of carbon, it has excellent thermal shock resistance and dimensional stability, and has the property of not being charged because of its electrical conductivity. Further, it has high corrosion resistance and is not affected by a solvent or the like. It is easy to handle from these points and is suitable as a material constituting the sample adsorbing member 14.
The sample adsorbing member 14 has a smooth surface whose surface is mechanically polished, and the sample S can be uniformly held even if the sample S is, for example, thin and easily bent.
The sample adsorbing member 14 has an average pore diameter of, for example, about 1 μm to 10 μm. Since the pore diameter is this size, the shape of the holes is not transferred to the sample S even if the sample S is brought into close contact with the porous material by suction.

  The air suction means 12 is a compressor or the like connected to the exhaust hole 16 of the chamber 11. The air suction unit 12 performs a suction operation for sucking air inside the chamber 11 in accordance with a control signal input from the control unit 20. In the indentation tester 100, when the compressor is operated, the air inside the chamber 11 is exhausted through the exhaust hole 16, and the gas in the pores of the sample adsorbing member 14 is also sucked and exhausted. .

  The adjusting means 13 includes, for example, a shutter member 15 provided in contact with the lower surface of the sample adsorption member 14, a valve 13a provided in the exhaust hole 16, a measuring means 13b, and the like.

The shutter member 15 is for adjusting the area of the exposed portion T on the lower surface of the sample adsorbing member 14 fitted in the opening portion 11a. As shown in FIG. Operation is possible.
Specifically, as shown in FIG. 4, for example, the shutter member 15 is composed of a plurality of diaphragm blades 15 a that are overlapped and interlocked to form a circle, and move the plurality of diaphragm blades 15 a. Thus, the area of the central portion P is changed. Since the size of the central portion P of the shutter member 15 is the same as the area of the exposed portion T on the lower surface of the sample adsorption member 14, the lower surface of the sample adsorption member 14 is exposed depending on the opening degree of the central portion P of the shutter member 15. The area of the portion T is changed, and thereby the suction force exerted on the sample S by the sample suction member 14 can be adjusted. In other words, the suction force increases as the area of the exposed portion T increases.
The shutter member 15 can be arbitrarily opened and closed in consideration of the size of the sample S and the like, and thus is suitable for fine adjustment of the suction force.

The shutter member 15 may be configured to change the exposed area of the lower surface of the sample adsorption member 14 and is not limited to the configuration using the plurality of aperture blades 15a.
For example, two slidable plate bodies may be provided as the shutter member, and the exposed area of the lower surface of the sample adsorption member 14 may be changed by changing the gap between the two plate bodies.
Alternatively, as the shutter member, two slidable plate bodies having a grid with a predetermined width are provided, and the exposed area of the lower surface of the sample adsorption member 14 is changed by changing the overlapping area of the lattices of the two plate bodies. It may be changed.

The valve 13a opens and closes in response to a user operation in the exhaust hole 16 to adjust the flow rate of air flowing through the exhaust hole 16.
The measuring means 13b is composed of a flow meter that measures the flow rate of air sucked into the exhaust hole 16 from the inside of the chamber 11, or a pressure gauge that measures the pressure of air flowing through the exhaust hole 16.
The user adjusts the opening / closing amount of the valve 13a while confirming the measured value of the measuring means 13b. That is, the suction force can be adjusted to a predetermined value by adjusting the flow rate or pressure of the air flowing through the exhaust hole 16.

  Thus, the adjusting means 13 (shutter member 15, valve 13a and measuring means 13b) can suitably adjust the suction force exerted on the sample S by the sample suction member 14 as the air suction means 12 sucks air. it can.

  Such a sample stage 10 is supported by an XYZ stage 2 which will be described later, and is moved back and forth, right and left and up and down by the XYZ stage 2 so that the position of the sample S on the sample stage 10 with respect to the indenter 3 is adjusted. It has become.

(Test machine body)
The testing machine main body 1 includes an XYZ stage 2 that moves the sample S in the X, Y, and Z directions, an indenter 3 that forms a depression in the sample S, a load lever 4 that has the indenter 3 at one end, and a predetermined load lever 4. A load loading section 5 for loading (applying) a load (test force), a displacement meter 6 for detecting the displacement amount of the indenter 3, a photographing section 7 for photographing a depression formed on the surface of the sample S, and a display A unit 8, an operation unit 9, a control unit 20, and the like are configured.

The XYZ stage 2 supports the sample stage 10 on the upper surface thereof, and is configured to move in the X, Y, and Z directions (that is, the horizontal direction and the vertical direction) in accordance with a control signal input from the control unit 20.
Specifically, the XYZ stage 2 serves as a position control unit in accordance with a control signal from the control unit 20 so that the formation position of the dent does not overlap with the hole formed in the sample suction member 14. Control the position of the direction. For this reason, it can measure more correctly.

  The indenter 3 is, for example, an indenter used for a hardness test by forming a depression, such as Belkovic, Vickers, Knoop, Brinell. The indenter 3 forms a dent (indentation) on the surface of the sample S when a predetermined load is applied and pushed into the surface of the sample S.

The load lever 4 is formed, for example, in a substantially bar shape, and is fixed on the pedestal via a cross spring 4a in the vicinity of the center.
One end of the load lever 4 is provided so as to be able to contact with and separate from the sample S from above the sample S placed on the sample stage 10 and is pressed against the surface of the sample S to form a recess on the surface of the sample S. An indenter 3 is provided.
In addition, a force coil 5 a that constitutes the load load portion 5 is provided at the other end of the load lever 4.

The load load unit 5 is, for example, a force motor, and includes a force coil 5a attached to the load lever 4, a fixed magnet 5b fixed so as to face the force coil 5a, and the like.
The load loading unit 5 is generated, for example, by electromagnetic induction of a magnetic field generated by the fixed magnet 5b in the gap and a current flowing in the force coil 5a installed in the gap in accordance with a control signal input from the control unit 20. The load lever 4 is rotated using the force as a driving force. Thereby, the end of the load lever 4 on the side of the indenter 3 is inclined downward, and the indenter 3 is pushed into the sample S.

The displacement meter 6 is, for example, a capacitance type displacement sensor, and a movable pole plate 6a provided at an end of the load lever 4 on the side of the indenter 3 and a fixed pole fixed so as to face the movable pole plate 6a. And a plate 6b.
The displacement meter 6 detects, for example, the amount of displacement (indenter 3) moved when the indenter 3 forms a recess in the sample S by detecting a change in capacitance between the movable electrode plate 6a and the fixed electrode plate 6b. ) And a displacement signal based on the detected displacement amount is output to the control unit 20.
In addition, although the capacitive displacement sensor was illustrated as the displacement meter 6, it is not limited to this, For example, an optical displacement sensor and an eddy current displacement sensor may be sufficient.

  The imaging unit 7 includes a camera, for example, and images, for example, a depression formed on the surface of the sample S by the indenter 3 on the sample stage 10 in accordance with a control signal input from the control unit 20.

  The display unit 8 is, for example, a liquid crystal display panel, and performs display processing of the surface image of the sample S photographed by the photographing unit 7 and various test results in accordance with a control signal input from the control unit 20.

The operation unit 9 is a group of operation keys such as a keyboard, for example. When operated by a user, the operation unit 9 outputs an operation signal associated with the operation to the control unit 20. The operation unit 9 may include other operation devices such as a pointing device such as a mouse and a touch panel, and a remote controller.
The operation unit 9 is operated when the user inputs an instruction to perform a hardness test of the sample S, when setting a test force to be applied to the indenter 3, that is, a load.

  As shown in FIG. 3, the control unit 20 includes a CPU (Central Processing Unit) 21, a RAM (Random Access Memory) 22, a storage unit 23, and the like, and XYZ via a system bus or the like. The stage 2, the load load unit 5, the displacement meter 6, the photographing unit 7, the display unit 8, the operation unit 9, the air suction unit 12, and the like are connected.

  For example, the CPU 21 performs various control processes according to various processing programs for the hardness tester stored in the storage unit 23.

  The RAM 22 includes, for example, a program storage area for developing a processing program executed by the CPU 21 and a data storage area for storing processing results generated when the input data and the processing program are executed.

  The storage unit 23 is, for example, a system program that can be executed by the hardness tester 100, various processing programs that can be executed by the system program, data used when executing these various processing programs, and arithmetic processing by the CPU 21. Data of various processing results is stored. The program is stored in the storage unit 23 in the form of a computer readable program code.

  Specifically, for example, a position control program 231 and a measurement program 232 are stored in the storage unit 23.

The position control program 231 is a program that causes the CPU 21 to execute a function of controlling the horizontal position of the sample stage 10 so that the formation position of the recess does not overlap with the hole formed in the sample adsorption member 14, for example.
Specifically, for example, the CPU 21 specifies the position coordinates of the portion where the hole on the surface of the sample adsorbing member 14 does not exist using the imaging unit 7 before forming the recess. Then, in the indentation test, the XYZ stage 2 performs position adjustment so that the position where the indenter of the sample S comes into contact with the specified position coordinates. For this reason, it becomes possible to measure more accurately.
The CPU 21 functions as a position control unit together with the XYZ stage 2 by executing the position control program 231.

For example, the measurement program 232 is a program that causes the CPU 21 to realize a function of detecting a displacement amount of the indenter 3 at the time of forming the depression and a test force loaded on the indenter 3 and measuring a pressing curve.
Specifically, for example, when an operation signal instructing measurement is input from the operation unit 9, the CPU 21 applies a load so as to give a predetermined test force to the sample S placed on the sample table 10. The load unit 5 is controlled. Then, for example, the CPU 21 continuously measures the indentation depth of the indenter 3 into the sample S at the time of forming the depression and the test force at the time of forming the depression, and obtains a test force-indentation depth curve (indentation curve). taking measurement.

Next, the operation of the indentation tester 100 will be described.
In the indentation tester 100, when performing the measurement, the air suction means 12 is operated in a state where the sample S is placed on the upper surface of the sample adsorption member 14 of the sample stage 10.
Then, according to the operation of the air suction means 12, the air inside the chamber 11 is exhausted through the exhaust hole 16, and the air in the pores of the sample adsorption member 14 is also suctioned and exhausted. For this reason, a negative pressure (suction force) is applied to the sample S from the sample adsorption member 14, and the sample S is uniformly adsorbed and held on the sample adsorption member 14.
At this time, the user can set a suction force suitable for the sample S by the adjusting means 13 (the shutter member 15, the valve 13a, and the measurement means 13b), and can keep the suction force at a predetermined value. Therefore, the sample S is always fixed with a suitable fixed adsorption force.
Further, in the indentation test, since the formation position of the dent is controlled so as not to overlap with the hole formed in the sample adsorbing member 14, more accurate measurement can be performed.

As described above, according to the indentation tester 100 of the present embodiment, since the sample stage 10 includes the sample adsorbing member 14 made of a porous material, the unevenness following the surface of the sample stage 10 even if it is a thin sample. It can fix to the sample stand 10 appropriately without being able to do.
Further, since the sample adsorption member 14 does not need to be processed and only needs to be installed, the entire apparatus can be easily manufactured.

  Moreover, according to the indentation tester 100 of this embodiment, since the adjusting means 13 for adjusting the suction force of the air suction means 12 is provided, a suction force suitable for each sample S can be set.

  In addition, according to the indentation tester 100 of the present embodiment, the adjusting means 13 has the shutter member 15 that is in contact with the lower surface of the sample adsorption member 14 and can be opened and closed. Since the adjustment is made, the suction force can be finely adjusted by the opening degree of the shutter member 15, and the sample S can be more closely attached to the sample stage.

  Further, according to the indentation tester 100 of the present embodiment, the adjusting unit 13 includes the measuring unit 13b that measures the flow rate or pressure of the air sucked from the inside of the chamber 11, and based on the measurement value by the measuring unit 13b. Since the suction force is adjusted, a suitable suction force can always be maintained.

  In the above-described embodiment, the configuration including the shutter member 15, the valve 13a, and the measurement unit 13b as the adjustment unit 13 is described as an example. However, the adjustment unit 13 is any one of these. Any configuration including one may be used. For example, the shutter member 15 may not be provided, or the valve 13a and the measurement unit 13b may not be provided.

(Second Embodiment)
Next, a second embodiment of the present invention will be described focusing on differences from the first embodiment.
In addition, about the structure similar to 1st Embodiment, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  In the indentation tester 200 of this embodiment, as shown in FIGS. 5-7, the structure of 10 A of sample stands in which the sample S is mounted differs from 1st Embodiment.

  The sample stage 10 </ b> A includes a chamber 11, an air suction unit 12 </ b> A that sucks air inside the chamber 11, and an adjustment unit 13.

The air suction unit 12 </ b> A includes an air chamber 30 connected to the chamber 11.
The air chamber 30 is provided with a suction mechanism that does not have a power source for sucking air inside the chamber 11. Specifically, the air chamber 30 is, for example, an elastically deformable elastic portion. 31 and a suction port 32 attached to the exhaust hole 16 of the chamber 11.

The air chamber 30 has a shape-retaining property and is formed into an appropriate hollow shape from an elastically deformable resin, soft glass, or the like, and the internal pressure in the air chamber 30 is increased by pressing the elastic portion 31. The internal pressure in the air chamber 30 can be lowered by being able to rise above the atmospheric pressure and restoring by the restoring force of the elastic portion 31.
The elastic part 31 has, for example, a bellows shape and is expanded in a normal state, but contracts when pressed, and restores its original shape when the pressure is released.
The material of the elastic portion 31 is not particularly limited as long as it has elasticity, but examples thereof include resins such as polyethylene, polypropylene, polyethylene terephthalate, polyethylene naphthalate, polyester, polycarbonate, and thermoplastic elastomer. It is done.

The suction port 32 is attached to the exhaust hole 16 of the chamber 11 in a state where the air chamber 30 is pressed. A backflow prevention valve 33 is attached to the base end of the suction port 32 so that the air sucked into the air chamber 30 from the inside of the chamber 11 does not flow backward.
The suction port 32 has an outer diameter that matches the inner diameter of the exhaust hole 16.

At this time, as shown in FIG. 8, a coating film K for changing the exposed area of the upper surface of the sample adsorption member 14 can be placed on the upper surface of the sample adsorption member 14.
That is, when the air inside the chamber 11 is sucked using the air chamber 30, the sample suction member 14 is preferably completely covered with the sample S because the amount of sucked air is finite. The coating film K is placed on the upper surface of the sample adsorbing member 14 in accordance with the size.

And in the air chamber 30, the air inside the chamber 11 is attracted | sucked as follows.
First, the air chamber 30 is fixed by inserting the suction port 32 into the exhaust hole 16 of the chamber 11 in a state where the elastic portion 31 is pressed and contracted. At this time, since there is almost no gap between the suction port 32 and the exhaust hole 16, no air leaks from this connecting portion.
When the air chamber 30 is expanded by the restoring force of the elastic portion 31, the air inside the chamber 11 is sucked toward the air chamber 30 via the backflow prevention valve 33.

  Also in this embodiment, the suction force can be adjusted by changing the area of the exposed portion T on the lower surface of the sample adsorption member 14 with the shutter member 15 as the adjusting means 13.

As described above, according to the indentation tester 200 of the present embodiment, the air suction means 12A includes the air chamber 30 connected to the chamber 11, and the air chamber 30 includes the elastic portion 31 that can be elastically deformed. The air chamber 30 is attached to the chamber 11 in a state where the elastic portion 31 is pressed and contracted, and the air inside the chamber 11 is sucked when the air chamber 30 expands due to the restoring force of the elastic portion 31.
Therefore, a special structure for sucking the air inside the chamber 11 (for raising and lowering the internal pressure in the air chamber 30) is unnecessary, and the air suction means 12A can be formed with a simple configuration. In addition, since no power source is used, vibration does not occur and the hardness test can be performed with higher accuracy.

Further, according to the indentation testing machine 200 of the present embodiment, the coating film K for changing the exposed area of the upper surface of the sample adsorption member 14 can be placed on the upper surface of the sample adsorption member 14.
For this reason, the exposed area of the upper surface of the sample adsorbing member 14 can be changed in accordance with the size of the sample S, and air suction can be suitably performed.

(First embodiment)
DESCRIPTION OF SYMBOLS 100 Hardness testing machine 10 Sample stand 11 Chamber 11a Opening part 11b Wall part 12 Air suction means 13 Adjustment means 13a Valve 13b Measuring means 14 Sample adsorption member 15 Shutter member 15a ... Diaphragm blade 16 Exhaust hole 1 Test machine body 2 XYZ Stage (position control means)
3 Indenter 20 Control Unit 231 Position Control Program (Position Control Unit)
S Sample T Exposed portion (second embodiment)
200 Hardness Tester 10A Sample Stand 12A Air Suction Unit 30 Air Chamber 31 Elastic Portion 32 Elastic Port 32 Suction Port 33 Backflow Prevention Valve K Coating Film

Claims (7)

In the indentation tester that forms a depression by pushing an indenter loaded with a predetermined load against a film-like sample placed on the upper surface of the sample stage.
The sample stage is
A chamber in which a part of the upper surface portion is constituted by a sample adsorbing member made of a porous material;
An indentation tester comprising: an air suction means for sucking air inside the chamber.   The indentation tester according to claim 1, further comprising an adjusting unit that adjusts a suction force exerted on the sample by the sample suction member as the air suction unit sucks air. The adjusting means includes
A shutter member that is in contact with the lower surface of the sample adsorption member and can be opened and closed;
The indentation tester according to claim 2, wherein the suction force is adjusted by an opening degree of the shutter member. The adjusting means includes
Measuring means for measuring the flow rate or pressure of air sucked from the inside of the chamber;
The indentation tester according to claim 2 or 3, wherein the suction force is adjusted based on a measurement value obtained by the measurement means. The air suction means includes an air chamber connected to the chamber,
The air chamber includes an elastic portion that can be elastically deformed,
The air chamber is attached to the chamber in a state where the elastic portion is pressed and contracted, and sucks air inside the chamber when the air chamber is expanded by a restoring force of the elastic portion. The indentation tester according to claim 3.   6. The indentation tester according to claim 5, wherein a coating film for changing an exposed area of the upper surface of the sample adsorption member is detachably mounted on the upper surface of the sample adsorption member.   4. The indentation test according to claim 3, further comprising position control means for controlling a horizontal position of the sample stage so that a formation position of the depression does not overlap a hole formed in the sample adsorption member. Machine.

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