JPH09173998A - Drying liquid recovering device for device for vapor-drying work - Google Patents

Abstract

PROBLEM TO BE SOLVED: To liquefy and recover the vapor used in drying a work after the work is cleaned with a cleaning soln. substituted for a fluorocarbon. SOLUTION: A vapor generating tank 18 having a heater 20 is installed, a drying liq. 19 consisting essentially of an incombustible fluoride liq. is supplied in the tank 18 and vaporized by the heat of the heater 20 to form a vapor phase, and a cleaned work is dried in the vapor phase. The drying vapor is passed through the heat exchanger 27 cooled by a cooler 28, liquefied and recovered.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a steam drying process in which a work such as an electronic component or a metal part, which has been cleaned with a non-aqueous cleaning liquid in the previous step, is replaced with the cleaning liquid in the vapor phase of a drying liquid to dry the work. The present invention relates to a dry liquid recovery device used in the device.

[0002]

2. Description of the Related Art Conventionally, fluorocarbons and ethane (trichloroethane) have generally been used as cleaning liquids for cleaning electronic parts, degreasing and cleaning metal parts, and removing flux from mounting boards. In the cleaning using these fluorocarbons and ethane, the cleaning cost of fluorocarbons and ethane is low, so that the running cost hardly occurs.

However, CFCs and ethane are said to be substances that deplete the ozone layer, and CFCs and ethane alternative cleaning agents have been developed with the aim of completely eliminating them. Cleaning with this type of cleaning agent
In each step of rinsing and drying, it is necessary to use a cleaning liquid of a type suitable for each step.

[0004]

The work is cleaned with the alternative cleaning liquid as described above (a part of which is rinsing), and is then exposed to the vapor phase of the drying liquid in the drying tank, whereby it is replaced with the cleaning liquid and dried. Done. In the past, this dry vapor was left to dissipate and was essentially discarded. However, since these drying liquids are mainly composed of a non-combustible fluorinated liquid and are expensive, there is a drawback in that the production of this kind involving the treatment with the alternative cleaning liquid becomes expensive. An object of the present invention is to vaporize a work, which is washed with a non-aqueous cleaning liquid in the previous step, after being dried in a vapor phase of a drying liquid, liquefying and recovering the vapor, and reusing the vapor. An object of the present invention is to provide a dry liquid recovery device for a dry processing device.

[0005]

A dry liquid recovery apparatus for a steam drying apparatus of a work according to the present invention replaces a work washed with a non-aqueous cleaning liquid in the previous step with the cleaning liquid in a vapor phase of the dry liquid. The steam drying means for drying the work is composed of a steam transfer means composed of a blower for taking out the steam in the drying tank to the outside of the tank, and a cooling means for cooling and liquefying the steam recovered by the steam transfer means.

In this structure, the work cleaned with the non-aqueous cleaning liquid is transferred into the drying tank, and the cleaning liquid adhering to the work is replaced with the drying liquid in the vapor phase of the drying liquid in the drying tank. Drying is performed. The vapor in the drying tank is transported to a predetermined portion by the transporting means, where it is cooled by the cooling means and liquefied so as to be reused.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. First, FIG. 2 shows a cleaning process in a cleaning apparatus using a CFC / ethane substitute cleaning liquid. In this case, the process consists of five steps: washing, preliminary rinsing, main rinsing, finish rinsing, and steam drying. A work 1 such as a metal part is a basket 2
In the state of being housed in the container, it is sequentially transferred to each process as shown by the arrow. In the cleaning step, the work 1 is immersed in the cleaning liquid 4 contained in the cleaning tank 3, and in this state, the work 1 is cleaned by ultrasonic waves by the ultrasonic oscillator 5. The cleaning liquid 4 is circulated by a pump 6 and impurities in the cleaning liquid 4 are removed by a filter 7. Here, as the cleaning liquid 4, for example, "Techno Care"
FRW-17 "(manufactured by Toshiba Corporation) is used. This cleaning liquid 4 is a non-aqueous cleaning agent based on silicone,
The specific gravity (25 ° C) is 0.95.

In the preliminary rinsing step, the work 1 cleaned in the cleaning step is immersed in the rinsing liquid 9 contained in the preliminary rinsing tank 8 and rinsed by ultrasonic waves from the ultrasonic oscillator 10 in this state. Also in this case, the rinse liquid 9 is circulated by the pump 11 and the impurities in the rinse liquid 9 are removed by the filter 12. Here, as the rinse liquid 9, for example, "Techno Care FRW-1"
(Manufactured by Toshiba Corporation) is used. This rinse solution 9 also
Similar to the cleaning liquid 4, it is a non-aqueous cleaning liquid based on silicone and has a specific gravity (25 ° C.) of 0.96.

In the main rinsing step, the work 1 rinsed in the preliminary rinsing step is immersed in the rinsing liquid 14 contained in the main rinsing tank 13. As the rinsing liquid 14 used in this main rinsing step, the same kind as the above rinsing liquid 9 (“Techno Care FRW-1”) is used.

In the finishing rinsing step, the finishing rinsing tank 1
This is done by immersing the work 1 rinsed in the main rinsing step in the rinsing liquid 16 contained in the rinsing liquid 5. The rinsing liquid 16 used in this finishing rinsing step is also of the same kind as the above rinsing liquid 9 (“Techno Care FRW-
1 ”) is used. In addition, the cleaning liquid 4 and the rinse liquid 9, 1
4 and 16 have flash points (cleaning liquid 4 is about 67 ° C,
Rinsing liquids 9, 14, 16 are about 55 ° C.), washing tank 3, preliminary rinsing tank 8, main rinsing tank 13, and finishing rinsing tank 15
A cooling pipe 17 for passing cooling water is provided on the upper part of the cleaning liquid 4 and the rinse liquid 9, 14, 16
I try to suppress the temperature rise.

As shown in FIG. 1, a drying tank 19 which is a part of the steam drying apparatus used in the steam drying step, that is, a steam generating tank 18, contains a drying solution 19 therein, and the drying solution 19 is contained in the drying solution 19. Is provided with a heater 20 for heating, and a cooling pipe 21 for passing cooling water is provided at an upper portion. As the drying liquid 19 used in this steam drying step, for example, "Techno Care FRV-100" (manufactured by Toshiba Corporation) is used. This drying liquid 19 is a vapor cleaning liquid for exclusive use in finishing, which is composed mainly of an incombustible fluorinated liquid, and has a specific gravity (25 ° C.) of 1.8.

In the steam drying process, the drying liquid 19 is fed to the heater 2
Generate steam by heating at 0,
By cooling the upper part of the steam generation tank 18 with the cooling pipe 21, a steam phase is formed in the steam generation tank 18. By arranging the basket 2 accommodating the finished rinsed work 1 in the vapor 22 which is the vapor phase, the rinse liquid 16 and the drying liquid 19 attached to the work 1 are replaced and the work 1 is heated, The work 1 is dried.

During such a drying process, the steam generating tank 18
The vapor inside is collected by the collecting device 23 before being discharged to the outside of the tank 18. This recovery device 23
1 will be described with reference to FIG.
2 shows the flow direction of the gas. Steam 2 in the steam generation tank 18
2 is sucked by the steam carrying means, that is, the blower 25 through the suction duct 24, and is sent to the heat exchanger 27 through the discharge pipe line 26 connected to the discharge port of the blower 25. In this heat exchanger 27, the refrigerant is circulated from the cooler 28 via the pipe 29, and heat is exchanged with the passing vapor to liquefy it. This liquefied liquid is the discharge pipe outlet 2
It is recovered and stored in the recovery tank 30 from 6a.

The discharge pipe outlet 26a is communicated with the upper portion of the steam generation tank 18 via the first valve 31 and the pipe 32, and is liquefied in the heat exchanger 27 to enter the pipe 26. The remaining gas is returned to the steam generation tank 18 via the first valve 31 and the pipe 32.

A pipe line 34 with a second valve 33 interposed is connected between the discharge pipe line outlet 26a and the suction side of the blower 25. The second valve 33 and the first valve 31 are connected to each other. By adjusting the both, the flow rate of the steam 22 passing through the heat exchanger 27 is adjusted. The third valve 35 provided between the suction side and the discharge side of the blower 25 is for adjusting the pressure load of the blower 25. In a trial experiment by the inventors, in the case of a conventional system having a scale in which the drying liquid was naturally consumed in the drying process in an amount of about 3 to 5 liters per day, 70 to 80% of the recovery was obtained by applying the present invention. Successful.

[0016]

According to the present invention, the work washed with the non-aqueous cleaning liquid is transferred into the drying tank, and the cleaning liquid adhering to the work in the vapor phase of the drying liquid in the drying tank is combined with the drying liquid. Substitution is carried out and substantial drying is performed, and thereafter, the vapor in the drying tank is conveyed to a predetermined portion by the conveying means, where it is cooled by the cooling means and liquefied so as to be reused.

As a result, the dry liquid, which is generally expensive due to the use of the CFC substitute cleaning liquid, is liquefied and recovered in order to prevent it from being naturally consumed. Therefore, the production cost is increased due to the use of the CFC substitute cleaning liquid. Has the effect of suppressing as much as possible,
An excellent effect that facilitates widespread use of CFC substitute cleaning liquid can be expected.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of the present invention and showing a schematic configuration of a dry liquid recovery apparatus for a steam drying processing apparatus.

FIG. 2 is a diagram showing a cleaning process in a cleaning device.

[Explanation of symbols]

1 is a work, 4 is a cleaning solution, 9 and 14 and 16 are rinsing solutions,
18 is a steam generation tank (drying tank), 19 is a drying liquid, 20 is a heater, and 25 is a blower (steam transfer means).

Claims (2)

[Claims] 1. The steam in a drying tank of a steam drying treatment device for drying a work by replacing the work washed with a non-aqueous cleaning liquid in the previous step with the cleaning liquid in a vapor phase of a drying liquid is taken out of the bath. A dry liquid recovery device comprising: a vapor carrying means having a suction means; and a cooling means for cooling and liquefying the vapor recovered by the vapor carrying means. 2. The dry liquid recovery apparatus according to claim 1, further comprising recovery means for storing the liquid liquefied by the cooling means.