JPH09167563A - Manufacture and manufacturing device of rotary anode type x-ray tube - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide manufacture of a rotary anode type X-ray tube preventing rotational failures. SOLUTION: This manufacture is provided with a bulb heat process for heating an X-ray tube 13 by means of a heat source 14 arranged around the X-ray tube when the X-ray tube 13 is arranged in a heating furnace 11 for air exhaust in the tube, a high-frequency heating process for heating the X-ray tube 13 by supplying current to a high-frequency coil 15, and an anode bombardment process for colliding electronic beams with the anode of the X-ray tube 13 and heating them. And, a heat transfer body is connected to an anode terminal 13a during air exhaust of the X-ray tube 13 and is cooled.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a rotary anode type X-ray tube, in which defects occurring when exhausting the inside of the X-ray tube are reduced.

[0002]

2. Description of the Related Art When manufacturing a rotary anode type X-ray tube, the inside of the X-ray tube is evacuated. The exhaust gas inside the X-ray tube is
The heating process, the high frequency heating process, and the anode bombarding process are performed. First, in the valve heat process, an X-ray tube is placed inside a furnace connected to a vacuum pump, and the inside of the furnace is evacuated by the vacuum pump. As a result, the inside of the X-ray tube placed inside the furnace is exhausted. After that, use the heat generated by the gas burner and the resistor, etc.
The wire tube is heated and residual gas in the tube is discharged. In the next high-frequency heating step, a current is passed through a high-frequency coil that surrounds the outside of the X-ray tube to heat the cathode part of the X-ray tube as a center, and the residual gas in the tube is discharged. Then, in the anode bombarding process, a voltage is applied to the electrode of the X-ray tube, the electron beam is made to collide with the anode, and self-heating is used to discharge the residual gas in the tube.
The exhaust process inside the X-ray tube is completed.

Although the heating time in each of the above steps differs depending on the type of the X-ray tube, the vacuum inside the X-ray tube is ensured to have the finally required vacuum degree through the above-mentioned steps.

Here, a conventional method and apparatus for manufacturing a rotary anode type X-ray tube will be described with reference to FIG. Reference numeral 31 is a furnace constituting an exhaust device, and the furnace 31 is connected to a vacuum pump (not shown). Then, the X-ray tube 33 is arranged on the fixed base 32 inside the furnace 31. A plurality of gas burners 34 are arranged below the X-ray tube 33 so as to surround the X-ray tube 33, and a high frequency coil 35 is wound around the X-ray tube 33.

In the above structure, the first valve heater
In the process, the vacuum pump is operated to exhaust the inside of the vacuum container of the X-ray tube 33. Then X-ray tube 3
The gas burner 34 located below 3 is ignited, and the heat thereof heats the X-ray tube 33 to a high temperature (about 500 ° C.). And
By this heating, the residual gas adhering to the components inside the X-ray tube 33, the glass surface, etc. is discharged, and the inside of the X-ray tube 33 is brought to a prescribed vacuum degree.

In the next high-frequency heating process, the high-frequency coil 3
5 to heat the X-ray tube 33, discharge the residual gas adhering to the parts and the glass surface centering on the cathode part of the X-ray tube 33, and set the inside of the X-ray tube 33 to a specified vacuum degree. To

In the final anode bombarding step, a voltage is applied to the anode and cathode of the X-ray tube 33 from a power source (not shown), and the heat generated by irradiating the anode with an electron beam is utilized. Then, the residual gas adhering to the anode, each electrode component, and the glass surface in the X-ray tube 33 is discharged, and the inside of the X-ray tube 33 is finally set to a required degree of vacuum.

[0008]

The conventional method and apparatus for manufacturing a rotary anode type X-ray tube described above have the following disadvantages.

For example, in the valve heat process and the anode bombard process, the temperature of the bearing portion of the X-ray tube becomes as high as about 500.degree. A rotary shaft for rotating the anode is provided in the anode portion, and lead is used as a lubricant in the bearing portion of the rotary shaft.

By the way, the melting point of lead is about 327 ° C., and when the temperature of the bearing becomes high, the lead that functions as a lubricant peels off, resulting in poor rotation such as poor rotation and abnormal rotation noise. Occurs. Then, such poor rotation deteriorates the quality of the rotary anode type X-ray tube as a product.

The present invention solves the above-mentioned drawbacks, and an object of the present invention is to provide a method and an apparatus for manufacturing a rotary anode type X-ray tube which prevents rotation failure.

[0012]

According to the present invention, a valve heater for heating an X-ray tube by a heat source arranged around the X-ray tube when the X-ray tube is placed in a heating furnace and the inside of the tube is exhausted. -The X step by applying a current to the high frequency coil
A method of manufacturing a rotary anode X-ray tube, comprising: a high-frequency heating step of heating a X-ray tube; and an anodic bombarding step of colliding an anode of the X-ray tube with an electron beam to heat the anode. At the time of exhaust, a heat transfer member is connected to the anode terminal for cooling.

Further, in the rotating anode type X-ray tube manufacturing apparatus of the present invention, there is provided a heating furnace in which the X-ray tube is arranged, a heat source arranged around the X-ray tube, and the X-ray tube. It is provided with a high-frequency coil surrounding the outside, a power source for applying a voltage to the electrodes of the X-ray tube, and a cooling device which is in contact with the anode terminal of the X-ray tube and through which a cooling medium flows.

According to the above-described structure, in the method for manufacturing a rotary anode type X-ray tube, there is provided a step of cooling the anode of the X-ray tube by connecting a heat transfer body to an external terminal of the anode, for example. In addition, in the manufacturing apparatus, a cooling device that is in contact with the anode of the X-ray tube is provided. Then, a valve heat process for heating the X-ray tube by using a gas burner or an anode bomber for heating the X-ray tube by heating the electrode by applying a voltage to the electrode.
The anode of the X-ray tube is cooled in the process such as the dry process.

In this case, the external terminal of the anode of the X-ray tube is set to 10
It can be maintained at a low temperature of 0 ° C or lower. Therefore, peeling of lead used as a lubricant in the bearing portion of the rotating shaft that rotates the anode is suppressed, and it is possible to prevent poor rotation such that the rotation becomes poor or the rotation noise becomes abnormal.

[0016]

1 is a block diagram of an embodiment of the present invention.
This will be described with reference to FIG.

Reference numeral 11 is a furnace which constitutes an exhaust system.
Is connected to a vacuum pump (not shown). And
The X-ray tube 13 is fixed to the fixed table 12 inside the furnace 11. A plurality of gas burners 14 are arranged below the X-ray tube 13 and around the fixed base 12 so as to surround the X-ray tube 13. These gas burners 14 are placed at a distance sufficient to heat the X-ray tube 13. A high frequency coil 15 is wound around the X-ray tube 13.

The external terminal 13 of the anode of the X-ray tube 13
The cooling device 16 is connected to a. The cooling device 16 is X
It has a structure that can be attached to and detached from the external terminal 13a of the wire tube 13, and the cooling device 16 has a water supply pipe 17 for supplying a cooling medium, for example, water in the direction of arrow Y1, and a drainage for draining water in the direction of arrow Y2. The piping 18 for is connected. A solenoid valve 19 is connected in the middle of the water supply pipe 17, and a flow rate sensor 20 is connected in the middle of the drainage pipe 18. The water supply pipe 17 and the drainage pipe 18 are connected to a cooler 21, and the whole is a closed circuit so that cooling water can circulate.

Solenoid valve 19 connected to water supply pipe 17
Alternatively, the flow rate sensor 20 connected to the drainage pipe 18 is used as a countermeasure when an accident such as water leak occurs. For example, when a water leakage accident occurs in the closed circuit of the cooling water configured by the water supply pipe 17 and the drainage pipe 18, the flow rate of the water changes. Such a change is caused by the flow sensor 2
Detected at 0. When the flow rate sensor 20 detects a change in the flow rate of water, it determines that an accident has occurred and activates the solenoid valve 19 to stop the water supply.

Now, an exhaust method for exhausting the inside of the X-ray tube 13 in the rotary anode type X-ray tube manufacturing apparatus having the above-described structure will be described.

First, a valve heat process is performed. In the valve heat process, the X-ray tube 13 is arranged inside the furnace 11 connected to the vacuum pump, and the anode external terminal 13 of the X-ray tube 13 is arranged.
The cooling device 16 is connected to a. Then, the inside of the X-ray tube 13 arranged in the furnace 11 is evacuated by the vacuum pump. After that, cooling water is supplied from the cooler 21 to the cooling device 16 through the water supply pipe 17, and cooling of the external terminal 13a of the anode is started. In addition, the external terminal 13a of the anode
The cooling water that has cooled the
Will be collected.

Then, with the external terminal 13a of the anode cooled, the gas burner 14 is ignited and baking is performed to heat the X-ray tube 13 inside the furnace 11 to remove the residual gas inside the X-ray tube 13. Discharge. At this time, the lower portion of the X-ray tube 13 is heated by the gas burner 14 over the entire circumference thereof, and the temperature inside the furnace 11 is maintained at about 500 ° C. This temperature is maintained for a predetermined time, and the residual gas in the X-ray tube 13 is discharged. In this case, since the anode external terminal 13a of the X-ray tube 13 is cooled by the cooling device 16 which is thermally connected, the temperature of the anode external terminal 13a is maintained at 100 ° C. or lower.

Next, a high frequency heating step is performed. In this step, an electric current is passed through the high frequency coil 15 to heat the X-ray tube 13. The heating of the high frequency coil 15 does not increase the temperature of the anode so much. Therefore, quality problems such as poor rotation of the bearing hardly occur. Therefore, the cooling device 16 does not cool the anode external terminal 13a.

Finally, an anode bombarding step is performed. In this step, a voltage is applied to each electrode of the X-ray tube 13 from a power source (not shown). At this time, heat is generated in the anode by the irradiation of the electron beam, and the heat of the anode is used to make the X-ray tube 1
3 The residual gas inside is discharged. In this case, the valve heat
Similarly to the step, the temperature of the anode external terminal 13a of the X-ray tube 13 rises to 200 ° C. or higher. Therefore, the cooling device 1
6, the cooling water is supplied to the external terminal 13 of the anode of the X-ray tube 13.
The temperature of a is controlled to 100 ° C. or lower.

Here, the anode external terminal 13a of the X-ray tube 13
The structure for connecting the cooling device 16 with the cooling device 16 will be described with reference to the cross-sectional view of FIG. Reference numeral 13b in the drawing represents a glass vacuum container that constitutes the X-ray tube 13.

Reference numeral 22 denotes a cooling device, and a cylindrical space 23 is formed inside the cooling device 22. One upper end of the cylindrical space 23 is connected to the water supply pipe 24, and the other upper end of the cylindrical space 23 is connected to the drainage pipe 25. Further, a fastening screw 26 is provided so as to penetrate the central portion of the cooling device 22.

The anode external terminal 13a of the X-ray tube is connected to a bearing (not shown) for rotating the anode. A screw hole 28 into which the fastening screw 26 is inserted is formed at the center of the anode external terminal 13a.

When connecting the anode external terminal 13a of the X-ray tube and the cooling device 22, the lower end of the fastening screw 26 is inserted into the screw hole 28 of the anode external terminal 13a, and the fastening screw 26 is inserted.
The upper end 29 is turned to fix the fastening screw 26 in the screw hole 28.

When the fastening screw 26 is fixed in the screw hole 28, the end face 22a of the cooling device 22 and the outer end face of the anode external terminal 13a, and the fastening screw 26 of the cooling device 22.
And the external terminal 13a of the anode are in heat transfer contact with each other.
Therefore, the cooling water flowing inside the cooling device 22 can cool the anode external terminal 13a and a bearing part (not shown) through the contact surface of the heat transfer body such as the end surface 22a of the cooling device 22 and the fastening screw 26.

In the above embodiment, the anode external terminal 1
In order to cool 3a, for example, a water cooling system in which cooling water is flown in the cooling device 22 is used. However, instead of the water cooling method, an air cooling method using air or the like can be used. Further, in the valve heat process, the X-ray tube is heated by using the gas burner, but the X-ray tube may be heated by using the resistor that generates heat by the electric current.

With the above structure, the temperature of the external anode terminal of the rotary anode type X-ray tube can be suppressed to 100 ° C. or lower. Therefore, lead used as a lubricant is not peeled off from the bearing portion of the anode rotating shaft. For this reason, the rotation failure and the abnormal rotation noise do not occur during the exhaust processing, and the quality of the rotary anode type X-ray tube itself can be improved.

The present invention is also suitable for a method of manufacturing a rotary anode type X-ray tube provided with a dynamic pressure sliding bearing such as a Ga alloy which uses a liquid metal lubricant at least during operation.

[0033]

According to the present invention, it is possible to realize a method and an apparatus for manufacturing a rotary anode type X-ray tube which prevents rotation failure.

[Brief description of the drawings]

FIG. 1 is a schematic structural diagram showing an embodiment of the present invention.

FIG. 2 is a sectional view illustrating an embodiment of the present invention.

FIG. 3 is a schematic structural diagram showing a conventional example.

[Explanation of symbols]

 11 ... Furnace 12 ... Fixing stand 13 ... X-ray tube 13a ... X-ray tube anode terminal 13b ... X-ray tube vacuum container 14 ... Gas burner 15 ... High frequency coil 16 ... Cooling device 17 ... Water supply pipe 18 ... Drainage Piping 19 ... Solenoid valve 20 ... Flow rate sensor 21 ... Cooler

Claims (2)

[Claims] 1. A valve heat process for heating an X-ray tube by a heat source arranged around the X-ray tube when the X-ray tube is placed in a heating furnace and the inside of the tube is exhausted. A method of manufacturing a rotary anode type X-ray tube, comprising: a high-frequency heating step of heating an electric current to heat the X-ray tube; and an anode bombarding step of causing an anode of the X-ray tube to collide with an electron beam to heat the anode. A method for manufacturing a rotary anode type X-ray tube, wherein a heat transfer member is connected to the anode terminal to cool it when the X-ray tube is exhausted. 2. A heating furnace in which an X-ray tube is arranged, a heat source arranged in the periphery of the X-ray tube, a high-frequency coil surrounding the outside of the X-ray tube, and an electrode of the X-ray tube. An apparatus for manufacturing a rotating anode type X-ray tube, comprising: a power source for applying a voltage; and a cooling device which is in contact with an anode terminal of the X-ray tube and through which a cooling medium flows.