JPH09165688A - Treatment of aluminum member - Google Patents
Treatment of aluminum memberInfo
- Publication number
- JPH09165688A JPH09165688A JP7327188A JP32718895A JPH09165688A JP H09165688 A JPH09165688 A JP H09165688A JP 7327188 A JP7327188 A JP 7327188A JP 32718895 A JP32718895 A JP 32718895A JP H09165688 A JPH09165688 A JP H09165688A
- Authority
- JP
- Japan
- Prior art keywords
- treatment
- aluminum member
- aluminum
- layer
- undercoating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は真空状態で使用する
アルミニウム部材の処理方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for treating an aluminum member used in a vacuum state.
【０００２】[0002]
【従来の技術】高エネルギー物理学の研究等に用いられ
る粒子加速器の真空チェンバを、アルミニウム合金の熱
間押出しにより成形し且つその直後に水による急冷熱処
理を行った場合には、真空チェンバを高真空状態に減圧
する際やチェンバ内側面に放射光が入射した際における
チェンバ内側面からの放出ガスを抑制するために、上記
の急冷熱処理時にチェンバ内側面（アルミニウム部材の
表面）に酸化アルミニウム［Ａｌ2Ｏ3］の層を介して生
成される多孔状の酸化アルミニウム三水和物（酸化水和
物）［Ａｌ（ＯＨ）3］［Ａｌ2Ｏ3・３Ｈ2Ｏ］の層を、
酸化アルミニウムの層とともにアルミニウム合金の母材
が露出するまで機械加工により切削除去したうえ、チェ
ンバ内側面に改めて酸化アルミニウムの層を生成させ、
微細なガス溜まりがチェンバ内側面に形成されないよう
にしている。2. Description of the Related Art When a vacuum chamber of a particle accelerator used for high energy physics research is formed by hot extrusion of an aluminum alloy and immediately followed by a rapid quenching heat treatment with water, the vacuum chamber is elevated. In order to suppress the gas emitted from the inner surface of the chamber when the pressure is reduced to a vacuum state or when the radiant light is incident on the inner surface of the chamber, aluminum oxide [Al A layer of porous aluminum oxide trihydrate (oxidized hydrate) [Al (OH) 3 ] [Al 2 O 3 .3H 2 O] generated through the layer of 2 O 3 ],
Machined by machining until the base material of the aluminum alloy was exposed along with the layer of aluminum oxide, and then a layer of aluminum oxide was formed again on the inner surface of the chamber.
A fine gas reservoir is prevented from forming on the inner surface of the chamber.
【０００３】一方、アルミニウム合金よりなる中空部材
（たとえば管材）から真空チェンバを成形する際に、中
空部材の内部に酸素（Ｏ2）とアルゴン（Ａｒ）との混
合ガスを充填するとともに中空部材の両端部を気密に閉
塞し、該中空部材を熱間押出しにより成形し且つその直
後に水による急冷熱処理を行うようにして、急冷熱処理
時における酸化水和物の層の生成を抑止することもあ
る。On the other hand, when forming a vacuum chamber from a hollow member (for example, a pipe material) made of an aluminum alloy, the hollow member is filled with a mixed gas of oxygen (O 2 ) and argon (Ar), and Occasionally, both ends are airtightly closed, the hollow member is formed by hot extrusion, and immediately after that, a quenching heat treatment with water is performed, so that formation of an oxide hydrate layer during quenching heat treatment may be suppressed. .
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、機械加
工によって酸化水和物の層を除去する場合には、この酸
化水和物の層の厚さがミクロン単位であるので、酸化ア
ルミニウムの層を残して酸化水和物の層だけを切削除去
することができない。However, when the oxide hydrate layer is removed by machining, since the thickness of the oxide hydrate layer is in the micron range, the aluminum oxide layer is left. Therefore, only the oxide hydrate layer cannot be removed by cutting.
【０００５】従って、先に述べたように、アルミニウム
合金の母材を露出させてからチェンバ内側面に改めて酸
化アルミニウムの層を生成させなければならず、真空チ
ェンバの製作工程が煩雑になる。Therefore, as described above, it is necessary to expose the base material of the aluminum alloy and then form a layer of aluminum oxide on the inner surface of the chamber again, which complicates the manufacturing process of the vacuum chamber.
【０００６】一方、中空部材の内部に酸素とアルゴンと
の混合ガスを封入して酸化水和物の生成を抑止する場合
には、中空部材の両端部を気密に閉塞することが容易で
はなく、熱間押出し時に中空部材の内部を酸素とアルゴ
ンとの混合ガス雰囲気に保つことができずにチェンバ内
側面に酸化水和物の層が生成されることがあり、また、
中空でない部材、すなわち、ブロック材あるいは棒材の
ような中実部材には適用できない。On the other hand, when the mixed gas of oxygen and argon is sealed in the hollow member to suppress the formation of oxidized hydrate, it is not easy to hermetically seal both ends of the hollow member. During hot extrusion, the inside of the hollow member may not be maintained in a mixed gas atmosphere of oxygen and argon, and a layer of oxide hydrate may be formed on the inner surface of the chamber.
It cannot be applied to solid members, that is, solid members such as blocks or bars.
【０００７】本発明は上述した実情に鑑みてなしたもの
で、アルミニウム部材の形状の影響を受けることなく、
アルミニウム部材を真空条件下で使用するのに適した状
態に容易に改善できるようにすることを目的としてい
る。The present invention has been made in view of the above situation, and is not affected by the shape of the aluminum member.
It is an object of the present invention to make it possible to easily improve an aluminum member to a state suitable for use under vacuum conditions.
【０００８】[0008]
【課題を解決するための手段】上記目的を達成するた
め、本発明のアルミニウム部材の処理方法では、表面に
酸化アルミニウム層を介して酸化水和物層が生成されて
いるアルミニウム部材を、酸性溶液よりなる第１の下地
処理液に浸漬して酸化水和物層の一部分を溶解させる第
１の下地処理を行い、該第１の下地処理を行ったアルミ
ニウム部材を、塩基性溶液よりなる第２の下地処理液に
浸漬して酸化水和物層の残りの部分を溶解させる第２の
下地処理を行い、該第２の下地処理を行ったアルミニウ
ム部材を、酸性溶液よりなるエッチング処理液に浸漬し
て表面が平坦になるように酸化アルミニウム層の表層部
分を溶解させるエッチング処理を行う。In order to achieve the above object, in the method for treating an aluminum member of the present invention, an aluminum member on the surface of which an oxide hydrate layer is formed via an aluminum oxide layer is treated with an acidic solution. Is subjected to a first undercoating treatment in which a part of the oxide hydrate layer is dissolved by immersing it in a first undercoating liquid consisting of Is subjected to a second undercoating treatment for dissolving the remaining part of the oxide hydrate layer by immersing the aluminum member subjected to the second undercoating treatment in an etching solution consisting of an acidic solution. Then, etching treatment is performed to dissolve the surface layer portion of the aluminum oxide layer so that the surface becomes flat.
【０００９】また、上述した手順に加えて、エッチング
処理を行った後、アルミニウム部材を、酸性溶液よりな
る中和処理液に浸漬してアルミニウム部材の表面に残存
している第２の下地処理液を中和させる。In addition to the above-mentioned procedure, after the etching treatment, the aluminum member is dipped in a neutralizing treatment liquid consisting of an acidic solution to leave a second base treatment liquid remaining on the surface of the aluminum member. Neutralize.
【００１０】第１の下地処理液には、濃度約２０％程度
の硝酸水溶液を用いることが望ましく、第２の下地処理
液には、濃度約５％程度の水酸化ナトリウム水溶液を用
いることが望ましく、エッチング処理液は、水素イオン
活性度を約ｐＨ３程度とすることが望ましい。It is desirable to use an aqueous nitric acid solution having a concentration of about 20% as the first undercoating liquid, and an aqueous sodium hydroxide solution having a concentration of about 5% for the second undercoating liquid. It is desirable that the etching treatment liquid has a hydrogen ion activity of about pH 3.
【００１１】中和処理液には、濃度約２０％程度の硝酸
水溶液を用いることが望ましい。It is desirable to use an aqueous nitric acid solution having a concentration of about 20% as the neutralizing solution.
【００１２】本発明のアルミニウム部材の処理方法で
は、酸性溶液よりなる第１の下地処理液を用いた第１の
下地処理と塩基性溶液よりなる第２の下地処理液を用い
た第２の下地処理とによって、アルミニウム部材の表面
に酸化アルミニウム層を介して生成されている酸化水和
物層を溶解除去し、更に、酸性溶液よりなるエッチング
処理液を用いたエッチング処理によって酸化アルミニウ
ム層の表面を平坦な状態にする。According to the method for treating an aluminum member of the present invention, the first undercoating treatment using the first undercoating treatment solution consisting of an acidic solution and the second undercoating treatment using the second undercoating treatment solution consisting of a basic solution. The oxide hydrate layer formed on the surface of the aluminum member through the aluminum oxide layer is dissolved and removed by the treatment, and the surface of the aluminum oxide layer is removed by the etching treatment using the etching treatment liquid containing an acidic solution. Make it flat.
【００１３】[0013]
【発明の実施の形態】以下、本発明の実施の形態を図面
を参照しつつ説明する。Embodiments of the present invention will be described below with reference to the drawings.
【００１４】図１から図８は本発明のアルミニウム部材
の処理方法の一例を示すもので、１は第１の下地処理
槽、２は第２の下地処理槽、３はエッチング処理槽、４
は中和処理槽である。1 to 8 show an example of a method for treating an aluminum member according to the present invention, in which 1 is a first undercoat treatment tank, 2 is a second undertreatment tank, 3 is an etching treatment tank, and 4 is an etching treatment tank.
Is a neutralization treatment tank.
【００１５】第１の下地処理槽１には、酸性溶液よりな
る第１の下地処理液５として、濃度２０％の硝酸［ＨＮ
Ｏ3］水溶液が貯留されている（図１参照）。In the first surface treatment bath 1, nitric acid [HN] having a concentration of 20% was used as the first surface treatment liquid 5 composed of an acidic solution.
The O 3 ] aqueous solution is stored (see FIG. 1).
【００１６】第２の下地処理槽２には、塩基性水溶液よ
りなる第２の下地処理液６として、濃度５％の水酸化ナ
トリウム［ＮａＯＨ］水溶液が貯留されている（図２参
照）。In the second undercoating tank 2, a 5% aqueous solution of sodium hydroxide [NaOH] is stored as the second undercoating solution 6 composed of a basic aqueous solution (see FIG. 2).
【００１７】エッチング処理槽３には、水素活性度がｐ
Ｈ３のエッチング処理液７が貯留されている（図３参
照）。The etching treatment tank 3 has a hydrogen activity of p.
The H3 etching solution 7 is stored (see FIG. 3).
【００１８】中和処理槽４には、酸性溶液よりなる中和
処理液８として、濃度２０％の硝酸［ＨＮＯ3］が貯留
されている（図４参照）。In the neutralization tank 4, nitric acid [HNO 3 ] having a concentration of 20% is stored as a neutralization solution 8 composed of an acidic solution (see FIG. 4).
【００１９】９はアルミニウム合金よりなるアルミニウ
ム部材であり、後述する第１の下地処理、第２の下地処
理、エッチング処理を実施する前のアルミニウム部材９
の表面９ａには、酸化アルミニウム層１０が生成され、
該酸化アルミニウム層１０の表面１０ａには、多孔状の
酸化アルミニウム三水和物層（酸化水和物層）１１が生
成されている（図５参照）。Reference numeral 9 is an aluminum member made of an aluminum alloy, and the aluminum member 9 is not subjected to a first undercoating treatment, a second undercoating treatment, and an etching treatment which will be described later.
An aluminum oxide layer 10 is formed on the surface 9a of
A porous aluminum oxide trihydrate layer (oxide hydrate layer) 11 is formed on the surface 10a of the aluminum oxide layer 10 (see FIG. 5).
【００２０】以下、本発明のアルミニウム部材の処理方
法の一例の手順を説明する。The procedure of an example of the method for treating an aluminum member of the present invention will be described below.
【００２１】表面９ａに酸化アルミニウム層１０を介し
て酸化水和物層１１が生成されているアルミニウム部材
９（図５参照）に対して、トリクロロエタン［Ｃ2Ｈ3Ｃ
ｌ3］、あるいは、クロロフルオロカーボン（フロン）
代替剤等の有機溶剤によって洗浄し、アルミニウム部材
９の見かけの表面、すなわち、酸化水和物層１１の表面
１１ａに付着している油脂成分を取り除く脱脂処理を行
った後、このアルミニウム部材９を、第１の下地処理槽
１に貯留されている第１の下地処理液５に浸漬し、該第
１の下地処理液５である濃度２０％の硝酸水溶液に酸化
水和物層１１を反応させて該酸化水和物層１１の一部分
を溶解させる第１の下地処理を行う（図１参照）。With respect to the aluminum member 9 (see FIG. 5) in which the oxide hydrate layer 11 is formed on the surface 9a through the aluminum oxide layer 10, trichloroethane [C 2 H 3 C
l 3 ], or chlorofluorocarbon (CFC)
The aluminum member 9 is washed with an organic solvent such as an alternative agent and subjected to a degreasing treatment for removing oil and fat components adhering to the apparent surface of the aluminum member 9, that is, the surface 11a of the oxide hydrate layer 11. , The first priming solution 5 stored in the first priming bath 1, and the oxidized hydrate layer 11 is reacted with a nitric acid solution having a concentration of 20%, which is the first priming solution 5. Then, a first undercoating treatment is performed to dissolve a part of the oxide hydrate layer 11 (see FIG. 1).
【００２２】このとき、第１の下地処理液５の液温は常
温（２５℃）である。At this time, the liquid temperature of the first surface treatment liquid 5 is room temperature (25 ° C.).
【００２３】上記の第１の下地処理に関して、第１の下
地処理液５に濃度２０％、液温２５℃の硝酸水溶液を用
いた場合と、第１の下地処理液５に濃度２５％、液温２
５℃の硝酸水溶液を用いた場合とについて実験を行った
ところ、濃度２０％、液温２５℃の硝酸水溶液を第１の
下地処理液５として用いた場合のほうが、酸化水和物層
１１を溶解させやすかった。Regarding the above-mentioned first surface treatment, a case where a nitric acid aqueous solution having a concentration of 20% and a liquid temperature of 25 ° C. is used for the first surface treatment liquid 5, and a case where the first surface treatment liquid 5 has a concentration of 25% Warm 2
Experiments were carried out using a 5 ° C. nitric acid aqueous solution, and it was found that the oxide hydrate layer 11 was more likely to be formed when a nitric acid aqueous solution having a concentration of 20% and a liquid temperature of 25 ° C. was used as the first base treatment liquid 5. It was easy to dissolve.
【００２４】第１の下地処理が完了したならば、酸化水
和物層１１の一部分が溶解除去されたアルミニウム部材
９（図６参照）を第１の下地処理槽１から引上げ、必要
に応じて水洗浄を行った後、このアルミニウム部材９
を、第２の下地処理槽２に貯留されている第２の下地処
理液６に浸漬し、該第２の下地処理液６である濃度５％
の水酸化ナトリウム水溶液に酸化水和物層１１を反応さ
せて該酸化水和物層１１の残りの部分を溶解させる第２
の下地処理を行う（図２参照）。When the first undercoating treatment is completed, the aluminum member 9 (see FIG. 6) in which a part of the oxide hydrate layer 11 is dissolved and removed is pulled up from the first undercoating bath 1 and, if necessary, After washing with water, the aluminum member 9
Is immersed in the second undercoating liquid 6 stored in the second undercoating bath 2, and the concentration of the second undercoating liquid 6 is 5%.
Second, the oxidized hydrate layer 11 is reacted with the aqueous sodium hydroxide solution to dissolve the remaining portion of the oxidized hydrate layer 11.
Background processing is performed (see FIG. 2).
【００２５】このとき、第２の下地処理液６の液温は常
温（２５℃）である。At this time, the liquid temperature of the second undercoating liquid 6 is room temperature (25 ° C.).
【００２６】上記の第２の下地処理に関して、第２の下
地処理液６に濃度５％、液温４０℃の水酸化ナトリウム
溶液を用いた場合と、第２の下地処理液６に濃度５％、
液温２５℃の水酸化ナトリウム溶液を用いた場合とにつ
いて実験を行ったところ、濃度５％、液温２５℃の水酸
化ナトリウム溶液を第２の下地処理液６として用いた場
合のほうが、酸化水和物層１１を溶解させやすかった。Regarding the above-mentioned second undercoating, the case where a 5% concentration of the second undercoating solution 6 and a sodium hydroxide solution having a liquid temperature of 40 ° C. are used and the second undercoating solution 6 has a concentration of 5% ,
Experiments were carried out using a sodium hydroxide solution having a liquid temperature of 25 ° C., and it was found that when a sodium hydroxide solution having a concentration of 5% and a liquid temperature of 25 ° C. was used as the second substrate treatment liquid 6, It was easy to dissolve the hydrate layer 11.
【００２７】このように、酸化水和物層１１を形成して
いる多孔状の酸化アルミニウム三水和物は、酸性溶液並
びに塩基性溶液の双方に対して反応を呈するので、上述
した第１の下地処理と第２の下地処理とを行うことによ
り、アルミニウム部材９の表面９ａに酸化アルミニウム
層１０を介して生成されている酸化水和物層１１を除去
して酸化アルミニウム層１０を露出させることができ
る。As described above, since the porous aluminum oxide trihydrate forming the oxide hydrate layer 11 reacts with both the acidic solution and the basic solution, the above-mentioned first method is used. By performing the base treatment and the second base treatment, the oxide hydrate layer 11 formed on the surface 9a of the aluminum member 9 through the aluminum oxide layer 10 is removed to expose the aluminum oxide layer 10. You can
【００２８】第２の下地処理が完了したならば、酸化水
和物層１１が全て溶解除去されたアルミニウム部材９
（図７参照）を第２の下地処理槽２から引上げ、必要に
応じて水洗浄を行った後、このアルミニウム部材９を、
エッチング処理槽３に貯留されている水素活性度がｐＨ
３のエッチング処理液７に浸漬し、該エッチング処理液
７に酸化アルミニウム層１０を反応させて酸化アルミニ
ウム層１０の表面１０ａが平坦になるように酸化アルミ
ニウム層１０の表層部分を溶解させるエッチング処理を
行う（図３参照）。After completion of the second surface treatment, the aluminum member 9 in which the oxide hydrate layer 11 is completely dissolved and removed.
(See FIG. 7) is pulled up from the second base treatment tank 2 and, if necessary, washed with water, and then the aluminum member 9 is
The hydrogen activity stored in the etching tank 3 is pH.
Etching treatment in which the surface layer portion of the aluminum oxide layer 10 is dissolved so that the aluminum oxide layer 10 is reacted with the etching treatment liquid 7 and the surface 10a of the aluminum oxide layer 10 becomes flat. Perform (see FIG. 3).
【００２９】このとき、エッチング処理液７の液温は常
温（２５℃）である。At this time, the temperature of the etching treatment liquid 7 is room temperature (25 ° C.).
【００３０】上記のエッチング処理に関して、エッチン
グ処理液７の水素活性度をｐＨ３、液温を４０℃とした
場合と、エッチング処理液７の水素活性度をｐＨ３、液
温２５℃とした場合とについて実験を行ったところ、水
素活性度がｐＨ３、液温２５℃のエッチング処理液を用
いた場合のほうが、酸化アルミニウム層１０の表面１０
ａを平坦な状態にさせやすかった。Regarding the above etching treatment, the hydrogen activity of the etching treatment liquid 7 is pH 3 and the liquid temperature is 40 ° C., and the hydrogen activity of the etching treatment liquid 7 is pH 3 and the liquid temperature is 25 ° C. As a result of an experiment, the surface 10 of the aluminum oxide layer 10 was found to be better when an etching treatment liquid having a hydrogen activity of pH 3 and a liquid temperature of 25 ° C. was used.
It was easy to make a flat.
【００３１】エッチング処理が完了したならば、酸化ア
ルミニウム層１０の表面１０ａが平坦になったアルミニ
ウム部材９（図８参照）をエッチング処理槽３から引上
げ、必要に応じて水洗浄を行った後、このアルミニウム
部材９を、中和処理槽４に貯留されている中和処理液８
に浸漬し、該中和処理液８である濃度５％の硝酸水溶液
により酸化アルミニウム層１０の表面１０ａに残存して
いる第２の下地処理液６を中和させる中和処理を行う
（図４参照）。When the etching treatment is completed, the aluminum member 9 (see FIG. 8) having the surface 10a of the aluminum oxide layer 10 flattened is pulled out from the etching treatment bath 3 and, if necessary, washed with water, The aluminum member 9 is replaced with the neutralization processing liquid 8 stored in the neutralization processing tank 4.
Then, a neutralization treatment for neutralizing the second undercoat treatment liquid 6 remaining on the surface 10a of the aluminum oxide layer 10 is performed by a 5% concentration nitric acid aqueous solution which is the neutralization treatment liquid 8 (FIG. 4). reference).
【００３２】このとき、中和処理液８の液温は常温（２
５℃）である。At this time, the temperature of the neutralization treatment liquid 8 is room temperature (2
5 ° C).
【００３３】更に、中和処理が完了したならば、上記の
アルミニウム部材９を中和処理槽４から引上げ、必要に
応じて水洗浄を行った後、このアルミニウム部材９を乾
燥させる。Further, when the neutralization treatment is completed, the aluminum member 9 is pulled up from the neutralization treatment tank 4, washed with water as necessary, and then the aluminum member 9 is dried.
【００３４】このように、図１から図８に示すアルミニ
ウム部材の処理方法では、酸性溶液よりなる第１の下地
処理液５を用いた第１の下地処理と塩基性溶液よりなる
第２の下地処理液６を用いた第２の下地処理とによっ
て、アルミニウム部材９の表面９ａに酸化アルミニウム
層１０を介して生成されている酸化水和物層１１を溶解
除去し、更に、酸性溶液よりなるエッチング処理液７を
用いたエッチング処理によって酸化アルミニウム層１０
の表面１０ａを平坦な状態にするので、アルミニウム部
材９が管材のような中空部材であっても、また、ブロッ
ク材あるいは棒材のような中実部材であっても、アルミ
ニウム部材９の形状の影響を受けることなく、アルミニ
ウム部材９を真空条件下で使用するのに適した状態に容
易に改善することができ、また、アルミニウム部材９の
表面９ａに酸化アルミニウム層１０を改めて生成させる
必要がない。As described above, in the method of treating an aluminum member shown in FIGS. 1 to 8, the first undercoating treatment using the first undercoating treatment solution 5 consisting of an acidic solution and the second undercoating treatment consisting of a basic solution. By the second undercoating treatment using the treatment liquid 6, the oxide hydrate layer 11 generated through the aluminum oxide layer 10 on the surface 9a of the aluminum member 9 is dissolved and removed, and further etching using an acidic solution is performed. The aluminum oxide layer 10 is formed by the etching treatment using the treatment liquid 7.
Since the surface 10a of the aluminum member 9 is made flat, whether the aluminum member 9 is a hollow member such as a pipe member or a solid member such as a block member or a bar member, The aluminum member 9 can be easily improved to a state suitable for use under vacuum conditions without being affected, and the aluminum oxide layer 10 need not be newly formed on the surface 9a of the aluminum member 9. .
【００３５】なお、本発明のアルミニウム部材の処理方
法は、上述した実施の形態のみに限定されるものではな
く、本発明の要旨を逸脱しない範囲において種々の変更
を加え得ることは勿論である。The method for treating an aluminum member according to the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the gist of the present invention.
【００３６】[0036]
【発明の効果】以上述べたように、本発明のアルミニウ
ム部材の処理方法においては、酸性溶液よりなる第１の
下地処理液を用いた第１の下地処理と塩基性溶液よりな
る第２の下地処理液を用いた第２の下地処理とによっ
て、アルミニウム部材の表面に酸化アルミニウム層を介
して生成されている酸化水和物層を溶解除去し、更に、
酸性溶液よりなるエッチング処理液を用いたエッチング
処理によって酸化アルミニウム層の表面を平坦な状態に
するので、アルミニウム部材の形状の影響を受けること
なく、アルミニウム部材を真空条件下で使用するのに適
した状態に容易に改善することができ、また、アルミニ
ウム部材の表面に酸化アルミニウム層を改めて生成させ
る必要がない、という優れた効果を奏し得る。As described above, according to the method for treating an aluminum member of the present invention, the first undercoating treatment using the first undercoating treatment solution of the acidic solution and the second undercoating treatment of the basic solution. By the second base treatment using the treatment liquid, the oxide hydrate layer formed on the surface of the aluminum member through the aluminum oxide layer is dissolved and removed, and
Since the surface of the aluminum oxide layer is flattened by the etching process using the etching solution composed of an acidic solution, it is suitable for using the aluminum member under vacuum conditions without being affected by the shape of the aluminum member. The state can be easily improved, and the excellent effect that there is no need to newly generate an aluminum oxide layer on the surface of the aluminum member can be exhibited.
【図１】本発明のアルミニウム部材の処理方法において
アルミニウム部材に第１の下地処理を行っている状態を
示す概念図である。FIG. 1 is a conceptual diagram showing a state in which a first undercoating treatment is performed on an aluminum member in the method for treating an aluminum member of the present invention.
【図２】本発明のアルミニウム部材の処理方法において
アルミニウム部材に第２の下地処理を行っている状態を
示す概念図である。FIG. 2 is a conceptual diagram showing a state where a second undercoating treatment is performed on an aluminum member in the method for treating an aluminum member of the present invention.
【図３】本発明のアルミニウム部材の処理方法において
アルミニウム部材にエッチング処理を行っている状態を
示す概念図である。FIG. 3 is a conceptual diagram showing a state where an aluminum member is subjected to an etching treatment in the method for treating an aluminum member of the present invention.
【図４】本発明のアルミニウム部材の処理方法において
アルミニウム部材に中和処理を行っている状態を示す概
念図である。FIG. 4 is a conceptual diagram showing a state where the aluminum member is subjected to neutralization treatment in the method for treating an aluminum member of the present invention.
【図５】本発明のアルミニウム部材の処理方法において
第１の下地処理を行う前のアルミニウム部材の状態を示
す概念図である。FIG. 5 is a conceptual diagram showing a state of the aluminum member before performing the first undercoating in the method for treating an aluminum member of the present invention.
【図６】本発明のアルミニウム部材の処理方法において
第１の下地処理を行った後のアルミニウム部材の状態を
示す概念図である。FIG. 6 is a conceptual diagram showing a state of the aluminum member after the first undercoating treatment in the method for treating an aluminum member of the present invention.
【図７】本発明のアルミニウム部材の処理方法において
第２の下地処理を行った後のアルミニウム部材の状態を
示す概念図である。FIG. 7 is a conceptual diagram showing a state of the aluminum member after the second undercoating treatment is performed in the aluminum member treating method of the present invention.
【図８】本発明のアルミニウム部材の処理方法において
エッチング処理を行った後のアルミニウム部材の状態を
示す概念図である。FIG. 8 is a conceptual diagram showing a state of an aluminum member after performing an etching treatment in the method for treating an aluminum member of the present invention.
５ 第１の下地処理液 ６ 第２の下地処理液 ７ エッチング処理液 ８ 中和処理液 ９ アルミニウム部材 ９ａ 表面（アルミニウム部材の表面） １０ 酸化アルミニウム層 １０ａ 表面（酸化アルミニウム層の表面） １１ 酸化水和物層 5 First Substrate Treatment Liquid 6 Second Substrate Treatment Liquid 7 Etching Treatment Liquid 8 Neutralization Treatment Liquid 9 Aluminum Member 9a Surface (Aluminum Member Surface) 10 Aluminum Oxide Layer 10a Surface (Aluminum Oxide Layer Surface) 11 Oxidized Water Japanese layer
Claims (4)
水和物層が生成されているアルミニウム部材を、酸性溶
液よりなる第１の下地処理液に浸漬して酸化水和物層の
一部分を溶解させる第１の下地処理を行い、該第１の下
地処理を行ったアルミニウム部材を、塩基性溶液よりな
る第２の下地処理液に浸漬して酸化水和物層の残りの部
分を溶解させる第２の下地処理を行い、該第２の下地処
理を行ったアルミニウム部材を、酸性溶液よりなるエッ
チング処理液に浸漬して表面が平坦になるように酸化ア
ルミニウム層の表層部分を溶解させるエッチング処理を
行うことを特徴とするアルミニウム部材の処理方法。1. An aluminum member having an oxide hydrate layer formed on the surface thereof through an aluminum oxide layer is immersed in a first pretreatment liquid consisting of an acidic solution to dissolve a part of the oxide hydrate layer. A first undercoating treatment is performed, and the aluminum member subjected to the first undercoating treatment is dipped in a second undercoating solution composed of a basic solution to dissolve the remaining portion of the oxide hydrate layer. 2. An etching treatment of performing the undercoating treatment of No. 2 and immersing the aluminum member subjected to the second undercoating treatment in an etching treatment liquid of an acidic solution to dissolve the surface layer portion of the aluminum oxide layer so that the surface becomes flat. A method for treating an aluminum member, the method comprising:
ム部材を、酸性溶液よりなる中和処理液に浸漬してアル
ミニウム部材の表面に残存している第２の下地処理液を
中和させる中和処理を行う請求項１に記載のアルミニウ
ム部材の処理方法。2. A neutralizing treatment for neutralizing a second undercoating liquid remaining on the surface of the aluminum member by immersing the aluminum member in a neutralizing liquid containing an acidic solution after the etching treatment. The method for treating an aluminum member according to claim 1, wherein
硝酸水溶液であり、第２の下地処理液が濃度約５％程度
の水酸化ナトリウム水溶液であり、エッチング処理液の
水素イオン活性度が約ｐＨ３程度である請求項１あるい
は請求項２に記載のアルミニウム部材の処理方法。3. The hydrogen ion activity of the etching treatment liquid, wherein the first undertreatment liquid is a nitric acid aqueous solution with a concentration of about 20% and the second undertreatment liquid is a sodium hydroxide aqueous solution with a concentration of about 5%. The method for treating an aluminum member according to claim 1 or 2, wherein the degree is about pH 3.
溶液である請求項２に記載のアルミニウム部材の処理方
法。4. The method for treating an aluminum member according to claim 2, wherein the neutralization treatment liquid is a nitric acid aqueous solution having a concentration of about 20%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7327188A JPH09165688A (en) | 1995-12-15 | 1995-12-15 | Treatment of aluminum member |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7327188A JPH09165688A (en) | 1995-12-15 | 1995-12-15 | Treatment of aluminum member |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09165688A true JPH09165688A (en) | 1997-06-24 |
Family
ID=18196301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7327188A Pending JPH09165688A (en) | 1995-12-15 | 1995-12-15 | Treatment of aluminum member |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09165688A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6902628B2 (en) * | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Method of cleaning a coated process chamber component |
-
1995
- 1995-12-15 JP JP7327188A patent/JPH09165688A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6902628B2 (en) * | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Method of cleaning a coated process chamber component |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4264374A (en) | Cleaning process for p-type silicon surface | |
| US5221423A (en) | Process for cleaning surface of semiconductor substrate | |
| JP5370014B2 (en) | Method for sealing anodized film | |
| JP3963944B2 (en) | Chemical conversion layer, formation method thereof and solution | |
| US3438873A (en) | Anodic treatment to alter solubility of dielectric films | |
| KR100944596B1 (en) | Anodic oxidation coating remover composition and method of removing anodic oxidation coatings | |
| US20100147802A1 (en) | Methods and removers for removing anodized films | |
| KR20090012640A (en) | Method of treating surface of magnesium product | |
| JPH11171599A (en) | De-alkalization treatment of glass surface | |
| JPH09165688A (en) | Treatment of aluminum member | |
| EP0146115B1 (en) | Process for producing aluminum material for use in vacuum | |
| US4363673A (en) | Process for the removal of carbon from solid surfaces | |
| RU2168560C2 (en) | Process of pickling of metal products | |
| US2473456A (en) | Passivation of ferrous metals | |
| US6355121B1 (en) | Modified etching bath for the deposition of a protective surface chemistry that eliminates hydrogen absorption at elevated temperatures | |
| JP3216477B2 (en) | Method for producing electrode foil for aluminum electrolytic capacitor | |
| JPS6262452B2 (en) | ||
| JP3471507B2 (en) | Metal surface treatment | |
| JP3897590B2 (en) | Pretreatment method of electroless plating material | |
| US3174916A (en) | Treatment of aluminum oxide coatings | |
| CN114540806B (en) | Aluminum alloy passivation film treatment method | |
| JP3200312B2 (en) | Dry etching method | |
| JPH0456309A (en) | Manufacture of etched foil for electrolytic capacitor | |
| JPH07326547A (en) | Manufacture of cathode foil for aluminum electrolytic capacitor | |
| JPH0450391B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |