JPH09161709A - Control device for electron microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce input devices and improve operability by optionally changing the setting of the observation condition corresponding to an input device set in advance, and selecting the observation condition in advance in an electron microscope. SOLUTION: An electron microscope is controlled by a computer 10 via a D/A converter and an interface 15. An input switch 13 corresponding to an input device is read by the computer 10 via an interface 12. An input unit 11 is used for installing or changing the functions (control objects) for the input device. Lenses and coil current values corresponding to the observation condition are stored in the computer 10 via the input unit 11 in advance. Observation conditions corresponding to individual input devices are optionally selected and stored in the input unit 11. An operator selects an input device, calls out the observation condition corresponding to the input device, and sets the electron lenses and deflection coil current values which are control objects.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron microscope,
In particular, the present invention relates to a control device for an electron microscope in which the number of input devices on the operation panel of the electron microscope, which has many objects to be controlled, is reduced as much as possible and the operation is easy.

[0002]

2. Description of the Related Art Conventionally, in an electron microscope, each input device has a one-to-one correspondence with various functions (objects to be controlled). In recent years, these devices have been required to have multiple functions, and the number of control targets has increased and the number of input devices corresponding thereto has also increased.

[0003]

For this reason, the number of input devices on the operation panel increases, the layout of the input devices becomes complicated, and another input device is operated by mistake. Was bad.

In particular, there are a large number of input devices for changing the observation conditions, which causes the above problem. Due to the limited number of input devices, not all observation conditions could be set. An object of the present invention is to provide a control device for an electron microscope with improved operability.

[0005]

The present invention focuses on the fact that many input devices cannot be used simultaneously or instantaneously by an operator, and the observation conditions corresponding to preset input devices can be arbitrarily set. The above object can be achieved by providing a changing means so that the operator can select the viewing condition for the input device in advance and the number of input devices is made as small as possible than the number of viewing conditions.
That is, the input device and the control target are all configured to be computer controlled, and the control target to be controlled based on the information from a certain input device can be arbitrarily selected in advance by the operator and provided with a means for registering in the computer. It becomes possible to do.

The general operation of the present invention will be described. First, it is assumed that the observation conditions to be switched by the operator for each input device are registered in the computer by the input device. Further, it is assumed that the computer incorporates a program for executing or controlling the setting of each observation condition. In such a state, the computer reads a change in a certain input device periodically or at every change. The present invention operates by the computer re-recognizing the viewing condition registered for the input device and executing or controlling the setting of the viewing condition corresponding to the changed input device. However, since there may be a plurality of input devices, the same operation is performed for each.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION In FIG. 1, an electron beam emitted from an electron gun 1 is converged by an irradiation lens 3 and irradiates a sample 4. The electron beam that has passed through the sample is magnified by the objective lens 5 and the imaging lens 7 and forms an image on the fluorescent plate 8. The deflection coil 2 is for adjusting the optical axis on electron optics. It is controlled by the computer 10 via the DA converter and the interface 15. The display device 9 is used to display the state of the electron microscope. The corresponding input switch 13 of the input device is read into the computer 10 via the interface 12. The input device 11 is a function for the input device (control target)
Used to install / change. High-magnification observation, low-magnification observation, electron diffraction,
Ultra-high dispersion diffraction, scanning transmission electron beam observation, convergent electron beam diffraction,
There are observations for X-ray analysis and electron beam velocity analysis. Commonly controlled objects under these observation conditions are electron lens current values, deflection coil current values, and astigmatism correction coil current values. The lens and coil current values corresponding to the observation conditions are stored in the computer 10 in advance by the input device 11. In addition, the observation condition desired to correspond to each input device is arbitrarily selected from a plurality of observation conditions, and the input device 11
To memorize. When the operator selects an input device, an observation condition corresponding to the input device is called, and each electron lens and each deflection coil current value to be controlled are set.

The selection of the observation condition corresponding to the input device is facilitated by using the display device. For example, in FIG. 2, a list of observation conditions and an input device that can be changed and has the same layout as the operation panel are displayed (CRT).
9 and if there are three input devices, select the observation conditions to be associated with each and input device 1
You only have to register from 1.

[0009]

According to the present invention, the number of input devices can be reduced, and a simple operation panel layout (arrangement) can be achieved, so that malfunctions can be prevented. Further, according to the present invention, since the operator's personal requirements can be incorporated into the layout (arrangement) of the input device, the operability can be improved.

Furthermore, since a large number of input devices can be reduced, the manufacturing cost of the operation panel can be suppressed and the economic merit is high.

[Brief description of the drawings]

FIG. 1 is a block diagram of a control device.

FIG. 2 is a front view of a display device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Electron gun, 2 ... Deflection coil, 3 ... Irradiation lens, 4 ... Sample, 5 ... Objective lens, 6 ... Astigmatism correction coil, 7 ... Imaging lens, 8 ... Fluorescent plate, 9 ... Display device, 10 ... Computer, 11 ... Input device for registration, 12 ... Interface,
13 ... Input switch, 14 ... Amplifier, 15 ... Interface.

Claims (2)

[Claims] 1. An electron microscope having an input device for switching observation conditions, and for all or part of the input device, selected arbitrarily from a plurality of observation conditions, and each input device is selected. 2. A control device in an electron microscope, comprising means for registering or changing the switching observation condition of. 2. A control device in an electron microscope according to claim 1, wherein a display device is used as a means for changing a control target of an input device corresponding to an observation condition.