JPH05283033A - Electron microscope - Google Patents

Abstract

PURPOSE:To prevent improper operation depending upon the degree of skill for operation or the type of a work by causing a memory means to save operation members selected with a selector means according to the degree of skill for operation, and providing a setting means to disable the operation of a saved arbitrary operation member. CONSTITUTION:A selector means 210 to allow the selection of operation members depending upon the degree of skill is provided for analyzing a sample W under exposure to an electron beam EL emitted via the operation of a plurality of operation members on an operation board 20. The operation members selected with the means 210 are saved in a memory means 220 and a setting means 230 is provided to disable the operation of an arbitrary operation member of the saved members. Namely, operational function to be prohibited depending upon the degree of an operator's skill or the type of a work, is determined and set with the means 230 to disable the prohibited operation. According to this construction, erroneous operation can be prevented, and work efficiency can be improved for the analysis of the sample W.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron microscope having an operation board.

[0002]

2. Description of the Related Art An operator operates switches and knobs on an operation board of an electron microscope to irradiate a sample with an electron beam to analyze the sample. The operation of an electron microscope is diverse and complicated. Therefore, the operation board has many switches and knobs.

A large number of switches or knobs have a certain adjustment procedure according to the work contents to be operated and the procedure thereof. If this is ignored and adjustment is performed, duplication of work becomes unavoidable and work efficiency is reduced.

[0004]

In recent years, the field of use of electron microscopes has become wider, and not only operators who are skilled in operation but also beginners can operate them. Also, a plurality of operators may share the same time.

Therefore, a beginner or the like may operate an important switch or knob to cause a trouble. For example, if a beginner carelessly operates the knobs for setting the filament current and bias, an unsuitable current may be applied to the filament of the electron gun to break the filament, or the life of the filament may be significantly shortened. Will not occur. Also, the filament may be over-biased and discharged.

When such an erroneous operation is performed, it is necessary to interrupt the work of observing the sample and the work of taking a picture of the image of the sample. Therefore, the work efficiency of observing and photographing the sample is reduced, and the need for adjustment and maintenance of the electron microscope arises.

Therefore, an object of the present invention is to provide an electron microscope which prevents erroneous operations and improves the work efficiency of observing and photographing a sample.

[0008]

According to the present invention, an electron microscope which irradiates a sample W with an electron beam EL to analyze the sample W by operating a plurality of operation members 250 and 252 of an operation board 20 is operated. Selection means 210 capable of selecting at least one operation member in accordance with the above-mentioned proficiency level, storage means 220 for storing at least one operation member type selected by the selection means 210, and storage by the storage means 220 The setting means 230 is capable of preventing operation of at least one of the selected types of operation members.

Further, according to the present invention, an electron microscope which irradiates a sample W with an electron beam EL to analyze the sample W by operating a plurality of operation members 250 and 252 of the operation board 20 is selected according to the type of work. At least 1 unnecessary for work
Selecting means 210 capable of selecting one operating member, storing means 220 for storing at least one operating member type selected by the selecting means 210, and at least one of the operating member types stored by the storing means. This is an electron microscope including a setting means 230 capable of blocking the operation of one operating member.

[0010]

According to the operator's proficiency level of operation, operation members on the operation board 20 are prevented from being operated to prevent erroneous operations.

Further, the operation member on the operation board 20 is prevented from being operated according to the work content to prevent erroneous operation.

[0012]

FIG. 1 shows an embodiment in which the present invention is applied to a scanning electron microscope.

The operation unit 10 includes an operation board 20.
Are arranged.

The lens barrel unit 14 includes a gun alignment coil 4, an electron gun 24, condenser coils CL ₁ and CL.
₂ , deflection and scanning coil 26, stigmator 28,
It has an objective lens OL.

The electron beam EL emitted from the electron gun 24 is supplied to a condenser lens CL ₁ , CL ₂ , a deflection and scanning coil 2
6, the stigmator 28 and the objective lens OL are used to irradiate the sample W and analyze the sample W. Electron beam EL
Is scanned on the sample W, and secondary electrons, backscattered electrons, X-rays, and cathode luminescence emitted from the sample W are detected by the detector 32. Reference numeral 34 is a sample chamber, and 36 is an exhaust system. By operating predetermined switches, knobs and the like of the operation board 20, the illustrated elements and unillustrated elements of the scanning electron microscope are controlled.

The processing means 200 for the operation board 20
Is provided. The processing means 200 is a selection means 210.
And a storage unit 220 and a setting unit 230.

The selection means 210 is connected to the storage means 220 and the operation board 20, and selects an operation member necessary for the operation or an operation member unnecessary for the operation according to the skill level of the operator or the operation. Select at least one or more. When selecting an operation member of the operation board 20, for example, a display unit (not shown)
The menu item displayed in should be selected by pressing the key on the numeric keyboard.

The storage means 220 is connected to the setting means 230 and stores the type of at least one operation member selected by the selection means 210.

The setting means 230 is connected to the operation board 20. The setting means 230 instructs the operation board 20 to operate at least one operation member of the type stored in the storage means 220 to prevent operation of the corresponding operation member.
The operation member is, for example, the switch 250 shown in FIG.
The knob 274 and the trackball unit 22 are included.

An example of the selection means 210 is a numeric keyboard on the operation board 20 shown in FIG. The switches and knobs of the operation board 20 and the trackball unit 22 are designated by the combination of the keys of the numeric keyboard.

The storage means 220 of FIG.
It is stored whether the knob or the trackball unit 22 is designated, and the stored information is given to the setting means 230.

The setting means 230 disables the operation of the switches, knobs or the trackball unit 22 of the operation board 20 based on the given stored information. As a method for disabling the operation of the switch, the knob, or the trackball unit 22, there are a software method and an electric circuit method.

When the operation of the switches, knobs, and trackball unit 22 is blocked by software, in the interrupt processing from the electric circuit of the operation board 20,
There is a method of referring to a prepared valid / invalid judgment table and performing data processing to the setting circuit only when it is valid.

When electrically inhibiting the operation of the switch, knob, or trackball unit 22, a judgment signal for judging whether the operation member is valid or invalid is output, and an AND condition with the judgment signal is set. There is a method to process data change only when it is satisfied. In addition, A with the determination signal
There is a method of generating a software interrupt only when the ND condition is satisfied.

Next, referring to FIG. 2, the structure of the operation board 20 and the precautions for adjustment in the electron microscope will be described in detail.

On the operation board 20, the above-mentioned selection means 2 is provided.
10, trackball unit 22, knobs 270, 2
72, 274 and operation switch board 249.

The operation switch board 249 includes a filament current and bias switch 250, a gun alignment switch 252, and a lens alignment switch 25.
4,256, knob 274, spot size switch 2
58, a dynamic focus switch 262, a tilt correction switch 264, and a scan rotation switch 266.

The basic procedure for operating the electron microscope is to first adjust the electron gun as in the ordinary optical system and then gradually narrow the adjustment range to the target sample periphery. If the filament current, the bias voltage, or the acceleration voltage of the electron gun is carelessly changed during the final image quality adjustment of this series of operations, readjustment of the optical system that has been sufficiently adjusted up to then often occurs.

This is particularly noticeable when trying to take a photograph with high magnification and high resolution. However, in the case of observing a few hundred to a few thousand times, this is not a significant problem. In addition, beginners may run too much filament current or too much bias voltage. For this electron gun adjustment, an operation blocking condition for electron gun adjustment is set. Therefore, the filament current of the operation switch board 249 and the bias switch 250 are set to the operation prevention.

Next to the setting of the electron gun, the first stage of the electron optical system is adjusted. Gun size adjustment, crossover position change control and spot size adjustment
This is the adjustment of the first-stage configuration of the optical system. As a matter of course, neglecting the first-stage adjustment of the optical system deteriorates the performance of the entire optical system. Beginners should not disturb the conditions adjusted by the expert. Therefore, the operation of the first-stage configuration of the electron optical system is set as a condition item for operation inhibition. Therefore,
The gun alignment switch 252 of the operation switch board 249 is set to prevent operation.

Next, lens alignment for adjusting the axis of the electron beam EL, movable diaphragm, adjustment of astigmatism correction (stig),
The objective lenses are adjusted in order. Since this adjustment work is finally carried out while observing the image quality of the final image, unlike the adjustment of the first stage configuration of the electron gun and the electron optical system, there are many cases where the respective adjustments are delayed in time. However, adjustments of the lens alignment, the movable diaphragm, and the astigmatism correction are originally difficult for beginners, and it is preferable to continue the adjustment state of a skilled person. Therefore, adjustments for lens alignment, movable aperture, and astigmatism correction are items for operation prevention. Therefore, the lens alignment switch 25 of the operation switch board 249
4, 256, the knob 274, the spot size switch 258, and the auto stigmator switch 251 are set to prevent operation.

In the case of the scanning electron microscope, there are some characteristic scanning methods because the sample is operated by the electron beam EL. This characteristic scanning method is tilt correction and dynamic focus. The tilt correction corrects the tilt state of the sample W to correct the aspect ratio during scanning. The dynamic focus corrects the objective lens current condition according to the displacement of the sample position from the objective lens that occurs when the sample W is tilted. In the case of tilt correction or dynamic focus, the operator can be confused because it can function even in the absence of sample tilt. For beginners who do not understand this characteristic scanning method or who forget that it is a characteristic scanning method, the operator physically moves the sample or the objective lens by moving the sample beyond the operable area during sample movement. It may cause trouble to break. Therefore, tilt correction and dynamic focus adjustment are items to be blocked. Therefore, the tilt correction switch 26 of the operation switch board 249 is
4. The operation of the dynamic focus switch 262 is blocked.

The function of the spot that intentionally stops the scanning of the electron beam EL is that the electron beam E on the sample W is highly accelerated.
There is a risk of damaging the sample W by continuing to apply L and a risk of heating a part of the microscope body of the electron microscope, and it is not always a characteristic scanning state, but caution is required. Therefore, the operation function of the spot is also an item of operation prevention. In addition, a special function related to communication with an external device is a function that is confusing because it has nothing to do with normal operation. This function includes a line profile (LP) function of ultra-low speed scanning compatible with an X-ray detector. These functions are also items to prevent operation. Therefore, the spot switch and the line profile of the corresponding scan rotation 266 on the operation switch board 249 are set to the operation prevention.

The filament current and bias switch 250 for adjusting the electron gun, the gun alignment 252 for adjusting the first-stage configuration of the electron optical system, and the lens alignment switch 25 for adjusting the astigmatism mentioned above.
4, 256, knob 274, spot size switch 258, auto stigmator switch 251,
The operation of the tilt correction switch 264 and the dynamic focus switch 262, and the operation blocking items for setting the spot and line profiles will be blocked. For this setting, for example, a certain grouping such as the skill level shown in FIG. 3, the work shown in FIG. 4, the group shown in FIG. 5, or the operator shown in FIG. It is preferable to be able to easily grasp the environment.

The proficiency level is, for example, the case of classifying a beginner, an intermediate level, and an advanced level in FIG. Beginners who are unfamiliar with the handling of electron microscopes can perform operations such as focus, magnification, image shift, image rotation, and adjustment of image brightness and contrast that can be normally used without confusion. For intermediate users, in addition to those that can be set by beginners, for example, spot size, lens alignment, and astigmatism correction (both manual and automatic) can be operated. "For advanced users" means a state in which all operation blocking is released. The operator at each stage can also switch to this state as necessary and adjust the operation.

As shown in FIG. 4, among the above-mentioned works, the items of operation inhibition are set for each of the routine work normally performed, the general observation, and the high-magnification and high-resolution observation work. Only the operation member for adjustment work can be operated. In addition, as shown in FIG. 5, the operation prevention items are set separately for each work of adjusting the electron gun, adjusting the first stage configuration of the electron optical system, and adjusting the final image as shown in FIG. Grouped.

Further, in the case of final image adjustment,
It is possible to prevent erroneous operations by blocking operations other than the operation members that are normally used for each observation state, operation state, or individual. For example, as shown in FIG. 1, operation items can be set for each individual (operator).

Further, by having a function for storing operation conditions and a function for calling the knobs during operation, information on the adjustment position of the switch and information on the work environment for preventing the operation of the operation members, a work function can be stored. Improves efficiency and reliability.

The present invention is not limited to the above embodiment.

In addition to this, the multi-axis control trackball unit is provided with a function of preventing adjustment on one or more of the axes to be controlled, so that more precise adjustment of the adjustment points is performed for each axis. There is also a way to make it possible.

The operation members are selected by, for example, pressing the enter key of the ten-keyboard once to enter the operation member selection mode. For example, if the code "01" is entered on the ten-keyboard, the operation state for beginners according to their proficiency level is obtained. Is set. It is also possible to output this information to the storage means and the setting means to put the operation board in the operation setting blocking state by software or electrically.

For example, it may be possible to select whether or not to block the operation of all switches, knobs, and trackball units. Further, all the switches, knobs and trackball units may be divided into some groups so that whether to block the operation can be selected in group units. Further, the present invention is applicable not only to the scanning electron microscope but also to the transmission electron microscope.

[0043]

According to the first aspect of the present invention, it is possible to prevent erroneous operation of the operation member on the operation board in accordance with the operator's skill level of operation. Therefore, the efficiency of sample analysis work can be improved.

According to the second aspect of the present invention, it is possible to prevent erroneous operation of the operation member on the operation board according to the work content.
Therefore, the efficiency of sample analysis and photography can be improved.

[Brief description of drawings]

FIG. 1 is a diagram showing a scanning electron microscope which is a preferred embodiment of the electron microscope of the present invention.

FIG. 2 is a diagram showing the operation board of FIG.

FIG. 3 is a diagram in which work in the scanning electron microscope of FIG. 1 is classified according to proficiency level.

FIG. 4 is a diagram in which work in the scanning electron microscope of FIG. 1 is classified according to work content.

FIG. 5 is a view showing that the operation members to be prevented from being operated in the scanning electron microscope of FIG. 1 are divided into groups.

FIG. 6 is a view showing an operation member to be operationally blocked for each operator in the scanning electron microscope of FIG.

[Explanation of symbols]

 20 operation board 210 selection means 220 storage means 230 setting means for preventing operation ◆

Claims (2)

[Claims] 1. An electron beam (E) is operated by operating a plurality of operation members (250, 252) of an operation board (20).
L) irradiating the sample (W) and analyzing the sample (W), a selection means (210) capable of selecting at least one operation member according to the proficiency level of the operation, and a selection means (210). 210) storage means (220) for storing at least one type of operating member selected, and at least one operating member of the operating member types stored by the storing means (220) can be prevented from being operated. Electron microscope consisting of a simple setting means (230). 2. An electron beam (E) is operated by operating a plurality of operation members (250, 252) of an operation board (20).
L) irradiating the sample (W) and analyzing the sample (W), a selection means (210) capable of selecting at least one operation member unnecessary for the work according to the type of work, A storage means (220) for storing at least one operation member type selected by the selection means (210), and an operation inhibition of at least one operation member of the operation member types stored by the storage means. Setting means (23
0) and an electron microscope.