JPH10321179A - Parameter input device of scanning electron microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable selection or cancellation of a kind of parameter and input of a numeric value or the like without averting a line of sight from an observing monitor by constituting a parameter input device of an operation panel and a mouse by which an operator inputs a parameter and a host computer to control an electron optics system and a sample stand on the basis of parameter information. SOLUTION: A parameter input device 1 is constituted of an operation panel 2, a mouse 3 and a host computer 4. An operator inputs a necessary parameter by operating the operation panel 2 and the mouse 3. These parameter informations are used to control an electron optics system of a scanning electron microscope and a sample stand after being processes by being inputted to the host computer 4. The parameter informations are also displayed on a monitor 5. An image of a sample is also displayed together on the monitor 5. That is, an operation image screen and an observing image screen are displayed together on the monitor 5.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a parameter input device for a scanning electron microscope.

[0002]

2. Description of the Related Art In observation with a scanning electron microscope, an operator selects parameters relating to an electron optical system such as focus, contrast, brightness, magnification, etc., and an observation position of a sample (distance from a reference point) in accordance with the purpose of observation. ) Is input or changed.

In a conventional scanning electron microscope, an operation panel is provided as a device for inputting parameters for controlling an electron optical system and a sample stage in accordance with the observation purpose of an operator. This operation panel generally has the same number of dials and buttons as the number of parameter types.
The operator selects a dial or the like as needed, and inputs a numerical value of a parameter by turning the dial or the like. That is, the operator must sequentially perform at least three steps of selecting the type of parameter, inputting or changing the numerical value of the parameter, and canceling the type of the selected parameter.

In recent scanning electron microscopes, such parameters tend to be centrally controlled by a CPU host computer such as a personal computer or a workstation. In addition, the above-mentioned parameter information is also displayed on an observation monitor for displaying a sample image, so that the movement of the operator's line of sight is reduced.

[0005]

In a conventional operation panel of a scanning electron microscope, an operator must search for a dial or the like corresponding to a parameter to be selected or rotate the dial or the like while watching the indicator. . Therefore, the operator's line of sight is away from the observation monitor during such an operation.

On the other hand, under the control by the host computer, instructions from the operator are input by a keyboard and a mouse, and most of the instructions are recently issued by a mouse. However, in order to execute the above three steps using a mouse, it is necessary to repeat a selection operation of buttons, menus, and the like on the operation screen. During this time, the operator cannot concentrate on observation. This is the same even when a mouse and a keyboard are used together. In particular, when observing a change in the state of the sample, it is very difficult to respond to the change in the state of the sample in real time, since various parameters are often changed.

An object of the present invention is to provide a parameter input device capable of selecting or canceling a parameter type and inputting or changing a parameter value while observing a sample, that is, without removing a line of sight from an observation monitor. With the goal.

[0008]

According to a first aspect of the present invention, there is provided an operation panel used for inputting a plurality of parameters for controlling an electron optical system and a sample stage of a scanning electron microscope. This is a parameter input device composed of a mouse and a host computer. The operation panel is used to select or cancel the type of parameter, and the mouse is
It is used for inputting or changing a numerical value of a parameter, and the assignment between the operation panel and the mouse is clarified (claim 2).

By providing the operation panel on one side of the operator and the mouse on the other side of the operator, the operator can set various parameters while observing the sample.

[0010]

FIG. 1 is a schematic configuration diagram for explaining a parameter input device according to an embodiment of the present invention. The parameter input device 1 includes an operation panel 2, a mouse 3
And a host computer 4. The operator inputs necessary parameters by operating the operation panel 2 and the mouse 3. After these parameter information is input to the host computer 2 and processed, it is used for controlling the electron optical system of the scanning electron microscope and the sample stage. The parameter information is displayed on the monitor 5. The monitor 5 also displays an image of the sample.
That is, the operation screen and the observation screen are displayed together on the monitor 5.

In a conventional operation, a button, a menu, or the like on an operation screen displayed on the monitor 5 is designated by the mouse 3, and when a parameter needs to be changed at the time of observation, selection of a parameter type and numerical value of the parameter are performed. Change and release of selection parameters were repeated. It is not desirable to input and instruct all three steps with only the mouse 3 for the following reasons. That is, even on one screen, the operator's line of sight shifts to buttons and menus on the operation screen, and during that time, the sample image cannot be observed. Further, the time difference between the input instructions of the mouse 3 also prevents quick response to a change in the state of the sample.

Therefore, in this embodiment, the operation panel 2 is used to select and cancel the type of the parameter, and the mouse 3 is used to input the numerical value of the parameter. in this way,
If you use the operation panel and the mouse properly, you can quickly input and change parameters. The operation panel 2 is provided with switches corresponding to parameters that change relatively frequently. The number of switches is desirably about five for easy and reliable operation. If there are many types of parameters,
A keyboard may be used as an auxiliary.

The switch operation is, for example, "ON" to select the type of parameter, and "OFF" to cancel it. That is, when the switch is “ON”, the host computer 4 recognizes that the parameter type is selected, and “OF”
In the case of "F", it is recognized as cancellation. A mouse usually has two buttons. In the present embodiment, these two buttons are indicated by 3a and 3b as shown in FIG. For example, if it is set that the numerical value of the parameter increases when the button 3a is pressed, and the numerical value of the parameter decreases when the button 3b is pressed, the focus, contrast, brightness, and sample stage that need to be changed during observation are set. Can be changed.

As described above, by properly using the operation panel 2 and the mouse 3, the operator can change various parameters while watching the observation screen.
Next, a case where the focus and contrast need to be changed due to a change in the state of the sample during observation of the sample image will be specifically described with reference to FIG. It is assumed that the operator's line of sight is on the observation screen displayed on the monitor 5, the operation panel 2 is on the left hand of the operator, and the mouse 3 is on the right hand of the operator. In many cases, the dominant arm of the operator is the right hand, so it is reasonable to operate the mouse that requires relatively fine adjustment operation with the right hand. Of course, the operator with the dominant hand on the left hand only has to place the mouse 3 on the left and the operation panel 2 on the right and operate the mouse 3 with the left hand. The important point is that you can use both your left and right hands at the same time.

First, the operator presses a focus selection switch 2a provided on the operation panel 2. At this time, the host computer 4 recognizes that the focus change mode has been selected. Next, the operator presses the button 3a or 3b of the mouse 3. At this time, the host computer 4 is in the focus change mode and the mouse 3
Button is pressed, either the electron optical system or the sample stage driving unit is feedback-controlled so that the focus distance is moved by an amount corresponding to the time of keeping the button pressed. In the case of focus control, generally, the electronic optical system is controlled if the movement is slight, and the sample stage is controlled if the stroke length is large. Therefore, two types of focus change modes may be set.

When the focus value becomes an appropriate value, the operator's hand leaves the focus selection switch 2a of the operation panel 2, and the host computer 4 recognizes that the focus setting mode has been released. Next, the operator presses the contrast selection switch 2b provided on the operation panel 2. At this time, the host computer 4 recognizes that the contrast change mode has been selected.

Subsequently, the operator presses the button 3 of the mouse 3
Press a or 3b. At this time, the host computer 4
Is a contrast change mode, which controls the contrast by feedback as indicated by the mouse 3 button.
Change the contrast value. When the contrast value becomes an appropriate value, the operator's hand leaves the contrast selection switch 2b of the operation panel 2, and the host computer 4 recognizes that the contrast setting mode has been released.

As described above, the parameter can be changed in accordance with the change of the observation image without removing the line of sight from the monitor 5, so that the operability is improved and the operator's fatigue is reduced. In addition, the number of switches on the operation panel is set to about 5 so as not to move the line of sight. However, in order to cope with various uses, the mode of the switches may be changed.

[0019]

According to the present invention, when a parameter needs to be changed at the time of observation, the operator can change the parameter without taking his / her eyes off the observation screen.
In particular, real-time observation is possible even when the state of the sample changes drastically. In addition, since the functions are shared between the operation panel and the mouse, the operability is improved.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram for explaining a parameter input device according to an embodiment of the present invention.

[Explanation of symbols]

 1 ... Parameter input device 2 ... Operation panel 3 ... Mouse 4 ... Host computer 5 ... Monitor

Claims (3)

[Claims] An electron optical system for generating an electron beam, irradiating the sample with the electron beam, and detecting electrons emitted from the sample; a movable sample stage on which the sample is mounted;
Used to input a plurality of parameters for controlling the parameter of the scanning electron microscope, the parameter input device, an operation panel and a mouse for the operator to input the parameters, and information on the parameters A parameter input device for a scanning electron microscope, comprising: a host computer that controls the electron optical system and the sample stage based on the parameter. 2. The scanning device according to claim 1, wherein the operation panel is used to select and cancel the parameter, and the mouse is used to input or change a numerical value of the selected parameter. Input device for scanning electron microscope. 3. The operation panel according to claim 1, wherein the operation panel is disposed on one of left and right sides of the front of the operator, and the mouse is disposed on an opposite side of the operator from the operation panel. 3. The parameter input device for a scanning electron microscope according to 2.