JP2000306538A - Charged particle beam scanning type image display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To control an image centering operation and scaling of observation magnification while leaving the sight of operation on a sample image by leading a mouse cursor to a sample image display position by the use of a mouse and operating a wheel control after moving a stage so as to set a clicked position at the center of the visual field on clicking the mouse. SOLUTION: By converting the distance between the clicked position of a mouse cursor and the center of a sample image display area into a movement amount of a sample stage 4, a computer 7 moves the sample stage 4. When the sample stage movement is terminated, an area which is required to be more precisely observed is displayed at the display center of the sample image display area. At that time, since the mouse cursor is still displayed in the sample image display area, for instance, when a wheel of the mouse 9 with a wheel control is then moved upward, the observation magnification is enlarged, and when the wheel is moved downward, the observation magnification is reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a charged particle beam scanning type image display device, which relates to enlargement and reduction of an observation field.

[0002]

2. Description of the Related Art In a charged particle beam scanning type image display device which displays a secondary charged particle intensity obtained by scanning a charged particle beam on a computer screen as a sample image,
Usually, the operator moves the stage while watching the sample image, and controls the scanning range of the deflection mechanism to enlarge or reduce the observation magnification.

For this operation, a sample image display unit and an observation magnification control unit are arranged at different positions on the computer screen. At this time, the sample image is observed at a relatively low observation magnification, and the observation stage is moved to a position of the sample image to be observed in detail to enlarge the observation magnification. In comparison, since the observation magnification to be finally observed is orders of magnitude higher, it is necessary to alternately perform the operation of moving the sample stage and the operation of increasing the observation magnification.

[0004] In the sample stage moving operation, an operation of moving a mouse cursor on the sample image display section on the computer screen and clicking a mouse on a point to be enlarged is performed. The stage is moved so that the point clicked by this operation becomes the center of the field of view. Hereinafter, this operation is referred to as an image centering operation. On the other hand, to enlarge or reduce the observation magnification, move the mouse cursor to the observation magnification control section on the computer screen to select a magnification or to increase or decrease the magnification. This operation changes the operation range of the deflection function. Hereinafter, this operation is referred to as an observation magnification change operation.

An operator using the charged particle beam scanning type image display device searches for an object to be observed while alternately performing an image centering operation and an observation magnification changing operation, and increases the observation magnification to a level at which a detailed structure can be determined. I was doing.

[0006]

When the image centering operation and the observation magnification changing operation are alternately performed, the operator's line of sight first looks over the sample image display section for an object to be enlarged, and performs the image centering operation. Next, the operator's eyes must move to the observation magnification control section. Performing this operation alternately causes poor operability due to the operator's eyes coming and going.

[0007]

In order to solve the above-mentioned problems, in the present invention, a mouse with a wheel control is used to hold the mouse cursor at the sample image display position, and when the mouse is clicked, the stage is set so that the clicked position becomes the center of the visual field. The mechanism controls the enlargement / reduction of the observation magnification by moving and operating the wheel control.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a system configuration of the present invention.
The charged particle beam a generated from the charged particle source 1 passes through the focusing lens system 2 and the deflecting mechanism 3 and irradiates the sample 5 placed on the sample stage 4. When the charged particle beam “a” passes through the focusing lens system 2, the charged particle beam “a” is converged by the lens effect and is irradiated on the sample 5. This irradiation generates secondary charged particles b, which are captured by the secondary electron detector 6 and the intensity thereof is taken into the computer 7. Deflection mechanism 3 is charged particle beam a
Can be shifted in the x direction and the y direction. Since the deflection mechanism 3 is also controlled by the computer 7, image data of the sample 5 can be obtained by the computer 7 by matching information on the intensity of the secondary charged particle detector 6 with the position swung in the x direction / y direction.

The computer 7 has a mechanism for controlling the charged particle source 1, the focusing lens system 2, the deflection mechanism 3, and the sample stage 4. In addition, the computer 7 includes a display device 8 and a mouse 9 with wheel control, and a mouse cursor 11 displayed on the display device 8 (see FIG. 2).
Is linked to the movement of the mouse 9. The image data is displayed in a part of the display device 8. Displayed on the display device 8 are software buttons required for control and operation in addition to the image data.

FIG. 2 shows an example of an operation screen displayed on the display device 8. A sample image display area 10 for displaying a sample image is arranged in the operation screen. Other software buttons necessary for control and operation are arranged as required, but are not explicitly shown here. Move the mouse cursor 11 to a position on the sample image displayed in the sample image display section 10 to be observed in more detail, and move the mouse 9
Click.

The computer 7 converts the distance between the position of the mouse cursor 11 when clicked and the center of the sample image display area 10 to the amount of movement of the sample stage 4, and moves the sample stage 4. When the movement of the sample stage is completed, the place to be observed in more detail is displayed at the display center of the sample image display area 10.

At this time, since the mouse cursor 11 is still displayed in the sample image display area 10, when the wheel of the mouse 9 with the wheel control is moved upward, the observation magnification is increased and the wheel is moved downward. Movement decreases the observation magnification. That is, the wheel control has a function of instructing a change in the observation magnification. A similar effect can be obtained by incorporating a mechanism in which the observation magnification decreases when the wheel of the mouse 9 with the wheel control is moved upward and the observation magnification increases when the wheel is moved downward.

The image centering operation can be performed by clicking the mouse while the mouse cursor 11 is kept in the sample image display section 10, and the observation magnification can be operated by operating the wheel control. Does not come out of the sample image display section 10, and the operability is remarkably improved. The same effect can be obtained if the mouse 10 with a wheel control is not a wheel control but a mouse with two momentary buttons or a mouse with a two-way tiltable button. In the case of a mouse having two momentary buttons, the observation magnification may be increased when one button is pressed, and the observation magnification may be decreased when the other button is pressed. In the case of a mouse with a two-way tilt button, tilting the two-way tilt button on one side increases the observation magnification, and tilting it to the other lowers the observation magnification. It is clear that operability can be similarly improved by incorporating such a mechanism.

[0014]

According to the present invention, the image centering operation and the enlargement / reduction operation of the observation magnification can be performed while keeping the operation line of sight on the sample image, and the operability is remarkably improved.

[Brief description of the drawings]

FIG. 1 is a system configuration diagram of the present invention.

FIG. 2 is an operation screen displayed on a display device 8;

[Explanation of symbols]

 Reference Signs List 1 charged particle source 2 focusing lens system 3 deflection mechanism 4 sample stage 5 sample 6 secondary charged particle detector 7 computer 8 display device 9 mouse 10 sample image display section 11 mouse cursor a charged particle beam b secondary charged particle

Claims (1)

[Claims] 1. A charged particle beam generator comprising a charged particle source and a focusing lens system for focusing a charged particle beam extracted from the charged particle source; and a deflecting mechanism for deflecting and scanning the charged particle beam. A sample stage on which a sample to be irradiated with the charged particle beam is placed and movable, a secondary charged particle detector for detecting a secondary charged particle generated by irradiating the charged particle beam, and the secondary In a charged particle beam scanning type image display device comprising a computer having a display device for reading an output intensity of a charged particle detector and displaying a secondary charged particle image and a mouse with a wheel control as input means of the computer, the mouse cursor By bringing the secondary charged particle image displayed on the display device and rotating the wheel. A scanning range of the deflecting mechanism to change an observation field of view of the secondary charged particle image.