JPH09159406A - Optical sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect the presence, position, size, and the like of an object accurately over a wide range of distance between light projecting part and light receiving part by forming a fiber group constituting the light receiving part such that the light receiving area varies in the one-dimensional direction within the projection range of light. SOLUTION: A fiber group constituting a light receiving 22 is formed such that the area of light receiving face A, B thereof varies in the one-dimensional direction within the projection range of light and the quantity of receiving light depends on the position of an object intruding between a light projecting part 21 and a light receiving part 22. Based on the variation in the quantity of receiving light, the presence, number, one-dimensional position, size, and the like of the object can be detected accurately. When a light receiving fiber group having light receiving area variable in one direction is combined with a fiber group having light receiving area variable in reverse direction, the quantity of receiving light of two light receiving fiber groups varies in reverse direction and the presence, position, and the like of object can be detected more accurately.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical sensor device for optically detecting the presence / absence, position, size, etc. of an object within a certain fixed range.

[0002]

2. Description of the Related Art The structure of a conventional optical sensor device used for detecting an object within a certain range is shown in FIGS. In each of these optical sensor devices, the light projecting portion and the light receiving portion are arranged so as to be transmissive with respect to the object to be detected. In the device shown in FIG. 19A, the light sources 1 to 6 on the light projecting side. Are arranged in plurality, and the light receiving elements 1 to 6 are arranged corresponding to the respective light sources 1 to 6 on the light receiving side. When an object enters the detectable area between the light emitting side and the light receiving side and even one of the light receiving elements is in the light blocking state, it is detected that there is an object in the area. FIG. 11B shows the timing of light projection by the light source and light reception by the light receiving element.

In FIG. 20, one light source in the light projecting section and one light receiving element in the light receiving section are provided, and collimated light is emitted by using the light projecting fiber 7 and the prism sheet 8. Similarly, the prism sheet 9 and the light receiving fiber are used. 10 is used to guide parallel light to a light receiving element. FIG. 21 shows that light is emitted from one light source 11 as parallel light using a slit 12 or the like, and CC
The light is received using D13.

[0004]

However, FIG.
In the configuration shown in (1), many light sources, light receiving elements and amplifiers are required, resulting in a large configuration and high cost.
Further, the resolution of detection is determined by the distance between the light source and the light receiving element, and it is difficult to achieve high resolution. Further, the configuration shown in FIG. 20 has a problem that only the presence or absence of an object can be detected, and the position, width, etc. cannot be detected. Further, in the configuration shown in FIG. 21, since the CCD is used, it is difficult to cope with a large distance range in addition to the manufacturing cost.

The present invention has been made by paying attention to such a conventional problem, and by using a light receiving fiber group in the light receiving portion and changing the light receiving area thereof in at least a one-dimensional direction, a certain constant value is obtained. It is an object of the present invention to provide an optical sensor device capable of clearly detecting the presence / absence, position, size, etc. of an object within a range.

[0006]

In order to achieve the above object, the present invention emits light from a light projecting portion toward a light receiving portion in a predetermined range, and when an object is within the emitting range, the light is received. In the optical sensor device that detects the change in the amount of light at the section to detect the presence, position, size, etc. of an object, the light receiving section consists of a light receiving fiber group, and the light receiving area of this light receiving fiber group is within the emission range. It is formed so as to change in at least a one-dimensional direction.

According to the above construction, the fiber group forming the light receiving section is formed so that the light receiving area thereof changes in the one-dimensional direction within the emission range, and the light projecting section and the light receiving section are formed. Since the amount of received light varies depending on the position of the object that has entered between the two, it is possible to clearly detect the presence / absence, the number, the one-dimensional position, the size, etc. of the object with a simple configuration.

Further, in the above, the light receiving portion may be formed by a combination of the light receiving area of the light receiving fiber group changing in one direction and the light receiving area changing in the opposite direction. Good. According to this configuration, when the position of the object changes, the change in the amount of light received by the two light receiving fiber groups changes in the opposite direction, so that it is possible to more clearly detect the presence or absence of the object, the position, and the like.

Further, in the above, the light receiving portion is constituted by a combination of the light receiving area of the light receiving fiber group changing in one direction and the light receiving area of the light receiving fiber group not changing. May be. Even in this configuration, the same effect as above can be obtained.

Further, in the above, the amount of light projected by the light projecting section may be changed in response to a change in the light receiving area of the light receiving fiber group of the light receiving section. According to this configuration, the change in the amount of light received by the light receiving unit depending on the presence or absence of an object is large, and the detection sensitivity is high.

Further, according to the present invention, in the optical sensor device according to any one of claims 1 to 4, the light projecting portion and the light receiving portion are provided so as to sandwich the hanging position of the liquid material, and the liquid material runs out. It is an inspection device that detects Also,
In the present invention, the light projecting unit and the light receiving unit in the optical sensor device are provided so as to sandwich the transport unit of the detection target,
The inspection device detects the height of a detection target that is conveyed, and detects the suitability of the detection target based on the difference from the reference height. Furthermore, according to the present invention, a light projecting unit and a light receiving unit in the optical sensor device are provided so as to sandwich a transport unit for a detection target, and when the detection target transported is detected by the device, detection is performed. It is a conveyed object detection device which stops an object at a fixed position. In these configurations, it is possible to accurately detect the breakage, height, or position of the conveyed detection target, to inspect the detection target for abnormalities, or to stop the detection target at a desired position. .

[0012]

Embodiments of the present invention will be described below with reference to the drawings. (First Embodiment) FIG. 1A is a configuration diagram of an optical sensor device according to the first embodiment, showing a detection area range by a light projecting portion and a light receiving portion. FIG. 7B is a front view of the light receiving part in which the changes in the light receiving area in the one-dimensional direction are opposite to each other, and FIG. Figure showing changes in
FIG. 6D is a diagram showing a change in the amount of received light in the one-dimensional direction on the other light receiving surface. 2A is a diagram showing the flow of light when an object is present in the detection area, and FIG. 2B is a diagram showing the change in the amount of light received in the one-dimensional direction of one light-receiving surface in FIG. (C) is a diagram showing a change in the amount of received light in the one-dimensional direction of the other light receiving surface at the time of (a),
(D) is a diagram showing the flow of light when an object exists in a position different from the above (a) in the detection area, and (e) is (d).
Is a diagram showing a change in the light-receiving area of one light-receiving surface in the one-dimensional direction at the time of, and (f) is a diagram showing a change in the light-receiving area of the other light-receiving surface in the one-dimensional direction at the time of (d),

In the optical sensor device, the light projecting section 21 and the light receiving section 22 are arranged to face each other with a certain distance, and
1 emits parallel light toward the light receiving section 22 in a certain range S, and when the detection object (also called a work) M (FIG. 2) is within the emission range S, the light receiving section 22 outputs the parallel light. Detect changes in light intensity. Based on this detection signal, the discrimination circuit (FIG. 3) described later recognizes the presence / absence, number, one-dimensional position, size, height, width, etc. of the works M. The light projecting unit 21 is a bundle fiber FC in which a plurality of fibers are bundled.
Is used, and its tip is arranged so that light can be emitted in parallel within a preset emission range S. A light source (see FIG. 3) including a light emitting element or the like is arranged on the other end side of the bundle fiber FC.

The light receiving section 22 uses two bundle fibers FA and FB (fiber group) formed by bundling a plurality of fibers, and the tip ends of the bundle fibers FA and FB are individually separated into a plurality of fibers. Then, Fig. 1 (b)
As shown in, the light receiving area is formed so as to change with respect to the one-dimensional direction within the emission range S. Specifically, the fiber group on the side of the one bundle fiber FA is divided by a diagonal line when the emission range S is regarded as a rectangular surface from the light receiving side, and one surface is divided by an arrow X in the emission range S. It is arranged so that the area of the light receiving surface (A) increases with respect to the one-dimensional direction shown in FIG. The fiber group on the other bundle fiber FB side is arranged on the other surface divided by the diagonal line so that the area of the light receiving surface (B) decreases in the one-dimensional direction. As described above, the light projecting surface and the light receiving surface both have a rectangle of the same size, but the light receiving surface has two substantially triangular shapes that divide the rectangular emission range S into two in a diagonal direction. The light receiving surfaces (A) and (B) are combined. The one-dimensional direction indicated by X in FIG. 1B is the traveling direction of the work (not shown). A light receiving element (see FIG. 3) is arranged on the other end side of the bundle fibers FA and FB.

As described above, the light projecting surface and the light receiving surface both have a rectangle of the same size, but the light receiving surface is divided into two rectangular emission areas S divided in the diagonal direction. It is configured by a combination of light receiving surfaces (A) and (B) having a substantially triangular shape. The one-dimensional direction indicated by X in FIG. 1B is the traveling direction of the work M. As shown in FIGS. 1C and 1D, when the work M is not within the emission range, the sum of the ratios of the received light amount A and the received light amount B is 1 at any position in the X direction, that is, A / B. The formula of = 1 always holds. On the other hand, when the work M is within the emission range,
As shown in (b), (c), (e), and (f), part of the emitted light is blocked by the work M and is not received. Therefore, a portion where the amount of received light is 0 appears. Then, A1 and B1 have different values from A and B, respectively, depending on the position of the work M in the X direction. When the work position changes as shown in the figure, A1> A2 and B1 <B2,
A1 / B1 and A2 / B2 have different values. Therefore,
By catching this change in the amount of received light,
The directional position can be detected. The width or size of the work M can be detected by the width in which the amount of received light is zero.

FIG. 3 is a circuit block diagram of the optical sensor device. The pulse signal output by the oscillator circuit 25 is
The light emitting pulse generation circuit 26 converts the light emitting pulse signal into
This signal is converted into linear light by the light source 27, and then is projected from the fiber end which is the light projecting section 21 through the fiber group FC. The projected linear light is received by the light receiving unit 22.
The linear light received and received by the light receiving surfaces of the fiber groups FA and FB of No. 2 are converted into pulse signals by the light receiving elements 28A and 28B, and the converted signals have peak values detected by the peak hold circuits 29A and 29B. The signal having the peak value reaches the signal processing circuit 31 from the arithmetic circuit 30. Here, the table of the preset position data is calculated with reference to the position data 32, and the position of the work or the like is thereby calculated. Is judged, this judgment value is converted into a signal and given to the discrimination circuit 33, discriminated in comparison with the threshold value 34, and the result is outputted as a signal.

The light emitting pulse signal is also transmitted to each of the peak hold circuits 29A and 29B so that the signal output from the light emitting unit 21 and the signal input at the light receiving unit 22 are synchronized. Has become. Each signal received by each peak hold 29A, 29B has a threshold value of 3
The presence / absence of each signal is input to the signal processing circuit 31 by the OR circuit 37 after the presence / absence of the value is checked by the 5A and 35B and after the discrimination by the discrimination circuits 36A and 36B. . The signal output from the signal processing circuit 31 may be linearly output as it is.

4 (a), (b) and (c) are diagrams showing a method of bundling the fiber groups of the light receiving section 22. As shown in FIG. The light receiving unit 22 is
After the tip portions of the two bundle fibers FA and FB constituting this fiber are once separated into individual fibers,
As shown in (a), the light receiving surfaces (A) and (B) are pushed into the resin frame 40 formed in the shape of a right triangle, and subsequently, as shown in (b), the outer shape portion is heated. The ends of the bundle of fiber groups are cut to align the surfaces so that the light receiving surface is formed by compression by contraction or the like, and this surface is polished.
Then, it is fixed by the holder 41 of the light receiving portion 22 to complete the process.

(Second Embodiment) Next, a second embodiment of the optical sensor device will be described. FIG. 5A is a configuration diagram of the second embodiment of the optical sensor device, and FIG. 5B is a front view of the light receiving portion thereof, in which the light receiving area in the one-dimensional direction is changed. FIG. 7C is a diagram showing the flow of light when the work M is present in the detection area, and FIG. 8D is a diagram showing changes in the amount of light received in the one-dimensional direction of the light receiving surface in FIG. .

The optical sensor device of this embodiment is shown in FIG.
As shown in (a), the bundle fiber F
B is used, and like the first embodiment described above, the individual fibers are once disassembled and then the tips are bundled into a right triangle shape to form the light receiving surface (B). As shown in b), a fiber surface is not formed on the right triangular surface corresponding to the light receiving surface (A) of the first embodiment, and the light receiving amount decreases in the one-dimensional direction X. Is.

In the case of this configuration, for example, when the work M is positioned within the emission range S as shown in FIG.
As shown in (d), a portion where the amount of received light is 0 appears, whereby the presence or absence of the work M can be detected, and the amount of received light is 0.
The width of the work M can be detected from the width of the portion, and since the received light amount B1 changes depending on the position of the work M, the position of the work M can be detected from this. According to the present embodiment,
The configuration of the light receiving section becomes simple.

(Third Embodiment) Next, a third embodiment of the optical sensor device will be described. In the optical sensor device of the present embodiment, as shown in FIG. 6A, the light receiving section 22 is composed of two bundle fibers FB and FD,
As shown in (b), the bundle fiber FB corresponding to one light-receiving surface (B) of the two right-angled triangular surfaces in which the light-receiving area changes in the X direction and the rectangle is partitioned by diagonal lines.
And a bundle fiber FD corresponding to the light receiving surface (D) whose area has not changed. The bundle fiber FB is the same as the bundle fiber FB of the first embodiment. A light-receiving surface is not formed in a portion corresponding to the other surface of the two right triangles that divide the above rectangle by a diagonal line.

FIG. 6 (c) shows the amount of light received D1 in the X direction of the light receiving surface (D) when a work is present within the emission range S.
6D shows the amount of light received B1 in the X direction of the light receiving surface (B) in the same case. Since the received light amount D1 varies depending on the width of the work, the width can be detected from that. Since the received light amount B1 varies depending on the position and width of the workpiece, if the width information is fixed from the data of the received light amount D1, the position information can be accurately detected.

On the other hand, in the above-described first or second embodiment, if the width of the work changes, the position may be erroneously detected. That is, in FIGS. 7A and 7B, the first or second
Light receiving surfaces (A) and (B) in the X direction when the work is thick (wide) and when the work is thin (narrow) in the embodiment.
Shows the change in the amount of received light (when the work is thick, the broken line indicates, and when the work is thin, the alternate long and short dash line). A1 and B1 represent changes in the amount of light received on the respective light receiving surfaces (A) and (B) when the work is thick, and A2 and B2 indicate changes in the amount of light received on the respective light receiving surfaces (A) and (B) when the work is thin. And Now, when the work is at the center in the X direction and X1 = X0 / 2, A1 / B1 = A2
Accurate position information can be determined by the calculation formula / B2. On the other hand, when X1 ≠ X0 / 2, A1 / B
It can be determined from the calculation formula 1 ≠ A2 / B2 that the position information has an error depending on the thickness of the work.

In the third embodiment, first, the light receiving surface (C)
The width of the work is detected from the amount of light received by the
Accurate information can be obtained by detecting the position information of the work from the amount of received light and correcting this with the width information.

Next, FIG. 8 is a circuit block diagram of the optical sensor device of the third embodiment. The pulse signal output from the oscillating circuit 25 is converted into a light emitting pulse signal by the light emitting pulse generating circuit 26, and this signal is converted into linear light by the light emitting element 27, which is a light source, and then emitted through the fiber group FC. The light is projected from the end of the fiber, which is the light section 21. The projected linear light is transmitted through the fiber F of the light receiving section 22.
The linear light received and received by D and FB is converted into pulse signals by the light receiving elements 28D and 28B, and the peak values thereof are detected by the peak hold circuits 29D and 29B. Discrimination circuit 50 that has received this peak value
Refers to the width information table 51 to determine the width of the work. Further, the peak value captured by the peak hold circuit 29B is transmitted to the determination circuit 52 as it is. The determination circuit 52 refers to the position information table 53 and outputs the position information of the work based on the width information. This position information is discriminated by the discrimination circuit 33 by the threshold value 34 and output.

(Fourth Embodiment) Next, a fourth embodiment of the optical sensor device will be described. As shown in FIG. 9A, in the optical sensor device of this embodiment, bundle fibers FC, FA, and FB are used for the light projecting portion 21 and the light receiving portion 22, and the light emitted from the bundle fiber FC is projected. The side ends are connected to a plurality of small bundle fiber groups 56 via a connector 55, and the light receiving ends of the bundle fibers FA and FB on the light receiving side are connected to the light emitting side fiber group 56 via a single connector 57. The same number of small bundle fiber groups 58 (a, b,
C, D) are connected. This small bundle of fibers 58
As shown in FIG. 9B, (a, b, c, d) is configured so that the number of connections (content ratio) with the fibers forming the bundle fibers FA, FB changes in the one-dimensional direction. It was done. In addition, the light projecting section 21 configured as described above.
The light-receiving units 22 are arranged facing each other at regular intervals in the one-dimensional direction, as shown in FIG.

With this configuration, the narrowing of the emission range due to the dense fibers of the light projecting portion and the light receiving portion in the above-described first to third embodiments can be covered by discretely roughening. As a result, detection in a large range can be supported. The detection process is substantially the same as in the first to third embodiments.

(Fifth Embodiment) Next, a fifth embodiment of the optical sensor device will be described. 10 (a) and (b)
It is the side view and front view of the light projection part 21 in the optical sensor apparatus of 5th Example. The tip end of the bundle fiber FC of the light projecting unit 21 is once disassembled and bundled into a plurality of small bundle fiber groups 59, and these small bundle fiber groups 59 are arranged in one row in the one-dimensional direction and held in a holder. It has a simple structure and is held by 60. A lens (not shown) may be used so that parallel light can be projected. With this configuration, the light projecting unit 21 can be easily created, and the position and width of the work in the one-dimensional direction can be detected.

(Sixth Embodiment) Next, a sixth embodiment of the optical sensor device will be described. This optical sensor device is characterized by the light receiving portion 22, and as shown in FIGS. 11A and 11B, there are two types of configurations. That is, in the light receiving section 22 of the first and second embodiments described above, as a means for changing the light receiving area, a fiber having the same diameter is put in the outer shape in which the ratio of the light receiving areas (A) and (B) is different. However, in this embodiment, as shown in FIG. 11A or 11B, the light receiving area is changed by changing the diameter of the fiber itself. The change in the diameter of the fiber as used herein means either one in which the number of fiber bundles is changed or one in which the diameter of the fiber itself is different. According to this configuration, the number of required fibers is reduced, and thus the handleability during assembly is improved.

A light receiving portion 22 according to a modification of the optical sensor device of the sixth embodiment is shown in FIGS. The light receiving unit 22 includes two bundle fibers FA on the light receiving side.
At least two fibers each having a different diameter are combined with the FB via the connector 57, and a fiber set (a,
B, C, and D) are connected. That is, in this modification, the connection configuration ratio of the two bundle fibers FA and FB to the fiber is changed in a one-dimensional direction.
This corresponds to the light receiving portion of the fourth embodiment.

(Seventh Embodiment) Next, a seventh embodiment of the optical sensor device will be described with reference to FIG. The optical sensor device of the seventh embodiment is characterized by the light projecting section, and is adapted to the light receiving section of the second embodiment. That is, in the second embodiment, the amount of light received by the light receiving section 22 changes depending on the position of the work, but in order to increase the fluctuation range of the amount of light received due to this difference in position,
The lighting unit is also changed. FIG. 13 is a graph showing the light emitting amount distribution and the light receiving area distribution. The light emitting amount is reduced at a point where the light receiving area is small, and the light emitting amount is increased as the light receiving area increases. Since the amount of light blocked by the work is the amount of light projected (per unit length) × the light receiving area, the change in the amount of light blocked by the position of the work is larger than in the case of the second embodiment and the sensitivity is improved with the above configuration.

Further, an example in which the light projection amount on the light projection side is discretely changed to correspond to the fourth embodiment is shown in FIG.
(B). In the bundle fiber FC of the light projecting section 21,
Through the connector 55, a plurality of light projecting fibers (a) and (b) having the same outer diameter but different fiber diameters of the inner diameter
(C) and (D) are connected in a discrete arrangement in a one-dimensional direction so that the amount of received light changes in order.

(Eighth Embodiment) Next, an application example of the optical sensor device according to any of the above embodiments will be described with reference to FIG. The present example is a conveyed object detection device that detects a conveyed detection object by an optical sensor device and stops it at a fixed position, and more specifically, a sticker attachment device. As shown in FIG. 15 (a), this sticker attaching device 6
1, a sheet (for example, a credit card) 63 placed on the conveyance line 62 is conveyed in the direction of an arrow 64, and a roll paper 66 to which a seal 65 is releasably attached is provided above the conveyance direction. The sheet 6 by adsorbing the seal 65
It is conveyed to a fixed position of No. 3 and attached. Seal 6
In order to attach 5 to the sheet 63, the conveyed sheet 63 needs to be temporarily stopped at a fixed position, and the detection for stopping the fixed position of the sheet 63 is performed by the optical sensor device 70. There is. In the present sensor device 70, the light projecting section 21 is installed above the leading end of the sheet 63 to be stopped, and the light receiving section 22 is installed below the transport line 62 immediately below the sheet 63, and the light receiving section 22 extends from the light projecting section 21. A linear light 71 having a width in the transport direction is emitted toward
When a part of 1 is cut off by the leading end of the sheet 63, the light receiving part 22 detects this when the cutoff amount reaches a certain value, and based on this detection signal, the inside of the circuit of the sensor device 70 not shown. At, the signal for temporarily stopping the transport line 62 is output.

FIGS. 15B and 15E show the relationship between the emitted light and the leading end of the sheet 63 as seen from the side of the sticker sticking device 61. First, as shown in FIG. 15B, when the leading end of the sheet 63 reaches a position where it blocks nearly half of the linear light 71, for example, in the first embodiment shown in (c) and (d) of FIG. If the light-receiving unit 22 has two light-receiving surfaces A and B whose ratios of light-receiving amounts are inversely proportional to each other, the light-receiving amount is A1, as shown in FIGS.
B1 is obtained, and the position in the transport direction is calculated by determining the ratio of the light receiving amounts (light receiving areas) of both. Figure 1
As shown in FIG.
When reaching a position where more than half of 1 is cut off, as shown in FIGS. 15 (f) and 15 (g), the amount of received light becomes A2 and B2, and the ratio of the amount of received light (light receiving area) changes greatly. Here, A1 / B1 ≠ A2 / B2, and it is possible to discriminate both of them from this. Then, for example, in FIG.
The state of (b) is OK, and the state of (e) is NG. As described above, when the optical sensor device of the present invention is applied to the conveyance line, there is a great advantage that the position of the leading end portion of the sheet 63 can be accurately detected / determined.

(Ninth Embodiment) Next, an example in which the optical sensor device according to any one of the above embodiments is applied to a device for detecting liquid shortage will be described with reference to FIG. When the liquid rubber 74 housed in the hopper 73 is dripped downward by a fixed amount from the dispenser under the hobber 73, this liquid shortage detection device 72 needs to confirm whether or not the liquid rubber 74 droops. In order to accommodate this, the optical sensor device 70 of the present invention is provided with the light projecting portion 21 and the light receiving portion 22 facing each other so that the emitted light crosses the hanging direction of the liquid rubber 74. is there. This has the advantage that not only the liquid rubber 74 runs out of liquid, but also the flow width and position of the liquid rubber 74 can be detected and determined at the same time, and these can be controlled in a desired state.
Of course, such a detection method is applicable not only to liquid rubber but also to detection of fluids in various fields, and is particularly suitable for detection of thin linear objects.

(Tenth Embodiment) Next, an example in which the optical sensor device of any of the above embodiments is applied to the height detection of a work will be described with reference to FIG. FIG.
(A) shows a process in which a work (adhesive roll tape 77 in this example) is placed on the transport line 76, and the adhesive roll tape 77 is transported to the next step by the transport line 76. In this process, the adhesive type sensor tape 70 has an appropriate width (height h) for the adhesive roll tape 77.
It is for detecting whether or not it has been disconnected at.
A pair of synchronous sensors 80 each including a light projecting element 78 and a light receiving element 79 are installed in both lateral directions on the transport line 76 so that light emitted from the sensors is orthogonal to each other on the transport line 76. Of the sensor device 70 such that the emitted light is orthogonal to the conveying line 76 and has a width in the upward direction of the conveying line 76, in particular, a width from the middle surface of the adhesive roll tape 77 to a position higher than the upper end thereof. In addition, the light projecting section 21 and the light receiving section 22 are provided facing each other in both lateral directions of the transport line 76.

Therefore, by storing the height position of the reference item of the adhesive roll tape 77 in the discrimination circuit of the sensor device 70, the tip of the adhesive roll tape 77 is synchronized with the synchronization sensor 8.
When the position detected by 0 is reached, the optical sensor device 70
The emitted light by means of capturing the center of the adhesive roll tape 77, and if the height (thickness) of the adhesive roll tape 77 is proper at this position, as shown in FIG. Since light is received by the light receiving unit 22, it is determined that the product is a good product, and if the height (thickness) of the adhesive roll tape 77 is not a proper product, as shown in FIG. Is less than a certain value, or, though not shown, since the amount of received light is greater than a certain value,
It turns out to be a defective product. If the product is defective,
An unillustrated arm or the like beside the transfer line 76 can be used to repel defective products from the transfer line.

(Eleventh Embodiment) Next, with reference to FIG. 18, an example in which the optical sensor device according to any one of the above-mentioned embodiments is applied to a step of adsorbing and transferring a thin plate such as a substrate will be described with reference to FIG. explain. In FIG. 18A, a large number of substrates 81 having a smooth surface such as glass are stacked,
The step of adsorbing the substrates 81 one by one by the adsorber 82 and placing them on the transfer line 83 is shown. The optical sensor device 70 of the present invention is in the process of being adsorbed and moved onto the transfer line 83 so that it can be detected by the adsorber 82 whether or not the substrates 81 are adsorbed one by one. A light projecting unit 21 and a light receiving unit 22 are provided so that a linear light having a width can be emitted in a direction orthogonal to.

When the optical sensor device of the present invention is used in the suction transfer process as described above, for example, as shown in FIG. 18B, when one substrate 81 is properly sucked, the light receiving section 22 receives the light. 17C is similar to the first embodiment.
As shown in (d), the received light amounts A1 and B1 are obtained. On the other hand, if, for example, two substrates 81 are erroneously adsorbed as shown in FIG. 18E, the received light amounts A2 and B2 are obtained as shown in FIGS. Where A1 / B
Since 1 ≠ A2 / B2, it is possible to easily determine whether or not erroneous adsorption transfer. According to the present example, instead of measuring the thicknesses of one or two substrates themselves, if the width of the object to be detected changes, the position information changes and the substrates always pass through the same position. The position information for one sheet is stored by use, and when position information different from the position information is output, it is determined as NG. In this way, it is possible to accurately determine whether or not the operation is normally performed.

[0041]

As described above, according to the present invention, the light receiving area of the light receiving fiber group forming the light receiving portion is formed so as to change in at least one-dimensional direction within the emission range. Therefore, the light-shielding amount, that is, the light-receiving amount differs depending on the position of an object that enters or exists within a certain range between the light-projecting unit and the light-receiving unit, and the presence or absence of objects, the number, the one-dimensional position, It is possible to clearly detect the size and the like. Also, compared to the case of using a conventional CCD,
With a simple configuration, it is possible to inexpensively detect a position in a wide range. If the light receiving area of the light receiving fiber group changes in one direction and the light receiving area changes in the opposite direction, if the position of the object changes, two light receiving fibers Since the change in the amount of light received by the group changes in the opposite direction, the presence / absence of an object, the position, and the like can be detected more clearly. Even if the light receiving area of the light receiving fiber group is changed in one direction and the light receiving area is not changed, the same effect as the above can be obtained. Further, the light projecting amount may be changed in accordance with the change in the light receiving area of the light receiving fiber group. In that case, the change in the light receiving amount in the light receiving unit depending on the presence or absence of an object becomes large, and the detection sensitivity becomes high. Further, the present invention, the light emitting unit and the light receiving unit of the optical sensor device, the liquid material hanging position, or by providing so as to sandwich the conveyance unit of the detection object, to inspect the hanging of the liquid material, Alternatively, an inspection device that inspects whether or not the height of a detection target that is conveyed is inspected, and further, when the detection target is detected, the conveyance detection device that stops the detection target at a fixed position Can be realized.

[Brief description of the drawings]

1A is a configuration diagram of an optical sensor device according to a first embodiment of the present invention, FIG. 1B is a front view of a light receiving portion, and FIG.
(D) is a figure which shows the change of the light-receiving amount with respect to a one-dimensional direction.

FIG. 2A is a diagram showing a flow of light when an object exists in a detection area, and FIG. 2B is a diagram showing a change in the amount of received light in one-dimensional direction of one light receiving surface at that time. (c) is a diagram showing a change in the amount of received light in the one-dimensional direction of the other light receiving surface, (d) is a diagram showing a flow of light when an object exists in a position different from (a) in the detection area, ( e) is (d)
FIG. 7 is a diagram showing a change in the light receiving area of one light receiving surface in the one-dimensional direction in the case of, and (f) is a diagram showing a change of the light receiving area in the one-dimensional direction of the other light receiving surface in the case of (d).

FIG. 3 is a circuit block diagram of an optical sensor device.

4 (a), (b) and (c) are diagrams showing a method of binding a fiber group of a light receiving unit.

5A is a configuration diagram of an optical sensor device according to a second embodiment, FIG. 5B is a front view of a light receiving portion, and FIG. 5C shows a flow of light when a work is present in a detection area. Figure, (d)
FIG. 4 is a diagram showing changes in the amount of received light in the one-dimensional direction of the light receiving surface at that time.

6A is a configuration diagram of a third embodiment of an optical sensor device, FIG. 6B is a front view of a light receiving portion, and FIG. 6C is a light receiving surface when a work is present within an emission range (C). Is a diagram showing the amount of received light in the X direction, and (d) is a diagram showing the amount of received light in the X direction of the light receiving surface (B) in the same case.

7 (a) and 7 (b) are diagrams showing changes in the amount of light received on the light receiving surfaces (A) and (B) in the X direction when the work is thick and when the work is thin in the first or second embodiment. Is.

FIG. 8 is a circuit block diagram of an optical sensor device according to a third embodiment.

9A is a configuration diagram of an optical sensor device according to a fourth embodiment, and FIG. 9B is a diagram showing a fiber group.

10A and 10B are a side view and a front view of a light projecting section in an optical sensor device according to a fifth embodiment.

11A and 11B are configuration diagrams of an optical sensor device according to a sixth embodiment.

12A and 12B are configuration diagrams of a light receiving unit according to a modified example of the optical sensor device of the sixth embodiment.

FIG. 13 is a configuration diagram of an optical sensor device according to a seventh embodiment.

14A and 14B are configuration diagrams showing an example corresponding to the fourth embodiment in which the light projection amount on the light projection side is discretely changed.

15A is a configuration diagram when an optical sensor device is applied to a conveyed object detection device, and FIGS. 15B to 15G are diagrams for explaining the operation.

FIG. 16 is a configuration diagram showing an example in which an optical sensor device is applied to a device for detecting liquid shortage.

17A is a configuration diagram showing an example in which an optical sensor device is applied to height detection of a work, and FIGS. 17B and 17C are diagrams for explaining the operation.

FIG. 18A is a configuration diagram showing an example in which the optical sensor device is applied to a step of adsorbing and transferring a thin plate such as a substrate, and FIGS. 18B to 18G are diagrams for explaining the operation. It is a figure.

19A is a diagram showing a configuration of a conventional optical sensor device, and FIG. 19B is a diagram for explaining the operation thereof.

FIG. 20 is a diagram showing a configuration of a conventional optical sensor device.

FIG. 21 is a diagram showing a configuration of a conventional optical sensor device.

[Explanation of symbols]

 21 Light emitting unit 22 Light receiving unit 61 Seal sticking device 63 Sheet (conveyed object) 70 Optical sensor device (A) (B) Light receiving surface FA, FB Bundle fiber FC Bundle fiber M Detection target (work)

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI technical display location H01L 31/12 G01V 9/04 F

Claims (7)

[Claims] 1. The presence / absence of an object and the position of the object are detected by emitting light from a light projecting portion toward a light receiving portion in a predetermined range, and when the object is within the emission range, the light receiving portion detects a change in the amount of light. In the optical sensor device for detecting the size and the like, the light receiving section is formed of a light receiving fiber group, and a light receiving area of the light receiving fiber group is changed in at least a one-dimensional direction within the emission range. An optical sensor device characterized by being formed. 2. The light receiving section is constituted by a combination of a light receiving area of the light receiving fiber group changing in one direction and a light receiving area changing in the opposite direction. The optical sensor device according to claim 1. 3. The light receiving section is configured by a combination of a light receiving area of the light receiving fiber group changing in one direction and a light receiving area of the light receiving fiber group not changing. The optical sensor device according to claim 1. 4. The optical sensor device according to claim 1, wherein the light projecting amount by the light projecting unit is changed in response to a change in the light receiving area of the light receiving fiber group of the light receiving unit. 5. The light projecting section and the light receiving section in the optical sensor device according to claim 1, wherein the light projecting section and the light receiving section are provided so as to sandwich the hanging position of the liquid material, and to detect the liquid material running out. An inspection device characterized by the above. 6. The detection target object which is provided so that the light projecting section and the light receiving section in the optical sensor device according to any one of claims 1 to 4 are provided so as to sandwich the transportation section of the detection target object, and are conveyed. The height of the object is detected, and the suitability of the object to be detected is detected from the difference from the reference height. 7. An optical sensor device according to any one of claims 1 to 4, wherein a light projecting portion and a light receiving portion are provided so as to sandwich a transportation portion of the detection object, and the transportation of the detection object is performed. A conveyed object detection device, which stops an object to be detected at a fixed position when detected by the device.