JPH09155665A - Positioning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform high-precision positioning and to reduce size. SOLUTION: A plurality of static pressure gas bearings 3 are attached on the under surface of an XY table 2 and the XY table 2 is supported by the bearing 3. A first guide rail 4 is fixed in parallel the side, extending in an X-direction, of the XY table 2, and a first linear guide bearing 5 is movably coupled to the first guide rail 4. The output shaft member 6a of a first actuator 6 is coupled to the first linear guide bearing 5. Further, a second guide rail 7 is fixed in parallel to one flank side, extending in an Y-direction, of the XY table 2. A second linear guide bearing 8 is movably coupled to the second guide rail 7. The output shaft member 9a of a second actuator 9 is coupled to the second linear guide bearing 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a positioning device for moving a table in XY directions to position it at an arbitrary position, and particularly to a high speed / high speed XY table for a wire bonder.
The present invention relates to a positioning device effective for performing lightweight and precise positioning.

[0002]

2. Description of the Related Art A conventional positioning device generally has a structure in which two uniaxial tables are stacked with their axes orthogonal to each other. That is, as shown in FIGS. 5 and 6, the conventional positioning device is arranged in the Y direction (the direction orthogonal to the X direction on the same plane) on the X table 50 restricted to move only in the X direction. Y table 51 restricted to be movable only
Is provided, and the upper surface of the Y table 51 constitutes a positioning surface to be positioned. Then, the X table 50 and the Y table 51, which are orthogonal to each other, are individually moved back and forth, so that the positioning surface on the upper surface of the Y table 51 is set to an arbitrary 2
It is moved and positioned in the dimension.

The X table 50 is supported by an X-axis guide rail 52 fixed to a base 53. The X-axis guide rail 52 is disposed with its axis oriented in the X direction, and regulates the X table 50 so that it can move only in the X direction.
A screw rod 54a of a ball screw 54 is fixed to the center of the lower surface of the X table 50. This screw rod 54a
Is arranged with its axis oriented in the X direction, and a nut member screwed onto the screw rod 54a is rotationally driven by a motor 55 to move the X table 50 forward and backward in the X direction. Here, by the ball screw 54 and the motor 55, the X
An actuator that drives the table 50 is configured.

On the upper surface of the X table 50, Y
The axis guide rail 56 is fixed with its axis centered in the Y direction, and the Y table 51 is arranged on the Y axis guide rail 56. As a result, the Y table 51 is restricted by the Y-axis guide rail 56 so as to be movable only in the Y direction. The Y table 51 is also the same as the actuator for the X table 50, that is, an actuator including a ball screw 57 having a screw rod oriented in the Y direction and a motor 58 for rotationally driving a nut member screwed to the ball screw rod. , Y direction to go back and forth.

On one side surface of the X table 50 extending in the X direction, a scale 59 is provided along the X direction.
Is attached, and a position detector 60 for the X axis is arranged horizontally opposite to the scale 59 in the Y direction. And
With this position detector 60, the position of the X table 50,
As a result, the position of the Y table 51 in the X direction is detected, and the detection result is fed back to the controller of the X-axis actuator.

Similarly, on one side surface of the Y table 51 extending in the Y direction, a scale 6 is provided along the Y direction.
1 is provided, and a position detector 62 for the Y axis is provided so as to horizontally face the scale 61 in the X direction. The position detector 62 detects the position of the Y table 51 in the Y direction, and the detection result is fed back to the controller of the Y-axis actuator.

Further, in order to perform precise positioning, a static pressure gas bearing is provided on the guide surface side of each of the guide rails 52 and 56 along the advancing / retreating direction of each of the tables 50 and 51. Accordingly, the X table 50 and the Y table 51 are respectively provided with the guide rails 50, 5
It is supported in a non-contact state with the first guide surface, and is movable along the guide surface in that state.

[0008]

However, the conventional positioning device for stacking two uniaxial tables as described above has the following problems. First
In addition, since the Y table 51 is stacked and supported on the X table 50, the rigidity of the Y table 51 viewed from the base 53 is determined by the X table 50 supporting the X table 50 and the X-axis guide rail. The bearing stiffness K between 52 and
_X and the rigidity K _Y of the bearing between the Y table 51 supporting the Y table 51 and the Y-axis guide rail 56 influence in series. As a result, the bearing rigidity K _Z of the Y table 51 forming the above-mentioned positioning surface becomes low as expressed by the following equation.

K _Z = 1 / {(1 / K _X ) + (1 / K _Y )} In particular, in order to improve the positioning accuracy, a static pressure gas bearing is used as a bearing for supporting each table 50, 51. If so, the above-mentioned effect becomes large. That is, the vibration from the outside is amplified in series and transmitted to the positioning surface, which leads to deterioration of the positioning accuracy.

Second, the load bearing on the bearing supporting the X table 50 changes depending on whether the Y table 51 is located at the stroke end in the moving direction (Y direction) or at the stroke center. That is, X table 5
No. 0 receives the load of the Y table 51. Therefore, when the Y table 51 is located at the center of the stroke, the load for the X table 50 is evenly distributed on the left and right sides. When 51 is located at the stroke end, the Y table 51 is used as the bearing for the X table 50.
The load is concentrated on the side where is located. Particularly, when a heavy object is mounted on the Y table 51, the straightness in the vertical direction in the Y-axis direction deteriorates due to the balance between the varying load and the rigidity of the bearing that supports the X table 50. Therefore, the moving Y table 51 may be vertically displaced by a predetermined amount or more.

Third, since the scale for detecting the position in the X direction is attached to the X table 50, the Y table 51 to be positioned and the position detector for the X axis are separated vertically. Therefore, Abbe's error occurs,
The positioning accuracy deteriorates accordingly. This error also occurs due to the vertical displacement of the Y table 51 described above.

Fourthly, the motor of the actuator for driving the Y table 51 bears only the load corresponding to the weight of the Y table 51, whereas the motor of the actuator for driving the X axis has the X table 50, Y. Since the load corresponding to the total weight of the shaft guide rail 56 and the Y table 51 is borne, the inertia becomes large. As a result, the controllability in the X-axis direction deteriorates, and the positioning time in the X-direction becomes longer. Further, as described above, since the loads carried by the respective motors are different, the gain adjustment is different between the control for driving the actuator for the X axis and the control for driving the actuator for the Y axis. Work is required.

Fifth, the X table 50 which moves in the X direction.
Since it is a structure in which Y tables 51 that move in the Y direction are stacked on top of each other, it is difficult to make the device thin, and further, bearings that separately support the X table 50 and the Y table 51 are required. However, there is a limit to miniaturization. The present invention has been made in view of the above problems, and an object of the present invention is to provide a positioning device capable of highly accurate positioning and capable of being downsized.

[0014]

In order to achieve the above object, a positioning device of the present invention has a table which moves a table forward and backward in the X direction with respect to a base, and in the Y direction which is orthogonal to the X direction on the same plane. In a positioning device that moves the table back and forth to position the table at an arbitrary position, a static pressure gas bearing that is disposed between the table and the base to support the table in a floating manner with respect to the base and the table. X axis
A first movable body that is fixed in the direction, a first guide member that is movably connected to the first movable body in the X direction, and a first actuator that advances and retracts the first guide member in the Y direction. A second movable body fixed to the table with its axis oriented in the Y direction, a second guide member movably connected to the second movable body in the Y direction, and a second guide member thereof. And a second actuator that moves back and forth in the X direction.

The table to be positioned according to the present invention is floatably supported by a static pressure gas bearing and is movable in two-dimensional directions of XY directions. That is, the table to be positioned is not supported by two bearings arranged vertically in series as in the prior art, but the static pressure gas bearing fixed to either the table or the base is opposed to the other. To do. And
When the first actuator is driven to move the first guide member back and forth in the Y direction, the first guide member moves back and forth in the Y direction.
It is transmitted to the table via the first movable body, and the table moves back and forth in the Y direction.

At this time, since the first guide member supports the first movable body so as to be movable in the X direction, the amount of movement of the first guide member in the Y direction remains unchanged. Is transmitted to the table via. Also, the above table is Y
When moving in the direction, the second movable member fixed to the table is regulated by the second guide member so as to be movable in the Y direction, so that the table reliably moves in the Y direction.

Similarly, when the second actuator is driven to move the second guide member back and forth in the X direction, the forward and backward movement of the second guide member in the X direction is transmitted to the table via the second movable body, The table moves back and forth in the X direction. Also at this time, since the second guide member supports the second movable body so as to be movable in the Y direction, the amount of movement of the second guide member in the X direction is directly transmitted through the second movable body. Is transmitted to the table. Also, when the table moves in the X direction,
The first movable body fixed to the table is regulated to be movable in the X direction by the first guide member, so that the table reliably moves in the X direction.

Therefore, by driving the above two actuators, the table is moved and positioned in any direction.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings. First, the configuration will be described. As shown in FIGS. 1 and 2, an XY table 2 is arranged in parallel with the upper surface of the base 1, and a plurality of disk-shaped static pressure gas bearings 3 are provided on the lower surface of the XY table 2. It is installed. Although FIG. 1 shows an example in which the static pressure gas bearings 3 are arranged at the four corners of the XY table 2, the set number and positions are not limited to this. Each static pressure gas bearing 3
Is capable of jetting compressed air downward, that is, toward the upper surface of the base 1 through a throttle provided inside the bearing, and X
A weight-balance type vertical bearing in which the weight of the Y table 2 and the levitation force of the static pressure gas bearing 3 are balanced is configured.

As a result, the XY table 2 is supported by the base 1 so as to float, and is movable along the upper surface of the base 1. Therefore, the upper surface of the base 1 also serves as a guide surface when the XY table 2 is moved, and therefore, one having good flatness accuracy is used. The XY table 2 is a flat plate member having a square shape in plan view, and each side is in the X direction or X direction.
It is arranged so as to face the Y direction orthogonal to the direction. Here, in FIG. 1, the vertical direction is the Y direction and the horizontal direction is the X direction.
Direction.

A first guide rail 4 is arranged on one side surface of the XY table 2 extending in the X direction with a predetermined gap from the side surface and with its axis oriented in the X direction.
Both ends of the first guide rail 4 are fixed to one side surface of the XY table 2. Here, the first guide rail 4 is a shaft member, and the cross section thereof is not particularly limited to a circular shape or a rectangular shape. In addition, the first guide rail 4
Constitute a first movable body.

A first linear guide bearing 5 constituting a first guide member is fitted and connected to the first guide rail 4. The first linear guide bearing 5 is composed of a static pressure gas bearing and is movable in the axial direction, that is, the X direction with respect to the first guide rail 4. Here, in the present embodiment, by configuring the first linear guide bearing 5 with the static pressure gas bearing as described above, the first linear guide bearing 5 is brought into a non-contact state with the first guide rail 4. The resistance generated between the first guide rail 4 and the first linear guide bearing 5 during relative movement in the X direction is suppressed to a small value.

The output shaft member 6a of the first actuator 6 fixed to the base 1 is attached to the first linear guide bearing 5.
Are connected. The output shaft member 6a is disposed with its axis centered in the direction orthogonal to the first guide rail 4, that is, in the Y direction, and is set to be reciprocable only in the Y direction (axial direction). A second guide rail 7 is provided on one side surface side of the XY table 2 extending in the Y direction with a predetermined gap from the side surface, and the second guide rail 7 is arranged with its axis oriented in the Y direction. It Both ends of the second guide rail 7 are fixed to one side surface of the XY table 2. Here, the second guide rail 7 is a shaft member, and its cross section is not particularly limited to a circular shape or a rectangular shape. The second guide rail 7 constitutes a second movable body.

A second linear guide bearing 8 constituting a second guide member is fitted and connected to the second guide rail 7. The second linear guide bearing 8 is composed of a static pressure gas bearing and is movable in the axial direction, that is, the Y direction with respect to the second guide rail 7. Here, in the present embodiment, by configuring the second linear guide bearing 8 with the static pressure gas bearing as described above, the second linear guide bearing 8 is brought into a non-contact state with the second guide rail 7. The resistance generated during relative movement in the Y direction between the second guide rail 7 and the second linear guide bearing 8 is kept small.

The output shaft member 9a of the second actuator 9 fixed to the base 1 is attached to the second linear guide bearing 8.
Are connected. The output shaft member 9a is disposed with its axis centered in the direction orthogonal to the second guide rail 7, that is, in the X direction, and is set to be reciprocable only in the X direction (axial direction). Here, a configuration example of the first actuator 6 and the second actuator 9 will be described. For example, an AC servomotor feedback-controlled by a rotary encoder is used, and a ball screw is used as a mechanism for converting rotational drive of the motor into linear drive. To use. That is, the screw rod is linearly moved by rotating the nut member by the motor, and the screw rod is connected to the linear guide bearings 5 and 8 as the output shaft members 6a and 9a.

Of course, the first actuator 6 and the second actuator 6
The configuration of the actuator 9 is not limited to the above configuration. Other well-known linear actuators, such as a linear motor as a drive source, may be adopted as long as the linear guide bearings 5 and 8 can be moved back and forth in a predetermined axis direction. In addition, a positioning scale 10 is attached to the other side surface of the XY table 2 along the X direction, and a position detector for the X axis is located at a position facing the scale 10 in the Y direction. 11 are provided. Then, the position of the XY table 2 in the X direction is detected by the signal from the position detector 11, and the detected position signal is supplied to the controller for the second actuator 9 (not shown).

Similarly, on the other side surface of the XY table 2 along the Y direction, a positioning scale 12 is attached along the side surface, and for the Y axis at a position facing the scale 12 in the X direction. The position detector 13 is provided.
Then, by the signal from the position detector 13, the X
The position of the Y table 2 in the Y direction is detected, and the detected position signal is supplied to a controller (not shown) for the first actuator 6.

Next, the operation and effects of the positioning device having the above structure will be described. In the positioning device having the above configuration,
The upper surface of the XY table 2 constitutes a positioning surface,
An object for positioning control is mounted on the XY table 2. When the XY table 2 is moved back and forth in the Y direction, the output shaft member 6a of the first actuator 6 is expanded and contracted by a desired length. Then, the first linear guide bearing 5 moves back and forth in the Y direction by the same amount, and the XY table 2 moves back and forth in the Y direction via the first guide rail 4.

At this time, since the first linear guide bearing 5 is movable only in the X direction with respect to the first guide rail 4, the amount of movement of the first linear guide bearing 5 in the Y direction remains unchanged. 1 is transmitted to the XY table 2 via the guide rail 4. As a result, the XY table 2 moves in the Y direction by an amount equal to the expansion / contraction amount of the output shaft member 6a of the first actuator 6.

Since the first linear guide bearing 5 is the static pressure gas bearing 3, the first linear guide bearing 5 to the first linear guide bearing 5 are
The transmission of the driving force to the guide rail 4 is performed in a non-contact state, so that the rattling feeling is reduced. Also,
When the XY table 2 moves in the Y direction, the second guide rails 7 fixed to the XY table 2 are restricted by the second linear guide bearings 8 so as to be movable only in the Y direction. 2 surely moves back and forth in the Y direction.

Since the second linear guide bearing 8 is composed of a static pressure gas bearing, the Y direction input to the second linear guide bearing 8 when the second guide rail 7 moves in the Y direction. External force on the output shaft member 9a of the second actuator 9 connected to the second linear guide bearing 8 is suppressed.
Unreasonable load is prevented from being applied to. Similarly,
When advancing and retracting the XY table 2 in the X direction, the output shaft member 9a of the second actuator 9 is expanded and contracted by a desired length. Then, the second linear guide bearing 8 moves back and forth in the X direction by the same amount, and the XY table 2 moves back and forth in the X direction via the second guide rail 7.

At this time, since the second linear guide bearing 8 is movable in the Y direction with respect to the second guide rail 7, the moving amount of the second linear guide bearing 8 in the X direction is the same as that of the second linear guide bearing 7. It is transmitted to the XY table 2 via the guide rail 7. As a result, the XY table 2 is moved by the amount equal to the expansion / contraction amount of the output shaft member 9a of the second actuator 9 by X.
Move in the direction.

Since the second linear guide bearing 8 is a hydrostatic gas bearing, the driving force is transmitted from the second linear guide bearing 8 to the second guide rail 7 in a non-contact state.
The feeling of rattling is reduced. Further, when the XY table 2 moves in the X direction, the first guide rails 4 fixed to the XY table 2 are restricted by the first linear guide bearings 5 to be movable only in the X direction. The XY table 2 surely moves back and forth in the X direction.

Since the first linear guide bearing 5 is composed of a static pressure gas bearing, the X direction input to the first linear guide bearing 5 when the first guide rail 4 moves in the X direction. External force to the output shaft member 6a of the first actuator 6 connected to the first linear guide bearing 5 is suppressed.
Unreasonable load is prevented from being applied to. As described above, since the first and second actuators 6 and 9 can drive the XY table 2 at the same time without interfering with each other, the XY table 2 simultaneously moves in the X direction and the Y direction.
It is possible to move in the direction.

Further, the positioning device of the present embodiment does not have a structure in which two uniaxial tables are stacked as in the prior art, but has a structure in which one table 2 is directly moved in two XY directions. It can be made thin.
Further, in the positioning device according to the present embodiment, the bearing 3 that supports the XY table 2 in a floating manner is fixed to the lower surface of the XY table 2, so that the XY table 2 moves in the X direction and the Y direction.
The positional relationship between the XY table 2 and the bearing 3 is not changed even if the XY table 2 is moved to any position in the direction. As a result,
The load that the bearing 3 bears is always kept almost constant,
The XY table 2 can be stably supported, and thus the straightness is improved as compared with the conventional one. That is, unnecessary fluctuations in the vertical direction of the XY table 2 that occur when the XY table 2 moves can be suppressed.

The XY table 2 is not supported by two bearings arranged vertically in series as in the prior art, but is a static pressure gas bearing fixed to either the XY table 2 or the base 1. Since the structure is opposed to the other, the supporting rigidity of the bearing is increased, the occurrence of vibration due to external vibration and the like is reduced, and the vibration resistance is improved.

Further, since the shaft centers of the output shaft members 6a and 9a of the actuators 6 and 9 can be set to the center position in the height direction of the XY table 2 to be positioned in both the X and Y directions, they can be reliably driven. XY above the force along the moving direction
It can be transmitted to the table 2. In addition, XY table 2
Even if the position detection is performed in the X-axis direction and the Y-axis direction, both the X-axis and the Y-axis are set at the center of the side surface of the XY table 2 for positioning the signal detection positions of the position detectors 11 and 13, and It is possible to reduce the vertical distance of the target XY table 2. As a result, the Abbe error can be suppressed smaller than in the conventional case, and the positioning accuracy is improved.

Further, in the above-mentioned device, the X-axis and Y-axis
Since the structure of the guide mechanism and the actuator for driving the shaft can be set symmetrically, the first actuator 6
And the load on the second actuator 9 are substantially the same. As a result, the gains of the control systems of both actuators 6 and 9 become substantially the same, and the adjustment work of both actuators 6 and 9 becomes possible by the same type of adjustment. Therefore, adjustment becomes easy and stable quality can be obtained.

Further, in both the X-axis and the Y-axis, the load carried by the actuators 6 and 9 is only the load corresponding to the weight of the XY table 2, and one of the actuators carries a large load as in the conventional case, so It is possible to prevent the controllability in the axial direction from decreasing and lengthening the positioning time, and it becomes possible to perform positioning in the same short time for both the X-axis and the Y-axis.
The controllability and balance of the entire device are improved.

Further, the number of parts required to have a predetermined accuracy can be reduced, for example, one table 2 is used, and the bearing 3 supporting the table 2 may be a bearing supporting one table. This facilitates assembly and leads to downsizing of the device. In the above embodiment, XY
Although the static pressure gas bearing 3 that supports the table 2 in a floating manner is fixed to the lower surface of the table, it may be fixed to the base 1. In this case, the load that each static pressure gas bearing 3 bears varies depending on the position of the XY table 2. However, since the static pressure gas bearings 3 are arranged in parallel, the degree of freedom in arranging the static pressure gas bearings 3 is greater than in the prior art. Therefore, by devising the arrangement, it is possible to suppress the fluctuation of the load applied to each static pressure gas bearing 3 to be smaller than the conventional one.

Further, in the above embodiment, the first and second
Although the guide rails 4 and 7 are movable bodies and the first and second linear guide bearings 5 and 8 are guide members, the present invention is not limited to this. For example, the linear guide bearings 5 and 8 are fixed to the XY table 2 as movable bodies with their axes oriented in the X direction or the Y direction, and the guide rails 4 and 7 are output shaft members of the actuators 6 and 9. The guide member may be connected to 6a and 9a. Further, this configuration may be adopted only in one axial direction.

Next, the positioning device according to the second embodiment will be described. The same members as those in the above-described embodiment are designated by the same reference numerals and the description thereof will be omitted. The positioning device according to the present embodiment has the same basic configuration as the device according to the first embodiment, and includes the first and second guide rails 4 and 7 and the first and second linear guide bearings 5 and 8. Are arranged below the XY table 2.

That is, the first and second guide rails 4 and 7 are arranged so as to be orthogonal to each other in a plan view at a position below the center of the XY table 2 in the left-right direction and the front-rear direction. However, the first
The guide rails 4 are displaced to the side of the second guide rails 7 so that they do not interfere with each other. Then, the end portions of the guide rails 4 and 7 are fixed to the hanging member 20 protruding downward from the lower surface of the XY table 2. In the figure, 21 is a base for fixing the main bodies of the first and second actuators 6, 9 to the base 1. A plurality of cylindrical static pressure gas bearings 3 are attached to the lower surface of the XY table 2 at the four corners.

The other structure is the same as that of the first embodiment. In this case, the driving force from each of the actuators 6 and 9 is input to the XY table 2 at the center position in each moving direction. Other functions and effects are similar to those of the first embodiment. The number of the static pressure gas bearings 3 of the present invention is not limited to four, but may be one or plural.

[0045]

As described above, in the positioning device of the present invention, the bearings for floating and supporting the table to be positioned are not arranged vertically in series as in the conventional case, but either the table or the base is provided. Since the static pressure gas bearing fixed on one side opposes the other, the support rigidity of the table to be positioned by the static pressure gas bearing becomes higher than in the conventional case. Therefore,
It has the effect of being more resistant to external vibration than before.

Further, by disposing the bearings for supporting the table for levitation as described above, it is possible to suppress the load fluctuation which each bearing bears due to the change of the position of the table, which is smaller than the conventional one, and the straightness is improved. There is an effect of doing. That is, it is possible to improve the support rigidity of the bearing and suppress the vertical fluctuation of the table during movement.

Since the table for positioning is moved directly in both the X and Y directions, the position detection for controlling the drive of each actuator for moving the table in the X and Y directions can be directly detected. This can be done by detecting the position of the table to be positioned. Therefore, the heights of the position detector and the table to be positioned can be set to substantially the same height, and the Abbe's error can be suppressed smaller than in the conventional case.

Since only one table needs to be supported, the device can be made thinner and smaller than the conventional one. Further, it is possible to reduce the number of parts such as bearings that support the table to float, which require a certain degree of accuracy, and facilitate assembly. Further, since the load on each actuator for moving the table in the X direction and the Y direction is substantially the same, the gain of the control system of each actuator can be set to be substantially the same. Therefore, the same type of adjustment enables adjustment of the first and second actuators. In this way, there is an effect that the adjustment of the device is easy and stable quality can be obtained.

[Brief description of the drawings]

FIG. 1 is a plan view showing a positioning device according to a first embodiment of the present invention.

FIG. 2 is a side view showing the positioning device according to the first embodiment of the present invention.

FIG. 3 is a plan view showing a positioning device according to a second embodiment of the present invention.

FIG. 4 is a side view showing a positioning device according to a second embodiment of the present invention.

FIG. 5 is a plan view showing a conventional positioning device.

FIG. 6 is a side view showing a conventional positioning device.

[Explanation of symbols]

 1 base 2 XY table 3 static pressure gas bearing 4 first guide rail (first movable body) 5 first linear guide bearing (first guide member) 6 first actuator 6a output shaft member 7 second guide rail (second Movable body 8 Second linear guide bearing (second guide member) 9 Second actuator 9a Output shaft member 10, 12 Scale 11, 13 Position detector

Claims (1)

[Claims] 1. A positioning device for advancing and retracting a table in an X direction with respect to a base and in a Y direction orthogonal to the X direction on the same plane to position the table at an arbitrary position. A static pressure gas bearing that is arranged between the table and the base to support the table in a floating manner with respect to the base, a first movable body that is fixed to the table with its axis centered in the X direction, and its first A first guide member that is movably connected to one movable body in the X direction, a first actuator that moves the first guide member forward and backward in the Y direction, and is fixed to the table with the axis centered in the Y direction. A second movable member, a second guide member that is movably connected to the second movable member in the Y direction, and a second actuator that advances and retracts the second guide member in the X direction. Characteristic positioning device.