JP2007054953A - Positioning device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning device which makes accurate positioning and is made compact. <P>SOLUTION: The positioning device is equipped with: a bearing 3 secured to the undersurface of a table 2 and supporting the table 2 floating from a base 1; a first straight guiding bearing 5 installed on one side face 2a extending in the X-direction of the table 2 and guiding the table 2 movably in the X-direction; a first actuator 6 to advance and retreat the bearing 5 in the Y-direction; a first energizing means 10 installed on the opposite side face 2b, admitting movement of the table 2 in the X-direction, and energizing the table 2 toward the bearing 5; a second straight guiding bearing 7 installed on side face 2c extending in the Y-direction of the table 2 and guiding the table 2 movably in the Y-direction; a second actuator 8 to advance and retreat the bearing 7 in the X-direction; and a second energizing means 20 installed on the side face 2d on opposite side, admitting movement of the table 2 in the Y-direction, and energizing the table 2 toward the bearing 7. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a positioning device that moves a table on a plane and positions the table at an arbitrary position.

A conventional positioning device of this type generally has a structure in which two uniaxial tables are stacked in an orthogonal state.
That is, as shown in FIGS. 6 and 7, the conventional positioning device is arranged in the Y direction (in the same plane as the X direction) on the X table 50 restricted to be movable only in the X direction. Only the Y table 51 restricted so as to be movable is disposed, and the upper surface of the Y table 51 is a positioning surface to be positioned. Then, the X table 50 and the Y table 51 that are orthogonal to each other are individually advanced and retracted, whereby the positioning surface on the upper surface of the Y table 51 moves in an arbitrary two-dimensional direction and is positioned at a predetermined position.

  The X table 50 is supported by an X-axis guide rail 52 fixed to the base 53, and the X-axis guide rail 52 is disposed with its axis oriented in the X direction, and other than the X direction of the X table 50. Regulate the movement of A ball screw screw rod 54a is fixed to the X table 50, and the screw rod 54a is arranged with its axis oriented in the X direction. The X table 50 advances and retreats in the X direction by rotationally driving a nut member screwed to the screw rod 54 a by a motor 55 fixed to the X-axis guide rail 52. Here, the ball screw and the motor 55 constitute an actuator that drives the X table 50.

  A Y-axis guide rail 56 is fixed on the upper surface of the X table 50 with its axis oriented in the Y direction, and a Y table 51 is disposed on the Y-axis guide rail 56. Therefore, the Y table 51 is restricted from moving in the direction other than the Y direction by the Y-axis guide rail 56. The Y table 51 is also the same as the actuator for the X table 50, that is, the Y table 51 is directed in the Y direction by an actuator having a motor 58 that rotationally drives a nut member screwed into a screw rod 57 of a ball screw fixed to the Y table 51 To advance and retreat. The ball screw and the motor 58 fixed to the Y-axis guide rail 56 constitute an actuator that drives the Y table 51.

  Further, a scale 59 is attached to one side surface of the X table 50 extending in the X direction along the X direction. The scale 53 is horizontally opposed to the scale 59 in the Y direction, and the base 53 is for the X axis. The position detector 60 is arranged. The position detector 60 detects the position of the X table 50 in the X direction, and the detection result is fed back to the controller of the X-axis actuator.

  Similarly, on one side surface of the Y table 51 extending in the Y direction, a scale 61 is provided along the Y direction. The scale 61 is horizontally opposed to the scale 61 in the X direction, and the X table 50 is for the Y axis. The position detector 62 is disposed. The position detector 62 detects the position of the Y table 51 in the Y direction, and the detection result is fed back to the controller of the Y-axis actuator.

  Furthermore, in order to perform precise positioning, a static pressure gas bearing is provided on the guide surface side of each guide rail 52, 56 along the advancing / retreating direction of each table 50, 51. 50 and Y table 51 are supported in a non-contact state with the guide surfaces of the guide rails 50 and 51, respectively, and can move along the guide surfaces in that state.

However, such a conventional positioning device has the following problems.
That is, since the Y table 51 is stacked and supported on the X table 50, the rigidity of the Y table 51 viewed from the base 53 is such that the X table 50 that supports the X table 50 and the X-axis guide rail. The bearing stiffness KX between the Y table 51 and the bearing stiffness KY between the Y table 51 supporting the Y table 51 and the Y-axis guide rail 56 acts as a series spring. As a result, the bearing stiffness KZ of the Y table 51 that constitutes the positioning surface is low as represented by the following equation.

KZ = 1 / {(1 / KX) + (1 / KY)}
In particular, when a static pressure gas bearing is employed as a bearing for supporting the tables 50 and 51 in order to improve positioning accuracy, the above-described influence is further increased. That is, vibration from the outside is amplified in series and transmitted to the positioning surface, which leads to deterioration of positioning accuracy.
Moreover, the load burden with respect to the bearing which supports X table 50 changes with the case where Y table 51 is located in the stroke end of the moving direction (Y direction), and the case where it is located in the stroke center. That is, since the X table 50 receives the load of the Y table 51, when the Y table 51 is located at the center of the stroke, the load is evenly distributed to the bearing for the X table 50 on the left and right. When the Y table 51 is located at the stroke end, a load is concentrated on the bearing for the X table 50 on the side where the Y table 51 is located. In particular, when a heavy object is mounted on the Y table 51, the straightness in the vertical direction in the Y-axis direction is deteriorated due to the balance between the changing load load and the bearing rigidity for supporting the X table 50. For this reason, the moving Y table 51 may be displaced more than a predetermined amount.

Furthermore, since the scale for detecting the position in the X direction is attached to the X table 50, the vertical distance p between the upper surface of the Y table 51 to be positioned and the X axis position detector 60 is separated. For this reason, Abbe's error occurs, and the positioning accuracy deteriorates accordingly. This error also occurs due to the vertical displacement of the Y table 51.
Furthermore, the motor of the actuator that drives the Y table 51 bears a load corresponding to the weight of the Y table 51, whereas the motor of the actuator that drives the X axis is the X table 50, the Y axis guide rail 56, and the Y axis. Inertia increases because a load corresponding to the total weight of the table 51 is borne. As a result, the controllability in the X-axis direction is lowered and the positioning time in the X direction is lengthened. In addition, because the load applied to each motor is different as described above, the gain adjustment between the control for driving the X-axis actuator and the control for driving the Y-axis actuator is different, and two different gain adjustments are made. Work is required.

Furthermore, since the Y table 51 is stacked on the X table 50 that moves in the X direction, it is difficult to make the apparatus thin, and there is a limit to downsizing.
The present invention has been made to eliminate such inconveniences, and an object of the present invention is to provide a positioning device capable of highly accurate positioning and miniaturization.

  In order to achieve such an object, the positioning apparatus according to the present invention moves the table forward and backward in the X direction with respect to the base and advances and retracts the table in the Y direction orthogonal to the X direction. A table support bearing disposed between the table and the base and supporting the table in a floating manner, and one side extending in the X direction of the table A first linear guide bearing disposed on the side of the table for guiding the table so as to be movable in the X direction, a first actuator for driving the first linear guide bearing forward and backward in the Y direction, and the X direction of the table A first urging means disposed on the other side portion extending to the X side to allow the table to move in the X direction, and to urge the table toward the first linear guide bearing; Y of table A second linear guide bearing disposed on one side extending in the direction to guide the table so as to be movable in the Y direction; and a second linear guide bearing that drives the second linear guide bearing to advance and retract in the X direction. The actuator is disposed on the other side portion extending in the Y direction of the table to allow the table to move in the Y direction, and to urge the table toward the second linear guide bearing side. 2 urging means.

In the positioning device of the present invention, the table support bearings that float and support the table to be positioned are arranged between the table and the base instead of being arranged in series vertically as in the prior art. The support rigidity of the table to be positioned is higher than before. Therefore, there is an effect that it is more resistant to external vibrations than in the past.
In addition, it is possible to suppress the load variation that the table support bearing bears when the position of the table changes, so that the straightness is improved. That is, it is possible to suppress unnecessary fluctuation of the moving table as well as improving the support rigidity of the table support bearing.

Furthermore, since the configuration is such that one table is moved in the X direction and the Y direction, the height of the position detector and the table to be positioned can be set to substantially the same height, and Abbe's error has been reduced. It becomes possible to keep it smaller.
Furthermore, since only one table needs to be supported, the apparatus can be made thinner and smaller than before. Furthermore, the number of parts that require a predetermined accuracy, such as a bearing that floats and supports the table, can be reduced, and the assembly can be facilitated.

  Furthermore, since the loads on the actuators that move the table in the X direction and the Y direction are substantially the same, the gains of the control systems of the actuators can be set to be substantially the same. Therefore, the same type of adjustment makes it possible to adjust the first and second actuators, thereby making it easy to adjust the apparatus and obtaining stable quality.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is an explanatory plan view for explaining a positioning device as an example of an embodiment of the present invention, FIG. 2 is a view taken along the line II-II in FIG. 1, and FIG. 3 is a detailed view of a part A in FIG. 4 is a detailed view of part B in FIG. 2, and FIG. 5 is a detailed view of part C in FIG.
As shown in FIGS. 1 and 2, a table 2 is arranged in parallel with the planar upper surface of the base 1, and a plurality of disc-shaped static pressure gas bearings as table support bearings 3 are provided at the bottom of the table 2. Is fixed and faces the base 1. Although FIG. 1 shows an example in which table support bearings 3 are arranged at the four corners of the table 2, the set number and position are not limited thereto. Further, instead of the disk-shaped static pressure gas bearing 3, a square-shaped static pressure gas bearing may be used. Each of the static pressure gas bearings 3 supplies compressed air downward from the flat bearing surface of the lower surface, that is, toward the upper surface of the base 1 through a porous restriction provided inside the bearing, for example, as shown in FIG. The table support bearing of a weight balance type which can be ejected and is balanced by the weight of the table 2 and the levitation force of the static pressure gas bearing 3 is configured. A magnetic attraction force or a vacuum attraction force is applied between the table 2 and the base 1, and the force obtained by adding the weight of the table 2 to these forces and the floating force of the static pressure gas bearing 3 are balanced. You may make it.

As a result, the table 2 is levitated and supported from the base 1 and is movable along the upper surface of the base 1. In this case, the upper surface of the base 1 also serves as a guide surface in the vertical direction when the table 2 is moved.
The table 2 is a flat plate member having a square shape in plan view, and is arranged so that each side faces the X direction or the Y direction orthogonal to the X direction. One side surface extending in the X direction of the table 2 also serves as a guide surface 2a for guiding the linear movement of the table 2 in the X direction, and a first linear guide bearing 5 is disposed opposite to the guide surface 2a. . In this embodiment, a static pressure gas bearing is used as the first linear guide bearing 5, and the bearing surface 5a is opposed to the guide surface 2a with a bearing gap (see FIG. 4). Thus, by using a static pressure gas bearing as the first linear guide bearing 5, the first linear guide bearing 5 is brought into a non-contact state with respect to the table 2, and the table 2 and the first linear guide bearing 5. The resistance at the time of relative movement in the X direction generated between the two is kept small.

The front end portion of the output shaft member 6 a of the first actuator 6 is connected to the first linear guide bearing 5, and the first actuator 6 is fixed to the base 1. The output shaft member 6a is disposed with its axis centered in the Y direction, and can advance and retreat only in the Y direction.
As the first urging means 10 for urging the table 2 to the first linear guide bearing 5 side and restraining the table 2 in the Y direction on the other side surface 2b side of the table 2 extending in the X direction. The first preload air cylinder device is arranged. As shown in FIG. 5, in the first preload air cylinder device 10, a cylinder rod 12 is supported by a housing 11 fixed to a base 1 through a linear guide bearing 13 so as to be linearly movable in an axial direction. . The cylinder rod 12 is disposed with its axis oriented in the Y direction, and therefore can advance and retreat only in the Y direction. An air supply port 14 is formed at the rear end of the housing 11 for supplying compressed air, which is a power source for urging the table 2 toward the first linear guide bearing 5, to the space 11 a in the housing 11. Has been. This urging force is determined by the area of the rear end face of the cylinder rod 12 and the supply pressure of the compressed air. Further, a preload bearing 15 for applying a preload in the Y direction is provided at the tip of the cylinder rod 12 so as to face the other side surface of the table 2 extending in the X direction.

  Here, in this embodiment, a cylindrical static pressure air bearing mounted on the inner peripheral surface of the housing 11 is used as the linear guide bearing 13, and the cylinder rod 12 is provided with a clearance in the static pressure air bearing. Inserting. In this way, by using a static pressure gas bearing as the linear guide bearing 13, the resistance during movement in the axial direction generated between the cylinder rod 12 and the bearing is kept small. Incidentally, the length of the cylinder rod 12 requires at least a dimension obtained by adding a length corresponding to the effective area of the bearing 13 to the movable stroke of the table 2.

  In this embodiment, a static pressure gas bearing is used as the preload bearing 15, and the bearing surface 15a is opposed to the side surface 2b with a bearing gap. Thus, by using a static pressure gas bearing as the preload bearing 15, the preload bearing 15 is brought into a non-contact state with respect to the table 2, thereby allowing the table 2 to move in the X direction and the table 2 and the preload. The resistance at the time of relative movement in the X direction generated between the bearing 15 and the bearing 15 is kept small. The compressed air supplied to the preload bearing 15 is formed by forming a through hole 12a along the axial direction in the cylinder rod 12 and supplying the compressed air supplied into the housing 11 from an air supply port 14 formed in the rear end portion of the housing 11. Although air is guided to the static pressure gas bearing 15 through the through-hole 12a so as to be used also as compressed air as a power source of the air cylinder device 10, it is not always necessary to do so. A dedicated air supply port may be provided individually.

  One side surface extending in the Y direction of the table 2 also serves as a guide surface 2c for guiding the linear movement of the table 2 in the Y direction, and a second linear guide bearing 7 is disposed opposite to the guide surface 2c. . In this embodiment, a static pressure gas bearing is used as the second linear guide bearing 7, and the bearing surface 7a is opposed to the guide surface 2c with a bearing gap (see FIG. 4). Thus, by using a static pressure gas bearing as the second linear guide bearing 7, the second linear guide bearing 7 is brought into a non-contact state with respect to the table 2, and the table 2 and the second linear guide bearing 7. The resistance at the time of relative movement in the Y direction generated between the two is kept small.

The distal end portion of the output shaft member 8 a of the second actuator 8 is connected to the second linear guide bearing 7, and the second actuator 8 is fixed to the base 1. The output shaft member 8a is disposed with the axis centered in the X direction, and can advance and retreat only in the X direction.
As the second urging means 20 for urging the table 2 to the second linear guide bearing 7 side and restraining the table 2 in the X direction on the other side surface 2d side of the table 2 extending in the Y direction. The second preload air cylinder device is arranged. Since the second preload air cylinder device 20 has the same configuration as the first preload air cylinder device 10 described above, a housing fixed to the base 1 will be described with reference to FIG. A cylinder rod 22 is supported by 21 through a linear guide bearing 23 so as to be linearly movable in the axial direction. The cylinder rod 22 is disposed with its axis oriented in the X direction, and therefore can advance and retreat only in the X direction. An air supply port 24 for supplying compressed air, which is a power source for urging the table 2 toward the second linear guide bearing 7, to the space 21 a in the housing 21 is formed at the rear end of the housing 21. Has been. This urging force is determined by the area of the rear end face of the cylinder rod 22 and the supply pressure of the compressed air. Further, a preload bearing 25 for applying a preload in the X direction is provided at the tip of the cylinder rod 22 so as to face the other side surface 2d of the table 2 extending in the Y direction.

  Here, in this embodiment, a cylindrical static pressure air bearing mounted on the inner peripheral surface of the housing 21 is used as the linear guide bearing 23, and there is a gap between the cylinder rod 22 and the static pressure air bearing. Inserting. In this way, by using a static pressure gas bearing as the linear guide bearing 23, the resistance during movement in the axial direction generated between the cylinder rod 22 and the bearing is kept small. Incidentally, the length of the cylinder rod 22 requires at least the dimension obtained by adding the length corresponding to the effective area of the bearing 23 to the movable stroke of the table 2.

  In this embodiment, a static pressure gas bearing is used as the preload bearing 25, and the bearing surface 25a is opposed to the side surface 2d with a bearing gap. In this way, by using a static pressure gas bearing as the preload bearing 25, the preload bearing 25 is brought into a non-contact state with respect to the table 2, thereby allowing the table 2 to move in the Y direction and the table 2 and the preload. Resistance during relative movement in the Y direction generated between the bearing 25 and the bearing 25 is kept small. The compressed air supplied to the preload bearing 25 is compressed by being supplied into the housing 21 from an air supply port 24 formed in the rear end portion of the housing 21 by forming a through hole 22a along the axial direction in the cylinder rod 22. The air is guided to the static pressure gas bearing 25 through the through hole 22a so as to be used also as the compressed air that is the power source of the air cylinder device 20, but it is not always necessary to do so. A dedicated air supply port may be provided individually.

  Here, a configuration example of the first actuator 6 and the second actuator 8 will be described. For example, an AC servomotor that is feedback-controlled by a rotary encoder is used as a mechanism for converting the rotational drive of the motor into a linear drive. Use a ball screw. That is, when the nut member is rotated by the motor, the screw rod screwed to the nut member is linearly moved, and the screw rod is connected to the linear guide bearings 5 and 7 as output shaft members 6a and 8a.

Of course, the configuration of the first actuator 6 and the second actuator 8 is not limited to the above configuration, and a linear motor or the like can be used as long as the linear guide bearings 5 and 7 can be advanced and retracted in the X and Y directions. Other known linear actuators such as a drive source may be employed.
A positioning bar mirror (reflecting mirror) 30 is attached to the other side surface 2 b extending in the X direction of the table 2, and a position detector (laser length measuring device) for the X direction is located at a position facing the bar mirror 30. ) 31 is disposed and fixed to the base 1. The position in the X direction of the table 2 is detected by a signal from the position detector 31, and the detection signal is output to a controller (not shown) that controls driving of the second actuator 8.

  A positioning bar mirror (reflecting mirror) 32 is attached to the other side surface 2d of the table 2 extending in the Y direction, and a position detector for the Y direction (laser length measuring device) is positioned opposite the bar mirror 32. ) 33 is disposed and fixed to the base 1. The position of the table 2 in the Y direction is detected by a signal from the position detector 33, and the detection signal is supplied to a controller (not shown) that controls driving of the first actuator 6.

Next, the operation of the positioning device will be described.
When the table 2 is advanced and retracted in the Y direction, the output shaft member 6a of the first actuator 6 is advanced and retracted by a desired length. When the output shaft member 6a of the first actuator 6 extends, the output shaft member 6a extends against the urging force of the piston rod 12 of the first preload air cylinder device 10, thereby causing the table 2 to output the output shaft member 6a. The first linear guide bearing 5 provided at the tip of the shaft member 6a is pushed out toward the first preload air cylinder device 10 and advances in the Y direction by the same amount as the extension amount of the output shaft member 6a. When the output shaft member 6a of the first actuator 6 is contracted, the table 2 passes through the preload bearing 15 provided at the tip of the piston rod 12 by the biasing force of the piston rod 12 of the first preload air cylinder device 10. The first actuator 6 is pushed out and retracted in the Y direction by the same amount as the contraction amount of the output shaft member 6a.

  When the table 2 moves forward and backward in the Y direction, one side surface 2c extending in the Y direction of the table 2 is guided in the Y direction by the second linear guide bearing 7, and extends in the Y direction of the table 2. The other side surface 2d is urged toward the second linear guide bearing 7 by a preload bearing 25 provided at the tip of the piston rod 22 of the second preload air cylinder device 20, whereby the table 2 is moved in the X direction. Restrained by

  Here, in this embodiment, since both the first linear guide bearing 5 and the preload bearing 15 are composed of static pressure gas bearings, transmission of driving force from the first linear guide bearing 5 to the table 2 is performed. In addition, transmission of the driving force from the preload bearing 15 to the table 2 is performed in a non-contact state, and a feeling of rattling is reduced. In addition, since the second linear guide bearing 7 and the preload bearing 25 arranged on both side surfaces 2c and 2d extending in the Y direction of the table 2 are both constituted by static pressure gas bearings, the table 2 is in the Y direction. Therefore, it is possible to avoid an excessive load from being applied to the table 2 from the second linear guide bearing 7 and the preload bearing 25.

  On the other hand, when the table 2 is advanced and retracted in the X direction, the output shaft member 8a of the second actuator 8 is advanced and retracted by a desired length. When the output shaft member 8a of the second actuator 8 is extended, the output shaft member 8a is extended against the urging force of the piston rod 22 of the second preload air cylinder device 20, whereby the table 2 is output. The second linear guide bearing 7 provided at the distal end of the shaft member 8a is pushed out toward the second preload air cylinder device 20 and advances in the X direction by the same amount as the extension amount of the output shaft member 8a. When the output shaft member 8 a of the second actuator 8 is contracted, the table 2 is moved via the preload bearing 25 provided at the tip of the piston rod 22 by the biasing force of the piston rod 22 of the second preload air cylinder device 20. The second actuator 8 is pushed out and retracted in the X direction by the same amount as the contraction amount of the output shaft member 8a.

  When the table 2 moves forward and backward in the X direction, one side surface 2a extending in the X direction of the table 2 is guided in the X direction by the first linear guide bearing 5, and extends in the X direction of the table 2. The other side surface 2b is urged toward the first linear guide bearing 5 by a preload bearing 15 provided at the tip of the piston rod 12 of the first preload air cylinder device 10, whereby the table 2 is moved in the Y direction. Restrained by

  Here, in this embodiment, since both the second linear guide bearing 7 and the preload bearing 25 are composed of static pressure gas bearings, the driving force is transmitted from the second linear guide bearing 7 to the table 2. In addition, transmission of the driving force from the preload bearing 25 to the table 2 is performed in a non-contact state, so that a feeling of rattling is reduced. In addition, since both the first linear guide bearing 5 and the preload bearing 15 arranged on both side surfaces extending in the X direction of the table 2 are composed of static pressure air bearings, the table 2 moves in the X direction. At this time, it is avoided that an excessive load is applied to the table 2 from the first linear guide bearing 5 and the preload bearing 15.

As described above, since the first and second actuators 6 and 8 can drive the table 2 at the same time without interfering with each other, the table 2 can be moved simultaneously in the X direction and the Y direction. Yes.
Thus, in this embodiment, since it is not a structure in which two uniaxial tables are stacked and moved individually in a state of being orthogonal as in the prior art, it is a structure in which one table 2 is moved independently, However, the device can be made thin.

  In addition, since the table support bearing 3 for floatingly supporting the table 2 is fixed to the lower surface of the table 2, the relative positional relationship between the table 2 and the bearing 3 is changed even if the table 2 moves to an arbitrary position. Therefore, the load borne by the bearing 3 is always kept substantially constant, and the table 2 can be supported stably. As a result, the straightness is improved as compared with the prior art, and unnecessary fluctuations in the vertical direction of the table 2 that occur when the table 2 moves can be reduced.

  Further, the table 2 is not structured to be supported by two bearings arranged in series in the vertical direction as in the prior art, but by a table support bearing 3 fixed to the lower surface of the table 2 so as to face the base 1. Since the structure is supported, the support rigidity by the bearing is higher than the conventional structure. As a result, the generation of vibrations from external vibrations is reduced, and the vibration resistance can be improved.

  Further, since the shaft centers of the output shaft members 6a, 8a of the actuators 6, 8 are all arranged at the center position in the height direction of the table 2 to be positioned, the driving force of the actuators 6, 8 is applied to the table 2. The center in the height direction of the side surface of the table 2 to which the position detectors 30 and 31 should be positioned in both the X direction and the Y direction even if the position of the table 2 in the X direction and the Y direction is detected. Therefore, the distance in the vertical direction between the position detection position and the upper surface of the table 2 to be positioned can be reduced. As a result, it is possible to suppress Abbe's error to be smaller than in the prior art, and improve positioning accuracy.

  Further, since the guide mechanism and the actuator for driving in the X direction and the Y direction can be installed at the same level, the difference between the load on the first actuator 6 and the load on the second actuator 8 is reduced. be able to. As a result, the gains of the control systems of the actuators 6 and 8 are substantially the same, and the gain adjustment work of the actuators 6 and 8 can be performed by the same type of adjustment. Therefore, adjustment becomes easy and stable quality can be obtained.

  Furthermore, the load borne by the actuators 6 and 8 in both the X direction and the Y direction is a load corresponding to the weight of the table 2, and the load borne by one of the actuators is large as in the conventional case. Is reduced and positioning time is lengthened, positioning is possible in the same short time in both the X and Y directions, and the controllability and balance of the entire apparatus are improved.

  Furthermore, the number of parts requiring a predetermined accuracy can be greatly reduced compared to the prior art. For example, only one table 2 is used or the bearing 3 supporting the table 2 may be a bearing supporting one table. . This facilitates assembly and leads to downsizing of the apparatus.

It is an explanatory top view for demonstrating the positioning device which is an example of embodiment of this invention. It is the II-II arrow directional view of FIG. FIG. 3 is a detailed view of part A in FIG. 2. FIG. 3 is a detailed view of part B in FIG. 2. FIG. 3 is a detailed view of part C in FIG. 2. It is explanatory plan view for demonstrating the conventional positioning device. FIG. 7 is a front view of FIG. 6.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base 2 Table 3 Table support bearing 5 1st linear guide bearing 6 1st actuator 7 2nd linear guide bearing 8 2nd actuator 10 1st biasing means 20 2nd biasing means

Claims (1)

  In the positioning apparatus for positioning the table at an arbitrary position by moving the table forward and backward in the X direction and in the Y direction orthogonal to the X direction on the same plane, the table and the base And a table support bearing that floats and supports the table with respect to the base, and is arranged on one side of the table extending in the X direction so that the table can be moved in the X direction. A first linear guide bearing, a first actuator for driving the first linear guide bearing forward and backward in the Y direction, and the other side of the table extending in the X direction. A first urging means for allowing movement in the X direction and urging the table toward the first linear guide bearing, and one side portion extending in the Y direction of the table are arranged. The table in the Y direction A second linear guide bearing for movably guiding; a second actuator for driving the second linear guide bearing to advance and retreat in the X direction; and the other side portion extending in the Y direction of the table. And a second urging means for allowing the table to move in the Y direction and urging the table toward the second linear guide bearing.

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