JPH0914713A - Air processing device in clean room - Google Patents

Abstract

PURPOSE: To make it possible to reduce the amount of processing air and further to increase a gas removing efficiency as well as a cooling efficiency. CONSTITUTION: There are provided in a clean room 1 constructed to cause an indoor air flow to be flowed from a ceiling surface to a space below a floor; a processed equipment 3 installed within the clean room 1, a floor member 7 supported on a structural member 8 and formed with many aeration holes 6, a filter coil device FCU hung at the structural member 8 near the processed equipment 3, a gaseous substance removing filter A arranged in the filter coil device FCU, a cooling coil C and a cooling fan B.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air treatment apparatus for treating gaseous substances and heat generated in a clean room.

[0002]

2. Description of the Related Art In the next generation clean room where higher cleanliness is required, it is necessary to use a filter that removes even dilute gaseous substances, and its main filter media are fine metal fibers such as aluminum and activated carbon. Is used. There are several possible methods for cleaning the air in a clean room that incorporates this filter for removing gaseous substances, but generally, the filter is installed in the circulation system or a localized space such as a clean booth or a clean tunnel. It is installed on the intake side of.

[0003]

However, if the target device (for example, a semiconductor manufacturing apparatus) that generates a gaseous substance can be specified more than in the conventional system, the gas can be removed in the immediate vicinity of the target device. Is the best. This is because it is more efficient to remove the target gas at a relatively high concentration before it is diluted with the atmosphere in the clean room, while at the same time requiring a small amount of processing air.

On the other hand, in terms of heat generation of the target equipment as an air conditioning load, a cooling coil for complementing the cooling capacity is provided in a circulation system in response to frequent changes and expansion of production lines in semiconductor factories and the like. In many cases, however, it is best to perform processing in the immediate vicinity of the target device when necessary, for the same reason as the above-mentioned filter.

An object of the present invention is to solve the above problems, and to provide an air treatment device in a clean room which can improve the gas removal efficiency and the cooling efficiency while requiring a small amount of treatment air.

[0006]

To this end, an air treatment device in a clean room according to the present invention comprises a clean room 1 configured to flow an indoor airflow from a ceiling surface to a floor below, and a target device 3 installed in the clean room 1. A floor member 7 supported on the structural member 8 and having a large number of ventilation holes 6 formed therein.
A filter coil unit FCU suspended in the structural member 8 close to the target device 3; a gaseous substance removal filter A provided in the filter coil unit FCU;
A cooling coil C and a fan B are provided. The numbers added to the above configuration are for comparison with the drawings to facilitate understanding of the present invention, and the configuration of the present invention is not limited by this.

[0007]

In the present invention, since the gaseous substance and heat generated from the target device 3 installed in the clean room 1 are removed by the filter coil unit FCU provided in the immediate vicinity of the target device 3, the treatment is performed. A small amount of air is required, and at the same time, the target gas can be removed and cooled at a relatively high concentration and temperature before being diluted in the atmosphere of the clean room 1, and the removal efficiency and the cooling efficiency can be improved. Further, by installing the filter coil unit FCU at a necessary place at a necessary time, it is possible to flexibly cope with the production line change and expansion, and it is possible to reduce the cost.

[0008]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic cross-sectional view showing one embodiment of an air treatment device in a clean room of the present invention. In the figure,
A is a gaseous substance removal filter, B is a fan, C is a cooling coil, and FCU is a filter coil unit.

A clean room 1 that provides an ultra-clean work space
A service zone 2 is installed adjacent to both sides of the device, and a target device 3 such as a semiconductor manufacturing apparatus is installed across the clean room 1 and the service zone 2. An air supply chamber 5 is formed above the clean room 1 via a HEPA filter 4, and a gaseous substance removal filter A and a fan B are provided between the air supply chamber 5 and the service zone 2.
Are arranged. Further, the outside air supplied into the clean room 1 is configured to be cleaned through the gaseous substance removal filter A and the fan B for treating the outside air.

The floor of the clean room 1 is provided with a floor member 7 in which a large number of ventilation holes 6 are formed. The floor member 7 is laid and supported on a structural member 8 made of beams or joists via a base material 9. The return air chamber 10 is provided below the floor member 7.
Are formed. The filter coil unit FCU is provided below the structural member 8 close to the target device 3 and the hanging member 1 is provided.
It is fixed by 1. A vibration damping member 12 made of rubber or the like is provided in the middle of the hanging member 11 to prevent the vibration of the fan B from being transmitted to the target device 3. Further, in the service zone 2, a filter coil unit FCU is installed in proximity to remove and cool special gas and heat generated from the target device 3.

The operation of the present invention having the above configuration will be described. The clean room 1 is a vertical uniform flow of the indoor airflow from the ceiling surface to the underfloor, and in the clean room 1, special gas and heat are generated from the target device 3, and
Organic gas is generated from building materials such as walls. When most of the air in the clean room 1 enters the return air chamber 10 through the ventilation holes 6 of the floor member 7, enters the service zone 2 through the ventilation holes 6 again, and passes through the gaseous substance removal filter A, Gaseous substances are removed and clean air is supplied to the clean room 1.

In the present invention, the special gas generated from the target device 3 is removed by the filter coil unit FCU provided directly below the target device 3 in addition to the above-mentioned action, so that the processing air volume can be reduced and at the same time the target gas can be processed. The gas can also be removed at a relatively high concentration before being diluted in the atmosphere of the clean room 1, which is efficient. Further, heat generation of the target device 3 is also cooled by the filter coil unit FCU provided directly below the target device 3 and the filter coil unit FCU provided at the rear part of the target device 3, so that a small amount of air flow can be processed and at the same time, cooling can be performed. Efficiency is improved. The passage speed of the air through the ventilation holes 6 is 0.8 m / se when the passage speed in a normal clean room (when the opening ratio of the ventilation holes 6 is 50%).
About 10 to 20% earlier than (c), while actively attracting the air around the filter coil unit FCU, set a wind speed that does not disturb the vertical air flow in the space above 500 mm above the floor of the clean room 1. To do.

Further, when special gas or heat is generated from the rear part of the target device 3 in the service zone 2 or incidental device, the filter coil unit FCU is installed by the same method according to the air flow direction of the space, Gas removal as well,
Cooling can be performed efficiently.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view showing one embodiment of an air treatment device in a clean room of the present invention.

[Explanation of symbols]

A ... Gaseous substance removal filter, B ... Fan, C ... Cooling coil FCU ... Filter coil unit, 1 ... Clean room, 2 ... Service zone 3 ... Target equipment, 4 ... HEPA filter, 5 ... Air supply chamber, 6 ... Vent hole 7 ... Floor member, 8 ... Structural member, 9 ... Base material, 10 ... Return air chamber 11 ... Suspension member, 12 ... Vibration damping member

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Shigekazu Tsurugi 1-3-2 Shibaura, Minato-ku, Tokyo Shimizu Construction Co., Ltd. (72) Inventor Takeshi Sekiguchi 1-3-2 Shibaura, Minato-ku, Tokyo Shimizu Construction Co., Ltd.

Claims (1)

[Claims] 1. A clean room configured to flow an indoor airflow from the ceiling surface to the underfloor, a target device installed in the clean room, and a floor member supported on a structural member and having a large number of ventilation holes. A clean room characterized by comprising a filter coil unit suspended from the structural member in the vicinity of the target device, a gaseous substance removal filter provided in the filter coil unit, a cooling coil and a fan. Air treatment equipment in.