JPH05312369A - Clean room floor panel - Google Patents

Abstract

PURPOSE:To prevent heat generation from production facilitates from interfering with the other area in a clean room by providing the flow of air forcibly near the heat generating source in the clean room. CONSTITUTION:Air, sent from an air-conditioning machine 5, is circulated in such a manner that it is passed through a HEPA filter 6 provided in a ceiling panel 7, blown out into a clean room, enters an underfloor space through punching holes of floor panels 9, equipped with a fan, and a floor panel 10, then, returns to the air-conditioning machine 5. In this case, the floor panels 9, equipped with a fan, are used near production facilities 8 to produce local airflow and discharge heat, generated from the production facilities 8, into the underfloor space forcibly near the productive facilities 8. According to this method, the generation of convection of heat in the clean room is prevented and the interference of the heat generation from the production facilities 8 with the other area in the clean room can be prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room floor panel having punching holes for returning air in the clean room to the underfloor.

[0002]

2. Description of the Related Art A conventional clean room floor panel is shown in FIG.
As shown in the perspective view, the punching panel 31 provided with the punching holes 32 for returning the air in the clean room to the underfloor is used. The configuration of FIG. 5 shows the state of the airflow in a conventional clean room using this conventional floor panel. The air sent from the air conditioner 41 is the HEP installed on the ceiling 43 of the clean room.
It passes through the A filter 42 and is blown into the clean room. The heat generated from the production equipment 44 is carried under the floor together with the air through the punching holes 32 of the perforated punching panel 31 of the floor panel 45, and the circulating air is recycled again.
Return to.

[0003]

In this conventional clean room floor panel, when a part of the clean room has a large calorific value and there is a production facility for forcibly discharging the calorific value into the room, the HEPA filter is used. There is a problem that the heat generated in the clean room does not completely return to the underfloor and convection occurs in the clean room only with the blowing pressure.

[0004]

In the clean room floor panel of the present invention, a fan is provided on the back surface of the punching panel in order to forcibly exhaust the air in the clean room under the floor of the clean room. It has a structure in which it is partially arranged.

[0005]

The present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of a floor panel with a fan used in Embodiment 1 of the present invention. The clean room floor panel of this embodiment includes a fan-equipped floor panel in which a fan unit 13 is provided on the back surface of the panel 11 having the punching holes 12. FIG. 2 shows a state of the air flow in a conventional clean room using the clean room floor panel of this embodiment.
Is shown in the block diagram. The air sent from the air conditioner 21 passes through the HEPA filter 22 provided on the ceiling panel 23, blows out into the clean room, and the floor panel 2 with a fan.
5 and under the floor through the punching holes in the floor panel 26,
The circulation returning to the air conditioner 21 is performed. At this time, by using a floor panel 25 with a fan near the production facility 24, a partial air flow is created so that the heat generated by the production facility 24 is forcibly discharged under the floor near the production facility 24. Has become.

FIG. 3 is a configuration diagram of a clean room floor panel according to a second embodiment of the present invention. A suction chamber 52 is provided on the back surface of the punching panel 51. The suction chamber 52 is connected to a separately installed fan unit 55 by an exhaust duct 54 and creates a forced air flow on the punching panel. In this case, as compared to the first embodiment, the floor unit itself can be made smaller and lighter by disposing the fan unit 55 separately, and by increasing the size of the fan, the control range of the exhaust amount can be expanded. Has the advantage that

[0007]

As described above, the present invention prevents generation of heat convection in the clean room by creating a forced air flow near the heat source in the clean room,
It is possible to prevent the heat generated from the production facility from interfering with other areas in the clean room.

[Brief description of drawings]

FIG. 1 is a perspective view of a floor panel with a fan used in a first embodiment of the present invention.

FIG. 2 is a sectional view of a clean room using the first embodiment of the present invention.

FIG. 3 is a configuration diagram illustrating a second embodiment of the present invention.

FIG. 4 is a perspective view of a conventional floor panel.

FIG. 5 is a cross-sectional view of a conventional clean room.

[Explanation of symbols]

 1 Punching Panel 2 Punching Hole 3 Fan Unit 4 Fan 5 Air Conditioner 6 HEPA Filter 7 Ceiling Panel 8 Production Equipment 9 Floor Panel with Fan 10 Floor Panel 11 Suction Chamber 12 Duct Connection Port 13 Exhaust Duct 14 Fan Unit

Claims (1)

[Claims] 1. A clean room floor panel having a punching panel structure for returning the air in the clean room to the underfloor. A clean room floor panel characterized in that the panels are partially arranged on the clean room floor.