JPH09143627A - Iron-nickel base alloy thin sheet excellent in workability and its production - Google Patents

Iron-nickel base alloy thin sheet excellent in workability and its production

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Publication number
JPH09143627A
JPH09143627A JP31040895A JP31040895A JPH09143627A JP H09143627 A JPH09143627 A JP H09143627A JP 31040895 A JP31040895 A JP 31040895A JP 31040895 A JP31040895 A JP 31040895A JP H09143627 A JPH09143627 A JP H09143627A
Authority
JP
Japan
Prior art keywords
alloy thin
workability
cold rolling
degree
thin plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31040895A
Other languages
Japanese (ja)
Other versions
JP3518707B2 (en
Inventor
Hiroki Nakanishi
寛紀 中西
Akira Kawakami
章 川上
Kokichi Mikutsu
幸吉 御沓
Hiroyuki Hagiwara
弘之 萩原
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Proterial Ltd
Original Assignee
Hitachi Metals Ltd
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Priority to JP31040895A priority Critical patent/JP3518707B2/en
Publication of JPH09143627A publication Critical patent/JPH09143627A/en
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Publication of JP3518707B2 publication Critical patent/JP3518707B2/en
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Abstract

PROBLEM TO BE SOLVED: To secure required hardness in an Fe-Ni base alloy thin sheet and to improve its workability, particularly, in bendability by regulating the crystal orientation of an Fe-Ni base alloy thin sheet having a specified compsn. SOLUTION: The molten metal of an Fe-Ni base alloy having a compsn. essentially consisting of 30 to 60% Ni, and the balance Fe or having a compsn. in which a part of the above Ni is substituted with 20% Co is passed through the space between a pair of rolls to cast a slab having <=100mm sheet thickness, which is subjected to hot working at 1000 to 1300 deg.C at <=90% working degree. Or it is cast into 10mm sheet thickness simultaneously to obtain a structure in which the accumulated degrees in the crystal planes at the center part in the sheet thickness direction are regulated to (111)>30% and (311)>10%. After that, cold rolling at a working degree not exceeding 80% and softening at 750 to 1100 deg.C are executed for one or more times, by which the Fe-Ni base alloy thin sheet in which the accumulated degrees in the crystal planes at the center part in the sheet thickness direction after final cold rolling satisfy (111)>3% and (311)>10% and Vickers hardness is regulated to >=160HV and excellent in bendability can be obtd.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は曲げ等の成形加工性
を改善した被加工性に優れたFe−Ni系合金薄板およ
びその製造方法に関するものである
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe-Ni alloy thin plate having improved formability such as bending and excellent workability, and a method for producing the same.

【0002】[0002]

【従来の技術】半導体素子のリードフレーム素材として
は、シリコンチップあるいはガラス、樹脂といった密封
材料と、熱膨張特性を整合させる必要があり、低熱膨張
特性を有するFe−Ni系合金が主として用いられてい
る。上述した熱膨張特性は、半導体素子の特性等にあわ
せてNiの含有量あるいはその他の添加元素によって調
整される。代表的な素材としては、Fe−42%Ni合
金,Fe−50%Ni合金,Fe−29%−17%Co
合金等が知られている。上述したリードフレーム材料だ
けではなく、パーマロイ等の磁性材料としてもFe−N
i系材料は使用されている。
2. Description of the Related Art As a lead frame material for semiconductor devices, it is necessary to match the thermal expansion characteristics with a sealing material such as a silicon chip, glass or resin, and Fe-Ni alloys having low thermal expansion characteristics are mainly used. There is. The above-mentioned thermal expansion characteristics are adjusted by the Ni content or other additive elements according to the characteristics of the semiconductor element and the like. Typical materials are Fe-42% Ni alloy, Fe-50% Ni alloy, Fe-29% -17% Co.
Alloys and the like are known. In addition to the lead frame materials described above, Fe-N can be used as a magnetic material such as permalloy.
i-based materials have been used.

【0003】近年、半導体素子の集積回路においては、
高集積化はもちろんであるが、電子機器のダウンサイジ
ングの動向に伴って、電子回路の高密度実装の要求が強
く、半導体素子も小型、薄型化へと移行してきている。
こうした小型、薄型化に対応した半導体パッケージとし
てはTSOP(Thin small Outline Package)が代表的
なものであり、厚さが1mm程度の薄型の素子である。こ
うした薄型パッケージにおいては、パッケージの厚さ方
向に対する寸法精度が厳しく要求され、これに伴ってリ
ードフレームの薄肉化寸法精度の高精度化が強く要求さ
れるようになってきた。特に、図1に示すようにリード
フレーム1にシリコンチップを接合するタブ2およびタ
ブ吊り3の部分を形成するような場合には、タブ2およ
びタブ吊り3の位置が、半導体素子を形成する上で精度
を左右してしまうため、極めて厳しい精度が要求され
る。すなわち、曲げ加工性の向上は、このような半導体
素子の形成にとって重要な課題である。
In recent years, in integrated circuits of semiconductor devices,
In addition to high integration, there is a strong demand for high-density mounting of electronic circuits with the trend of downsizing of electronic devices, and semiconductor elements are also shifting to smaller and thinner.
A TSOP (Thin small Outline Package) is a typical semiconductor package that can be made smaller and thinner, and is a thin element having a thickness of about 1 mm. In such a thin package, strict dimensional accuracy in the thickness direction of the package is strictly required, and accordingly, thinning of the lead frame and high dimensional accuracy have been strongly demanded. Particularly, as shown in FIG. 1, when the tab 2 and the tab suspension 3 for joining the silicon chip to the lead frame 1 are formed, the positions of the tab 2 and the tab suspension 3 are different from each other in forming the semiconductor element. Since accuracy is affected by, extremely strict accuracy is required. That is, improvement of bending workability is an important subject for forming such a semiconductor element.

【0004】また、カラーテレビあるいはパーソナルコ
ンピュータ等の表示装置に使用されるシャドウマスク材
としては、従来アルキルド鋼が使用されてきたが、近年
表示装置の高精細化にともない、重量%で36%のNi
を含有するFe−Ni合金、いわゆるインバー合金がア
ルミキルド鋼にとって替わるようになってきている。こ
のインバー合金は、室温での熱膨張係数がアルミキルド
鋼に比べ、極めて低く、シャドウマスクに形成された電
子ビーム通過孔の位置精度を温度に依らず正確に保つこ
とができるという利点を有するものである。また、イン
バー合金は、その低熱膨張特性からバイメタル等にも使
用されている。
Alkylated steel has been conventionally used as a shadow mask material used in a display device such as a color television or a personal computer. However, in recent years, with the high definition of the display device, the weight percentage is 36%. Ni
Fe-Ni alloys containing so-called invar alloys have been replacing aluminum killed steel. This Invar alloy has an advantage that the coefficient of thermal expansion at room temperature is extremely lower than that of aluminum-killed steel, and the positional accuracy of the electron beam passage holes formed in the shadow mask can be maintained accurately regardless of temperature. is there. Further, the Invar alloy is also used as a bimetal or the like because of its low thermal expansion property.

【0005】[0005]

【発明が解決しようとする課題】上述したようにFe−
Ni系合金薄板の電子機器等への適用においては、加工
精度の向上は必須の課題である。このような状況におい
て、シャドウマスクのプレス成形性を改善する方法とし
て、特開昭61−218050号あるいは特開平6−2
64140号に記載のように、面心立方格子を有するF
e−Ni系合金の滑り面である(111)面を集合させ
ることにより、プレス成形性を確保しようとすることが
提案されている。これらは、変形しやすい(111)面
を集合させることにより、プレス成形時のスプリングバ
ック量を低減させことができることを開示している。
As described above, Fe-
In applying the Ni-based alloy thin plate to electronic devices and the like, improvement of processing accuracy is an essential issue. Under these circumstances, as a method for improving the press formability of the shadow mask, JP-A-61-218050 or JP-A-6-2 is known.
F having a face-centered cubic lattice, as described in No. 64140.
It has been proposed to secure press formability by assembling (111) faces, which are sliding faces of an e-Ni alloy. These disclose that the amount of springback at the time of press molding can be reduced by assembling the (111) planes that are easily deformed.

【0006】しかし、本発明者の検討によれば、上述し
た特開昭61−218050号あるいは特開平6−26
4140号に記載されるFe−Ni系合金素材は、軟化
焼鈍した材料であって、その硬さはビッカース硬度で1
30HV程度である。一方、リードフレーム等の材料に
おいては、強度を確保する必要があり、上述したような
薄板化によって、より高い硬さに調整する必要があり、
軟化焼鈍した材料は使用できない。特に図1に示すよう
なビッカース硬さが160HV以上のTSOP用リード
フレーム等として使用する場合には硬さが低いことは問
題である。本発明の目的は、必要な硬さを確保すること
ができ、従来のFe−Ni系合金薄板の被加工性、特に
曲げ加工性を改善したFe−Ni系合金薄板およびその
製造方法を提供することである。
However, according to the study by the present inventor, the above-mentioned JP-A-61-218050 or JP-A-6-26 has been described.
The Fe-Ni alloy material described in No. 4140 is a softened and annealed material, and its hardness is 1 in Vickers hardness.
It is about 30 HV. On the other hand, in materials such as lead frames, it is necessary to secure strength, and it is necessary to adjust to a higher hardness by thinning as described above,
Material that has been softened and annealed cannot be used. In particular, when used as a TSOP lead frame having a Vickers hardness of 160 HV or more as shown in FIG. 1, the low hardness is a problem. An object of the present invention is to provide a Fe-Ni alloy thin plate capable of ensuring a required hardness and improving the workability of a conventional Fe-Ni alloy thin plate, in particular, bending workability, and a manufacturing method thereof. That is.

【0007】[0007]

【課題を解決するための手段】本発明者等は、Fe−N
i系合金薄板の被加工性を改善するために、Fe−Ni
系合金薄板の結晶方位の制御に着目して検討を行った。
そして、通常の溶製材によるインゴットやブルーム連鋳
を圧延した薄板では、Fe−Ni系合金薄板の表面にお
いて(111)結晶面が集合したように見える素材にお
いても、素材の板厚中心では(111)結晶面の集合が
不十分であることが判明した。本発明者は、Fe−Ni
系合金薄板の板厚中心まで、(111)面を集合させる
べく、Fe−Ni系合金薄板の製造条件の検討を行っ
た。その結果、驚くべきことに冷間圧延後の組織におけ
る(111)面の集合度は、冷間圧延前の素材の(11
1)集合度に大きく依存するということを見出した。
The present inventors have found that Fe--N
In order to improve the workability of the i-based alloy thin plate, Fe-Ni
The study was conducted focusing on the control of the crystal orientation of the Al-based alloy thin plate.
Then, in a thin plate obtained by rolling an ingot or bloom continuous casting using an ordinary ingot, even in a material in which (111) crystal planes seem to be aggregated on the surface of the Fe—Ni alloy thin plate, the (111) crystal plane is centered at (111) ) It was found that the aggregation of crystal planes was insufficient. The present inventor
The production conditions of the Fe-Ni alloy thin plate were examined in order to collect the (111) planes to the center of the thickness of the alloy thin plate. As a result, surprisingly, the degree of aggregation of the (111) plane in the structure after cold rolling is (11) of the material before cold rolling.
1) It was found that it depends greatly on the degree of aggregation.

【0008】そして、冷間圧延に至る前に、板厚方向の
中央部で(111)面が高くなるように調整することが
板厚中央部に(111)面を集合させることが必要であ
り、その具体的な方法として、できるだけ薄いスラブ連
続鋳造法、または薄板連続鋳造法を適用し、凝固進行中
に表面から内部にかけての冷却をできるだけ速やかに行
なうことが有効であることを見出した。すなわち、表面
から中心までの凝固距離を短くして表面から内部にかけ
ての温度勾配を従来よりも大きく与えるのである。すな
わち温度勾配の連続鋳造法を適用し、凝固時に表面から
内部にかけて大きな温度勾配を与えることが有効である
ことを見出した。
Before the cold rolling, it is necessary to adjust the (111) plane to be high in the central portion in the plate thickness direction so that the (111) surface is gathered in the central portion of the plate thickness. As a concrete method, it was found that it is effective to apply the thinnest slab continuous casting method or the thin plate continuous casting method, and to perform cooling from the surface to the inside as quickly as possible during the progress of solidification. That is, the solidification distance from the surface to the center is shortened to give a larger temperature gradient from the surface to the inside than in the conventional case. That is, it was found that it is effective to apply a continuous casting method with a temperature gradient to give a large temperature gradient from the surface to the inside during solidification.

【0009】また、本発明者等は、被加工性に対して
(111)面だけではなく、(311)面の集合度を高
めることも有効であることを見出した。そして、(31
1)面も(111)面と同様に、冷間圧延前の集合度
が、冷間圧延後の集合度に依存することを突き止め、
(311)面を増加させるためにも、上述した肉厚の薄
い連続鋳造法の適用は有効であることを見出した。そし
て、この方法によって、Fe−Ni合金を製造すれば、
ビッカース硬さ HV160以上の材料であっても優れ
た曲げ加工性を確保できることを見出し、本発明に到達
した。
Further, the present inventors have found that it is effective for the workability to increase not only the (111) planes but also the (311) planes. And (31
As with the (111) plane, it was found that the degree of aggregation before cold rolling depends on the degree of aggregation after cold rolling as well as the (111) plane.
It has been found that the application of the above-described continuous casting method having a small wall thickness is effective for increasing the (311) plane. And if an Fe-Ni alloy is manufactured by this method,
The inventors have found that even a material having a Vickers hardness of HV160 or higher can ensure excellent bending workability, and have reached the present invention.

【0010】すなわち、本発明の製造方法は、Ni30
〜55%、残部Feを主体とする組成を有するか、また
は、前記Niの一部をCo20%で置換した組成を有す
るFe−Ni系合金溶湯をロール対間を通して、板厚1
00mm以下のスラブに鋳造し、該スラブを1000〜
1300℃の温度範囲で90%以下の加工度で熱間加工
を行ない、板厚方向中央部での結晶面の集積度が(11
1)>30%、(311)>10%の組織を得た後、8
0%を越えない加工度の冷間圧延と、750〜1100
℃の温度範囲での軟化焼鈍を少なくとも1回以上実施
し、最終冷間圧延後において板厚方向中央部での結晶面
の集積度が(111)>3%、(311)>10%を満
足するFe−Ni系合金薄板を得るものである。
That is, the manufacturing method of the present invention is based on Ni30
˜55%, the balance being Fe as a main component, or a Fe—Ni alloy melt having a composition in which a portion of Ni is replaced with Co 20% is passed through a pair of rolls to obtain a plate thickness of 1
Cast into a slab of 00 mm or less,
Hot working was performed at a working rate of 90% or less in the temperature range of 1300 ° C., and the degree of integration of crystal planes in the central portion in the plate thickness direction was (11
8) after obtaining the structures of 1)> 30% and (311)> 10%
Cold rolling with workability not exceeding 0% and 750 to 1100
After soft-annealing at least once in the temperature range of ℃, after the final cold rolling, the degree of integration of crystal planes in the central portion in the plate thickness direction satisfies (111)> 3% and (311)> 10%. To obtain a Fe—Ni alloy thin plate.

【0011】また、上述の製造方法は、いったん板厚が
100μm以下という薄めのスラブを製造し、熱間加工
を施すものであるが、上述組成のFe−Ni系合金溶湯
をロール対間を通して、板厚10mm以下、板厚方向中
央部での結晶面の集積度が(111)>30%、(31
1)>10%、の組織を有するストリップに鋳造し(す
なわち、薄板連続鋳造法である)、該ストリップを80
%を越えない加工度の冷間圧延と、750〜1100℃
の温度範囲での軟化焼鈍を少なくとも1回以上実施し、
最終冷間圧延後において板厚方向中央部での結晶面の集
積度が(111)>3%、(311)>10%を満足す
るFe−Ni系合金薄板を得ても良い。
In the above-described manufacturing method, a thin slab having a plate thickness of 100 μm or less is once manufactured and hot working is performed. However, the molten Fe—Ni alloy having the above composition is passed between the roll pairs. The plate thickness is 10 mm or less, and the degree of integration of crystal planes in the central portion in the plate thickness direction is (111)> 30%, (31
1) Cast into a strip having a texture of> 10% (i.e. thin sheet continuous casting) and strip 80
Cold rolling with a workability not exceeding%, and 750 to 1100 ° C
Softening annealing in the temperature range of at least once,
After the final cold rolling, a Fe-Ni alloy thin plate may be obtained in which the degree of integration of crystal planes in the central portion in the plate thickness direction satisfies (111)> 3% and (311)> 10%.

【0012】なお、上述した製造方法の工程に加えて、
最終冷間圧延後に、500〜750℃の温度範囲におい
て歪取り焼鈍を行い、(111)>3%、(311)>
10%を満足するようにしても良い。上述した製造方法
により、Ni30〜55%、残部Feを主体とするか、
または、前記Niの一部をCo20%で置換した組成を
有し、ビッカース硬さが160HV以上であって板厚方
向中央部での結晶面の集積度が(111)>3%、(3
11)>10%を満足する被加工性に優れたFe−Ni
系合金薄板を得ることができる。好ましくは、ビッカー
ス硬さを180HV以上とする。
In addition to the steps of the manufacturing method described above,
After the final cold rolling, strain relief annealing is performed in the temperature range of 500 to 750 ° C., and (111)> 3%, (311)>
You may make it satisfy 10%. According to the above-mentioned manufacturing method, Ni is 30 to 55% and the balance is Fe,
Alternatively, the Ni has a composition in which a part of Ni is replaced by Co20%, the Vickers hardness is 160 HV or more, and the degree of integration of crystal planes in the central portion in the plate thickness direction is (111)> 3%, (3
11) Fe-Ni with excellent workability satisfying> 10%
A system alloy thin plate can be obtained. Preferably, the Vickers hardness is 180 HV or higher.

【0013】[0013]

【発明の実施の形態】本発明方法における重要な特徴の
一つは、ビッカース硬さが160HV以上と高いFe−
Ni系合金において、加工性、特に曲げ成形性に有効な
(111)面あるいは(311)面を、板厚中央部にお
いて集合させるために、特定の条件を満足する連続鋳造
法を適用したことにある。連続鋳造法の適用は、凝固時
に表面から内部にかけて大きな温度勾配を与えることが
でき、特に板厚中央部にまで(111)を集合させるこ
とが可能であり、また(311)面の集合度も高いもの
とすることができる。本発明においては、連続鋳造法に
より、直接板厚10mm以下のストリップを得ることが
望ましいが、板厚100mm以下のスラブを製造し、熱
間圧延を行ってから、冷間加工を行うこともできる。
BEST MODE FOR CARRYING OUT THE INVENTION One of the important features of the method of the present invention is Fe- which has a high Vickers hardness of 160 HV or more.
In Ni-based alloys, in order to collect (111) planes or (311) planes, which are effective for workability, particularly bend formability, in the central portion of the plate thickness, a continuous casting method satisfying specific conditions was applied. is there. The application of the continuous casting method can give a large temperature gradient from the surface to the inside at the time of solidification, and in particular, it is possible to aggregate (111) even in the central portion of the plate thickness, and also the aggregation degree of (311) planes. Can be expensive. In the present invention, it is desirable to directly obtain a strip having a plate thickness of 10 mm or less by a continuous casting method, but it is also possible to manufacture a slab having a plate thickness of 100 mm or less, perform hot rolling, and then perform cold working. .

【0014】ここで、板厚100mmを上限としたの
は、100mmを越える板厚に連続鋳造しても、板厚中
央部の(111)面および(311)面の集合度を高く
するだけの、指向性凝固を行うことができなくなるため
である。スラブを製造し、熱間圧延を行う場合は、熱間
圧延における加工度が大きくなりすぎると、(111)
面および(311)面の集合度が低下するため、熱間加
工度は90%以下とする必要がある。また、この時の熱
間圧延の温度は、加工性と酸化防止の点から、1000
〜1300℃が望ましい。
Here, the upper limit of the plate thickness of 100 mm is that the aggregation degree of the (111) face and the (311) face at the center of the plate thickness is only increased even if the plate thickness is continuously cast over 100 mm. , Because directional coagulation cannot be performed. When manufacturing a slab and performing hot rolling, if the workability in hot rolling becomes too large, (111)
Since the degree of aggregation of the planes and the (311) plane is reduced, the hot workability needs to be 90% or less. Further, the temperature of the hot rolling at this time is 1000 from the viewpoint of workability and oxidation prevention.
A temperature of ~ 1300 ° C is desirable.

【0015】本発明において、熱間工程の後に行う冷間
圧延工程では、80%を越えない加工度の冷間圧延と、
750〜1100℃の温度範囲での軟化焼鈍が必要であ
る。Fe−Ni系合金に冷間圧延と焼鈍を施す際におい
て、加工度が高すぎると焼鈍により(100)面が集合
するいわゆる再結晶集合組織となる。また、冷間圧延だ
けでは、(110)面が集合した圧延組織となる。
In the present invention, in the cold rolling step performed after the hot step, cold rolling with a workability not exceeding 80%,
Softening annealing in the temperature range of 750 to 1100 ° C is required. When the Fe-Ni-based alloy is subjected to cold rolling and annealing and the workability is too high, a so-called recrystallized texture in which (100) planes are aggregated by annealing is formed. In addition, cold rolling alone produces a rolled structure in which (110) planes are aggregated.

【0016】そのため、適度な加工と圧延率の組み合わ
せが必要であり、本発明においては、80%を越えない
加工度の冷間圧延と、750〜1100℃の温度範囲で
の軟化焼鈍を施すものとした。望ましくは、70%を越
えない加工度と、800〜1050℃の冷間加工条件と
する。この冷間加工により、(111)面および(31
1)面に集合していた組織は、再結晶により(100)
面が増加し、圧延により(110)面が増加する傾向が
認められる。
Therefore, a suitable combination of working and rolling rate is required. In the present invention, cold rolling with a working degree not exceeding 80% and softening annealing in the temperature range of 750 to 1100 ° C. are carried out. And Desirably, the working ratio does not exceed 70% and the cold working condition is 800 to 1050 ° C. By this cold working, (111) plane and (31
The structure gathered on the 1) plane was recrystallized to (100)
It is recognized that the number of faces increases and that the (110) face tends to increase due to rolling.

【0017】しかし、上述したように、本発明において
は、あらかじめ冷間圧延の前に板厚中央部において、
(111)>30%、(311)>10%という、(1
11)面および(311)面の集合度が高い組織に調整
している点に大きな特徴がある。その結果、冷間圧延の
影響を受けにくい板厚中央部において、冷間圧延後にお
いても(111)面および(311)面の集合度を高い
もの、具体的には(111)>3%、(311)>10
%を満足するFe−Ni系合金薄板を得ることができる
のである。
However, as described above, in the present invention, before cold rolling, in the central portion of the sheet thickness,
(111)> 30%, (311)> 10%, (1
A major feature is that the texture is adjusted to have a high degree of aggregation of the 11) plane and the (311) plane. As a result, in the central portion of the plate thickness that is less likely to be affected by cold rolling, the degree of aggregation of the (111) plane and the (311) plane is high even after cold rolling, specifically, (111)> 3%, (311)> 10
It is possible to obtain a Fe-Ni alloy thin plate satisfying the requirement.

【0018】本発明において、冷間圧延の前に板厚中央
部において、(111)>30%、(311)>10%
としたのは、(111)面および(311)面の集合度
はできるだけ高い方がよいという知見から、従来のイン
ゴットから熱間圧延する方法では得られず、特定の条件
下での連続鋳造法によって調整できると確認した範囲で
ある。本発明者の測定によれば、面心立方格子を有する
Fe−Ni系合金の主たる結晶面である(100)(1
10)(111)(311)のうち、(100)(11
0)面よりも、(111)面あるいは(311)面は、
ヤング率が高い。
In the present invention, (111)> 30%, (311)> 10% in the central portion of the plate thickness before cold rolling.
The finding that the degree of aggregation of the (111) plane and the (311) plane should be as high as possible is not obtained by the conventional hot rolling method from an ingot, and the continuous casting method under specific conditions is adopted. It is the range confirmed to be adjustable by. According to the measurement by the present inventor, it is the main crystal plane of the Fe—Ni-based alloy having a face-centered cubic lattice (100) (1).
10) (111) (311) out of (100) (11
The (111) plane or (311) plane is more
Young's modulus is high.

【0019】図2に示すように硬さが同じ材料における
応力と歪みの関係において、ヤング率が大きい場合(破
線でしめす)はヤング率の小さい場合(実線で示す)よ
りも戻り量が少なくなる。すなわち、ヤング率を高くす
ることは曲げ成形した時のスプリングバック量が少なく
なり、成形精度を向上することができるのである。その
ため、曲げ成形性にとってはヤング率を高くすることが
できる(111)(311)面の集合度を高くする必要
がある。
In the relationship between stress and strain in materials having the same hardness as shown in FIG. 2, when the Young's modulus is large (indicated by the broken line), the amount of return is smaller than when the Young's modulus is small (shown by the solid line). . That is, by increasing the Young's modulus, the springback amount at the time of bending and forming decreases, and the forming accuracy can be improved. Therefore, for bend formability, it is necessary to increase the degree of aggregation of the (111) (311) planes, which can increase the Young's modulus.

【0020】この(111)面および(311)面の集
合度はできるだけ高い方がよいが、冷間圧延により、特
に(111)面の集合度が低下するため、冷間圧延後の
板厚中央部においては、(111)>3%、(311)
>10%と規定した。好ましくは、(111)>5%、
(311)>15%である。冷間圧延工程において、で
きるだけ組織を崩さず、(111)(311)面を高く
するためには、厚みが100mm以下の連続鋳造法によ
り、望ましくは直接薄いストリップを製造する方法をと
ったり、冷間圧延における加工度をできるだけ低くする
方法をとることができる。
The degree of aggregation of the (111) and (311) planes should be as high as possible. However, since the degree of aggregation of the (111) plane is particularly lowered by cold rolling, the center of the sheet thickness after cold rolling. In the section, (111)> 3%, (311)
Specified as> 10%. Preferably, (111)> 5%,
(311)> 15%. In the cold rolling process, in order to keep the structure as small as possible and to raise the (111) (311) plane, a continuous casting method having a thickness of 100 mm or less is preferably used to directly produce a thin strip, or a cold strip is used. It is possible to take a method of reducing the workability in rolling as much as possible.

【0021】また、本発明においては、上述した冷間加
工工程の後に、500〜750℃の温度範囲において歪
取り焼鈍を行なうことができる。ここで、500〜75
0℃としたのは、再結晶が起こらず、ビッカース硬さH
V160以上を確保しつつ歪みの除去に有効な範囲とし
て特定したものである。歪取り焼鈍では再結晶が起こら
ないため、集合組織の大きな変化はなく、(111)>
3%、(311)>10%を満足するFe−Ni系合金
薄板を得ることができる。
Further, in the present invention, the strain relief annealing can be performed in the temperature range of 500 to 750 ° C. after the cold working step described above. Where 500-75
The temperature of 0 ° C means that recrystallization does not occur and the Vickers hardness H
It is specified as an effective range for removing distortion while ensuring V160 or higher. Since recrystallization does not occur in strain relief annealing, there is no significant change in texture, and (111)>
It is possible to obtain a Fe—Ni alloy thin plate satisfying 3% and (311)> 10%.

【0022】本発明におけるFe−Ni系シャドウマス
ク素材とは、面心立方格子を有することができ、Fe−
Ni系合金薄板の特徴である低熱膨張特性を満足する範
囲として規定したものである。本発明の特徴とするFe
−Ni系合金とは、NiとFe以外に主に製鋼上の点か
ら添加されるMn,Siをそれぞれ1.0%以下で含有
していてもよいし、Mn,Siを不純物として考えても
よい。すなわち、Fe−Niの2元系では、Niが30
%以下では、低熱膨張特性が得られる面心立方格子の組
織を得ることができない。また、Niが60%を越える
と熱膨張係数が大きくなり、低熱膨張特性が得られない
ためである。
The Fe-Ni-based shadow mask material in the present invention can have a face-centered cubic lattice, and Fe-
It is defined as a range that satisfies the low thermal expansion characteristic that is a characteristic of the Ni-based alloy thin plate. Fe, which is a feature of the present invention
In addition to Ni and Fe, the —Ni-based alloy may contain 1.0% or less of Mn and Si, which are mainly added from the viewpoint of steelmaking, or may be considered as impurities. Good. That is, in the Fe-Ni binary system, Ni is 30
%, It is impossible to obtain a face-centered cubic lattice structure with low thermal expansion characteristics. Also, if Ni exceeds 60%, the coefficient of thermal expansion becomes large, and low thermal expansion characteristics cannot be obtained.

【0023】なお、Coは、Niと同様に面心立方格子
の組織を安定化させる作用を有し、熱膨張特性を変化さ
せることができるため置換可能である。しかし、高価で
あるため最大でも20%とすることが望ましい。なお、
本発明においては、面心立方格子による特性が崩れない
程度に他の添加元素を添加することができる。例えば、
強度を高める元素として、Cr,Ti,V,Nb等を選
択的にそれぞれ3〜5%以下の範囲で添加しても良い。
「残部Feを主体とする組成」とはこれらの添加元素お
よび上記のMn,Siが添加される場合があることを意
味する。
Co, like Ni, has a function of stabilizing the texture of the face-centered cubic lattice and can change the thermal expansion characteristics, so it can be replaced. However, since it is expensive, it is desirable to set it to 20% at the maximum. In addition,
In the present invention, other additive elements can be added to the extent that the characteristics due to the face-centered cubic lattice are not disturbed. For example,
Cr, Ti, V, Nb, etc. may be selectively added in the range of 3 to 5% or less as the element for enhancing the strength.
The “composition mainly composed of balance Fe” means that these additional elements and the above Mn and Si may be added.

【0024】[0024]

【実施例】以下に本発明を実施例に基づき説明する。表
1に示す化学成分を有するFe−42%Ni合金、Fe
−50%Ni合金、Fe−29Ni−17Co合金およ
びならびにFe−36%Ni合金の溶湯を準備し、図3
に示す双ロール6と、溶湯4を保持する坩堝5を有する
連続鋳造装置に導入し、ロール6の間隙を調製して板厚
が30,60および110mmのスラブ、および板厚
7,5および3mmのストリップでなる鋳片7をそれぞ
れ作製した。得られたスラブは、1080℃の熱間加工
条件で、表2および表3に示す加工度で熱間圧延を行
い、冷間圧延前の素材とした。また、直接ストリップに
鋳造したものは、そのまま冷間圧延前の素材とした。得
られた冷間圧延前の素材を、表2〜表3に示す冷間圧延
条件で冷間加工および焼鈍を行った。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on embodiments. Fe-42% Ni alloy having the chemical composition shown in Table 1, Fe
A -50% Ni alloy, a Fe-29Ni-17Co alloy, and a Fe-36% Ni alloy melt were prepared.
Introduced into a continuous casting device having a twin roll 6 and a crucible 5 for holding the molten metal 4, the gap between the rolls 6 is adjusted so that a slab having a plate thickness of 30, 60 and 110 mm and a plate thickness of 7, 5 and 3 mm Each of the cast pieces 7 made of strips was produced. The obtained slab was hot-rolled under the hot-working condition of 1080 ° C. and the workability shown in Tables 2 and 3 to obtain a raw material before cold-rolling. The material directly cast into strip was used as it was as a material before cold rolling. The obtained material before cold rolling was subjected to cold working and annealing under the cold rolling conditions shown in Tables 2 and 3.

【0025】冷間加工行程におけるCR1,CR2,C
R3はそれぞれ第1の冷間圧延、第2の冷間圧延、第3
の冷間圧延を意味し、数値は加工度%である。また、冷
間加工工程におけるA1,A2は、それぞれ第1の焼
鈍、第2の焼鈍を示するものである。数値は、焼鈍温度
℃である。なお、仕上げ圧延後に歪取り焼鈍を行う場合
は、650℃にて3分間行った。
CR1, CR2, C in the cold working process
R3 is the first cold rolling, the second cold rolling, and the third cold rolling, respectively.
Means cold rolling, and the numerical value is the workability%. In addition, A1 and A2 in the cold working step represent the first annealing and the second annealing, respectively. The numerical value is the annealing temperature ° C. In addition, when performing stress relief annealing after finish rolling, it performed at 650 degreeC for 3 minutes.

【0026】[0026]

【表1】 [Table 1]

【0027】上述した製造工程において、冷間圧延前の
素材および最終冷間圧延後の板厚中央部における(11
1)面の集合度および(311)面の集合度を測定し
た。なお、歪取り焼鈍を施したものは、歪取り焼鈍後の
試料を測定した。(111)面ならびに(311)面の
集合度は、表面および板厚の中央部までエッチングによ
り、板厚の半分を除去した中央部にてX線回折を行ない
求めた。各々の面における回折強度をIとして、以下の
式に基づいて行った。(111)%=I(111)/ΣI×10
0(ΣI=I(111)+I(200)+I(220)+I(311))(31
1)%=I(311)/ΣI×100として求めた。
In the above-described manufacturing process, the material before cold rolling and (11) in the central portion of the plate thickness after final cold rolling are used.
The aggregation degree of the 1) plane and the aggregation degree of the (311) plane were measured. In addition, the thing which performed the stress relief annealing measured the sample after stress relief annealing. The aggregation degree of the (111) plane and the (311) plane was determined by performing X-ray diffraction at the center portion where half of the plate thickness was removed by etching the surface and the center portion of the plate thickness. The diffraction intensity on each surface was defined as I, and the diffraction was performed based on the following equation. (111)% = I (111) / ΣI × 10
0 (ΣI = I (111) + I (200) + I (220) + I (311)) (31
1)% = I (311) / ΣI × 100.

【0028】[0028]

【表2】 [Table 2]

【0029】また、プレス成形性は、図4に示すよう
に、素材の元の位置8から、荷重をかけて60度曲げた
位置10として、スプリングバックにより戻った位置9
をスプリングバックの量θとしたものである。結果を表
4および表5に示す。表4および表5に示すように、す
べての材料で180HV以上の硬さが確保されている。
また、表2〜表5には、インゴットから分塊−熱間圧延
の工程を行なう従来の方法を適用した場合の例を付記し
た。
Further, as shown in FIG. 4, the press formability of the material is such that the material is bent from the original position 8 to a position 10 where it is bent by 60 degrees and a position 9 returned by spring back.
Is the amount of springback θ. The results are shown in Tables 4 and 5. As shown in Tables 4 and 5, all materials have a hardness of 180 HV or higher.
Further, Tables 2 to 5 additionally show examples in the case where the conventional method of performing the step of slab-hot rolling from an ingot is applied.

【0030】[0030]

【表3】 [Table 3]

【0031】[0031]

【表4】 [Table 4]

【0032】[0032]

【表5】 [Table 5]

【0033】表2〜表5から明らかなように、本発明で
規定する条件の連続鋳造法を適用することにより、冷間
圧延前の素材に対して、(111)面と(311)面の
集合度の高い素材を得ることが可能である。そして、冷
間圧延前に(111)面と(311)面を高くしておく
と、(111)>3%、(311)>10%を満足する
Fe−Ni系合金薄板を得ることができることがわか
る。また、連続鋳造法により、直接ストリップとする
と、(111)面の集合度が特に高くなり、冷間圧延後
においても(111)面および(311)面の高いFe
−Ni系合金薄板を得ることができることがわかる。
As is clear from Tables 2 to 5, by applying the continuous casting method under the conditions specified in the present invention, the (111) plane and the (311) plane of the material before cold rolling were applied. It is possible to obtain materials with a high degree of aggregation. Then, by raising the (111) plane and the (311) plane before cold rolling, it is possible to obtain an Fe-Ni alloy thin plate satisfying (111)> 3% and (311)> 10%. I understand. Further, if the strip is directly formed by the continuous casting method, the aggregation degree of the (111) plane becomes particularly high, and even after cold rolling, the high Fe of the (111) plane and the (311) plane are obtained.
It can be seen that a Ni-based alloy thin plate can be obtained.

【0034】また、熱間加工工程および冷間加工工程が
本発明の規定範囲をはずれる比較例においては、熱間加
工率が高すぎると、冷間圧延前において、(111)お
よび(311)面を高くすることができず、また冷間加
工率が高すぎると冷間圧延前に(111)面および(3
11)面を高くしておいても、(111)>3%、(3
11)>10%を満足することができなくなることがわ
かる。また、従来の造塊法によって製造したFe−Ni
系合金は、冷間圧延前の段階で、板厚中央部の(11
1)面および(311)面の集合度は、冷間加工の条件
を変更しても高くすることができなかった。
Further, in the comparative example in which the hot working step and the cold working step were out of the specified range of the present invention, if the hot working rate was too high, the (111) and (311) planes were obtained before cold rolling. However, if the cold working ratio is too high, (111) plane and (3
(11)> 3%, (3)
It can be seen that 11)> 10% cannot be satisfied. In addition, Fe-Ni produced by the conventional ingot making method
The alloys based on (11
The aggregation degree of the 1) plane and the (311) plane could not be increased even if the cold working conditions were changed.

【0035】表4および表5に示すスプリングバック量
およびヤング率の測定結果によれば、(111)面と
(311)面の集合度を高くできた本発明のFe−Ni
系合金においては、(111)面および(311)面の
集合度が本発明の試料よりも低い比較例の試料に比べ
て、ヤング率が高くなり、スプリングバックが少なくな
ったことがわかる。すなわち、板厚中央部の(111)
面と(311)面とを高めることが、被加工性、特に曲
げ成形における加工精度の向上に有効であることがわか
る。
According to the measurement results of the amount of springback and Young's modulus shown in Tables 4 and 5, the Fe-Ni of the present invention, in which the aggregation degree of the (111) plane and the (311) plane could be increased.
It can be seen that the alloys have higher Young's modulus and less springback than the sample of the comparative example in which the aggregation degree of the (111) plane and the (311) plane is lower than that of the sample of the present invention. That is, (111) at the center of plate thickness
It can be seen that increasing the surface and the (311) surface is effective for improving the workability, particularly the processing accuracy in bending.

【0036】[0036]

【発明の効果】本発明によれば、曲げ成形時のスプリン
グバック量を低減することが可能となる。利用の少ない
Fe−Ni系合金薄板を得ることができる。したがっ
て、特にTSOPなどの薄肉化が要求される半導体装置
に利用され、強度を確保するとともに精度の高い曲げ加
工が必要なリードフレーム材にとって極めて有効であ
る。
According to the present invention, it is possible to reduce the amount of springback during bending. It is possible to obtain a Fe-Ni alloy thin plate that is less used. Therefore, it is particularly effective for a lead frame material which is used for a semiconductor device such as TSOP which requires thinning and which requires strength and bending with high precision.

【図面の簡単な説明】[Brief description of the drawings]

【図1】リードフレーム材の加工例を示す図である。FIG. 1 is a diagram showing an example of processing a lead frame material.

【図2】ヤング率と応力−歪み線図の関係を示す図であ
る。
FIG. 2 is a diagram showing a relationship between Young's modulus and a stress-strain diagram.

【図3】連続鋳造装置の概要を示す図である。FIG. 3 is a diagram showing an outline of a continuous casting device.

【図4】スプリングバック量を測定する手法を示す説明
図である。
FIG. 4 is an explanatory diagram showing a method of measuring a springback amount.

【符号の説明】[Explanation of symbols]

1 リードフレーム、2 タブ、3 タブ吊り、4 溶
湯、5 坩堝、6 ロール 7 鋳片
1 lead frame, 2 tabs, 3 tabs hanging, 4 molten metal, 5 crucible, 6 rolls 7 cast slab

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成8年1月29日[Submission date] January 29, 1996

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】特許請求の範囲[Correction target item name] Claims

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【特許請求の範囲】[Claims]

【手続補正2】[Procedure amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0003[Correction target item name] 0003

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0003】近年、半導体素子の集積回路においては、
高集積化はもちろんであるが、電子機器のダウンサイジ
ングの動向に伴って、電子回路の高密度実装の要求が強
く、半導体素子も小型、薄型化へと移行してきている。
こうした小型、薄型化に対応した半導体パッケージとし
てはTSOP(Thin small Outline Package)が代表的
なものであり、厚さが1mm程度の薄型の素子である。こ
うした薄型パッケージにおいては、パッケージの厚さ方
向に対する寸法精度が厳しく要求され、これに伴ってリ
ードフレームの薄肉化、寸法精度の高精度化が強く要求
されるようになってきた。特に、図1に示すようにリー
ドフレーム1にシリコンチップを接合するタブ2および
タブ吊り3の部分を形成するような場合には、タブ2お
よびタブ吊り3の位置が、半導体素子を形成する上で精
度を左右してしまうため、極めて厳しい精度が要求され
る。すなわち、曲げ加工性の向上は、このような半導体
素子の形成にとって重要な課題である。
In recent years, in integrated circuits of semiconductor devices,
In addition to high integration, there is a strong demand for high-density mounting of electronic circuits with the trend of downsizing of electronic devices, and semiconductor elements are also shifting to smaller and thinner.
A TSOP (Thin small Outline Package) is a typical semiconductor package that can be made smaller and thinner, and is a thin element having a thickness of about 1 mm. In such a thin package, dimensional accuracy in the thickness direction of the package is strictly required, and accordingly, thinning of the lead frame and high dimensional accuracy have been strongly demanded. Particularly, as shown in FIG. 1, when the tab 2 and the tab suspension 3 for joining the silicon chip to the lead frame 1 are formed, the positions of the tab 2 and the tab suspension 3 are different from each other in forming the semiconductor element. Since accuracy is affected by, extremely strict accuracy is required. That is, improvement of bending workability is an important subject for forming such a semiconductor element.

【手続補正3】[Procedure 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0008[Correction target item name] 0008

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0008】そして、冷間圧延に至る前に、板厚方向の
中央部で(111)面が高くなるように調整することが
必要であり、その具体的な方法として、できるだけ薄い
スラブ連続鋳造法、または薄板連続鋳造法を適用し、凝
固進行中に表面から内部にかけての冷却をできるだけ速
やかに行なうことが有効であることを見出した。すなわ
ち、表面から中心までの凝固距離を短くして表面から内
部にかけての温度勾配を従来よりも大きく与えるのであ
る。すなわち温度勾配の連続鋳造法を適用し、凝固時に
表面から内部にかけて大きな温度勾配を与えることが有
効であることを見出した。
Before the cold rolling, it is necessary to adjust the height of the (111) plane at the central portion in the plate thickness direction. It has been found that it is effective to apply the thin plate continuous casting method to perform cooling from the surface to the inside as quickly as possible during the progress of solidification. That is, the solidification distance from the surface to the center is shortened to give a larger temperature gradient from the surface to the inside than in the conventional case. That is, it was found that it is effective to apply a continuous casting method with a temperature gradient to give a large temperature gradient from the surface to the inside during solidification.

【手続補正4】[Procedure amendment 4]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0010[Correction target item name] 0010

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0010】すなわち、本発明の製造方法は、Ni30
〜60%、残部Feを主体とする組成を有するか、また
は、前記Niの一部をCo20%以下で置換した組成を
有するFe−Ni系合金溶湯をロール対間を通して、板
厚100mm以下のスラブに鋳造し、該スラブを100
0〜1300℃の温度範囲で90%以下の加工度で熱間
加工を行ない、板厚方向中央部での結晶面の集積度が
(111)>30%、(311)>10%の組織を得た
後、80%を越えない加工度の冷間圧延と、750〜1
100℃の温度範囲での軟化焼鈍を少なくとも1回以上
実施し、最終冷間圧延後において板厚方向中央部での結
晶面の集積度が(111)>3%、(311)>10%
を満足するFe−Ni系合金薄板を得るものである。
That is, the manufacturing method of the present invention is based on Ni30
A slab having a plate thickness of 100 mm or less by passing a molten Fe-Ni alloy having a composition in which the balance is -60% and the balance Fe is the main constituent, or a composition in which a part of Ni is replaced by Co 20% or less. And cast the slab into 100
Hot working is performed at a working degree of 90% or less in the temperature range of 0 to 1300 ° C. to form a structure in which the degree of integration of crystal planes in the central portion in the plate thickness direction is (111)> 30%, (311)> 10%. After obtained, cold rolling with a working ratio not exceeding 80% and 750 to 1
After the softening annealing in the temperature range of 100 ° C. is performed at least once, the integration degree of the crystal planes in the central portion in the plate thickness direction after the final cold rolling is (111)> 3%, (311)> 10%.
A Fe-Ni alloy thin plate satisfying the above is obtained.

【手続補正5】[Procedure Amendment 5]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0011[Correction target item name] 0011

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0011】また、上述の製造方法は、いったん板厚が
100mm以下という薄めのスラブを製造し、熱間加工
を施すものであるが、上述組成のFe−Ni系合金溶湯
をロール対間を通して、板厚10mm以下、板厚方向中
央部での結晶面の集積度が(111)>30%、(31
1)>10%、の組織を有するストリップに鋳造し(す
なわち、薄板連続鋳造法である)、該ストリップを80
%を越えない加工度の冷間圧延と、750〜1100℃
の温度範囲での軟化焼鈍を少なくとも1回以上実施し、
最終冷間圧延後において板厚方向中央部での結晶面の集
積度が(111)>3%、(311)>10%を満足す
るFe−Ni系合金薄板を得ても良い。
In the above-mentioned manufacturing method, a thin slab having a plate thickness of 100 mm or less is once manufactured and hot working is carried out. The molten Fe-Ni alloy having the above-mentioned composition is passed between the roll pairs. The plate thickness is 10 mm or less, and the degree of integration of crystal planes in the central portion in the plate thickness direction is (111)> 30%, (31
1) Cast into a strip having a texture of> 10% (i.e. thin sheet continuous casting) and strip 80
Cold rolling with a workability not exceeding%, and 750 to 1100 ° C
Softening annealing in the temperature range of at least once,
After the final cold rolling, a Fe-Ni alloy thin plate may be obtained in which the degree of integration of crystal planes in the central portion in the plate thickness direction satisfies (111)> 3% and (311)> 10%.

【手続補正6】[Procedure correction 6]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0012[Correction target item name] 0012

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0012】なお、上述した製造方法の工程に加えて、
最終冷間圧延後に、500〜750℃の温度範囲におい
て歪取り焼鈍を行い、(111)>3%、(311)>
10%を満足するようにしても良い。上述した製造方法
により、Ni30〜60%、残部Feを主体とするか、
または、前記Niの一部をCo20%以下で置換した組
成を有し、ビッカース硬さが160HV以上であって板
厚方向中央部での結晶面の集積度が(111)>3%、
(311)>10%を満足する被加工性に優れたFe−
Ni系合金薄板を得ることができる。好ましくは、ビッ
カース硬さを180HV以上とする。
In addition to the steps of the manufacturing method described above,
After the final cold rolling, strain relief annealing is performed in the temperature range of 500 to 750 ° C., and (111)> 3%, (311)>
You may make it satisfy 10%. According to the above-mentioned manufacturing method, Ni30 to 60% and the balance Fe are mainly used,
Alternatively, it has a composition in which a part of Ni is replaced by Co 20% or less, the Vickers hardness is 160 HV or more, and the degree of integration of crystal planes in the central portion in the plate thickness direction is (111)> 3%,
(311)> 10% and excellent in workability Fe-
A Ni-based alloy thin plate can be obtained. Preferably, the Vickers hardness is 180 HV or higher.

【手続補正7】[Procedure amendment 7]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0036[Correction target item name] 0036

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0036】[0036]

【発明の効果】本発明によれば、曲げ成形時のスプリン
グバック量を低減することが可能となる。したがって、
特にTSOPなどの薄肉化が要求される半導体装置に利
用され、強度を確保するとともに精度の高い曲げ加工が
必要なリードフレーム材にとって極めて有効である。
According to the present invention, it is possible to reduce the amount of springback during bending. Therefore,
In particular, it is used for a semiconductor device such as TSOP which is required to be thin, and is extremely effective for a lead frame material that requires strength and also has a highly accurate bending process.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 萩原 弘之 埼玉県熊谷市三ヶ尻6010番地 日立金属株 式会社生産システム研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyuki Hagiwara 6010 Mikkajiri, Kumagaya-shi, Saitama Hitachi Metals Co., Ltd.

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 Ni30〜60%、残部Feを主体とす
る組成を有し、ビッカース硬さが160HV以上であっ
て、板厚方向中央部での結晶面の集積度が(111)>
3%、(311)>10%を満足することを特徴とする
被加工性に優れたFe−Ni系合金薄板。
1. A composition having Ni of 30 to 60% and a balance of Fe as a main component, a Vickers hardness of 160 HV or more, and a degree of integration of crystal planes in the central portion in the thickness direction of (111)>.
A Fe-Ni alloy thin plate having excellent workability, characterized by satisfying 3% and (311)> 10%.
【請求項2】 Niの一部を、Co20%以下で置換し
たことを特徴とする請求項1に記載の被加工性に優れた
Fe−Ni系合金薄板。
2. The Fe—Ni alloy thin plate excellent in workability according to claim 1, wherein a part of Ni is replaced by Co of 20% or less.
【請求項3】 Ni30〜60%、残部Feを主体とす
る組成を有するか、または、前記Niの一部をCo20
%で置換した組成を有するFe−Ni系合金溶湯をロー
ル対間を通して、板厚100mm以下のスラブに鋳造
し、該スラブを1000〜1300℃の温度範囲で90
%以下の加工度で熱間加工を行ない、板厚方向中央部で
の結晶面の集積度が(111)>30%、(311)>
10%の組織を得た後、80%を越えない加工度の冷間
圧延と、750〜1100℃の温度範囲での軟化焼鈍を
少なくとも1回以上実施し、最終冷間圧延後において板
厚方向中央部での結晶面の集積度が(111)>3%、
(311)>10%を満足するFe−Ni系合金薄板を
得ることを特徴とする被加工性に優れたFe−Ni系合
金薄板の製造方法。
3. A composition mainly composed of Ni of 30 to 60% and the balance of Fe, or a part of the Ni of Co20.
% Of the Fe-Ni alloy having a composition replaced by% is cast into a slab having a plate thickness of 100 mm or less, and the slab is cast in a temperature range of 1000 to 1300 ° C.
%, The degree of integration of crystal planes in the central portion in the plate thickness direction is (111)> 30%, (311)>
After obtaining a 10% microstructure, cold rolling with a workability not exceeding 80% and softening annealing in the temperature range of 750 to 1100 ° C are carried out at least once, and after the final cold rolling, the thickness direction The degree of integration of crystal planes in the central part is (111)> 3%,
(311)> A method for producing an Fe-Ni alloy thin plate having excellent workability, characterized in that an Fe-Ni alloy thin plate satisfying 10% is obtained.
【請求項4】 Ni30〜55%、残部Feを主体とす
る組成を有するか、または、前記Niの一部をCo20
%で置換した組成を有するFe−Ni系合金溶湯をロー
ル対間を通して、板厚10mm以下、板厚方向中央部で
の結晶面の集積度が(111)>30%、(311)>
10%の組織を有するストリップに鋳造し、該ストリッ
プを80%を越えない加工度の冷間圧延と、750〜1
100℃の温度範囲での軟化焼鈍を少なくとも1回以上
実施し、最終冷間圧延後において板厚方向中央部での結
晶面の集積度が(111)>3%、(311)>10
%、を満足するFe−Ni系合金薄板を得ることを特徴
とする被加工性に優れたFe−Ni系合金薄板の製造方
法。
4. A composition mainly composed of Ni of 30 to 55% and the balance of Fe, or a part of the Ni of Co20.
% Of the Fe-Ni alloy having a composition replaced by%, the plate thickness is 10 mm or less, and the degree of integration of crystal planes at the center portion in the plate thickness direction is (111)> 30%, (311)>.
Cast into a strip having a structure of 10%, cold-rolling the strip to a workability not exceeding 80%, and 750 to 1
The softening annealing is performed at least once in the temperature range of 100 ° C., and after the final cold rolling, the degree of integration of crystal planes in the central portion in the plate thickness direction is (111)> 3%, (311)> 10.
%, An Fe-Ni alloy thin plate satisfying the following conditions is obtained: A method for manufacturing an Fe-Ni alloy thin plate having excellent workability.
【請求項5】 最終冷間圧延後、500〜750℃の温
度範囲において歪取り焼鈍を行い、(111)>3%、
(311)>10%を満足するFe−Ni系合金薄板を
得ることを特徴とする請求項3または請求項4に記載の
被加工性に優れたFe−Ni系合金薄板の製造方法。
5. After the final cold rolling, strain relief annealing is performed in a temperature range of 500 to 750 ° C., and (111)> 3%,
(311)> 10% of Fe-Ni system alloy thin plate which satisfy | fills is obtained, The manufacturing method of the Fe-Ni system alloy thin plate excellent in workability of Claim 3 or Claim 4 characterized by the above-mentioned.
JP31040895A 1995-11-29 1995-11-29 Fe-Ni-based alloy sheet having excellent workability and method for producing the same Expired - Lifetime JP3518707B2 (en)

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JP31040895A JP3518707B2 (en) 1995-11-29 1995-11-29 Fe-Ni-based alloy sheet having excellent workability and method for producing the same

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Application Number Priority Date Filing Date Title
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Publication Number Publication Date
JPH09143627A true JPH09143627A (en) 1997-06-03
JP3518707B2 JP3518707B2 (en) 2004-04-12

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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001038594A1 (en) * 1999-11-25 2001-05-31 Nippon Mining & Metals Co., Ltd. Fe-Ni BASED ALLOY FOR SEMI-TENSION MASK EXCELLENT IN MAGNETIC CHARACTERISTICS, AND SEMI-TENSION MASK AND COLOR CATHODE-RAY TUBE USING THE SAME
WO2013120146A1 (en) * 2012-02-17 2013-08-22 The Crucible Group Ip Pty Limited Casting iron based speciality alloy

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001038594A1 (en) * 1999-11-25 2001-05-31 Nippon Mining & Metals Co., Ltd. Fe-Ni BASED ALLOY FOR SEMI-TENSION MASK EXCELLENT IN MAGNETIC CHARACTERISTICS, AND SEMI-TENSION MASK AND COLOR CATHODE-RAY TUBE USING THE SAME
US6600259B1 (en) 1999-11-25 2003-07-29 Nippon Mining & Metals Co., Ltd. Fe-Ni alloy with excellent magnetic properties for semi-tension mask, semi-tension mask of the alloy, and color picture tube using the mask
WO2013120146A1 (en) * 2012-02-17 2013-08-22 The Crucible Group Ip Pty Limited Casting iron based speciality alloy
CN104602843A (en) * 2012-02-17 2015-05-06 迪肯大学 Casting iron based speciality alloy

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