JPH09115453A - Electron gun using cold cathode - Google Patents
Electron gun using cold cathodeInfo
- Publication number
- JPH09115453A JPH09115453A JP29195895A JP29195895A JPH09115453A JP H09115453 A JPH09115453 A JP H09115453A JP 29195895 A JP29195895 A JP 29195895A JP 29195895 A JP29195895 A JP 29195895A JP H09115453 A JPH09115453 A JP H09115453A
- Authority
- JP
- Japan
- Prior art keywords
- cold cathode
- substantially cylindrical
- cylindrical insulator
- electron gun
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Microwave Tubes (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は直線ビームを用いる
マイクロ波管等の電子源として使用される電子銃に関
し、特に冷陰極を用いた電子銃構体に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electron gun used as an electron source for a microwave tube or the like using a straight beam, and more particularly to an electron gun assembly using a cold cathode.
【０００２】[0002]
【従来の技術】従来のマイクロ波管は電子銃構体を構成
する陰極として熱陰極を用いていた。2. Description of the Related Art A conventional microwave tube uses a hot cathode as a cathode constituting an electron gun assembly.
【０００３】図４に、代表的なマイクロ波管の一種であ
るヘリックス形進行波管について、その断面構造を示
す。図４を参照して、その動作原理を以下に説明する。FIG. 4 shows a cross-sectional structure of a helix type traveling wave tube which is a typical type of microwave tube. The principle of operation will be described below with reference to FIG.
【０００４】電子銃部５０１に内蔵される通常負の電位
に設定される陰極５０２から電子ビーム５０３が射出さ
れ、射出された電子ビーム５０３はヘリックス電位（通
常接地電位）により加算されながら遅波回路部５０６に
至る。このとき、陰極５０２から出た電子ビーム５０３
は集束電極５０４により所定のビーム径に集束される。An electron beam 503 is emitted from a cathode 502 built in the electron gun section 501 and normally set to a negative potential, and the emitted electron beam 503 is added by a helix potential (usually ground potential) while being delayed by a wave delay circuit. To section 506. At this time, the electron beam 503 emitted from the cathode 502
Is focused to a predetermined beam diameter by the focusing electrode 504.
【０００５】遅波回路部５０６において、電子ビーム５
０３は周期永久磁界発生装置５０５により集束された状
態を維持し遅波回路部５０６を通過する。この際、高周
波入力部５０７より入力されたマイクロ波がヘリックス
中を通過するときの軸方向速度と比較して電子ビーム５
０３の軸方向速度が若干遅くなるように陰極５０２の電
位が選択される。In the slow wave circuit unit 506, the electron beam 5
Reference numeral 03 maintains the state of being focused by the periodic permanent magnetic field generator 505, and passes through the slow wave circuit unit 506. At this time, the microwave input from the high-frequency input unit 507 is compared with the axial velocity when passing through the helix, and the electron beam 5
The potential of cathode 502 is selected so that the axial velocity of 03 is slightly slower.
【０００６】電子ビーム５０３は遅波回路部５０６にお
いてマイクロ波と連続的に相互作用を起こし電子ビーム
５０３のエネルギーによりマイクロ波は増幅されて高周
波出力部５０９より取り出される。The electron beam 503 continuously interacts with the microwave in the slow wave circuit unit 506, and the microwave is amplified by the energy of the electron beam 503 and is extracted from the high frequency output unit 509.
【０００７】その後、電子ビーム５０３は電子ビーム５
０３の捕捉用の電極であるコレクタ電極５０８に捕捉さ
れる。After that, the electron beam 503 is changed to the electron beam 5.
03 is captured by the collector electrode 508 which is an electrode for capturing.
【０００８】この場合、電子銃部５０１の基本構造は、
図５に示すように、熱陰極１０２を第１段付き円筒形金
属体１１８に接合し、第１段付き円筒形金属体１１８を
第２段付き円筒形金属体１１７に接合する。In this case, the basic structure of the electron gun 501 is
As shown in FIG. 5, the hot cathode 102 is joined to the first stepped cylindrical metal body 118, and the first stepped cylindrical metal body 118 is joined to the second stepped cylindrical metal body 117.
【０００９】さらに、第２段付き円筒形金属体１１７は
カソード電極１１１に接合された集束電極１１９に接合
される。この時、熱陰極１０２に内蔵されたヒータのリ
ード線のうち、第１ヒータリード線１２１は第２段付き
円筒形金属体１１７に接続される。Further, the second stepped cylindrical metal body 117 is joined to the focusing electrode 119 joined to the cathode electrode 111. At this time, among the lead wires of the heater built in the hot cathode 102, the first heater lead wire 121 is connected to the second stepped cylindrical metal body 117.
【００１０】カソード電極１１１の両側には、アノード
電極１１３及び後述するヒータ電極１２２との絶縁を保
つために円筒形絶縁体１１２、１１２′が配置される。Cylindrical insulators 112 and 112 'are arranged on both sides of the cathode electrode 111 in order to maintain insulation between the anode electrode 113 and a heater electrode 122 which will be described later.
【００１１】この一方の絶縁体（円筒形絶縁体１１
２′）のカソード電極１１１とは反対側に配置されたア
ノード電極１１３には円筒形金属１１４及びアノード電
極板１１５が接合される。This one insulator (cylindrical insulator 11
The cylindrical metal 114 and the anode electrode plate 115 are joined to the anode electrode 113 arranged on the side opposite to the cathode electrode 111 of 2 ').
【００１２】カソード電極１１１に接合されたもう一つ
の円筒形絶縁体１１２のカソード電極１１１と接合され
る側と反対側にはヒータ電極１２２が接合され、ヒータ
電極１２２に熱陰極１０２に内蔵されたヒータのリード
線のうち、第２ヒータリード線１２０が接続される。さ
らに、ヒータ電極１２２の端部には封止用金属部品１２
３が接合される。A heater electrode 122 is joined to the side of the other cylindrical insulator 112 joined to the cathode electrode 111 opposite to the side joined to the cathode electrode 111, and the heater electrode 122 is incorporated in the hot cathode 102. Of the heater lead wires, the second heater lead wire 120 is connected. Further, the end of the heater electrode 122 has a metal part 12 for sealing.
3 are joined.
【００１３】さらに、アノード電極１１３には、高周波
回路部と電子銃部を接合するために円筒形絶縁体１１
２″が接合され、円筒形絶縁体１１２″の端部には封入
皿１１６が取り付けられる。Further, the cylindrical insulator 11 is connected to the anode electrode 113 in order to join the high frequency circuit section and the electron gun section.
2 ″ is joined, and a sealing dish 116 is attached to the end of the cylindrical insulator 112 ″.
【００１４】図６は、文献（新井その他、「電界放射冷
陰極アレイを用いた高効率マイクロ波逓倍増幅管」、信
学技法、ＥＤ９３−１４２、（１９９３−１２）、第５
５〜６０頁、電子情報通信学会、１９９３年）に記載さ
れた、ゲート電極の無い冷陰極を用いたマイクロ波逓倍
増管の電子銃構体の構造を示している。FIG. 6 is a document (Arai et al., "High-efficiency microwave multiplier tube using a field emission cold cathode array", SIG 93-142, (1993-3), No. 5).
5 shows a structure of an electron gun assembly of a microwave multiplier tube using a cold cathode without a gate electrode, which is described in pp. 5-60, Institute of Electronics, Information and Communication Engineers, 1993).
【００１５】図６において、２０１はゲート電極の無い
冷陰極、２０２はコレクタ、２０３は出力空洞、２０４
は絶縁体、２０５は陰極空洞、２０６は高周波入力部、
２０７は高周波出力部、２０８は水冷パイプをそれぞれ
示している。In FIG. 6, 201 is a cold cathode without a gate electrode, 202 is a collector, 203 is an output cavity, and 204.
Is an insulator, 205 is a cathode cavity, 206 is a high frequency input section,
Reference numeral 207 represents a high frequency output unit, and 208 represents a water cooling pipe.
【００１６】なお、図６に示す従来の電子銃構体は、進
行波管に使用する細いビームを取り出すためのものでは
なく、高周波電圧を陰極空洞２０５中に発生させ、ゲー
ト電極の無い冷陰極２０１面で得られる比較的高い高周
波電圧により、冷陰極２０１から電子を放射させるため
の構造である。この電子銃構体では、冷陰極２０１から
の放射電子をゲート電極により制御する構造ではないた
め、ゲート電位を引き出すための電極構成が存在しな
い。また、陰極から放出された電子を細い電子ビームと
するための集束電極もなく、進行波管に使用するための
電子銃構造とは電極構成が違い、電極を取り出す構造が
大きく異なっている。The conventional electron gun structure shown in FIG. 6 is not for extracting a narrow beam used for a traveling wave tube, but for generating a high frequency voltage in the cathode cavity 205, and for the cold cathode 201 without a gate electrode. This is a structure for emitting electrons from the cold cathode 201 by a relatively high high-frequency voltage obtained on the surface. Since this electron gun structure does not have a structure in which the emitted electrons from the cold cathode 201 are controlled by the gate electrode, there is no electrode structure for drawing out the gate potential. Further, there is no focusing electrode for making the electrons emitted from the cathode into a narrow electron beam, and the electrode structure is different from the electron gun structure used for the traveling wave tube, and the structure for taking out the electrode is greatly different.
【００１７】図７は、特開昭５１−５６１７０号公報に
記載される電極構体の構造を示している。図７におい
て、２１０はピン、２１１はゲート電極、２１２はエミ
ッタ、２１３はリード線、２１４は金属薄膜、２１５は
基板をそれぞれ示している。FIG. 7 shows the structure of the electrode structure disclosed in Japanese Patent Laid-Open No. 51-56170. In FIG. 7, 210 is a pin, 211 is a gate electrode, 212 is an emitter, 213 is a lead wire, 214 is a metal thin film, and 215 is a substrate.
【００１８】図７に示す従来の電極構体においては、冷
陰極のゲート電位を供給するために基板２１５にピン２
１０を埋設し、このピン２１０を通してゲート電極２１
１に給電する。この従来の電極構体は、ゲート電極２１
１に給電する場合に、ゲート電極２１１の表面上にリー
ド線２１３を取り付ける際の接触抵抗を下げるためにゲ
ート電極２１１上に金属薄膜２１４を生成したものであ
る。In the conventional electrode structure shown in FIG. 7, a pin 2 is provided on the substrate 215 to supply the gate potential of the cold cathode.
10 is buried and the gate electrode 21 is provided through this pin 210.
Power 1. This conventional electrode structure has a gate electrode 21.
In order to reduce the contact resistance when attaching the lead wire 213 on the surface of the gate electrode 211 when power is supplied to the first electrode 211, the metal thin film 214 is formed on the gate electrode 211.
【００１９】この従来の電極構体は、冷陰極素子そのも
ののゲート電極の給電方法に関するものであり、冷陰極
を用いた電子銃構体の構造に関するものではないが、構
成要素全体が真空容器内に構成されるため給電用のピン
２１０と基板２１５の間は気密封止されておらず、真空
内から真空容器外へ電極を取り出すためには使用するこ
とができない。また、真空容器を兼ねた電極取り出し構
造とするためには、カソード電位の取り出し方法とゲー
ト電位の取り出し方法がともにピン形状とされており、
リード線２１３によりゲート電極２１１に電位が供給さ
れているため、集束電極の固定を行なうことができな
い。This conventional electrode structure relates to a method for supplying power to the gate electrode of the cold cathode element itself, and does not relate to the structure of the electron gun structure using the cold cathode, but all the constituent elements are constructed in a vacuum container. Therefore, the power supply pin 210 and the substrate 215 are not hermetically sealed, and cannot be used to take out the electrode from the vacuum to the outside of the vacuum container. Further, in order to have an electrode lead-out structure that also serves as a vacuum container, both the cathode potential take-out method and the gate potential take-out method are pin-shaped,
Since the potential is supplied to the gate electrode 211 by the lead wire 213, the focusing electrode cannot be fixed.
【００２０】[0020]
【発明が解決しようとする課題】上記の如く、従来の熱
陰極を用いたマイクロ波管の従来の電子銃構体は、カソ
ードを高温に加熱するためのヒータを保有しており、こ
のため構造が複雑であり、また部品点数も多く、組立方
法が複雑である。As described above, the conventional electron gun assembly of the microwave tube using the conventional hot cathode has a heater for heating the cathode to a high temperature, and therefore the structure is It is complicated, the number of parts is large, and the assembling method is complicated.
【００２１】また、電子銃構体の周囲には高電圧が印加
されているため、電子銃構体の周囲を絶縁体で覆い接地
電位との絶縁を図ることが必要とされ、このため電子銃
が大型化する（小型化が困難である）という問題点があ
った。Since a high voltage is applied to the periphery of the electron gun structure, it is necessary to cover the periphery of the electron gun structure with an insulator to insulate it from the ground potential. However, there is a problem in that it is difficult to miniaturize.
【００２２】マイクロ波管は、半導体増幅器と比較し
て、出力が高いだけでなく効率も高いという利点を有す
るが、体積が大きく、熱陰極によって決まる寿命が有る
という問題点を有している。The microwave tube has an advantage that not only the output is high but also the efficiency is high as compared with the semiconductor amplifier, but it has a problem that it has a large volume and has a life determined by the hot cathode.
【００２３】そこで、近年半永久的に動作するであろう
冷陰極を用いて、且つ小型・軽量のマイクロ波管の実現
が望まれている。Therefore, in recent years, it has been desired to realize a compact and lightweight microwave tube using a cold cathode which will operate semipermanently.
【００２４】マイクロ波管の小型化を実現するためには
当然、マイクロ波管の電子銃部においても同様の必要性
が求められている。マイクロ波管の電子銃の場合、電子
を射出するための陰極（通常負の高電圧）、電子を加速
するための陽極（通常接地電位）を絶縁する必要があ
り、冷陰極を陰極に用いた場合、冷陰極を構成するエミ
ッタ電極、ゲート電極と陽極とのそれぞれの絶縁が必要
となる。In order to realize the miniaturization of the microwave tube, the electron gun section of the microwave tube is naturally required to have the same requirements. In the case of an electron gun of a microwave tube, it is necessary to insulate the cathode for ejecting electrons (usually a negative high voltage) and the anode for accelerating electrons (usually ground potential), and a cold cathode was used for the cathode. In this case, it is necessary to insulate the emitter electrode, the gate electrode and the anode, which form the cold cathode, from each other.
【００２５】そして、電子銃の小型化をはかるために
は、構造の単純化及び安定に製造するための製造方法の
簡単な構造が要求される。In order to miniaturize the electron gun, a simple structure and a simple structure for a stable manufacturing method are required.
【００２６】しかし、図４に示される上記従来の熱陰極
を用いたマイクロ波管の電子銃構造、において、熱陰極
部を単に冷陰極構体で置換したマイクロ波管の電子銃で
は、各電極を電子銃の径方向に取り出すために接地電位
との絶縁をはかるために電子銃部の周囲に絶縁体を配置
することが必要とされ、小型化をはかることは極めて困
難である。However, in the microwave gun electron gun structure using the conventional hot cathode shown in FIG. 4, in the microwave gun electron gun in which the hot cathode portion is simply replaced by the cold cathode structure, each electrode is In order to take out the electron gun in the radial direction, it is necessary to dispose an insulator around the electron gun in order to insulate it from the ground potential, and it is extremely difficult to reduce the size.
【００２７】そして、冷陰極を用いたマイクロ波管の電
子銃部の電極取り出し構造が単純で容易に製造可能な小
型の電子銃を実現しようとする場合、図６及び図７に示
した上記従来の技術においては下記の問題点を有する。In order to realize a small-sized electron gun having a simple electrode lead-out structure of the electron gun portion of the microwave tube using the cold cathode, which is easy to manufacture, the conventional method shown in FIGS. 6 and 7 is used. The above technology has the following problems.
【００２８】図６に示される従来構造においては、陰極
空洞中の冷陰極は接地電位となっており、通常のマイク
ロ波管のように冷陰極と接地電位であるヘリックス電位
を絶縁する必要のある場合には明らかに不適である。In the conventional structure shown in FIG. 6, the cold cathode in the cathode cavity is at ground potential, and it is necessary to insulate the cold cathode and the helix potential, which is ground potential, like an ordinary microwave tube. The case is obviously unsuitable.
【００２９】また、図７に示される従来構造は冷陰極に
おけるゲート電極への給電方法に関する構造であり、マ
イクロ波管の真空気密性を兼ね備えた電子銃に冷陰極を
搭載するための支持構造、絶縁構造及び給電方法に関す
るものである。The conventional structure shown in FIG. 7 relates to a method for supplying power to the gate electrode in the cold cathode, and is a support structure for mounting the cold cathode in an electron gun having the vacuum airtightness of the microwave tube. The present invention relates to an insulating structure and a power feeding method.
【００３０】従って、本発明の目的は、冷陰極を用いた
マイクロ波管の電子銃部の電極取り出し構造が単純で製
造方法が容易な小型の電子銃を提供することにある。Therefore, an object of the present invention is to provide a small-sized electron gun having a simple electrode extraction structure of the electron gun portion of a microwave tube using a cold cathode and an easy manufacturing method.
【００３１】[0031]
【課題を解決するための手段】前記目的を達成するた
め、本発明は、電子を射出するエミッタ電極とゲート電
極を含み真空中で動作する冷陰極を有する電子銃におい
て、第１の略円筒形状の絶縁体の内径部と当接して配設
されると共に軸方向に拡延されてなる導電部材の基部に
前記冷陰極が配設され、前記導電部材を介して前記冷陰
極の前記エミッタ電位が真空外に取り出され、前記第１
の略円筒形状の絶縁体は第２の略円筒形状の絶縁体と当
接し、該当接部の導体層を通して前記冷陰極のゲート電
位が真空外に取り出され、前記第１の略円筒形状の絶縁
体が前記冷陰極の前記エミッタ電極と前記ゲート電極と
を互いに絶縁し、前記第２の略円筒形状の絶縁体が前記
冷陰極と接地電位との絶縁を行うことを特徴とする電子
銃を提供する。In order to achieve the above object, the present invention provides an electron gun having a cold cathode including an emitter electrode for emitting electrons and a gate electrode and operating in a vacuum, which has a first substantially cylindrical shape. The cold cathode is disposed at the base of a conductive member which is disposed in contact with the inner diameter of the insulator and is expanded in the axial direction, and the emitter potential of the cold cathode is vacuumed through the conductive member. Taken out and said first
Of the substantially cylindrical insulator is in contact with the second substantially cylindrical insulator, the gate potential of the cold cathode is taken out of the vacuum through the conductor layer of the contact portion, and the first substantially cylindrical insulator An electron gun characterized in that a body insulates the emitter electrode and the gate electrode of the cold cathode from each other, and the second substantially cylindrical insulator insulates the cold cathode from the ground potential. To do.
【００３２】また、本発明は、電子を射出するエミッタ
電極とゲート電極を含み真空中で動作する冷陰極を有す
る電子銃において、前記冷陰極は、第１の略円筒形状の
絶縁体に気密接合されてなる金属導体の一側に配設さ
れ、該金属導体を介して前記冷陰極の前記エミッタ電位
が真空外に取り出されるとともに、前記第１の略円筒形
状の絶縁体は第２の略円筒形状の絶縁体に気密接合さ
れ、前記第１及び第２の略円筒形状の絶縁体の該接合部
の導体層を通して前記冷陰極のゲート電位が真空外に取
り出され、前記第１の略円筒形状の絶縁体が前記冷陰極
の前記エミッタ電極と前記ゲート電極とを互いに絶縁
し、前記第２の略円筒形状の絶縁体が前記冷陰極と接地
電極との絶縁を行うことを特徴とする電子銃を提供す
る。Further, according to the present invention, in an electron gun having a cold cathode including an emitter electrode for emitting electrons and a gate electrode and operating in a vacuum, the cold cathode is hermetically bonded to a first substantially cylindrical insulator. Is disposed on one side of the metal conductor, and the emitter potential of the cold cathode is taken out of the vacuum through the metal conductor, and the first substantially cylindrical insulator is the second substantially cylindrical body. Air-tightly joined to a shaped insulator, and the gate potential of the cold cathode is taken out of the vacuum through the conductor layer of the joint of the first and second substantially cylindrical shaped insulators to form the first substantially cylindrical shape. Electron insulator insulates the emitter electrode and the gate electrode of the cold cathode from each other, and the second substantially cylindrical insulator insulates the cold cathode from the ground electrode. I will provide a.
【００３３】すなわち、本発明に係る冷陰極を用いたマ
イクロ波管の電子銃構体は、電子を射出するエミッタ電
極並びにゲート電極を有した冷陰極と、冷陰極を支持す
る支持体と、マイクロ波管の電子銃構体に印加される陰
極電位、エミッタ電位、ゲート電位のそれぞれの電極を
分離するための複数の絶縁体と該絶縁体に施されたメタ
ライズ層を有するマイクロ波管の電子銃であって、冷陰
極は第１の円筒形絶縁体の内径部を貫通して設けられた
棒状金属導体上に位置し、メタライズ層は第１の円筒形
絶縁体の外径側及び冷陰極とは反対側の端面側と第２の
円筒形絶縁体の片側端面に形成されたものであるか、或
いは第１の円筒形絶縁体の外径側と第２の円筒形絶縁体
の内径部に形成されたものであって、第２の円筒形絶縁
体はメタライズ層を介して第１の円筒形絶縁体に接合さ
れたものである。That is, an electron gun assembly of a microwave tube using a cold cathode according to the present invention has a cold cathode having an emitter electrode for emitting electrons and a gate electrode, a support for supporting the cold cathode, and a microwave. A microwave tube electron gun having a plurality of insulators for separating respective electrodes of a cathode potential, an emitter potential, and a gate potential applied to the electron gun structure of the tube and a metallized layer applied to the insulators. And the cold cathode is located on the rod-shaped metal conductor provided so as to penetrate the inner diameter portion of the first cylindrical insulator, and the metallization layer is opposite to the outer diameter side of the first cylindrical insulator and the cold cathode. Side end surface side and one side end surface of the second cylindrical insulator, or formed on the outer diameter side of the first cylindrical insulator and the inner diameter portion of the second cylindrical insulator. And the second cylindrical insulator is a metallization layer Through and in which is joined to the first cylindrical insulator.
【００３４】[0034]
【作用】本発明による冷陰極を用いたマイクロ波管の電
子銃構体では、エミッタ電極、ゲート電極が同軸形状を
なして真空外に取り出され、且つ第２の円筒形絶縁体が
接地電位であるヘリックス電位との絶縁を担い、電子銃
の外周部はヘリックス電位（接地電位）となるため、電
子銃外周部とヘリックス電位（接地電位）の絶縁を図る
必要が無い。In the electron gun assembly of the microwave tube using the cold cathode according to the present invention, the emitter electrode and the gate electrode have a coaxial shape and are taken out of the vacuum, and the second cylindrical insulator is at the ground potential. It is necessary to insulate the outer circumference of the electron gun from the helix potential (ground potential) because the outer circumference of the electron gun is held at the helix potential (ground potential) by providing insulation from the helix potential.
【００３５】また、電極取り出し構造が同軸形状となっ
ていることで、電子銃構造が小型化し、冷陰極の支持構
造が簡単になり電子銃構体の構造そのものが簡素化さ
れ、部品点数も少ない簡単な構造となる。Further, since the electrode lead-out structure is coaxial, the electron gun structure is downsized, the cold cathode supporting structure is simplified, the structure of the electron gun assembly itself is simplified, and the number of parts is small. It becomes a simple structure.
【００３６】[0036]
【発明の実施の形態】本発明の実施の形態を図面を参照
して以下に説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.
【００３７】[0037]
【実施形態１】図１は、本発明の第１の実施の形態に係
る、冷陰極を用いたマイクロ波管の電子銃の断面を示す
図である。First Embodiment FIG. 1 is a diagram showing a cross section of an electron gun of a microwave tube using a cold cathode according to a first embodiment of the present invention.
【００３８】図１を参照して、本実施形態に係るマイク
ロ波管の電子銃構体は、電子を射出するエミッタ電極と
ゲート電極を含み例えば１×１０-5（Ｐａ）よりも高い
真空内で動作する冷陰極１と、冷陰極１を皿部２１ａで
接合する金属導体２と、を有し、この金属導体２は、第
１円筒形絶縁体３の内周部に形成されたメタライズ層３
１ｂを介して第１円筒形絶縁体３と気密接合されてい
る。Referring to FIG. 1, the electron gun assembly of the microwave tube according to the present embodiment includes an emitter electrode for emitting electrons and a gate electrode, for example, in a vacuum higher than 1 × 10 −5 (Pa). It has a working cold cathode 1 and a metal conductor 2 that joins the cold cathode 1 with a dish portion 21 a. The metal conductor 2 is a metallization layer 3 formed on the inner peripheral portion of the first cylindrical insulator 3.
It is airtightly joined to the first cylindrical insulator 3 via 1b.
【００３９】また、第１円筒形絶縁体３の第２円筒形絶
縁体４に当接する面（接合面）に形成されたメタライズ
層３１ｃと、第２円筒形絶縁体４の第１円筒形絶縁体３
に当接する面に形成されたメタライズ層４１ｃを介して
気密接合された第１円筒形絶縁体３、及び第２円筒形絶
縁体４と、を備え、さらに真空外囲器を構成するための
円筒形金属（「円筒の真空外囲器」ともいう）５、及び
第１の段付き円筒形金属６と、ゲート電極用円筒形金属
７と、冷陰極１から射出された電子を集束するための集
束電極８と、集束電極８を支持するために第１円筒形絶
縁体３の外周部に設けられたメタライズ層３１ａを介し
て接合された第２の段付き円筒形金属９と、冷陰極１の
ゲート電極と第２の段付き円筒形金属９に両端を接合さ
れた金属線１０と、を備えている。In addition, the metallization layer 31c formed on the surface (joint surface) of the first cylindrical insulator 3 that contacts the second cylindrical insulator 4 and the first cylindrical insulation of the second cylindrical insulator 4 Body 3
A cylinder for forming a vacuum envelope, further comprising a first cylindrical insulator 3 and a second cylindrical insulator 4 which are airtightly bonded to each other via a metallized layer 41c formed on the surface abutting against Shaped metal (also referred to as “cylindrical vacuum envelope”) 5, first stepped cylindrical metal 6, gate electrode cylindrical metal 7, and for focusing electrons emitted from cold cathode 1 The cold cathode 1 and the focusing electrode 8, the second stepped cylindrical metal 9 bonded to the focusing electrode 8 via the metallization layer 31a provided on the outer periphery of the first cylindrical insulator 3 to support the focusing electrode 8. And a metal wire 10 having both ends joined to the second stepped cylindrical metal 9.
【００４０】通常、マイクロ波管用電子銃の冷陰極とし
ては、図８に示すような電界放出型冷陰極を用いること
が考えられる。Usually, as the cold cathode of the electron gun for microwave tubes, it is possible to use a field emission cold cathode as shown in FIG.
【００４１】図８を参照して、電界放出型冷陰極は、シ
リコン基板５１の上に絶縁層５２を介して形成されたゲ
ート電極５３とシリコン基板５１上にモリブデンの金属
を積層させて形成したエミッタ５４から構成されてい
る。この冷陰極は、半導体製造技術を用いて容易に製造
することが可能になりつつあり、また例えば１０ｍＡ以
上の電流が１０Ａ／ｃｍ2以上の電流密度で得られるこ
とから、本実施例に係るマイクロ波管用電子銃の冷陰極
として充分に適用可能である。Referring to FIG. 8, the field emission cold cathode is formed by stacking a metal of molybdenum on the gate electrode 53 formed on the silicon substrate 51 via the insulating layer 52 and the silicon substrate 51. It is composed of an emitter 54. This cold cathode can be easily manufactured by using semiconductor manufacturing technology, and since a current of 10 mA or more can be obtained at a current density of 10 A / cm 2 or more, for example, the micro-cathode according to the present embodiment can be manufactured. It can be sufficiently applied as a cold cathode of an electron gun for a wave tube.
【００４２】図１を参照して、マイクロ波管の電子銃構
体において、第１円筒形絶縁体３の外周部、内周部には
それぞれメタライズ層３１ａ、３１ｂを有し、第１円筒
形絶縁体３の第２円筒形絶縁体４に当接する面に形成さ
れたメタライズ層３１ｃを有している。Referring to FIG. 1, in the electron gun assembly of the microwave tube, the outer peripheral portion and the inner peripheral portion of the first cylindrical insulator 3 have metallized layers 31a and 31b, respectively. It has a metallization layer 31c formed on the surface of the body 3 that abuts the second cylindrical insulator 4.
【００４３】第１円筒形絶縁体３の第２円筒形絶縁体４
に当接する面に形成されたメタライズ層３１ｃは、第１
円筒形絶縁体３の外径方向端部において第１円筒形絶縁
体３の外周部に形成されたメタライズ層３１ａに当接す
るように形成されており、且つ第１円筒形絶縁体３の内
周部のメタライズ層３１ｂには接触することのないよう
に、第１円筒形絶縁体３の内周部よりも大きな位置（外
径方向）に形成される。Second cylindrical insulator 4 of first cylindrical insulator 3
The metallization layer 31c formed on the surface contacting the
The outer periphery of the cylindrical insulator 3 is formed so as to abut the metallized layer 31a formed on the outer periphery of the first cylindrical insulator 3, and the inner periphery of the first cylindrical insulator 3 is also formed. It is formed at a position (outer diameter direction) larger than the inner peripheral portion of the first cylindrical insulator 3 so as not to come into contact with the metallized layer 31b.
【００４４】即ち、冷陰極１から金属線１０により取り
出されたゲート電位は、集束電極８を支持するための第
２の段付き円筒形金属９と、第１円筒形絶縁体３の第２
円筒形絶縁体４に当接する面に形成されたメタライズ層
３１ｃと、第２円筒形絶縁体４の第１円筒形絶縁体３に
当接する面に形成されたメタライズ層４１ｃと、を介し
て真空外に取り出され、第１円筒形絶縁体３の第２円筒
形絶縁体４に当接する面に形成されたメタライズ層３１
ｃに接合されたゲート電極用円筒形金属７に電気的に接
続され、冷陰極取付基板と支持棒で構成される金属導体
２の支持棒２１ｂを介して、真空外に取り出される冷陰
極のエミッタ電位と電気的に分離される。That is, the gate potential taken out from the cold cathode 1 by the metal wire 10 is the second stepped cylindrical metal 9 for supporting the focusing electrode 8 and the second step of the first cylindrical insulator 3.
A vacuum is formed via a metallization layer 31c formed on the surface that abuts the cylindrical insulator 4 and a metallization layer 41c formed on the surface that abuts the first cylindrical insulator 3 on the second cylindrical insulator 4. The metallized layer 31 taken out to the outside and formed on the surface of the first cylindrical insulator 3 that contacts the second cylindrical insulator 4.
The emitter of the cold cathode, which is electrically connected to the cylindrical metal 7 for the gate electrode joined to c and is taken out of the vacuum through the support rod 21b of the metal conductor 2 composed of the cold cathode mounting substrate and the support rod. It is electrically separated from the electric potential.
【００４５】図１に示す本実施形態に係るマイクロ波管
の電子銃構体では、従来の構造に比較して、電子銃構体
の外周部となる円筒の真空外囲器５は接地電位とされ、
ケース等の筐体と絶縁を行うための絶縁材が不要であ
り、小型化、軽量化が容易である。また、組立も容易に
行うことができる。In the electron gun assembly of the microwave tube according to the present embodiment shown in FIG. 1, the cylindrical vacuum envelope 5, which is the outer peripheral portion of the electron gun assembly, is set to the ground potential, as compared with the conventional structure.
An insulating material for insulating the housing such as a case is not required, and it is easy to reduce the size and weight. Also, the assembly can be easily performed.
【００４６】さらに、第２円筒形絶縁体４の材料とし
て、好ましくは熱伝導率の低いアルミナセラミック等を
用いた場合、円筒の真空外囲器５と第１の段付き円筒形
金属６の端部をアーク溶接等により封止する際に発生す
る熱から冷陰極を保護するという作用効果を奏する。Further, when alumina ceramic or the like having a low thermal conductivity is preferably used as the material of the second cylindrical insulator 4, the ends of the cylindrical vacuum envelope 5 and the first stepped cylindrical metal 6 are used. This has an effect of protecting the cold cathode from heat generated when the portion is sealed by arc welding or the like.
【００４７】[0047]
【実施形態２】図２は、本発明の第２の実施の形態に係
る冷陰極を用いたマイクロ波管の電子銃の断面図であ
る。[Embodiment 2] FIG. 2 is a sectional view of an electron gun of a microwave tube using a cold cathode according to a second embodiment of the present invention.
【００４８】図２を参照して、本実施形態に係るマイク
ロ波管の電子銃構体は、電子を射出するエミッタ電極と
ゲート電極を含み例えば１×１０-5（Ｐａ）よりも高い
真空内で動作する冷陰極１と、冷陰極１を皿部２１ａで
接合する金属導体２と、を有し、この金属導体２は、第
１円筒形絶縁体３の内周部に形成されたメタライズ層３
１ｂを介して第１円筒形絶縁体３と気密接合されてい
る。With reference to FIG. 2, the electron gun assembly of the microwave tube according to the present embodiment includes an emitter electrode for emitting electrons and a gate electrode, for example, in a vacuum higher than 1 × 10 −5 (Pa). It has a working cold cathode 1 and a metal conductor 2 that joins the cold cathode 1 with a dish portion 21 a. The metal conductor 2 is a metallization layer 3 formed on the inner peripheral portion of the first cylindrical insulator 3.
It is airtightly joined to the first cylindrical insulator 3 via 1b.
【００４９】また、第１円筒形絶縁体３の外周部に形成
されたメタライズ層３１ａを介して気密接合された第２
の段付き円筒形金属９と、第２の段付き円筒形金属９に
より支持される集束電極８、冷陰極１のゲート電極と第
２の段付き円筒形金属９とに両端が接合された金属線１
０と、真空外囲器として第２の段付き円筒形金属９に気
密接合された第２円筒形絶縁体４と、第２円筒形絶縁体
４に気密接合される第１の段付き円筒形金属６と、真空
外囲器を構成する円筒形金属５と、を備えている。Further, the second cylindrical member 3 is hermetically bonded via the metallized layer 31a formed on the outer peripheral portion of the first cylindrical insulator 3.
A stepped cylindrical metal 9, a focusing electrode 8 supported by the second stepped cylindrical metal 9, a metal having both ends joined to the gate electrode of the cold cathode 1 and the second stepped cylindrical metal 9. Line 1
0, a second cylindrical insulator 4 airtightly bonded to a second stepped cylindrical metal 9 as a vacuum envelope, and a first stepped cylindrical member airtightly joined to the second cylindrical insulator 4. A metal 6 and a cylindrical metal 5 forming a vacuum envelope are provided.
【００５０】マイクロ波管の電子銃構体において、冷陰
極１から金属線１０により取り出されたゲート電位は集
束電極８を支持するための第２の段付き円筒形金属９に
より真空外に取り出されるが、ゲートリード１１が第２
の段付き円筒形金属９の内周部に接合されることによっ
て電圧供給用の電源からの供給方法を容易にしている。In the electron gun assembly of the microwave tube, the gate potential taken out from the cold cathode 1 by the metal wire 10 is taken out of the vacuum by the second stepped cylindrical metal 9 for supporting the focusing electrode 8. , The gate lead 11 is second
By being joined to the inner peripheral portion of the stepped cylindrical metal 9, the supply method from the power supply for voltage supply is facilitated.
【００５１】本実施形態においては、前記第１の実施の
形態と同様にエミッタ電位は金属導体２を構成する支持
棒２１ｂにより真空外に取り出され、冷陰極１に電圧を
印加するためのエミッタ電極とゲート電極が分離され
る。In this embodiment, similarly to the first embodiment, the emitter potential is taken out of the vacuum by the support rod 21b forming the metal conductor 2 and the emitter electrode for applying a voltage to the cold cathode 1 is used. And the gate electrode are separated.
【００５２】図２に示すマイクロ波管の電子銃構体で
は、前記第１の実施の形態の構造と比較して、電子銃構
体の外周部となる円筒の真空外囲器５と、ゲート電位と
なる段付き円筒形金属９と、の間の沿面距離が長くなっ
ており、耐電圧性に優れ、且つ小型、軽量の電子銃を提
供できる。In the microwave tube electron gun assembly shown in FIG. 2, as compared with the structure of the first embodiment, a cylindrical vacuum envelope 5 serving as an outer peripheral portion of the electron gun assembly and a gate potential are provided. The creeping distance between the stepped cylindrical metal 9 and the stepped cylindrical metal 9 is long, and it is possible to provide an electron gun which is excellent in withstand voltage and is small in size and lightweight.
【００５３】[0053]
【実施形態３】図３は、本発明の第３の実施の形態に係
る冷陰極を用いたマイクロ波管の電子銃の断面図であ
る。[Third Embodiment] FIG. 3 is a sectional view of an electron gun of a microwave tube using a cold cathode according to a third embodiment of the present invention.
【００５４】図３を参照して、マイクロ波管の電子銃構
体は電子を射出するエミッタ電極とゲート電極を含み例
えば１×１０-5（Ｐａ）よりも高い真空内で動作する冷
陰極１と冷陰極１を皿部２１ａで接合する金属導体２を
有し、この金属導体２は第１円筒形絶縁体３の内周部に
形成されたメタライズ層３１ｂを介して第１円筒形絶縁
体３と気密接合されている。Referring to FIG. 3, the electron gun structure of the microwave tube includes a cold cathode 1 which includes an emitter electrode for emitting electrons and a gate electrode and operates in a vacuum higher than, for example, 1 × 10 -5 (Pa). It has a metal conductor 2 that joins the cold cathode 1 with a dish portion 21a, and this metal conductor 2 is provided with a metallization layer 31b formed on the inner peripheral portion of the first cylindrical insulator 3 to form a first cylindrical insulator 3 Is airtightly joined.
【００５５】第１円筒形絶縁体３の外周部に形成された
メタライズ層３１ａと第２円筒形絶縁体４の内周部に形
成されたメタライズ層４１ａを介して互いに気密接合さ
れた第１円筒形絶縁体３、第２円筒形絶縁体４と、真空
外囲器を構成するための円筒形金属５、第１の段付き円
筒形金属６と、ゲート電極用円筒形金属７と冷陰極１か
ら射出された電子を集束するための集束電極８と、集束
電極８を支持するために、第１円筒形絶縁体３の外周に
施されたメタライズ層３１ａを介して第１円筒形絶縁体
３に接合された第２の段付き円筒形金属９と、冷陰極１
のゲート電極と第２の段付き円筒形金属９に両端を接合
された金属線１０と、を備えている。The first cylinders hermetically bonded to each other via the metallized layer 31a formed on the outer peripheral portion of the first cylindrical insulator 3 and the metallized layer 41a formed on the inner peripheral portion of the second cylindrical insulator 4. Shaped insulator 3, second cylindrical insulator 4, cylindrical metal 5 for forming a vacuum envelope, first stepped cylindrical metal 6, gate electrode cylindrical metal 7 and cold cathode 1 A focusing electrode 8 for focusing electrons emitted from the first cylindrical insulator 3 and a first cylindrical insulator 3 via a metallization layer 31a formed on the outer periphery of the first cylindrical insulator 3 to support the focusing electrode 8. A second stepped cylindrical metal 9 joined to the cold cathode 1
And a metal wire 10 having both ends joined to the second stepped cylindrical metal 9.
【００５６】マイクロ波管の電子銃構体において、冷陰
極１から金属線１０により取り出されたゲート電位は集
束電極８を支持するための第２の段付き円筒形金属９お
よび第１円筒形絶縁体３の外周部に形成されたメタライ
ズ層３１ａ及び第２円筒形絶縁体４の内周部に形成され
たメタライズ層４１ａを介して真空外に取り出され、第
２円筒形絶縁体４の内周部に接合されるゲート電極用円
筒形金属７に電気的に接続され、金属導体２を構成する
支持棒２１ｂを介して真空外に取り出される冷陰極のエ
ミッタ電位と電気的に分離される。In the electron gun assembly of the microwave tube, the gate potential extracted from the cold cathode 1 by the metal wire 10 is the second stepped cylindrical metal 9 for supporting the focusing electrode 8 and the first cylindrical insulator. 3 is taken out of the vacuum through the metallized layer 31a formed on the outer peripheral portion and the metallized layer 41a formed on the inner peripheral portion of the second cylindrical insulator 4, and the inner peripheral portion of the second cylindrical insulator 4 is removed. Is electrically connected to the cylindrical metal 7 for the gate electrode, which is joined to, and is electrically separated from the emitter potential of the cold cathode taken out of the vacuum through the support rod 21b forming the metal conductor 2.
【００５７】図３に示す本実施形態に係るマイクロ波管
の電子銃構体においては、前記第１及び第２の実施の形
態の構造と比較して、第１円筒形絶縁体３と第２円筒形
絶縁体４はそれぞれ外周面と内周面で接合されるために
軸方向長さを短くすることが可能となり、さらに電子銃
の小型化、軽量化が図られる。In the electron gun assembly of the microwave tube according to the present embodiment shown in FIG. 3, the first cylindrical insulator 3 and the second cylinder are different from the structures of the first and second embodiments. Since the shaped insulator 4 is joined to the outer peripheral surface and the inner peripheral surface, respectively, the axial length can be shortened, and the electron gun can be made smaller and lighter.
【００５８】[0058]
【発明の効果】以上説明したように、本発明の冷陰極を
用いたマイクロ波管の電子銃構体においては、電子銃の
外周部に高電圧が印加されないため、マイクロ波管の小
型化、軽量化が容易に達成可能とされるという効果を有
する。また、本発明によれば、冷陰極とマイクロ波管の
封入時の溶着部の間には熱伝導率の低い例えばアルミナ
セラミック等の絶縁体を介しているため封入時に冷陰極
が加熱され難く、例えば冷陰極が酸化するというような
冷陰極への悪影響を抑制することができる。As described above, in the electron gun assembly of the microwave tube using the cold cathode of the present invention, since a high voltage is not applied to the outer peripheral portion of the electron gun, the microwave tube is downsized and lightweight. This has the effect that conversion can be easily achieved. Further, according to the present invention, between the cold cathode and the welded portion at the time of sealing the microwave tube, since the insulator having a low thermal conductivity such as alumina ceramic is interposed, the cold cathode is hard to be heated at the time of sealing, For example, an adverse effect on the cold cathode such as oxidation of the cold cathode can be suppressed.
【図１】本発明の第１の実施の形態に係る冷陰極を用い
たマイクロ波管の電子銃の構造を示す図である。FIG. 1 is a diagram showing a structure of an electron gun of a microwave tube using a cold cathode according to a first embodiment of the present invention.
【図２】本発明の第２の実施の形態に係る冷陰極を用い
たマイクロ波管の電子銃の構造を示す図である。FIG. 2 is a diagram showing a structure of an electron gun of a microwave tube using a cold cathode according to a second embodiment of the present invention.
【図３】本発明の第３の実施の形態に係る冷陰極を用い
たマイクロ波管の電子銃の構造を示す図である。FIG. 3 is a diagram showing a structure of an electron gun of a microwave tube using a cold cathode according to a third embodiment of the present invention.
【図４】マイクロ波管の代表例である進行波管の構造を
示す図である。FIG. 4 is a diagram showing a structure of a traveling wave tube which is a typical example of a microwave tube.
【図５】進行波管に熱陰極を使用した場合の従来の電子
銃の構造を示す図である。FIG. 5 is a view showing the structure of a conventional electron gun when a traveling cathode is equipped with a hot cathode.
【図６】従来のマイクロ波逓倍増管の電子銃構体の構造
を示す図である。FIG. 6 is a diagram showing a structure of a conventional electron gun assembly of a microwave multiplier.
【図７】特開昭５１−５６１７０号公報に記載の電極構
体の構造を示す図である。FIG. 7 is a diagram showing a structure of an electrode assembly described in JP-A-51-56170.
【図８】電界放出型冷陰極の構造を示す図である。FIG. 8 is a diagram showing a structure of a field emission cold cathode.
１ 冷陰極 ２ 金属導体 ２１ａ 金属導体２の皿部 ２１ｂ 金属導体２の支持棒 ３ 第１円筒形絶縁体 ３１ａ 第１円筒形絶縁体３の外周部のメタライズ層 ３１ｂ 第１円筒形絶縁体３の内周部のメタライズ層 ３１ｃ 第１円筒形絶縁体３の平面部のメタライズ層 ４ 第２円筒形絶縁体 ４１ｂ 第２円筒形絶縁体４の内周部のメタライズ層 ４１ｃ 第２円筒形絶縁体４の平面部のメタライズ層 ５ 円筒形金属 ６ 第１の段付き円筒形金属 ７ ゲート電極用円筒形金属 ８ 集束電極 ９ 第２の段付き円筒形金属 １０ 金属線 １１ ゲートリード ５１ シリコン基板 ５２ 絶縁層 ５３ ゲート電極 ５４ エミッタ １０２ 熱陰極 １１１ カソード電極 １１２ 円筒形絶縁体 １１３ アノード電極 １１４ 円筒形金属 １１５ アノード電極板 １１６ 封入皿 １１７ 第２段付き円筒形金属 １１８ 第１段付き円筒形金属 １１９ 集束金属 １２０ 第２ヒータリード １２１ 第１ヒータリード １２２ ヒータ電極 １２３ 封止用金属部品 ２０１ ゲート電極の無い冷陰極 ２０２ コレクタ ２０３ 出力空洞 ２０４ 絶縁体 ２０５ 陰極空洞 ２０６ 高周波入力部 ２０７ 高周波出力部 ２０８ 水冷パイプ ２１０ ピン ２１１ ゲート電極 ２１２ エミッタ ２１３ リード線 ２１４ 金属薄膜 ２１５ 基板 ５０１ 電子銃部 ５０２ 陰極 ５０３ 電子ビーム ５０４ 集束電極 ５０５ 周期永久磁界発生装置 ５０６ 遅波回路部 ５０７ 高周波入力部 ５０８ コレクタ電極 ５０９ 高周波出力部 1 Cold Cathode 2 Metal Conductor 21a Metal Conductor 2 Dish 21b Support Rod of Metal Conductor 2 3 First Cylindrical Insulator 31a Metallized Layer on Outer Part of First Cylindrical Insulator 3 31b First Cylindrical Insulator 3 Metallized layer 31c on the inner peripheral portion 31c Metallized layer on the planar portion of the first cylindrical insulator 4 Second cylindrical insulator 41b Metallized layer on the inner peripheral portion of the second cylindrical insulator 4 41c Second cylindrical insulator 4 Metallization layer of the plane part of 5 Cylindrical metal 6 First stepped cylindrical metal 7 Cylindrical metal for gate electrode 8 Focusing electrode 9 Second stepped cylindrical metal 10 Metal wire 11 Gate lead 51 Silicon substrate 52 Insulation layer 53 Gate Electrode 54 Emitter 102 Hot Cathode 111 Cathode Electrode 112 Cylindrical Insulator 113 Anode Electrode 114 Cylindrical Metal 115 Anode Electrode Plate 116 Enclosure Dish 117 Second Cylindrical metal 118 With first step Cylindrical metal 119 Focused metal 120 Second heater lead 121 First heater lead 122 Heater electrode 123 Metal part 201 for sealing Cold cathode without gate electrode 202 Collector 203 Output cavity 204 Insulator 205 Cathode cavity 206 High frequency input section 207 High frequency output section 208 Water cooling pipe 210 Pin 211 Gate electrode 212 Emitter 213 Lead wire 214 Metal thin film 215 Substrate 501 Electron gun section 502 Cathode 503 Electron beam 504 Focusing electrode 505 Periodic magnetic field generator 506 Slow wave circuit Section 507 high-frequency input section 508 collector electrode 509 high-frequency output section
Claims (17)
を含み真空中で動作する冷陰極を有する電子銃におい
て、 第１の略円筒形状の絶縁体の内径部と当接して配設され
ると共に軸方向に拡延されてなる導電部材の基部に前記
冷陰極が配設され、前記導電部材を介して前記冷陰極の
前記エミッタ電位が真空外に取り出され、 前記第１の略円筒形状の絶縁体は第２の略円筒形状の絶
縁体と当接し、該当接部の導体層を通して前記冷陰極の
ゲート電位が真空外に取り出され、 前記第１の略円筒形状の絶縁体が前記冷陰極の前記エミ
ッタ電極と前記ゲート電極とを互いに絶縁し、前記第２
の略円筒形状の絶縁体が前記冷陰極と接地電位との絶縁
を行うことを特徴とする電子銃。1. An electron gun having a cold cathode, which includes an emitter electrode for emitting electrons and a gate electrode and operates in a vacuum, and is arranged in contact with an inner diameter portion of a first substantially cylindrical insulator. The cold cathode is arranged at the base of a conductive member that is expanded in the axial direction, and the emitter potential of the cold cathode is taken out of the vacuum through the conductive member, and the first substantially cylindrical insulator Is brought into contact with a second substantially cylindrical insulator, the gate potential of the cold cathode is taken out of the vacuum through the conductor layer of the contact portion, and the first substantially cylindrical insulator is the cold cathode. The emitter electrode and the gate electrode are insulated from each other;
2. An electron gun characterized in that the substantially cylindrical insulator insulates the cold cathode from the ground potential.
を含み真空中で動作する冷陰極を有する電子銃におい
て、 第１の略円筒形状の絶縁体の内径部と当接して配設され
ると共に軸方向に拡延されてなる導電部材の基部に前記
冷陰極が配設され、前記導電部材を介して前記冷陰極の
前記エミッタ電位が真空外に取り出され、 前記第１の略円筒形状の絶縁体と前記第２の略円筒形状
の絶縁体とが略円筒形状の第２の導電部材を介して気密
封止されてなり、前記第２の導電部材を介して前記冷陰
極のゲート電位が真空外に取り出され、 前記第１の略円筒形状の絶縁体が前記冷陰極の前記エミ
ッタ電極と前記ゲート電極とを互いに絶縁し、前記第２
の略円筒形状の絶縁体が前記冷陰極と接地電位との絶縁
を行うことを特徴とする電子銃。2. An electron gun having a cold cathode, which includes an emitter electrode for emitting electrons and a gate electrode and operates in a vacuum, and is arranged in contact with an inner diameter portion of a first substantially cylindrical insulator. The cold cathode is arranged at the base of a conductive member that is expanded in the axial direction, and the emitter potential of the cold cathode is taken out of the vacuum through the conductive member, and the first substantially cylindrical insulator And the second substantially cylindrical insulator are hermetically sealed via a substantially cylindrical second conductive member, and the gate potential of the cold cathode is outside the vacuum via the second conductive member. And the first substantially cylindrical insulator insulates the emitter electrode and the gate electrode of the cold cathode from each other.
2. An electron gun characterized in that the substantially cylindrical insulator insulates the cold cathode from the ground potential.
を含み真空中で動作する冷陰極を有する電子銃におい
て、 前記冷陰極は、第１の略円筒形状の絶縁体に気密接合さ
れてなる金属導体の一側に配設され、該金属導体を介し
て前記冷陰極の前記エミッタ電位が真空外に取り出され
るとともに、前記第１の略円筒形状の絶縁体は第２の略
円筒形状の絶縁体に気密接合され、 前記第１及び第２の略円筒形状の絶縁体の該接合部の導
体層を通して前記冷陰極のゲート電位が真空外に取り出
され、 前記第１の略円筒形状の絶縁体が前記冷陰極の前記エミ
ッタ電極と前記ゲート電極とを互いに絶縁し、 前記第２の略円筒形状の絶縁体が前記冷陰極と接地電極
との絶縁を行うことを特徴とする電子銃。3. An electron gun having a cold cathode, which includes an emitter electrode for emitting electrons and a gate electrode and operates in a vacuum, wherein the cold cathode is a metal formed by hermetically bonding to a first substantially cylindrical insulator. The emitter of the cold cathode is taken out of the vacuum through the metal conductor disposed on one side of the conductor, and the first substantially cylindrical insulator is the second substantially cylindrical insulator. The gate potential of the cold cathode is taken out of the vacuum through the conductor layer of the joint of the first and second substantially cylindrical insulators, and the first substantially cylindrical insulator is An electron gun, wherein the emitter electrode and the gate electrode of the cold cathode are insulated from each other, and the second substantially cylindrical insulator insulates the cold cathode from the ground electrode.
縁体と前記第２の略円筒形状の絶縁体とを接合するメタ
ライズ層からなることを特徴とする請求項３記載の電子
銃。4. The electron according to claim 3, wherein the conductor layer comprises a metallized layer that joins the first substantially cylindrical insulator and the second substantially cylindrical insulator. gun.
真空外囲器として作用することを特徴とする請求項３記
載の電子銃。5. The electron gun according to claim 3, wherein the first and second substantially cylindrical insulators act as a vacuum envelope.
れる面内方向に所定の拡りを有する基部と支持棒とを備
えてなることを特徴とする請求項３に記載の電子銃。6. The electron gun according to claim 3, wherein the metal conductor comprises a base having a predetermined expansion in the in-plane direction to which the cold cathode is attached and a support rod.
とされ、頭頂部に前記冷陰極が接合されることを特徴と
する請求項３に記載の電子銃。7. The electron gun according to claim 3, wherein the metal conductor has a substantially T-shaped cross section, and the cold cathode is bonded to the top of the head.
と、前記第１の略円筒形状の絶縁体とが、前記第１の略
円筒形状の絶縁体の内径部で気密接合されていることを
特徴とする請求項７に記載の電子銃。8. The metal conductor having a substantially T-shaped cross section and the first substantially cylindrical insulator are hermetically joined to each other at an inner diameter portion of the first substantially cylindrical insulator. The electron gun according to claim 7, wherein:
状の金属又は金属片が接合され、前記円筒形状の金属又
は金属片に前記冷陰極のゲート電極が接続されることを
特徴とする請求項３に記載の電子銃。9. A cylindrical metal or metal piece is joined to the first substantially cylindrical insulator, and a gate electrode of the cold cathode is connected to the cylindrical metal or metal piece. The electron gun according to claim 3.
が配置されてなることを特徴とする請求項３に記載の電
子銃。10. The electron gun according to claim 3, wherein an electron beam focusing electrode is arranged in front of the cold cathode.
２の略円筒形状の絶縁体との接合部のメタライズ層を介
して取り出されたゲート電極に接続される円筒形状の金
属を、前記第２の略円筒形状の絶縁体の内周部に配し、
前記ゲート電位を外部に引き出すようにしたことを特徴
とする請求項３に記載の電子銃。11. A cylindrical metal connected to a gate electrode taken out through a metallization layer at a joint between the first substantially cylindrical insulator and the second substantially cylindrical insulator. , Disposed on the inner circumference of the second substantially cylindrical insulator,
The electron gun according to claim 3, wherein the gate potential is drawn to the outside.
略円筒形状の絶縁体に接合された円筒形状の金属又は金
属片に接合され、該電子ビーム集束電極を前記冷陰極の
前記ゲート電極に電気的に接続してなることを特徴とす
る請求項９に記載の電子銃。12. The electron beam focusing electrode is bonded to a cylindrical metal or metal piece bonded to the first substantially cylindrical insulator, and the electron beam focusing electrode is connected to the gate electrode of the cold cathode. The electron gun according to claim 9, wherein the electron gun is electrically connected to the electron gun.
と前記第２の略円筒形状の絶縁体の内周面とが所定の領
域で互いに当接していることを特徴とする請求項３に記
載の電子銃。13. The outer peripheral surface of the first substantially cylindrical insulator and the inner peripheral surface of the second substantially cylindrical insulator are in contact with each other in a predetermined region. Item 3. The electron gun according to item 3.
２の略円筒形状の絶縁体とが端部で互いに当接してなる
ことを特徴とする請求項３に記載の電子銃。14. The electron gun according to claim 3, wherein the first substantially cylindrical insulator and the second substantially cylindrical insulator are in contact with each other at their ends.
２の略円筒形状の絶縁体とが、互いに気密接合される代
わりに、略円筒形状の金属部材を介して気密接合されて
なり、前記金属部材を通して前記冷陰極のゲート電位が
真空外に取り出されるように構成したことを特徴とする
請求項３〜１２のいずれか一に記載の電子銃。15. The first substantially cylindrical insulator and the second substantially cylindrical insulator are hermetically bonded to each other via a substantially cylindrical metal member instead of being hermetically bonded to each other. The electron gun according to any one of claims 3 to 12, wherein the gate potential of the cold cathode is taken out of the vacuum through the metal member.
２の略円筒形状の絶縁体とは前記円筒形状の金属部材を
介して少なくとも一方が外周面または内周面で接合され
てなることを特徴とする請求項１５に記載の電子銃。16. At least one of the first substantially cylindrical insulator and the second substantially cylindrical insulator is joined at an outer peripheral surface or an inner peripheral surface via the cylindrical metal member. The electron gun according to claim 15, wherein:
の熱伝導率を有するセラミック材料からなることを特徴
とする請求項１から１６のいずれか一に記載の電子銃。17. The electron gun according to claim 1, wherein the second substantially cylindrical insulator is made of a ceramic material having a predetermined thermal conductivity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7291958A JP3036414B2 (en) | 1995-10-13 | 1995-10-13 | Electron gun using cold cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7291958A JP3036414B2 (en) | 1995-10-13 | 1995-10-13 | Electron gun using cold cathode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09115453A true JPH09115453A (en) | 1997-05-02 |
| JP3036414B2 JP3036414B2 (en) | 2000-04-24 |
Family
ID=17775670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7291958A Expired - Fee Related JP3036414B2 (en) | 1995-10-13 | 1995-10-13 | Electron gun using cold cathode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3036414B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0944107A2 (en) * | 1998-03-20 | 1999-09-22 | Nec Corporation | Electron gun for electron tube with cold cathode |
| EP0974999A1 (en) * | 1998-07-24 | 2000-01-26 | Nec Corporation | Microwave electron gun |
-
1995
- 1995-10-13 JP JP7291958A patent/JP3036414B2/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0944107A2 (en) * | 1998-03-20 | 1999-09-22 | Nec Corporation | Electron gun for electron tube with cold cathode |
| EP0944107A3 (en) * | 1998-03-20 | 2001-07-11 | Nec Corporation | Electron gun for electron tube with cold cathode |
| US6294868B1 (en) | 1998-03-20 | 2001-09-25 | Nec Corporation | Electron gun for electron tube with cold cathode |
| EP0974999A1 (en) * | 1998-07-24 | 2000-01-26 | Nec Corporation | Microwave electron gun |
| US6344709B1 (en) | 1998-07-24 | 2002-02-05 | Nec Corporation | Microwave electron gun |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3036414B2 (en) | 2000-04-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR20200022994A (en) | X-ray tube and manufacturing method thereof | |
| US3983446A (en) | Gridded convergent flow electron gun for linear beam tubes | |
| JP2861968B2 (en) | Electron gun and microwave tube using cold cathode | |
| US2740067A (en) | Ceramic vacuum tube | |
| US3662212A (en) | Depressed electron beam collector | |
| JP3038830B2 (en) | Conduction-cooled multistage collector | |
| US6670760B2 (en) | Collector structure of traveling wave tube having a lossy ceramic member | |
| JP3036414B2 (en) | Electron gun using cold cathode | |
| US3824425A (en) | Suppressor electrode for depressed electron beam collector | |
| US3717787A (en) | Compact depressed electron beam collector | |
| US3706002A (en) | Electron gun | |
| JP2982760B2 (en) | Traveling wave tube collector | |
| JPS61214327A (en) | Collector structure for microwave tube | |
| US7550909B2 (en) | Electron gun providing improved thermal isolation | |
| CN111997854A (en) | Heater embedded hollow cathode | |
| RU2349983C1 (en) | Microwave power emitter (versions) | |
| JP3334694B2 (en) | Traveling wave tube | |
| JP3597270B2 (en) | Thermionic generator | |
| JPS6217970Y2 (en) | ||
| JPS6158937B2 (en) | ||
| JP2010015814A (en) | Electron gun structure and microwave tube | |
| JPS5816123Y2 (en) | Multistage collector type electron beam tube | |
| JP2590750B2 (en) | Impregnated cathode structure | |
| JP2000133152A (en) | Multistage-collector-type traveling-wave tube and feeding method therefor | |
| RU2281621C1 (en) | Emitter of electrons |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20000125 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080225 Year of fee payment: 8 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090225 Year of fee payment: 9 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100225 Year of fee payment: 10 |
|
| LAPS | Cancellation because of no payment of annual fees |