KR20200022994A - X-ray tube and manufacturing method thereof - Google Patents

Abstract

The present invention relates to an X-ray tube used for radiography and a manufacturing method thereof. The X-ray tube comprises a body unit, a gate electrode, an anode electrode, a support unit, and a cathode electrode. The body unit has a hollow part formed therein. The gate electrode is connected to one side of the body unit, has an electron emission module for generating electrons therein, and has a gate power connection unit for receiving a gate powder formed to be depressed on the outer circumference thereof. The anode electrode is connected to the other side of the body unit, and generates light by collision with electrons emitted from the electron emission module. The support unit is coupled to one side of the gate electrode, and has a through-hole formed on a surface facing the electron emission module. The cathode electrode has a part thereof to pass through the through-hole to support the electron emission module, and has a negative power connection unit formed on a surface exposed to the outside. The manufacturing method of the X-ray tube comprises the steps of: coupling an anode electrode to an upper portion of a body unit; coupling a gate electrode to a lower portion of the body unit; seating an electron emission module inside the gate electrode; brazing and coupling a support unit to the gate electrode; and brazing and coupling the support unit and a cathode electrode.

Description

X-ray tube and its manufacturing method {X-RAY TUBE AND MANUFACTURING METHOD THEREOF}

The present invention relates to an X-ray tube used for X-ray imaging and a method of manufacturing the same, and more particularly, power connections for receiving power do not protrude to the outside of the X-ray tube, thereby reducing the occurrence of arc, thereby preventing damage to components located around the power connection. The present invention relates to an X-ray tube and a method of manufacturing the same, which can be reduced and facilitated in an assembly process.

In general, an X-ray source is an X-ray generating device, which is composed of an X-ray tube composed of a cathode and an anode in a vacuum tube, a high voltage control and generator for applying a high voltage to the X-ray tube, and a cooling device for cooling the heat generated from the X-ray tube. do.

Conventional X-ray sources generate electrons, such as tungsten filaments, by heating them to a high temperature to impinge the emitted electrons on the target.However, instantaneous switching and current modulation are difficult, making it difficult to operate digitally. There are disadvantages such as energy distribution and directivity of electrons emitted and difficulty in electron focusing.

Therefore, the development of X-ray tubes using nano materials as field emission sources is actively underway, and in the case of using nano materials, small x-ray devices are arranged or inserted into the observation object by attaching X-ray devices to the ends of wires. Various types of X-ray tubes may be manufactured.

 1 is a perspective view of a CNT based X-ray tube according to the prior art. As shown in FIG. 1, in the conventional X-ray tube 1, the power connection parts 12 for receiving power are exposed to the outside of the body part 11 for a long time, which may cause arcing at all times. There was a problem that adjacent parts are damaged.

In addition, in order to expose the power supply connection portion 12 to the outside, a through hole is formed in the body portion 11 and a step of inserting the power supply connection portion 12 into the through hole is required. (11) There was a problem that the airtightness of the interior was lowered.

SUMMARY OF THE INVENTION An object of the present invention is that the positive power supply connection portion, the negative power supply connection portion, and the gate power supply connection portion for receiving power do not protrude out of the body portion, thereby reducing the occurrence of arcing and preventing damage to surrounding components due to the arc generation. The present invention relates to an X-ray tube and a method for manufacturing the same that can be prevented in advance.

In addition, an object of the present invention is to change the structure to be seated and fixed in a row to the electron emitting module having a plurality of configurations in a seating groove provided in the gate electrode, the alignment of the electron emitting module is easy to assemble X-ray tube with improved assembly And it relates to a preparation method thereof.

An X-ray tube according to the present invention for achieving the above object includes a body portion, a gate electrode, an anode electrode, a support portion, and a cathode electrode. A hollow is formed inside the body part. The gate electrode is connected to one side of the body portion, and has an electron emission module for generating electrons therein, and a gate power connection for receiving a gate power is formed in an outer circumference. The anode electrode is connected to the other side of the body portion, and generates light by collision with electrons emitted from the electron emission module. The support part is coupled to one side of the gate electrode, and a through hole is formed on a surface facing the electron emission module. A portion of the cathode electrode passes through the through hole to support the electron emission module, and the negative electrode power connection portion is formed on the surface exposed to the outside.

According to one embodiment, the negative power supply is screwed with the bolt-shaped negative power connection, the negative power supply is connected to the negative power supply for supplying negative power to the negative power connection.

According to one embodiment, the negative power supply is formed in a wire shape is connected to the outer circumferential surface of the negative power supply connecting portion, is pressed when the negative power connection is coupled to the negative power connection is fixed on the cathode electrode.

According to one embodiment, the lower step of the support is formed along the periphery of the through hole. The cathode electrode is mounted on the support of the support, and has a connection plate having a negative electrode power connection portion disposed on one surface thereof so as to face the center of the electron emission module, and protrudes from the other surface of the connection plate, and is inserted into the through hole to provide the electron emission module. And a supporting member for supporting.

According to an embodiment, the electron emission module includes a cathode electrode contact portion, an emitter, a first insulating member, a gate metal net, and a second insulating member. The cathode electrode contact portion is disposed between the gate electrode and the support portion, and a first opening for moving electrons is formed in the center portion. The emitter is disposed on top of the cathode electrode contacts to emit electrons. The first insulating member is disposed above the cathode electrode contact portion, and a second opening through which the emitter is inserted is formed in the center portion. The gate metal net is disposed on the first insulating member, and a metal mesh is formed therein. The second insulating member is disposed between the emitter and the gate metal mesh, and a third opening for moving electrons is formed in the center.

According to one embodiment, the electron-emitting module is disposed between the first insulating member and the second insulating member, the fourth portion is formed in the center smaller than the size of the emitter edge arcing to cover the edge of the emitter ( Edge arcing) protection further comprises.

According to one embodiment, the gate electrode focuses electrons emitted from the emitter.

According to an embodiment, the gate electrode includes a supporting member, a connecting member, and a fixing member. The support member has a lower portion of the body portion is seated, there is formed an opening in communication with the hollow of the body portion. The connecting member protrudes upward from the opening of the supporting member and is inserted into the hollow of the body portion. The fixing member extends downward from the outer circumferential surface of the supporting member, and an upper portion of the supporting portion is inserted and fixed.

According to one embodiment, the lower portion of the connection member is formed with a recess groove formed in the upper direction, the electron emitting module is seated in the mounting groove.

According to one embodiment, further comprising an anode auxiliary for sealing between the anode electrode and the body portion, the anode auxiliary is coupled to the top of the body by a brazing process.

According to one embodiment, the support is formed of a ceramic material to insulate between the gate electrode and the cathode electrode.

According to one embodiment, the support is coupled to the bottom of the gate electrode by a brazing process.

The method of manufacturing an X-ray tube according to the present invention includes the steps of: coupling an anode electrode to an upper portion of the body portion, coupling a gate electrode to the lower portion of the body portion, mounting an electron emission module inside the gate electrode, and Brazing the support to the support, and brazing the support and the cathode electrode. Coupling the anode electrode on the upper portion of the body portion is coupled to the anode electrode having an anode auxiliary portion on the upper portion of the body portion. Coupling the gate electrode to the lower portion of the body portion inverts the body portion to couple the gate electrode to the lower portion of the body portion. The step of seating the electron emission module inside the gate electrode seats the electron emission module inside the gate electrode. Brazing coupling the support to the gate electrode is brazing coupling the support with a through hole formed in the center on the gate electrode. The step of brazing coupling the support and the cathode electrode passes a portion of the cathode electrode through the through hole of the support to closely contact the electron emission module and braze the support and the cathode electrode.

According to one embodiment, after the step of brazing coupling the support and the cathode electrode, further comprising coupling the gate power supply to the gate power connection. Coupling the gate power supply to the gate power connection couples the gate power supply for supplying gate power to the gate power connection recessed along the outer periphery of the gate electrode.

According to one embodiment, the step of seating the electron emission module in the interior of the gate electrode, the process of seating the gate metal mesh formed inside the metal mesh inside the seating groove in which the lower portion of the gate electrode is recessed, the gate Seating a second insulating member having a third opening for moving electrons in a central portion on the metal mesh; and a third opening smaller than the size of the emitter in the central insulating portion is formed on the second insulating member to form an edge of the emitter. Seating an edge arcing prevention part covering the part, seating a first insulating member having a second opening in the center portion on the edge arcing prevention part, and emitting an electron in the second opening of the first insulating member And mounting a cathode and a cathode electrode contact portion having a first opening for moving electrons in a central portion of the first insulating member. .

According to an embodiment, the brazing coupling between the support and the cathode may include: coupling the cathode power supply for supplying the cathode power to the cathode power connecting portion formed on a surface exposed to the outside of the cathode electrode, and inverting the body portion to the anode; And coupling a positive power supply for supplying positive power to the positive power connection formed on a surface exposed to the outside of the electrode.

According to one embodiment, the support is formed of a ceramic material, and is coupled to the lower portion of the gate electrode by a brazing process to insulate the gate electrode and the cathode electrode.

According to the present invention, since the X-ray tube is not exposed to the outside of the power supply for external power supply, it is possible to reduce the damage of the components located around the power connection by reducing the arc generation. That is, as the positive electrode power connection portion is formed on the exposed surface of the anode electrode, the negative electrode power connection portion is formed on the exposed surface of the cathode electrode, and the gate power connection portion is formed around the gate electrode, so that Since the connections are not exposed, arcing can be reduced.

In addition, since the power connection parts are not exposed to the outside, a through hole may be formed in the body part, and a process of inserting the respective power connection parts into the through hole may be reduced, thereby simplifying the manufacturing process and improving airtightness inside the body part. There is an advantage to be improved.

In addition, as the electron-emitting modules having a plurality of configurations are seated and fixed in a row in the mounting grooves provided in the gate electrode, alignment of the electron-emitting modules is facilitated, thereby improving assembly performance.

In addition, as the upper and lower portions of the body portion are sealed through the brazing process, the coupling and sealing efficiency may be improved to improve the degree of vacuum inside the body portion.

1 is a perspective view of an x-ray tube according to the prior art.
2 is a perspective view of an x-ray tube according to an embodiment of the present invention.
3 is a cross-sectional view of the x-ray tube shown in FIG.
4 is an exploded perspective view of the x-ray tube shown in FIG.
5 is a view showing a state in which the power connection is coupled to the x-ray tube shown in FIG.
FIG. 6 is a block diagram illustrating a method of manufacturing the x-ray tube shown in FIG. 2.

Hereinafter, an X-ray tube and a method of manufacturing the same according to a preferred embodiment will be described in detail with reference to the accompanying drawings. Here, the same reference numerals are used for the same configurations, and detailed descriptions of well-known functions and configurations that may unnecessarily obscure the repeated description and the subject matter of the invention will be omitted. Embodiments of the invention are provided to more completely describe the invention for those skilled in the art. Accordingly, the shape and size of elements in the drawings may be exaggerated for clarity.

2 is a perspective view of an x-ray tube according to an embodiment of the present invention, and FIG. 3 is a cross-sectional view of the x-ray tube shown in FIG. 2. 4 is an exploded perspective view of the x-ray tube shown in FIG. 2.

As shown in FIGS. 2 to 4, the X-ray tube 100 includes a body part 110, a gate electrode 120, an electron emission module 130, an anode electrode 140, and a support part 150. , And a cathode electrode 160.

The body part 110 may be formed in a cylindrical shape having a hollow 110a formed therein, and stepped portions 111 and 112 may be formed at upper and lower portions, respectively. The body part 110 may be formed of a sealable material so that the inside thereof becomes a vacuum state. For example, the body part 110 may be formed of glass or quartz material.

The gate electrode 120 may be connected to one side of the body 110 and may have an electron emission module 130 generating electrons therein. Specifically, the gate electrode 120 may have an opening 120a formed therein so as to be in communication with the hollow 110a of the body part 110, by focusing electrons generated from the electron emission module 130 to the outside. Can be released. That is, the gate electrode 120 includes a focusing function to extract electrons from the emitter 132 which will be described later, and to move toward the anode electrode 140 without being diffused or scattered.

The gate electrode 120 may include a support member 121, a connection member 122, and a fixing member 123.

A portion of the lower side of the body part 110 may be seated in the support member 121, and a circular opening 120a may be formed therein to communicate with the hollow 110a of the body part 110.

The connection member 122 may protrude upward from the opening 120a of the support member 121 and be inserted into the hollow 110a of the body part 110. That is, when the body portion 110 and the gate electrode 120 are coupled, the outer circumferential surface of the connection member 122 is inserted into the lower inner circumferential surface of the body portion 110. In this case, a mounting recess 122a recessed in an upward direction may be formed below the connection member 122, and the electron emission module 130 may be seated in the mounting recess 122a.

The fixing member 123 extends downward from the outer circumferential surface of the supporting member 121, and a portion of the upper side of the supporting unit 150 to be described later may be inserted and fixed. That is, when the gate electrode 120 and the support unit 150 are coupled to each other, the upper outer peripheral surface of the support unit 150 is inserted into the inner circumferential surface of the fixing member 123.

Meanwhile, FIG. 5 is a view illustrating a state in which the gate power supply unit 10 is connected to the gate electrode 120. As illustrated in FIG. 5, a gate power source for receiving gate power is provided at an outer circumference of the gate electrode 120. The connection part 124 may be recessed.

For example, the gate power supply 10 for supplying the gate power to the gate power connector 124 may be inserted into the gate power connector 124 and coupled by wire bonding or welding. As the gate power connection 124 connected to the gate power supply 10 is recessed around the outer side of the gate electrode 120, the gate power connection 124 protrudes outward from the body 110 as in the related art. Therefore, the arc generation can be reduced. In addition, although a through hole is formed in the body part 11 to expose the power connection part 12 to the outside of the body part 11, according to the present invention, the manufacturing process is simplified because the through hole is not required. There is an advantage that the airtightness inside the body portion 110 is improved.

The electron emission module 130 includes a cathode electrode contact portion 131, an emitter 132, a first insulating member 133, a gate metal net 134, and a second insulating member 135. Can be.

The cathode electrode contact portion 131 may be disposed between the gate electrode 120 and the support portion 150 to be supported by the cathode electrode 160, and a first opening 131a may be formed in the center to move electrons. have. Specifically, the cathode electrode contact portion 131 may be formed in a thin circular plate shape, and may be formed of a ceramic material having insulation. In addition, the first opening 131a formed at the center portion of the cathode electrode contact portion 131 may be formed in a circular shape, and its diameter may be smaller than the diameter of the protruding member 162 of the cathode electrode 160 which will be described later. As a result, a gap is formed between the cathode electrode 160 and the emitter 132 by the cathode electrode contact portion 131, and the cathode electrode 160 and the emitter 132 do not directly contact each other. However, the size of the first opening 131a is not limited thereto and may be larger than the diameter of the protruding member 162.

The emitter 132 may be disposed above the cathode electrode contact 131 to emit electrons. Here, the emitter 132 may be formed by depositing a plurality of carbon nanotubes (CNTs) for emitting electrons. Specifically, the carbon nanotubes may be deposited on the surface of the emitter 132 through one process selected from CVD, PECVD, and screen printing. Accordingly, when a cathode power is applied to the cathode electrode 160, electrons are emitted from a plurality of carbon nanotubes deposited on the emitter 132. As the emitter 132 is formed using carbon nanotubes, which are nanomaterials, high current emission per unit area is possible, and thus, clear radiographic image information can be obtained as compared with a conventional thermoelectronic electron source. The type of the emitter 132 is not particularly limited, but is preferably a conductive material composed of a metal or a carbon-based material.

The first insulating member 133 may be disposed on the cathode electrode contact portion 131, and a second opening 133a may be formed at the center to insert the emitter 132. To this end, the second opening 133a may be formed in a shape corresponding to the emitter 132, and the size of the second opening 133a may be equal to or larger than the size of the emitter 132. The first insulating member 133 may be formed in a thin circular plate shape and may be formed of a ceramic material having insulation.

The gate metal net 134 may be disposed on the first insulating member 133, and a metal mesh M may be formed therein. In this case, the mesh M is such that the electric field is well applied to the center portion of the emitter 132 so that the electron extraction is uniformly performed at the emitter 132. The mesh M may be spaced apart from the emitter 132 by a predetermined interval. Can be. For example, the mesh M may have a plurality of openings formed between the metal meshes, and the openings may have a hexagonal honeycomb shape. As the shape of the mesh M is formed in a hexagonal honeycomb shape, the mesh M efficiently extracts electrons, while maximizing the aperture ratio of stably opening the electrons without colliding with the metal mesh.

The second insulating member 135 is disposed between the emitter 132 and the gate metal mesh 134 to insulate between the emitter 132 and the gate metal mesh 134 and to move electrons in the center portion. An opening 135a may be formed. Specifically, the second insulating member 135 may be formed in a thin circular plate shape and may be formed of a ceramic material having insulation. The third opening 135a may be formed in a shape corresponding to the emitter 132.

On the other hand, the electron emission module 130 is disposed between the first insulating member 133 and the second insulating member 135, the fourth opening 136a smaller than the size of the emitter 132 is formed in the center Emmy An edge arcing prevention part 136 may be further included to cover the edge of the rotor 132.

The edge arcing prevention part 136 may be formed in a thin circular plate shape, and may be formed of a metal material. As the fourth opening 136a of the edge arcing prevention portion 136 is formed to be smaller than the size of the emitter 132, the upper edge portion of the emitter 132 may be covered, and thus the edge arcing prevention portion 136 May prevent edge arcing that may occur at the top edge of emitter 132.

If the edge arcing prevention part 136 is not installed, the electrons discharged from the emitter 132 are attached to the inner circumferential surface of the third opening 135a of the second insulating member 135 and thus the second insulating member 135. An edge arcing phenomenon may occur in which an inner circumferential surface thereof is damaged, and when the edge arcing prevention part 136 is installed on the first insulating member 133, arcing may be prevented.

The anode electrode 140 is connected to the other side of the body portion 110 and generates light by collision with electrons emitted from the electron emission module 130. Specifically, the anode electrode 140 may be connected to the upper portion of the body portion 110, it may be formed of a material selected from the group consisting of one or a combination of copper, tungsten, manganese, molybdenum. Due to this configuration, the electrons emitted from the emitter 132 may generate X-rays while colliding with the metal constituting the anode electrode 140 and passing through the metal.

A positive power supply connecting portion 140a may be recessed in the center of the anode electrode 140. For example, the positive electrode power connecting unit 140a may be screwed with the bolt-shaped positive electrode power connecting unit 41 as shown in FIG. 5, and the positive electrode power supply unit 40 electrically connected to the outer circumferential surface of the positive electrode power connecting unit 41. Can be supplied with positive power.

The anode 140 may include a collision unit 141 in which electrons emitted from the electron emission module 130 collide with each other, and a heat transfer unit 142 that emits heat generated from the collision unit 141 to the outside. .

The impingement part 141 may be formed on the bottom surface of the anode electrode 140, and may be formed to be inclined so as to redirect X-rays generated by collision of electrons to the side of the body part 110. The impingement portion 141 may be formed of at least one material selected from tungsten, manganese, and molybdenum, or a metal formed of a combination thereof.

The heat transfer part 142 is a heat transfer from the impingement portion 141 is transmitted, it is preferable that the thermal conductivity is formed of a metal material superior to the impingement portion 141. For example, the heat transfer part 142 may be formed of a copper material.

The support 150 may be coupled to one side of the gate electrode 120, and a through hole 150a may be formed on a surface facing the electron emission module 130. In detail, the upper part of the support part 150 may be seated and fixed in the mounting groove 122a formed in the lower portion of the gate electrode 120, and may be formed of a ceramic material to form a gap between the gate electrode 120 and the cathode electrode 160. Can be insulated. Here, the support 150 may be coupled to the lower portion of the gate electrode 120 by a brazing process.

The brazing process is a method in which brass solder, silver lead, etc. are used as an adhesive to heat and dissolve the metal sheets between the metal plates to bond the metal plates with each other. By such a brazing method, the bonding at the bonding surface between the support 150 and the gate electrode 120 may be secured.

As such, when the members are combined using the brazing process, the members may be more firmly coupled, and thus, the members constituting the X-ray tube 100 may be coupled to each other through the brazing process.

A part of the cathode electrode 160 passes through the through hole 150a to support the electron emission module 130, and may be formed of a metal material, more specifically, an alloy such as nickel, iron, cobalt, or a single transition metal. Since the cathode electrode 160 has a negative electrode (−), it may be referred to as a “cathode substrate electrode”.

The cathode electrode 160 may be recessed on the surface of the cathode electrode 160 exposed to the outside. In detail, the negative electrode power connection unit 160a may be formed to coincide with the positive electrode power connection unit 140a, and a thread may be formed around the negative electrode power connection unit 140a. Thus, as shown in Figure 5 can be screwed with the bolt-shaped negative power supply connection 21. At this time, the negative electrode power supply unit 21 is connected to the negative electrode power supply unit 20 for supplying negative power to the negative electrode power connection unit 160a, and the negative electrode power supply unit 160a receives the negative electrode power supply from the negative electrode power supply unit 20. It will be available.

For example, the negative electrode power supply unit 20 may be formed in a wire shape, and may be connected to surround the outer circumferential surface of the negative electrode power connection unit 21. Accordingly, the negative electrode power supply unit 20 may be pressed when the negative electrode power connection unit 21 is screwed to the negative electrode power connection unit 160a to be fixed on the cathode electrode 160. That is, the negative electrode power supply unit 20 may be interposed between the cathode electrode 160 and the negative electrode power connection unit 21.

The cathode electrode 160 may be formed to include the connection plate 161 and the protruding member 162.

The connection plate 161 is seated on the step 151 formed along the periphery of the through hole 150a of the support 150, and the negative electrode power connection 160a disposed on one surface thereof to face the center of the electron emission module 130 is provided. Can be formed. That is, the center axis of the electron emission module 130 and the center axis of the negative electrode power connection unit 160a may be arranged side by side.

The protruding member 162 may protrude from the other surface of the connection plate 161 and may be inserted into the through hole 150a of the support 150 to support the electron emission module 130. That is, the electron emission module 130 may be disposed between the gate electrode 120 and the support part 150, and may be in close contact with the bottom surface of the gate electrode 120 by the protruding member 162 of the cathode electrode 160. . At this time, the protruding member 162 is fixed to the cathode electrode contact portion 131 as shown in FIG. 3 or inserted into the first opening 131a of the cathode electrode contact portion 131 as shown in FIG. 132 and the first insulating member 133 may be fixed.

Meanwhile, the X-ray tube 100 may further include an anode auxiliary portion 170 for sealing between the anode electrode 140 and the body portion 110. Here, the anode auxiliary unit 170 may be coupled to the upper portion of the body portion 110 by a brazing process. As such, the upper part of the X-ray tube 100 is sealed by the anode auxiliary part 170 and the lower part is sealed by the support part 150 and the cathode electrode 160, so that the inside of the body part 110 can maintain a vacuum state. do.

As described above, since the X-ray tube 100 does not protrude to the outside of the power connection parts 124, 140a, and 160a for receiving external power, the X-ray tube 100 may reduce damage of components located near the power connection part by reducing arc generation. Will be. That is, the positive electrode power connecting portion 140a is recessed on the exposed surface of the anode electrode 140, the negative electrode power connecting portion 160a is recessed on the exposed surface of the cathode electrode 160, and the gate electrode 120 is recessed. As the gate power supply connection part 124 is recessed around the power supply connection part 12 does not protrude to the outside of the body part 11 as in the prior art, it is possible to reduce the occurrence of arc.

In addition, since the power connection parts 124, 140a, and 160a do not protrude to the outside, a process for forming a through hole in the body part as in the prior art and inserting respective power connection parts into the through hole can be reduced. Simplified, there is an advantage that the airtightness inside the body portion 110 is improved.

In addition, as the electron emission modules 130 having a plurality of configurations are seated and fixed in a row in the seating grooves 122a provided in the gate electrode 120, alignment of the electron emission modules 130 may be facilitated and assembling is possible. This is improved.

In addition, as the upper and lower portions of the body portion 110 are sealed through the brazing process, the coupling and sealing efficiency may be improved, thereby improving the degree of vacuum inside the body portion 110.

6 is a block diagram illustrating a method of manufacturing the x-ray tube illustrated in FIG. 2. In the present embodiment will be described focusing on the difference from the above-described embodiment.

As shown in FIG. 6, the method of manufacturing an X-ray tube (S100) includes coupling the anode electrode to the upper portion of the body portion (S110), coupling the gate electrode to the lower portion of the body portion (S120), and Mounting an electron emission module therein (S130), brazing a support unit to the gate electrode (S140), brazing a support unit and the cathode electrode (S150), and a gate power supply unit to the gate power connection unit Joining step (S160).

In the step of coupling the anode electrode to the upper portion of the body portion (S110), the anode electrode 140 having the anode auxiliary portion 170 is coupled to the upper portion of the body portion 110. In this case, the anode auxiliary unit 170 may be disposed between the anode electrode 140 and the body unit 110. Specifically, the lower inner circumferential surface of the anode auxiliary unit 170 may be inserted into the step 111 formed on the upper outer circumferential surface of the body part 110, and may be coupled to each other by a brazing process.

In the step S120 of coupling the gate electrode to the lower part of the body part, the body part 110 is inverted to couple the gate electrode 120 to the lower part of the body part 110. As such, as the body part 110 coupled with the anode electrode 140 is flipped over, the vertical position of the body part 110 may be reversed. That is, in the step S120 of coupling the gate electrode to the lower part of the body part, the lower part of the body part 110 is in a state of facing upward, and in this state, the connection member 122 of the gate electrode 120 is connected to the body part 110. After insertion into the hollow (110a) of the body portion 110 and the gate electrode 120 is to be coupled. In this case, the body 110 and the gate electrode 120 may be coupled to each other by a brazing process.

In the step S130 of mounting the electron emission module inside the gate electrode, the electron emission module 130 is seated in the mounting recess 122a formed in the gate electrode 120. In this case, the electron emission module 130 may include the gate metal mesh 134, the second insulating member 135, the edge arcing prevention part 136, the first insulating member 133, the emitter 132, and the like. The cathode electrode contact portion 131 may be seated inside the gate electrode 120.

Specifically, in the step S130 of mounting the electron emission module inside the gate electrode, a gate metal having a metal mesh M formed therein in a seating groove 122a in which a lower portion of the gate electrode 120 is recessed. A process of seating the network 134, a process of seating the second insulating member 135 having a third opening 135a for moving electrons in a central portion on the gate metal network 134, and a second insulating member A fourth opening 136a having a smaller size than the size of the emitter 132 is formed on the center at 135 to seat the edge anti-arking portion 136 covering the edge of the emitter 132, and the edge arcing. Seating the first insulating member 133 having the second opening 133a formed at the center portion on the prevention part 136, and emitting electrons into the second opening 133a of the first insulating member 133; A process of seating the emitter 132 and a first movement of electrons in a central portion on the first insulating member 133; Syntax may include a process of (131a) is secured to the cathode electrode contacting portion 131 is formed.

In the brazing coupling of the supporting part to the gate electrode (S140), the supporting part 150 having the through hole 150a formed at the center of the fixing member 123 provided under the gate electrode 120 is brazed. In this case, the centers of the surfaces where the gate electrode 120 and the support part 150 face each other may not be in contact with each other by the mounting grooves 122a and may be spaced apart by a predetermined length.

In the brazing coupling of the support part and the cathode electrode (S150), a portion of the cathode electrode 160 passes through the through hole 150a of the support part 150 to closely contact the electron emission module 130, and the support part 150 and the cathode The electrode 160 may be brazed. As a part of the cathode electrode 160, specifically, the protruding member 162 of the cathode electrode 160 presses the electron-emitting module 130 to be in close contact with the inside of the support 150, the support 150 without a separate adhesive. It is possible to fix the electron emitting module 130 in the). In this case, the support 150 may be formed of a ceramic material and may be coupled to the lower portion of the gate electrode 120 by a brazing process. As the support 150 is formed of a ceramic material as described above, the gate electrode 120 and the cathode electrode 160 can be insulated from each other.

Meanwhile, in the step S150 of brazing coupling the support unit with the cathode electrode, the cathode power supply unit 20 for supplying the cathode power to the cathode power connection unit 160a formed on the surface exposed to the outside of the cathode electrode 160 is coupled. And a process of combining the positive electrode power supply unit 40 for supplying the positive electrode power to the positive electrode power connection unit 140a formed on the surface exposed to the outside of the anode electrode 140 by inverting the body 110. have.

That is, in the step S150 of brazing coupling the support part and the cathode electrode, since the upper and lower positions of the body part 110 are reversed, the negative electrode power connection part 160a is exposed upward. Therefore, when the negative electrode power supply unit 20 is first connected to the negative electrode power supply unit 160a, and then the body unit 110 is inverted again, the upper and lower positions of the body unit 110 are returned to their original states, and thus the positive electrode power source is secondary. The positive power supply unit 40 is connected to the connection unit 140a. In this case, the negative electrode power supply unit 20 may be fixed to the negative electrode power connection unit 160a through the bolt-shaped negative electrode power connection unit 21, and the positive electrode power supply unit 40 may be fixed through the bolt-shaped positive electrode power connection unit 41. It may be fixed to the positive power supply connection 140a.

In this state, when cathode power is applied to the cathode electrode 160 through the cathode power connection unit 160a, electrons are emitted from a plurality of CNTs deposited on the surface of the emitter 132, and the emitted electrons are anodes having an anode. The light collides with the reflective surface of the electrode 140 to generate light for capturing X-rays.

In operation S160, the gate power supply unit 10 is inserted into the gate power supply unit 124 recessed along the outer circumference of the gate electrode 120, and then wire bonding or welding is performed. The gate power supply unit 10 may be coupled to the gate power connection unit 124 through the gate power supply unit 124.

Although the present invention has been described with reference to one embodiment shown in the accompanying drawings, this is merely exemplary, and it will be understood by those skilled in the art that various modifications and equivalent other embodiments are possible therefrom. Could be. Accordingly, the true scope of protection of the invention should be defined only by the appended claims.

110 .. Body 110a .. Hollow
120. Gate electrode 121. Support member
122 .. Connecting member 123 .. Holding member
124 .. Gate power connection 130. Electronic emission module
131. Cathode electrode contacts 132. Emitter
133. First insulating member 134. Gate metal net
135 .. 2nd insulating member 136 .. edge arcing prevention part
140. Anode electrode 150. Support
150a .. Through hole 160 .. Cathode electrode
160a .. negative power connection 161 .. connection plate
162. Protrusions 170. Anode Auxiliary

Claims (17)

A hollow body part formed therein;
A gate electrode connected to one side of the body part and having an electron emission module generating electrons therein, and having a gate power connection portion recessed at an outer circumference thereof to receive a gate power;
An anode electrode connected to the other side of the body part to generate light by collision with electrons emitted from the electron emission module;
A support part coupled to one side of the gate electrode and having a through hole formed on a surface facing the electron emission module; And
A cathode supporting a portion of the electron emission module through the through hole and having a negative electrode power connection portion recessed on a surface exposed to the outside;
X-ray tube comprising a.
The method of claim 1,
The negative electrode power connection portion is screwed with the bolt-shaped negative electrode power connection portion,
X-ray tube is connected to the negative power supply for supplying negative power to the negative power connection to the negative power connection.
The method of claim 2,
The negative electrode power supply is formed in a wire shape is connected to the outer peripheral surface of the negative electrode power connection portion, the X-ray tube is pressed on the cathode electrode when the negative electrode power connection portion is coupled to the fixed on the cathode electrode.
The method of claim 1,
A stepped portion is formed in the lower portion of the support along the circumference of the through hole,
The cathode electrode,
A connection plate seated on the step and formed with one surface of the negative electrode power connection part disposed to face a central portion of the electron emission module;
And a protruding member protruding from the other surface of the connection plate and inserted into the through hole to support the electron emission module.
The method of claim 1,
The electron emitting module,
A cathode electrode contact portion disposed between the gate electrode and the support portion and having a first opening for moving electrons in a central portion thereof;
An emitter disposed above the cathode electrode contact to emit electrons;
A first insulating member disposed on an upper portion of the cathode electrode contact portion and having a second opening through which the emitter is inserted;
A gate metal net disposed on the first insulating member and having a metal mesh formed therein;
And a second insulating member disposed between the emitter and the gate metal network and having a third opening formed at the center thereof to move electrons.
The method of claim 5,
The electron emitting module,
An edge arcing prevention part disposed between the first insulating member and the second insulating member and having a fourth opening smaller than the size of the emitter in a central portion thereof to cover an edge of the emitter; X-ray tube.
The method of claim 5,
The gate electrode focuses electrons emitted from the emitter.
The method of claim 1,
The gate electrode,
A support member having a lower portion of the body portion seated therein and having an opening communicating with the hollow of the body portion therein;
A connection member protruding upward from the opening of the support member and inserted into the hollow of the body part;
An X-ray tube extending downward from an outer circumferential surface of the support member, the fixing member is inserted and fixed to the upper portion of the support.
The method of claim 8,
An X-ray tube is formed in the lower portion of the connecting member is formed in the recess recessed in the upper direction, the electron emitting module is seated in the mounting groove.
The method of claim 1,
And an anode auxiliary portion for sealing between the anode electrode and the body portion, wherein the anode auxiliary portion is coupled to an upper portion of the body portion by a brazing process.
The method of claim 1,
The support part is formed of a ceramic material to insulate between the gate electrode and the cathode electrode.
The method of claim 1,
The support unit is coupled to the lower portion of the gate electrode by a brazing process x-ray tube.
Coupling an anode electrode having an anode auxiliary portion to an upper portion of the body portion;
Inverting the body portion and coupling a gate electrode to the lower portion of the body portion;
Mounting an electron emission module in the gate electrode;
Brazing a support having a through hole formed in the center on the gate electrode; And
Passing a portion of the cathode electrode through the through hole of the support to closely contact the electron emission module, and brazing the support to the cathode;
Method for producing a x-ray tube comprising a.
The method of claim 13,
After brazing the support and the cathode,
And coupling a gate power supply for supplying gate power to the gate power connection formed recessed along the outer circumference of the gate electrode.
The method of claim 13,
Mounting the electron emission module in the gate electrode,
Seating a gate metal net in which a metal mesh is formed in a seating groove in which a lower portion of the gate electrode is recessed;
Mounting a second insulating member having a third opening for moving electrons in a central portion of the gate metal network;
Forming a fourth opening smaller than a size of the emitter in a central portion of the second insulating member to seat an edge arcing prevention part covering an edge of the emitter;
Mounting a first insulating member having a second opening in a central portion thereof on the edge anti-arking portion;
Mounting an emitter emitting electrons inside the second opening of the first insulating member;
And mounting a cathode electrode contact portion having a first opening for moving electrons in a central portion on the first insulating member.
The method of claim 13,
Brazing the support and the cathode electrode,
Coupling a negative electrode power supply unit for supplying negative electrode power to a negative electrode power connection unit formed on a surface exposed to the outside of the cathode electrode;
And coupling a positive power supply for supplying positive power to a positive power connection formed on a surface exposed to the outside of the anode by flipping the body part.
The method of claim 13,
The support part is formed of a ceramic material and is coupled to the lower portion of the gate electrode by a brazing process to insulate between the gate electrode and the cathode electrode.

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