JPH0910963A - Cold joining method - Google Patents

Abstract

PURPOSE: To obtain excellent join strength without raising temp. by coating joint surfaces with a soft material and irradiating the coated surfaces with an ion beam, then pressurizing the joint surfaces at the time of joining high- strength materials. CONSTITUTION: The joint surfaces of the high-strength materials are coated with the soft materials, such as Al, Au, Ag and Cu. The coated surfaces are irradiated with the ion beam in the vacuum. The joint surfaces are pressurized in this vacuum state in a perpendicular direction without heating the surfaces and are joined at ordinary temp. The coating of the soft materials is executed by any of ion plating, ion mixing, ion implanting or plating. The vacuum degree at which the irradiation with the ions in possible may be <=1×10<-3> Torr. While the ion beams are generally Ar ions, any ion beams are usable, insofar as the ion beams are inert gaseous ions. The pressurizing force on the joint surfaces of >=0.5kg/mm<2> suffices.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a room temperature bonding method for high-strength materials, and more particularly to the same method which can be advantageously applied to surveillance test pieces which are required to be bonded without raising the temperature.

[0002]

2. Description of the Related Art Since fusion welding such as arc welding, laser welding, and electron beam welding melts the joint, the temperature of the joining material rises up to the melting point, and in ordinary diffusion joining, it is about 1/2 of the melting point in absolute temperature. Since the material is heated, the temperature of the bonding material also rises.

When the temperature is increased as in the case of fusion welding and diffusion bonding, there are drawbacks that the material is softened and precipitates are formed to make the material brittle. On the other hand, brazing and soldering have a drawback that the joining strength of the joining material is poor, although the heating temperature is low. In view of the above-mentioned state of the art, the present invention aims to provide a room temperature bonding method for high-strength materials which does not have the drawbacks of the conventional methods.

[0004]

Means for Solving the Problems (1) In joining high-strength materials, a soft material is coated on the joint surface, and then the surface of the coated surface is irradiated with an ion beam in a vacuum, and the surface is vacuumed. Room temperature bonding method for high-strength materials, characterized by pressurizing and bonding in a direction perpendicular to a bonding surface without heating in a state, (2) soft material is Al, Au, A
and room temperature bonding method for high-strength material characterized by being one of g and Cu, and (3) coating of soft material by any one of ion plating, ion mixing, ion implantation and plating. The room temperature bonding method for high-strength materials according to (1) or (2) above. It is.

[0005]

According to the present invention, the high-strength material is joined at room temperature without raising the temperature so that the high-strength material which is the material to be joined is not softened or brittle. In order to perform room temperature bonding, the joint surface is soft and needs to be deformed when pressure is applied. Therefore, a metal (Al, Al,
(Au, Ag or Cu) is coated (by ion plating, ion mixing, ion implantation, plating, etc.). However, for room temperature bonding, there is no oxide film on the bonding surface of the coated metal,
Bonding is difficult unless it is in a clean state, so the bonding surface is irradiated with an ion beam in a vacuum to remove the oxide film and the like on the bonding surface. The irradiation of the ion beam activates the atoms on the surface of the coating metal to facilitate bonding. When this cleaned and activated surface is exposed to the atmosphere, an oxide film is immediately formed. Therefore, the bonding is performed by applying pressure in the direction perpendicular to the bonding surface while maintaining the vacuum.

Good bonding is possible if the thickness of the soft material (any one of Al, Au, Ag and Cu) coated on the high-strength bonding surface is 1 μm or more. The degree of vacuum for the ion beam irradiation of the coating surface of the soft material may be 1 × 10 ⁻³ Torr or less, and Ar ions are generally used as the ion beam, but any ion gas can be used as long as it is an inert gas ion. Can also be used. It is sufficient that the pressing force in the direction perpendicular to the final joint surface is 0.5 kg / mm ² or more.

[0007]

EXAMPLE FIG. 1 shows a concrete configuration of the room temperature bonding method of the present invention.
2 shows the joining procedure. In FIG. 2, (a) →
The steps of (b) → (c) → (d) → (e) → (f) and (a) → (b) → (c) → (d) → (e ′) → (f ′).
2 shows two procedures of the process. The former procedure is a soft material coating held by a rotating jig.When a high-strength material is irradiated with an ion beam toward the ion beam oscillator and then joined, the latter is a soft material coating held by the pressure device. The case where the ion beam irradiation is performed by inclining the surface of the high strength material is shown. In the figure, 7 indicates a vacuum exhaust device.

(Example 1) Low-alloy steel was used as the high-strength material 1 (a), the joint surface was polished (b), Ag plating was applied to 100 μ as the soft material coating 2 (c), and the surface was further polished. (D). Two such materials were faced to each other and set on a rotary jig 8 in a vacuum chamber 6, and an Ar ion beam was oscillated from the ion beam oscillator 3 at 300 V for 1 minute on the Ag plated surface to clean the bonding surface. After that (e), the joining surfaces were opposed to each other, and a pressure of 5 kg / mm ^{2 was applied} by the pressure device 4 and the pressure receiving base 5 for 1 minute to perform the joining (f). As a result of tensile test of this joint, 40 kg / m
A strength of m ² was obtained.

(Example 2) High carbon steel was used as the high strength material 1 (a), and after the joint surface was polished (b), Al was deposited as the soft material coating 2 by ion plating to a thickness of 10 μm. (C) and further polished to a flat surface (d). Two such materials were faced to each other and set on the rotating jig 8 in the vacuum chamber 6, and the Al vapor deposition surface was irradiated with an Ar ion beam from the ion beam oscillator 3 at 500 V for 1 minute to clean the bonding surface. After that (e), the joining surfaces were faced to each other and a pressure of 4 kg / mm ^{2 was applied} by the pressure device 4 and the pressure receiving base 5 for 1 minute to perform the joining (f). As a result of a tensile test of this joint, a strength of 40 kg / mm ² was obtained.

(Example 3) Low-alloy steel was used for the high-strength material 1 (a), the joint surface was polished (b), Au plating was applied to 20 μ as the soft material coating 2 (c), and the surface was further polished. (D). Two of them are set facing each other and set on a rotating jig 8 in a vacuum chamber 6, and an Ar ion beam is applied from an ion beam oscillator 3 at 750 V to an Au plated surface.
After irradiating for 0 seconds to clean the joint surface (e), the joint surfaces are faced to each other and 2 kg are applied by the pressure device 4 and the pressure receiving base 5.
/ Pressurization of mm ² were bonded by adding 2 minutes (f). As a result of a tensile test of this joint, a strength of 50 kg / mm ² was obtained.

Example 4 A Ni-base heat-resistant alloy was used as the high-strength material 1 (a), the joint surface was polished (b), and then Cu plating was applied to the soft material coating 2 to a thickness of 50 μ (c). Then, the plane was further polished (d). Two of these are faced to each other and set at the ends of the pressurizing device 4 and pressurizing pedestal 5 of the vacuum chamber 6, and the Cu plating surface is irradiated with an Ar ion beam at 500 V for 2 minutes from a rotatable ion beam oscillator 3 '. After cleaning the joint surface (e '), a pressure of 5 kg / mm ^{2 was applied} by the pressure device 4 and the pressure receiving base 5 for 1 minute to bond (f'). As a result of tensile test of this joint, 6
A bond strength of 0 kg / mm ² was obtained.

(Example 5) Low-alloy steel was used as the high-strength material 1 (a), the joint surface was polished (b), and then Ag was ion-mixed to a thickness of about 10 μm (c). Polished to a flat surface (d). Two such materials are faced to each other and set on the rotating jig 8 in the vacuum chamber 6, and A
g The coating surface is irradiated with Ar ion beam from the ion beam oscillator 3 at 750 V for 1 minute to clean the bonding surface (e), and then the bonding surface is faced to the pressing device 4 and the pressing cradle 5 at 5 kg / mm ² Was applied for 1 minute to bond (f). As a result of tensile test of this joint, 40 kg /
A strength of mm ² was obtained.

Example 6 A Ni-base heat-resistant alloy was used as the high-strength material 1 (a), the joint surface was polished (b), Cu was ion-implanted into the joint surface (c), and the flat surface was further polished. (D) Two of them are set facing each other and set on the rotating jig 8 in the vacuum chamber 6, and the Cu injection surface is irradiated with an Ar ion beam from the ion beam oscillator 3 at 500 V for 1 minute to clean the bonding surface. After (e), the joint surfaces are opposed to each other, and 10 kg / mm ^{2 is applied} by the pressurizing device 4 and pressurizing cradle 5.
Was applied for 3 minutes to bond (f). When this joint was subjected to a tensile test, a joint strength of 50 kg / mm ² was obtained.

[0014]

According to the present invention, since high-strength materials can be joined without raising the temperature during joining, excellent joining strength can be obtained.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of a basic configuration of a room temperature bonding method of the present invention.

FIG. 2 is an explanatory diagram of a procedure of a room temperature bonding method according to an embodiment of the present invention.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical indication C23C 30/00 C23C 30/00 A B C23F 4/00 C23F 4/00 C

Claims (3)

[Claims] 1. When joining high-strength materials, after coating the joining surface with a soft material, the surface of the coating surface is irradiated with an ion beam in a vacuum, and perpendicular to the joining surface without heating in a vacuum state. Room temperature bonding method for high-strength materials, which comprises bonding by pressing in different directions. 2. A room-temperature bonding method for high-strength materials, characterized in that the soft material is any one of Al, Au, Ag and Cu. 3. The method for bonding a high-strength material at room temperature according to claim 1 or 2, wherein the soft material is coated by any one of ion plating, ion mixing, ion implantation and plating.