JPH0896940A - Ceramic heater - Google Patents

Ceramic heater

Info

Publication number
JPH0896940A
JPH0896940A JP22514494A JP22514494A JPH0896940A JP H0896940 A JPH0896940 A JP H0896940A JP 22514494 A JP22514494 A JP 22514494A JP 22514494 A JP22514494 A JP 22514494A JP H0896940 A JPH0896940 A JP H0896940A
Authority
JP
Japan
Prior art keywords
ceramic heater
ceramic
barrel
product
products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22514494A
Other languages
Japanese (ja)
Inventor
Magoji Okamoto
孫次 岡本
Masaya Onishi
雅也 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
N G K THERMOTEC KK
NGK Insulators Ltd
Original Assignee
N G K THERMOTEC KK
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by N G K THERMOTEC KK, NGK Insulators Ltd filed Critical N G K THERMOTEC KK
Priority to JP22514494A priority Critical patent/JPH0896940A/en
Publication of JPH0896940A publication Critical patent/JPH0896940A/en
Pending legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Heat Treatment Of Strip Materials And Filament Materials (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE: To provide a barrel-shaped ceramic heater which can perform equal heating even in case that the position of passage of a thread product deflects, and is fit for heat-treating a plurality of products at the same time. CONSTITUTION: This is a ceramic heater where a heating wire 2 is buried in spiral shape inside a ceramic barrel 1. This sectional form of the inner face of this barrel 1 is made elliptic or rectangular. Besides, it is desirable to set the value of the major axis minor axis of the inner face of the barrel 1 to 3/1 to 5/4.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、筒型のセラミックヒー
タの改良に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a cylindrical ceramic heater.

【0002】[0002]

【従来の技術】セラミック製の基体に発熱線を埋設した
セラミックヒータは古くから知られているが、そのひと
つとしてセラミック製の筒体を基体としたセラミックヒ
ータが提案されている。このような筒型のセラミックヒ
ータは、その内部に糸状、ワイヤー状の製品を高速度で
通過させながらこれらの製品を加熱処理するために使用
されるもので、例えば本出願人の出願に係る特開平6-20
8885号公報に記載のものがある。ところが、従来のこの
種の筒型のセラミックヒータに使用されているセラミッ
ク製の筒体は全て円筒状のものであったため、次の2つ
の問題があった。
2. Description of the Related Art Ceramic heaters in which a heating wire is embedded in a ceramic base have been known for a long time. As one of them, a ceramic heater based on a ceramic cylindrical body has been proposed. Such a cylindrical ceramic heater is used to heat-treat a thread-shaped or wire-shaped product at a high speed while allowing the product to be heat-treated therein. Kaihei 6-20
There is one described in Japanese Patent No. 8885. However, since the ceramic cylindrical bodies used in the conventional cylindrical ceramic heater of this type are all cylindrical, there are the following two problems.

【0003】第1に、糸状、ワイヤー状の製品の均熱を
図るため、これらの製品がセラミック製の筒体の中心を
通過するようにセラミックヒータがセットされるが、製
品の速度や単位長さ当りの重量が変化すると製品に作用
する遠心力(製品はローラ間でループを描くように移動
するので、遠心力が作用する)が変化し、製品がセラミ
ック製の筒体の中心から特定方向に振れることがある。
その結果、製品はセラミック製の筒体の一方の壁面に接
近するとともに反対側の壁面から離れるため、製品の片
面のみが強く加熱され、均一加熱が行えなくなる。
First, in order to equalize the temperature of thread-shaped or wire-shaped products, a ceramic heater is set so that these products pass through the center of a ceramic cylinder, but the speed and unit length of the product are set. If the weight per contact changes, the centrifugal force acting on the product (the product moves like a loop between rollers, centrifugal force acts) changes, and the product moves in a specific direction from the center of the ceramic cylinder. May swing to.
As a result, the product approaches one wall surface of the ceramic cylindrical body and separates from the opposite wall surface, so that only one surface of the product is strongly heated and uniform heating cannot be performed.

【0004】第2に、同時に複数本の製品を加熱処理し
ようとした場合、製品相互の接触を防止するために内部
に仕切り板を挿入する工夫もなされているが(例えば、
本出願人の出願に係る特開平6-208886号公報参照)、セ
ラミック製の筒体に二次加工を必要とし、セラミックヒ
ータの製作コストが嵩むこととなる。しかも筒径を拡大
しなければならないためにヒータ全体が大型化し、製作
コストが嵩むとともに消費電力も増加するのでランニン
グコストも嵩むこととなる。
Secondly, when a plurality of products are to be heat-treated at the same time, a partition plate is inserted inside to prevent the products from contacting each other (for example,
(See Japanese Patent Application Laid-Open No. 6-208886, filed by the applicant of the present invention), the ceramic cylinder requires secondary processing, which increases the manufacturing cost of the ceramic heater. Moreover, since the diameter of the cylinder must be increased, the heater as a whole becomes large in size, which increases manufacturing cost and power consumption, resulting in increased running cost.

【0005】[0005]

【発明が解決しようとする課題】本発明は上記した従来
の問題点を解決し、遠心力等によって製品の通過位置が
振れた場合にも均一加熱を行うことができ、また同時に
複数本の製品を加熱処理する場合にもセラミックヒータ
の製作コストやランニングコストの上昇を最小限に抑え
ることができる筒型のセラミックヒータを提供するため
になされたものである。
DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned conventional problems and can perform uniform heating even when the passing position of the product is shaken by centrifugal force or the like, and at the same time, a plurality of products The present invention has been made in order to provide a cylindrical ceramic heater capable of minimizing an increase in the manufacturing cost and running cost of the ceramic heater even when heat treatment is performed.

【0006】[0006]

【課題を解決するための手段】上記の課題を解決するた
めになされた本発明のセラミックヒータは、セラミック
製の筒体の内部に発熱線をスパイラル状に埋設したセラ
ミックヒータにおいて、この筒体の内面の断面形状を長
円形あるいは長方形としたことを特徴とするものであ
る。なお、上記した筒体の内面の長径/短径の値を3/1
〜5/4 とすることが好ましい。
The ceramic heater of the present invention, which has been made to solve the above-mentioned problems, is a ceramic heater in which a heating wire is embedded in a spiral shape inside a ceramic cylindrical body. The cross-sectional shape of the inner surface is oval or rectangular. In addition, the value of the major axis / minor axis of the inner surface of the above-mentioned cylinder is set to 3/1.
It is preferably set to 5/4.

【0007】[0007]

【作用】本発明のセラミックヒータは、筒体の内面の断
面形状を長円形あるいは長方形としたので、長径の方向
を遠心力等によって製品の通過位置が振れるおそれのあ
る方向にセットしておけば、糸状、ワイヤー状の製品の
通過位置が変動してもほぼ均一な加熱を行うことができ
る。また、長径の方向に複数本の糸状、ワイヤー状の製
品を通過させる場合にも、製品相互間の距離を確保する
ことができるとともに、従来のように仕切り板を挿入す
る方法に比較して安価に製作することができる。さら
に、長径方向にのみサイズを拡大させればよいので、ラ
ンニングコストの増加も抑制することができる。
In the ceramic heater according to the present invention, the inner surface of the cylindrical body has an oval or rectangular cross section. Therefore, if the direction of the major axis is set in a direction in which the passing position of the product may be shaken by centrifugal force or the like. Even if the passing position of the thread-shaped or wire-shaped product is changed, it is possible to perform substantially uniform heating. In addition, when passing multiple thread-shaped or wire-shaped products in the direction of the major axis, it is possible to secure the distance between the products and it is cheaper than the conventional method of inserting a partition plate. Can be manufactured. Furthermore, since it is sufficient to increase the size only in the major axis direction, it is possible to suppress an increase in running cost.

【0008】[0008]

【実施例】以下に本発明を図示の実施例によって更に詳
細に説明する。図1、図2において、1はセラミック製
の筒体、2はその内部にスパイラル状に埋設された発熱
線である。実施例では発熱線2は筒体1の外周の溝に巻
き付けられたうえ、その外周をスラリー状のセラミック
3で覆うことによって埋設されている。実施例の筒体1
の材質はコージェライト、発熱線2の材質はニクロム線
であるが、これらの材質は任意に変更することができ
る。
The present invention will be described below in more detail with reference to the illustrated embodiments. In FIGS. 1 and 2, reference numeral 1 is a ceramic cylindrical body, and 2 is a heating wire embedded therein in a spiral shape. In the embodiment, the heating wire 2 is wound around the groove on the outer circumference of the cylindrical body 1 and is embedded by covering the outer circumference with the slurry-like ceramic 3. Example cylinder 1
The material of the cordierite is the cordierite and the heating wire 2 is the nichrome wire, but these materials can be changed arbitrarily.

【0009】本発明では、セラミック製の筒体1はその
内面の断面形状を長円形(楕円形、トラック形等を含
む)あるいは長方形とされている。本実施例では図2に
示すようにセラミック製の筒体1の内面の断面形状は楕
円形である。この内面の断面形状は真円に近づくと従来
品と同様の欠点を生ずることとなり、逆に余りに細長く
なると長径側からの輻射熱が不足し、2枚の平板による
2方向からの加熱と同様、全周からの均一加熱が困難と
なる。このため、筒体1の内面の長径/短径の値は3/1
〜5/4 とすることが好ましく、実施例では長径が23mm、
短径が13mmで長径/短径の値はほぼ9/5 となっている。
In the present invention, the inner surface of the ceramic cylinder 1 has an oval shape (including an elliptical shape, a track shape, etc.) or a rectangular shape. In this embodiment, as shown in FIG. 2, the cross section of the inner surface of the ceramic cylinder 1 is elliptical. If the cross-sectional shape of this inner surface approaches a perfect circle, the same drawbacks as the conventional product will occur. On the contrary, if it becomes too slender, the radiant heat from the long diameter side will be insufficient, and as with heating from two directions by two flat plates, Uniform heating from the circumference becomes difficult. Therefore, the value of the major axis / minor axis of the inner surface of the cylinder 1 is 3/1
It is preferable to be ~ 5/4, in the example, the major axis is 23 mm,
The minor axis is 13 mm and the major axis / minor axis values are almost 9/5.

【0010】なお、この種のセラミックヒータは1本が
50〜1000Wのものが普通である。またその内面の短径は
10〜80mm、長さは125 〜1000mmのものが普通である。発
熱線2の両端は図2に示すように数珠碍子4に覆われた
引出し線5に接続されている。そして実施例では筒体1
の内面温度は約700 ℃である。
One ceramic heater of this type is
50 to 1000 W is common. Also, the minor axis of its inner surface is
It is usually 10 to 80 mm and the length is 125 to 1000 mm. Both ends of the heating wire 2 are connected to a lead wire 5 covered with a bead insulator 4, as shown in FIG. And in the embodiment, the cylindrical body 1
The inner surface temperature is about 700 ℃.

【0011】このように構成されたセラミックヒータ
は、例えば図1、図2のようにその中心に糸状、ワイヤ
ー状の製品10を高速度で通過させながら、全周から均一
に加熱処理するために使用される。このとき、前述した
ように製品10の速度や単位長さ当りの重量が変化するこ
とにより遠心力が変化し、図2に示すように製品10の通
過位置が振れることがある。しかし本発明では筒体1の
内面が長円形あるいは長方形の断面形状を持つので、図
2のように製品10が振れたとしても周囲の壁面からの距
離はさほど変動せず、ほぼ均一な加熱を行うことができ
る。
The ceramic heater having the above-described structure is designed to uniformly heat the entire circumference of the ceramic heater while allowing the thread-shaped or wire-shaped product 10 to pass through the center of the ceramic heater at a high speed as shown in FIGS. used. At this time, as described above, the centrifugal force changes due to changes in the speed and weight per unit length of the product 10, and the passing position of the product 10 may fluctuate as shown in FIG. However, in the present invention, since the inner surface of the cylindrical body 1 has an oval or rectangular cross-sectional shape, even if the product 10 shakes as shown in FIG. 2, the distance from the surrounding wall surface does not change so much and almost uniform heating is achieved. It can be carried out.

【0012】また、このように構成されたセラミックヒ
ータは、図3に示すようにその内部に複数本の製品10、
10を同時に通してこれらを加熱することができるが、こ
の場合にも筒体1の内面が長円形あるいは長方形の断面
形状を持つため、複数本の製品10、10の間隔を十分に取
ることができる。しかも筒体1の内部に仕切り板を設け
る必要がなく、製造が容易であるうえ、長径方向にのみ
筒体1のサイズを拡大すればよいので、製造コストの増
加を抑えることができるとともに、ランニングコストを
低減させることもできる。
Further, the ceramic heater thus constructed has a plurality of products 10, as shown in FIG.
These can be heated by passing them through 10 at the same time, but in this case as well, since the inner surface of the cylinder 1 has an oval or rectangular cross-sectional shape, it is possible to secure a sufficient interval between the plurality of products 10, 10. it can. Moreover, since it is not necessary to provide a partition plate inside the tubular body 1, the manufacturing is easy, and since the size of the tubular body 1 may be increased only in the major axis direction, an increase in manufacturing cost can be suppressed and running The cost can also be reduced.

【0013】[0013]

【発明の効果】以上に説明したように、本発明のセラミ
ックヒータはセラミック製の筒体の内面の断面形状を長
円形あるいは長方形としたものであるから、従来品とは
異なり製品の通過位置が振れた場合にも均一加熱を行う
ことができ、また同時に複数本の製品を加熱処理する場
合にもセラミックヒータの製作コストやランニングコス
トの上昇を最小限に抑えることができる利点がある。よ
って本発明は従来の問題点を解決したセラミックヒータ
として、価値の高いものである。
As described above, in the ceramic heater of the present invention, since the cross-sectional shape of the inner surface of the ceramic cylindrical body is oval or rectangular, the passing position of the product is different from the conventional product. There is an advantage that uniform heating can be performed even when shaken, and an increase in manufacturing cost and running cost of the ceramic heater can be suppressed to the minimum even when a plurality of products are heat-treated at the same time. Therefore, the present invention is highly valuable as a ceramic heater that solves the conventional problems.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例を示す縦断面図である。FIG. 1 is a vertical sectional view showing an embodiment of the present invention.

【図2】使用状態を示す横断面図である。FIG. 2 is a cross-sectional view showing a usage state.

【図3】他の使用状態を示す横断面図である。FIG. 3 is a cross-sectional view showing another usage state.

【符号の説明】[Explanation of symbols]

1 セラミック製の筒体、2 発熱線、3 セラミッ
ク、4 数珠碍子、5引出し線、10 糸状、ワイヤー状
の製品
1 Ceramic cylinder, 2 Heating wire, 3 Ceramic, 4 Bead insulator, 5 Lead wire, 10 Thread-shaped, wire-shaped product

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 セラミック製の筒体の内部に発熱線をス
パイラル状に埋設したセラミックヒータにおいて、この
筒体の内面の断面形状を長円形あるいは長方形としたこ
とを特徴とするセラミックヒータ。
1. A ceramic heater in which a heating wire is embedded in a spiral shape in a ceramic cylindrical body, wherein the cross-sectional shape of the inner surface of the cylindrical body is oval or rectangular.
【請求項2】 筒体の内面の長径/短径の値を3/1 〜5/
4 とした請求項1に記載のセラミックヒータ。
2. The value of the major axis / minor axis of the inner surface of the cylinder is 3/1 to 5 /
4. The ceramic heater according to claim 1, wherein
JP22514494A 1994-09-20 1994-09-20 Ceramic heater Pending JPH0896940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22514494A JPH0896940A (en) 1994-09-20 1994-09-20 Ceramic heater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22514494A JPH0896940A (en) 1994-09-20 1994-09-20 Ceramic heater

Publications (1)

Publication Number Publication Date
JPH0896940A true JPH0896940A (en) 1996-04-12

Family

ID=16824643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22514494A Pending JPH0896940A (en) 1994-09-20 1994-09-20 Ceramic heater

Country Status (1)

Country Link
JP (1) JPH0896940A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016139744A1 (en) * 2015-03-03 2017-05-25 三菱電機株式会社 Semiconductor manufacturing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2016139744A1 (en) * 2015-03-03 2017-05-25 三菱電機株式会社 Semiconductor manufacturing equipment

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