JPH0391690A - Resistance furnace using rod-shaped heating elements - Google Patents
Resistance furnace using rod-shaped heating elementsInfo
- Publication number
- JPH0391690A JPH0391690A JP22470289A JP22470289A JPH0391690A JP H0391690 A JPH0391690 A JP H0391690A JP 22470289 A JP22470289 A JP 22470289A JP 22470289 A JP22470289 A JP 22470289A JP H0391690 A JPH0391690 A JP H0391690A
- Authority
- JP
- Japan
- Prior art keywords
- rod
- shaped heating
- heating elements
- resistance furnace
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 73
- 238000002791 soaking Methods 0.000 abstract description 17
- 230000000694 effects Effects 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000009970 fire resistant effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Landscapes
- Vertical, Hearth, Or Arc Furnaces (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
Abstract
Description
本発明は棒状発熱体を用いた抵抗加熱炉（以下抵抗炉と
いう）に関し、とくにセラミックスの焼成、結晶の育戊
等主として高温領域で用いられる抵抗炉に関する。The present invention relates to a resistance heating furnace (hereinafter referred to as a resistance furnace) using a rod-shaped heating element, and more particularly to a resistance furnace used primarily in high-temperature areas such as firing ceramics and growing crystals.
高温を発生させる装置として、高周波誘導炉や輻射加熱
炉に比して簡単な構造の抵抗炉が産業用及び実験用に使
われている。第３図は井桁配置の棒状発熱体による抵抗
炉の一例を示す。棒状発熱体１ａ、 ｌｂが耐火性周壁
２内の均熱管３の両側に間管と直交する平面上」こ平行
配置され、この平面から適宜隔てられた平面上の均熱管
３両側に上記棒状発熱体１ａ、１ｂとそれぞれ平行に棒
状発熱体１１ａ１１１ｂが配置され、同様な間隔毎に棒
状発熱体３１ａ。
３１ｂ等が平行配置される。これら平行棒状発熱体の対
１ａ、ｌｂ； １１ａ、１１ｂ； ３１ａ、３１ｂの中
間にこれらと直角に棒状発熱体の対２１ａ、２１ｂ；
４１ａ、４１ｂ等が均熱管３を挟んで平行配置される。
第４Ａ図及び第４Ｂ図はその平面図及び縦断面図をそれ
ぞれ示す。
図示の棒状発熱体１ａ、１ｂ・・・４１ａ、４１ｂ等は
例えばカーボン、白金、ＳｉＣ，ＬａＣｒＯｓ、ＺｒＯ
＊等の材料によって構成される。発熱体の形状や配置は
、所要の温度分布条件、使用される雰囲気、経済性等を
考慮して製作の都度設計しなければならなかった。As a device for generating high temperature, a resistance furnace, which has a simpler structure than a high frequency induction furnace or a radiant heating furnace, is used for industrial and experimental purposes. FIG. 3 shows an example of a resistance furnace using rod-shaped heating elements arranged in parallel grids. Rod-shaped heating elements 1a and lb are arranged in parallel on both sides of the heat-equalizing tube 3 in the refractory peripheral wall 2 on a plane orthogonal to the inner tube, and the rod-shaped heating elements 1a and lb are arranged on both sides of the equalizing tube 3 on a plane that is appropriately separated from this plane. Rod-shaped heating elements 11a111b are arranged parallel to the bodies 1a and 1b, respectively, and rod-shaped heating elements 31a are arranged at similar intervals. 31b etc. are arranged in parallel. A pair of parallel rod-shaped heating elements 1a, 1b; 11a, 11b; A pair of rod-shaped heating elements 21a, 21b at right angles between these parallel rod-shaped heating elements 31a, 31b;
41a, 41b, etc. are arranged in parallel with the soaking tube 3 in between. FIGS. 4A and 4B show a plan view and a vertical cross-sectional view, respectively. The illustrated rod-shaped heating elements 1a, 1b...41a, 41b, etc. are made of, for example, carbon, platinum, SiC, LaCrOs, ZrO.
*Constructed from materials such as *. The shape and arrangement of the heating element had to be designed each time it was manufactured, taking into consideration the required temperature distribution conditions, the atmosphere in which it would be used, economic efficiency, etc.
上記の棒状発熱体による抵抗炉は、高温・酸化性雰囲気
中（ただし、酸化雰囲気中のカーボンを除く。）で使用
できる利点を有するものの、均熱管３の外周方向におけ
る熱源配置が一様でないために周方向の温度分布が不均
一となる傾向をもつ欠点があった。また、均熱管３の長
さ方向においても、棒状発熱体がいわば点状の熱源とな
り温度傾斜の制御に不便である欠点も認められた。
従って、本発明の目的は高温領域において周方向の温度
分布が一様であり且つ長さ方向の温度傾斜の制御に便利
である棒状発熱体を用いた抵抗炉を提供するにある。Although the above-mentioned resistance furnace using a rod-shaped heating element has the advantage of being usable in a high-temperature, oxidizing atmosphere (excluding carbon in the oxidizing atmosphere), the heat source arrangement in the outer circumferential direction of the soaking tube 3 is not uniform. However, there was a drawback that the temperature distribution in the circumferential direction tended to be uneven. Further, in the length direction of the heat soaking tube 3, a drawback was also recognized in that the rod-shaped heating element became a so-called point-like heat source, making it inconvenient to control the temperature gradient. SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a resistance furnace using a rod-shaped heating element, which has a uniform temperature distribution in the circumferential direction in a high temperature region and is convenient for controlling the temperature gradient in the longitudinal direction.
第１Ａ図及び第１Ｂ図の実施例を参照するに、本発明に
よる棒状発熱体を用いた抵抗炉は、耐火性周壁２内に配
置された円筒状均熱管３の中心軸線１０と直交する所定
径りの炉内仮想円１１に外接し且つその仮想円１１の面
と異なる向き及び角度で交差する如く配置された３本以
上の棒状発熱体１ａ−１ｆを備えてなる構成を用いる。
この実施例の仮想円１１は均熱管３と同心的に選ばれそ
の径りは均熱管３のそれより僅かに大きく選ばれる。し
かし、本発明による棒状発熱体を用いた抵抗炉において
は均熱管３は必ずしも必要ではなく、軸線ｌＯも均熱管
３の中心軸線に限定されるものではなく、抵抗炉内の任
意の軸線であれば足りる。本発明における仮想円１１は
抵抗炉内にあることを要する。棒状発熱体の数は６本に
限定されず、また棒状発熱体１ａ−１ｆの支持方法も図
示例の耐火性周壁２への固定に限定されるものではない
。
図示例の棒状発熱体１ａとｌｂは同方向に配置されてい
るが、ｌａが右下がりであるのに対しｌｂは右上がりで
あるので両者は異なる向きと角度で仮想円１１の面と交
差する。棒状発熱体１ｃとｌｄとは、同様にして相互に
異なる向きと角度で仮想円１１の面と交差し、また棒状
発熱体１ａ及びｌｂとは異なった方向に配置される。棒
状発熱体１ｅとＩｆとは、同様にして相互に異なる向き
と角度で仮想円１１の面と交差し、また棒状発熱体１ａ
及びｌｂ並びに棒状発熱体Ｉｃと１ｄとは異なった方向
に配置される。
従って、６本の棒状発熱体１ａ、 ｌｂ、 １ｃＳｌｄ
Ｓｌｅ。
Ｉｆはすべて相互に異なる向き及び角度で仮想円１１の
面と交差する。しかも各棒状発熱体１ａ−１ｆはそれぞ
れ仮想円１１に外接する。
電気的には、接続線４ａ−４ｇを介して６本の棒状発熱
体１ａ−１ｆが全て直列に制御回路５へ接続された例が
図示されている。しかし、本発明における棒状発熱体相
互間の接続はこの直列接続に限定されるものではない。Referring to the embodiments shown in FIGS. 1A and 1B, a resistance furnace using a rod-shaped heating element according to the present invention is provided with A configuration is used in which three or more rod-shaped heating elements 1a-1f are arranged so as to circumscribe an imaginary circle 11 inside the furnace and intersect the plane of the imaginary circle 11 in different directions and angles. The virtual circle 11 in this embodiment is chosen to be concentric with the heat soaking tube 3, and its diameter is chosen to be slightly larger than that of the heat soaking tube 3. However, in the resistance furnace using the rod-shaped heating element according to the present invention, the soaking tube 3 is not necessarily necessary, and the axis lO is not limited to the center axis of the soaking tube 3, but may be any axis in the resistance furnace. That's enough. The virtual circle 11 in the present invention is required to be inside a resistance furnace. The number of rod-shaped heating elements is not limited to six, and the method of supporting the rod-shaped heating elements 1a-1f is not limited to fixing them to the fire-resistant peripheral wall 2 as shown in the illustrated example. The rod-shaped heating elements 1a and lb in the illustrated example are arranged in the same direction, but since la is downward to the right while lb is upward to the right, they intersect the plane of the virtual circle 11 in different directions and angles. . The rod-shaped heating elements 1c and ld similarly intersect the plane of the virtual circle 11 in mutually different directions and angles, and are arranged in different directions from the rod-shaped heating elements 1a and lb. The rod-shaped heating elements 1e and If similarly intersect the plane of the virtual circle 11 at mutually different directions and angles, and the rod-shaped heating elements 1a
and lb and the rod-shaped heating elements Ic and 1d are arranged in different directions. Therefore, six rod-shaped heating elements 1a, lb, 1cSld
Sle. If all intersect the plane of the virtual circle 11 in mutually different directions and angles. Moreover, each of the rod-shaped heating elements 1a-1f circumscribes the virtual circle 11, respectively. Electrically, an example is shown in which six rod-shaped heating elements 1a-1f are all connected in series to the control circuit 5 via connection lines 4a-4g. However, the connection between rod-shaped heating elements in the present invention is not limited to this series connection.
第１Ａ図及び第１Ｂ図の実施例において３本以上、この
場合６本の棒状発熱体１ａ−１ｆが付勢されて発熱する
と、均熱管３の前記仮想円１１に囲まれる部分は高温度
に加熱され、しかもその仮想円１１に外接する棒状発熱
体と３力所以上、この場合６カ所で接近しているので第
３図の２カ所接近の場合に比して周方向温度分布の一様
性が向上する。均熱管３がない場合であってもこの周方
向温度分布の改善とその制御が容易になることは当業者
には明らかである
また、この場合６本である３本以上の棒状発熱体１ａ−
１ｆがそれぞれ異なる向きと角度で仮想円１１の面に交
差しているので、均熱管３の長さ方向における受熱部分
が仮想円１１の面に限定されず一定の幅をもったものと
、なる。よって、均熱管３の長さ方向、即ち抵抗炉の長
さ方向の温度分布の一様性も改善される。均熱管３がな
い場合にもこの抵抗炉長さ方向温度分布の改善とその制
御性の向上が実現されることは当業者には明らかである
。
従って、本発明の目的である「高温領域において周方向
の温度分布が一様であり且つ長さ方向の温度傾斜の制御
に便利な棒状発熱体を用いた抵抗炉」の提供が遠戚され
る。In the embodiment shown in FIGS. 1A and 1B, when three or more, in this case six, rod-shaped heating elements 1a-1f are energized and generate heat, the portion of the soaking tube 3 surrounded by the virtual circle 11 reaches a high temperature. Since it is heated and is close to the rod-shaped heating element circumscribing the virtual circle 11 at three or more places, in this case six places, the temperature distribution in the circumferential direction is more uniform than in the case where two places are close as shown in Fig. 3. Improves sex. It is clear to those skilled in the art that even if there is no soaking tube 3, the circumferential temperature distribution can be improved and controlled easily.
1f intersect the surface of the virtual circle 11 in different directions and angles, so the heat receiving portion in the length direction of the soaking tube 3 is not limited to the surface of the virtual circle 11 but has a constant width. . Therefore, the uniformity of temperature distribution in the length direction of the soaking tube 3, that is, in the length direction of the resistance furnace is also improved. It is clear to those skilled in the art that even when the soaking tube 3 is not provided, the temperature distribution in the longitudinal direction of the resistance furnace and its controllability can be improved. Therefore, the object of the present invention, which is to provide a resistance furnace using a rod-shaped heating element that has a uniform temperature distribution in the circumferential direction in a high-temperature region and is convenient for controlling the temperature gradient in the longitudinal direction, is distantly related. .
第２図は、均熱管３の長さ方向、即ち抵抗炉の長さ方向
の温度分布を改善するため、第１Ａ図の棒状発熱体１ａ
−１ｆの様な棒状発熱体群を多段に設けた実施例を示す
。この場合３段に設けた棒状発熱体群５１．６１．７１
のそれぞれが、第１Ａ図の棒状発熱体１ａ−１ｆと同様
に配置された３本以上の複数の棒状発熱体からなる。各
群５１．６１．７１はそれぞれの接続線５４ａ−５４ｇ
、 ６４ａ−６４ｇ、７４ａ−７４ｇ （両端のみを図
示する。）により対応制御回路５５．６５．７５に接続
される。
好ましくは、これらの制御回路により、各棒状発熱体群
５１．６１．７１が独立に制御される。
第３図の様な２本の棒状発熱体による平面状の加熱に比
して、第２図の実施例の各棒状発熱体群５１、６１．７
１による加熱は抵抗炉の長さ方向に一定の幅を有するの
で、隣接加熱部分間の温度勾配を低く抑えることができ
る。抵抗炉の長さ方向の温度分布に所定のパターンが必
要な場合にも、制御回路５５．６５．７５によって独立
に制御される棒状発熱体群５１．６１．７１を用い高精
度でこれを実現することができる。
各棒状発熱体群を６本の棒状発熱体により構成する例に
ついて説明したが、均熱管３又は抵抗炉が大口径である
場合には、例えば８本の棒状発熱体を８角形に配置する
等多数の棒状発熱体を使用し外周方向の温度分布の一様
性を高めることができる。また小口径である場合には棒
状発熱体の数を少なくしこれを三角形や四角形に配置す
ることもできる。第２図の多段配置の場合に、各棒状発
熱体群５１．６１．７１内の棒状発熱体の数及び形状を
適宜独立に調整して所要の温度分布を高精度で実現する
こともできる。
均熱管３を使用する場合にもその断面形状は円形に限定
されるものでではなく各種形状のもののしようが可能で
ある。
高温用の抵抗炉に対する棒状発熱体の好ましい材料とし
て、対熱性及び耐酸性が高くしかも発熱体として市販さ
れている５ｉＣＳＬａＣｒＯ１又はＺｒＯ＊を使うこと
ができる。本発明の一特徴は、特殊仕様により少量生産
した棒状発熱体を用いることなく、市販の棒状発熱体を
適切に選択し上記説明の様に配置することにより高温用
の抵抗炉を短期間に低コストで製作可能にした点にあるIn order to improve the temperature distribution in the length direction of the soaking tube 3, that is, in the length direction of the resistance furnace, FIG.
An embodiment in which rod-shaped heating element groups such as -1f are provided in multiple stages is shown. In this case, a group of rod-shaped heating elements 51.61.71 provided in three stages
Each of these consists of a plurality of three or more rod-shaped heating elements arranged in the same manner as the rod-shaped heating elements 1a-1f in FIG. 1A. Each group 51.61.71 has its own connecting wire 54a-54g
, 64a-64g, 74a-74g (only both ends shown) are connected to corresponding control circuits 55, 65, 75. Preferably, each rod-shaped heating element group 51, 61, 71 is independently controlled by these control circuits. Compared to the planar heating using two rod-shaped heating elements as shown in FIG. 3, each rod-shaped heating element group 51, 61.7 in the embodiment shown in FIG.
Since the heating by No. 1 has a constant width in the length direction of the resistance furnace, the temperature gradient between adjacent heating parts can be kept low. Even when a predetermined pattern is required for the temperature distribution in the longitudinal direction of the resistance furnace, this can be achieved with high precision using rod-shaped heating element groups 51.61.71 that are independently controlled by control circuits 55.65.75. can do. Although an example in which each rod-shaped heating element group is composed of six rod-shaped heating elements has been described, if the soaking tube 3 or the resistance furnace has a large diameter, for example, eight rod-shaped heating elements may be arranged in an octagonal shape. By using a large number of rod-shaped heating elements, it is possible to improve the uniformity of temperature distribution in the circumferential direction. Furthermore, when the diameter is small, the number of rod-shaped heating elements can be reduced and they can be arranged in a triangular or square shape. In the case of the multi-stage arrangement shown in FIG. 2, the number and shape of the rod-shaped heating elements in each rod-shaped heating element group 51, 61, 71 can be appropriately and independently adjusted to achieve a desired temperature distribution with high precision. Even when the heat soaking tube 3 is used, its cross-sectional shape is not limited to a circular shape, and various shapes can be used. As a preferable material for the rod-shaped heating element for a high-temperature resistance furnace, 5iCSLaCrO1 or ZrO*, which has high heat resistance and acid resistance and is commercially available as a heating element, can be used. One feature of the present invention is that the high-temperature resistance furnace can be reduced in a short period of time by appropriately selecting commercially available rod-shaped heating elements and arranging them as explained above, without using rod-shaped heating elements produced in small quantities according to special specifications. The reason is that it can be manufactured at low cost.
以上詳細に説明したように本発明による棒状発熱体を用
いた抵抗炉は、軸線と直交する所定径の炉内仮想円に外
接し且つその仮想円の面と異なる向き及び角度で交差す
る如く配置された３本以上の棒状発熱体を備えてなる構
成を用いるので、次の効果を奏する。
（イ）抵抗炉の周方向の温度分布の一様性を改善するこ
とができる。
（ロ）抵抗炉の長さ方向の温度分布の一様性を高めるこ
とができる。
（ハ）棒状発熱体群を多段に配置することにより抵抗炉
の長さ方向の所要温度分布を高い精度で実現することが
できる。As explained in detail above, a resistance furnace using a rod-shaped heating element according to the present invention is arranged so as to circumscribe an imaginary circle in the furnace having a predetermined diameter orthogonal to the axis and intersect the plane of the imaginary circle in different directions and angles. Since a configuration including three or more rod-shaped heating elements is used, the following effects are achieved. (a) The uniformity of temperature distribution in the circumferential direction of the resistance furnace can be improved. (b) The uniformity of temperature distribution in the longitudinal direction of the resistance furnace can be improved. (c) By arranging rod-shaped heating element groups in multiple stages, the required temperature distribution in the length direction of the resistance furnace can be achieved with high accuracy.
第１Ａ図及び第１Ｂ図は一実施例の図式的平面図及び図
式的側面図、第２図は他の実施例の説明図、第３図は従
来の抵抗炉の斜視図、第４Ａ図及び第４Ｂ図は第３図の
抵抗炉の平面図及び要部断面図である。
１ａ−１ｆ、 １ｌａ−１１ｂ、２１ａ−２１ｂ、
３１ａ−３１ｂ、４１ａ−４１ｂ・＝棒状発熱体、
５１．６１．７１・・・棒状発熱体群、２・・・耐火性
周壁、 ３・・・均熱管、４ａ−４ｇ、５４ａ−５４ｇ
、 ６４ａ−６４ｇ、 ７４ａ−７４ｇ・・・接続線、
５．５５．６５．７５・・・制御回路、 １０・・・軸
線、 １１・・・仮想円。
特特許出願人、 大倉電気株式会社
特許出願代理人 弁理士 市東禮次部第
ｉＡ図
第１Ｂ図
３刃熟マ
第
図1A and 1B are a schematic plan view and a schematic side view of one embodiment, FIG. 2 is an explanatory diagram of another embodiment, FIG. 3 is a perspective view of a conventional resistance furnace, and FIG. 4A and FIG. 4B is a plan view and a sectional view of essential parts of the resistance furnace shown in FIG. 3. 1a-1f, 1la-11b, 21a-21b,
31a-31b, 41a-41b = rod-shaped heating element,
51.61.71... Rod-shaped heating element group, 2... Fire-resistant peripheral wall, 3... Soaking tube, 4a-4g, 54a-54g
, 64a-64g, 74a-74g...connection line,
5.55.65.75... Control circuit, 10... Axis line, 11... Virtual circle. Patent applicant, Okura Electric Co., Ltd. Patent application agent Patent attorney Tsugube Ichito
Claims (4)
その仮想円の面と異なる向き及び角度で交差する如く配
置された３本以上の棒状発熱体を備えてなる棒状発熱体
を用いた抵抗炉。(1) A rod-shaped heating element comprising three or more rod-shaped heating elements circumscribed by an imaginary circle in the furnace of a predetermined diameter perpendicular to the axis and arranged so as to intersect the plane of the imaginary circle in different directions and angles. The resistance furnace used.
の材料をＳｉＣ、ＬａＣｒＯ＿３、又はＺｒＯ＿２とし
てなる棒状発熱体を用いた抵抗炉。(2) A resistance furnace according to claim 1, in which the rod-shaped heating element is made of SiC, LaCrO_3, or ZrO_2.
その仮想円の面と異なる向き及び角度で交差する如く配
置された３本以上の棒状発熱体、及び前記軸線に沿って
前記仮想円から所定間隔づつ隔てられて前記軸線と直交
する所定径の１個以上の第２炉内仮想円の各第２炉内仮
想円に外接し且つその当該各第２仮想円の面と異なる向
き及び角度で交差する如く配置された３本以上の第２棒
状発熱体を備えてなる棒状発熱体を用いた抵抗炉。(3) three or more rod-shaped heating elements circumscribed by an imaginary circle in the furnace having a predetermined diameter perpendicular to the axis and arranged so as to intersect the plane of the imaginary circle in different directions and angles; One or more second in-furnace imaginary circles of a predetermined diameter that are spaced apart from the imaginary circle by a predetermined interval and orthogonal to the axis, circumscribing each second in-furnace imaginary circle and different from the plane of each second imaginary circle. A resistance furnace using a rod-shaped heating element, comprising three or more second rod-shaped heating elements arranged so as to intersect in directions and angles.
熱体と前記第２棒状発熱体とを相互に独立に制御する制
御回路を備えてなる棒状発熱体を用いた抵抗炉。(4) A resistance furnace using a rod-shaped heating element according to claim 3, which includes a control circuit that controls the rod-shaped heating element and the second rod-shaped heating element independently of each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22470289A JPH0684869B2 (en) | 1989-09-01 | 1989-09-01 | Resistance furnace using rod-shaped heating element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22470289A JPH0684869B2 (en) | 1989-09-01 | 1989-09-01 | Resistance furnace using rod-shaped heating element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0391690A true JPH0391690A (en) | 1991-04-17 |
| JPH0684869B2 JPH0684869B2 (en) | 1994-10-26 |
Family
ID=16817905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22470289A Expired - Lifetime JPH0684869B2 (en) | 1989-09-01 | 1989-09-01 | Resistance furnace using rod-shaped heating element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0684869B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005069514A (en) * | 2003-08-20 | 2005-03-17 | Ngk Insulators Ltd | Heat-treating furnace |
| JP2005164090A (en) * | 2003-12-01 | 2005-06-23 | Nikko Materials Co Ltd | Low-profile high temperature electric furnace with plate-like heating element |
-
1989
- 1989-09-01 JP JP22470289A patent/JPH0684869B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005069514A (en) * | 2003-08-20 | 2005-03-17 | Ngk Insulators Ltd | Heat-treating furnace |
| JP2005164090A (en) * | 2003-12-01 | 2005-06-23 | Nikko Materials Co Ltd | Low-profile high temperature electric furnace with plate-like heating element |
| JP4563022B2 (en) * | 2003-12-01 | 2010-10-13 | 日鉱金属株式会社 | Thin high-temperature electric heating furnace composed of plate-like heating elements |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0684869B2 (en) | 1994-10-26 |
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