JPH06295914A - Heating treater - Google Patents

Abstract

PURPOSE:To equalize heat of heating units for heating continuous materials to be heated. CONSTITUTION:A heating treater is constituted into a structure, wherein heating units 10, 12 and 14 to correspond to continuous mateirals to be heated are dividedly installed in a plurality of zones Zc and Ze and independent electrodes 16a, 16b, 18b, 20a and 20b are respectively provided on the heating units in each zone to perform an independent heat generation control in each heating unit in each zone and at the same time, arbitrary intervals D are respectively set between the heating units in the zones according to a distribution of heat generation and partition walls 28 are respectively installed within the intervals between the zones.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heater used for heat treatment of semiconductor wafers and the like.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor manufacturing apparatus, in an electric furnace which constitutes a heater for heating a semiconductor wafer, as shown in FIG. 4, a heating element 4 having a coil shape is provided inside a cylindrical heat insulating tube 2. It is installed. The heating element 4 is divided into, for example, three zones such as an end zone Ze and a center zone Zc, and electrodes 6a, 6b, 6c and 6d corresponding to the zones Ze and Zc are provided. The heating element 4 sets the temperature distribution in the furnace by performing power control independently or in the master-slave system for each of the zones Ze and Zc.

[0003]

By the way, in such a heater, the heating element 4 forming the adjacent zones Ze and Zc is used.
Are single and continuous, and the intermediate electrode (terminal) 6b is shared between the adjacent zones Ze and Zc, and the electrode 6c is shared between the adjacent zones Zc and Ze. .

Therefore, the adjacent zones Ze of the heating element 4 are
The heat generation between Zc influences each other, and it is difficult to set a predetermined temperature distribution, and the elongation due to the heat generation of the heat generating body 4 is concentrated on the electrode portion, so that the heat generating body 4 is largely deformed.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a heater in which a heating element for heating a continuous object to be heated is soaked.

[0006]

That is, the heater according to the present invention comprises a heating element (10, 12,
14) is installed by being divided into a plurality of zones (Zc, Ze), and an electrode (16) independent of the heating element in each zone is provided.
a, 16b, 18a, 18b, 20a, 20b) are provided to independently control heat generation for each heating element in each zone, and an arbitrary interval (according to the heat generation distribution between the heating elements in each zone). D) is set, and the partition wall (28) is installed within the interval of the zone.

[0007]

In the heater according to the present invention, the heating elements are made independent for each zone Zc and Ze, and the heat generation is controlled individually, so that the temperature distribution can be easily set, and continuous heating objects can be provided. Uniform heating is possible. A partition wall is installed within the interval between the zones, and the partition wall improves the thermal influence between the heating elements. That is, the heat addition due to the heat radiation and the heat addition due to the heat convection are synergistically added between the adjacent heat generating elements, so that a high temperature part may be partially formed.
The installation of such a partition wall has a function of effectively suppressing heat addition due to heat radiation and heat convection. Therefore, in this heater, optimum soaking heating is realized for the continuous object to be heated.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of a heater according to the present invention. On the inner wall surface of the heat insulating cylinder 2 having a length corresponding to the heated object such as a continuous process tube, for example, in the length direction of the continuous heated object, for example, three zones, that is, one center zone Zc and two zones. The heating elements 10, 12, 14 divided into the end zones Ze are installed. Each heating element 10
Numerals 14 to 14 are heating resistance wires wound at a constant pitch and molded into a coil, and are installed inside the heat insulating cylinder 2 at specific intervals in consideration of the heat generation distribution.

At the end of each heating element 10-14,
A plurality of independent electrodes 16a, 16b, 18a, 18b,
20a, 20b are attached, and each electrode 16a-20b
Penetrates the heat insulating cylinder 2 and is drawn out to the outer wall surface of the heat insulating cylinder 2.

As shown in FIG. 2, the heater thus constructed has the heating elements 10, 12, which form the zones Ze, Zc, respectively.
14 are installed with a specific distance D, and electrodes 16a, 1
6b, electrodes 18a and 18b, and electrodes 20a and 20b are supplied with independent power sources 22, 24 and 26, respectively,
By independent power control, the temperature of each heating element 10 to 14 is individually controlled, and a specific temperature distribution can be easily set such that the heating elements 10 to 14 have a uniform or gradient required for processing. In addition, the interval D between the zones Ze and Zc, which was difficult with a continuous heating element,
Can be easily set according to the temperature distribution, the thermal influence due to heat conduction can be avoided, and the temperature distribution accuracy can be improved. Since the heating element in the space D is unnecessary, the heating element material can be saved accordingly.

The heating element 10 is provided in each of the zones Ze and Zc.
Since -14 are independent, the expansion of each heating element 10-14 does not concentrate on the conventional shared electrode portion, and deformation due to stress concentration is prevented.

Then, as shown in FIG. 3, each zone Z
If a ring-shaped partition wall 28 is installed in the space D between the heating elements 10, 12 and 14 of e and Zc, the adjacent heating elements 10 to 1
It is possible to cut off the heat conduction in the interval D of 4 to avoid a thermal effect, and to easily set a stable and highly accurate temperature distribution. The partition wall 28 may be integrally formed with the heat insulating cylinder 2 by using a heat insulating material such as ceramic like the heat insulating cylinder 2, or may be fixed to the inner wall surface of the heat insulating cylinder 2 independently of the heat insulating cylinder 2. .

In the embodiment, the case where three zones are set has been described, but the present invention can be applied to the case of division into two zones or four zones or more.

[0014]

As described above, according to the present invention, a heating element corresponding to a continuous object to be heated is divided into zones, and an independent electrode is installed on the heating element in each zone to control electric power. By doing so, independent temperature settings can be made, and since a partition wall that separates each heating element is installed in the interval between each zone, it is possible to avoid temperature rise due to heat radiation and heat convection between adjacent heating elements. The distribution can be easily set, and the disadvantages such as the deformation of the heating element that occurs in the case of a continuous heating element can be eliminated.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of a heater according to the present invention.

FIG. 2 is a diagram showing a configuration of a heating element of the heater shown in FIG.

FIG. 3 is a view showing another embodiment of the heater of the present invention.

FIG. 4 is a diagram showing a conventional heater.

[Explanation of symbols]

10, 12 and 14 Heating element 16a, 16b, 18a, 18b, 20a, 20b Electrode 28 Partition wall Zc Center zone Ze End zone D Interval

[Procedure amendment]

[Submission date] December 20, 1991

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] Full text

[Correction method] Change

[Correction content]

[Document name] Statement

Title: Heat treatment apparatus

[Claims]

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat treatment apparatus used for heat treatment of semiconductor wafers and the like.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor manufacturing apparatus, in an electric furnace which constitutes a heater for heating a semiconductor wafer, as shown in FIG. 4, a heating element 4 having a coil shape is installed inside a cylindrical heat insulating tube 2. is doing. The heating element 4 is divided into, for example, three zones such as an end zone Ze and a center zone Zc, and electrodes 6a, 6b, 6c and 6d corresponding to the zones Ze and Zc are provided. The heating element 4 performs power control independently or in a master-slave system for each zone Ze and Zc to set the temperature distribution in the furnace.

[0003]

By the way, in such a heat treatment apparatus, adjacent zones Ze and Zc of the heating element 4 are provided.
There is a drawback in that the heat generation between the two influences each other, making it difficult to set a predetermined temperature distribution.

Therefore, an object of the present invention is to provide a heat treatment apparatus which makes it easy to set a continuous object to be processed into a desired temperature distribution.

[0005]

In the heat treatment apparatus of the present invention, a heating element having a heating resistance wire provided in a coil shape, two electrodes provided on the heating element, and the heating element are independent of each other. A plurality of variable power sources which are respectively provided and independently connected to the respective heating elements, a means for individually controlling the electric power of the plurality of heating elements by the respective variable power sources, and a plurality of the heating elements are housed inside. And a heat insulating body made of ceramics provided as described above.

In the heat treatment apparatus of the present invention,
Each electrode provided in each heating element is characterized by being provided so as to penetrate the heat insulating body.

Further, the heat treatment apparatus of the present invention includes a heating element in which heating resistance wires are provided in a coil shape at a constant pitch,
Two electrodes provided on the heating element, a variable power source provided with a plurality of the heating elements independently and connected between the two electrodes of each heating element, and a ceramic provided outside the heating elements And a heat insulating body comprising.

[0008]

In the heat treatment apparatus of the present invention, a plurality of independent coil-shaped heating elements are housed in a ceramic heat insulating body,
The temperature distribution is easily set by connecting a variable power source between the electrodes provided on each heating element.

[0009]

FIG. 1 shows an embodiment of the heat treatment apparatus of the present invention. On the inner wall surface of the heat insulating cylinder 2 having a length corresponding to the heated object such as a continuous process tube, for example, in the length direction of the continuous heated object, for example, three zones, that is, one center zone Zc and two zones. The heating elements 10, 12, 14 divided into the end zones Ze are installed. Each of the heating elements 10 to 14 is a coil formed by winding a heating resistance wire at a constant pitch, and is installed inside the heat insulating cylinder 2 at a specific interval in consideration of the heat generation distribution.

At the end of each heating element 10-14,
A plurality of independent electrodes 16a, 16b, 18a, 18b,
20a, 20b are attached, and each electrode 16a-20b
Penetrates the heat insulating cylinder 2 and is drawn out to the outer wall surface of the heat insulating cylinder 2.

As shown in FIG. 2, the heat treatment apparatus having the above-described structure includes the heating elements 10 forming the zones Ze and Zc.
12, 14 are installed at a specific distance D, and electrodes 16
a, 16b, electrodes 18a, 18b, electrodes 20a, 2
Independent power supplies 22, 24, and 26 are provided between 0b to independently control the temperature of each heating element 10 to 14 by independent power control, and have a uniform temperature distribution or temperature gradient required for processing. , Specific temperature distribution can be set easily. In addition, each zone Z which was difficult with a continuous heating element
The distance D between e and Zc can be easily set according to the temperature distribution, and the thermal influence due to heat conduction can be avoided, and the temperature distribution accuracy can be improved. Since the heating element in the space D is unnecessary, the heating element material can be saved accordingly.

The heating element 10 is provided in each of the zones Ze and Zc.
Since -14 are independent, the expansion of each heating element 10-14 does not concentrate on the conventional shared electrode portion, and deformation due to stress concentration is prevented.

Then, as shown in FIG. 3, each zone Z
If a ring-shaped partition wall 28 is installed in the space D between the heating elements 10, 12 and 14 of e and Zc, the adjacent heating elements 10 to 1
It is possible to cut off the heat conduction in the interval D of 4 to avoid a thermal effect, and to easily set a stable and highly accurate temperature distribution. The partition wall 28 may be integrally formed with the heat insulating cylinder 2 by a heat insulating material such as ceramic as in the heat insulating cylinder 2, or may be independent of the heat insulating cylinder 2 and fixed to the inner wall surface of the heat insulating cylinder 2.

In the embodiment, the case where three zones are set has been described, but the present invention can be applied to the case of division into two zones or four zones or more.

[0015]

As described above, according to the present invention, a plurality of coil-shaped heat generating elements provided inside a heat insulating body made of ceramic and two independent electrodes for each heat generating element are installed to generate heat. By controlling the power of the body independently,
The desired temperature distribution can be set easily.

[Brief description of drawings]

FIG. 1 is a diagram showing an embodiment of a heat treatment apparatus of the present invention.

FIG. 2 is a diagram showing a configuration of a heating element of the heat treatment device shown in FIG.

FIG. 3 is a diagram showing another embodiment of the heat treatment apparatus shown in FIG.

FIG. 4 is a diagram showing a conventional heat treatment apparatus.

[Explanation of reference numerals] 10, 12, 14 Heating element 16a, 16b, 18a, 18b, 20a, 20b Electrode Zc Center zone Ze End zone

Claims (1)

[Claims] 1. A heating element corresponding to a continuous object to be heated is divided into a plurality of zones and installed, and each heating element in each zone is provided with an independent electrode so that each heating element in each zone is independent. In addition to performing the above-mentioned heat generation control, an arbitrary interval is set between the heating elements in each zone according to the heat generation distribution, and a partition wall is installed within the interval between the zones.