JPH0883408A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH0883408A JPH0883408A JP6216940A JP21694094A JPH0883408A JP H0883408 A JPH0883408 A JP H0883408A JP 6216940 A JP6216940 A JP 6216940A JP 21694094 A JP21694094 A JP 21694094A JP H0883408 A JPH0883408 A JP H0883408A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- flux density
- pole
- saturation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、磁気記憶装置に搭載さ
れる薄膜磁気ヘッドの磁極構造に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic pole structure of a thin film magnetic head mounted in a magnetic storage device.
【０００２】[0002]
【従来の技術】記録密度を向上するためには記録波長に
対応して、磁気記録媒体の高保磁力化と磁気ヘッドの狭
ギャップ化が必要とされる。しかしながら、高保磁力媒
体を磁化するためには強い磁場を発生する必要があり、
狭ギャップヘッドでは、ギャップに接する磁性膜の磁気
飽和により、発生できる磁界の上限が決まってしまい十
分な記録をすることができない。2. Description of the Related Art In order to improve the recording density, it is necessary to increase the coercive force of the magnetic recording medium and narrow the gap of the magnetic head in accordance with the recording wavelength. However, in order to magnetize the high coercive force medium, it is necessary to generate a strong magnetic field,
In a narrow gap head, the magnetic saturation of the magnetic film in contact with the gap determines the upper limit of the magnetic field that can be generated, so that sufficient recording cannot be performed.
【０００３】そこで、特開昭５７−２４０１５号に記載
されているように下部磁性膜の上側と上部磁性膜の下側
に高飽和磁束密度を有する磁性膜を設けた薄膜磁気ヘッ
ドがある。このヘッド構造の例を図２、図３に示す。ギ
ャップ内にヘッド飽和を抑えるための高飽和磁束密度材
が配置されている。Therefore, there is a thin film magnetic head in which a magnetic film having a high saturation magnetic flux density is provided on the upper side of the lower magnetic film and the lower side of the upper magnetic film, as described in JP-A-57-24015. An example of this head structure is shown in FIGS. A high saturation magnetic flux density material for suppressing head saturation is arranged in the gap.
【０００４】[0004]
【発明が解決しようとする課題】上記従来技術で、記録
密度を向上させる手段として下部磁性膜の上側と上部磁
性膜の下側に高飽和磁束密度を有する磁性膜を用いてい
るが、７０ｋＦＣ以上の更なる記録密度の向上には対応
した１８００ｏｅ以上の高保磁力媒体を磁化することは
困難となる。In the above prior art, a magnetic film having a high saturation magnetic flux density is used above the lower magnetic film and below the upper magnetic film as a means for improving the recording density. It is difficult to magnetize a high coercive force medium of 1800 oe or more, which corresponds to the further improvement of the recording density.
【０００５】すなわち再生のためには０．３μｍ程度の
狭ギャップを記録のためには０．４μｍ程度の広キャッ
プが要求され、その２つの要求を記録再生を兼用するヘ
ッドで満足することが非常に難しくなったことである。That is, a narrow gap of about 0.3 μm is required for reproduction and a wide cap of about 0.4 μm is required for recording, and it is extremely difficult to satisfy both of these requirements with a head that also serves for recording and reproduction. It has become difficult.
【０００６】更に、高飽和磁束密度材は透磁率が低いた
めにギャップ先端の磁気的なギャップが広がって見える
ことや、低い透磁率為の磁気抵抗の増加による再生効率
の低下により再生出力が低くなることの問題点があっ
た。Further, since the material having a high saturation magnetic flux density has a low magnetic permeability, the magnetic gap at the tip of the gap appears to be widened, and the reproduction efficiency is lowered due to the increase in the magnetic resistance due to the low magnetic permeability, so that the reproduction output is low. There was a problem of becoming.
【０００７】本発明は記録密度の向上を目的とし、高保
磁力媒体を容易に磁化し、更に再生特性に優れた磁気ヘ
ッドを提供することにある。It is an object of the present invention to provide a magnetic head which is capable of easily magnetizing a high coercive force medium and having excellent reproducing characteristics, with the object of improving the recording density.
【０００８】[0008]
【課題を解決するための手段】本発明は、図１に示すよ
うに、下部磁極１と上部磁極２とで磁気コアが形成さ
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プ３を有する開ループ状の磁気回路と、上記の上部磁極
と下部磁極との間を通り上記磁気回路を鎖交する導電体
からなるコイル４とにより構成される薄膜磁気ヘッドに
おいて、少なくとも一方の磁極を高透磁率磁性膜５と高
飽和磁束密度磁性膜６と低飽和磁束密度磁性膜７の順で
積層構造により形成し、該低飽和磁束密度磁性膜側を磁
気ギャップ側に配置する。According to the present invention, as shown in FIG. 1, a magnetic core is formed by a lower magnetic pole 1 and an upper magnetic pole 2, and a magnetic gap 3 is formed by a non-magnetic film on the side facing a recording medium. In a thin-film magnetic head composed of an open loop magnetic circuit having a coil, and a coil 4 made of a conductor passing through the upper magnetic pole and the lower magnetic pole and interlinking the magnetic circuit, at least one magnetic pole is The high permeability magnetic film 5, the high saturation magnetic flux density magnetic film 6 and the low saturation magnetic flux density magnetic film 7 are formed in this order in a laminated structure, and the low saturation magnetic flux density magnetic film side is arranged on the magnetic gap side.
【０００９】[0009]
【作用】薄膜磁気ヘッドにおいて、少なくとも一方の磁
極を高透磁率磁性膜５と高飽和磁束密度磁性膜６と低飽
和磁束密度磁性膜７の順で積層構造により形成し、該低
飽和磁束密度磁性膜は磁気ギャップ側に配置されてい
る。記録時には発生する磁場により低飽和磁束密度磁性
は飽和し、その透磁率は空気と同様の値を示すような
る。すなわち実効的に記録ギャップ長が広がり、強い磁
界を発生することができる。この実効的な記録ギャップ
長は非磁性膜による磁気ギャップ３と低飽和磁束密度磁
性膜７をたした値となる。また、高飽和磁束密度磁性膜
６は飽和に至らないために、強く急峻な磁界分布が得ら
れる。In the thin film magnetic head, at least one of the magnetic poles is formed by laminating the high permeability magnetic film 5, the high saturation magnetic flux density magnetic film 6 and the low saturation magnetic flux density magnetic film 7 in this order. The film is arranged on the magnetic gap side. The magnetic field generated at the time of recording saturates the low saturation magnetic flux density magnetism, and its magnetic permeability has a value similar to that of air. That is, the recording gap length is effectively expanded and a strong magnetic field can be generated. This effective recording gap length is a value obtained by adding the magnetic gap 3 made of a non-magnetic film and the low saturation magnetic flux density magnetic film 7. Further, since the high saturation magnetic flux density magnetic film 6 does not reach saturation, a strong and steep magnetic field distribution can be obtained.
【００１０】また、再生時には再生ギャップ長は非磁性
膜による磁気ギャップ３によって決まり、狭ギャップに
よるギャップ損失の少ない優れた再生特性を示す。その
ために記録密度の向上が可能となる。Further, during reproduction, the reproduction gap length is determined by the magnetic gap 3 formed by the non-magnetic film and exhibits excellent reproduction characteristics with a small gap loss due to the narrow gap. Therefore, the recording density can be improved.
【００１１】更に、低飽和磁束密度膜を高透磁率とする
ことにより、高飽和磁束密度磁性膜が低透磁率であるた
めの再生効率の低下を防ぐことができる。Further, by making the low saturation magnetic flux density film have a high magnetic permeability, it is possible to prevent the reproduction efficiency from being lowered because the high saturation magnetic flux density magnetic film has a low magnetic permeability.
【００１２】[0012]
【実施例】以下、本発明の実施例を図１から図１０で説
明する。図１は、本発明における薄膜磁気ヘッドの断面
図である。Embodiments of the present invention will be described below with reference to FIGS. FIG. 1 is a sectional view of a thin film magnetic head according to the present invention.
【００１３】図１に示すように、薄膜磁気ヘッドは下部
磁極１と上部磁極２とで磁気コアが形成され、記録媒体
との対向面側に非磁性膜により磁気ギャップ３を有する
開ループ状の磁気回路と、上記の上部磁極と下部磁極と
の間を通り上記磁気回路を鎖交する導電体からなるコイ
ル４とにより構成され、上部磁極を高透磁率磁性膜５と
高飽和磁束密度磁性膜６と低飽和磁束密度磁性膜７の順
で積層構造により形成し、該低飽和磁束密度磁性膜側を
磁気ギャップ側に配置している。As shown in FIG. 1, the thin film magnetic head has a magnetic core formed of a lower magnetic pole 1 and an upper magnetic pole 2, and has an open loop shape having a magnetic gap 3 made of a non-magnetic film on the side facing the recording medium. A magnetic circuit and a coil 4 made of a conductor passing through between the upper magnetic pole and the lower magnetic pole and interlinking the magnetic circuit. The upper magnetic pole has a high permeability magnetic film 5 and a high saturation magnetic flux density magnetic film. 6 and the low saturation magnetic flux density magnetic film 7 are formed in this order by a laminated structure, and the low saturation magnetic flux density magnetic film side is arranged on the magnetic gap side.
【００１４】図４は実施例１のヘッドの磁気飽和の領域
と先端部での磁界分布の計算結果を示している。上部磁
極の高透磁率磁性膜５はＮｉＦｅ（Ｂｓ＝１Ｔ、透磁
率：：１０００、膜厚３μｍ）と高飽和磁束密度磁性膜
６はＣｏＦｅＮｉ（Ｂｓ＝１．７Ｔ、透磁率:５００、
膜厚０．７μｍ）と低飽和磁束密度磁性膜７）はＮｉＦ
ｅ（Ｂｓ＝１Ｔ、透磁率：１０００、膜厚０．１μｍ）
順で積層構造を形成した。FIG. 4 shows the calculation results of the magnetic field distribution in the magnetic saturation region and the tip of the head of the first embodiment. The high magnetic permeability magnetic film 5 of the upper magnetic pole is NiFe (Bs = 1T, magnetic permeability :: 1000, film thickness 3 μm) and the high saturation magnetic flux density magnetic film 6 is CoFeNi (Bs = 1.7T, magnetic permeability: 500,
The film thickness 0.7 μm) and the low saturation magnetic flux density magnetic film 7) are NiF.
e (Bs = 1T, magnetic permeability: 1000, film thickness 0.1 μm)
A laminated structure was formed in order.
【００１５】低飽和磁束密度磁性膜７は完全に飽和して
いる。また、高飽和磁束密度磁性膜６は飽和には至って
いない。図５は図３のタイプの従来ヘッドと図１に示す
本発明ヘッドの磁界分布の計算結果を比較したものであ
る。本発明ヘッドのギャップ長は０．３μｍにあるにも
関わらず、ギャップ長は０．４μｍの従来ヘッドとほぼ
同等の磁界分布を示している。The low saturation magnetic flux density magnetic film 7 is completely saturated. Further, the high saturation magnetic flux density magnetic film 6 is not saturated. FIG. 5 compares the calculation results of the magnetic field distribution of the conventional head of the type of FIG. 3 and the head of the present invention shown in FIG. Although the gap length of the head of the present invention is 0.3 μm, it shows a magnetic field distribution almost equal to that of the conventional head having a gap length of 0.4 μm.
【００１６】このように高飽和磁束密度磁性膜と低飽和
磁束密度磁性膜は同一の磁性膜を用いても効果がある。Thus, the high saturation magnetic flux density magnetic film and the low saturation magnetic flux density magnetic film are effective even if the same magnetic film is used.
【００１７】図６は従来ヘッドと本発明の書き込能力を
実験により、比較したものである。FIG. 6 compares the writing ability of the conventional head with that of the present invention by an experiment.
【００１８】比較した物の形状は上記計算と同じもので
ある。The shapes of the compared products are the same as the above calculation.
【００１９】従来ヘッドではギャップ長を０．３μｍと
するとギャップ長０．４μｍの場合と比較してオ−バ−
ライト性能は約３ｄＢ低下してしまう。本発明ヘッドで
はギャップ長０．３μｍにて、従来ヘッドギャップ長
０．４μｍと同等の性能を示している。In the conventional head, when the gap length is set to 0.3 μm, compared with the case where the gap length is 0.4 μm, the over-width is over.
The write performance is reduced by about 3 dB. The head of the present invention has a gap length of 0.3 μm and exhibits the same performance as the conventional head gap length of 0.4 μm.
【００２０】更に再生の検討結果を示す。Further, the examination result of reproduction will be shown.
【００２１】図７に孤立波再生波形の定義を示す。波形
の半値幅をＰＷ５０、振幅をＶ０とする。FIG. 7 shows the definition of a solitary wave reproduction waveform. The half width of the waveform is PW50 and the amplitude is V0.
【００２２】図８は再生ギャップ長と半値幅の関係の計
算結果を示す。自己録再の場合、ギャップ長を狭くする
と半値幅は狭くなり高密度記録に適していることがわか
る。また、記録ギャップ長を０．４μｍに固定した場合
もほぼ同様な値をしめしており、再生特性が再生ギャッ
プ長により決まっていることを示している。FIG. 8 shows the calculation result of the relationship between the reproduction gap length and the half width. In the case of self-recording / reproducing, it can be seen that when the gap length is narrowed, the half width becomes narrower, which is suitable for high density recording. Also, when the recording gap length is fixed at 0.4 μm, the values are almost the same, which indicates that the reproducing characteristic is determined by the reproducing gap length.
【００２３】図９、図１０にギャップ長と半値幅及び出
力の関係の実験結果を示す。9 and 10 show the experimental results of the relationship between the gap length, the half width and the output.
【００２４】本発明ヘッドは従来ヘッドのギャップ長
０．３μｍよりも、半値幅が狭く、大きな出力を示して
おり、低飽和磁束密度高透磁率の効果がでている。つま
り、本発明ヘッドは記録時には０．４μｍ、再生時には
０．３μｍのヘッドとして動作し、更に、ギャップ膜に
接する磁性膜が高透磁率のために、従来ヘッドよりも急
峻で、出力の高い波形を得ることができることがわか
る。The head of the present invention has a narrower half-width and a larger output than the conventional head having a gap length of 0.3 μm, and has a low saturation magnetic flux density and a high magnetic permeability. That is, the head of the present invention operates as a head of 0.4 μm at the time of recording and 0.3 μm at the time of reproducing, and because the magnetic film in contact with the gap film has a high magnetic permeability, the waveform is steeper and has a higher output than the conventional head. You can see that you can get
【００２５】また、各々の磁性膜の結晶構造が似ている
ために下地の膜質のよいＮｉＦｅの上のＣｏＦｅＮｉは
エピタキシャル成長し、また、その上のＮｉＦｅも同様
の成長をするために、結晶構造的にも、磁気的にも非常
に安定であり、ウイグルやポップコ−ンノイズのような
ノイズは発生しない。従来例にみられる２層構造では下
地が高飽和磁束密度磁性膜であり、一般的に磁気的な異
方性が強いためにその上の膜質は低下してしまい再生出
力が低下してしまう。よって、本構造は磁気記録的にも
結晶構造的にも優れている。Further, since the crystal structures of the respective magnetic films are similar, CoFeNi on NiFe having a good underlying film quality grows epitaxially, and NiFe on it also grows similarly, so that it has a crystal structure. Moreover, it is also magnetically very stable, and noise such as wiggle or popcorn noise does not occur. In the two-layer structure seen in the conventional example, the underlayer is a high saturation magnetic flux density magnetic film, and generally the magnetic anisotropy is strong, so that the film quality is deteriorated and the reproduction output is decreased. Therefore, this structure is excellent in terms of magnetic recording and crystal structure.
【００２６】これら磁性膜はスパッタリング法でもめっ
き法でも同様の効果が有る。特に従来ヘッドの磁性膜を
めっき法により形成していた場合、低飽和磁束密度材を
高飽和磁束密度材のめっき下地膜とするとするとプロセ
ス上、大きな変更なく、大きな効果が得られる。These magnetic films have the same effect by the sputtering method and the plating method. Particularly, when the magnetic film of the conventional head is formed by the plating method, if the low saturation magnetic flux density material is used as the plating underlayer film of the high saturation magnetic flux density material, a great effect can be obtained without making a large change in the process.
【００２７】図１１、図１２、図１３、図１３、図１
４、図１５、図１６は本発明の他の実施例である。11, FIG. 12, FIG. 13, FIG. 13, and FIG.
4, FIG. 15 and FIG. 16 are other embodiments of the present invention.
【００２８】図１１は下部コアにも上部コアと同様な３
層構造とした。FIG. 11 shows that the lower core has the same structure as the upper core.
A layer structure was adopted.
【００２９】図１２は下部コアを高飽和磁束密度磁性膜
６とした。In FIG. 12, the lower core is a high saturation magnetic flux density magnetic film 6.
【００３０】図１３は下部コアを高透磁率磁性膜５と高
飽和磁束密度磁性膜６の２層構造とした。In FIG. 13, the lower core has a two-layer structure of a high magnetic permeability magnetic film 5 and a high saturation magnetic flux density magnetic film 6.
【００３１】図１４、図１５、図１６は高飽和磁束密度
磁性膜６の長さをギャップ深さ同一にしギャップ内での
飽和をしやすくしたものである。In FIGS. 14, 15 and 16, the length of the high saturation magnetic flux density magnetic film 6 is made equal to the gap depth to facilitate saturation in the gap.
【００３２】[0032]
【発明の効果】本発明によれば、記録時のギャップ長と
再生時のギャップ長を変えることができ、高保磁力媒体
を記録するのに十分な磁界強度が得られ、線記録密度の
向上が出来る。これらのことから、本発明の磁気ヘッド
を使用することによって高保磁力媒体で記録密度の向上
が可能となる。また、磁区構造に起因するノイズを抑え
ることができ信頼性の高いヘッドを供給することができ
る。According to the present invention, the gap length at the time of recording and the gap length at the time of reproducing can be changed, a magnetic field strength sufficient for recording a high coercive force medium can be obtained, and the linear recording density can be improved. I can. From these facts, by using the magnetic head of the present invention, it is possible to improve the recording density in the high coercive force medium. Further, noise due to the magnetic domain structure can be suppressed, and a highly reliable head can be supplied.
【図１】本発明の一実施例を示す断面図。FIG. 1 is a sectional view showing an embodiment of the present invention.
【図２】従来の磁気ヘッド構造を示す断面図。FIG. 2 is a sectional view showing a conventional magnetic head structure.
【図３】従来の磁気ヘッド構造を示す断面図。FIG. 3 is a sectional view showing a conventional magnetic head structure.
【図４】薄膜磁気ヘッドの先端の磁気飽和領域。FIG. 4 is a magnetic saturation region at the tip of a thin film magnetic head.
【図５】薄膜磁気ヘッドの磁界分布図。FIG. 5 is a magnetic field distribution diagram of the thin film magnetic head.
【図６】ギャップ長とオ−バ-ライトの関係を示すグラ
フ。FIG. 6 is a graph showing the relationship between gap length and overwrite.
【図７】孤立波形を説明する波形図。FIG. 7 is a waveform diagram illustrating an isolated waveform.
【図８】再生ギャップ長と孤立波形半値幅の関係を示す
グラフ。FIG. 8 is a graph showing the relationship between the reproduction gap length and the half-width of the isolated waveform.
【図９】ギャップ長と半値幅の関係を示すグラフ。FIG. 9 is a graph showing the relationship between the gap length and the half width.
【図１０】ギャップ長と孤立波形の出力電圧の関係を示
すグラフ。FIG. 10 is a graph showing the relationship between the gap length and the output voltage of an isolated waveform.
【図１１】本発明における他の実施例を示す断面図。FIG. 11 is a sectional view showing another embodiment of the present invention.
【図１２】本発明における他の実施例を示す断面図。FIG. 12 is a sectional view showing another embodiment of the present invention.
【図１３】本発明における他の実施例を示す断面図。FIG. 13 is a sectional view showing another embodiment of the present invention.
【図１４】本発明における他の実施例を示す断面図。FIG. 14 is a sectional view showing another embodiment of the present invention.
【図１５】本発明における他の実施例を示す断面図。FIG. 15 is a sectional view showing another embodiment of the present invention.
【図１６】本発明における他の実施例を示す断面図。FIG. 16 is a sectional view showing another embodiment of the present invention.
【符号の説明】 １ 下部磁極 ２ 上部磁極 ３ 磁気ギャップ ４ コイル ５ 高透磁率磁性膜 ６ 高飽和磁束密度磁性膜 ７ 低飽和磁束密度磁性膜[Description of symbols] 1 lower magnetic pole 2 upper magnetic pole 3 magnetic gap 4 coil 5 high permeability magnetic film 6 high saturation magnetic flux density magnetic film 7 low saturation magnetic flux density magnetic film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 香川 昌慶 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 (72)発明者 斎藤 眞 神奈川県小田原市国府津2880番地 株式会 社日立製作所ストレージシステム事業部内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Masayoshi Kagawa 2880 Kokuzu, Odawara, Kanagawa Stock Company Hitachi Storage Systems Division (72) Inventor Makoto Saito 2880, Kozu, Odawara, Kanagawa Hitachi Storage Co., Ltd. System Division
Claims (11)
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽和磁
束密度磁性膜と低飽和磁束密度磁性膜の順で積層構造に
より形成し、該低飽和磁束密度磁性膜側を磁気ギャップ
側に配置したことを特徴とする薄膜磁気ヘッド。1. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on a surface facing a recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. And a low saturation magnetic flux density magnetic film side is arranged on the magnetic gap side.
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽和磁
束密度磁性膜と低飽和磁束密度磁性膜との積層構造によ
り形成し、該低飽和磁束密度磁性膜側を磁気ギャップ側
に配置した薄膜磁気ヘッドにおいて、高透磁率磁性膜の
飽和磁束密度をＢｓ１、高飽和磁束密度磁性膜の飽和磁
束密度をＢｓ２、低飽和磁束密度磁性膜の飽和磁束密度
をＢｓ３としたとき以下の関係式が成り立つことを特徴
とする薄膜磁気ヘッド。 Ｂｓ１＜Ｂｓ２、 Ｂｓ３＜Ｂｓ２2. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the surface facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. In a thin film magnetic head having a low saturation magnetic flux density magnetic film side disposed on the magnetic gap side, the saturation magnetic flux density of the high magnetic permeability magnetic film is Bs1 and the saturation magnetic flux density of the high saturation magnetic flux density magnetic film is Where Bs2 is the saturation magnetic flux density of the magnetic film and Bs3 is the saturation magnetic flux density of the magnetic film, the following relational expression holds. Bs1 <Bs2, Bs3 <Bs2
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくともギャップ深さを決定する側の磁極を高透
磁率磁性膜と高飽和磁束密度磁性膜と低飽和磁束密度磁
性膜の順で積層構造により形成し、該低飽和磁束密度磁
性膜側を磁気ギャップ側に配置したことを特徴とする薄
膜磁気ヘッド。3. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the surface facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least the magnetic pole on the side that determines the gap depth is a high permeability magnetic film and a high saturation magnetic flux density magnetic film. A thin film magnetic head characterized in that a low saturation magnetic flux density magnetic film is formed in this order by a laminated structure, and the low saturation magnetic flux density magnetic film side is arranged on the magnetic gap side.
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽和磁
束密度磁性膜と低飽和磁束密度磁性膜の順で積層構造に
より形成し、該高透磁率磁性膜と該低飽和磁束密度磁性
膜とを同一の磁性材料を用いたことを特徴とする薄膜磁
気ヘッド。4. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the side facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. And a low saturation magnetic flux density magnetic film made of the same magnetic material.
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽和磁
束密度磁性膜と低飽和磁束密度磁性膜の順で積層構造に
より形成し、各磁性膜の組成がＮｉＦｅを基本とするこ
とを特徴とする薄膜磁気ヘッド。5. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the side facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. A thin-film magnetic head characterized in that the composition of each magnetic film is based on NiFe.
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽和磁
束密度磁性膜と低飽和磁束密度磁性膜の順で積層構造に
より形成し、高飽和磁束密度磁性膜が低飽和磁束密度磁
性膜の上に低飽和磁束密度磁性膜の結晶に従って結晶成
長することを特徴とする薄膜磁気ヘッド。6. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the side facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. And a high saturation magnetic flux density magnetic film grows on the low saturation magnetic flux density magnetic film according to the crystal of the low saturation magnetic flux density magnetic film.
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽和磁
束密度磁性膜と低飽和磁束密度磁性膜との積層構造によ
り形成し、該低飽和磁束密度磁性膜側を磁気ギャップ側
に配置した薄膜磁気ヘッドにおいて、高透磁率磁性膜の
膜厚をｔ１、高飽和磁束密度磁性膜の膜厚をｔ２、低飽
和磁束密度磁性膜の膜厚をｔ３、としたとき以下の関係
式が成り立つことを特徴とする薄膜磁気ヘッド。 ｔ１＞ｔ２＞ｔ３7. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the side facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. In a thin-film magnetic head formed by a laminated structure of, the low saturation magnetic flux density magnetic film side is disposed on the magnetic gap side, the high magnetic permeability magnetic film has a film thickness t1, and the high saturation magnetic flux density magnetic film has a film thickness t2. The following relational expression holds when the film thickness of the low saturation magnetic flux density magnetic film is t3. t1>t2> t3
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽和磁
束密度磁性膜と低飽和磁束密度磁性膜との積層構造によ
り形成し、該低飽和磁束密度磁性膜側を磁気ギャップ側
に配置した薄膜磁気ヘッドにおいて、 高透磁率磁性膜
の飽和磁束密度をＢｓ１、膜厚ｔ１、高飽和磁束密度磁
性膜の飽和磁束密度をＢｓ２、膜厚ｔ２、低飽和磁束密
度磁性膜の飽和磁束密度をＢｓ３、膜厚ｔ３、としたと
き以下の関係式が成り立つことを特徴とする薄膜磁気ヘ
ッド。 Ｂｓ＊ｔ２＞Ｂｓ＊ｔ３8. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the surface facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. In a thin film magnetic head having a low saturation magnetic flux density magnetic film side disposed on the magnetic gap side, the saturation magnetic flux density of the high magnetic permeability magnetic film is Bs1, film thickness t1, high saturation magnetic flux density magnetic film. The following relational expression holds when the saturation magnetic flux density is Bs2, the film thickness is t2, and the saturation magnetic flux density of the magnetic film is Bs3, and the film thickness is t3. Bs * t2> Bs * t3
れ、記録媒体との対向面側に非磁性膜により磁気ギャッ
プを有する開ループ状の磁気回路と、上記の上部磁極と
下部磁極との間を通り上記磁気回路を鎖交する導電体か
らなるコイルとにより構成される薄膜磁気ヘッドにおい
て、少なくとも一方の磁極を高透磁率磁性膜と高飽磁束
密度磁性膜と低飽和磁束密度磁性膜の順で積層構造によ
り形成し、該低飽和磁束密度磁性膜側を磁気ギャップ側
に配置し、高透磁率磁性膜の透磁率を１０００以上、高
飽磁束密度磁性膜の飽磁束密度を１．３Ｔ以上、低飽和
磁束密度磁性膜の飽磁束密度を１Ｔ以下とした薄膜磁気
ヘッド。9. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on the side facing the recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor that passes through the magnetic circuit and crosses the magnetic circuit, at least one magnetic pole has a high permeability magnetic film, a high saturation magnetic flux density magnetic film, and a low saturation magnetic flux density magnetic film. 1. The low saturation magnetic flux density magnetic film side is arranged on the magnetic gap side, the magnetic permeability of the high magnetic permeability magnetic film is 1000 or more, and the saturated magnetic flux density of the high magnetic flux density magnetic film is 1. A thin film magnetic head having a saturated magnetic flux density of 3 T or more and a saturation magnetic flux density of a magnetic film of 1 T or less.
され、記録媒体との対向面側に非磁性膜により磁気ギャ
ップを有する開ループ状の磁気回路と、上記の上部磁極
と下部磁極との間を通り上記磁気回路を鎖交する導電体
からなるコイルとにより構成される薄膜磁気ヘッドにお
いて、少なくとも一方の磁極を高透磁率磁性膜と高飽磁
束密度低透磁率磁性膜と低飽和磁束密度高透磁率磁性膜
の順で積層構造により形成し、該低飽和磁束密度高透磁
率磁性膜側を磁気ギャップ側に配置したことを特徴とす
る薄膜磁気ヘッド。10. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on a surface facing a recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density, a low magnetic permeability magnetic film, and a low saturation magnetic flux. A thin film magnetic head characterized in that a high density magnetic film and a high permeability magnetic film are formed in this order in a laminated structure, and the low saturation magnetic flux density high permeability magnetic film side is arranged on the magnetic gap side.
され、記録媒体との対向面側に非磁性膜により磁気ギャ
ップを有する開ループ状の磁気回路と、上記の上部磁極
と下部磁極との間を通り上記磁気回路を鎖交する導電体
からなるコイルとにより構成される薄膜磁気ヘッドにお
いて、少なくとも一方の磁極を高透磁率磁性膜と高飽磁
束密度低透磁率磁性膜と低飽和磁束密度高透磁率磁性膜
の順で積層構造により形成し、該低飽和磁束密度高透磁
率磁性膜側を磁気ギャップ側に配置し、高透磁率磁性膜
の透磁率を１０００以上、高飽磁束密度低透磁率磁性膜
の飽磁束密度を１．３Ｔ以上、透磁率を１０００以下、
低飽和磁束密度高透磁率磁性膜の飽磁束密度を１Ｔ以
下、透磁率を１０００以上とした薄膜磁気ヘッド。11. An open-loop magnetic circuit in which a magnetic core is formed by a lower magnetic pole and an upper magnetic pole, and a magnetic gap is formed by a nonmagnetic film on a surface facing a recording medium, and the upper magnetic pole and the lower magnetic pole. In a thin film magnetic head composed of a coil made of a conductor passing through the magnetic circuit and interlinking the magnetic circuit, at least one magnetic pole has a high magnetic permeability magnetic film, a high saturation magnetic flux density, a low magnetic permeability magnetic film, and a low saturation magnetic flux. A high-permeability magnetic film is formed in a laminated structure in this order, and the low saturation magnetic flux density high-permeability magnetic film side is disposed on the magnetic gap side. The saturated magnetic flux density of the low-permeability magnetic film is 1.3 T or more, the magnetic permeability is 1000 or less,
Low saturation magnetic flux density High magnetic permeability A thin film magnetic head having a saturated magnetic flux density of 1 T or less and a magnetic permeability of 1000 or more.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6216940A JPH0883408A (en) | 1994-09-12 | 1994-09-12 | Thin film magnetic head |
| KR1019950029489A KR960011853A (en) | 1994-09-12 | 1995-09-11 | Thin film magnetic head |
| CN95116899A CN1142652A (en) | 1994-09-12 | 1995-09-12 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6216940A JPH0883408A (en) | 1994-09-12 | 1994-09-12 | Thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0883408A true JPH0883408A (en) | 1996-03-26 |
Family
ID=16696321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6216940A Pending JPH0883408A (en) | 1994-09-12 | 1994-09-12 | Thin film magnetic head |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPH0883408A (en) |
| KR (1) | KR960011853A (en) |
| CN (1) | CN1142652A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6001468A (en) * | 1997-07-04 | 1999-12-14 | Fujitsu Limited | Magnetic head |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100682914B1 (en) * | 2005-01-11 | 2007-02-15 | 삼성전자주식회사 | Magnetic recording head and method of manufacturing the same |
| CN114783466B (en) * | 2018-11-22 | 2023-10-20 | 新科实业有限公司 | System for transition curvature improvement for thermally assisted magnetic recording |
-
1994
- 1994-09-12 JP JP6216940A patent/JPH0883408A/en active Pending
-
1995
- 1995-09-11 KR KR1019950029489A patent/KR960011853A/en not_active Application Discontinuation
- 1995-09-12 CN CN95116899A patent/CN1142652A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6001468A (en) * | 1997-07-04 | 1999-12-14 | Fujitsu Limited | Magnetic head |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1142652A (en) | 1997-02-12 |
| KR960011853A (en) | 1996-04-20 |
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