JPH088039Y2 - Vacuum suction type work holder - Google Patents

Vacuum suction type work holder

Info

Publication number
JPH088039Y2
JPH088039Y2 JP1993016605U JP1660593U JPH088039Y2 JP H088039 Y2 JPH088039 Y2 JP H088039Y2 JP 1993016605 U JP1993016605 U JP 1993016605U JP 1660593 U JP1660593 U JP 1660593U JP H088039 Y2 JPH088039 Y2 JP H088039Y2
Authority
JP
Japan
Prior art keywords
suction
hole
substrate
rotary valve
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1993016605U
Other languages
Japanese (ja)
Other versions
JPH0671039U (en
Inventor
徳雄 山口
Original Assignee
株式会社武田機械
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社武田機械 filed Critical 株式会社武田機械
Priority to JP1993016605U priority Critical patent/JPH088039Y2/en
Publication of JPH0671039U publication Critical patent/JPH0671039U/en
Application granted granted Critical
Publication of JPH088039Y2 publication Critical patent/JPH088039Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】本考案は、バキュームを利用して
ワークを吸着保持するバキューム吸着方式のワークホル
ダに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction type work holder for sucking and holding a work by using a vacuum.

【0002】[0002]

【従来の技術】バキュームを利用してワークを吸着保持
する従来のワークホルダとしては、図7〜9に示すもの
が提供されている。該ワークホルダは、基板aの表面側
に、帯状の弾性シール材bを嵌着させるための格子状の
溝部cを具え、該溝部cには、吸引部dに連なる吸引孔
eを所要間隔をおいて数箇所設けてなるものであった。
そしてその使用に際しては、最終加工状態においてもワ
ークfが確実に吸着保持された状態となるよう、先ず、
弾性シール材の嵌着によって形成される閉じた空間部分
に吸引孔eが少なくとも1つ含まれるように、ワークを
配置すべき場所を注意深く設定する。
2. Description of the Related Art As a conventional work holder for holding a work by suction using a vacuum, those shown in FIGS. The work holder is provided with a lattice-shaped groove portion c for fitting a band-shaped elastic sealing material b on the front surface side of the substrate a, and the groove portion c is provided with a suction hole e connected to the suction portion d at a predetermined interval. It was provided in several places.
Then, when using it, first, in order to ensure that the work f is suction-held even in the final processing state,
The place where the work is to be arranged is carefully set so that at least one suction hole e is included in the closed space portion formed by the fitting of the elastic sealing material.

【0003】然る後、図8に示すように、ワークfの裏
面周縁部分に弾性シール材が当接するよう、弾性シール
材bを前記溝部cに嵌着し、又基板表面の露出状態にな
る吸引孔は、図9に示すように蓋部材gで塞ぐものであ
った。
After that, as shown in FIG. 8, the elastic sealing material b is fitted into the groove c so that the elastic sealing material comes into contact with the peripheral portion of the back surface of the work f, and the surface of the substrate is exposed. The suction hole was closed with a lid member g as shown in FIG.

【0004】因みに、前記ワークホルダにおいて吸引孔
の個数をこのように少数としていたのは、不要の吸引孔
を蓋部材で塞ぐ面倒さや蓋部材の管理上の煩雑さを極力
少なくするためであったと考えられる。しかしこうした
技術では、吸引孔が少ないために、ワークの裏面側に少
なくとも一つの吸引孔eが存するようにワークの設置場
所に注意しなければならないという面倒さがあり、特
に、複数個のワークを基板面に並べて同時に吸着させる
場合には、そのワークの配置に神経を使わねばならず、
簡便に行うという訳にはいかなかった。又、吸引孔が少
ないために吸引孔の排気速度が遅く、ワーク保持までに
時間がかかるとう問題もあった。 そこで、基板の表面部
に、弾性を有するシール材を嵌着するための格子状の溝
部を設けるとともに、区画された各格子目に凹部を設
け、該凹部の底面部には、基板の裏面側に解放する貫通
孔を設け、該凹部と貫通孔とからなる吸引孔を形成し、
該吸引孔からの負圧によって、基板に載置したワークを
吸着保持するように構成したバキューム吸着方式のワー
クホルダが提案されている(特開平3−187701号
公報を参照)。
Incidentally, the reason why the number of the suction holes in the work holder is made small in this way is to minimize the troublesomeness of closing the unnecessary suction holes with the lid member and the complexity of the management of the lid member. Conceivable. But this
With the technology, since there are few suction holes, there are few suction holes on the back side of the workpiece.
Work place where there is at least one suction hole e
There is the trouble of having to pay attention to
, A plurality of workpieces are arranged on the substrate surface and adsorbed at the same time.
In some cases, you have to use nerves in the placement of the work,
It couldn't be done simply. Also, there are few suction holes
Since the exhaust speed of the suction hole is slow,
There was also a problem that it took time. Therefore, the surface of the substrate
, A grid-like groove for fitting an elastic sealing material
In addition to providing the parts, recesses are provided in each partitioned grid.
The bottom surface of the recess penetrates the bottom surface of the substrate.
A hole is provided, and a suction hole composed of the recess and the through hole is formed,
By the negative pressure from the suction hole, the workpiece placed on the substrate is
Vacuum adsorption type work device configured to adsorb and hold.
A cradle has been proposed (JP-A-3-187701).
See the bulletin).

【0005】[0005]

【考案が解決しようとする課題】前記特開平3−187
701号公報に係るワークホルダによるときは、区画さ
れた格子目の各々に吸引孔を設けることによって、上述
した従来技術の問題点を解消できたのであるが、この場
合、ワークに対応した場所の各格子目の吸引孔は開口さ
せるのは勿論であるが、ワークに対応しない場所の各格
子目の吸引孔は、吸引効率を高めるために閉鎖してやら
ねばならなかった。その手段は、前記貫通孔にネジを切
っておき、ここに栓部材をネジ込み式に嵌め込んで閉鎖
するものであった。従って、多数の吸引孔の開閉操作に
非常に多くの時間と手間を要するという問題があった。
そこで本考案者は、ネジ式の栓部材のように完全には離
脱させないで、吸引孔の開閉を可能とした回転式の弁機
構を想到した。しかし、この回転弁を同様のネジ固定式
としたのでは、弁の開閉に際して緊締、弛緩を伴うの
で、ネジ部の摩耗によってネジの緩みを招き、吸引が不
要の場所(閉鎖を必要とする場所)における気密性が保
ちにくくなるという問題が生じ、所期の目的を達成でき
ないことがわかった。
DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention
When using the work holder according to Japanese Patent No. 701,
By providing suction holes in each of the grids
It was possible to solve the problems of the conventional technology that
The suction holes on each grid at the location
Needless to say, each case is a place that does not correspond to the work.
The suction holes in the sub-eyes should be closed to improve suction efficiency.
I had to do it. The means is to thread the through hole.
Set the plug member here by screwing it closed.
Was to do. Therefore, for opening and closing a large number of suction holes
There was a problem that it took a lot of time and effort.
Therefore, the inventor of the present invention has completely separated the screw-type stopper member.
A rotary valve machine that can open and close the suction hole without removing it.
I thought about it. However, this rotary valve has a similar screw fixing type
Therefore, when opening and closing the valve, tightening and loosening are involved.
The abrasion of the screw part may cause the screw to loosen and suction may not be
Maintains airtightness in important places (places requiring closure)
The problem of being difficult to move occurs and the intended purpose can be achieved.
I knew it wasn't.

【0006】本考案は、かかる従来技術の問題点に鑑み
て開発されたものであり、基板の表面部に、弾性を有す
るシール材を嵌着するための格子状の溝部を設けるとと
もに、区画された各格子目に凹部を設け、該凹部の底面
部には、基板の裏面側に解放する軸孔を設けるとともに
該軸孔の周辺に、基板の裏面側に設けた吸引部に連なる
第1の吸引孔を底面部を貫通して設け、前記吸引孔から
の負圧によって、基板に載置したワークを保持するよう
に構成したバキューム吸着方式のワークホルダに於い
て、吸引孔を多数設けたことによる便益を享受しなが
ら、必要、不要の吸引孔の開閉を簡便且つ確実に行うこ
とのできる、バキューム吸着方式のワークホルダの提供
を目的とするものである。
The present invention has been made in view of the above problems of the prior art.
It has been developed by the company and has elasticity on the surface of the substrate.
With the provision of a grid-like groove for fitting the sealing material
A concave portion is provided in each divided grid, and the bottom surface of the concave portion is formed.
In addition to providing a shaft hole for release on the back side of the board,
Connected to the suction part provided on the back side of the substrate around the shaft hole.
A first suction hole is provided through the bottom surface part,
Hold the work placed on the substrate by the negative pressure of
In the vacuum suction type work holder configured as
The benefit of having many suction holes.
The required and unnecessary suction holes can be opened and closed easily and securely.
Of vacuum suction type work holder
The purpose is.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するた
め、本考案は次のような手段を採用する。即ち本考案に
係るバキューム吸着方式のワークホルダ(以下ワークホ
ルダという)は、基板3の表面部に、弾性を有するシー
ル材5を嵌着するための格子状の溝部6を設けるととも
に、区画された各格子目7に凹部9を設け、該凹部9の
底面部11には、基板の裏面側に解放する軸孔13を
設けるとともに該軸孔13の周辺に、基板3の裏面側に
設けた吸引部15に連なる第1の吸引孔16を底部面1
1を貫通して設け、前記第1の吸引孔16からの負圧に
よって、基板3に載置したワークを保持するように構成
したバキューム吸着方式のワークホルダに於いて:前記
凹部9に、前記第1の吸引孔16と連通しうる第2の吸
引孔21が板厚方向に貫設された板状の回転弁10を、
その裏面側に突設された回転軸20を前記軸孔13に挿
通せしめて納装し、該納装状態において、回転弁10
表面26が基板表面27に沈む如くなすととともに前記
回転軸20が基板の裏面側に突出する如くなし、該突
出する軸部分20aに設けた受部33と基板裏面の軸孔
周縁部分30との間には、回転弁10を凹部9の底面部
11に向けて付勢するバネ部材31を介装し、又回転弁
10の表面側には、回転工具と係合する係合部25を
け、且つ、前記回転弁10の裏面35と前記凹部9の底
面部11との間には、前記軸孔13に連通する如く穿孔
されるとともに前記第1の吸引孔16及び第2の吸引孔
21に連通する如く穿孔されたゴム板12を介在させた
ことを特徴とするものである。
In order to solve the above problems, the present invention employs the following means. That is, a vacuum suction type work holder according to the present invention (hereinafter referred to as a work holder) is provided with a lattice-shaped groove portion 6 for fitting a sealing material 5 having elasticity on the surface portion of the substrate 3 and is partitioned. A recess 9 is provided in each grid 7, and a bottom surface 11 of the recess 9 is provided with a shaft hole 13 that is released to the back surface side of the substrate 3 and is provided around the shaft hole 13 on the back surface side of the substrate 3. The first suction hole 16 connected to the suction portion 15 is formed on the bottom surface 1
1 is provided so that the negative pressure from the first suction hole 16
Therefore, it is configured to hold the work placed on the substrate 3.
In the vacuum suction type work holder, the plate-shaped rotary valve 10 in which the second suction hole 21 which can communicate with the first suction hole 16 is provided in the recess 9 in the plate thickness direction,
The rotary shaft 20 projecting from the rear surface side is inserted into the shaft hole 13 and installed, and in the installed state, the surface 26 of the rotary valve 10 is sunk into the substrate surface 27 and the rotary shaft 20 is installed. There none as protrude to the reverse side of the substrate 3, protruding between the receiving portion 33 and the shaft hole peripheral portion 30 of the substrate back surface provided on the shaft portion 20a to leave, the bottom portion of the rotary valve 10 recess 9
Interposed a spring member 31 for urging the 11, also on the surface side of the rotary valve 10, set the engagement portion 25 which engages with the rotating tool
And the back surface 35 of the rotary valve 10 and the bottom of the recess 9.
A hole is formed between the face portion 11 and the surface portion 11 so as to communicate with the shaft hole 13.
And the first suction hole 16 and the second suction hole
It is characterized in that a rubber plate 12 perforated so as to communicate with 21 is interposed .

【0008】[0008]

【作用】然してかかるワークホルダ1にワークを保持さ
せるには、例えば当初は、全ての吸着凹所(ワーク38
の下面40で閉蓋された、回転弁表面26を底面とする
凹所)29について、第1の吸引孔16と第2の吸引孔
21が位置ずれして第1の吸引孔16が回転弁10で遮
断された状態にしておく。この状態において、最終加工
状態においてもワークが確実に吸着保持された状態とな
るよう、ワークの形態やワークの最終的な加工状態を考
慮に入れて、弾性シール材を、それがワークの裏面周縁
部分に弾性圧縮状態で当接するよう、溝部6にループを
描いて嵌着する。その後、加工後のワークの裏側に存す
る回転弁10に関して、第1の吸引孔16と第2の吸引
孔21が連通状態となるように回転弁10を回転操作す
る。然る後吸引部15を真空状態にすると、ワーク裏面
(加工後のワークの裏面)の吸着凹所29の夫々におい
て排気されるため、ワーク設置後極短時間のうちに、ワ
ークWは所要に吸着保持された状態となる。又、加工時
の抵抗や振動の影響によって弾性シール材5とワークW
との気密状態が部分的に破れた場合にも、排気速度が速
いために、安定的な吸着保持状態に瞬時に戻る。
In order to make the work holder 1 hold the work, for example, initially, all suction recesses (work 38
The first suction hole 16 and the second suction hole 21 are displaced with respect to the recessed portion 29 whose bottom is the rotary valve surface 26 and which is closed by the lower surface 40 of the rotary valve surface 26. It is cut off at 10. In this state, in order to ensure that the work piece is securely sucked and held even in the final working state, the elastic sealant is used to take into consideration the shape of the work piece and the final working state of the work piece. The groove 6 is fitted so as to draw a loop so as to come into contact with the portion in an elastically compressed state. After that, with respect to the rotary valve 10 existing on the back side of the work after processing, the rotary valve 10 is rotationally operated so that the first suction hole 16 and the second suction hole 21 are in communication with each other. After that, if the suction unit 15 is evacuated,
Since the air is exhausted in each of the suction recesses 29 on the (back surface of the work after processing) , the work W is in a required suction-held state within an extremely short time after the work is installed. Also, due to the influence of resistance and vibration during processing, the elastic seal material 5 and the workpiece W are
Even if the airtight state with and is partially broken, the exhaust speed is high, so that the suction-holding state returns to a stable state instantaneously.

【0009】又、バネ部材31を用いて、回転弁10を
凹部9の底面部11に向けて付勢するように構成し、且
つこの回転弁10の裏面35と凹部の底面部11との間
に、前記第1の吸引孔16及び第2の吸引孔21に連通
する如く穿孔されたゴム板12を介在させている。それ
故、該第1の吸引孔16と第2の吸引孔21とが位置ず
れした状態に回転弁10を回動操作するだけで、前記バ
ネ部材31の付勢作用に伴うゴム板12の弾性圧縮によ
って、回転弁10と凹部の底面部11との間の気密性を
極度に高めることができるのである。
Further , by using the spring member 31, the rotary valve 10 is
It is configured so as to urge toward the bottom surface portion 11 of the concave portion 9, and
Between the back surface 35 of the rotary valve 10 and the bottom surface portion 11 of the recess
To communicate with the first suction hole 16 and the second suction hole 21.
The rubber plate 12 perforated as described above is interposed. That
Therefore, the first suction hole 16 and the second suction hole 21 are not positioned.
If the rotary valve 10 is rotated in this state,
Due to the elastic compression of the rubber plate 12 due to the urging action of the member 31
Therefore, the airtightness between the rotary valve 10 and the bottom surface portion 11 of the recess is improved.
It can be increased extremely.

【0010】しかも、回転弁10の表面側には、回転工
具と係合する係合部25を設けているので、この係合部
25に対して回転工具(例えば、ドライバー)を係合さ
せて回転させるだけで、回転弁10の前記開閉操作を極
めて簡単に行い得るのである。
Moreover, on the front surface side of the rotary valve 10, a rotary
Since the engaging portion 25 for engaging with the tool is provided, this engaging portion
25 engage a rotating tool (eg screwdriver)
The opening / closing operation of the rotary valve 10 can be achieved by simply rotating
It can be done very easily.

【0011】又、回転弁10がバネ部材31によって弾
圧されているだけであるので、回転弁10の回動操作を
行う際に、何らかの原因で摩擦抵抗が増大して、回転抵
抗が高くなったときは、バネ部材31が一時的に稍圧縮
状態となって回転弁10がその軸芯方向に変位できるた
め、軽い回転操作力によって回転弁10の開閉操作を行
い得るのである。
Further , the rotary valve 10 is elastically moved by the spring member 31.
Since it is only pressed, the rotation operation of the rotary valve 10
When doing so, the frictional resistance increases for some reason,
When the resistance becomes high, the spring member 31 temporarily compresses
In this state, the rotary valve 10 can be displaced in the axial direction.
Therefore, the opening / closing operation of the rotary valve 10 is performed with a light rotary operation force.
It can be.

【0012】[0012]

【実施例】以下本考案の実施例を図面に基づいて説明す
る。図1〜4において本考案に係るワークホルダ1は、
内部が中空に形成された直方体状箱体2の上部をなす基
板3の表面部に、帯状をなす弾性を有するシール材(例
えばスポンジゴム製のもの)5を嵌着するための格子状
の溝部6を設けるとともに区画された各格子目7に凹部
9を設け、該凹部の夫々に円板状の回転弁10を納装し
てなる。
Embodiments of the present invention will be described below with reference to the drawings. 1 to 4, the work holder 1 according to the present invention is
A lattice-shaped groove portion for fitting a band-shaped elastic sealing material (for example, made of sponge rubber) 5 to the surface portion of the substrate 3 which is the upper portion of the rectangular parallelepiped box body 2 having a hollow inside. 6 is provided, and each of the divided grids 7 is provided with a recess 9, and a disk-shaped rotary valve 10 is installed in each of the recesses.

【0013】前記凹部9の底面部11には、その中央
に、基板3の裏面側に開放する軸孔13を設け、該軸孔
13の周辺には、軸孔13と同心の円上に例えば180
度の角度間隔をおいて、基板裏面側の吸引部(箱体の中
空部)15に連なる第1の吸引孔16,16を、底面部
11を上下貫通して設けてなる。又前記底面部11の表
面には、前記軸孔13に連通する如く挿通孔12aが穿
孔されるとともに前記第1の吸引孔16に連通する如く
透孔12bが穿孔されたゴム板12が貼着されている。
又、軸孔13の中間部位には周溝17を刻設し、前記吸
引部15には、真空ポンプに接続された吸引管19の端
部を連設してなる。
[0013] the bottom surface 11 of the recess 9 is provided at its center, a shaft hole 13 which opens on the back surface side of the substrate 3 is provided, on the periphery of the shaft hole 13, for example, on a circle of the axial hole 13 concentric 180
The first suction holes 16 and 16 connected to the suction portion (hollow portion of the box) 15 on the back surface side of the substrate are provided at an angular interval of 5 degrees so as to vertically penetrate the bottom surface portion 11. Also, the table of the bottom surface portion 11
An insertion hole 12a is formed on the surface so as to communicate with the shaft hole 13.
So as to communicate with the first suction hole 16
A rubber plate 12 having a through hole 12b is attached.
Further, a peripheral groove 17 is formed in an intermediate portion of the shaft hole 13, and the suction portion 15 is connected to an end portion of a suction pipe 19 connected to a vacuum pump.

【0014】前記回転弁10は前記凹部9の内径に略等
しい円板状をなし、その裏面には、前記挿通孔12a及
軸孔13を貫通して吸引部15内に所要長さ突出する
回転軸20を突設する。その周辺には、前記透孔12b
と合致する、従って第1の吸引孔16と合致しうる第2
の吸引孔21を、180度の角度間隔をおいて上下貫通
して設けてなる。又回転軸20の基端側部分に設けた環
状溝22には、前記周溝17と弾性的に嵌合しうるOリ
ング23を弾性的に嵌着してなる。又、該回転弁10の
表面側にはドライバー先端と係合しうる係合部25を設
け、回転弁表面26は基板表面27に稍沈む如くなし、
該回転弁表面26を底面とする凹所は吸着凹所29とし
てなる。
The rotary valve 10 has a disk shape substantially equal to the inner diameter of the concave portion 9, and the insertion hole 12a and the insertion hole 12a are formed on the back surface thereof.
Through a fine axial hole 13 to project the rotary shaft 20 which projects required length into the suction unit 15. In the vicinity thereof, the through hole 12b
A second, which can be matched with the first suction hole 16
Suction holes 21 are vertically penetrated at an angular interval of 180 degrees. An O-ring 23, which can be elastically fitted to the peripheral groove 17, is elastically fitted in an annular groove 22 provided in the base end side portion of the rotary shaft 20. Further, an engaging portion 25 capable of engaging with the tip of the driver is provided on the surface side of the rotary valve 10, and the rotary valve surface 26 is formed so as to sink into the substrate surface 27.
The recess having the rotary valve surface 26 as the bottom serves as an adsorption recess 29.

【0015】又回転軸20の基板裏面側の前記突出する
軸部分20aには、基板裏面の軸孔周縁部分30と当接
しうる皿バネ31a(バネ部材31)を嵌装し、該軸部
分20aのネジ部32に螺合せしめられたナット33a
(受部33)が所要に締め付けられて、該バネ部材31
が弾性圧縮状態とされており、該バネ部材31の付勢作
用によって、回転弁の裏面35とゴム板12の表面36
とは弾性的に圧接した状態にある(図3)。
Further, a disc spring 31a (spring member 31) capable of contacting the peripheral portion 30 of the shaft hole on the back surface of the substrate is fitted on the protruding shaft portion 20a on the back surface side of the rotating shaft 20, and the shaft portion 20a. 33a screwed onto the screw portion 32 of the
When the (reception part 33) is tightened as required, the spring member 31
Are in an elastically compressed state, and the urging action of the spring member 31 causes the back surface 35 of the rotary valve and the front surface 36 of the rubber plate 12 to rotate.
And are in a state of being elastically pressed (FIG. 3).

【0016】然してかかるワークホルダ1にワークを保
持させるには、例えば当初は、全ての吸着凹所29につ
いて、図4に示すように、第1の吸引孔16と第2の吸
引孔21が位置ずれして第1の吸引孔16が回転弁10
で遮断された状態にしておく。
However, in order to hold the work in the work holder 1, for example, initially, as shown in FIG. 4, the first suction holes 16 and the second suction holes 21 are located in all the suction recesses 29. The first suction hole 16 is displaced so that the rotary valve 10
Keep it blocked by.

【0017】この状態において、最終加工状態において
もワークが確実に吸着保持された状態となるよう、ワー
クの形態やワークの最終的な加工状態を考慮に入れて、
図3、図5に示す如く、ワークWの裏面周縁部分に弾性
シール材5が当接するように該弾性シール材5を格子状
の溝部6にループを描いて嵌着する。なお図5において
は、ワークの中央部分にドリル孔加工が施されるため、
形成されるべき貫通孔(図5において一点鎖線で示す)
39部分と対向する回転弁10aの全ては、遮断状態と
されている。
In this state, the shape of the work and the final working state of the work are taken into consideration so that the work is surely sucked and held even in the final working state.
As shown in FIGS. 3 and 5, the elastic sealing material 5 is fitted into the lattice-shaped groove portion 6 in a loop so that the elastic sealing material 5 contacts the peripheral portion of the back surface of the work W. In addition, in FIG. 5, since a drill hole is formed in the central portion of the work,
Through hole to be formed (shown by a chain line in FIG. 5)
All of the rotary valves 10a facing the portion 39 are in the shut-off state.

【0018】その後、加工後ワークの裏側に存すること
になる回転弁10の全てに関して、第1の吸引孔16と
第2の吸引孔21が連通状態となるように回転弁10を
回動操作する。然る後吸引部15を真空状態にすると、
圧縮状態の弾性シール材5により気密が保持されてワー
ク裏側の吸着凹所29の夫々で排気されるため、ワーク
設置後極短時間のうちに、ワークWは所要に吸着保持さ
れた状態となる。
After that, with respect to all of the rotary valves 10 to be present on the back side of the processed workpiece, the rotary valve 10 is rotated so that the first suction holes 16 and the second suction holes 21 are in communication with each other. . After that, if the suction unit 15 is evacuated,
Since the airtightness is maintained by the elastic seal material 5 in the compressed state and exhausted in each of the suction recesses 29 on the back side of the workpiece, the workpiece W is in a required suction-held state within a very short time after the workpiece is installed. .

【0019】又、加工時の抵抗や振動の影響によって弾
性シール材5とワークWとの気密状態が部分的に破れた
場合にも、排気速度が速いために、安定的な吸着保持状
態に瞬時に戻る。
Even when the airtight state between the elastic seal material 5 and the work W is partially broken due to the influence of resistance and vibration during processing, the exhaust speed is high, so that a stable suction and hold state is instantly obtained. Return to.

【0020】図6は、基板裏側に突出する軸部分20a
に嵌着されたスナップリング33b(受部33)と基板
裏面の軸孔周縁部分30との間にコイルバネ31b(バ
ネ部材31)を稍圧縮状態に介装してなる本考案の他の
実施例を示すものである。
FIG. 6 shows a shaft portion 20a protruding to the back side of the substrate.
Another embodiment of the present invention in which a coil spring 31b (spring member 31) is interposed in a slightly compressed state between a snap ring 33b (reception portion 33) fitted to the shaft and a peripheral portion 30 of the shaft hole on the back surface of the substrate. Is shown.

【0021】[0021]

【考案の効果】本考案によれば、基板の表面部に設けた
区画された各格子目に対応させて夫々第1の吸引孔を穿
孔したことで、ワークの形状が異なっても非常に効率の
よい吸引保持を行うことができると共に、この各格子目
に回転弁を設けたことで、ワークの形状によって不要と
なった場所の各格子目の回転弁を閉じ状態とすることが
でき、従って、必要な場所の各格子目の吸引孔の吸引効
率を高めることができるのである。 しかも、必要、不要
場所の吸引孔の開閉を、ネジ込み式の栓部材を用いる前
記した従来タイプのものに比べて、簡便な操作で、且
つ、ゴム板の介在によって気密性を非常に高めた状態で
確実に行うことができるという顕著な効果を奏するに至
ったものである。
According to the present invention, it is provided on the surface of the substrate.
Drill the first suction holes in correspondence with each partitioned grid.
Due to the holes, it is very efficient even if the shape of the work is different.
It is possible to perform good suction and hold, and each grid
By providing a rotary valve on the side, it is not necessary depending on the shape of the workpiece.
It is possible to close the rotary valve of each grid at the place where
Yes, and therefore the suction effect of the suction holes of each grid where needed.
The rate can be increased. Moreover, it is necessary and unnecessary
Before opening and closing the suction hole of the place, using the screw type plug member
Compared to the conventional type described above, it is easier to operate and
With the rubber plate interposed, the airtightness is greatly enhanced.
It has a remarkable effect that it can be performed reliably.
It is a thing.

【図面の簡単な説明】[Brief description of drawings]

【図1】本考案の一実施例を説明する斜視図である。FIG. 1 is a perspective view illustrating an embodiment of the present invention.

【図2】基板に設けた吸着凹所と、それを構成する凹部
及び回転弁を説明する斜視図である。
FIG. 2 is a perspective view illustrating a suction concave portion provided on a substrate, a concave portion and a rotary valve forming the suction concave portion.

【図3】本考案の要部構成を、第1の吸引孔を開放した
使用状態において説明する断面図である。
FIG. 3 is a cross-sectional view illustrating a configuration of a main part of the present invention in a use state in which a first suction hole is opened.

【図4】第1の吸引孔を遮断した状態を説明する断面図
である。
FIG. 4 is a cross-sectional view illustrating a state in which a first suction hole is blocked.

【図5】基板に設けた格子状の溝部に、ワークの形態や
その最終加工状態を考慮に入れて弾性シール材を嵌着し
た状態を説明する平面図である。
FIG. 5 is a plan view illustrating a state in which an elastic seal material is fitted into a lattice-shaped groove portion provided on a substrate in consideration of a form of a work and a final processing state thereof.

【図6】本考案の他の実施例をその使用状態において説
明する断面図である。
FIG. 6 is a cross-sectional view for explaining another embodiment of the present invention in its usage state.

【図7】従来の吸引方式のワークホルダを説明する斜視
図である。
FIG. 7 is a perspective view illustrating a conventional suction type work holder.

【図8】従来のワークホルダの使用状態を説明する断面
図である。
FIG. 8 is a cross-sectional view illustrating a usage state of a conventional work holder.

【図9】従来のワークホルダの格子状溝部に弾性シール
材を嵌着した状態を説明する平面図である。
FIG. 9 is a plan view illustrating a state where an elastic seal member is fitted in a lattice-shaped groove portion of a conventional work holder.

【符号の説明】[Explanation of symbols]

1 ワークホルダ 3 基板 5 弾性シール材 6 溝部 7 格子目 9 凹部 10 回転弁 11 凹部の底面部 13 軸孔 15 吸引部 16 第1の吸引孔 20 回転軸 21 第2の吸引孔 25 係合部 26 回転弁の表面 27 基板表面 31 バネ部材 33 受部 35 回転弁の裏面 36 凹部底面 1 Work Holder 3 Substrate 5 Elastic Seal Material 6 Groove 7 Grid 9 Recess 10 Rotating Valve 11 Bottom of Recess 13 Shaft Hole 15 Suction Part 16 First Suction Hole 20 Rotation Shaft 21 Second Suction Hole 25 Engagement Part 26 Front surface of rotary valve 27 Substrate surface 31 Spring member 33 Receiving portion 35 Back surface of rotary valve 36 Bottom surface of recess

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 基板3の表面部に、弾性を有するシール
材5を嵌着するための格子状の溝部6を設けるととも
に、区画された各格子目7に凹部9を設け、該凹部9の
底面部11には、基板の裏面側に解放する軸孔13を
設けるとともに該軸孔13の周辺に、基板3の裏面側に
設けた吸引部15に連なる第1の吸引孔16を底部面1
1を貫通して設け、前記第1の吸引孔16からの負圧に
よって、基板3に載置したワークを保持するように構成
したバキューム吸着方式のワークホルダに於いて、 前記凹部9に、前記第1の吸引孔16と連通しうる第2
の吸引孔21が板厚方向に貫設された板状の回転弁10
を、その裏面側に突設された回転軸20を前記軸孔13
に挿通せしめて納装し、該納装状態において、回転弁
の表面26が基板表面27に沈む如くなすととともに
前記回転軸20が基板の裏面側に突出する如くなし、
該突出する軸部分20aに設けた受部33と基板裏面の
軸孔周縁部分30との間に、回転弁10を凹部9の底面
部11に向けて付勢するバネ部材31を介装し、又回転
弁10の表面側には、回転工具と係合する係合部25を
設け、且つ、前記回転弁10の裏面35と前記凹部9の
底面部11との間には、前記軸孔13に連通する如く穿
孔されるとともに前記第1の吸引孔16及び第2の吸引
孔21に連通する如く穿孔されたゴム板12を介在させ
ことを特徴とするバキューム吸着方式のワークホル
ダ。
1. A lattice-shaped groove portion 6 for fitting a sealing material 5 having elasticity is provided on a surface portion of a substrate 3, and a concave portion 9 is provided in each of the divided lattice cells 7, and the concave portion 9 is formed. the bottom portion 11, the periphery of the shaft hole 13 provided with a shaft hole 13 to release the back surface side of the substrate 3, bottom surface of the first suction holes 16 communicating with the suction portion 15 provided on the back surface side of the substrate 3 1
1 is provided so that the negative pressure from the first suction hole 16
Therefore, it is configured to hold the work placed on the substrate 3.
In the vacuum suction type work holder described above, the second portion that can communicate with the first suction hole 16 is provided in the concave portion 9.
Plate-shaped rotary valve 10 in which suction holes 21 of the
The rotary shaft 20 projecting on the back side of the rotary shaft 20.
It is inserted and inserted into the container, and in the installed state, the rotary valve 1
The surface 26 of 0 is sunk into the surface 27 of the substrate, and the rotary shaft 20 is projected toward the rear surface of the substrate 3 ,
The rotary valve 10 is provided on the bottom surface of the recess 9 between the receiving portion 33 provided on the protruding shaft portion 20a and the peripheral edge portion 30 of the shaft hole on the rear surface of the substrate.
A spring member 31 that urges toward the portion 11 is interposed, and an engaging portion 25 that engages with a rotary tool is provided on the surface side of the rotary valve 10.
The rear surface 35 of the rotary valve 10 and the recess 9 are provided.
Between the bottom surface portion 11 and the bottom surface portion 11, a hole is formed so as to communicate with the shaft hole 13.
The first suction hole 16 and the second suction hole
With the rubber plate 12 punched so as to communicate with the hole 21
A vacuum suction type work holder.
JP1993016605U 1993-03-10 1993-03-10 Vacuum suction type work holder Expired - Lifetime JPH088039Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1993016605U JPH088039Y2 (en) 1993-03-10 1993-03-10 Vacuum suction type work holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1993016605U JPH088039Y2 (en) 1993-03-10 1993-03-10 Vacuum suction type work holder

Publications (2)

Publication Number Publication Date
JPH0671039U JPH0671039U (en) 1994-10-04
JPH088039Y2 true JPH088039Y2 (en) 1996-03-06

Family

ID=11920938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1993016605U Expired - Lifetime JPH088039Y2 (en) 1993-03-10 1993-03-10 Vacuum suction type work holder

Country Status (1)

Country Link
JP (1) JPH088039Y2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3859937B2 (en) * 2000-06-02 2006-12-20 住友大阪セメント株式会社 Electrostatic chuck
JP4635346B2 (en) * 2001-01-19 2011-02-23 株式会社村田製作所 Ultrasonic bonding head and ultrasonic bonding apparatus
KR101133295B1 (en) * 2009-09-15 2012-04-04 임권현 vacuum-padded for vacuum-chuck
KR101463698B1 (en) * 2013-11-14 2014-12-04 최병근 A portable zig
CN108942425B (en) * 2018-09-27 2023-08-29 深圳市南科燃料电池有限公司 Special fixture for machining bipolar plate and bipolar plate machining method using fixture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS432692Y1 (en) * 1964-12-23 1968-02-03
JPS6110115A (en) * 1985-05-22 1986-01-17 Hitachi Ltd Air-bearing type straight advance guide
JPH03187701A (en) * 1989-12-18 1991-08-15 Shinko Kogyo Co Ltd Table device for woodworking machine and the like

Also Published As

Publication number Publication date
JPH0671039U (en) 1994-10-04

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19960820

EXPY Cancellation because of completion of term