JPH0875410A - Reflection illumination device for projection inspection unit - Google Patents

Abstract

PURPOSE: To provide a reflection illumination device for a projection inspection unit capable of reducing the cost without deteriorating the operability. CONSTITUTION: The reflection illumination device for a projection inspection unit is provided with a light source 4, a condenser lens 2 converging the light from the light source 4, and a half mirror 9 reflecting the light from the condenser lens 2 nearly perpendicularly toward an inspected object 12. A holder 13 holding the condenser lens 2 is rotatably provided on a projection inspection unit main body 10 so that the light from the light source 4 can be directly radiated obliquely to the inspected object 12.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflection illumination device of a projection inspection device for observing the surface of an object to be inspected.

[0002]

2. Description of the Related Art FIG. 5 is a front view of a projection inspector equipped with a conventional reflection illumination device.

The reflection illuminator is a vertical epi-illuminator 10
1, an objective lens 117 and an illumination light source device 100. The objective lens 117 is the vertical epi-illumination device 10.
A condenser lens (not shown) that collects the light from 1.
The light from the condenser lens is used to inspect the object 1 on the stage 111.
It incorporates a half mirror (not shown) that reflects light at a substantially right angle toward 12.

The illumination light source device 100 is a projection inspection instrument main body 11
0 is attached externally, and light is obliquely applied to the test object 112. The light from the vertical epi-illumination device 101 is reflected by the half mirror via the condenser lens, and the light is reflected on the test object 112.
It is irradiated from right above. The light from the illumination light source device 100 is directly applied to the test object 112 from obliquely above. Object 1
The object to be inspected 1 on the screen by the reflected light (scattered light) from 12
12 magnified images are formed.

[0005]

When the vertical epi-illumination and the oblique illumination are switched and used, in addition to the vertical epi-illumination device 101, the illumination light source device 1 dedicated to the oblique illumination is used as described above.
00 (for example, a low-voltage halogen lamp) must be attached, and a large transformer is required accordingly, which causes a problem of high cost.

Further, since the illumination light source device 100 occupies a corresponding space around the main body 110 of the projection inspection device, there is a problem in that it interferes with the operation of the projection inspection device. For example, the illumination light source device 100 becomes an obstacle when the test object 112 is large or when a jig is used to hold the test object 112 on the mounting table 111.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a reflection illuminating device for a projection inspection device which does not impair operability and can reduce cost. . .

[0008]

In order to solve the above-mentioned problems, the reflection illuminating device of the projection inspection device according to the invention of claim 1 is
In a reflection illuminating device of a projection inspection device, comprising: an illuminating means; and a half mirror that reflects light from the illuminating means toward a test object at a substantially right angle. The illuminating means is movably provided on the projection inspector main body so that the inspection object can be illuminated.

According to a second aspect of the present invention, there is provided a reflection illuminating device for a projection inspector, which comprises a light source, a condensing optical member for condensing the light from the light source, and the light from the condensing optical member for inspection. In a reflection illuminating device of a projection inspecting device, comprising: a half mirror that reflects an object substantially at a right angle, light from the light source can be directly obliquely irradiated to the object to be inspected. A holder for holding the optical optical member is rotatably provided on the main body of the projection inspection device.

Further, in the reflection illuminating device of the projection inspection apparatus according to the third aspect of the invention, the light source is fixed to the holder.

According to a fourth aspect of the present invention, there is provided a reflection illuminating device for a projection inspector, wherein the holder irradiates the half mirror with the light from the light source or the light from the light source to the object to be inspected. It is provided with a position holding mechanism for holding it in a position for direct irradiation.

Further, in the reflection illuminating device of the projection inspection device according to the present invention, the light source, the condensing optical member for condensing the light from the light source, and the light from the condensing optical member are inspected. In a reflection illuminating device of a projection inspecting device, which comprises a half mirror for reflecting an object at a substantially right angle, the light source so that the light from the light source can be obliquely directly applied to the object. Are movable with respect to the condensing optical member.

According to a sixth aspect of the present invention, there is provided a reflection illuminating device for a projection inspection apparatus, wherein the light source irradiates the half mirror with the light from the light source or the light from the light source to the object to be inspected. It is provided with a position holding mechanism for holding it in a position for direct irradiation.

[0014]

In the reflection illuminating device of the projection inspecting apparatus according to the present invention, the illuminating means can be moved to the main body of the projection inspecting apparatus so that the light from the illuminating means can illuminate the half mirror and the object to be inspected. Since the vertical epi-illumination and the oblique illumination can be switched and used, the illumination light source device dedicated to the oblique illumination is unnecessary in addition to the vertical epi-illumination device.

Further, in the reflection illuminating device of the projection inspection apparatus according to the invention of claim 2 or 3, the light source, the condensing optical member for condensing the light from the light source, and the light from the condensing optical member are used. In the reflection illumination device of the projection inspection device, which comprises a half mirror for reflecting at substantially right angles to the object to be inspected, so that the light from the light source can be directly obliquely irradiated to the object to be inspected, A holder for holding the condensing optical member,
Since it is rotatably provided in the projection inspection device main body, it is possible to switch between vertical epi-illumination and oblique illumination by rotating the holder, and there is no need for an illumination light source device dedicated to oblique illumination in addition to the vertical epi-illumination device. become.

Further, in the reflection illuminating device of the projection inspection device according to the present invention, the position where the holder irradiates the half mirror with the light from the light source or the light from the light source to the object to be inspected. Since the position holding mechanism for holding the position in the direct irradiation position is provided, the vertical epi-illumination and the oblique illumination can be easily and surely switched.

According to a fifth aspect of the present invention, there is provided a reflection illuminating device for a projection inspector, wherein the light source, a condensing optical member for condensing the light from the light source, and the light from the condensing optical member are inspected. In a reflection illuminating device of a projection inspecting device, which comprises a half mirror for reflecting an object at a substantially right angle, the light source so that the light from the light source can be obliquely directly applied to the object. Is movable with respect to the condensing optical member, the driven part becomes smaller when driving the holder, and as a result, vertical epi-illumination and oblique illumination can be switched with a small driving force.

Further, in the reflection illuminating device of the projection inspection apparatus according to the invention as set forth in claim 6, the position where the light source irradiates the half mirror with the light from the light source or the light from the light source to the object to be inspected. Since the position holding mechanism for holding the position in the direct irradiation position is provided, the vertical epi-illumination and the oblique illumination can be easily and surely switched.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a fragmentary sectional view of a projection inspector equipped with a reflection illumination device according to a first embodiment of the present invention.

An illumination device (illumination means) 1 is attached to the projection inspector body 10. The illumination device 1 includes a condenser lens (condensing optical member) 2, a cylindrical holder 13 that holds the condenser lens 2, a light source 4 fixed to the holder 13, and a positioning mechanism that holds the holder 13 at a predetermined rotation angle position. It is composed of 5. The holder 13 is rotatably attached to the main body 10 of the projection inspection device by a hinge member 3. The positioning mechanism 5 includes a spring 6 whose one end is fixed to the projection inspector main body 10, an engagement member 15 which is provided at the other end of the spring 6, and an arc-shaped side surface of a convex piece 16 which is fixed to the holder 13. It is composed of concave portions 16a and 16b formed at predetermined positions.

An objective lens 17 held by a cylindrical holder 7 is attached to the projection inspector main body 10, and the light from the light source 4 is directed to the holder 7 so as to direct the light from the light source 4 toward an object 12 to be inspected. A half mirror 9 for reflecting at a right angle is built in.

FIG. 1 shows a vertical epi-illumination state in which the engaging member 15 of the positioning mechanism 5 engages with the concave portion 16a of the convex piece 16, and the holder 13 receives the light from the light source 4 as the condenser lens 2.
Holds the position that is emitted horizontally through the. The light from the light source 4 that has passed through the condenser lens 2 passes through the auxiliary condenser lens 8 held by the holder 7, and the half mirror 9
Is reflected at a substantially right angle toward the inspection object 12. Object 1
A magnified image of the test object 12 is formed on the screen 18 by reflected light (scattered light) from 2.

From the vertical epi-illumination state of FIG. 1, the holder 13 is rotated manually or with a motor, for example, with the hinge member 3 as the center of rotation.
When is rotated clockwise by a predetermined angle, the concave portion 1 of the convex piece 16 is
6a is disengaged from the engaging member 15 and the engaging member 15
Engages with the concave portion 16b of the convex piece 16, and as shown in FIG.
The holder 13 holds a position where the light from the light source 4 is directly applied to the test object 12. That is, the oblique illumination state is set.

The light from the light source 4 which has passed through the condenser lens 2 is directly applied to the object to be inspected, and an enlarged image of the object to be inspected 12 is formed on the screen 18 by reflected light (scattered light) from the object to be inspected. It

According to the reflective illumination device of the first embodiment,
Since the illumination device 1 can be used by switching between vertical epi-illumination and oblique illumination, an illumination light source device dedicated to oblique illumination is unnecessary, cost can be reduced, and obstacles in operation of the projection inspection device can be eliminated. To be done.

FIG. 3 is a sectional view of a projection inspector equipped with a reflective illumination device according to a second embodiment of the present invention. The same parts as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

In the second embodiment, the light source 4 is located coaxially with the hinge member 3 about the rotation center of the holder 33. The light source 4 is fixed to the projection inspection device body 10 via a support member (not shown). The holder 33 is rotated about the light source 4 to switch between vertical epi-illumination and oblique illumination.

According to the reflection lighting device of the second embodiment, the same effect as that of the reflection lighting device of the first embodiment can be obtained, and since the light source 4 is fixed, the wiring of the light source 4 is fixed. Wiring is easy, the wiring does not repeatedly bend, and the durability of the wiring improves.

FIG. 4 is a fragmentary sectional view of a projection inspector equipped with a reflective illumination device according to a third embodiment of the present invention. The same parts as those in the first embodiment are designated by the same reference numerals and the description thereof will be omitted.

In this third embodiment, the holder 53 is fixed to the projection inspector body 30, and the light source 24 is in the projection inspector body 3.
0 is movably attached via a support member (not shown). The moving mechanism 18 is provided below the light source 24, and the light source 24 can be moved in the vertical direction. Also, the third
In the positioning mechanism 5 of the embodiment, the moving mechanism 18 is provided with the recesses 18 a and 18 b with which the engaging member 15 of the spring 6 engages. The light source 24 is moved in the vertical direction to switch between vertical epi-illumination and oblique illumination.

According to the reflective illumination device of the second embodiment,
It is possible to obtain the same effect as that of the reflection lighting device of the first embodiment described above, and the holder 53 is not moved and the light source 24 is not moved.
Since the vertical epi-illumination and the oblique illumination are switched by moving, the driving force required for switching can be reduced. Therefore, it is effective in the case of motor drive.

[0033]

As described above, according to the reflection illuminating device of the projection inspection apparatus of the present invention, it is possible to switch between the vertical epi-illumination and the oblique illumination, so that the oblique illumination besides the vertical epi-illumination device can be used. No need for a dedicated lighting source device,
The cost can be reduced and the operational obstacles of the projection inspector are eliminated.

Further, according to the reflection illumination device of the projection inspection apparatus of the invention as defined in claim 2 or 3, the vertical epi-illumination and the oblique illumination can be switched by rotating the holder. Besides, an illumination light source device dedicated to oblique illumination is not required, which can reduce the cost and obstruct the operation of the projection inspection device.

Further, according to the reflection illuminating device of the projection inspection apparatus of the fourth aspect of the invention, the vertical holding illumination and the oblique illumination can be switched easily and reliably by the position holding mechanism.

Further, according to the reflection illumination device of the projection inspection apparatus of the present invention as claimed in claim 5, when the holder is driven, the driven portion becomes small, and therefore the vertical incident illumination and the oblique illumination can be performed with a small driving force. Can be switched.

Further, according to the reflection illuminating device of the projection inspecting apparatus of the sixth aspect of the invention, the vertical holding illumination and the oblique illumination can be easily and surely switched by the position holding mechanism.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a projection inspection device equipped with a reflective lighting device according to a first embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view showing an oblique illumination state of the reflection illumination device of FIG.

FIG. 3 is a fragmentary sectional view of a projection inspection device equipped with a reflective lighting device according to a second embodiment of the present invention.

FIG. 4 is a cross-sectional view of a projection inspection device equipped with a reflective lighting device according to a third embodiment of the present invention.

FIG. 5 is a front view of a projection inspection device equipped with a conventional reflection illumination device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Illumination device 2 Condenser lens 3 Hinge member 4,24 Light source 5 Positioning mechanism 7,13 Holder 9 Half mirror 10,30 Projection inspector main body 12 Test object 17 Objective lens

Claims (6)

[Claims] 1. A reflection illuminating device of a projection inspection instrument, comprising: an illuminating means; and a half mirror that reflects light from the illuminating means toward an object to be inspected at a substantially right angle. A reflection illumination device for a projection inspection device, wherein the illuminating means is movably provided in a main body of the projection inspection device so that a half mirror and the object to be inspected can be illuminated. 2. A projection comprising a light source, a condensing optical member that condenses the light from the light source, and a half mirror that reflects the light from the condensing optical member toward the object at a substantially right angle. In the reflective illuminating device of the inspection device, a holder for holding the condensing optical member is rotated on the projection inspection device main body so that the light from the light source can be obliquely directly applied to the object to be inspected. A reflection illumination device for a projection inspection device, which is provided so as to be possible. 3. The reflection illuminator for a projection inspection device according to claim 2, wherein the light source is fixed to the holder. 4. A position holding mechanism for holding the holder at a position where the light from the light source is applied to the half mirror or a position where the light from the light source is directly applied to the test object. The reflection illuminating device of the projection inspection device according to claim 2 or 3. 5. A projection comprising a light source, a condensing optical member for condensing light from the light source, and a half mirror for reflecting the light from the condensing optical member toward a test object at a substantially right angle. In the reflective illumination device of the inspection device, the light source is movable with respect to the condensing optical member so that the light from the light source can be obliquely directly irradiated to the object to be inspected. Reflective lighting equipment for projection inspection equipment. 6. A position holding mechanism for holding the light source at a position where the light from the light source is applied to the half mirror or a position where the light from the light source is directly applied to the test object. The reflection illuminating device of the projection inspection device according to claim 5.