JPH0857737A - Workpiece conveying-positioning method - Google Patents

Abstract

PURPOSE: To convey workpieces using a robot and position the workpieces in the specified positions of trays moving in one after another. CONSTITUTION: To a first reference tray, a reference position obtaining process 200 for obtaining the position of the reference tray to a robot body is performed. From a second tray onward, a process 201 for obtaining the slippage of each tray from the reference position so as to obtain the action quantity of the robot body required to move a workpiece into the specified position of each tray, and a process 202 for operating the robot body on the basis of the data obtained in the process 201 are performd. The reference position obtaining process 200 is performed mainly through calculation by processing data obtained by changing the position of a column part on the basis of the XYZ θ orthogonal coordinate system robot body and performing a first and second robot body manual operating action processes 200-5 , 200-6 .

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work transfer / positioning method, and more particularly to a work transfer / positioning method for transferring a work using a robot and positioning it at a predetermined position on a tray.

In a manufacturing process of a liquid crystal device or the like, a manufacturing facility is often used in which a robot places a work on a tray, the tray is carried into a processing device, and the work is processed.

FIGS. 11 (A) and 11 (B) are examples of this manufacturing facility, C for forming a thin film on a glass substrate of a liquid crystal device.
The glass substrate exchange part of a VD apparatus and its peripheral part are shown.

Reference numeral 10 denotes a cassette, which contains a glass substrate.

A CVD apparatus 11 forms a film on a glass substrate.

The CVD apparatus 11 has a plurality of trays and a tray transfer mechanism (not shown) for moving the plurality of trays.

Reference numeral 12 is a glass substrate exchange section.

Reference numeral 13 denotes an XYZθ Cartesian coordinate system robot, which is installed on the floor between the cassette 10 and the glass substrate exchange unit 12.

Reference numeral 14 denotes a tray, which is in the shape of a rectangular plate and has glass substrate mounting portions 15 _-1 to 15 _-4 which are seated on the upper surface. Each tray 14 has a tray transport mechanism (not shown).
It is fixed to and is transported. When the tray 14 comes out of the CVD apparatus 11, it reaches the glass substrate exchange section 12, and when it reaches the glass substrate exchange section 12, it is tilted 90 degrees to be horizontal.

The robot 13 operates in the X, Y, Z, and θ directions, and the suction pad 16 causes the film-formed glass substrate 1 to be formed.
7 is adsorbed and transferred from the tray 14 to the cassette 10, and the glass substrate 18 before film formation in the cassette 10 is adsorbed and the line 1
As shown by 9, the sheet is conveyed and placed on each of the glass substrate placing portions 15 _-1 to 15 _-4 of the tray 14.

A tray 14 on which a glass substrate 18 is placed
Is erected as shown by the chain double-dashed line in FIG.
It is carried into the CVD apparatus 11.

Subsequently, another tray comes out to the glass substrate exchange section 12 and is brought down to be horizontal.

Then, the robot 13 operates in the same manner as above, and the glass substrate is replaced.

Here, the position of the tray 14 tilted down by the glass substrate exchanging section 12 is generally different from one tray to another.

In the above manufacturing facility, the robot is
The glass substrate, which is a work, operates with high accuracy with respect to the tray at that time, and the glass substrate mounting portion 15 _{-1 of the} tray 14
It is necessary to adjust it so that it can be placed in a state of being fitted to ~ 15 _-4 .

This is because if the glass substrate is slightly displaced from the glass substrate mounting portion, the glass substrate will be displaced from the tray when the tray is set up.

Here, it is desirable that the above adjustment be simple.

[0018]

2. Description of the Related Art An example of a conventional work transfer / positioning method will be described by taking a glass substrate (work) exchanging portion of a CVD apparatus for LCD as an example, as described above.

FIG. 12 and FIG. 13 show the hardware part of the work transfer positioning method.

The work transfer positioning device 20 for carrying out the work positioning method comprises a robot device 21.

The robot device 21 includes a robot body 22.
The robot main body drive controller 23, a pair of CCD cameras 24 and 25, and TV monitors 26 and 27.

The robot body 21 is of an XYZθ orthogonal coordinate system, and has a base 31, a column 32 that moves on the base 31 in the X direction, and rotates in the θ direction with respect to the column 32. At the same time, it has a support rail portion 33 that moves up and down, and an arm portion 34 that moves along the support rail portion 33 in a substantially Y direction. A glass substrate suction pad 35 is provided at the tip of the arm portion 34.

The robot body drive control section 23 has a microcomputer 40, a motor drive circuit 41 for driving a servomotor in the robot body 22, and an operation section 42.

The microcomputer 40 has a CPU 43.
In addition to controlling the operation of the robot body 22, it also processes image information from the CCD cameras 24 and 25.

The robot main body 22 operates via the motor drive circuit 27 according to the output from the microcomputer 40.

The CCD cameras 24 and 25 are provided at predetermined positions in the glass substrate exchange section 50.

Here, the predetermined position means that the tray is moved and stopped, and when it is assumed that the tray is horizontally tilted and stopped at the glass substrate exchanging section 50, the counterbore holes 65 _-1 , 6 of the tray.
5 is a position directly below _-2.

Information taken by the CCD cameras 51 and 52 is stored in the memory 44, and the TV monitor 26 and
It is projected on 27.

Now, the tray will be described.

The tray 60 has a rectangular plate shape and a surface 61.
Has four square glass substrate mounting portions 62 _{-1 to} 62 _-4 formed at the four positions, and the back surface 63 has counterbore holes near both ends of one side 64. 65 _-1 , 65 _-2
Have.

[0031] For all the trays, glass substrate platform 62 _-1 to 62 _-4 and counterbore 65 _-1, and 65 _-2, the same positional relationship.

B is the center point of the counterbore hole 65 _-1 , C is the center point of the counterbore hole 65 _-2 , and D is the center point of one glass substrate mounting portion 62 _-1 .

The mutual positional relationship between the points B, C and D is known.

X is the distance between points B and C.

Next, the work transfer positioning device 20 described above.
The operation of carrying a glass substrate as a work and positioning it on the tray will be described using.

As shown in FIG. 14, the operation of transporting and positioning the glass substrate is roughly classified into (1) a step performed before the robot apparatus 21 is actually operated, that is, the first tray (this tray is the reference tray). The reference movement amount setting step 100 for setting the reference movement amount of the robot body for positioning the glass substrate with respect to (2)
For each tray that has been moved and stopped by the glass substrate exchange unit 50, a deviation amount with respect to the reference tray is obtained, and the reference operation amount correction step 101 for correcting the reference operation amount according to the deviation amount, and (3 ) Robot operating process 102.

The reference movement amount setting step 100 is performed as described below. [1] Parallelizing Step 100 _{-1 The} reference tray 60 is placed in the glass substrate exchange section 50.

The operator moves the robot body 21 (which is initially located at the position shown by the chain double-dashed line in FIG. 12) on the floor surface 39 by using the position shifting equipment, and
2, the X-axis 36 of the robot body 21 is indicated by the solid line.
Is adjusted to be parallel to the side 64 of the reference tray 60. As a result, the state shown in FIG. 15 is obtained. [2] Right angle drawing step 100 _{-2 An} operator applies a right angle jig and operates the operation section 42 to drive the servo motor from the reference position to move the support rail section 33 (arm section 34) in the θ direction. The desired amount of rotation to move the arm 34 in the moving direction (this becomes the Y-axis 37).
Is perpendicular to the X axis 36.

Reference numeral 38 is the origin (0, 0) of the coordinate system of the robot body 22. [3] points B, and a position storage step 100 _-3 CCD camera 24, 25 and C, counter bore 65 _-1 of the reference tray 60, to image the 65 _-2.

The positions of the points B and C projected on the TV monitors 26 and 27 are the origin (0, 0), and this is the memory 4
Store in 4. [4] Robot main body manual operation step 100 _{-4 An} operator causes the suction pad 25 to adsorb the center of the glass substrate, operates the operation unit 42, and operates the robot main body 22. The robot body 22 is fixed at the position defined in the above [2] with respect to the θ direction, and as shown in FIG.
The glass substrate is slid in the Y direction and in the Y direction to position the glass substrate at the reference glass substrate mounting portion 62 _-1 (position D), and is mounted there. [5] Storing amount of X, Y slide amount 100 _-6 The amount of slide in the X direction and the amount of slide in the Y direction are stored in the memory 44.

With the above, the reference motion amount setting step 100 is completed.

Next, the reference operation amount correction step 101 will be described.

The reference tray 60 is moved from the glass substrate exchange section 50, and the next tray 60 _-1 is moved to the glass substrate exchange section 5.
0, and as shown in FIG. 16, the reference tray 60
The description will be made assuming that the position is slightly deviated from the position.

Points B ', C', and D'are the positions of the counterbore hole of the tray 60 _-1 and the glass substrate mounting portion. [1] Deviation amount indexing step 101 _{-1 The} screen shown in FIG. 17 (A) is displayed on the TV monitor 26, and the screen shown in FIG. 17 (B) is displayed on the TV monitor 27. .

The microcomputer 40, based on the image information from the CCD cameras 24 and 25, is shown in FIG.
In FIG.
In (B), the shift amounts x ″ and y ″ of the point C ′ with respect to the point C are calculated.

Here, in order to move the robot main body 22 so that the suction pad 35 reaches the point D ', in FIG.
It suffices to find α, J, and H.

Therefore, the following operation is performed. [2] As shown in step 101 _-2 19 for determining the angle alpha, the point B 'as the origin, X-coordinate

[0048]

[Outer 1]

Parallel to.

As can be seen from FIG.

[0051]

[Equation 1]

[3] Step of obtaining distance J 101 _{-3 As} shown in FIG.

[0053]

[Outside 2]

Is rotated by an angle α with B as the origin,

[0055]

[Outside 3]

Is the same as the addition of.

Therefore,

[0058]

[Equation 2]

It becomes

Further, from FIG.

[0061]

(Equation 3)

It becomes

Therefore, the distance J is J = X + xcos α−y
sin α + x '+ (Y + x sin α + ycos α + y') tan
Obtained as α. [4] Step 101 _{-4 for obtaining the} distance H

[0064]

[Equation 4]

Is obtained. The data for positioning the suction pad 35 at the center position of the other glass substrate mounting portion of the tray 60 _-1 is given by α, J and H obtained above,
Add the dimensions of the glass substrate placement section on the tray as appropriate,
It can be obtained by subtracting.

By the above, the reference motion amount correction step 101
Is completed.

Next, the robot operating step 102 is performed.

The data obtained in the above initial value correction step 101 is output and is added to the motor drive circuit 41 in FIG. 12, the servo motor operates, and the robot main body 22 moves to X,
It operates in the Y, Z, and θ directions.

As a result, the suction pad 35 is moved to the center of each glass substrate mounting portion of the tray 60 _-1 , and the glass substrate 18 is mounted on each glass substrate mounting portion.

[0070]

According to the conventional work transfer positioning method, in the standard movement amount setting step 100, the robot main body 22 is moved by using the position shifting equipment, or the X axis is used by using the right angle jig. It was necessary to perform a laborious work of adjusting the robot main body, such as setting a right angle with the Y axis.

Further, it has been relatively difficult to perform the above adjustment with high accuracy. Since the influence of the adjustment accuracy appears on the positioning accuracy of the work, it is difficult to position the work with sufficient accuracy.

Therefore, an object of the present invention is to provide a work transfer positioning method that solves the above problems.

[0073]

According to a first aspect of the present invention, there is provided a position of a reference tray which is a first tray with respect to a robot main body which moves works one after another to a predetermined position on the stopped tray. For the reference position obtaining step of obtaining the reference position and for the subsequent trays, the deviation of each tray from the reference position of the reference tray is obtained, and the robot body conveys the work to the predetermined position of each tray. The robot main body motion amount is obtained by calculating the motion amount required for the operation, and the robot main body is operated by the motion amount obtained by the robot body motion amount obtaining process. do it,
A method for positioning each tray moving one after another at a predetermined position, wherein the reference position determining step is performed by moving a portion of the robot body holding a work to a position corresponding to a reference position of the reference tray. The operation is performed a plurality of times by changing the position of the movable part on the base side of the robot body, and based on the amount of movement of the part holding the workpiece at that time, the reference position is calculated. is there.

According to the second aspect of the present invention, the work is moved one after another and conveyed to a predetermined position on the tray which has stopped, XYZθ.
A reference position obtaining step of obtaining a reference position which is a position of the reference tray which is the first tray with respect to the robot body of the Cartesian coordinate system, and a deviation of each tray from the reference position of the reference tray with respect to the subsequent trays. Then, the robot body calculates the operation amount required to convey the work to the predetermined position of each tray, and the operation amount obtained by the robot body operation amount calculation step. The method comprises the step of operating the robot main body only, wherein the robot main body conveys a work and positions it at a predetermined position of each tray that moves one after another, and the reference tray and other trays are , It has a counterbore hole at two places on the back side, and when the reference tray and other trays are stopped, the counterbore hole is photographed. Two cameras are provided, and the reference positioning step is performed by taking a picture of the counterbore hole of the reference tray by the camera and storing the positions of the two counterbore holes; and avoiding the reference tray. , A first manual operation operation step of moving the portion of the robot body holding the work to two positions of the counterbore stored by the storage step, and moving a movable part of the robot body on the base side. And the movable portion is set to another position, the second manual operation operation for moving the portion of the robot body holding the workpiece to the two positions of the counterbore hole stored by the storing step. The reference position is obtained by calculation based on the process and the amount of movement of the portion holding the workpiece in the first and second manual operation motion processes. Extent and becomes more, the robot operation process, based on the information the two cameras have taken a counterbore of each tray, seeking a deviation with respect to a reference position of the reference tray of each tray,
The robot body is configured to calculate the amount of movement required to convey the work to a predetermined position on each tray.

[0075]

According to the first and second aspects of the invention, in the reference position obtaining step, the operation of moving the work holding portion of the robot body to the position corresponding to the reference position of the reference tray is performed by the movable portion on the base side of the robot body. Change the position multiple times (2
The number of operations is set based on the amount of movement of the workpiece holding position at that time, and the work of adjusting the robot is unnecessary, and the position of the reference tray in the coordinate system of the robot body is calculated exclusively. Act to enable.

[0076]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the work transfer / positioning method of the present invention will be described by taking a glass substrate (work) exchanging portion of a CVD apparatus for LCD as an example, similarly to the above.

2 and 3 show a work transfer positioning device 20A for carrying out the work transfer positioning method.

The work transfer / positioning device 20A has a structure in which (1) the robot main body 22 is installed on the floor so as not to move, and (2) the suction pad 35 at the tip of the arm portion 34 is removable. And suction pad 35
Instead of the configuration in which the positioning pin 210 is attached, and (3) the configuration in which the content of the program for operating the CPU 43 is different, the workpiece transfer positioning device 20 shown in FIGS. Is the same.

2 and 3, parts corresponding to those shown in FIGS. 12 and 13 are designated by the same reference numerals, and their description will be omitted.

Next, the work transfer positioning device 20 described above.
The operation of using A to convey a glass substrate, which is a work, and position it on the tray will be described.

The operation of transporting and positioning the glass substrate is roughly divided into (1) the reference tray which is the first tray for the robot main body which transports the glass substrates one after another to the predetermined position on the stopped tray. Reference position obtaining step 200 for obtaining a reference position which is the position of
(2) For the following trays, it is necessary to find the deviation of each tray from the reference position of the reference tray and to allow the robot body to convey the glass substrate to the predetermined position of each tray. It comprises a robot body motion amount determining step 201 for calculating a motion amount by calculation, and (3) a step 202 of operating the robot body by the motion amount obtained in the robot body motion amount determining step 200.

First, the operation of the reference position finding step 200 will be described. The operation of this step 200 is performed without any adjustment of the robot body 23. [1] point B, the counter bore 65 _-1 position storing step 200 _-1 standard tray 60 and C, copy the 65 _-2 CCD camera 24 and 25, the counterbored holes Projected on the TV monitor 26, 27 The center positions B and C are used as coordinate origins and are stored in the memory 44. [2] Positioning Pin Attachment Step 200 _{-2 As} shown in FIG. 4, an operator removes the suction pad and mounts the positioning pin 210 instead. [3] The reference tray 60 as shown in avoid dregs step 200 _-3 4, avoid lees reference tray 60 by the operator from the glass substrate exchange unit 50. [4] First robot body manual operation operation step 200 _-4 This step 200 _-4 includes the following operations (4-1) to (4-6)
Done by

(4-1) The operator operates the operation unit 42,
The robot body 22 is operated. As shown in FIG. 5, the column portion 32 is moved and stopped at a point E that is XE away from the X coordinate origin.

(4-2) While watching the screen of the TV monitor 26 taken by the CCD camera 24, the support rail portion 33
Is appropriately rotated in the θ direction, and the arm portion 34 is appropriately extended to match the center of the pin 210 with the origin coordinate of the point B defined in [1] above.

(4-3) The amount of extension b of the arm portion 34 at this time is stored in the memory 44.

(4-4) While watching the screen of the TV monitor 27 taken by the CCD camera 25, the support rail portion 33
Is appropriately rotated in the θ direction, and the arm portion 34 is appropriately extended to match the center of the pin 210 with the origin coordinate of the point C defined in the above [1].

(4-5) The amount of extension b + b ′ of the arm portion 34 and the rotation angle β at this time are stored in the memory 44.

(4-6) Perform the following calculation to obtain ∠CB
E = β 'is calculated.

[0089]

(Equation 5)

It is

Here, from the second cosine theorem, a ² = b ² +
(B + b ′) ² + 2b (b + b ′) cos β and b
² (2 + 2cos β) + 2b (b '+ b'cos β) + b'
A ² -a ² = 0.

Find b from the above two equations (b> 0)

[0093]

(Equation 6)

Is obtained.

The calculated angle β'is stored in the memory 44. [5] Second Robot Body Manual Operation Operation Step 200 _{-5 An} operator operates the operation unit 42 to operate the robot body 22.

As shown in FIG. 6, the column portion 32 is stopped at a point F distant from the origin of the X coordinate by a distance XF different from XE, and the same operation as the above (4-2) to (4-6) is performed. The extension amount c, c + c ′ of the arm portion 34 and the arm portion 3
The rotation angle γ of 4 and the angle <CBF≡γ ′ are obtained and stored in the memory 44.

The extension amount c of the arm portion 34 is obtained by the following equation.

[0098]

(Equation 7)

[6] Step 200 for calculating the position of the point B- _{6 As} shown in FIG. 7, the robot main body 21 is moved as follows based on the data obtained in the steps [4] and [5]. Find the position of point B in the coordinate system.

From the second cosine theorem, b ² = c ² + l ² +2
It becomes clcos S. Therefore,

[0101]

[Equation 8]

It becomes [7] the reference tray 60 sides 64, as shown in step 200 _-7 8 for obtaining a deviation angle α with respect to the upper X coordinate axis of the robot body 21 of the (point B, the line segments and a parallel connecting C), point E Let M be the intersection of the perpendicular to the line segment BC and the line segment BC. Similarly, an intersection of a perpendicular line passing through the point F and the line segment BC with the line segment BC is N.

From this, the following calculation is performed to obtain the angle α formed by the X coordinate axis of the robot body 21 and the side 64 of the reference tray 60.

[0104]

[Equation 9]

[8] Finally, the step 200 _-8 of removing the positioning pin and attaching the suction pad is performed.

Thus, the reference position finding step 200 is completed.

As can be seen from the above, the robot body 21
Since there is no step of adjusting the installation position of the device by moving it or using a right-angled jig, the reference position obtaining step 2
00 is performed more accurately and more accurately than before.

Next, the robot body movement amount obtaining step 201
Will be described.

The reference tray 60 is moved from the glass substrate exchange section 50, and the next tray 60 _-1 is moved to the glass substrate exchange section 5.
0, and as shown in FIG. 16, the reference tray 60
The description will be made assuming that there is a slight deviation from the position of.

Points B ', C', and D'are the positions of the counterbore hole of the tray 60 _-1 and the glass substrate mounting portion.

[9] Step 201-1 for _obtaining the position of D ′ As shown in FIGS. 17 (A) and 17 (B), the TV monitor 26,
The points B ′ and C ′ are projected on 27.

As shown in FIG. 9, line segment BC and line segment B '
The angle with C'is Ω.

From the above, the position of D'is determined as follows.

[0113]

[Outside 4]

Is the origin, and the point which becomes D at this time (X coordinate is parallel to the X axis) is DD, and this is rotated by α + Ω,

[0115]

[Outside 5]

It is the added position.

Therefore,

[0118]

[Outside 6]

Is calculated as shown below.

[0120]

[Equation 10]

[10] Step of obtaining J, H 201 _{-2 The} angle between the X coordinate of the robot body 21 and the line segment B'C 'is α + Ω.

As shown in FIG. 10, the angle α in FIG.
Substituting α + Ω into, obtain J and H.

J and H are as follows.

[0124]

[Equation 11]

The data for positioning the suction pad 35 at the center position of the other glass substrate mounting portion of the tray 60 _-1 is the glass on the tray in α, J and H obtained above. It can be obtained by appropriately adding and subtracting the dimensions of the placement of the substrate platform.

With the above, the robot body movement amount obtaining step 201 is completed.

Next, the robot operating step 202 is performed.

The data obtained in the above step 202 is output, and FIGS. 2 and 3 are also added to the motor drive circuit 41, and the servo motor is operated to move the robot main body 22 to X, Y, Z ,.
Operates in the θ direction.

As a result, the suction pad 35 is moved to the center of each glass substrate mounting portion of the tray 60 _-1 , and the glass substrate is mounted on each glass substrate mounting portion.

The present invention can be applied not only to the place of the CVD apparatus for LCD but also to other places.

That is, the work is not limited to the glass substrate. Further, the position where the work is positioned is not limited to the position on the tray.

[0132]

As described above, according to the present invention of claims 1 and 2, it is not necessary to adjust the installation position of the robot main body or to perform the right angle extension using a right angle jig. Compared to the conventional case, the work for the reference tray can be performed easily and with less effort.

Further, the reference position can be accurately obtained. As a result, it is possible to carry out the operation of transporting the work and positioning it at a predetermined position on each tray that moves one after another with higher accuracy than in the conventional case.

[Brief description of drawings]

FIG. 1 is a flowchart of a method for determining a work transfer position according to an embodiment of the present invention.

FIG. 2 is a diagram showing a work transfer positioning device that performs the work transfer position determination method of the present invention.

FIG. 3 is an elevational view of the device of FIG.

FIG. 4 is a diagram for explaining steps 200 _-1 , 200 _-3 in FIG. 1.

5 is a diagram for explaining a process 200 _-4 in FIG. 1. FIG.

FIG. 6 is a diagram for explaining a process 200 ₋₅ in FIG. 1.

FIG. 7 is a diagram illustrating a process 200 _-6 in FIG. 1.

FIG. 8 is a diagram illustrating a process 200 _-7 in FIG. 1.

FIG. 9 is a diagram illustrating a process 200 ₋₁ in FIG.

FIG. 10 is a diagram illustrating a process 200 _-2 in FIG. 1.

FIG. 11 is a diagram showing a glass substrate exchange section of a CVD apparatus and its peripheral section.

FIG. 12 is a view showing an apparatus for performing a conventional work transfer positioning method.

13 is an elevational view of the device of FIG.

FIG. 14 is a flowchart of a glass substrate transfer positioning operation.

FIG. 15 is a diagram for explaining a reference movement amount setting step in FIG.

FIG. 16 is a diagram for explaining the positional deviation of the next tray with respect to the reference tray.

17 is a diagram showing a screen of a TV monitor of a counterbore hole of the tray of FIG.

FIG. 18 is a diagram for explaining how to determine the movement amount of the robot body with respect to the tray of FIG. 16;

FIG. 19 is a diagram illustrating a step 101-2 of _{obtaining an} angle α.

FIG. 20 is a diagram illustrating a step 101 _-3 of _obtaining a distance J.

[Explanation of symbols]

10 cassette 18 glass substrate 20 work positioning device 21 robot device 22 X, Y, Z, θ Cartesian coordinate system robot body 23 robot body drive control unit 24, 25 CCD camera 26, 27 TV monitor 31 base 32 column part 33 support rail Part 34 Arm part 35 Glass substrate suction pad 36 X-axis 37 Y-axis 38 Origin 39 Floor 40 Microcomputer 41 Motor drive circuit 42 Operation part 43 CPU 44 Memory 50 Glass substrate exchange part 60 Reference tray 60 _-1 Tray 61 Surface 62 _{-1 to} 62 _-4 Seated glass substrate mounting portion 63 Back surface 64 Side 65 _-1 , 65 _-2 Counterbore hole 200 Reference position determination step 200 _-1 Point B, C position storage step 200 _-2 position pin mounting step 200 _-3 standard tray avoid is to process for issuing 200 _-4 the first robot body Step 200 obtains the deviation angle to the documentation operating movement step 200 _-5 The second robot arm manually operating step 200 _-6 point position step 200 _-7 reference tray sides of the robot body of the X-coordinate of calculating the B _-8 Adsorption pad installation process 201 Robot body movement amount determination process 201 _-1 D'position determination process 201 _-2 J, H determination process 202 Robot main body activation process 210 Positioning pin

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI technical display location B25J 13/08 A // B23Q 39/04 G

Claims (2)

[Claims] 1. A reference position obtaining step of obtaining a reference position which is a position of a reference tray which is a first tray with respect to a robot main body which moves a workpiece one after another and conveys it to a predetermined position on a stopped tray. For the trays from (1) to (3), the robot determines the deviation of each tray from the reference position of the reference tray, and the robot body calculates the operation amount necessary to convey the work to the predetermined position of each tray by the robot. The robot body movement amount obtaining step and the step of operating the robot body by the movement amount obtained in the robot body movement amount obtaining step, wherein the robot body conveys a work and each tray moves one after another. In the predetermined position, the step of obtaining the reference position, the step of holding the workpiece of the robot body, The operation of moving to a position corresponding to the quasi-position is performed a plurality of times by changing the position of the movable portion on the base side of the robot body, and based on the amount of movement of the portion holding the work at that time, the above calculation is performed. A work transfer positioning method characterized in that a reference position is obtained. 2. A reference position determination for determining a reference position which is a position of a reference tray which is a first tray with respect to an XYZθ Cartesian coordinate system robot main body which moves a work one after another and conveys it to a predetermined position on a stopped tray. For the process and subsequent trays, the deviation of each tray from the reference position of the reference tray is calculated, and the operation amount required for the robot body to convey the work to the predetermined position of each tray is determined. The robot main body motion amount obtaining step obtained by calculation and the step of operating the robot main body by the movement amount obtained in the robot main body movement amount obtaining step are carried out, and the robot main body conveys the work and moves one after another. The reference tray and the other trays have counterbore holes at two places on the back surface. When the above standard tray and other trays stop,
Providing two cameras for photographing the counterbore, the reference positioning step, a step of photographing the counterbore of the reference tray by the camera, and storing the position of the two counterbore, A first manual operation step of moving the work holding part of the robot body to two positions of the counterbore hole stored by the storing step, avoiding the reference tray; The movable part on the base side of the robot body is moved to a different position, and the position of the robot body for holding the workpiece is moved to two positions of the counterbore hole stored by the storing step. Based on the second manual operation operation step to be performed and the movement amount of the portion holding the work in the first and second manual operation operation steps,
Comprising a step of obtaining the reference position by calculation, the robot main body operation step, based on the information taken by the two cameras the counterbore hole of each tray, the deviation of each tray from the reference position of the reference tray A work transfer positioning method, characterized in that the robot body is configured to calculate an operation amount required to transfer a work to a predetermined position of each tray.