JP2019018330A - Apparatus and method for positioning glass substrate as well as processing machine of glass substrate - Google Patents

Abstract

To provide an apparatus and method for positioning a glass substrate as well as a processing machine of the glass substrate in which constantly stable and highly precise positioning can be made even when the glass substrate is fixed in the vertical direction.SOLUTION: A hand 15 of an apparatus for positioning a glass substrate supports the glass substrate 23 to a substrate support part 47, and brings the glass substrate 23 into the advancing/retracting movement by a substrate advancing/retracting drive unit 46. An arm member 65 provided with an abutting pedestal 69 at the tip is positioned such that an arm member 65 is vertically driven by a base drive unit 61 and the abutting pedestal 69 is abutted to the underside of the substrate support. The abutting pedestal 69 has an abutting surface, and the abutting surface is abutted to the underside of the substrate support in a face contact state.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a glass substrate positioning apparatus and positioning method, and a glass substrate processing machine.

  In general, a glass substrate is placed on a support table with the substrate surface horizontal, and is subjected to various processes such as cutting and polishing while being fixed to the support table by vacuum suction or the like. Examples of such a glass substrate processing machine are described in Patent Documents 1 and 2. The processing machine of Patent Document 1 fixes a glass substrate on a mounting table by means such as vacuum suction, and forms a scribe line (scribe) on the outer peripheral portion on one side of the glass substrate with a wheel-shaped cutter. And the glass substrate is cut | disconnected by the scribe line by pressing along a scribe line by pressing means, such as a press roller. In the processing machine of Patent Document 2, the glass substrate is placed on a support table substantially horizontally, and the outer peripheral end of the glass plate fixed in this state is polished using a polishing head.

International Publication No. 2003/040049 JP-A-2015-171752

Conventionally, processing of flat glass has been carried out by the processing machine as described above. In recent years, processing of large-sized thin glass with a large main surface size and a small thickness is required even for flat glass. Such a large thin glass is likely to be bent, and cannot be aligned as desired, resulting in frequent breakage.
Further, not only flat glass but also curved glass having a bent portion is required for various uses and is required to be processed into a desired shape. The glass substrate for obtaining the curved glass is formed with a bent portion in a predetermined shape in a predetermined direction, and a desired curved glass is obtained by positioning and processing the glass substrate in a predetermined state. However, although it has a bent portion, the desired alignment may not be possible because the glass itself is bent. When curved glass is obtained by processing in this state, there is a problem that it is displaced from a desired shape and cannot be incorporated into a final product.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a glass substrate positioning device and a glass substrate processing machine that can always perform stable and highly accurate positioning.

The present invention has the following configuration.
(1) An articulated robot, a hand attached to the tip axis of a robot arm of the articulated robot, and a substrate support stand protruding from a reference surface and fixed, and the glass substrate supported by the hand is used as the substrate A glass substrate positioning device for positioning on a substrate fixing surface of a support base,
The hand is
A substrate support part for detachably supporting the glass substrate;
A substrate advancing / retreating drive unit for moving the glass substrate supported by the substrate supporting unit in a direction perpendicular to the plate surface of the glass substrate;
An arm member extending out of the plane of the glass substrate supported by the substrate support;
A butting pedestal provided at the distal end of the extending direction of the arm member;
A base drive unit that drives the arm member and abuts the abutment base against a side surface of the substrate support base to position the base support base;
With
The abutment base has a flat abutment surface projecting from the arm member, and the abutment surface is abutted against the side surface of the substrate support base in a surface contact state. apparatus.
(2) An articulated robot, a hand attached to the tip axis of the robot arm of the articulated robot, and a substrate support base that protrudes and is fixed to the near side from the wall surface, and a glass substrate supported by the hand A glass substrate positioning device for positioning on a substrate fixing surface along a vertical direction of the substrate support,
The hand is
A substrate support part for detachably supporting the glass substrate;
A substrate advancing / retreating drive unit for moving the glass substrate supported by the substrate supporting unit in a direction perpendicular to the plate surface of the glass substrate;
An arm member extending below the glass substrate supported by the substrate support;
A butting pedestal provided at the distal end of the extending direction of the arm member;
A pedestal driving unit that drives the arm member in the vertical direction and abuts the butting base against the lower surface of the substrate supporting table to position the substrate supporting table;
With
The abutment base has a flat abutment surface protruding upward from the arm member, and the abutment surface is abutted against the lower side surface of the substrate support base in a surface contact state. Substrate positioning device.
(3) comprising a base plate attached to the tip axis of the robot arm;
The base plate is connected with a pair of flat plate portions inclined to each other, and one of the flat plate portions is arranged in the front direction by wrist drive of the articulated robot,
On the one flat plate portion, the hand of the glass substrate positioning device according to (1) or (2) is mounted,
A processing machine for a glass substrate, wherein a processing tool is mounted on the other flat plate portion.

  According to the present invention, stable and highly accurate positioning can always be performed.

It is a whole block diagram of the processing machine of a glass substrate provided with the positioning device of a glass substrate. It is a front view of the board | substrate support stand with which the glass substrate was supported. It is a side view of the board | substrate support stand shown to FIG. 2A. It is a principal part side view of a hand. It is a cross-sectional arrow line view of the P1-P1 line in the base part shown in FIG. It is a cross-sectional arrow line view of the P2-P2 line of the base part shown in FIG. It is a perspective view of a butting base. It is process explanatory drawing which shows the process of supporting the glass substrate supported by the hand on a board | substrate support stand in steps. It is process explanatory drawing which shows the process of supporting the glass substrate supported by the hand on a board | substrate support stand in steps. It is process explanatory drawing which shows the process of supporting the glass substrate supported by the hand on a board | substrate support stand in steps. It is process explanatory drawing which shows the process of supporting the glass substrate supported by the hand on a board | substrate support stand in steps. It is a partially expanded view which shows the state which the glass substrate landed on the butting base. It is process explanatory drawing which shows the process of supporting the glass substrate supported by the hand on a board | substrate support stand in steps. It is a partially expanded view which shows the state by which the glass substrate was pressed by the board | substrate support stand. It is a schematic front view which shows the positional relationship of a substrate support stand and a glass substrate. It is a schematic front view which shows the board | substrate support stand of the positioning device of the 2nd structural example. It is a schematic front view which shows the state which fixed the glass substrate to the board | substrate support stand shown to FIG. 15A. It is a schematic sectional drawing of the butting base of the positioning device of the 3rd example of composition. It is a schematic side view which shows the structure of the hand part in the processing machine of the glass substrate of a 4th structural example. It is a schematic side view which shows a mode that the wrist part shown in FIG. 17 was rotationally driven. It is a perspective view which shows the principal part structure of the hand which cut | disconnects a glass substrate.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is an overall configuration diagram of a glass substrate processing machine 200 including a glass substrate positioning device 100. In the present embodiment, the case where the main surface of the glass substrate is installed in the processing machine 200 so as to be in the vertical direction and the glass substrate is processed is exemplified, but the present invention is not limited thereto. For example, you may implement in the processing machine 200 so that the plate | board thickness direction of a glass substrate may turn into a perpendicular direction.
The glass substrate positioning apparatus 100 includes an articulated robot 11, a hand 15 attached to the tip shaft of the robot arm 13 of the articulated robot 11, and a substrate support 17. The substrate support base 17 is fixed to the scale 19 provided in the glass substrate processing machine 200.

  The glass substrate processing machine 200 includes the positioning device 100 having the above-described configuration, a work table 21 having the pallet 19 and a pallet (not shown), and a substrate stocker 25 that accommodates the glass substrate 23 supplied to the positioning device 100. Prepare.

  The multi-joint robot 11 is an industrial robot in which a plurality of robot arms are joined via joints, such as a general six-axis robot having six drive axes. A hand 15 is attached to the wrist 27 which is the tip axis of the robot arm.

  On a part of the main body of the work table 21, the scale 19 is arranged. The substrate support 17 fixed to the scale 19 is provided so as to protrude from the surface of the scale 19 toward the front side (the articulated robot 11 side), and a space is secured below the lower side surface 17a.

<Board support>
2A is a front view of the substrate support 17 on which the glass substrate 23 is supported, and FIG. 2B is a side view of the substrate support 17 shown in FIG. 2A.
The substrate support 17 is entirely made of a synthetic resin material such as PEEK (Poly Ether Ether Ketone) resin or ABS resin, and a suction groove 31 is formed on the front surface (substrate fixing surface 29). The inside of the suction groove 31 is connected to a pump 35 (see FIG. 1) through a suction hose 33. The glass substrate 23 is attracted to the substrate fixing surface 29 of the substrate support 17 by vacuum suction by driving the pump 35. When the glass substrate 23 is a bent glass having a bent portion, the substrate fixing surface 29 of the substrate support base 17 has a shape corresponding to the bent portion of the bent glass.

  On the substrate support 17, the glass substrate 23 supported by the hand 15 is positioned on a substrate fixing surface 29 along the vertical direction of the substrate support 17 as will be described in detail later.

<Configuration of the hand>
Next, the configuration of the hand 15 will be described.
FIG. 3 is a side view of the main part of the hand 15. Here, the right side in the figure is referred to as the front, the left side is referred to as the rear, the front-rear direction is defined as the Y direction, the vertical direction (herein, the vertical direction in the figure) is defined as the Z direction, To do.

  Each component of the hand 15 is attached to a base plate 43 that is fixed in front of a flange 41 connected to the wrist 27 of the robot arm.

  The base plate 43 is fixed with an advancing / retracting drive cylinder 46 composed of an air cylinder for moving the rod 45 back and forth. At the tip of the rod 45, a suction pad 47, which is a substrate support part for detachably supporting the glass substrate 23, is provided, and an air suction path (not shown) is connected to the suction pad 47.

  A front plate 49 is fixed in front of the base plate 43 by a post (not shown) standing on the base plate 43 at a predetermined interval. A cushioning material 51 such as rubber or sponge is provided on the front surface 49 a of the front plate 49. The buffer material 51 and the front plate 49 are formed with a through hole 53 penetrating them, and the rod 45 is inserted into the through hole 53. As a result, the suction pad 47 can advance and retreat to a position protruding from the front surface of the buffer material 51 from the inner position accommodated in the buffer material 51.

  A pair of slide rails 55 arranged along the vertical direction are fixed to the front plate 49 on both sides of the front plate 49 with the through-hole 53 interposed therebetween. Sliders 57 are supported on the slide rails 55 so as to be movable up and down. A fixing member 59 having an L-shaped cross section is fixed to the slider 57.

  Above the pair of sliders 57, lift drive cylinders 61 are respectively disposed. The main body of the lifting drive cylinder 61 is supported by the front plate 49, and the tip of the piston 63 is connected to the upper end portion 59 a of the fixing member 59 supported by the slider 57.

  Further, the base end portion 65 a of the arm member 65 is fixed to the fixing member 59. The arm member 65 is disposed below the front plate 49, that is, below the glass substrate 23 (shown by a dotted line in the figure) supported by the suction pad 47, and extends forward.

  A pedestal 67 is provided at the distal end 65b of the arm member 65 in the extending direction. The pedestal 67 is provided with an abutment pedestal 69 protruding upward from the extending direction front end 65b. The slider 57 is moved up and down along the slide rail 55 by driving the lifting drive cylinder 61, and the pedestal 67 of the arm member 65 integrated with the slider 57 is also moved up and down.

4 is a cross-sectional view taken along line P1-P1 in the pedestal portion 67 shown in FIG.
The butting base 69 is connected to the arm member 65 via the floating joint 71. The floating joint 71 has one end 71 a screwed into a screw hole 65 c formed in the arm member 65, and the other end 71 b screwed into a screw hole 69 a formed in the butting base 69. Support.

  The floating joint 71 has a structure that allows the inclination (inclination angle Δθ) of the axis L1 of the other end 71b by elasticity, and supports the abutment base 69 on the arm member 65 while absorbing the inclination of the abutment base 69. .

  Further, screw holes 69b and 69c are formed on both sides in the X direction of the floating joint 71 of the butting base 69, respectively. The shaft portions of stop pins 73 and 75 having a head portion and a shaft portion are screwed into the screw holes 69b and 69c, respectively.

  Compression springs 77 and 79 are arranged between the butting base 69 and the arm member 65 along the axial direction of the stop pins 73 and 75, respectively. The compression springs 77 and 79 urge the butting base 69 upward so as to correct the inclination angle Δθ of the butting base 69.

  Below one stop pin 73, a contact-type displacement sensor 81 fixed to the arm member 65 and in which the tip probe 81a abuts against the head of the stop pin 73 is disposed. One displacement sensor 81 is inserted into a through-hole 65 d formed in the arm member 65, and one displacement sensor 81 is arranged on one abutment base 69. That is, the displacement sensors 81 are respectively disposed on the pair of pedestal portions 67 that are separated in the X direction, and the pair of displacement sensors 81 detect the inclination of the pair of pedestal portions 67 in the ZX plane. The displacement sensor 81 may also be disposed below the stop pin 75. In that case, since there are a plurality of displacement sensors 81, the displacement detection accuracy of the butting base 69 is improved.

5 is a cross-sectional view taken along line P2-P2 of the pedestal 67 shown in FIG.
A plunger bolt 85 is fixed to a screw hole 65e formed in the arm member 65 at the rear of the floating joint 71, that is, on the left side in the drawing. The ball 85 a at the tip of the plunger bolt 85 is abutted against the lower surface of the abutment base 69.

  The plunger bolt 85 has a structure in which the tip ball 85a elastically expands and contracts in the axial direction, and functions as a support member that elastically supports the butting base 69 in the vertical direction. That is, the plunger bolt 85 suppresses the inclination of the butting base 69 supported by the floating joint 71 in the YZ plane. A counterbore may be provided on the lower surface of the abutment base 69 at a position where the ball 85a comes into contact. In that case, the displacement of the balls 85a is reduced, and the tilt suppression effect of the butting base 69 is not reduced.

FIG. 6 is a perspective view of the butting base 69.
The butting base 69 has a protruding portion 87 protruding upward in the front in the Y direction, and a flat substrate landing portion 89 in the rear in the Y direction.

  The protrusion 87 has a flat abutting surface 91 formed on the upper surface thereof. The outer peripheral edge of the abutting surface 91 has a chamfered portion with a corner portion cut out over the entire circumference. The chamfering part may be either C chamfering or R chamfering. The chamfered portion is preferably provided on the entire circumference of the outer peripheral edge. However, the chamfered portion may be provided only on both ends of the outer peripheral edge in the X direction or on both ends of the Y direction. In this configuration, chamfered portions are provided over the entire circumference of the outer peripheral edge, and the four corner portions 95 are formed with smooth convex curved surfaces.

<Glass substrate positioning procedure>
Next, a procedure for positioning the glass substrate 23 on the substrate support 17 using the hand 15 having the above configuration will be described.
A plurality of glass substrates 23 are accommodated in the substrate stocker 25 shown in FIG. 1, and are arranged on the substrate stocker 25 in a state where they can be taken out one by one.

<Holding of glass substrate>
7 to 13 are process explanatory views showing step by step the process of supporting the glass substrate 23 supported by the hand 15 on the substrate support base 17.
First, the hand 15 of the robot arm 13 is moved toward the substrate stocker 25 by driving the articulated robot 11, and a single glass substrate 23 is sucked to the suction pad 47 from the substrate stocker 25 as shown in FIG. 7. . The movement operation of the articulated robot 11 is programmed in advance by teaching. The multi-joint robot 11 moves the hand 15 to the target position along a specified movement path and a specified posture based on the teaching data.

<Moving glass substrate>
As shown in FIG. 8, the hand 15 holding the glass substrate 23 by suction is moved to a position facing the substrate fixing surface 29 of the substrate support 17 by driving the articulated robot 11. At this time, the raising / lowering drive cylinder 61 has the arm member 65 arranged at the lowest position.

<Abutting the butting base>
Next, the pedestal 67 of the hand 15 is moved to a position near the lower side of the substrate support 17 by driving the articulated robot 11. And the raising / lowering drive cylinder 61 is driven, and as shown in FIG. 9, the upper butting surface 91 of the butting base 69 is butted against the lower side surface 17 a of the substrate support 17. By this abutting operation, the abutment base 69 and the substrate support base 17 are positioned at a predetermined height position. The abutting operation may be performed once, but is preferably performed a plurality of times. By performing the abutting operation a plurality of times, the contact between the abutting surface 91 and the lower side surface 17a of the substrate support base 17 becomes familiar, and comes into contact with each other in a more uniform surface contact state.

<Transfer of glass substrate>
And as shown in FIG. 10, the vacuum suction of the suction pad 47 which supports the glass substrate 23 is cancelled | released, the advance / retreat drive cylinder 46 is driven, and the rod 45 is pulled back. Thereby, the glass substrate 23 supported by the suction pad 47 is detached from the suction pad 47. The glass substrate 23 falls due to gravity, and the lower edge 23 a is landed on the substrate landing portion 89 of the butting base 69 disposed below the glass substrate 23.

FIG. 11 is a partially enlarged view showing a state in which the glass substrate 23 has landed on the butting base 69.
The glass substrate 23 is supported by the butting pedestal 69 with the lower edge 23 a abutting against the substrate landing portion 89 of the butting pedestal 69. Further, the abutment base 69 abuts the abutment surface 91 against the lower surface 17 a of the substrate support base 17. The vertical distance V from the abutment surface 91 of the abutment pedestal 69 to the substrate landing portion 89 is set with high accuracy by machining the abutment pedestal 69. The vertical distance V is 10 mm to 2 mm, preferably 4 mm to 5 mm. In the case of 4 mm, the dimension is set with an accuracy of ± 0.02 mm. As a result, positioning can be performed with high accuracy, and a machining allowance in a subsequent process can be secured.

  Therefore, the glass substrate 23 is positioned with high accuracy at the position of the vertical distance V from the lower surface 17a of the substrate support 17.

<Fixing the glass substrate to the substrate support>
Next, the forward / backward drive cylinder 46 is driven from the state shown in FIG. 10 to push the rod 45 back forward, and the suction pad 47 is pressed against the glass substrate 23 as shown in FIG. Then, the glass substrate 23 is pressed against the substrate fixing surface 29 of the substrate support 17 by pressing from the suction pad 47. At this time, the lower edge 23 a of the glass substrate 23 remains in contact with the substrate landing portion 89 of the butting base 69.

FIG. 13 is a partially enlarged view showing a state in which the glass substrate 23 is pressed against the substrate support 17.
Then, in the state where the glass substrate 23 is pressed against the substrate fixing surface 29, the suction groove 31 of the substrate support base 17 is vacuum-sucked through the suction hose 33 by driving the pump 35 (see FIG. 1). Thereby, the glass substrate 23 is vacuum-sucked to the substrate fixing surface 29 and fixed to the substrate support 17 in a state of being positioned with high accuracy.

  When the glass substrate 23 is fixed to the substrate support 17, the hand 15 moves to the first retracted position.

<Positioning of glass substrate>
According to the above glass substrate positioning procedure, as shown in FIG. 14, the glass substrate is supported by the pair of butting bases 69 and then adsorbed to the substrate support base 17. The height positions of the lower edge portion 23a of the glass substrate 23 and the lower side surface 17a of the substrate support base 17 coincide with each other at both ends in the X direction of the butting base 69 and the glass substrate 23 (Ha = Hb). That is, the center line of the glass substrate 23 and the center line of the substrate support 17 are parallel or coincide with each other with a straight line Lc.

  The positioning of the glass substrate 23 described above can be realized when the butting base 69 is in surface contact with the substrate support base 17 without rattling. When the abutment base 69 abuts against the lower side surface 17a of the substrate support base 17, the abutment surface 91 of the projection 87 shown in FIG. 6 is not necessarily parallel to the lower side surface 17a, and may be inclined and contact each other. . In this state, a gap is generated between the abutting surface 91 and the lower surface 17a of the substrate support base 17, and high-precision positioning cannot be performed.

  Therefore, by repeatedly performing the abutting operation of the substrate support base 17, the floating joint 71 shown in FIG. 4 is inclined, and the abutment surface 91 of the abutment base 69 is moved along the lower side surface 17 a of the substrate support base 17. In contact with the surface. Further, since the protrusion 87 of the abutment base 69 has a chamfered outer peripheral edge 93, it is possible to avoid a one-contact state such that the corner of the protrusion 87 locally hits the substrate support base 17. Further, since the compression springs 77 and 79 urge the abutting base 69 upward, the chamfered portion of the protrusion 87 becomes a sliding surface and comes into close contact with the abutting base 69 side, and the abutting surface 91 and the lower surface are lowered. The side surface 17a is more stably maintained in the surface contact state.

  Further, the abutting surface 91 of the abutment base 69 and the lower side surface 17a of the substrate support base 17 are both processed into a flat surface with high accuracy. Therefore, the abutting surface 91 and the lower side surface 17a come into surface contact with each other, whereby the glass substrate 23 is automatically positioned on the substrate support base 17 with high accuracy.

  Further, the abutment pedestal 69 is supported by plunger bolts 85 arranged in a direction (Y direction) orthogonal to the arrangement direction (X direction) of the pair of abutment pedestals 69. For this reason, the abutment base 69 can be inclined in the YZ plane by abutment with the substrate support base 17.

  Therefore, according to the support form of the butting base 69 of this configuration, the posture changes in a state where both the ZX plane (rotation direction Ux) and the YZ plane (rotation direction Uy) shown in FIG. It is supported so that the abutting state with the substrate support 17 can be easily adapted. For this reason, even if the positioning is started with the hand 15 tilted obliquely, the tilt can be absorbed and the glass substrate 23 can be positioned accurately.

  Further, the output signals of the displacement sensors 81 provided on the pair of pedestals 67 are detected, and the abutting state of the abutment pedestal 69 against the substrate support base 17 is detected from the detected output signals of the respective displacement sensors 81. Also good. For example, it is detected from the output signals of the pair of displacement sensors 81 whether the abutting state is a surface contact state. And the raising / lowering drive cylinder 61 is driven until it will be in a surface contact state, and the abutment of the abutment base 69 to the board | substrate support stand 17 is repeated. Thereby, a more reliable surface contact state is obtained. Further, based on the output signal of the displacement sensor 81, the coordinate value in the subsequent processing of the glass substrate 23 may be corrected.

<Second configuration example>
Next, a second configuration example of the glass substrate positioning device will be described.
15A is a schematic front view showing the substrate support 17A of the positioning device of the second configuration example, and FIG. 15B is a schematic front view showing a state in which the glass substrate 23 is fixed to the substrate support 17A shown in FIG. 15A.

  The substrate support 17A of this configuration has a metal engaging member 97 having high rigidity and wear resistance such as a pair of stainless steel materials on the lower side surface 17a. The pair of engaging members 97 are respectively disposed at the abutting positions of the butting base 69. The engaging member 97 has a flat receiving groove bottom 97a that abuts against the abutting surface 91 of the abutting pedestal 69, and groove wall surfaces 97b formed on both sides of the receiving groove bottom 97a. The receiving groove bottom 97a is in surface contact with the abutting surface 91 of the abutting pedestal 69, and the height position of the lower edge 23a of the glass substrate 23 and the lower side surface 17Aa of the substrate supporting base 17A is determined as the substrate supporting base. 17A coincides with both ends of the glass substrate 23 in the X direction (Ha = Hb).

  Further, since the engaging member 97 is made of metal having high rigidity and wear resistance, even if the butting base 69 is repeatedly abutted, wear or chipping does not occur, and a stable abutting operation can always be realized.

<Third configuration example>
Next, a third configuration example of the glass substrate positioning device will be described.
FIG. 16 is a schematic cross-sectional view of the butting base 69A of the positioning device of the third configuration example.
The butting pedestal 69 </ b> A of this configuration has a notch 111 formed at the outer peripheral edge of the abutting surface 91 on the upper surface, and a screw hole 113 formed at the center of the abutting surface 91. A touch sensor 115 (touch switch manufactured by Metrol Co., Ltd.) is screwed into the screw hole 113 by causing the contact portion 115a to protrude outward from the screw hole 113.

  According to this abutment base 69A, when it abuts against the substrate support base 17, the contact portion 115a sinks into the screw hole 113, and the sensor is turned on. That is, the protrusion height of the contact portion 115a from the screw hole 113 is adjusted so that the sensor is turned on when the abutting surface 91 comes into surface contact with the substrate support base 17.

  According to this configuration, the surface contact state between the butting base 69 </ b> A and the substrate support base 17 can be easily detected by the touch sensor 115.

<Fourth configuration example>
Next, the configuration of the glass substrate processing machine on which the glass substrate positioning device of each configuration example described above is mounted will be described.
FIG. 17 is a schematic side view showing the configuration of the hand portion in the glass substrate processing machine 210 of the fourth configuration example.
A base plate 43 </ b> A is attached to the wrist portion 27 of the tip shaft of the robot arm 13 via a flange 41. In the base plate 43A, the first flat plate portion 121 and the second flat plate portion 123 are connected to each other so that either the first flat plate portion 121 or the second flat plate portion 123 is driven by driving the wrist portion 27 of the robot arm 13. Arranged as desired in the front direction. In the illustrated example, the above-described hand 15 is fixed to the first flat plate portion 121. In addition, the hand 16 having a processing tool for cutting the glass substrate along a cut line formed in advance is mounted on the second flat plate portion 123.

  The hands 15 and 16 of the present configuration are moved to a position where the axis L2 of the robot arm 13 is the front direction of the hand 15 and a position which is the front direction of the hand 16 as shown in FIG. Arranged selectively.

FIG. 19 is a perspective view showing a main configuration of the hand 16.
The hand 16 includes a pair of gripping pieces 125 for gripping the glass substrate described above, a gripping drive unit 127 that causes the pair of gripping pieces 125 to approach and separate from each other and that rotates around the axis L3, and a gripping drive unit 127. A table 129 to be mounted and a table driving unit 131 that moves the table 129 in the uniaxial direction are provided.

  The hand 16 grips the end portion of the glass substrate 23 supported by the substrate support 17 described above with a pair of gripping pieces 125 and cuts the glass substrate 23 by an operation such as pulling or rotating.

  According to the glass substrate processing machine 210 of this configuration, the positional relationship between the hands 15 and 16 is uniquely determined by the rotational drive of the wrist portion 27. Therefore, different operations of the positioning of the glass substrate 23 to the substrate support 17 shown in FIG. 1 and the cutting process of the positioned glass substrate 23 can be continuously performed.

  As described above, the present invention is not limited to the above-described embodiments, and those skilled in the art can make changes and applications based on combinations of the configurations of the embodiments, descriptions in the specification, and well-known techniques. This is also the scope of the present invention, and is included in the scope for which protection is sought.

  For example, the hand 16 described above can be used not only for cutting the glass substrate 23 but also for use in polishing the end surface of the glass substrate 23 by changing the processing tool.

  The abutment pedestal 69 has a curved surface shape in which the entire abutment pedestal 69 is convex upward, in addition to the chamfered portion of the outer peripheral edge being an R chamfer, a C chamfer, or a notch. May be. Further, the abutment base 69 may be configured by using a roller disposed so as to be in contact with the substrate support base 17.

  Furthermore, although the glass substrate 23 described above is a bent substrate, the bent form is not limited, and may be a curved surface having a single curvature radius, a curved surface having a plurality of curvature radii, or a flat plate. .

As described above, the following items are disclosed in this specification.
(1) An articulated robot, a hand attached to a tip axis of a robot arm of the articulated robot, and a substrate support stand protruding from a reference surface and fixed, and the glass substrate supported by the hand is used as the substrate A glass substrate positioning device for positioning on a substrate fixing surface of a support base,
The hand is
A substrate support part for detachably supporting the glass substrate;
A substrate advancing / retreating drive unit for moving the glass substrate supported by the substrate supporting unit in a direction perpendicular to the plate surface of the glass substrate;
An arm member extending out of the plane of the glass substrate supported by the substrate support;
A butting pedestal provided at the distal end of the extending direction of the arm member;
A base drive unit that drives the arm member and abuts the abutment base against a side surface of the substrate support base to position the base support base;
With
The abutment base has a flat abutment surface projecting from the arm member, and the abutment surface is abutted against the side surface of the substrate support base in a surface contact state. apparatus.
According to this glass substrate positioning device, the abutment base is abutted against the side surface of the substrate support base in a surface contact state, whereby the substrate support base and the abutment base are accurately positioned. As a result, the glass substrate supported by the substrate support part can be fixed in a state where the glass substrate is accurately positioned after the support by the substrate support part is released.
(2) An articulated robot, a hand attached to the tip axis of the robot arm of the articulated robot, and a substrate support base that protrudes and is fixed to the near side from the wall surface, and a glass substrate supported by the hand A glass substrate positioning device for positioning on a substrate fixing surface along a vertical direction of the substrate support,
The hand is
A substrate support part for detachably supporting the glass substrate;
A substrate advancing / retreating drive unit for moving the glass substrate supported by the substrate supporting unit in a direction perpendicular to the plate surface of the glass substrate;
An arm member extending below the glass substrate supported by the substrate support;
A butting pedestal provided at the distal end of the extending direction of the arm member;
A pedestal driving unit that drives the arm member in the vertical direction and abuts the butting base against the lower surface of the substrate supporting table to position the substrate supporting table;
With
The abutment base has a flat abutment surface protruding upward from the arm member, and the abutment surface is abutted against the lower side surface of the substrate support base in a surface contact state. Substrate positioning device.
According to this glass substrate positioning device, the abutment base is abutted against the lower surface of the substrate support base in a surface contact state, whereby the substrate support base and the abutment base are accurately positioned. As a result, the glass substrate supported by the substrate support part can be fixed in a state where the glass substrate is accurately positioned after the support by the substrate support part is released.

(3) The glass substrate positioning device according to (1) or (2), wherein the butting base is connected to the arm member via a floating joint.
According to this glass substrate positioning device, when the abutment base is abutted against the substrate support base, the abutment base can be tilted by the floating joint, so that the abutment base is independent of the abutment state with the substrate support base. And the substrate support can always be in surface contact.

(4) The glass substrate positioning device according to (3), wherein a compression spring that urges the butting base in the butting direction is disposed between the butting base and the arm member.
According to this glass substrate positioning device, the abutment base is urged by the substrate support base, so that the abutment base is surely aligned with the lower surface of the substrate support base. Therefore, the contact state between the butted base and the substrate support after the butting can be maintained in a surface contact state.

(5) Between the butting base and the arm member, a support member that is elastically expanded and contracted in the vertical direction is disposed apart from the floating joint in the advancing / retreating direction of the glass substrate (3) or The glass substrate positioning device according to (4).
According to this glass substrate positioning device, when the abutment base abuts against the substrate support base, the posture of the abutment base is stabilized by receiving a reaction force from the substrate support base in cooperation with the floating joint.

(6) The glass substrate positioning device according to any one of (1) to (5), wherein a pair of the arm members having the butting base is disposed on both sides of the substrate support portion in the horizontal direction.
According to this glass substrate positioning device, since the substrate supporting portion is positioned by the pair of butting bases, the inclination of the glass substrate with respect to the substrate supporting portion is suppressed.

(7) The glass substrate positioning device according to (6), wherein each of the pair of butting bases is provided with a displacement sensor that detects an inclination of the butting base.
According to the glass substrate positioning apparatus, the tilt state of the glass substrate with respect to the substrate support portion can be grasped from the tilt detection result of the butting base. Thereby, the quality of the contact state between the butting base and the substrate support portion can be easily determined.

(8) The positioning device for a glass substrate according to any one of (1) to (7), wherein the butting base is made of a resin material.
According to this glass substrate positioning device, the collision caused by the abutting operation can be reduced by the resin material, and the abutting operation sound can be suppressed.

(9) The glass substrate positioning device according to (8), wherein the abutment pedestal includes a substrate landing portion for landing the glass substrate released from the support by the substrate support portion.
According to this glass substrate positioning apparatus, even when the glass substrate is detached from the substrate support portion and the end surface of the glass substrate lands on the butting base, the glass substrate can be supported without being damaged.

(10) The glass substrate positioning device according to any one of (1) to (9), wherein the substrate support includes a suction mechanism that holds the glass substrate by vacuum suction.
According to this glass substrate positioning device, the glass substrate can be easily and reliably attached and detached by vacuum suction.

(11) The glass substrate positioning device according to any one of (1) to (10), wherein the glass substrate is a bent substrate having a bent portion at least in part.
This glass substrate positioning apparatus can fix a bent substrate, which is difficult to handle, to a substrate support in a state where the substrate is accurately positioned.

(12) The glass substrate positioning device according to (11), wherein the substrate support has a substrate mounting surface along a surface shape of the bent substrate.
According to this glass substrate positioning device, since the substrate mounting surface is formed according to the surface shape of the bent substrate, the bent substrate can be stably fixed.

(13) The glass substrate according to any one of (1) to (12), wherein the substrate support has an engaging member that engages with the butting base on a surface against which the butting base is abutted. Positioning device.
According to this glass substrate positioning device, the butting base is engaged with the engaging member, so that the positioning accuracy is further improved.

(14) The glass substrate positioning device according to (13), wherein the substrate support base is made of a resin material, and the engagement member is made of a steel material.
According to this glass substrate positioning device, the abutment base abuts against the engaging member made of steel, so that damage such as wear and chipping due to the abutment of the substrate support base hardly occurs, and the durability of the substrate support base is improved. Can be improved.

(15) comprising a base plate attached to the tip shaft of the robot arm;
The base plate is connected with a pair of flat plate portions inclined to each other, and one of the flat plate portions is arranged in the front direction by wrist drive of the articulated robot,
One of the flat plate portions is mounted with the hand of the glass substrate positioning device according to any one of (1) to (14),
A processing machine for a glass substrate, wherein a processing tool is mounted on the other flat plate portion.
According to this glass substrate processing machine, positioning of the glass substrate by a hand mounted on one flat plate portion and processing of the glass substrate by a processing tool mounted on the other flat plate portion are performed by wrist drive of an articulated robot. Can be carried out continuously. Thereby, the processing tool can be positioned easily and with high accuracy.

(16) A cut line is formed in the glass substrate,
The said processing tool is a glass substrate processing machine as described in (15) which hold | grips a part of said glass substrate and cut | disconnects the said glass substrate with the said cut line.
According to this glass substrate processing machine, the glass substrate fixed to the substrate support portion can be cut following positioning, the processing process can be simplified, and the tact time can be shortened.

DESCRIPTION OF SYMBOLS 11 Articulated robot 13 Robot arm 15,16 Hand 17, 17A Substrate support stand 17a Lower side 23 Glass substrate 23a Lower edge 27 Wrist part 29 Substrate fixed surface 31 Suction groove (adsorption mechanism)
43 Base plate 45 Rod (substrate advance / retreat drive)
46 Advancing / retracting drive cylinder
47 Suction pad (substrate support)
61 Lifting drive cylinder (pedestal drive)
65 Arm member 65b Extension direction front-end | tip part 67 Base part 69 Butting base 71 Floating joint 77,79 Compression spring 81 Displacement sensor 85 Plunger bolt (support member)
89 substrate landing portion 91 abutting surface 93 outer peripheral edge 97 engaging member 100 glass substrate positioning device 121 first flat plate portion (flat plate portion)
123 2nd flat plate part (flat plate part)
200 Glass substrate processing machine

Claims (16)

An articulated robot, a hand attached to a tip axis of the robot arm of the articulated robot, and a substrate support fixed to protrude from a reference plane, and a glass substrate supported by the hand is attached to the substrate support A glass substrate positioning device for positioning on a substrate fixing surface,
The hand is
A substrate support part for detachably supporting the glass substrate;
A substrate advancing / retreating drive unit for moving the glass substrate supported by the substrate supporting unit in a direction perpendicular to the plate surface of the glass substrate;
An arm member extending out of the plane of the glass substrate supported by the substrate support;
A butting pedestal provided at the distal end of the extending direction of the arm member;
A base drive unit that drives the arm member and abuts the abutment base against a side surface of the substrate support base to position the base support base;
With
The abutment base has a flat abutment surface projecting from the arm member, and the abutment surface is abutted against the side surface of the substrate support base in a surface contact state. apparatus. An articulated robot; a hand attached to a tip axis of a robot arm of the articulated robot; and a substrate support base that protrudes and is fixed to the front side from the wall surface, and supports the glass substrate supported by the hand. A glass substrate positioning device for positioning on a substrate fixing surface along a vertical direction of a table,
The hand is
A substrate support part for detachably supporting the glass substrate;
A substrate advancing / retreating drive unit for moving the glass substrate supported by the substrate supporting unit in a direction perpendicular to the plate surface of the glass substrate;
An arm member extending below the glass substrate supported by the substrate support;
A butting pedestal provided at the distal end of the extending direction of the arm member;
A pedestal driving unit that drives the arm member in the vertical direction and abuts the butting base against the lower surface of the substrate supporting table to position the substrate supporting table;
With
The abutment base has a flat abutment surface protruding upward from the arm member, and the abutment surface is abutted against the lower side surface of the substrate support base in a surface contact state. Substrate positioning device.   The glass substrate positioning device according to claim 1, wherein the butting base is connected to the arm member via a floating joint.   The glass substrate positioning device according to claim 3, wherein a compression spring that urges the butting base in the butting direction is disposed between the butting base and the arm member.   The support member which is spaced apart in the advancing / retreating movement direction of the glass substrate from the floating joint and elastically expands and contracts in the vertical direction is disposed between the butting base and the arm member. 4. A glass substrate positioning apparatus according to 1.   6. The glass substrate positioning device according to claim 1, wherein a pair of the arm members having the butting base is disposed on both sides of the substrate support portion in the horizontal direction.   The glass substrate positioning device according to claim 6, wherein each of the pair of butting bases is provided with a displacement sensor that detects an inclination of the butting base.   The glass substrate positioning device according to claim 1, wherein the butting base is made of a resin material.   The glass substrate positioning device according to claim 7, wherein the butting base has a substrate landing portion for landing the glass substrate released from the support by the substrate support portion.   The said board | substrate support stand is equipped with the adsorption | suction mechanism which adsorbs and holds the said glass substrate by vacuum adsorption, The positioning apparatus of the glass substrate of any one of Claims 1-9.   The said glass substrate is a bending substrate which has a bending part in at least one part, The positioning device of the glass substrate of any one of Claims 1-10.   The glass substrate positioning device according to claim 11, wherein the substrate support has a substrate mounting surface along a surface shape of the bent substrate.   The glass substrate positioning device according to any one of claims 1 to 12, wherein the substrate support has an engaging member that engages with the butting table on a surface against which the butting table is abutted. .   The glass substrate positioning device according to claim 13, wherein the substrate support base is made of a resin material, and the engagement member is made of a steel material. A base plate attached to the tip axis of the robot arm;
The base plate is connected with a pair of flat plate portions inclined to each other, and one of the flat plate portions is arranged in the front direction by wrist drive of the articulated robot,
The hand of the glass substrate positioning device according to any one of claims 1 to 14 is mounted on one of the flat plate portions,
A processing machine for a glass substrate, wherein a processing tool is mounted on the other flat plate portion. A cut line is formed in the glass substrate,
The said processing tool is a glass substrate processing machine of Claim 15 which hold | grips a part of said glass substrate and cut | disconnects the said glass substrate with the said cut line.

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