CN105345830A - Sucker type manipulator - Google Patents

Sucker type manipulator Download PDF

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Publication number
CN105345830A
CN105345830A CN201510933537.8A CN201510933537A CN105345830A CN 105345830 A CN105345830 A CN 105345830A CN 201510933537 A CN201510933537 A CN 201510933537A CN 105345830 A CN105345830 A CN 105345830A
Authority
CN
China
Prior art keywords
sleeve
pick
block
arm
sliding axle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201510933537.8A
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Chinese (zh)
Other versions
CN105345830B (en
Inventor
严利人
张伟
刘志弘
周伟
王全
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tsinghua University
Shanghai Integrated Circuit Research and Development Center Co Ltd
Original Assignee
Tsinghua University
Shanghai Integrated Circuit Research and Development Center Co Ltd
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Publication date
Application filed by Tsinghua University, Shanghai Integrated Circuit Research and Development Center Co Ltd filed Critical Tsinghua University
Priority to CN201510933537.8A priority Critical patent/CN105345830B/en
Publication of CN105345830A publication Critical patent/CN105345830A/en
Application granted granted Critical
Publication of CN105345830B publication Critical patent/CN105345830B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/06Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/0625Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum provided with a valve

Abstract

The invention discloses a sucker type manipulator. The problems that sucker type manipulators in the prior art are inaccurate in positioning and prone to damage workpieces are mainly solved. According to the technical scheme, the sucker type manipulator comprises a pick-up device and a pick-up arm. The pick-up device comprises a vacuum chuck, a vacuum pipe which is communicated with the vacuum chuck and a sliding shaft of which the lower end is connected with the upper surface of the vacuum chuck. A soft liner is disposed on the lower surface of the vacuum chuck; an upper limiting block is disposed at the upper end of the sliding shaft; a lower limiting block is disposed at the lower end of the sliding shaft; a sleeve is arranged at one end of the pick-up arm; the sliding shaft is arranged in the sleeve; the distance between the upper limiting block and the lower limiting block is larger than the length of the sleeve; the sleeve is disposed between the upper limiting block and the lower limiting block; when the forced directions of the sliding shaft and the sleeve are opposite, the sliding shaft slides in the sleeve. By means of the sucker type manipulator, the equipment cost can be reduced, and the damages to the workpieces are avoided.

Description

Sucking disc type mechanical hand
Technical field
The present invention relates to a kind of sucking disc type mechanical hand, especially relate to a kind of sucking disc type mechanical hand picking and placeing fragile workpiece.
Background technology
Sucking disc type mechanical hand is one of manipulator commonly used during machining and semiconductor crystal wafer are processed, sucking disc type mechanical hand under prior art is often because positioning precision causes workpiece damage not, especially when carrying out the process of friable material, often because positioning precision is inadequate, when causing sucker with absorption surface, driving mechanism still in the motion of driving sucker, causes excessive to the pressure of workpiece or impacts excessive, thus causing the damage of workpiece.In order to avoid the damage of workpiece under prior art, often adopt more high-precision sensor to position manipulator, but more high-precision sensor also just mean higher price, causes the raising of equipment cost.
Summary of the invention
For the problems referred to above, the invention provides a kind of sucking disc type mechanical hand, avoid the destruction of causing workpiece in the course of the work.
For achieving the above object, the present invention includes pick device and pick-up arm; The vacuum tube that described pick device comprises vacuum cup, be communicated with described vacuum cup and the sliding axle that lower end is connected with described vacuum cup upper surface, wherein, described vacuum cup lower surface is provided with flexible liner, the upper end of described sliding axle is provided with upper limit position block, and the lower end of described sliding axle is provided with lower position block; Described pick-up arm one end is provided with sleeve, and described sliding axle is arranged in described sleeve, and the distance between described upper limit position block and described lower position block is greater than the length of described sleeve, and it is between block and described lower position block that described sleeve is arranged on the described upper limit; When described sliding axle is contrary with described sleeve Impact direction, described sliding axle slides in described sleeve.
Further, also comprise the slide block be connected with the described pick-up arm other end, the slide rail forming sliding pair with described slide block, coordinate the leading screw forming ball screw assembly, the turntable driving the drive unit of described screw turns and be connected with described leading screw and described slide rail bottom with described slide block, wherein, described leading screw and slide rail are all vertically arranged.
Further, described pick-up arm comprises robotic segments and sleeve sections; Described robotic segments and sleeve sections hinged, jointed shaft is horizontally disposed with, and the upper side and lower side of described jointed shaft is provided with spring, and described both ends of the spring is connected with robotic segments and sleeve sections respectively.
Further, described sliding axle center is provided with through hole, and described vacuum tube is communicated with described sucker through described through hole.
Further, ball bearing is provided with between described sleeve and described sliding axle.
Further, described lower position block is provided with the displacement transducer of induction sleeve distance.
Can relative motion be there is between the pick device of sucking disc type mechanical hand of the present invention and pick-up arm, can by relative motion between the two when picking and placeing workpiece, avoid workpiece owing to bearing excessive pressure or impulsive force and damaged; Sucking disc type mechanical hand of the present invention, owing to can there is relative motion between pick-up arm and pick device, therefore, does not need high-precision positioner, can reduce the cost of equipment.
Accompanying drawing explanation
Fig. 1 is the structural representation of sucking disc type mechanical hand of the present invention;
Fig. 2 is the structural representation that sucking disc type mechanical hand of the present invention is connected with lowering or hoisting gear and turntable;
Fig. 3 is the transmittance process of workpiece after sucking disc type mechanical hand complete operation of the present invention.
Detailed description of the invention
Below in conjunction with Figure of description, the present invention will be further described.
Embodiment 1
As shown in Figure 1, the sucking disc type mechanical hand of the present embodiment comprises pick device and pick-up arm 13; The vacuum tube 4 that described pick device comprises vacuum cup 3, be communicated with described vacuum cup 3 and the sliding axle 1 that lower end is connected with described vacuum cup 3 upper surface, wherein, described vacuum cup 3 lower surface is provided with flexible liner, the upper end of described sliding axle 1 is provided with upper limit position block 10, and the lower end of described sliding axle 1 is provided with lower position block 9; Described pick-up arm 13 one end is provided with sleeve 2, described sliding axle 1 is arranged in described sleeve 2, distance between described upper limit position block 10 and described lower position block 9 is greater than the length of described sleeve 2, and it is between block and described lower position block 9 that described sleeve 2 is arranged on the described upper limit; When described sliding axle 1 is contrary with described sleeve 2 Impact direction, described sliding axle 1 slides in described sleeve 2.
The sucking disc type mechanical hand of the present embodiment is when getting workpiece, sucker declines, and after touching workpiece, pick-up arm 13 still can have continuation to a certain degree to decline, but by the relative motion up and down in sucking disc type mechanical hand structure between pick device and pick-up arm 13, pick device can not continue to decline.Now open sucker vacuum and hold workpiece, sucking disc type mechanical hand rises and workpiece is sent to destination.Knock off part time, sucker declines, and after workpiece touches work stage, pick-up arm 13 still can have continuation to a certain degree to decline, but by the relative motion up and down in robot manipulator structure between pick device and pick-up arm 13, workpiece can not be subject to continuing downward power.Now close sucker vacuum and exit, pick-up arm 13 rises, and makes sucker leave workpiece.Owing to having upper and lower relative motion between pick device and pick-up arm 13, making pick-up arm 13 not need when picking and placeing workpiece to locate very accurately, eliminating high-precision sensor, greatly reducing cost; And the relative motion up and down between pick device and pick-up arm 13 releases the strength that pick-up arm 13 continues to act on when declining on workpiece, play cushioning effect, reduce the broken probability of fragile workpiece.
Embodiment 2
On the basis of embodiment 1, described pick-up arm 13 comprises robotic segments 8 and sleeve sections 5; Described robotic segments 8 and sleeve sections 5 hinged, jointed shaft 6 is horizontally disposed with, and the upper side and lower side of described jointed shaft 6 is provided with spring 7, and described spring 7 two ends are connected with robotic segments 8 and sleeve sections 5 respectively.Described sleeve sections 5 is connected by rotating shaft and spring 7 with robotic segments 8, make sleeve sections 5 and robotic segments 8 can produce certain angle, because the angle of pick device and sleeve sections 5 synchronously changes, the angle of pick device can be made to change, to adapt to the physical location of workpiece and work stage plane so arrange in this.Owing to using spring 7 pairs of two ends to strain, the angle of sucker can be made when pick device is stressed to change automatically, thus adapt to the workpiece pickup of various angle.
Embodiment 3
As Figure 2-3, the sucking disc type mechanical hand of the present embodiment is except the structure comprising above-described embodiment, also comprise the slide block 15 be connected with described pick-up arm 13 other end, the slide rail 18 forming sliding pair with described slide block 15, the turntable 17 that coordinates the leading screw 14 forming ball screw assembly, the drive unit 16 driving described leading screw 14 to rotate with described slide block 15 and be connected with described leading screw 14 and described slide rail 18 bottom, wherein, described leading screw 14 and slide rail 18 are all vertically arranged.Described lower position block is provided with the displacement transducer of induction sleeve distance.
In the laser annealing technique processed with semiconductor crystal wafer 12, the concrete implementation step of workflow to the present embodiment of the present embodiment sucking disc type mechanical hand is described:
Entry/exit sheet platform 19 is positioned at entry/exit sheet position below, the film magazine 20 that enters that semiconductor crystal wafer 12 to be processed is housed declines, stop declining when nethermost semiconductor crystal wafer 12 touches and passes sheet belt, under the drive passing sheet belt, nethermost semiconductor crystal wafer 12 is reached on entry/exit sheet platform 19; The vacuum opening entry/exit sheet platform 19 makes semiconductor crystal wafer 12 be attracted on entry/exit sheet platform 19.
Entry/exit sheet platform 19 rises to the height of processing sheet platform 11.
Pick-up arm 13 rises along slide rail 18, makes pick device higher than entry/exit sheet platform 19; Then electric rotating platform rotates to an angle with pick device and pick-up arm 13, makes sucker be positioned at the top of entry/exit sheet platform 19; Now the upper end of sleeve 2 contacts with upper limit position block 10, has certain activity space between sleeve 2 and lower position block 9.
Pick-up arm 13 declines along slide rail 18, after sucker touches semiconductor crystal wafer 12, owing to having certain activity space between sleeve 2 and lower position block 9, even if pick-up arm 13 slightly just stops after time delay declining, as long as pick-up arm 13 stops declining before sleeve 2 touches lower position block 9, sucker just can be made can to touch semiconductor crystal wafer 12, do not have again excessive masterpiece and be used in and semiconductor crystal wafer 12 cause semiconductor crystal wafer 12 broken.Meanwhile, lower position block 9 arranges displacement transducer, is used for measuring the relative displacement between sleeve 2 and lower position block 9, thus avoid sleeve 2 contact lower position block 9 after continue to decline, cause semiconductor crystal wafer 12 broken.
Close the vacuum of entry/exit sheet platform 19, open the sucker vacuum of sucking disc type mechanical hand, semiconductor crystal wafer 12 is attracted on the sucker of sucking disc type mechanical hand.
Pick-up arm 13 rises along slide rail 18, and semiconductor crystal wafer 12 leaves entry/exit sheet platform 19, and electric rotating platform revolves turnback with pick-up arm 13 and pick device, makes semiconductor crystal wafer 12 be in the top of machine table 11.Now the upper end of sleeve 2 contacts with upper limit position block 10, has certain activity space between sleeve 2 and lower position block 9.
Pick-up arm 13 declines along slide rail 18, after semiconductor crystal wafer 12 touches processing sheet platform 11, as long as stopped the decline of pick-up arm 13 before sleeve 2 touches lower position block 9, semiconductor crystal wafer 12 just can be made can to touch processing sheet platform 11, do not have again excessive masterpiece and be used on semiconductor crystal wafer 12 and cause semiconductor crystal wafer 12 broken.Close sucker vacuum, open processing sheet platform 11 vacuum, semiconductor crystal wafer 12 is attracted on processing sheet platform 11.
Pick-up arm 13 disengages along rise certain distance and semiconductor crystal wafer 12 of slide rail 18; Electric rotary table 17 revolves turnback with pick-up arm 13 and pick device, makes sucker leave processing sheet platform 11; Semiconductor crystal wafer 12 accepts laser scanning at processing sheet platform 11, completes laser annealing.
Electric rotary table 17 revolves turnback with pick device and pick-up arm 13, makes sucking disc type mechanical hand be positioned at above processing sheet platform 11; Pick-up arm 13 declines along slide rail 18, and after vacuum cup 3 touches semiconductor crystal wafer 12, pick-up arm 13 stops declining; Open the sucker vacuum of sucking disc type mechanical hand, hold semiconductor crystal wafer 12.
Pick-up arm 13 to rise certain distance along slide rail 18, and electric rotary table 17 revolves turnback with pick-up arm 13 and pick device, makes semiconductor crystal wafer 12 be positioned at the top of entry/exit sheet platform 19; Pick-up arm 13 declines along slide rail 18, and after semiconductor crystal wafer 12 touches entry/exit sheet platform 19, pick-up arm 13 stops declining; Close the vacuum of sucker, open the vacuum of entry/exit sheet platform 19, semiconductor crystal wafer 12 is attracted on entry/exit sheet platform 19.
Leaf outlet box 21 rises certain distance, is ready to receive semiconductor crystal wafer 12; Entry/exit sheet platform 19 drops to entry/exit sheet position, and semiconductor crystal wafer 12 is sent to leaf outlet box 21 by feed belt.
Above; be only preferred embodiment of the present invention, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, the protection domain that protection scope of the present invention should define with claim is as the criterion.

Claims (6)

1. a sucking disc type mechanical hand, is characterized in that: comprise pick device and pick-up arm; The vacuum tube that described pick device comprises vacuum cup, be communicated with described vacuum cup and the sliding axle that lower end is connected with described vacuum cup upper surface, wherein, described vacuum cup lower surface is provided with flexible liner, the upper end of described sliding axle is provided with upper limit position block, and the lower end of described sliding axle is provided with lower position block; Described pick-up arm one end is provided with sleeve, and described sliding axle is arranged in described sleeve, and the distance between described upper limit position block and described lower position block is greater than the length of described sleeve, and it is between block and described lower position block that described sleeve is arranged on the described upper limit; When described sliding axle is contrary with described sleeve Impact direction, described sliding axle slides in described sleeve.
2. sucking disc type mechanical hand as claimed in claim 1, it is characterized in that: also comprise the slide block be connected with the described pick-up arm other end, the slide rail forming sliding pair with described slide block, coordinate the leading screw forming ball screw assembly, the turntable driving the drive unit of described screw turns and be connected with described leading screw and described slide rail bottom with described slide block, wherein, described leading screw and slide rail are all vertically arranged.
3. sucking disc type mechanical hand as claimed in claim 1, is characterized in that: described pick-up arm comprises robotic segments and sleeve sections; Described robotic segments and sleeve sections hinged, jointed shaft is horizontally disposed with, and the upper side and lower side of described jointed shaft is provided with spring, and described both ends of the spring is connected with robotic segments and sleeve sections respectively.
4. sucking disc type mechanical hand as claimed in claim 1, is characterized in that: described sliding axle center is provided with through hole, and described vacuum tube is communicated with described sucker through described through hole.
5. sucking disc type mechanical hand as claimed in claim 1, is characterized in that: be provided with ball bearing between described sleeve and described sliding axle.
6. sucking disc type mechanical hand as claimed in claim 1, is characterized in that: described lower position block is provided with the displacement transducer of induction sleeve distance.
CN201510933537.8A 2015-12-15 2015-12-15 Sucking disc type mechanical hand Active CN105345830B (en)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510933537.8A CN105345830B (en) 2015-12-15 2015-12-15 Sucking disc type mechanical hand

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CN105345830A true CN105345830A (en) 2016-02-24
CN105345830B CN105345830B (en) 2018-04-10

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108098816A (en) * 2017-12-20 2018-06-01 重庆同朋科技有限公司 A kind of excavator stone clamp device
CN108962554A (en) * 2018-07-17 2018-12-07 马可文 A method of improving transformer service life
CN110963307A (en) * 2018-09-28 2020-04-07 捷普电子(广州)有限公司 Fixing module

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5193776A (en) * 1990-10-05 1993-03-16 Smc Kabushiki Kaisha Mechanism for locking angular movement of suction pad
CN1500710A (en) * 2002-09-04 2004-06-02 株式会社迪思科 Plate delivery device and slot limiting part
CN1882425A (en) * 2003-11-21 2006-12-20 三星钻石工业股份有限公司 Vacuum suction head, and vacuum suction device and table using the same
WO2007108343A1 (en) * 2006-03-20 2007-09-27 Honda Motor Co., Ltd. Suction apparatus and suction method using such suction apparatus
CN103419200A (en) * 2013-07-23 2013-12-04 大连理工大学 Artificial muscle elastic joint driving device of robot
CN103753523A (en) * 2013-12-20 2014-04-30 江苏大学 Thermoformed loading and unloading mechanical arm
CN203853744U (en) * 2014-04-21 2014-10-01 广东五星太阳能股份有限公司 Middle-convex-type transparent cover plate grabbing and moving assembly mechanism
CN104626101A (en) * 2014-12-12 2015-05-20 哈尔滨工业大学 Robot three-dimensional space gravity balance compensation device and method

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5193776A (en) * 1990-10-05 1993-03-16 Smc Kabushiki Kaisha Mechanism for locking angular movement of suction pad
CN1500710A (en) * 2002-09-04 2004-06-02 株式会社迪思科 Plate delivery device and slot limiting part
CN1882425A (en) * 2003-11-21 2006-12-20 三星钻石工业股份有限公司 Vacuum suction head, and vacuum suction device and table using the same
WO2007108343A1 (en) * 2006-03-20 2007-09-27 Honda Motor Co., Ltd. Suction apparatus and suction method using such suction apparatus
CN103419200A (en) * 2013-07-23 2013-12-04 大连理工大学 Artificial muscle elastic joint driving device of robot
CN103753523A (en) * 2013-12-20 2014-04-30 江苏大学 Thermoformed loading and unloading mechanical arm
CN203853744U (en) * 2014-04-21 2014-10-01 广东五星太阳能股份有限公司 Middle-convex-type transparent cover plate grabbing and moving assembly mechanism
CN104626101A (en) * 2014-12-12 2015-05-20 哈尔滨工业大学 Robot three-dimensional space gravity balance compensation device and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108098816A (en) * 2017-12-20 2018-06-01 重庆同朋科技有限公司 A kind of excavator stone clamp device
CN108962554A (en) * 2018-07-17 2018-12-07 马可文 A method of improving transformer service life
CN108962554B (en) * 2018-07-17 2019-10-08 陈幸 A method of improving transformer service life
CN110963307A (en) * 2018-09-28 2020-04-07 捷普电子(广州)有限公司 Fixing module

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