JPH085555Y2 - ウェ−ハ移載機 - Google Patents

ウェ−ハ移載機

Info

Publication number
JPH085555Y2
JPH085555Y2 JP13052487U JP13052487U JPH085555Y2 JP H085555 Y2 JPH085555 Y2 JP H085555Y2 JP 13052487 U JP13052487 U JP 13052487U JP 13052487 U JP13052487 U JP 13052487U JP H085555 Y2 JPH085555 Y2 JP H085555Y2
Authority
JP
Japan
Prior art keywords
wafer
wafer suction
wafers
base
suction plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP13052487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6435746U (enrdf_load_stackoverflow
Inventor
利一 狩野
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP13052487U priority Critical patent/JPH085555Y2/ja
Publication of JPS6435746U publication Critical patent/JPS6435746U/ja
Application granted granted Critical
Publication of JPH085555Y2 publication Critical patent/JPH085555Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13052487U 1987-08-26 1987-08-26 ウェ−ハ移載機 Expired - Lifetime JPH085555Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13052487U JPH085555Y2 (ja) 1987-08-26 1987-08-26 ウェ−ハ移載機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13052487U JPH085555Y2 (ja) 1987-08-26 1987-08-26 ウェ−ハ移載機

Publications (2)

Publication Number Publication Date
JPS6435746U JPS6435746U (enrdf_load_stackoverflow) 1989-03-03
JPH085555Y2 true JPH085555Y2 (ja) 1996-02-14

Family

ID=31385767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13052487U Expired - Lifetime JPH085555Y2 (ja) 1987-08-26 1987-08-26 ウェ−ハ移載機

Country Status (1)

Country Link
JP (1) JPH085555Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112635377A (zh) * 2020-12-25 2021-04-09 上海广川科技有限公司 一种等间距调节模组
CN113977613A (zh) * 2021-08-30 2022-01-28 上海广川科技有限公司 利用带传动结构实现多层等间距可变的晶圆搬送机械手结构

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3069575B2 (ja) * 1990-03-09 2000-07-24 東京エレクトロン株式会社 縦型熱処理装置
JP2564708Y2 (ja) * 1991-09-20 1998-03-09 東京応化工業株式会社 ウェハーの移載装置
CN116031184A (zh) * 2021-10-25 2023-04-28 大立钰科技有限公司 晶圆存取总成及其晶圆存取装置与晶圆载具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112635377A (zh) * 2020-12-25 2021-04-09 上海广川科技有限公司 一种等间距调节模组
CN113977613A (zh) * 2021-08-30 2022-01-28 上海广川科技有限公司 利用带传动结构实现多层等间距可变的晶圆搬送机械手结构

Also Published As

Publication number Publication date
JPS6435746U (enrdf_load_stackoverflow) 1989-03-03

Similar Documents

Publication Publication Date Title
TWI798440B (zh) 適用以在電子裝置製造中運輸多個基板的多葉片機器人設備和電子裝置製造設備
US12306537B2 (en) Coating and development equipment
TWI388028B (zh) 調整先入先出之緩衝系統
CN2720781Y (zh) 芯片载入埠的搬运装置
CN113113340B (zh) 半导体设备的机械手
CN113394158A (zh) —种单臂三自由度的晶圆传输机械手及使用方法
TW201526146A (zh) 片盒定位裝置以及半導體加工裝置
JPH085555Y2 (ja) ウェ−ハ移載機
JP2804730B2 (ja) 多重基板伝達装置
CN1301833C (zh) 传输装置
CN113445015A (zh) 一种集成镀膜设备的样品传输装置
JP7514355B1 (ja) 半導体製造工程のウエハー移載装置及びウエハー移載方法
JP3138554B2 (ja) ウエハ支持装置
CN112635377A (zh) 一种等间距调节模组
CN211320066U (zh) 晶圆转移装置
JP2825616B2 (ja) 板状体搬送装置
CN215433709U (zh) 一种新型晶圆搬运用机械手
JPH11163096A (ja) 基板移載機のピッチ可変機構
CN221427693U (zh) 一种晶圆输送装置
JP7191564B2 (ja) 産業用ロボット
JPH0685408B2 (ja) ウエハ−ロ−ディング装置
CN222507585U (zh) 一种晶圆双臂搬运装置
CN220604634U (zh) 一种单手臂双片叉交换机构
JPH0982780A (ja) 基板搬送装置
JP3488393B2 (ja) 多関節ロボット装置