JPS6435746U - - Google Patents

Info

Publication number
JPS6435746U
JPS6435746U JP13052487U JP13052487U JPS6435746U JP S6435746 U JPS6435746 U JP S6435746U JP 13052487 U JP13052487 U JP 13052487U JP 13052487 U JP13052487 U JP 13052487U JP S6435746 U JPS6435746 U JP S6435746U
Authority
JP
Japan
Prior art keywords
wafer
suction plates
ball screws
wafer suction
transfer machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13052487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH085555Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13052487U priority Critical patent/JPH085555Y2/ja
Publication of JPS6435746U publication Critical patent/JPS6435746U/ja
Application granted granted Critical
Publication of JPH085555Y2 publication Critical patent/JPH085555Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP13052487U 1987-08-26 1987-08-26 ウェ−ハ移載機 Expired - Lifetime JPH085555Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13052487U JPH085555Y2 (ja) 1987-08-26 1987-08-26 ウェ−ハ移載機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13052487U JPH085555Y2 (ja) 1987-08-26 1987-08-26 ウェ−ハ移載機

Publications (2)

Publication Number Publication Date
JPS6435746U true JPS6435746U (enrdf_load_stackoverflow) 1989-03-03
JPH085555Y2 JPH085555Y2 (ja) 1996-02-14

Family

ID=31385767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13052487U Expired - Lifetime JPH085555Y2 (ja) 1987-08-26 1987-08-26 ウェ−ハ移載機

Country Status (1)

Country Link
JP (1) JPH085555Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03261161A (ja) * 1990-03-09 1991-11-21 Tokyo Electron Sagami Ltd 縦型熱処理装置
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
CN112635377A (zh) * 2020-12-25 2021-04-09 上海广川科技有限公司 一种等间距调节模组
JP2023064071A (ja) * 2021-10-25 2023-05-10 大立▲ギョク▼科技有限公司 ウェハ出入アセンブリ及びそれに用いられるウェハ出入装置とウェハキャリア

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113977613A (zh) * 2021-08-30 2022-01-28 上海广川科技有限公司 利用带传动结构实现多层等间距可变的晶圆搬送机械手结构

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03261161A (ja) * 1990-03-09 1991-11-21 Tokyo Electron Sagami Ltd 縦型熱処理装置
JPH0528041U (ja) * 1991-09-20 1993-04-09 東京応化工業株式会社 縦型ウエハー処理装置のウエハー移載機構
CN112635377A (zh) * 2020-12-25 2021-04-09 上海广川科技有限公司 一种等间距调节模组
JP2023064071A (ja) * 2021-10-25 2023-05-10 大立▲ギョク▼科技有限公司 ウェハ出入アセンブリ及びそれに用いられるウェハ出入装置とウェハキャリア

Also Published As

Publication number Publication date
JPH085555Y2 (ja) 1996-02-14

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