JPH0851140A - Apparatus and method for preventing pick-up of two laminated thin plates - Google Patents

Abstract

PURPOSE:To prevent that a top thin plates stichs to a lower side already separated and that the two thin plates are picked up together by stopping lowering of a suction pad, and then raising the thin plate with respect to the suction pad. CONSTITUTION:A vertically moving cylinder 4 is operated to lower the suction pad 5 of a suction unit 3 to a predetermined position, and to the state capable of sucking. A laminated thin plate 1 in a cassette 2 is raised by a reflow 6 in this state, and the air is injected from an air nozzle 8 in synchronization with the raising. As a result, the plate 1 of the uppermost side is separated by the air injection force, and sucked by a suction pad 5. When it is detected by a suction detecting mechanism, the plate 1 is lowerd by the reflow 6, the air injection is thereafter continued for several seconds, and the unit 3 is raised. Thus, there is no possibility that the sucked plate 1 sticks to the separated plate 1 of the lower side, thereby preventing picking-up of two plates.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device and a method for preventing the taking of two laminated thin plates, and in particular, when the thin plates such as stacked semiconductor substrates are taken out one by one and conveyed to the next step, The present invention relates to a device and a method for preventing the removal of two or more thin plate members from a laminated thin plate member.

[0002]

2. Description of the Related Art In a semiconductor substrate manufacturing process or the like, it is necessary to take out the stacked thin plates one by one and convey them to the next process such as polishing work and etching work. Therefore, the thin plates may easily stick to each other due to surface tension or burrs, and two or more thin plates may be taken out during the work of taking out the thin plates, which may hinder the subsequent steps.

FIG. 5 shows a conventional two-sheet removal preventing device for a thin plate, where 1 is a thin metal plate such as a semiconductor substrate formed by joining a thin metal plate, for example, a copper plate to a ceramic substrate, and 2 are stacked. The cassette 3 accommodating the thin plate 1 is an adsorption unit, 4 is a vertically moving cylinder for vertically moving the adsorption unit 3, and 5 is provided at the lower end of the adsorption unit 3 and communicated with a vacuum generator (not shown). , A vacuum suction pad for taking out the uppermost thin plates 1 in the cassette 2 one by one, and 6 for engaging the bottoms of the laminated thin plates in order to vertically move the stacked thin plates 1 in the cassette 2. The combined lifter, 7 is a photoelectric tube for detecting when the uppermost portion of the laminated thin plate body reaches a predetermined height, and 8 is the raised uppermost thin plate body, and the thin plate body located therebelow is stuck. Taken out Separation gas in the horizontal direction toward between said predetermined height elevated top of the sheet body and the sheet body thereunder to prevent the, for example, air nozzles for ejecting air.

The conventional two-sheet removal prevention device for thin plates has the above-mentioned structure and is operated as follows.

When picking up the thin plate member 1, first, the thin plate member 1 is raised by the lifter 6, and when the photoelectric tube 7 detects that the uppermost thin plate member 1 has reached a predetermined position, the lifter 6 is used. Stop climbing.

In this state, air is ejected between the uppermost thin plate member and the lower thin plate member through the air nozzle 8 to separate the uppermost thin plate member and the lower thin plate member.

Next, as shown in FIG. 6, the suction unit 3 is attached to the uppermost thin plate member 1 by the vertical movement cylinder 4.
And the suction pad 5 stops the lowering of the suction unit 3 by the vertical movement cylinder 4 when a suction detection device (not shown) detects that the uppermost thin plate 1 is suctioned by the suction pad 5. Then, it rises and transfers only the uppermost thin plate member 1 to a predetermined place.

[0008]

However, in the above-mentioned conventional two-sheet thinning preventive apparatus for laminated thin plate members, the suction pad 5 descends from the upper part, and the air jetted from the air nozzle 8 causes the lower thin plate member to come out. When the uppermost thin plate member that is floatingly separated is adsorbed, the adsorption detection device does not immediately operate, the adsorption pad 5 continues to descend, and even if the adsorption detection device immediately operates, the adsorption Due to the inertia of the unit 3 and the like, the suction pad 5 continues to move downward and presses the uppermost thin plate member downward, and as a result, the uppermost thin plate member reattaches to the separated lower thin plate member, and thereafter, When the suction unit 3 moves up, for example, two thin plate members are taken out by the suction pad 5, which is a drawback.

When the light emitted from the photoelectric tube 7 is not accurately reflected on the side surface of the uppermost thin plate member and the second thin plate member operates, or when the thin plate member tilts and malfunctions. At the malfunctioning portion, for example, as shown in FIG. 7, air is ejected from the nozzle 8 between the second and third sheets from the top of the laminated thin plate member, and only the uppermost thin plate member is taken out. There was a risk that I could not.

The present invention eliminates the above drawbacks.

[0011]

2 of the laminated thin plate body of the present invention
The sheet picking prevention device is moved up and down by means for moving up and down the laminated thin plates engaged with the bottom surface of the stacked thin plates, vacuum suction means for the thin plates, vertical movement means for the vacuum suction means, and vertical movement means. By the gas injection means for injecting the separation gas toward the upper side of the laminated thin plate body, the detection means for detecting that the thin plate body is adsorbed by the vacuum adsorption means, and the detection output of the detection means. It is characterized by comprising control means for moving the vacuum suction means downward by moving the vertical movement means downward.

According to the method for preventing two sheets of laminated thin plates of the present invention, a step of lowering the vacuum suction means of the thin plates toward the laminated thin plates from its upper part and stopping at a predetermined position, and laminating at this predetermined position. A step of ejecting a thin plate body separating gas, a step of moving the laminated thin plate body toward the lowered vacuum suction means, and a step of moving the laminated thin plate body when the thin plate body is sucked by the vacuum suction means. It is characterized in that it comprises a step of moving it down and a step of moving the vacuum suction means after a predetermined time has passed since the thin plate was sucked.

[0013]

Embodiments of the present invention will be described below with reference to the drawings.

In the device for preventing two thin plates of the present invention, as shown in FIG. 1, the vertical moving cylinder 4 is operated without using the photoelectric tube 7, and the suction pad 5 of the suction unit 3 is moved to a predetermined position. Lower it and make it ready for adsorption by operating the vacuum generator.

In this state, the laminated thin plate member 1 in the cassette 2 is lifted by the lifter 6 as shown in FIG. 2, and air is ejected from the air nozzle 8 in synchronization with this lift. As a result, the uppermost thin plate member 1 is separated by the jetting force of air and is adsorbed by the adsorption pad 5, and the adsorption state is detected by the adsorption detection device.

When the suction detecting mechanism detects that the uppermost thin plate is adsorbed by the adsorption pad 5 as described above, the lifter 6 displaces the laminated thin plates for several millimeters as shown in FIG. Lower it.

The ejection of air from the air nozzle 8 continues for several seconds after the lifter descends, and then the suction unit 3 is raised.

As a result, when the laminated thin plate member is lowered by the lifter 6 as shown in FIG. 4, even when two thin plate members are sucked by the suction pad 5, as shown in FIG.
The air jet from the air nozzle 8 for a few seconds causes the lower thin plate member to be separated as shown in FIG.

The air nozzle 8 is fixed to the nozzle fixing block 9, and the gap between the tip of the nozzle and the cassette 2 and the jetting angle, jetting distance and jetting amount of air from the nozzle are determined by the thickness of the laminated thin plate 1. If it is adjustable depending on the pod size, etc.

Further, the descending amount of the lifter 6, the jetting time of the air nozzle, the period, etc. can be changed appropriately.

[0021]

EFFECT OF THE INVENTION According to the apparatus and method for preventing two sheets of laminated thin plates of the present invention, after the suction pad is stopped to descend,
Since the laminated thin plate member is raised with respect to this suction pad, the suction position of the laminated thin plate member by the suction pad is ensured. Therefore, if the position of the air nozzle is set in accordance with this position, the uppermost thin plate member can be set. And, it becomes possible to surely eject the air to the thin plate portion below it.

Further, since the uppermost thin plate member is sucked by the suction pad, the remaining laminated thin plate members are lowered by the lifter 6, so that the thin plate member sucked by the suction pad 5 is moved downward as in the prior art. There is no risk that it will be pushed down to the bottom and separated to the separated thin plate again, and air can continue to be blown out for several seconds even after adsorption, so only the uppermost thin plate can be reliably separated. It is possible to take it out and take out two sheets, which is a great advantage.

[Brief description of drawings]

FIG. 1 is an explanatory view of a two-sheet removal preventing device for laminated thin plates according to the present invention.

FIG. 2 is an explanatory view of a method for preventing two sheets of laminated thin plates of the present invention from being taken out.

FIG. 3 is an explanatory diagram of a method for preventing two sheets of laminated thin plates according to the present invention.

FIG. 4 is an explanatory diagram of a method for preventing two sheets of laminated thin plates according to the present invention.

FIG. 5 is an explanatory view of a two-sheet removal preventing device for laminated thin plates according to the present invention.

FIG. 6 is an explanatory diagram of a method for preventing double-layering of laminated thin plate members according to the present invention.

FIG. 7 is an explanatory diagram of a method for preventing two sheets of laminated thin plate members from being taken according to the present invention.

[Explanation of symbols]

 1 Thin Plate 2 Cassette 3 Adsorption Unit 4 Vertical Cylinder 5 Vacuum Adsorption Pad 6 Lifter 7 Phototube 8 Air Nozzle 9 Fixed Block

Front Page Continuation (72) Inventor Toshikazu Tanaka 1-8-2 Marunouchi, Chiyoda-ku, Tokyo Dowa Mining Co., Ltd.

Claims (2)

[Claims] 1. A vertical movement means for the laminated thin plate body engaged with the bottom surface of the laminated thin plate body, a vacuum suction means for the thin plate body, a vertical movement means for the vacuum suction means, and a vertical movement means. Gas injection means for injecting a separation gas toward the upper side of the laminated thin plate body, and detection means for detecting that the thin plate body is adsorbed by the vacuum adsorption means,
2. A device for preventing double-layering of laminated thin plate members, comprising: control means for moving the vacuum suction means downward by moving the vertical movement means downward by the detection output of the detection means. 2. A step of lowering the vacuum suction means of the thin plate member from its upper part toward the laminated thin plate member and stopping it at a predetermined position, and a step of ejecting a gas for separating the laminated thin plate member at this predetermined position. A step of moving the laminated thin plate body upward toward the lowered vacuum suction means; a step of moving the laminated thin plate body downward when the thin plate body is sucked by the vacuum suction means; and a step of sucking the thin plate body. And a step of moving the vacuum suction means after a lapse of a predetermined time from the above.