JPH0849991A - Closed system temperature controller - Google Patents

Abstract

PURPOSE:To miniaturize the apparatus and reduce the weight of the apparatus by applying a zigzag loop type tubule heat pipe of a type of receiving or radiating heat separately, a two-phase condensing heat medium fluid as working liquid while a completely shielded pump is applied as force circulation means thereof. CONSTITUTION:A solid/liquid calorie applicator/receiver H is arranged to give and take calorie between a body 3 to be controlled in temperature and a 2-phase condensing heat medium fluid 1 and an air/liquid heat exchanger E is arranged to exchange a calorie received with the 2-phase condensing heat medium fluid 1 with that of forced convection of outside air. Moreover, a link pipe 4 is arranged to link the parts in a closed loop and a completely sealed type pump to circulate the 2-phase condensing heat medium fluid 1. Portions corresponding to a calorie giving/taking part and a calorie exchanging part are made up of a highly heat conductive long-sized zigzag tubule with an outer diameter thereof 5mm or less made of metal. This enables the combining of the transport of a latent heat by a heat capacity of a liquid and the transport of a latent heat by a change in phase of steam to enhance the heat transport capability thereby enabling the miniaturization of an air cooled heat exchanger E significantly.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a structure of a temperature control device applied to a heat exchanger, and more particularly to a solid-liquid heat quantity transfer device for transferring heat quantity from a temperature-controlled body in an equipment casing and a gas phase for the heat quantity. A gas-liquid heat exchanger for exchanging heat with the forced convection of the heat medium fluid, a connecting pipe for connecting them to form a closed loop, and a heat medium liquid circulating means, for controlling the temperature of the temperature-controlled body. It is related to the structure of the closed system temperature control device of the loop type thin tube heat pipe applied structure.

[0002]

2. Description of the Related Art In recent years, with the progress of high-density packaging of equipment and the high performance of semiconductor elements, it has become more and more difficult to cool equipment and devices, and cooling by forced convection air is becoming inadequate. As a countermeasure against this, recently, temperature control of a heating element based on a liquid cooling system is being widely used. Many of these have a structure in which a tunnel serving as a flow path for a refrigerant liquid is formed in a cold plate or a structure in which a meandering thin tube is sandwiched between metal plates. As the refrigerant liquid, water or an aqueous solution of ethylene glycol is often used. In these cases, the heat capacity of water is large and the heat transfer coefficient is large, so that the cooling efficiency is high, the cooling performance is improved ten times as compared with the forced convection air method, and the cooling device is significantly downsized. There was an advantage. There is also an advantage that the cooling performance can be freely controlled by adjusting the flow rate of the refrigerant liquid.

As described above, the liquid cooling system has extremely high performance as compared with the air cooling system, and it has been extremely effective in reducing the size and weight of the cold plate, the cooler itself and the like. However, in the case of the air cooling system, the treatment of exhaust waste heat is extremely simple, but in the liquid cooling system, various problems occur. Taking water cooling as an example, (1) the reliability of the applied device may decrease due to corrosion, rusting, etc. of the object to be cooled and the pipeline. (2) Depending on the water quality, the pipeline may be blocked due to the generation of scale. (3) Although there is a risk of freezing in a low temperature environment, there are often no problems during operation of the equipment, but troublesome problems occur during equipment storage such as when work is stopped or during transportation. (4) Because of the conductivity, if water leaks, there is a risk that electronic devices may be damaged by short-circuiting of elements and circuits, and that heavy electric devices may suffer electric shock due to electric leakage. (5) A tank as a cooling water supply source, a pipeline for supply, etc. are required, and a drainage pipeline is required, which reduces the degree of freedom in designing applicable equipment, and also improves mobility of the applicable equipment. Poor portability. In addition, there are many joints in these pipelines, and it is inevitable that water will leak from these joints for many years, causing problems of environmental degradation in the office and factory. Sometimes. (6) Using a refrigerant liquid other than water (1)-
Although it is easy to solve the problem of (4), since the price of the refrigerant liquid is high, it cannot be easily discarded like water. When throwing away, a waste liquid treatment device is necessary from an environmental point of view. Many problems have occurred.

A closed system liquid cooling system as illustrated in FIG. 2 is usually applied as the best solution for solving these problems. All of this system is stored inside the equipment casing C, and the liquid coolant heat L circulates inside to absorb and cool the heat quantity of the cooled object 12 (solid-liquid heat quantity transfer device). H and the high temperature waste liquid L- of the liquid cooling heat absorber H
An air-cooled heat exchanger (gas-liquid heat exchanger) E that cools H and discharges the amount of heat to the outside of the device, and a high-temperature connection pipe 4 that connects them in a loop to form a circulation cycle of the refrigerant liquid L 4- 1
And a low temperature pipeline 4-2, and a coolant liquid circulation pump 14, a coolant liquid quality maintenance means (ultra pure water production device) 15, a coolant liquid replenishment tank 16, a drain pad 1 are provided in these pipelines.
7, various safety devices, etc. are provided side by side, and all of them are stored together with the cooled object 12 in the same equipment housing. In the figure, Ao is the forced convection outside air for heat radiation. As the coolant liquid L, an insulating coolant liquid, ultrapure water, an antifreeze liquid with anticorrosive measures, or the like is applied according to the application of the system. A refrigerator may be used instead of the air-cooling heat exchanger E, but these require a compressor, a condenser, etc., consume a lot of energy for their operation, and further cool the exhaust heat. Since it requires an air-cooling device for this purpose, it is applied in the case of large scale. The closed system liquid cooling device can solve most of the problems of the conventional liquid cooling system by appropriately selecting various auxiliary devices and refrigerant liquids. That is, the application of the closed system solves most of the major problems such as mobility, portability, installability, work environment, wastewater treatment, and safety.

[0005]

Although the present invention can be applied to both cooling and heating of the temperature controlled body, both of them are the same in principle, and for simplicity of explanation, The explanation will be made on the cooling system temperature control. The liquid cooling method using the closed system is extremely excellent as described above. However, the cost for that is extremely large, and although the liquid cooling heat absorber (solid-liquid heat transfer device) H is significantly reduced in size and performance, it is an air-cooling heat exchanger (gas-liquid heat exchanger) E and refrigerant liquid circulation. Starting with the pump 14 for liquid, a liquid quality maintenance device 15, a refrigerant liquid replenishment tank 16,
In the case where the coolant liquid is water, various safety measures, various insulating means (partition wall) C-3 between the heat dissipating portion C-1 and the cooling portion C-2 of the equipment casing C, etc. are required. Furthermore, it is necessary to install a deionized water production device 15, a filtration device, a PH check device in the case of antifreeze liquid, etc., and to store them, the equipment casing becomes large, weight increases, maintenance costs increase, etc. It was unavoidable that a big problem was added.
Also, over a long period of time, it is inevitable that water will leak from various water treatment devices such as circulation pumps and many connecting parts of pipes connecting them, and that water drops will be dropped due to dew condensation. In order to maintain a good atmosphere in the housing, the equipment housing cannot be hermetically sealed, and the drain pad 17 needs to be provided. Furthermore, the biggest additional problem is that the amount of heat absorbed by the liquid cooling cooler H despite the fact that the object to be cooled 12 is cooled by the main liquid cooling cooler H is finally returned to the atmosphere by the large air cooling heat exchanger E. The point is that you need to throw it away. In terms of heat balance, the amount of heat absorbed by the liquid-cooled cooler H and the amount of heat discarded by the air-cooled heat exchanger E are the same amount. Therefore, depending on the application of the liquid-cooled heat absorber H, the volume of the equipment casing C can be made smaller and lighter. There was no need to increase the size and weight.

The present invention alleviates those additional problems, and in particular, greatly reduces the size of the air-cooling heat exchanger E, which is the largest factor of the volume increase, and also the refrigerant liquid circulation pump 14
It is possible to reduce the size of the device and eliminate or greatly reduce the additional means such as the pure water producing device 15, the filter, the refrigerant liquid replenishment tank 16, the drain pad 17, etc., and it is possible to maintain the atmosphere in the housing at low humidity and cleanly. It is an object of the present invention to provide a heat pipe type closed system temperature control device.

[0007]

In order to solve the problems and achieve the above-mentioned objects, the first characteristic of the basic configuration of the closed system according to the present invention is as a means for circulating a heat transfer fluid. It is configured by applying a loop type meandering thin tube heat pipe to which Japanese Patent Application No. 2-319461 or Japanese Patent Publication No. 6-3354 is applied. The second feature of the basic configuration is that the applied loop-type meandering thin tube heat pipe is configured as a heat-radiating and heat-separating part-type heat pipe. The third characteristic of the basic configuration is that a liquid pump is used as a circulation assisting means for a heat transfer fluid in a heat sink / radiation separation type heat pipe, and a mechanical seal that is normally used as this liquid pump. The point is that a completely sealed liquid pump represented by a magnet coupling type fluid pump or an electromagnetic fluid pump is used instead of the pump.

The loop-type meandering capillary heat pipe is generated by axial vibration and circulation flow of vapor bubbles and fluid droplets of the two-phase condensable heat-transfer fluid generated by nucleate boiling in the heat receiving part of the two-phase condensable heat-transfer fluid. , Transports heat efficiently by itself without the need for external energy. However, when it is configured as a heat radiation / separation part separated type heat pipe, unlike the case of a normal loop type meandering thin tube heat pipe, there are only two reciprocating connecting pipes that connect the heat radiation / radiation parts, and the heat transfer fluid in the heat pipe is The circulation flow rate circulated by itself becomes extremely small, and further, the connection distance becomes longer, so that the pressure loss in the pipe increases and the axial vibration energy of the heat transfer fluid is greatly attenuated. For these reasons, the heat transfer capacity of the loop type meandering thin tube heat pipe of the heat radiation / separation part separation type is drastically reduced as compared with the normal loop type meandering thin tube heat pipe. In the present invention, the problem of the reduction of the heat transport amount is solved by providing a forced circulation means (fluid pump) in the loop to force the heat medium fluid to circulate. Thus, the fact that the fluid pump can be applied despite the heat pipe is an important feature of the loop-type meandering capillary heat pipe in which the working fluid circulates as a two-phase fluid. If the circulation flow rate of this heat transfer medium fluid is sufficiently large and sufficiently high speed, this means not only compensates for the decrease in heat transport capacity, but also when it depends on the ordinary meandering loop type thin tube heat pipe system or It is possible to significantly increase the heat transport capacity as compared with the case of the heat pipe with separated heat sink / radiation unit that uses the forced circulation system of the refrigerant liquid. This increase in heat transfer capacity is not simply due to the improvement in the circulation speed of vapor bubbles and fluid droplets in the loop-type meandering capillary tube, but in the heat receiving section capillary tube of the two-phase condensable heat transfer medium fluid. Due to the high-speed movement, the internal pressure on the inner surface of the heat-receiving thin tube drops, which causes a dramatic increase in the amount of vapor bubbles generated in the heat transfer fluid, which in turn greatly increases the amount of condensation in the heat dissipation part, and the latent heat transport amount of the heat transfer fluid as a whole. This is due to a sharp increase.

The loop type meandering thin tube heat pipe of the heat radiation / separation part separation type applied to the present invention is completely different in operation and configuration from the conventional heat radiation part of the heat radiation / separation part separation type. The conventional heat pipe with separated heat receiving and radiating portion illustrated in FIG. 3 sends the condensed working liquid 1-1 to the steam generator (heat absorber) e of the working liquid, the condenser (radiator) c, and the steam generator e. The basic structure is to include a working fluid circulation pump 14 for entering and a refrigerant liquid pipeline 4-3 and a vapor pipeline 4-4 that connect them to form a loop. It cannot be said that the circulation of the phase working fluid. That is, from the steam generator (heat absorber) e in the loop-shaped connecting pipe to the condenser (radiator)
The hydraulic fluid moving in the steam pipe 4-4 toward c is in a vapor phase (steam) and has a saturated vapor pressure. The working liquid moving in the refrigerant liquid pipe 4-3 from the condenser (radiator) c toward the steam generator (heat absorber) e is in a liquid phase, and is generally subjected to a gravity siphon action. Further, since the vapor pressure is generated in the steam generator (heat absorber) e, the hydraulic fluid cannot be supplied into the steam generator e without the pressure input by the pump 14. In the figure, Ao forced convection outside air and Ho are heating means. At first glance, the heat transport of such a conventional heat pipe with separated heat-radiating portion seems to be performed by the circulation of the liquid-phase working fluid by the pump, but its heat transport capacity is the amount of steam generated in the steam generator e. Or the vapor condensing capacity of the condenser c. The circulation amount of the liquid-phase working fluid supplied to the steam generator e by the pump exceeds the steam generation capacity of the steam generator e, and the condenser (radiator)
Even if the vapor condensing capacity of c is exceeded, the heat transport performance of the heat pipe is rather deteriorated. After all, the heat transfer is performed only by the phase change of the working liquid, that is, the latent heat transfer of the working liquid, and is not the heat transfer by the liquid circulation. Another difference is that in order to prevent pressure loss, no thin tube is used for the refrigerant liquid conduit 4-3 and the vapor conduit 4-4. Therefore, it is necessary to attach various fin groups for heat radiation.

On the other hand, in the loop type meandering thin tube heat pipe of the heat radiation / separating portion separating type according to the present invention, all of them are made of meandering thin tubes, and the inside of the pipeline is in all parts thereof.
The liquid-phase working liquid (droplets) and the vapor-phase working liquid (vapor bubbles) are alternately arranged by themselves in a state of filling and blocking the inside of the pipe line, and while maintaining this state, they vibrate themselves in the axial direction and It circulates in a predetermined direction, and the amount of heat itself moves from the high temperature part to the low temperature part. During this time, the vapor bubbles shrink or disappear as the heat is radiated, but they are replenished by the pressure vapor bubbles that are successively generated in the heat receiving section.
Therefore, not only the latent heat transport due to the phase change of the two-phase fluid but also the sensible heat transport depending on the heat capacity of the liquid-phase fluid are carried out. The working fluid of such a meandering thin tube heat pipe is completely different from a normal heat pipe in that it can be forcedly circulated under pressure by a liquid pump. Further, in the meandering thin tube heat pipe, since the meandering thin tube itself acts as a heat receiving and radiating fin, it is not necessary to attach a fin group. Because of this, the loop type meandering thin pipe heat pipe of the heat radiation / separation portion separation type according to the present invention is different from the conventional heat radiation / separation portion separation type heat pipe as described above in all points such as its configuration, operation principle and action. Are completely different.

The basic structure of the closed system temperature control device of the present invention to which the loop type meandering thin tube heat pipe of the heat radiation / separation part separation type having such a novel structure is applied will be described with reference to FIG. The figure is a schematic diagram for explaining the system, the device housing is shown in cross section, and the capillaries are all shown in a diagram to avoid complication of the drawing. The figure is an explanatory view of the basic structure of the present invention and also serves as an explanatory view of the first embodiment of the present invention. In the figure, a closed system temperature control device for a temperature controlled body 3 in a device casing C is a solid-liquid liquid which exchanges heat between the temperature controlled body 3 and a two-phase condensable heat transfer fluid 1. Intercalation heat exchanger H, gas-liquid heat exchanger E for exchanging heat between the heat exchanged by the two-phase condensable heat transfer fluid l and the forced convection a of the outside air, and a closed-loop connection between them. The main components are a connecting pipe 4 and a complete seal type pump 5 for forced circulation of a heat medium fluid that strongly circulates a two-phase condensable heat medium fluid 1 enclosed in a loop in a predetermined direction. The solid-liquid heat transfer device H and the gas-liquid heat exchanger E are formed by meandering long thin tubes 1-1, 1-2, and each of them is a heat receiving portion of a loop type meandering thin tube heat pipe of a heat receiving / radiating portion separation type. And as a part corresponding to the heat dissipation part,
The pumps, which are connected to each other by the high temperature connecting pipe 4-1 and the low temperature connecting pipe 4-2, and arranged in the low temperature connecting pipe 4-2, have a structure capable of guaranteeing long-term reliability as a heat pipe. It is characterized by being applied and configured. In principle, all of these system components are stored in the equipment casing C except for the heat exchange portion 2 of the gas-liquid heat exchanger E, and the heat exchange portion 2 is provided inside or outside the equipment casing C. It is arranged so as to be located in the convection of the existing convection control means (wind tunnel) 11.

[0012]

The structure of the present invention as described above exhibits the following operations. (1) Operation by being configured as a loop type thin tube heat pipe with a separated heat receiving / radiating portion. (1-1) Unlike the conventional heat pipe and the conventional heat sink / separator separation type heat pipe, the liquid-phase heat transfer medium fluid and the vapor-phase heat transfer medium fluid are both circulated or vibrated to perform heat transfer, so that the liquid is used. The sensible heat transport due to the heat capacity of the and the latent heat transport due to the phase change of the steam are both performed. Since the two-phase fluid hydraulic fluid in such a state can be forcedly circulated by the liquid pump, the sensible heat generated by the liquid-phase heat-medium fluid is different from the transport capacity of the conventional heat-pipe fluid by the latent heat. The heat transport capability is extremely strong because the heat transport capability is added and the heat transport capability is strongly amplified by the forced circulation of the heat transfer fluid. Further, in the gas-liquid heat exchanger applied to the loop type thin tube heat pipe, it is not necessary to attach fins, and the thin tube group of meandering thin tubes can be directly applied as a radiator.
The air-cooled heat exchanger E of the conventional closed system temperature controller illustrated in FIG. (1-2) It is possible to freely control the heat transport capacity by controlling the circulation speed and circulation amount of the heat medium fluid, instead of the fixed heat transport capacity that depends on the temperature difference as in a normal heat pipe. Therefore, it becomes possible to freely control the temperature of the temperature-controlled body, which was impossible with the conventional heat pipe type temperature control device. (1-3) A loop-type thin tube heat pipe (using HFC134a as a working fluid and a chemical formula of CH ₂ FCF ₃ ) has been experimentally confirmed to withstand a long-term use for 30 consecutive years. Therefore, it is estimated that the closed system temperature control device of the present invention can withstand continuous long-term use up to the limit of the life of the completely sealed pump for circulating the refrigerant liquid. This means that in the closed system temperature control device of the present invention, the liquid quality maintenance means or the ultrapure water production device 15, the refrigerant liquid replenishment tank 16, and the drain in the conventional closed system temperature control device illustrated in FIG. 2 are used. It is possible to omit the pad 17 and various safety devices and the like associated therewith, which simplifies the structure of the device housing that houses the entire system as shown in FIG. 1 and greatly reduces the size thereof. (2) Operation by applying a completely sealed pump. (2-1) Since the heat medium fluid is not contaminated or leaked, a long life as a loop type thin pipe heat pipe is guaranteed. (2-2) Since there is no risk of leakage of the heat transfer fluid, the inside of the equipment casing is always kept clean, so that the equipment casing can be sealed.

(3) Overall operation (3-1) Since the whole system is downsized overall, the circulation route of the heat transfer fluid is shortened, the amount of heat radiated and leaked from the circulation route is small, and the configuration of the circulation pipe line is small. Since it is simple, the heat insulating coating can be effectively and easily applied, so that the amount of leaked heat is synergistically reduced, and the cooling efficiency of the heat transfer unit and the exchange efficiency of the gas-liquid heat exchanger are improved. In addition, the temperature inside the device housing is lowered, and the reliability of various parts inside the housing is improved.

[0014]

【Example】

First Embodiment FIG. 1 also serves as an explanatory view of a first embodiment of the closed system temperature control device of the present invention. In the figure, the equipment housing C and the convection control means 11 are shown in cross section, and the internal structure of the system is schematically shown. Further, for simplification of the drawing, the meandering long thin tubes 1-1 and 1-2 are all shown in a diagram. In FIG. 1, portions corresponding to the heat quantity transfer unit 1 and the heat quantity exchange unit 2 are formed of a metal having good heat conductivity, and meandering long thin tubes 1-1 and 1-2 having an outer diameter of 5 mm or less at the maximum. The inner diameter of the thin tube of the thin tube is constantly filled with the heat transfer fluid 1 flowing through it even if the heat transfer fluid 1 is very small due to the cohesive force generated by its surface tension. The inner diameter is sufficiently small so that it can move inside the tube in that state regardless of the holding posture. When the two-phase condensable heat transfer fluid 1 is enclosed after degassing the thin tube container constituted by the long thin tubes 1-1 and 1-2 having such a reduced diameter, the heat transfer fluid 1 becomes The surface tension causes the liquid phase heat transfer fluid and the gas phase heat transfer fluid to be separated and arranged alternately. The vapor-phase heat transfer medium fluid group has a saturated vapor pressure corresponding to the temperature, and is in a state of maintaining a mutual balance while constantly applying pressure to the liquid-phase heat transfer medium fluid group.
When heat absorption or heat dissipation occurs in a part of the thin tube, the balance is lost and the liquid phase heat transfer medium fluid is rapidly moved and propelled toward the low temperature part in the thin tube. Further, the two-phase heat transfer medium fluid 1 in the thin tube in such a state can propagate the circulation driving force and vibration energy generated by heat absorption and heat dissipation and the circulation driving force applied by the pump extremely sensitively and efficiently over the entire length of the thin tube.

The long thin tubes 1-1 and 1-2 are made to meander back and forth over a predetermined distance, and each has a heat exchange unit 1 and a heat exchange unit 2 each having a predetermined number of turns. Yes, the meandering long thin tubes 1-1 and 1-2, which form the heat exchange unit 1 and the heat exchange unit 2 that are located at a predetermined distance,
Each unit capillary unit u for each predetermined number of meandering turns
Is formed as a whole and a plurality of thin tube units u are formed as a whole.
It is an aggregate of -1, u-2, ..., Un.
The heat quantity transfer unit 1 and the heat quantity exchange unit 2 configured by such a thin tube group can effectively perform the heat quantity transfer and the heat quantity exchange function without the need for mounting the fin group.

For the entire length of each of the meandering long thin tubes 1-1 and 1-2 forming each unit thin tube unit U, the pressure loss indicated by the heat medium fluid 1 circulating inside is the circulation driving force of the heat medium fluid 1. It has a length that cannot be reduced below a predetermined value. Further, both ends of each unit capillary unit u are respectively an inlet 6 and an outlet 7 of the two-phase condensable heat transfer medium fluid l, and the heat transfer medium inlets and outlets of all unit capillaries are The inflow side header 8 and the discharge side header 9 are airtightly aligned and connected to each other. Further, the inflow side header 8 and the discharge side header 9 separate the heat exchange unit 1 and the heat exchange unit 2 with a predetermined distance. High temperature connecting pipe 4-1 and low temperature connecting pipe 4-to be connected
2, the high temperature connection pipe 4-1 airtightly connects the discharge side header 9 of the heat quantity transfer unit 1 and the inflow side header 8 of the heat quantity exchange unit 2, and the low temperature connection pipe 4-2 has the heat quantity. The discharge side header 9 of the exchange part 2 and the inflow side header 8 of the heat quantity transfer part 1
And are airtightly connected, and as a whole, the closed loop pipe line is configured as a closed container. With such a configuration, the circulation propulsion force and the vibrational energy of the axial vibration applied to the two-phase condensable heat transfer medium fluid 1 flowing in the closed loop pipe are uniformly and surely sent into each unit capillary unit u. , The functions of the heat quantity transfer unit 1 and the heat quantity exchange unit 2 are ensured.

The predetermined portion of the low temperature connecting pipe 4-2 can be operated while maintaining a high degree of airtightness, and is a complete seal type pump 5 for circulating the heat transfer medium fluid which does not contaminate the heat transfer fluid 1. Are airtightly arranged. The closed container of the closed loop pipe including the heat exchange unit 1 and the heat exchange unit 2 configured as described above is evacuated to a high vacuum and a predetermined amount of the predetermined two-phase condensable heat transfer fluid 1 is enclosed in the whole container. Is formed as a loop type meandering thin tube heat pipe of a heat receiving and radiating portion separation type, and a heat medium fluid 1 serving as a working fluid as a heat pipe is directed from the discharge side of the heat quantity exchange section 2 to the inflow side of the heat quantity transfer section 1. Is forcedly circulated, and the heat exchange unit 1 is formed with a cold plate 10 in combination with a metal flat plate, and the temperature controlled body 3 is mounted on this cold plate by means of good thermal conductivity, Meandering long thin tube 1
-1 is configured as a solid-liquid heat transfer device H for transferring heat between the two-phase condensable heat transfer fluid 1 and the temperature-controlled body 3 via a thin tube wall. In the exchange section 2, the thin tube group of the meandering long thin tubes 1-2 is directly applied as heat exchange fins to constitute the heat quantity exchange section 2, and is supplied from outside the system by the forced convection generating means F provided in the supply flow path. The gas-phase heat transfer medium fluid A that is sent to and discharged from the heat exchanger 2 as forced convection outside air and the two-phase condensable heat transfer medium fluid 1 that circulates in the meandering long thin tube 1-2 are passed through the narrow tube wall. It is configured as a gas-liquid heat exchanger E in which the amounts of heat are exchanged between each other. Such a loop-shaped circulation pipe of the two-phase condensable heat transfer medium fluid is constructed as a highly reliable meandering thin pipe heat pipe, and exhibits high performance for a long period of time.

In FIG. 1, the gas-liquid heat exchanger E is shown in a plan view for simplification of the drawing, and each thin tube unit u- of each unit meandering thin tube formed by the meandering long thin tube 1-2. 1, u
-2, u-3, ..., u-n are shown in a plan view, but in reality, a large number of them are arranged in a row in a plan view, and as a side view of FIG. Only the first layer on the side is shown. Similarly, a large number of inflow-side headers 8 and discharge-side headers 9 are also arranged. Similarly, not only one solid-liquid heat transfer device H as shown in the drawing, but also a plurality of heat transfer devices H may be applied.

Therefore, it is estimated that the closed system temperature control device of the present invention can withstand continuous long-term use until the life of the completely sealed pump for circulating the refrigerant liquid is reached. This means that in the closed system temperature control device of the present invention, the liquid quality maintenance means or the ultrapure water production device 15 in the conventional closed system temperature control device illustrated in FIG.
It is possible to omit the refrigerant liquid replenishment tank 16, the drain pad 17, and various safety devices attached thereto,
As illustrated in FIG. 1, the structure of the equipment housing that stores the entire system is simplified, the reliability of the system is improved, and the size can be greatly reduced.

Second Embodiment In many cases, a heat-generating component is mounted in the equipment casing in addition to the temperature-controlled body targeted by the closed system. In the closed system according to the present invention, the pipe of the heat medium fluid circulation system is greatly shortened due to the action and effect of the present invention, and the amount of heat leaked from the pipe is greatly reduced, but the device housing is also significantly downsized. Therefore, the influence of the amount of leaked heat and the amount of heat generated by the heating elements other than the temperature-controlled body increases, and the temperature inside the housing rises significantly. In particular, when the case is a closed case in which the internal atmosphere and the external atmosphere are airtightly separated, this temperature rise becomes extremely large, and therefore it is necessary to discharge the accumulated heat amount to the outside of the case. The second embodiment illustrated in FIG. 4 shows the structure of a gas-liquid heat exchanger E of a closed system in such a closed casing. All the meandering capillaries are shown in a diagram for the sake of simplicity. The casing C in the figure is a closed casing, and the heat exchange section 2 of the gas-liquid heat exchanger E is a wind tunnel 1 provided outside the casing.
1, and is hermetically attached to the housing wall. A predetermined group of the meandering thin tube group 1-2 in the heat exchanging section 2 has an elongated thin tube length, penetrates the housing wall, and is arranged so as to project inside the sealed housing C. The group of the meandering thin tubes 1-2i is configured as a natural convection type or forced convection type internal heat exchanger Ei for cooling the air in the closed casing. In the case of the forced convection type, the group of inner thin tubes 1-2i is Is characterized in that a forced convection generating means for feeding and discharging the forced convection Ai of the air in the housing into and out of the internal heat exchanger Ei is additionally provided. With such a configuration, the amount of heat generated from the accessory in the closed casing C and the amount of heat leaked from the closed system are transferred to the inside of the gas-liquid heat exchanger E through the group of the inner meandering long thin tubes 1-2i. Sent to
Further, the gas is discharged to the outside of the closed casing C via the gas-liquid heat exchanger E. The amount of heat accumulated in the closed casing C has the same result as the cooling efficiency of the gas-liquid heat exchanger E is lowered, and the gas-liquid heat exchanger E needs to be upsized. Such a closed system liquid cooling device according to the second embodiment makes it possible to maintain the inside of the casing C clean by making the casing airtight and keeping the inside of the casing clean. The reliability of the mounted components inside the housing C is improved.

Third Embodiment Since the closed system temperature control device according to the present invention is an application system of a loop type meandering thin tube heat pipe, a reverse check is performed in the loop according to the operating principle of Japanese Patent Publication No. 6-3354 which is the basic patent. By providing the valve, the heat transfer fluid circulates in a predetermined direction by itself. In Japanese Examined Patent Publication No. 6-3354, the number of check valves is small, but by increasing the number of check valves, the number of pressure chambers divided by the check valves is increased. It operates as a simple fluid pump, and the circulation driving force of the heat transfer fluid becomes strong as a whole. As a result, the completely sealed pump 5 shown in FIG. 1 of the first embodiment can be omitted or can be an auxiliary small pump. The third embodiment of the present invention will be described with reference to the perspective view of FIG. In the drawings, all capillaries are shown in a diagram for the sake of simplifying the drawing. Each unit unit u-1, u- of the meandering long thin tube 1-1 which constitutes the heat transfer unit 1 in the figure
Inflow check valve V-1 is attached to a portion of 2, ..., u-n adjacent to each heat transfer medium fluid inlet 6, or close to each heat transfer medium fluid inlet 6 of each unit. The inflow check valve V-1 is attached to the portion to be connected, and at the same time, the discharge check valve V-2 is attached to the portion close to each heat medium fluid discharge port 7 as well. And these check valves V
The feature is that the flow direction regulation direction by is coincident with the direction from the heat medium fluid inflow port 6 to the discharge port 7.

In the case of such a structure, the heat absorption of the heat quantity transfer unit 1 causes the nucleate boiling of the heat transfer medium fluid l generated in the meandering long thin tube 1-1 to generate a pressure in both axial directions. The waves are all converted into pressure waves in the forward direction with respect to the circulating flow by the action of the inflow check valve V-1, and all of the pressure waves become forward pressure waves and act as the circulation driving force of the heat transfer fluid. Further, all vapor bubbles generated by nucleate boiling also become a source of circulation driving force of the heat medium fluid due to the action of the check valve V-1.
When the discharge check valve V-2 is installed side by side, the backflow of the heat transfer fluid due to the instantaneous contraction of the vapor bubbles due to the instantaneous temperature drop due to the adiabatic expansion during the vapor bubble generation is prevented, and the circulation propulsion force is further strengthened. It has an effect.

Fourth Embodiment A fourth embodiment of the present invention will be described with reference to the perspective view of FIG. This embodiment relates to a solid-liquid heat transfer device H having a cold plate type heat transfer unit 1. For simplification of the drawing, this figure also shows the meandering long thin tube 1-1 in a diagram like the other figures. In the figure, the heat quantity transfer unit 1 includes unit thin tube units u-1, u-2, u- of the meandering long thin tube 1-1.
3, ..., u-n and the linear portion groups of the meandering thin tubes forming each unit are all arranged in parallel and in parallel and in the same plane, and the plane has good thermal conductivity. A cold plate which is sandwiched between two metal flat plates 10-1 and 10-2 or is embedded in a groove group cut in the metal flat plates 10-1 and 10-2 and bonded to form a flat plate as a whole. It is configured as a plate 10, and the temperature-controlled body 3 is bonded and mounted on the plane of the cold plate 10 by means of a good heat transfer property, and is configured as a solid-liquid heat transfer device H as a whole. It has a feature.
Even if there is some unevenness in the narrow tube gaps of the linear portion group of the meandering thin tube, or even if there is some unevenness in the flow rate of the heat transfer fluid flowing through each thin tube, the cold plates 10-1 and 10-2 are thermally diffused. Each part of the plane of shows the uniform heat transfer performance. The cold plate 10 thus configured has a large number of heating elements mounted on the same printed wiring board and having the same height, that is, when the tops of the heating element groups are planar as a whole, they are collectively attached to the cold plate 10. It is extremely effective in the case of simultaneous cooling on a flat surface or in the case of directly mounting a large number of heating elements on the flat surface of the cold plate 10 for simultaneous cooling.

Fifth Embodiment A fifth embodiment of the present invention will be described with reference to the perspective view of FIG. This embodiment also relates to a solid-liquid heat quantity transfer device H having a cold plate type heat quantity transfer unit 1. This figure also shows the meandering long thin tunnel 1-3 in a diagram for simplification of the drawing. In the figure, the heat transfer unit 1 is a meandering long thin tube 1-
Each unit thin tube unit u-1, u-2, u-3, ...
., U-n and all of the linear part groups of the meandering capillary tube forming each unit are arranged in parallel and in parallel on the same plane, and have substantially the same shape as a planar body including its turn part. The meandering long thin tunnel 1-3 formed in the pattern of is formed in the metal flat plate 10-1 having good thermal conductivity and is configured as the cold plate 10 as a whole. The temperature controlled body 3 is bonded and mounted on the plane of 10 by means of a good heat transfer property, and is configured as a solid-liquid heat transfer device H as a whole. In the solid-liquid heat transfer device H configured as described above, the curvature of the turn portion can be reduced to a fraction of the thin tube bending, so that the patterns can be aligned at high density. It is possible to greatly improve the heat transport performance or to downsize the heat quantity transfer unit 1 as compared with the example. Further, since the small-diameter tunnel 1-3 does not require the wall thickness of the tube as compared with the thin tube, the thickness of the cold plate 10 can be made sufficiently thin even with the same diameter.
Further, the thin tube group and the metal flat plates 10-1 and 1 in the fourth embodiment.
Since the contact thermal resistance as in 0-2 does not occur, the cold plate 10 having high performance of heat conduction and heat diffusion can be constructed. Such a thin, high-performance cold plate 10 is extremely effective when applied to high-density mounting equipment. The fifth embodiment as described above contributes to reduction in size and weight of the closed system temperature control device of the present invention.

Sixth Embodiment The present invention is a patent application as a means for circulating a heat transfer fluid.
A high performance is achieved by applying a loop type meandering thin tube heat pipe of a heat radiation / separation part separation type to which No. 319461 or Japanese Patent Publication No. 6-3354 is applied. However, Japanese Patent Application No. 4-135507 discloses a gas-liquid heat exchange section corresponding to the heat radiation section of the heat pipe.
No. (Kenyama-shaped heat sink with l-shaped pin group),
By further applying and configuring Japanese Patent Application No. 4-214456 (application structure of a sword-type heat sink), further miniaturization and higher performance can be achieved. The structure of the gas-liquid heat exchanger of the sixth embodiment having such a configuration will be described with reference to FIG. FIG. 7 is a perspective view in which parts other than the heat exchange portion are omitted, and the convection control wind tunnel 11 and a part of the equipment housing C are removed so that the internal state can be seen. Further, the meandering thin tube is shown in a diagram for simplification of the drawing. The groups of straight tube portions of the meandering long thin tube 1-2 in the heat exchange section 2 are arranged in parallel and parallel to each other and at a high density, and these groups of straight tube portions are arranged in the longitudinal direction thereof. Is held upright and aligned on the plane by a holding means 2-1 having a predetermined flat plate shape at a position close to one end of the tube, and a turn portion is provided at the tip of each thin tube of this group of upright thin tubes. When each pair of thin tubes connected by a curved pipe is regarded as one pin, the heat exchange section 2 as a whole is regarded as a sword-shaped body formed on the plane of the holding means 2-1. The holding means 2-1 is configured to be airtight between the two planes of the holding means for holding the group of sword-mount-shaped upright capillaries, and is approximately in the middle of the upright height of the group of sword-mount-shaped upright tubules. Up to a position slightly protruding from the tip of the group of upright thin tubes A convection control wind tunnel 11 is arranged so as to cover the outer circumference of the tube group, and the flow direction of the forced convection A of the vapor-phase heat transfer medium fluid fed into the heat exchange section 2 is the entire circumference of the plane of the holding means 2-1. From the direction toward the central portion along the plane of the holding means 2-1 and changing the direction from the central portion toward the tip side of the sword mountain-shaped thin tube group, or holding from the tip side of the sword mountain shaped thin tube group. Means 2
-1 toward the plane, changing the rearward direction of the collision to the plane and traveling in all directions around the plane, or configured as a gas-liquid heat exchanger E as a whole. The heat exchanger E is airtightly mounted on the outer wall surface of the closed casing C by the flat plate holding means 2-1. In the case of heat exchange where convection perpendicular to the thin tube group flows in only one direction like a normal radiator, the temperature of the convective heat transfer medium fluid rises due to heat exchange on the upstream side, and the heat exchange efficiency decreases toward the downstream side. However, the heat exchange efficiency as a whole decreases. However, in the case of this embodiment, the flow of the convective heat transfer medium fluid is inflow from all directions or discharge in all directions, so that the heat exchange efficiency does not decrease and the heat exchange efficiency is greatly improved as a whole.

[0026]

EFFECTS OF THE INVENTION A two-phase heat transfer medium fluid, which is divided by bubbles generated in a loop type meandering thin tube heat pipe and in which bubbles and droplets are alternately arranged and circulates by itself, generates bubbles by forced circulation by a fluid pump. The amount of heat exchange between the solid-liquid heat exchanger that corresponds to the heat receiving part and the gas-liquid heat exchanger that corresponds to the heat radiating part has greatly improved, and the entire liquid cooling circulation loop becomes a heat pipe. By this, the liquid supply tank,
The liquid quality maintenance device, drain pad, and other auxiliary equipment are omitted, and the entire system is further reduced in size and weight, and the structure is simplified to facilitate system maintenance. Since there is no leakage of liquid, the inside of the equipment is kept clean, and it is possible to store the system in a completely sealed equipment housing.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a basic principle of a closed system temperature control device according to the present invention and a structure of a first embodiment.

FIG. 2 is an explanatory diagram showing a configuration of a conventional closed system liquid cooling device.

FIG. 3 is an explanatory view showing the structure of a conventional heat pipe with separated heat sink / radiator.

FIG. 4 is an explanatory view showing the structure of a gas-liquid heat exchanger of a second embodiment of the closed system temperature control device according to the present invention.

FIG. 5 is a perspective view showing a structure of a solid-liquid heat transfer device of a third embodiment and a fourth embodiment of the closed system temperature control device according to the present invention.

FIG. 6 is a perspective view showing the structure of a solid-liquid heat transfer device of a fifth embodiment of the closed system temperature control device according to the present invention.

FIG. 7 is an explanatory view showing the structure of a gas-liquid heat exchanger of a sixth embodiment of the closed system temperature control device according to the present invention.

[Explanation of symbols]

 1 heat quantity transfer part 1-1 meandering long thin tube 1-2 meandering long thin tube 1-2i internal meandering long thin tube 1-3 meandering long thin tunnel 2 heat quantity exchanging part 2-1 holding means 3 temperature controlled body 4 -1 Low-temperature connecting pipe 4-2 High-temperature connecting pipe 5 Fully sealed type pump 6 Inlet port 7 Discharge port 8 Inflow side header 9 Discharge side header 10 Cold plate 10-1 Metal flat plate 10-2 Metal flat plate 11 Convection control means (wind tunnel) 11i Internal convection control means (internal wind tunnel) Ao Forced convection outside air Ai Internal forced convection air A Gas phase heat transfer fluid C Equipment casing c Condenser (radiator) e Steam generator (heat absorber) E Gas-liquid heat exchanger Ei Internal heat exchanger F Forced convection generation means Fi Internal forced convection generation means H Solid-liquid heat transfer device (liquid cooling heat absorber) L Refrigerant liquid l Two-phase condensable heat transfer fluid l-1 Condensed working liquid 1-2 Gas Phase working fluid u-n Capillary unit V-1 Inflow check valve V-2 Discharge check valve

Claims (6)

[Claims] 1. A closed system temperature control device for controlling the temperature of a temperature controlled body in an equipment housing, the system comprising a temperature controlled body and a two-phase condensable heat transfer medium fluid. A solid-liquid heat exchanger that exchanges heat, a gas-liquid heat exchanger that exchanges heat between the heat exchanged by the two-phase condensable heat transfer fluid and the forced convection of the outside air, and a closed loop between them. A connecting pipe for connecting and a heat medium fluid forced circulation pump that circulates the two-phase condensable heat medium fluid enclosed in the loop in a predetermined direction are the main components,
In principle, all of these system components are stored inside the equipment casing except the heat exchange portion of the gas-liquid heat exchanger, and the heat exchange portion is provided inside or outside the equipment convection control means. The portions corresponding to the heat quantity transfer section and the heat quantity exchange section, which are arranged so as to be positioned inside, are formed of a long meandering thin tube having an outer diameter of 5 mm or less at most, which is made of metal having good heat conductivity. The inner diameter of the heat transfer fluid flowing through it constantly fills and blocks the inside of the tube due to the cohesive force generated by its surface tension even if the enclosed amount is very small, regardless of the holding posture of the thin tube. Without having such a state, the inner diameter is made sufficiently small so that it can move inside the pipe, and such long thin pipes are made to meander back and forth between a predetermined distance, and a large number and a predetermined number of meanders, respectively. As a heat exchange unit and heat exchange unit The meandering long thin tubes, which are formed of a heat quantity transfer section and a heat quantity exchange section that are located at a predetermined distance from each other, are formed as a unit unit for each predetermined number of meandering turns, and are plural as a whole. It is an assembly of unit units, and both ends of each unit unit are respectively an inlet and an outlet of a two-phase condensable heat transfer fluid,
The heat medium fluid inlet port group and the outlet port group of all the unit units are airtightly connected to the inflow side header and the exhaust side header, respectively, and further, the inflow side header and the exhaust side header exchange the heat amount with the heat quantity transfer part. Is connected airtight by a high-temperature connecting pipe and a low-temperature connecting pipe that are connected to each other at a predetermined distance, and the high-temperature connecting pipe air-tightly connects the discharge-side header of the heat quantity transfer unit and the inflow-side header of the heat quantity exchange unit. The low-temperature connecting pipe airtightly connects the discharge-side header of the heat exchange part and the inflow-side header of the heat exchange part, and is constructed as a closed container of the closed-loop pipe as a whole, and has a predetermined temperature of the low-temperature connecting pipe. In the part, a completely sealed pump for forced circulation of the heat transfer medium fluid, which can be operated while maintaining a high degree of airtightness and has a structure that does not contaminate the heat transfer fluid, is airtightly connected. like In the closed container of the closed loop pipe line which is made up, a predetermined amount of a predetermined two-phase condensable heat transfer medium fluid is enclosed after being evacuated to a high vacuum, and is configured as a loop type meandering thin tube heat pipe as a whole, The two-phase condensable heat transfer fluid, which is the working fluid of the loop-type meandering thin tube heat pipe, is forcedly circulated in the direction from the discharge side of the heat exchange part toward the inflow side of the heat exchange part, and the predetermined amount of heat exchange part. A temperature controlled body is adhered and mounted on the portion by means of a predetermined good thermal conductivity, and a thin tube wall is interposed between the two-phase condensable heat transfer medium fluid circulating in the meandering narrow tube and the temperature controlled body. It is configured as a solid-liquid heat exchange device that exchanges heat through the heat exchange unit.The heat exchange unit consists of a group of meandering thin tubes as a heat exchanger, which is supplied from outside the system and sent to the heat exchanger as forced convection. The gas-phase heat transfer fluid that enters and exits Closed system temperature control apparatus characterized by a two-phase condensable heating fluid medium circulating inside it are configured as a gas-liquid heat exchanger is caused to exchange heat between each other via the capillary wall. 2. The equipment casing is a hermetically sealed casing in which the internal air is completely cut off from the outside air, and the gas-liquid heat exchanger has a heat exchange section disposed inside a wind tunnel provided outside the casing. It is attached to the housing wall in an airtight manner, and a predetermined group of the meandering thin tube group in the heat exchange section has an extended thin tube length that penetrates the housing wall and projects into the sealed housing. This projecting thin tube group is configured as a natural convection type or forced convection type heat exchanger for cooling the air in the closed housing. The closed system temperature control device according to claim 1, further comprising a forced convection generating means for feeding and discharging the forced convection into and out of the heat exchange section. 3. A check valve is attached to a portion of each meandering long thin tube which constitutes the heat quantity transfer unit in the unit thin tube unit in the vicinity of the heat medium fluid inlet, or a check valve of each unit is installed. Check valves are installed in both the part close to the heat medium fluid inlet and the part close to the heat medium fluid outlet, and the flow direction is regulated by these check valves. The closed system temperature control device according to claim 1, wherein the direction corresponds to the direction from the inlet of the heat transfer fluid toward the outlet. 4. The calorific value transfer unit has a group of thin tubes of each turn of meandering thin tubes arranged in parallel and in parallel on the same plane,
It is sandwiched between two metal flat plates with good thermal conductivity or embedded in a groove group that is cut on the metal flat plate and is configured as a cold plate as a whole. 2. The closed system temperature control device according to claim 1, wherein the body is configured by being bonded and mounted by means of good heat conductivity, and is configured as a solid-liquid heat transfer device as a whole. 5. The meandering long thin diameter is formed in a pattern substantially equivalent to that when the group of thin tubes of each turn of the meandering thin tubes are arranged in parallel and in parallel on the same plane. The tunnel is built in a flat metal plate with good thermal conductivity, and is configured as a cold plate as a whole.The temperature controlled body is bonded and mounted on the flat surface of the cold plate by means of good heat conductivity. The closed system temperature control device according to claim 1, wherein the closed system temperature control device is configured as a solid-liquid heat transfer device as a whole. 6. The group of thin tubes of each turn of the meandering thin tubes forming the heat exchange section are arranged in parallel and parallel to each other at a high density, and the groups of thin tubes are arranged on one side in the longitudinal direction. At a position close to the terminal, it is upright and aligned and held on the plane by a predetermined flat plate-shaped holding means, and is connected by a turn portion bent tube at the tip of each thin tube of the group of upright thin tubes. When each pair of paired thin tubes is regarded as one pin, the heat exchanging portion as a whole is constructed so as to be regarded as a sword-shaped body formed on the plane of the holding means, and the flat shape is maintained. The holding plane for holding the sword mountain-shaped thin tube group is formed so as to airtightly separate the inside and the outside of the equipment casing, and the upright part of the sword mountain-shaped thin tube group is located near the middle of the upright thin tube group and slightly from the tip. Sword mountain shape vs. thin tube group up to the protruding position A convection control wind tunnel is provided so as to cover the outer circumference of, and the flow direction of forced convection of the vapor-phase heat transfer medium fluid fed into the heat exchange section is from all directions around the plane of the holding means to the plane of the holding means. Along with it, the flow is toward the central part and changes the direction from the central part toward the tip side of the sword mountain-shaped tubule group, or from the tip side of the sword mountain-shaped tubule group to the plane of the holding means and becomes flat. It is configured so as to flow in all directions around the plane by changing the rearward direction of collision, or is configured as a gas-liquid heat exchanger as a whole. 2. The closed system temperature control device according to claim 1, wherein the closed system temperature control device is airtightly attached to the outer wall surface of the closed housing by a holding means.