JPH0845971A - Heating device - Google Patents

Abstract

PURPOSE:To provide a heating device such as a curing oven which heats boards and is equipped with a transfer mechanism that transfer boards, wherein the transfer mechanism is made compact in structure, and transfer troubles that occur in operation can be quickly and surely detected. CONSTITUTION:A transfer piece 45 arranged at an inner upper part of a heating chamber 1 in a freely displaceable manner in the direction of transfer and a sliding piece 32 which reciprocates the transfer piece 45 between transfer conveyers 2, 3 and a transfer conveyer pulling it with a wire 42 are provided. A shielding plate 50 which pivots interlocking with the displacement of the transfer piece 45 caused by an anomalous load when the transfer piece 45 transfers boards 6 from the conveyers 2 and 3 to the transfer conveyer and a photodetector 54 which detects the displacement of the transfer piece 45 monitoring an optical path that is closed or opened by the pivoting of the shielding plate 50 are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating device such as a curing furnace for curing a bond by heating a substrate to which a chip is bonded by a bond or a reflow furnace for soldering an electronic component on the substrate. is there.

[0002]

2. Description of the Related Art A substrate on which chips are bonded by a bond is sent to a curing oven, and the bond is heated and cured. Hereinafter, a curing furnace will be described as an example of a conventional heating device.

FIG. 5 is a perspective view showing the main structure of a conventional curing furnace. Reference numeral 1 denotes a heating chamber, in which four transfer conveyors 2, 3, 4, 5 are arranged. These transfer conveyors 2, 3, 4, 5 are belt conveyors, and racks 9 for supporting the substrates 6 are provided in a protruding manner with a pitch. Incidentally, the drive system of these conveyors 2 to 5 such as a motor is omitted. The transport conveyor 2 and the transport conveyor 3 are arranged side by side, and the substrate 6 is placed on the rack 9 between them to transport the substrate 6 from the lower part to the upper part. That is, the two transfer conveyors 2 and 3 form a first transfer conveyor section. In addition, conveyors 4, 5
Are arranged side by side in the back of the conveyors 2 and 3, and the substrate 6 is placed on the rack 9 between them and the substrate 6 is conveyed from the upper part to the lower part. That is, the two conveyors 4 and 5 form a second conveyor section.

The substrate 6 to which the chip 7 is bonded by the bond 8 is transferred from the outside of the heating chamber 1 to the conveyors 2 and 3.
Is fed onto the rack 9 below (see arrow N1), and is transported from the bottom to the top by these transport conveyors 2 and 3. The substrate 6 that has reached the uppermost portion of the transport conveyors 2 and 3 is pushed in the direction of the arrow N by the pusher 17 and is fed onto the rack 9 between the transport conveyors 4 and 5, and is conveyed by the transport conveyors 4 and 5. After being conveyed from the upper part to the lower part, it is carried out of the heating chamber 1 (see arrow N2). A heater (not shown) is provided inside the heating chamber 1, and the substrate 6 is heated while being transported in the heating chamber 1 as described above, so that the bond 8 is cured.

Next, a pushing mechanism for pushing the substrate 6 in the direction of arrow N will be described. At the upper part of the heating chamber 1, a long horizontal guide rod 11 is arranged so as to penetrate through the heating chamber 1. The guide rod 11 is slidably attached by blocks 12 and 13. A rod 14 and a slider 15 are attached to the outside of the heating chamber 1 by a fixture not shown. This rod 14 and slider 15
Is a rodless cylinder, and the slider 15 is a rod 1
Slide along 4 The slider 15 is connected to the rear portion of the guide rod 11 protruding from the heating chamber.

Below the guide rod 11, a shaft 16 is fixed to a fitting 22 which is slidable on the guide rod 11. A pusher 17 is attached to the front portion of the shaft 16 and a dog 18 is attached to the rear portion thereof.
An optical sensor 20 for detecting the dog 18 is attached to a holder 19 that holds the rear portion of the shaft 16.
The holder 19 is fixed to the lower part of the slider 15. A spring 21 is attached to the shaft 16 between the holding body 19 and the fixture 22, and the spring force causes the shaft 16 to move.
Is rapped in its longitudinal direction.

Therefore, when the slider 15 of the rodless cylinder slides to the right, the guide rod 11, shaft 16 and pusher 17 also move to the right. This allows
The pusher 17 pushes the substrate 6 on the conveyors 2 and 3 onto the conveyors 4 and 5. Here, if the substrate 6 is caught by something during the pushing, a large abnormal load is applied to the pushing element 17, and due to this abnormal load, the shaft 16 relatively retracts because it does not compress the spring 21. Therefore, the dog 18 integrated with the shaft 16 escapes from the sensor 20 (see the dog 18 shown by the chain line), and the sensor 20 detects this. Therefore, the detection signal of the sensor 20 alerts the operator that an abnormal situation has occurred by, for example, sounding a buzzer.

[0008]

As described above, the conventional curing furnace detects a trouble at the time of pushing by detecting the abnormal load applied to the pushing element 17, but the conventional pushing mechanism has a problem. There were the following problems. That is, since the long guide rod 11 is horizontally arranged above the heating chamber 1, and the guide rod 11 largely projects from the heating chamber 1, a large installation space is required in the longitudinal direction of the guide rod 11. There was a problem. Further, when the substrate 6 is large, the pushing stroke by the pushing element 17 must be lengthened, and in order to lengthen the pushing stroke, it is necessary to lengthen the shaft 16, but if the shaft 16 becomes large and heavy. Since the shaft 16 cannot move with a small load, it becomes difficult to detect an abnormal load acting on the pusher 17 with the dog 18 and the sensor 20 with high sensitivity, and it is impossible to detect a trouble at the time of pushing quickly and reliably. There was a problem.

Therefore, it is a first object of the present invention to provide a heating device which can save space. A second object of the present invention is to provide a heating device that can detect troubles during pushing quickly and reliably.

[0010]

To this end, the present invention is directed to a heating chamber, a guide portion disposed inside the heating chamber for guiding a substrate to be pushed by a pusher, and the pusher in the substrate pushing direction. A reciprocating member which holds the heater displaceably and can reciprocate in the heating chamber along the guide portion, a reciprocating member for reciprocating the reciprocating member by pulling the reciprocating member with a towing string, and a pusher in the pushing direction of the substrate. A urging body for urging, a light shielding plate which operates in conjunction with displacement of the pusher against the urging body, and a detection means for detecting the operation of the light shielding plate from outside the heating chamber. Is.

[0011]

According to the above construction, when an abnormal load is applied to the pusher element and the pusher element is displaced against the urging force of the urging body, the shield plate operates in conjunction with this and this operation is performed in the heating chamber. The trouble is promptly and surely detected by the detection means provided outside the device.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, a heating apparatus according to an embodiment of the present invention will be described with reference to the drawings, taking a curing furnace as an example. 1 is a perspective view of a curing furnace according to an embodiment of the present invention, FIG. 2 is a sectional view of the same,
3 and 4A and 4B are side views of the same portion. In each drawing, the configuration other than the board pushing mechanism is the same as that of the above-mentioned conventional example, and therefore, the same parts as those of the above-mentioned conventional example are denoted by the same reference numerals and the description thereof is omitted. In FIG. 2, reference numeral 25 denotes an inlet for loading the substrate 6 into the heating chamber 1,
Reference numeral 26 is an outlet for transferring the substrate 6 to the outside of the heating chamber 1. Further, FIG. 3 shows a state in which the substrate 6 placed on the rack (guide portion) 9 of the transport conveyors 2 and 3 is transported from the lower portion to the upper portion. Note that well-known mechanisms such as a mechanism for loading the substrate 6 into the heating chamber 1 through the inlet 25 and a mechanism for unloading the substrate 6 through the outlet 26 are omitted.

Next, a pushing mechanism for pushing the substrate from the first transport conveyor section (transport conveyors 2, 3) to the second transport conveyor section (transport conveyors 4, 5) and an abnormal load acting on the pusher element. The detection mechanism will be described. 1 and 2
In the above, a guide rail 31 is provided on the upper surface of the heating chamber 1, and a slider 3 that slides on the guide rail 31 by a magnetic force.
2 are provided. This guide rail 31 and slider 3
Reference numeral 2 constitutes a rodless cylinder. A frame 33 is installed on the slider 32.

Pulleys 37, 38, 3 are provided above the heating chamber 1.
9, 40 are provided. These pulleys 37-40
Two wires 41, which serve as a towing string, are stretched around the wire. As the string, other than the wire, a chain or a belt may be used. In FIG. 1, a mover (reciprocating member) 42 is provided in the upper part inside the heating chamber 1.
The mover 42 is slidably held by two horizontal guide rods 43. The ends of the two wires 41 are attached to the mover 42 and the frame 33, respectively.

In FIG. 1, a plate 44 is attached to the side surface of the moving element 42. A lever-shaped pusher 45 is rotatably attached to the plate 44 by a pin 46. The plate 44 and the pusher element 45 are connected by a spring (biasing body) 47, and the spring force of the spring 47 causes the pusher element 45 to press against a pin-shaped stopper 48 projecting from the plate 44. .

In FIG. 2, at the top of the plate 44,
A shield plate 50 having a hook-shaped cross section is rotatably attached by a pin 51. Reference numeral 52 denotes a pin protruding from the pusher 45, which prevents the shield plate 50 from rotating in the clockwise direction due to the weight of the shield plate 50 itself. Further, a light emitting sensor 53 and a light receiving sensor 54 are provided on the outer wall surface of the heating chamber 1 corresponding to the shielding plate 50. Normally, the light emitted from the light emitting sensor (light emitting unit) 53 enters the light receiving sensor (light receiving unit) 54 through the optical path parallel to the rack 9, but as will be described later in detail, the shielding plate 50 is used. When is rotated, the optical path is blocked and the light entering the light receiving sensor 54 is blocked.

This curing furnace is constructed as described above, and the operation of the whole will be described below. In FIG. 1, an arrow N
The substrate 6 carried onto the rack 9 between the conveyors 2 and 3 as indicated by 1 is conveyed from the lower part to the upper part (see arrow N3 in FIG. 2). The substrate 6 transported to the top of the transport conveyors 2 and 3 has the transport conveyors 4 and
It is pushed onto the rack 9 between 5 (see arrow N4 in FIG. 2).

This pushing is performed as follows. That is, in FIG. 2, when the slider 32 constituting the rodless cylinder slides leftward on the guide rail 31, the wire 41 rotates in the direction of the arrow N5, which causes the slider 42 to move.
(Fig. 1) moves to the right. Then, the pusher 45 moves rightward integrally with the mover 42, and pushes the substrate 6 from the rack 9 of the transport conveyors 2 and 3 to the rack 9 of the transport conveyors 4 and 5 at the lower end portion thereof. The substrate 6 pushed onto the rack 9 of the transfer conveyors 4, 5 is transferred from the upper part to the lower part by the rotation of the transfer conveyors 4, 5 (see arrow N6 in FIG. 2).
When it reaches the bottom of the conveyors 4, 5, the exit 2
6 is carried out of the heating chamber 1 (see arrow N2).

Next, the operation when trouble occurs during pushing will be described. As described above, when the pusher 45 pushes the substrate 6, the substrate 6 may be caught by the belt portions of the conveyors 2 to 5, and a large abnormal load may act on the pusher 45. In this case, as shown in FIG. 4 (b), the pusher element 45 causes the spring 4 to move due to the abnormal load.
7 is extended and is rotated clockwise about the pin 46 to be displaced. Then, the shielding plate 50 is pushed by the pin 51 and rotates counterclockwise to shield the optical path. Therefore, the light emitted from the light emitting sensor 53 does not enter the light receiving sensor 54, and it is detected that a trouble has occurred. Therefore, the output signal of the light receiving sensor 54 alerts the operator that an abnormal state has occurred, such as by sounding a buzzer (not shown), or stops the operation of the apparatus. Therefore, the worker takes countermeasures against this abnormal state. As described above, according to the present device, the occurrence of a trouble at the time of pushing can be detected swiftly and surely, and therefore, the after-action can be swiftly performed.
The present invention is not limited to the above embodiment,
For example, instead of the light emitting sensor 53 and the light receiving sensor 54, a reflective sensor may be used. Further, the spring 47 may be attached between the shield plate 50 and the plate 44, and the shield plate 50 may be urged in the direction in which the optical path is not shielded, thereby indirectly urging the pusher 45 to the side for pushing the substrate 6. . Furthermore, the present invention can be applied not only to the curing furnace but also to a reflow device for soldering electronic components to a board.

[0020]

As described above, according to the present invention, a trouble in pushing a substrate from a first transport conveyor section to a second transport conveyor section by a pusher can be detected quickly and reliably with high sensitivity. be able to. In addition, by stretching a tow string such as a wire along the heating chamber, the whole can be made compact and space can be saved.

[Brief description of drawings]

FIG. 1 is a perspective view of a curing furnace according to an embodiment of the present invention.

FIG. 2 is a sectional view of a curing furnace according to an embodiment of the present invention.

FIG. 3 is a partial side view of a curing furnace according to an embodiment of the present invention.

FIG. 4A is a partial side view of a curing furnace according to an embodiment of the present invention. FIG. 4B is a partial side view of a curing furnace according to an embodiment of the present invention.

FIG. 5 is a perspective view showing a main configuration of a conventional curing furnace.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 heating chamber 2,3 transfer conveyor (1st transfer conveyor part) 4,5 transfer conveyor (2nd transfer conveyor part) 6 board 7 chip 8 bond 31 guide rail (reciprocating movement means) 32 slider (reciprocating movement) Means) 45 pusher 50 shield plate 53 light emitting sensor 54 light receiving sensor

Claims (3)

[Claims] 1. A heating chamber, a guide portion disposed inside the heating chamber for guiding a substrate to be pushed by a pusher, and the pusher held so as to be displaceable in the pushing direction of the substrate. A reciprocating member capable of reciprocating along the guide portion, a reciprocating means for reciprocating the reciprocating member by pulling the reciprocating member with a towing string, and a biasing force for urging the pusher element in the pushing direction side of the substrate. A body, a light-shielding plate that operates in association with the displacement of the pusher against the biasing body, and a detection unit that detects the operation of the light-shielding plate from outside the heating chamber. Characteristic heating device. 2. The detection means is a pair of a light emitting part and a light receiving part which form a parallel optical path along the guide part in the heating chamber, and the light shielding plate operates so as to shield the optical path. The heating device according to claim 1, wherein: 3. A heating chamber, a first transfer conveyor unit disposed inside the heating chamber for transferring a substrate from a lower part to an upper part, and the first transfer conveyor unit provided in parallel with each other. A heating device comprising: a second transfer conveyor section that transfers a substrate from an upper part to a lower part; and a pushing means that pushes the substrate from the first transfer conveyor section to the second transfer conveyor section. A reciprocating member attached to the upper part of the inside of the heating chamber so as to reciprocate in the pushing direction, and a reciprocating member disposed on the reciprocating member so as to be displaceable in the substrate pushing direction, An urging body for urging the pusher element in the pushing direction, and a reciprocating member arranged outside the heating chamber towed by a towing string to draw the first transport conveyor section and the second conveyer section.
Reciprocating means for reciprocating between the transfer conveyor units, and an urging body due to an abnormal load when the pusher pushes the substrate from the first transfer conveyor unit to the second transport conveyor unit. And a detecting means for detecting from outside the heating chamber that the optical element is shielded by the operation of the shielding plate and the pusher is displaced. A heating device characterized by being provided.