JPH0839415A - Wire saw device - Google Patents

Abstract

PURPOSE:To provide a wire saw device capable of making its work supporting structure and slurry feeding structure simplified. CONSTITUTION:A slurry tank 25 is separably arranged opposite to a wire 6 between groove rollers 7, 8. The bottom surface of the slurry tank 25 is formed with a plurality of feeding grooves 28 extending in the orthogonal direction to the traveling direction of the wire 6. The bottom part of the slurry tank 25 is arranged with a clamp device 36 for mounting a work 10 in a removable manner.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a semiconductor material,
The present invention relates to a wire saw device for cutting brittle materials such as magnetic materials and ceramics with a wire.

[0002]

2. Description of the Related Art In a wire saw device of this type, a wire is supported by a plurality of rollers, and the wire is run in one direction. Then, while the slurry containing abrasive grains is supplied to the wire at the position between the rollers, the work is pressed against the wire at the same position, and the work is sliced by the lapping action of the wire and the abrasive grains.

In a conventional wire saw device of this type, a pipe is circulated in the vicinity of a supporting portion for supporting a work, and a slurry is supplied onto the wire from holes arranged in the length direction of the pipe. It

[0004]

Therefore, the work supporting portion may be restricted by the slurry pipe, and
A mechanism for supporting the work so as not to interfere with the pipe is required, and there is a problem that the configuration becomes complicated as in the above.

Further, in the wire saw device, since the cutting amount per unit time for the work is very small,
The cutting operation is continuously performed for a long time. For this reason, if the slurry is not uniformly supplied over the entire width of the wire traveling area, the cutting conditions vary depending on the location, and uniform processing cannot be performed. However, in the configuration in which the slurry is supplied from the pipe, the slurry supply pressure is different between the hole on the front end side and the hole on the base end side of the pipe due to pressure loss in the pipe, etc., and it is difficult to uniformly supply the slurry.

[0006] Therefore, for example, the actual exploitation Sho 58-27057
In the gazette, various kinds of members such as a mesh-shaped member for weakening the falling force of the slurry on the way from the pipe to the processing unit, a member for pooling and overflowing the slurry, a member for guiding the overflowed slurry to the processing unit, etc. Parts are provided. Therefore, the apparatus of this publication has a more complicated structure.

The present invention has been made by paying attention to the problems existing in the above conventional techniques. The point is that the work supporting part and the slurry supplying part can be integrated, the structure of the slurry supplying system can be simplified, and the slurry can be uniformly supplied over the entire width of the wire. To provide a wire saw device.

[0008]

In order to achieve the above object, in the invention of the wire saw device according to claim 1, a slurry tank for storing the slurry is provided above the wire between the rollers, and the slurry tank is provided. A plurality of slurry supply holes were provided on the bottom wall of the tank.

According to another aspect of the present invention, the slurry tank is vertically movable, and the slurry tank is provided with a work mounting means for removably mounting the work by opening the slurry supply hole in the bottom wall of the slurry tank. Was set up.

According to a third aspect of the invention, in the invention of the first or second aspect, the slurry tank has a constant amount supply means for uniformly supplying the slurry to the wire between the rollers over the entire wire traveling width. .

According to a fourth aspect of the present invention, in the third aspect of the invention, the fixed amount supply means includes a liquid level setting means for making the liquid level of the slurry in the slurry tank constant. According to the invention of claim 5, in the invention of claim 4, the liquid level setting means is an overflow port provided on a side wall of the slurry tank.

According to the invention of claim 6, the inventions of claims 1 to 5
In any one of the above aspects, the slurry supply hole is a groove extending in a direction perpendicular to the running direction of the wire. Claim 7
According to the invention of claim 6, in the invention of claim 6, the groove is wider on the upper opening side than on the lower opening side.

According to the invention of claim 8, the inventions of claims 2 to 7
In any one of the inventions, the work mounting means has a support member for supporting and fixing the holding member, which holds the work by adhesion, from the lower surface side thereof.

According to a ninth aspect of the invention, in the eighth aspect of the invention, the support member is provided between a position supporting the holding member and a position separated from the holding member by a cam action of a manually operable cam member. Will be moved.

According to a tenth aspect of the invention,
In the invention described in any one of 9 to 9, the opening / closing plate capable of selectively opening / closing a plurality of slurry supply holes is provided in the slurry tank.

[0016]

According to the first aspect of the invention, the slurry is stored in the slurry tank and naturally falls from the tank. Therefore, the slurry piping is reduced and the structure is simplified.

According to the second aspect of the present invention, since the work is supported by the slurry tank and is moved up and down for cutting, the work supporting mechanism is not required and the structure is simplified.

According to the third aspect of the invention, the slurry is uniformly supplied over the entire width of the wire traveling area, and uniform cutting is possible. According to the invention described in claim 4, uniform supply of the slurry is accurately performed based on the setting of the liquid level.

In the fifth aspect of the invention, the liquid level is set only by providing the overflow port, and the configuration is simple. In the invention described in claim 6, the slurry is simultaneously supplied so as to form a screen shape over the entire wire traveling region, which can further contribute to uniform cutting.

According to the seventh aspect of the invention, the slurry screen is surely formed, and like the above, it can contribute to the uniform cutting process. In the invention described in claim 8,
Workpieces are attached and detached simply by moving the support member up and down.
The attachment / detachment work becomes easy.

According to the ninth aspect of the present invention, the work can be attached / detached with one touch by the cam action of the cam member, and the attachment / detachment work can be facilitated in the same manner as described above. In the tenth aspect of the invention, the slurry is supplied only to the portion where the slurry needs to be supplied.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a wire saw device embodying the present invention will be described in detail below with reference to FIGS.

As shown in FIGS. 1 to 3, the cutting mechanism 5 is mounted on the apparatus frame 2. The driving groove roller 7 and the driven groove roller 8 are arranged in parallel, and a large number of annular grooves 7a, 8a are formed at a predetermined pitch on the outer circumference thereof. In addition, in the drawings, the groove 7a is drawn wider and smaller than the actual size for easy understanding.

A single cutting wire 6 made of steel wire is continuously wound around and supported by the annular grooves 7a and 8a of the groove rollers 7 and 8, respectively. The drive groove roller 7 is rotated by a motor (not shown), so that the wire 6 travels in one direction or two directions while the driven groove roller 8 is rotated.

The work supporting / slurry supplying mechanism 9 is supported above the cutting mechanism 5 on the frame 3 so as to be vertically movable, and a plurality of works 10 are detachably set on the lower part thereof.

Then, the work supporting / slurry supplying mechanism 9 is lowered toward the cutting mechanism 5 while the wire 6 is traveling between the groove rollers 7 and 8 of the cutting mechanism 5 in one direction or in both directions. At this time, the slurry containing abrasive grains is supplied onto the wire 6, the work 10 is pressed against the wire 6, and the work 10 is sliced by the lapping action.

The reel mechanism 11 includes a pay-out reel 12 for paying out the wire 6, and a take-up reel 13 for taking up the wire 6. The traverse mechanism 14 feeds the wire 6 from the feed reel 12 and the take-up reel 1
The winding of the wire 6 around the wire 3 is guided while traversing.
The wire tension applying mechanism 15 is arranged between the reel mechanism 11 and the cutting mechanism 5, and a predetermined tension is applied to the wire 6 between the groove rollers 7 and 8 by the weight 23 via the guide rollers 16 and 17. To be done. Wire tension reduction mechanism 1
8 is arranged between the take-up reel 13 and the tension applying mechanism 15, and the tension of the wire 6 in this portion is reduced.

Next, the work support / slurry supply mechanism 9
More specifically, as shown in FIGS. 1 and 2 to 6, the saddle 26 is supported on the column 24 of the frame 2 so as to be movable up and down by a driving unit (not shown). The airtight rectangular box type slurry tank 25 is fixed to the lower surface of the saddle 26. The bottom wall 27 of the slurry tank 25 can be replaced according to the size of the work to be supported. A plurality of (four in the present embodiment) supply grooves 28 as slurry supply holes are formed so as to extend in a direction orthogonal to the traveling direction of the wire 6 between the groove rollers 7 and 8, and an upper portion thereof has a taper extending upward. The wide portion 28a is formed. Then, the slurry 29 containing abrasive grains is stored in the slurry tank 25, and the slurry 29 is naturally dropped from the supply groove 28 onto the wire 6 between the groove rollers 7 and 8 so as to form a screen shape on the wire 6. Is supplied to.

An overflow port 30 as a fixed amount supply means and a liquid level setting means is formed on a side wall of the slurry tank 25, and a slurry 29 in the slurry tank 25 is passed from the overflow port 30 through an overflow pipe 31 to a tank (not shown). Will be collected. The valve 22 is for opening and closing the overflow pipe 31. The supply pipe 32 is arranged in the saddle 26 so as to communicate with the upper portion of the slurry tank 25, and when the valve 33 is opened, the slurry 29 is replenished from the tank to the slurry tank 25 through the supply pipe 32. The amount of replenishment of the slurry 29 is larger than the amount of the slurry 29 that naturally falls from the supply groove 28, and the surplus amount is collected from the overflow port 30. Therefore, the liquid level of the slurry in the slurry tank 25 is held at the position of the overflow port 30. As a result, the liquid level of the slurry 29 in the slurry tank 25 is maintained at a predetermined level, and the supply amount of the slurry 29 from the supply groove 28 is kept constant. Moreover, the slurry tank 25 has an overflow port 3
It is maintained at atmospheric pressure through 0.

The air pipe 34 is arranged in the saddle 26 so as to communicate with the upper portion of the slurry tank 25. Then, with the operation of the cutting device stopped and the inside of the slurry tank 25 being empty, the valve 33 of the supply pipe 32 is
After the valve 22 of the overflow pipe 31 is closed and the valve 35 is opened, high pressure air is supplied from the air supply source (not shown) into the slurry tank 25 through the air pipe 34. As a result, the slurry 29 remaining in the supply groove 28 is blown out to the outside.

Clamping device 3 constituting work mounting means
6 is disposed on both side walls of the slurry tank 25, and a plurality of (three in this embodiment) works 10 are bonded to a carbon pallet 37 as a holding member,
It is detachably attached to the bottom of the slurry tank 25. Recesses 37a are formed on both side edges of each pallet 37, and when a plurality of pallets 37 are arranged so as to be joined to each other, a gap 21 corresponding to the supply groove 28 is formed between the pallets 37 by the recess 37a. At the upper part of the gap 21, there is formed a wide taper portion 21a that widens upward. Further, in the arrangement state of the pallet 37, each work 1
0s are arranged close to each other with a slight gap therebetween. The supply groove 28 is opened on both sides of each work 10 through this gap.

Each of the three clamp shafts 38 is movably supported on the protrusions 25a on both side walls of the slurry tank 25 at predetermined intervals so as to be vertically movable, and a large diameter portion 38a is formed at the upper end thereof. ing. The clamp shaft 38 is prevented from rotating by the key 4 and the key groove 38b. The clamp body 39 as a support member is fixed to the lower end of each clamp shaft 38, and when the clamp shaft 38 is raised, the clamp body 39 engages with the lower surfaces of both sides of the three pallets 37, respectively, and the work 1
The zeros are clamped to the bottom of the slurry tank 25 in close proximity to each other. The forked portion 39a is formed at the tip of the pair of clamp bodies 39 located in the center. This is because, for example, when processing a work having a large width, when mounting two pallets 37 having a large width, as shown by a chain line in FIG.
The positions of the opposite ends of the joint portion of the two pallets 37 are evenly clamped by the fork portion 39a. At this time,
Another bottom wall having a supply groove 28 in the center is exchangeably mounted so as to correspond to the gap 21 between the two pallets 37.

The pair of operating shafts 44 is the slurry tank 25.
Are rotatably supported on the both side walls of the vehicle through brackets 25b about a horizontal axis, and the operation handles 4 are attached to their ends.
5 is attached so as to be foldable. Each of the three eccentric shaft portions 44a as cam members is formed on both operation shafts 44 at predetermined intervals so as to correspond to the clamp shaft 38.

The operating cylinder 40 is fitted on the upper end of each of the clamp shafts 38 so as to be relatively movable, and the lid 41 is provided on the upper end thereof.
Is attached. A plurality of disc springs 42 are provided for each operating cylinder 4.
It is interposed between the inner bottom portion of 0 and the spring holding seat 38a of the clamp shaft 38, and urges the clamp body 39 to the upper clamp position via the clamp shaft 38. The through hole 43 is formed through the outer wall of each actuating cylinder 40, and parallel engaging portions 43a and 43b are formed above and below them. The eccentric shaft portions 44a are engaged with the engagement portions 43a and 43b, respectively.

As shown in the left side of FIG. 3 and FIG. 6, when the operation handle 45 is rotated to the upper position, each eccentric shaft portion 44a is moved to the upper eccentric position,
The upper engaging portion 4 of the through hole 43 is formed by the cam action of the eccentric shaft portion 44a.
The actuating cylinder 40 is moved upward via 3a. As a result, each clamp body 39 is moved upward by the action of the disc spring 42 until it contacts the work 10, and is held at the clamp position. At this time, there is a gap between the upper end surface 38b of the clamp shaft 38 and the eccentric shaft portion 44a, and between this, the disc spring 42
The holding force of the clamp body 39 with respect to the work 10 is allowed. Further, as shown by the two-dot chain line on the right side of FIG. 3 and FIG. 6, when the operation handle 45 is rotated to the lower position, each eccentric shaft portion 44a is moved to the lower eccentric position,
The actuation cylinder 40 is moved downward by the cam action of the eccentric shaft portion 44a. During this movement, the upper end surface 3 of the clamp shaft 38
8b is pushed by the eccentric shaft 44a and moves downward, so that each clamp body 39 is separated from the work 10 and moved to the unclamp position below.

The work 10 is carried in and out of the slurry tank 25 by a work carrier truck (not shown) having a pair of support plates 46. The work 10 is a pair of support plates 4
6 is carried to a work mounting position below the slurry tank 25 while being supported on the work 6, and is clamped by the clamp body 39, the work carrier is moved to the retracted position in an empty state. Even when the work is unloaded, the work carrier moves to the work mounting position, receives the unclamped work 10 from the slurry tank 25, and carries it out.

As shown in FIG. 5, a pair of stoppers 47 are provided on the lower surface of the nozzle plate 27 so as to engage with the edges of the pallet 37 when the work 10 is carried in below the slurry tank 25. , The work 10 is positioned at a predetermined position.

In order to cut a work using the wire saw device of this embodiment, first, for example, three pallets 37 to which the work 10 is bonded and fixed are set on the bottom surface of the bottom wall of the slurry tank 25. In this state, by operating both operation handles 45, all the clamp shafts 38 are moved upward via the disc springs 42 by the cam action of the eccentric shaft portion 44a, and the three pallets 37 are simultaneously held by all the clamp bodies 39. Fixed. In this way, the operating handle 45
The pallet 37 can be securely fixed with one touch only by operating.

Then, the valve 33 is opened and the slurry 29 is supplied into the slurry tank 25.
The slurry 29 stored inside is passed through the supply groove 28, the gap 21 between the pallets 37 and the work 10 and is supplied in a screen shape to the wire 6 between the groove rollers 7 and 8. Further, the slurry tank 25 holding the work is moved downward, and the work is pressed against the wire 6 running around between the support rollers 7 and 8. As a result, the work 10 is sliced by the abrasive grains in the slurry 29.

During the cutting process, the liquid level in the slurry tank 25 is kept constant at the position of the overflow port 30 due to the outflow of the slurry 29 from the overflow port 30. Therefore, the falling speed of the slurry 29 that naturally falls from the supply groove 28, that is, the falling pressure is always constant. Moreover, the supply groove 28
Since the wide portions 28a and 21a are formed in the upper part of the gap 21 respectively, the flow of the dropped slurry 29 is not disturbed. Therefore, in combination with the supply groove 28 extending in a direction perpendicular to the traveling direction of the wire 6,
A uniform screen-shaped slurry flow is constantly and stably supplied to the traveling area of the wire 6 so that uniform cutting conditions can be maintained over the entire traveling area of the wire 6.

As described above, in this wire saw device, the slurry 2 is naturally dropped from the slurry tank 25.
9 are supplied. Therefore, unlike the prior art, the pipe for supplying the slurry is not required, and the structure is simplified. Moreover, in this wire saw device, the slurry tank 2
By making the liquid level of the slurry 29 in 5 constant, it becomes possible to quantitatively supply the slurry 29. Therefore, a means such as a mesh for quantitatively supplying the slurry is not required between the slurry supply section and the cutting processing section.

As described above, in this wire saw device, various parts which are required in the conventional structure are not required, and the structure is simplified. Moreover, since the structure for keeping the liquid level in the slurry tank 25 constant is only provided with the overflow port 30, the structure for holding the liquid level is extremely simple.

Moreover, since the slurry tank 25 also serves as a support for the work 6, a dedicated mechanism for supporting the work 6 is not necessary, and the structure can be simplified from this point as well. After the cutting process is completed, the supply of the slurry 29 into the slurry tank 25 is stopped, and the slurry tank 25 is emptied. The valve 35 of the air pipe 34 is opened while the valve 22 of the overflow pipe 31 and the valve 33 of the supply pipe 32 are closed. Therefore, high-pressure air is supplied into the slurry tank 25, the slurry 29 remaining in the supply groove 28 is blown off, and the slurry 29 is prepared for the next processing operation.

On the other hand, by rotating the operating handle 45 to the lower position, the operating cylinder 40 is moved downward, the clamp shaft 38 is also moved downward, and each clamp body 39 is moved to the unclamp position. Therefore, the pallet 37
The work 6 can be removed from the apparatus by releasing the fixing to the. In this way, the work 6 can be easily removed with one touch.

[0045]

Another Embodiment Next, another embodiment of the present invention will be described with reference to FIGS. First, in the second embodiment shown in FIG. 7, the frame-shaped opening / closing plate 5 is provided on the lower surface of the slurry tank 25.
1 is movably attached in the traveling direction of the wire 6 by a screw 52 screwed through an elongated hole 53, and a handle 54 is provided on the upper portion of the front end thereof. And the groove rollers 7,
When the traveling direction of the wire 6 between 8 is changed, the opening / closing plate 51 is moved to the upstream side in the traveling direction of the wire 6 by the handle 54, and the supply groove 28 located on the most upstream side in the traveling direction of the wire 6 is opened. At the same time, the supply groove 28 located on the most downstream side is closed.

That is, when the wire 6 delivered from the delivery reel 12 is taken up by the take-up reel 13, the functions of the delivery and take-up reels 12 and 13 are reversed, and the wire 6 is wound.
The traveling direction of is switched. With this switching, the opening / closing plate 51 is arranged on the right side or the left side of FIG. 7. Since the slurry 29 supplied from the supply groove 28 on the most downstream side in the wire traveling direction does not participate in cutting, the supply groove 28 on the most upstream side is closed.

Next, in the third embodiment shown in FIG.
A frame-shaped opening / closing plate 51 is arranged on the inner bottom surface of the slurry tank 25 so as to be movable in the traveling direction of the wire 6. An operating rod 55 is provided on a side wall of the slurry tank 25 so as to be movable in the same direction as the opening / closing plate 51, and an inner end thereof is connected to the opening / closing plate 51 via a connecting plate 56. A cylinder 57 is attached to the outer surface of the slurry tank 25, and a piston rod 58 of the cylinder 57 is connected to an operating rod 55 via a connecting plate 59.

Then, similarly to the second embodiment, when the traveling direction of the wire 6 between the groove rollers 7 and 8 is changed, the opening / closing plate 51 is moved by the cylinder 57 via the actuating rod 55. Will be moved upstream. As a result, the supply groove 28 located on the most upstream side in the traveling direction of the wire 6 is opened, and the supply groove 28 located on the most downstream side is closed. As a result, the slurry is supplied only to the required portion.

Further, in this embodiment, a pair of objects 60, 61 to be detected are provided on the operating rod 55 at predetermined intervals, and a slurry is provided so as to correspond to these objects 60, 61. A pair of sensors 62, 6 are provided on the outer surface of the tank 25.
3 are provided. Then, when the opening / closing plate 51 is moved to either one of the two positions, the detection objects 60 and 61 approach the sensors 62 and 63, and the position detection signals are output from the sensors 62 and 63. The operation of the cylinder 57 is stopped based on this position detection signal.

The present invention is not limited to the configuration of the above-described embodiment, and may be embodied by making the following arbitrary changes without departing from the spirit of the present invention. (1) The clamp device 36 as the mounting means is appropriately modified and configured. For example, in the above-described embodiment, the clamp shaft 38 is configured to be vertically moved by the cam, but may be configured to be vertically moved by the link mechanism. (2) In the above embodiment, the operating shaft 44 of the clamp device 36
Although the rotation of the operating shaft 44 is performed by the handle 45, the operation shaft 44 is configured to be rotated by driving a motor or a cylinder. (3) In the above-described embodiment, the slurry tank 25 that supports the work 6 is configured to be moved up and down, but the slurry tank 25 is fixed and the groove rollers 7 that support the wire 6,
Configure 8 to move up and down. (4) In the above embodiment, the work 6 was supported by the slurry tank 25, but the work 6 is cut by moving the work 6 upward by providing a work supporting portion on the opposite side of the slurry tank 25, that is, on the lower side of the wire 6. Have such a configuration. (5) On the surface of the clamp body 39 supporting the pallet 37,
Provide elastic material such as rubber for cushioning. (6) In the first embodiment, a liquid level sensor is provided on the inner surface of the slurry tank 25, the liquid level sensor detects the liquid level of the slurry 29, and a predetermined liquid level is obtained based on the detection signal. Control to keep it at.

The technical idea other than the claims understood from the above-mentioned embodiment will be described below. (1) The wire saw device according to claim 1, wherein a gap is formed between the pallets 37, and the gap forms a slurry supply hole. According to this structure, the supply amount of the slurry 29 can be adjusted by changing the interval between the pallets 37. (2) The wire saw device according to claim 1, wherein an air supply device for supplying high-pressure air is provided inside the slurry tank 25.
With this structure, it is possible to prevent the supply groove 28 from being clogged.

[0052]

Since the present invention is constructed as described above, it has the following excellent effects.

According to the first aspect of the present invention, since the slurry tank is provided above the wire between the rollers and the slurry is directly supplied to the wire by a natural drop, a pipe for supplying the slurry is not required, and the structure is simple. Can be

According to the second aspect of the present invention, since the work is supported by the slurry tank and moved up and down, the work supporting part and the slurry supplying part are integrated, and a separate work supporting mechanism is not required. Simpler configuration.

According to the third aspect of the invention, the slurry is uniformly supplied over the entire width of the wire traveling area, and uniform cutting is possible. According to the invention of claim 4,
It is possible to accurately supply the slurry uniformly based on the setting of the liquid level.

According to the invention described in claim 5, the liquid level can be set only by providing the overflow port, and the configuration is simple. According to the invention described in claim 6, the slurry can be simultaneously supplied so as to form a screen shape over the entire wire traveling region, which can further contribute to uniform cutting.

According to the seventh aspect of the present invention, the slurry screen can be reliably formed, and it is possible to contribute to the uniform cutting process as described above. According to the invention described in claim 8, the work can be attached and detached only by vertically moving the support member, and the attachment and detachment work can be easily performed.

According to the ninth aspect of the present invention, the work can be attached / detached with one touch by the cam action of the cam member, and the attachment / detachment work is facilitated in the same manner as described above. Claim 1
According to the invention described in No. 0, the slurry is supplied only to the necessary portion, and the useless use of the slurry can be prevented.

[Brief description of drawings]

FIG. 1 is a first wire saw device embodying the present invention.
FIG. 3 is a partially cutaway front view showing a work mounting / slurry supply mechanism according to an embodiment.

FIG. 2 is a front view showing the entire wire-type cutting mechanism.

FIG. 3 is a partial cross-sectional view taken along the line III-III in FIG.

FIG. 4 is a partially cutaway plan view showing the work mounting / slurry supply mechanism of FIG. 1 with a saddle removed.

FIG. 5 is a partially cutaway bottom view of the work mounting / slurry supply mechanism.

FIG. 6 is a partial cross-sectional view showing an enlarged work clamp structure in the work mounting / slurry supply mechanism of FIG. 3;

FIG. 7 is a partial sectional view showing a second embodiment of the work mounting / slurry supply mechanism of the present invention.

FIG. 8 is a partial sectional view showing a third embodiment of the work mounting / slurry supply mechanism in the same manner.

[Explanation of symbols]

5 ... Cutting mechanism, 6 ... Wire, 7 ... Drive groove roller, 8 ... Driven roller, 9 ... Work mounting / slurry supply mechanism, 10 ... Work, 25 ... Slurry tank, 27 ... Bottom wall, 28 ... Supply groove, 29 ... Slurry, 36 ... Clamping device as mounting means, 37 ... Pallet, 39 ... Clamping body, 40 ... Actuating cylinder, 42 ... Disc spring, 44 ... Operation shaft, 44a ... Eccentric shaft portion,
45 ... Operation handle.

Claims (10)

[Claims] 1. A wire, which is supported a number of times around a plurality of parallel rollers, is run, and while a slurry containing abrasive grains is supplied to the wires between the rollers, the work is pressed against the wires at the same position, A wire saw device for cutting a workpiece, in which a slurry tank for storing the slurry is provided above the wire between the rollers, and a plurality of slurry supply holes are provided in the bottom wall of the slurry tank. 2. A wire saw device in which a slurry tank is movable up and down, and the slurry tank is provided with a work mounting means for detachably mounting a work by opening the slurry supply hole in a bottom wall thereof. 3. The wire saw device according to claim 1, wherein the slurry tank has a fixed amount supply means for uniformly supplying the slurry to the wire between the rollers over the entire wire traveling width. 4. The wire saw device according to claim 3, wherein the fixed amount supply means includes a liquid level setting means for making the liquid level of the slurry in the slurry tank constant. 5. The wire saw device according to claim 4, wherein the liquid level setting means is an overflow port provided on a side wall of the slurry tank. 6. The wire saw device according to claim 1, wherein the slurry supply hole is a groove extending in a direction perpendicular to the running direction of the wire. 7. The wire saw device according to claim 6, wherein the groove is wider on the upper opening side than on the lower opening side. 8. The wire saw device according to claim 2, wherein the work mounting means has a supporting member for supporting and fixing the holding member, which holds the work by adhesion, from the lower surface side thereof. 9. The wire saw device according to claim 8, wherein the support member is moved between a position supporting the holding member and a position separated from the holding member by the cam action of the manually operable cam member. 10. The wire saw device according to claim 1, wherein the slurry tank is provided with an opening / closing plate capable of selectively opening and closing a plurality of slurry supply holes.