JPH0836191A - Display device, method for inspecting display device and inspection apparatus - Google Patents

Abstract

PURPOSE:To enable stable inspection of terminal junctures at a high speed by forming the terminal electrodes of a display as laminates of transparent electrodes and metallic films and providing these terminal electrodes with the exposed parts of the transparent electrodes. CONSTITUTION:A substrate 11 consists of a glass substrate and the terminal electrodes 12 consist of the transparent electrodes of an indium system. The terminal electrodes 12 may be provided with the metallic thin films consisting of single materials, such as gold, nickel, aluminum and chromium or their alloys on the transparent electrodes in addition to the transparent electrodes alone at need. Anisotropic conductive adhesives 3 held between the substrate 11 and driving substrate 2 of the display 1 consist of adhesives 32 into which conductive particles 31 are incorporated. The conductive particles 31 in the conductive adhesives 3 existing between the terminal parts 12 and 22 are crushed in such a manner that the particle shapes have the shapes larger than the outside shapes of the particles before use by pressurizing the substrate 11, 24, by which connection is effected. Whether the connecting condition is good or not is judged by viewing through the junctures of the display device or stereoscopically observing the junctures to this terminal electrodes.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention uses a so-called anisotropic conductive adhesive, and is particularly suitable for connecting a large number of fine pattern terminals having a pitch of 100 to 40 .mu.m. Regarding the device.

[0002]

2. Description of the Related Art In recent years, in a display device using a substrate such as a liquid crystal display device, when connecting a drive element of the display device, a terminal electrode of the display substrate and a terminal portion of the drive substrate are anisotropically conductively bonded. They are connected by a chemical agent, which is disclosed in, for example, Japanese Patent Laid-Open No. 53-
It is disclosed in Japanese Patent No. 35194, Japanese Patent Laid-Open No. 3-96921, and the like.

In such a display device, as the display density increases, the number of terminals and the terminal density also increase, which often causes connection failure. Therefore, as a result of studying this state, as shown in Japanese Patent Laid-Open No. 5-273571, the conductive particles are in contact with each other in a substantially circular shape at the terminal connection portion, and a large number of particles are point-contacted or non-contacted in the connection failure portion. It was found that this increased contact resistance. If the pressure is high enough to dissolve the conductive particles, the contact area will increase, but the electrodes of the display substrate will be damaged and the display medium such as liquid crystal will deteriorate. It was also found that the powder was crushed, and the poor contact was rather increased.
Therefore, based on the results of such studies, anisotropic conductive adhesives that can be used for connection of fine pattern terminals having a pitch of 100 to 70 μm and conditions for pressurization / heating thereof have been studied and are being put into practical use.

[0004]

However, in such a display device with a driving element, it is conspicuous that there is a poor connection, and it is necessary to inspect it after the connection work. In other words, since the display gazes at the screen in an attempt to decipher the display contents, if even one electrode with a width of several tens of μm, which is usually overlooked, has a lighting failure, the line of sight will gather at that part and the quality of the entire screen will be degraded. Will be markedly low.

Therefore, it is necessary to inspect the connection state after the connection work is completed, but it is easy to visually inspect a wide one at a time with the naked eye. For example, the number of terminals is 1360 at a pitch of 120 μm.
One sheet can be inspected within 2 minutes for a book or A4 size display device. However, if the pitch is finer than 100 μm, visual inspection is difficult even with a magnifying glass. When I tried to inspect it automatically, the width of the terminal part was about 1500.
μm, the conductive particles in the anisotropic conductive adhesive used are 8 to 4
Since the digit is different from μm, it is difficult to balance the field of view and the resolution, and the speed of image recognition is generally as long as about 0.2 seconds per screen. It takes more than a minute and is inconvenient. In addition, the terminal portion of the driving element and the terminal electrode of the display are made of different materials, and it was unclear what the relationship between the laminated portion of the driving element and the anisotropic conductive adhesive should be if the connection is good.

[0006]

In view of the above points, the present invention has an indicator having a terminal electrode on a substrate, a driving substrate having a terminal portion connected to a driving element, and a terminal electrode of the indicator. And an anisotropic conductive adhesive containing conductive particles, which is located between the drive device and the terminal portion of the drive element.

First, the present invention is to judge the quality of the connection status by observing at least the contour or outer shape of the connection portion by observing or stereoscopically observing the connection portion of the display device, or its terminal connection portion. An image receiving unit that scans each drive substrate in the alignment direction to receive an image of the connection portion, and a contour processing of the conductive particles located at least at the terminal electrode portion from the received image to determine the quality of the connection. Yes, moreover, an indication based on the connection quality judgment that a plurality of conductive particles located between the terminal electrode of the display and the terminal portion of the driving element and having a particle outer shape larger than the particle outer shape before use are included It is in the inspection method of the device.

Next, according to the present invention, an illuminating means for giving an epi-illumination to the terminal connecting portion, an image receiving means for receiving an image of the terminal connecting portion, a contour recognition from the received image, damage of the terminal electrode and a terminal electrode portion. And a processing means for calculating the number or area of the conductive particles located at, or the terminal connection portion is scanned in different observation region sizes in the alignment direction to receive the image of the connection portion. A plurality of image receiving means and a processing means for calculating at least the number or area of the conductive particles located in the terminal electrode portion from the received image, or the terminal connecting portion is directed in the alignment direction. A plurality of image receiving means for scanning the observation areas of the terminal electrodes different from each other and receiving the image of the connection portion, and the number of conductive particles located at least in the terminal electrode portion from the received image. Ku is the inspection device for a display device and a processing means for calculating the area and the like.

According to the present invention, an image receiving means for receiving the image of the connecting portion by scanning the terminal connecting portion only in the observation area near the display surface in the alignment direction, and at least the terminal electrode portion from the received image. An inspection device for a display device having a processing means for calculating the number or area of conductive particles, or an image receiving means for receiving an image of a terminal connecting portion, and a terminal based on a luminance signal or a color signal of the received image. A device having a processing means for judging the damage of the electrode or for calculating the number or area of the conductive particles located at the terminal electrode portion, or the device having the terminal connection portion coaxially radiated onto a plurality of positions with respect to one drive substrate. Illuminating means for illuminating, image receiving means for scanning the illuminated terminal connecting portion for each drive substrate and receiving an image of the connecting portion, and a position of at least a terminal electrode portion from the received image An inspection device for a display device having a processing means for calculating the number or area of Rushirubeden particles.

The present invention also provides a first display device thereof.
Means for specifying the terminal electrode portion of the terminal and conveying it to the work area, illuminating means for giving epi-illumination to the terminal connecting part in the work area, and image receiving means for receiving the image of the terminal connecting part upon receiving the illumination of the illuminating means. And a reversing means for reversing the display device in the work area to identify the other terminal electrode portion and transporting it to the work area, and contour recognition from the received image, damage to the terminal electrode and conductive particles located in the terminal electrode portion. Or a lighting means for illuminating the terminal connection part from the front and back of the display device and a transparent lighting from the substrate side in the terminal connection part. Illumination selecting means, image receiving means for receiving the image of the terminal connection portion by receiving the illumination of the illuminating means, contour recognition from the received image, damage to the terminal electrode and position on the terminal electrode portion It is obtained and a processing means for calculating the number or area of Rushirubeden particles.

According to the present invention, in these inspections, the terminal electrode of the display is made of a laminated body of a transparent electrode and a metal film,
When the exposed portion of the transparent electrode is provided, and the exposed portion is provided for each drive substrate, the terminal connection portion is scanned for each drive substrate in the alignment direction and is provided in advance for each drive substrate. To provide a detection device for a display device provided with image receiving means for receiving an image of a connection portion composed of a transparent electrode from a portion where a metal film is removed from a terminal electrode, and processing means for carrying out contour processing of conductive particles from the received image. is there.

[0012]

As a result, the connection state at the terminal connection portion can be judged by the image reception and arithmetic processing, and the inspection can be performed very efficiently in both the 100% inspection and the sampling inspection.

[0013]

FIG. 1 is a plan view of a main part of a display device according to an embodiment of the present invention, FIG. 2 is a sectional view taken along line AA, and FIG. 3 shows particles in a so-called anisotropic conductive adhesive. FIG. In the figure, reference numeral 1 denotes a display having a terminal electrode 12 on a substrate 11, which is an example of a liquid crystal display. The substrate 11 is a glass substrate and the terminal electrode 12 is an indium-based transparent electrode. And this terminal electrode 12 is not only such a transparent electrode,
If necessary, a metal thin film made of a single material such as gold, nickel, aluminum, or chromium or an alloy may be provided on the transparent electrode.

Reference numeral 2 is a terminal portion 2 connected to the driving element 21.
2, which is a drive substrate for so-called tape automated bonding using a flexible substrate 24 such as a polyimide sheet having a thin film lead foil 23 made of copper, tin-plated copper or the like on its surface. The present invention is not limited to this, and may be, for example, a long substrate on which a plurality of driving elements are mounted, or these substrates may be supported and wired by the advisory wiring substrate 25. Also, this terminal part 2
2 is lined with a flexible substrate 24, but the lead foil 2
In the portion of the terminal portion 22 of 3 and the portion to be bent,
The flexible substrate 24 may be removed or the flexible substrate 24 may be provided with a slit.

An anisotropic conductive adhesive 3 is sandwiched between the substrate 11 of the display 1 and the drive substrate 2, and is composed of an adhesive 32 in which conductive particles 31 are mixed. For example, an epoxy resin SEB is used.
Semi-thermosetting resin such as S resin mixture, polyester type, polyamide / epoxy type resin can be used,
As the conductive particles 31, conductive resin beads such as polystyrene and ABS having a diameter of 2 to 10 μm and having a surface plated with metal, or metal particles such as solder, tin, gold, and chrome are used alone or mixed. Can be used. It is desirable that these conductive particles 31 are dispersed in the adhesive 32 as uniformly as possible.

By pressing the substrates 11 and 24, the conductive particles 31 in the conductive adhesive 3 located between the terminals 12 and 22 have a particle shape smaller than that of the particle shape before use. It is crushed to make a big shape and connected. The particle shape in this case is as shown in FIG.
As shown by the hatched portion of a, point contact occurs. If the pressure is too much, the conductive particles are crushed as shown in FIG. Therefore, the outer circumference of the conductive particle 31 is enlarged by a partial crack so that the particle shape of the conductive particle 31 becomes larger than the particle shape before use. As shown in FIG. Most preferably, the connection is made so that The defective connection per lot will be described with reference to FIG.
In the state of 1 to 20% at a contact area of 5 to 20 μm, and in the state of c, 60 to 100% at 0 to 1 μm.

According to the present invention, the quality of the connection state is judged by observing at least the contour or the outer shape of the connection portion by observing the connection portion of the display device with respect to such a terminal connection portion. Is. The present invention will be specifically described below.

FIG. 4 is a plan view of an inspection device for a display device according to an embodiment of the present invention. The display device D has a supply magazine 51, a workbench 50, a non-defective product ejection magazine 53, and a defective product ejection magazine 54.
have. And the hanger 55 is the supply magazine 51.
To the display 1 having the terminal electrodes 12 on the respective edge portions of the two substrates 11 and the terminal portion 22 connected to the driving element 21.
And a drive substrate 2 having a drive substrate 2 connected by an anisotropic conductive adhesive 3 is a transporting unit that transports to a work area 52 by identifying a segment-side terminal electrode portion provided on the first substrate. The hanger 56 is a reversing means for reversing the display device D in the work area 52 to identify the common-side terminal electrode portion provided on the second substrate, which is another terminal electrode portion, and conveys it to the work area 52. Reference numeral 57 denotes a display device D that has been inspected, and sends it out to the ejection magazines 53 and 54 based on the determination result, both of which are so-called transfer robot arms. The work area 52 has, for example, an XY table having a movement amount X and Y of 300 to 600 mm having a transparent non-reflection stage.

Reference numeral 6 denotes an illumination means for performing coaxial epi-illumination in the work area 52. For example, a halogen lamp is used as a light source, and coaxial light is obtained by a condenser lens or a prism. It is possible to illuminate from, and it is possible to switch and adjust the intensity. In this case, when the drive substrate 2 is connected with the terminal electrode 12 provided at a portion that is an exposed portion of the inner surface of the substrate 11 facing upward, and the display device D is conveyed as it is, the segment portion faces down the work area 52. The substrate 1 and the drive substrate 2 face up. It is preferable to inspect it as it is without touching it unnecessarily. The display device D is placed in the work area so that the substrate 11 is on the back surface side, the epi-illumination from the back surface is strengthened, and It is preferable to turn off or turn off the lighting to monitor the terminal connections. In some cases, it is not necessary to use illumination from the surface as coaxial light. However, if the display device D is mounted with the segment side facing upward, the common side is provided downward on another substrate, which will be described later. As described above, without using the reversing unit 56, it is possible to provide an illumination selecting unit that selects the illumination from the substrate side in the terminal connecting unit regardless of the orientation of the substrate in order to receive the image of the terminal connecting unit. it can.

Reference numeral 7 is an image receiving means for receiving the image of the terminal connection portion upon receiving the illumination of the illumination means 6, and comprises an optical microscope, a monitor camera with a built-in CCD and a monitor television, and preferably the camera, that is, the image capturing portion, is parallel to the epi-illumination. It may be installed on the same axis where the light rays are most easily received, and the monitor TV may be unnecessary. The camera has, for example, monochrome 256 gradations and 6
It is possible to use one having 20 × 540 pixels and a memory for storing data. Instead of such specifications, a threshold variable binary monitor without gradation may be used, or a color monitor may be used as described later. Reference numeral 8 is a processing means for recognizing the contour from the image received by the image receiving means 7 and calculating the damage of the terminal electrode and the number or area of the conductive particles located in the terminal electrode portion, which is equipped with a 16-bit CPU and an image recognition system. It is a high-speed image processing device. More preferably, the processing means determines the display device D being inspected according to a predetermined determination criterion for each determination item, and discharge magazines 53, 54 based on the determination result.
Then, a control signal is output to the hanger 57 so that the display device D is discharged. Similarly, the processing means 8 may control the magazine or other hangers, the XY table, or the image receiving means, or a control means for controlling the entire inspection apparatus may be separately provided.

In the detection device of the display device having such a configuration, a standard operation procedure when the illumination means and the determination standard are preset will be described. First, supply magazine 51
On the basis of the transportation of the hanger 55, the hanger 55 moves the work area 5 so that the segment-side terminal connection portion of the display device is located at the center.
The display device D is set to 2. Then, based on the image of the image receiving means 7 or using a separately provided alignment camera, the alignment target mark previously provided in the display device is recognized to align the display device D.
Such a target mark is, for example, the substrate 1 of the display.
It may be formed at the end of the row of one terminal electrode 12 by a square or a mosaic pattern using a transparent electrode or the like. Then, the image receiving means 7 captures an image of the terminal electrode pattern or the terminal portion pattern (hereinafter also referred to as a lead pattern), and the image signal of the CCD obtained there is sent to the processing means 8. In the image at this time, for example, as shown in FIG. 5, the terminal electrode 12, the terminal portion 22, and the conductive particles 31 are displayed in different tones. The processing means 8 performs contour processing based on this video signal to extract a lead pattern. As a result, for example, as shown in FIG. 6, the lead pattern contour damage (a) and conductive particle clusters (b) that adhere to the terminal electrodes and stick out from the lead electrodes also appear due to the contour processing, so electrode damage and short-circuit with adjacent terminals are also prevented. It is possible to judge.

After the lead patterns have been extracted, a pattern shift inspection, a bubble presence / absence inspection, a conductive particle bonding degree inspection,
A foreign matter biting inspection, a terminal bonding degree inspection, and the like are performed, and each time, or after the inspection is completed, a comprehensive determination of connection quality is performed. In these inspections and judgments, if the image can be gradation processed, it can be performed by relative comparison of the intensity of the luminance signal. Even if it is difficult to do this automatically, with the test sample, the terminals, bubbles, conductive particle outlines , By giving density gradation and background density of the conductive particle joint or the like, or by making the processing means 8 learn based on some test samples using a neural network, these are judged for each condition of the lighting means 6. be able to.

Although the image receiving means 7 has a monochrome 256 gradations, it is more preferable to make an inspection judgment using a color monitor. In this case, for example, the part without electrodes is light brown, the part with terminal electrodes (transparent electrodes) is light gray or black, the terminal part is whitish light brown, and the crushed conductive terminals have a golden outline and are white and crushed. Those that do not exist have a considerable difference in color tone depending on the way of illuminating the illumination means 6 and the illuminance, such as black spots or white spots, but they can be clearly identified even if they are laminated depending on the substance. Therefore, in the processing means 8, in consideration of the hue and lightness, each member is identified based on the luminance signal or the color signal of the image received, and more preferably the contour processing is performed, and the damage of the terminal electrode is performed according to the identification. The quality of the connection state can be determined by the determination or by calculating the number or area of the conductive particles located in the terminal electrode portion.

Further, in this case, there are a method of directly determining the density distribution for each pixel to inspect and determine the area, and a method of performing contour processing to inspect and determine the area. In either case, a relatively accurate determination can be made. I can guide you. However, as shown in FIG. 7, the conductive particles cannot receive an image with a uniform density or color. Therefore, after the contour judgment based on the density difference, the contour processing has a higher correct answer probability, such as supplementary estimation of the contour of the object so as to extend the previously judged contour while changing the judgment density difference level. . In addition, in the inspection of the connection state with the conductive particles, the connection state is based on the number or area of the conductive particles located at least in the terminal electrode portion, and a certain number of particles or a certain cumulative area or more is used as a criterion for connection quality. Is preferable because it can be correctly certified. In other words, the connection area of each conductive particle is calculated while numerically analyzing the length of the envelope, or the number of pixels surrounded by the closed curve, etc., so that there are multiple conductive particles in the terminal connection part. Envelope length,
A threshold may be set in advance for the area and the like, and the connection may be regarded as good if the number of conductive particles exceeding the threshold, the total area, the perimeter, etc. are within predetermined ranges. In addition, in such a connection calculation, it is more preferable that the bubble area is additionally determined as a factor of poor connection.

However, based on the contents described with reference to FIG. 3, a predetermined number of conductive particles located between the terminal electrode of the display and the terminal portion of the driving element and having a particle shape larger than that of the particle shape before use are used. It is preferable to use a criterion for connection quality judgment based on whether or not a plurality of areas are included, because it is general, but there are no such judgment errors and the inspection judgment speed is high. Then, the area can be calculated in advance by numerically analyzing the length of the envelope or the number of pixels surrounded by a closed curve, and if the lotus-leaf-like distorted shape is used, a good connection method is also possible. Is.

In the above inspection / judgment, when the connection portion is to be seen or stereoscopically observed, the lead foil 23 of the drive substrate 2 is made of copper, a metal such as nickel or chrome, and the substrate 11 and the terminal electrode 12 are transparent. If so, the observation can be accurately performed by performing coaxial epi-illumination from the substrate 11 side. Therefore, when the display device 1 has the segment terminal electrodes on the opposite sides and the common terminal electrodes on the other sides orthogonal to each other, these terminal electrodes 12 are basically each of the two stacked electrodes. Since it is provided on the inner surfaces facing each other, for example, in FIG. 1, if the electrode terminals and driving elements in the vertical direction on the right side are segment sides, they are observed from the back side of the paper, and those on the lower side of the figure (terminal connection It is preferable to observe this from the front side of the paper because the part is on the back side of the substrate and not displayed) is on the common side. Therefore, for example, after inspecting one terminal electrode portion, it is most preferable to invert the display device D in the work area 52 described above to identify the other terminal electrode portion and inspect it by the inversion means 56 that conveys it to the work area 52. . If such a reversing means 56 is not used, coaxial epi-illumination is configured to illuminate from the front and back surfaces of the display device D, and an illumination selecting means capable of switching and adjusting the intensity thereof is provided to make it transparent. It suffices to illuminate from the board side and receive the image of the terminal connection portion. In this case, the CCD may be incorporated in the illumination cylinders on the front and back surfaces and the signal thereof may be guided to one monitor unit.

Regarding the point of inspecting the entire range described as the problem, the connection length (width of the anisotropic conductive adhesive) of both terminal portions is about 1500 μm, and the terminal pitch is 100 to 40 μm, so that the terminal pitch is 100 to 40 μm. Width is 80 to 20 μm
Becomes Considering the aspect ratio of the image receiving means 7, the width of the terminal connecting portion is too thin and the size of the conductive particles used is also too small for inspection over the entire connection length. On the other hand, if it is attempted to inspect based on the size of the conductive particles, the entire length of the terminal connecting portion cannot be inspected.

Therefore, preferably, for example, three image receiving means 7 are obliquely arranged so that each of them receives about 1/5 of the connection length. That is, the first image receiving means scans the terminal connection portion toward the first observation region of the terminal electrode in the alignment direction while observing the substrate end edge side of the terminal portion, and the second image receiving means the first image receiving means. About 9 in the scanning direction from the image receiving means
While observing the central portion of the terminal connection portion, the third image receiving unit is further scanned about 900 μm behind the second image receiving unit in the alignment direction while observing the central portion of the terminal connection portion. When the display surface side of the terminal connection portion is scanned in the alignment direction and the image of each connection portion is received, each image receiving means scans with a width of about 310 μm, and thus it is possible to perform a 100% inspection. That is, the plurality of image receiving means for scanning the terminal connection portion in the alignment direction with respect to different observation regions of the terminal electrode to receive the image of the connection portion, and the number of the conductive particles located at least in the terminal electrode portion from the received image. Alternatively, if a processing means for calculating the area etc. is provided, all the terminal parts can be inspected.

On the other hand, however, three image receiving means are provided as one.
Due to the fact that the terminals cannot be arranged in a row, a calculation error may occur when calculating the total connection area of one terminal in confirming the connection of the terminals. For example, there is a possibility that the connection area of the nth terminal on the display surface side and the connection area of the n + 2th terminal on the substrate edge side are added. Therefore, as the most efficient method, the connection area on the display surface side or the number of conductive particles contributing to the connection is a predetermined amount,
For example, the connection state is good because, for example, 1/2 of the connection area required as a terminal or 9/10 of the average density of the average conductive particles of the anisotropic conductive adhesive contributes to the connection. Can be considered. On the edge side of the board of the terminal, such a view is often problematic due to the size of the connection resistance and statistics of the connection probability between the display side and the edge side. That is, the image receiving means for receiving the image of the connecting part by scanning the terminal connecting part only in the observation area close to the display surface in the alignment direction, and the number or area of the conductive particles located at least in the terminal electrode part from the received image are shown. By providing the processing means for calculating, the inspection determination can be performed at extremely high speed, and the erroneous determination is relatively small. Considering that a number of image receiving means and the like are provided as described above, it is more efficient to inspect 1/6 to 1/2 on the display surface side and perform full width inspection only for those having a defect probability. .

Further, even in the case of observing and inspecting all terminal connection parts only in a part of the terminal width in this way, not only the observing inspection is necessary, but a predetermined region is observed in detail while observing a wider region. Is more preferable. That is,
A plurality of image receiving means for receiving the image of the connection portion by scanning the terminal connection portion in the size of the observation regions different from each other in the alignment direction, and a processing means for performing the image receiving calculation are provided. For example, the first image receiving means is A second image receiving means for scanning the terminal row on the display surface side with an optical microscope having a magnification of 40 times, and having an optical microscope having a magnification of 10 times behind the scanning direction and observing substantially the entire width of the terminals is provided. The area of the conductive particles is determined, for example, in the image of the first image receiving means by scanning the terminal row and correlating the two in the processing means, and the number of the conductive particles is detected in the image of the second image receiving means. It is preferable to make an individual detailed connection determination on the one hand and a comprehensive general connection determination on the other hand, for example, by making only the determination. When performing the sparse / dense determination in this manner, the overlapping pattern displacement between the electrode terminal and the terminal portion, foreign matter biting, bubble biting, and crimping width are set in advance.
The image is processed by observing it with an image receiving means having a low magnification, and based on the pressure bonding width of the result, the
It is efficient and most preferable to receive and process the number of pressure-bonded particles per pattern and the bonding area of the pressure-bonded particles.

Further, in these embodiments, it is explained that all the terminal connection parts are inspected in some way.
It is not limited to this, and for example, inspection may be performed every 2 to several lines. However, when inspecting a part, the most efficient method is to inspect each drive substrate. That is, one drive element has approximately 80 to 240 output terminals, and a plurality of drive substrates are connected to one side of the display, and connection is made for each of these drive substrates.
The terminal connection is scanned for each drive substrate in the alignment direction to receive the image of the connection, and the contour of the conductive particles located at least at the terminal electrode portion is processed from the received image to determine the quality of the connection. To do. That is, since it is often the case that each drive board has the same connection characteristics whether it is inspected for all or a plurality of locations on one drive board, it is preferable to receive and process images for each drive board.

When inspecting each such driving element, as shown in FIGS. 8A and 8B, a half mirror, a prism and the like are incorporated in an illumination tube, a lamp house is arranged beside the tube, and a CCD camera is arranged at the cylinder head. By doing so, it is possible to observe and inspect a plurality of portions of the terminal connection portion with respect to one drive substrate. In this case, illumination means 6 for performing coaxial incident illumination
0 is provided to illuminate a portion separated by 1 to 50 mm, preferably about 10 mm, for example, both ends of one drive substrate 2 at the same time. Then, one or a plurality of image receiving means 70 which scans the illuminated terminal connecting portion for each drive substrate and receives an image of the connecting portion is arranged at the leading portion of the illumination tube. From the received image, at least the number or area of the conductive particles located in the terminal electrode portion may be calculated. In particular, in the method of FIG. 8b, since the connection width is originally wider than the terminal electrode pitch, it is possible to simultaneously observe and judge, for example, 3 to 5 ends of the drive substrate of the aligned terminal connection portions on one screen. ,preferable.

Further, in the case of observing and inspecting a part of the terminal connection portion as described above, when a laminated body of a transparent electrode and a metal film is used as a terminal electrode of a display, as shown in FIG. The electrode 120 is preferably provided with a window in the metal film 121 to provide an exposed portion of the transparent electrode 122. That is, since the anisotropic conductive adhesive 3 is sandwiched by the metal on both sides of the terminal electrode 120 composed of the laminated body of the transparent electrode 122 and the metal film 121, it is easy to make a distinction by irradiation with light. Therefore, the X-ray generator and the monitor camera were installed, and X
Although X-ray analysis is generally low in resolution, X-ray analysis is insufficient in pattern recognition by observation from one direction like epi-illumination. Therefore, it is necessary to rotate the pair of the X-ray generator and the monitor camera around the terminal connecting portion so as to analyze the images from a plurality of directions. However, since such observation and calculation tend to be extremely complicated, it is only necessary to provide the exposed portion of the transparent electrode such as a quadrangle on the terminal connection portion or the above-described target mark as described above, and observe and inspect at that portion. This is generally possible because the metal film 121 laminated on the transparent electrode 122, such as a TFT liquid crystal display, is a thin film for reducing the resistance value. Therefore, the metal film is thick and the diameter of the conductive particles is 1 When a large step difference such as / 2 is generated, measurement cannot be performed even if the transparent electrode is exposed. Therefore, in a high-speed inspection of a display device having such a metal film laminated terminal electrode, the terminal connection portion is scanned in the alignment direction for each drive substrate, and the metal film of the terminal electrode provided in advance for each drive substrate is scanned. It is efficient and preferable to provide an image receiving means for receiving an image of the connection portion composed of the transparent electrode from the removed portion, and a processing means for performing contour processing of the conductive particles from the received image.

[0034]

As described above, according to the present invention, even if the fine pitch connection technology is advanced, the inspection process cannot be omitted, but the eye inspection using the magnifying glass is limited at the fine pitch.
Considering that the inspection time is too long in the conventional pattern recognition, focusing on the relationship between the shape of the conductive particles and the connection failure,
It was possible to perform stable and high-speed inspection of the terminal connection portion after repeated studies such as illumination means, scanning method, and signal processing means.

[Brief description of drawings]

FIG. 1 is a plan view of a main part of a display device which is an object of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is an explanatory diagram of particles in an anisotropic conductive adhesive.

FIG. 4 is a plan view of an inspection device for a display device according to an embodiment of the present invention.

FIG. 5 is a diagram showing an example of a video pattern.

FIG. 6 is a diagram showing an example of pattern recognition.

FIG. 7 is a diagram showing an example of pattern recognition.

FIG. 8 is a configuration diagram of another embodiment of the present invention.

FIG. 9 is a cross-sectional view of a main part of a display device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 indicator 11 substrate 12 terminal electrode 2 drive substrate 21 drive element 22 terminal part 3 anisotropic conductive adhesive 31 conductive particles 32 adhesive

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Atsunori Inamura 3-201 Minamiyoshikata, Tottori City, Tottori Prefecture Tottori Sanyo Electric Co., Ltd. Sanyo Electric Co., Ltd.

Claims (13)

[Claims] 1. A display device having a terminal electrode on a transparent substrate, and a drive substrate having a terminal portion connected to a drive element,
In a display device comprising an anisotropic conductive adhesive containing conductive particles and located between the terminal electrode of the display and the terminal portion of the driving element, the terminal electrode of the display is a transparent electrode and a metal film. And a transparent electrode exposed portion. 2. A connecting portion of a display device in which a terminal electrode of a display device having a terminal electrode on a substrate and a terminal portion of a driving substrate having a terminal portion connected to a driving element are connected by an adhesive containing conductive particles. A method for inspecting a display device, wherein the quality of the connection state is determined by observing at least the contour or outer shape of the connection portion by observing or stereoscopically observing. 3. A display device in which a terminal electrode of a display device having a terminal electrode on a substrate and a terminal portion of a driving substrate having a terminal portion connected to a driving element are connected by an adhesive containing conductive particles. The illumination means for giving epi-illumination to the terminal connection portion, the image receiving means for receiving the image of the terminal connection portion, the contour recognition from the received image, the damage of the terminal electrode and the conductive particles located in the terminal electrode portion. An inspection device for a display device, comprising: a processing unit for calculating the number or area. 4. The conductive particles are included in the terminal electrode of the display device having a terminal electrode at each edge of the two substrates and the terminal portion of the driving substrate having the terminal portion connected to the driving element. With respect to the display device connected with the adhesive, a transporting unit that identifies the first terminal electrode portion of the display unit and transports it to the work area, and an image of the terminal connecting portion that is illuminated by the illumination unit in the work area Image receiving means, an inverting means for inverting the display device in the work area to identify another terminal electrode portion and transporting it to the work area, and a contour recognition from the received image to identify damage to the terminal electrode and the terminal electrode portion. An inspection apparatus for a display device, comprising: a processing unit that calculates the number or area of the conductive particles located at 5. A display device in which a terminal electrode of a display device having terminal electrodes aligned on a substrate and a terminal portion of a driving substrate having a terminal portion connected to a driving element are connected by an adhesive containing conductive particles. A plurality of image receiving means for receiving the image of the connection part by scanning the terminal connection part in the size of the observation regions different from each other in the alignment direction, and the conductive particles located at least in the terminal electrode part from the received image. And a processing means for calculating the number, area, or the like of the display device. 6. A terminal electrode of a display having terminal electrodes of a predetermined length aligned on a substrate and a terminal portion of a driving substrate having a terminal portion connected to a driving element are connected by an adhesive containing conductive particles. A plurality of image receiving means for receiving the image of the connecting portion by scanning the terminal connecting portion of the display device in the alignment direction with respect to different observation regions of the terminal electrodes, and at least the terminal electrode portion from the received image. An inspection apparatus for a display device, comprising: a processing unit that calculates the number, area, or the like of the conductive particles located at the position. 7. An adhesive containing conductive particles for a terminal electrode of a display having terminal electrodes of a predetermined length aligned on a substrate and a terminal portion of a driving substrate having a terminal portion connected to a driving element. With respect to the connected display device, an image receiving unit that receives the image of the connection unit by scanning the terminal connection unit only in the observation region close to the display surface in the alignment direction, and at least the terminal electrode portion from the received image. An inspection apparatus for a display device, comprising: a processing unit that calculates the number or area of conductive particles. 8. A terminal electrode of a display having terminal electrodes aligned on a substrate and a plurality of driving substrate terminals having terminal portions connected to driving elements are connected by an adhesive containing conductive particles. The display device is provided with an image receiving unit that scans the terminal connection portion of each drive substrate in the alignment direction and receives an image of the connection portion, and a contour processing of the conductive particles located at least in the terminal electrode portion from the received image. A method of inspecting a display device to determine whether the connection is good or bad. 9. A display device having a terminal electrode on a substrate, a drive substrate having a terminal portion connected to a drive element, and a particle outer shape located between the terminal electrode of the display device and the terminal portion of the drive element. A method for inspecting a display device, wherein a criterion for connection quality judgment is that a plurality of conductive particles larger than the particle outline before use is included. 10. A conductive particle comprising: a display device having a terminal electrode at each edge of two transparent substrates; and a terminal portion of a driving substrate having a terminal portion connected to a driving element. Illumination device for illuminating the terminal connection portion from the front and back of the display device, and an illumination selection means for selecting transparent illumination from the substrate side in the terminal connection portion for a display device connected with an adhesive containing And image receiving means for receiving the image of the terminal connection portion under the illumination of the illuminating means, and contour recognition from the received image to calculate the damage of the terminal electrode and the number or area of the conductive particles located in the terminal electrode portion. An inspection device for a display device, comprising: 11. A display device having a terminal electrode composed of a laminated body of a transparent electrode and a metal film arranged on a substrate in alignment,
A plurality of drive substrates having terminal portions connected to drive elements, and a display device in which the terminal electrodes of the display and the terminal portions of the drive substrate are connected by an anisotropic conductive adhesive containing conductive particles, An image receiving unit that scans the terminal connection portion in the alignment direction for each drive substrate, and receives an image of the connection portion formed of the transparent electrode from the metal film removal portion of the terminal electrode provided in advance for each drive substrate, and the received image. And a processing unit that performs contour processing of the conductive particles. 12. A display device in which the terminal electrode of a display device having a terminal electrode on a substrate and the terminal portion of a driving substrate having a terminal portion connected to a driving element are connected by an adhesive containing conductive particles. On the other hand, an illuminating means for applying epi-illumination to the terminal connecting portion, and an image receiving means for receiving an image of the terminal connecting portion,
Inspection of a display device, comprising: a processing unit for judging damage to a terminal electrode or calculating the number or area of conductive particles located at the terminal electrode portion based on a luminance signal or a color signal of an image received. apparatus. 13. An anisotropic conductive adhesive containing conductive particles for a terminal electrode of a display device having terminal electrodes aligned on a substrate and a plurality of driving substrate terminals having terminal portions connected to driving elements. For the display device connected by the above, the illuminating means for performing coaxial epi-illumination at a plurality of portions of the terminal connecting portion with respect to one driving substrate, and the illuminated terminal connecting portion are scanned for each driving substrate to connect the connecting portions. An inspection device for a display device, comprising: an image receiving means for receiving an image and a processing means for calculating the number or area of the conductive particles located at least in the terminal electrode portion from the received image.