JPH08339934A - Manufacture of laminated inductor - Google Patents

Abstract

PURPOSE: To form a conductor pattern with high accuracy and obtain a laminated inductor of a small tolerance and also increase the thickness of the conductor and thereby increase Q by forming the conductor pattern with photosensitive conductor paste and connecting ends of the conductor pattern to terminal electrodes. CONSTITUTION: Photosensitive conductor paste 12a is applied to the entire surface of an insulator layer 11a and then is dried. After that, the paste is exposed to ultraviolet rays, etc., and then development is so performed that only a terminal connecting section 15 and a conductor pattern 13a which is connected to the terminal connecting section 15 and is extending from the section 15 may be left behind, which means the conductor pattern 13a is formed by photolithography using the photosensitive conductor pattern 12a. Ends of the conductor pattern 13a are connected to terminal electrodes. By this method, the conductor pattern 13 of high accuracy is formed and thereby a laminated inductor of a small tolerance can be obtained. At the same time, by making the thickness of the conductor large, Q can be increased.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a laminated inductor, in which an insulating layer and a conductive pattern are alternately formed by a printing method, and the insulating layer and the conductor pattern are superposed in the stacking direction and circulate. The present invention relates to a method for manufacturing a laminated inductor which forms a pattern.

[0002]

2. Description of the Related Art In the field of inductors (coils) as well, in order to meet the demand for size reduction and thickness reduction, a type of inductor that does not use windings has been put into practical use. Many of these inductors are manufactured by a printing method, a thin film method, or a sheet method.

When a conductor pattern is formed by a printing method, the line width of the conductor pattern cannot be formed to be less than several tens of μm, and its accuracy is not sufficient, and it is generally displaced from the designed value by about several tens of μm. Target.

On the other hand, when the conductor pattern is formed by the thin film method (such as the sputtering method), the film thickness cannot be increased, and at most about several μm can be obtained. Since it is necessary to increase the film thickness in order to reduce the conductor resistance and increase the Q, it is common to form a conductor plating layer on the film thickness.

[0005]

As described above, according to the conventional manufacturing method, a high Q can be obtained but a high-frequency inductor having a high precision cannot be obtained, or the Q is difficult to increase although the precision is good. There is also a problem that the number of manufacturing processes increases.

The present invention provides a laminated inductor having a high Q, which is capable of forming a conductor pattern with high accuracy to obtain a laminated inductor having a narrow tolerance and increasing the film thickness.

[0007]

SUMMARY OF THE INVENTION The present invention solves the above problems by changing the conductor material for forming a conductor pattern.

That is, a laminated inductor in which an insulating layer and a conductive pattern are alternately printed to form a conductive pattern which overlaps and circulates in the stacking direction while connecting the end portions of the conductive pattern of about half a turn between the insulating layers. In the manufacturing method of
It is characterized in that the conductor pattern is formed by a photosensitive conductor paste and the end portions of the conductor pattern are connected to the terminal electrodes, respectively.

A laminated inductor in which an insulating layer and a conductive pattern are alternately printed to form a conductive pattern which overlaps and circulates in the stacking direction while connecting end portions of the conductive pattern of about half turn between the insulating layers. In the method for producing, a photosensitive conductor paste is applied onto the insulator layer, dried, and exposed and developed to form a conductor pattern of about half a turn,
It is characterized in that each end of the conductor pattern is connected to the terminal electrode.

[0010]

[Function] Since the conductor pattern is formed by the photolithography technique using the photosensitive conductor paste, several μm
With a tolerance of, a conductor pattern of 100 μm or less can be formed, and a conductor pattern of 20 μm or more in thickness can be obtained.

[0011]

Embodiments of the present invention will be described below with reference to the drawings.

1A to 1F and 2A to 2C.
[Fig. 3] is a plan view showing a process of the present invention. An insulator layer 11a having a predetermined thickness is formed by printing on the surface of a Mylar film or the like (not shown). The paste is printed on the entire surface and then dried. Although only one element is shown in the figure, a large number of elements are arrayed in the vertical and horizontal directions and are simultaneously formed during actual manufacturing (FIG. 1a).

In the present invention, the method of forming the conductor pattern is different from the conventional method. A photosensitive conductor paste 12a is applied (printed) on the entire surface of the insulator layer 11a to form it and dried (FIG. 1b). After that, it is exposed to ultraviolet rays or the like, and by development, only the terminal connecting portion 15 and the conductor pattern 13a connected thereto and extending are left (FIG. 1c).

The photosensitive conductor paste is disclosed by Toray Industries, Inc. in JP-A-5-67405, and includes a) metal component particles having conductivity, and b) acrylic resin having ethylenically unsaturated groups in side chains. It is described that it is composed of a copolymer, c) a photoreactive polymerizable compound, and d) a photopolymerization initiator. Although the material may be slightly changed depending on the conductor material, it is basically composed of these components.

A photosensitive conductor paste having the above composition is applied (printed) to a predetermined thickness and dried at about 80 ° C. for 5 minutes. Approximately 10 with UV using a mask that matches the conductor pattern
It is possible to obtain a predetermined conductor pattern by exposing for a minute and removing an unnecessary portion of the conductor film by development. This conductor film can be baked at 500 ° C. for 30 minutes and at 800 ° C. for about 30 minutes.

By the above method, a conductor pattern having a line width of several tens of μm and a thickness of 20 μm or more can be formed. The dimensional error of the line width can be suppressed to several μm.

The conductor pattern 13 formed as described above
The tip of a is exposed and the insulator layer 11b is printed in an area slightly larger than half of the insulator layer 11a. As a result, the conductor pattern 13a is covered with the insulating layer 11b except the tip (FIG. 1d).

Next, a photosensitive conductor paste 12b is printed so as to include the tip of the conductor pattern 13a and reach a part of the surface of the insulator layer 11b (FIG. 1e). After drying, by exposure and development, a conductor pattern 13b of about half a turn connected to the tip of the conductor pattern 13a shown in FIG. 1d is formed (FIG. 1).
f). As a result, the conductor pattern of the first half turn is formed.

Then, the insulator layer 11c is formed by leaving the tip of the conductor pattern 13b (FIG. 2a), and the photosensitive conductor paste 12c is printed on the portion including the tip of the conductor pattern 13b (FIG. 2b). The photosensitive conductor paste 12c is exposed and developed to form a conductor pattern 13c. This forms the conductor pattern of the next approximately half turn connected to the previous approximately half turn (FIG. 2c). By repeating this process, the laminated inductor having a predetermined number of turns is formed.

After the predetermined lamination is completed, an element is obtained by drying and dividing, and this is fired at a predetermined temperature and time to obtain a laminated inductor. As the material of the insulator layer, either a magnetic substance such as ferrite or a non-magnetic substance such as forsterite may be used. It is preferable to use a conductor paste containing silver or silver / palladium as a main component.

[0021]

According to the present invention, a conductive pattern having a large film thickness and a low resistance can be formed by a photosensitive conductive paste, so that a high Q high frequency inductor can be obtained. Further, since it is formed by the photolithography technique, it is possible to obtain a high-frequency inductor having a good pattern accuracy and a narrow tolerance.

Furthermore, since the terminal electrode can be formed of a thick film, there is an advantage that the terminal electrode can be directly baked and formed, unlike the thin film method.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of the present invention.

FIG. 2 is a plan view showing an embodiment of the present invention.

[Explanation of symbols]

 11: Insulator layer 12: Photosensitive conductor paste 13: Conductor pattern

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Mitsuo Sakakura 828, Hinohara, Tamagawa, Tamagawa-mura, Hiki-gun, Saitama Toko Co., Ltd. Tamagawa factory

Claims (5)

[Claims] 1. A laminated inductor in which an insulating layer and a conductive pattern are alternately printed, and a conductive pattern of about half a turn is overlapped in a stacking direction while connecting end portions of the conductive pattern between the insulating layers to form a conductive pattern. 2. The method for manufacturing a laminated inductor according to claim 1, wherein the conductor pattern is formed of a photosensitive conductor paste, and the end portions of the conductor pattern are respectively connected to the terminal electrodes. 2. A laminated inductor in which an insulating layer and a conductive pattern are alternately printed, and a conductive pattern of about a half turn is connected between the insulating layers to form a conductive pattern which is superposed in the stacking direction and circulates in the stacking direction. In the manufacturing method of 1., a photosensitive conductor paste is applied onto the insulator layer, dried, exposed and developed to form a conductor pattern of about half a turn, and the ends of the conductor pattern are connected to terminal electrodes, respectively. And method for manufacturing a laminated inductor. 3. A laminated inductor in which an insulating layer and a conductive pattern are alternately printed, and a conductive pattern of about a half turn is overlapped in the stacking direction while forming a conductive pattern which is overlapped in the stacking direction while connecting end portions of the insulating layer. In the method for manufacturing a multilayer inductor according to claim 1, wherein the conductor pattern is formed of a photosensitive conductor paste, the conductor paste is integrally fired with the insulator paste, and the ends of the conductor pattern are respectively connected to terminal electrodes. Method. 4. A laminated inductor in which an insulating layer and a conductive pattern are alternately printed, and a conductive pattern of about half a turn is overlapped in the stacking direction while forming a conductive pattern which is overlapped in the stacking direction while connecting end portions of the conductive pattern between the insulating layers. In the manufacturing method of 1., a photosensitive conductor paste is applied onto the insulator layer, dried, and exposed and developed to form a conductor pattern of about half a turn, and the insulator paste is applied to a portion of the conductor pattern excluding the end portion. Then, apply a photosensitive conductor paste on the insulator paste, dry it, and form a half-turn conductor pattern connected to the previous half-turn conductor pattern by exposure and development, and further insulate A method for manufacturing a laminated inductor, comprising: stacking a body paste and a conductor paste to form a conductor pattern having a predetermined number of turns. 5. The method for manufacturing a laminated inductor according to claim 4, wherein the insulating layer is formed in an area slightly larger than half of the laminated body to expose an end portion of the conductor pattern of about half a turn.