JPH08333172A - Setter for thermal treatment - Google Patents
Setter for thermal treatmentInfo
- Publication number
- JPH08333172A JPH08333172A JP7162798A JP16279895A JPH08333172A JP H08333172 A JPH08333172 A JP H08333172A JP 7162798 A JP7162798 A JP 7162798A JP 16279895 A JP16279895 A JP 16279895A JP H08333172 A JPH08333172 A JP H08333172A
- Authority
- JP
- Japan
- Prior art keywords
- setter
- sialon
- thermal treatment
- heat treatment
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Furnace Charging Or Discharging (AREA)
- Ceramic Products (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は金属製品、セラミック製
品等の熱処理用セッターに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a setter for heat treatment of metal products, ceramic products and the like.
【０００２】[0002]
【従来の技術】金属製品、セラミック製品等の熱処理に
おいてセッターが必要であり、セッターは熱衝撃性及び
強度が高く、繰り返し使用しても変形が小さいことが望
まれる。従来、熱処理用セッターの素材としてはアルミ
ナ質及びジルコニア質が用いられているが、使用条件に
よっては問題を生じていた。例えばアルミナ質とした場
合は加熱・冷却の繰り返しで簡単に割れる。またジルコ
ニア質とした場合はアルミナ質より耐熱衝撃性は良いが
変形が大きいため短寿命になる。2. Description of the Related Art A setter is required for heat treatment of metal products, ceramic products, etc., and it is desired that the setter has high thermal shock resistance and strength, and has little deformation even after repeated use. Conventionally, alumina and zirconia have been used as materials for heat treatment setters, but problems have arisen depending on use conditions. For example, when it is made of alumina, it can be easily cracked by repeating heating and cooling. When zirconia is used, the thermal shock resistance is better than that of alumina, but the deformation is large and the life is short.
【０００３】[0003]
【発明が解決しようとする課題】本発明は金属製品、セ
ラミック製品等の熱処理用セッターにおいて、熱衝撃性
及び強度の高いセッター素材を提供することを目的とし
ている。SUMMARY OF THE INVENTION It is an object of the present invention to provide a setter material having high thermal shock resistance and high strength in a heat treatment setter for metal products, ceramic products and the like.
【０００４】[0004]
【課題を解決するための手段】金属製品、セラミック製
品等の熱処理用セッターにおいて、その構成成分がＳＩ
ＡＬＯＮ−ＢＮ質である材料で作製する。ＳＩＡＬＯＮ
は化学式 Ｓｉ6-zＡｌzＯzＮ8-z におけるＺ値が２．０
〜４．０である。ＢＮは０．５〜５０重量％である。[Means for Solving the Problems] In the setter for heat treatment of metal products, ceramic products, etc., the constituent components are SI.
It is made of a material that is ALON-BN quality. SIALON
Has a Z value of 2.0 in the chemical formula Si 6 -zAlzOzN 8 -z.
Is about 4.0. BN is 0.5 to 50% by weight.
【０００５】[0005]
【作用】ＳＩＡＬＯＮ−ＢＮ質を金属製品、セラミック
製品等の熱処理にセッターの素材として使用する。本発
明による熱処理用セッターを詳細に説明する。構成成分
はＳＩＡＬＯＮ−ＢＮ質であり、ＳＩＡＬＯＮはβ’型
でその化学式Ｓｉ6-zＡｌzＯzＮ8-z におけるＺ値が
２．０〜４．０及びＢＮ含有量は重量比で０．５〜５０
重量％である。[Function] The SIALON-BN material is used as a material for a setter for heat treatment of metal products, ceramic products and the like. The heat treatment setter according to the present invention will be described in detail. The constituent component is SIALON-BN quality, and SIALON is β'type and has a Z value in its chemical formula Si 6 -zAlzOzN 8 -z of 2.0 to 4.0 and a BN content of 0.5 to 50 by weight.
% By weight.
【０００６】製造方法は、原料調整→成形→乾燥及び脱
脂→加工→燒結である、出発原料は焼成を経て最終的に
上記構成成分となるように調合する。すなわち、常圧燒
結を用いるときにはＳｉ3Ｎ4、ＡｌＮ、Ａｌ2Ｏ3の各粉
末を上記Ｚ値が２．０〜４．０になるよう調合し、燒結
助材、バインダー及びＢＮ粉末を所定量添加したものを
アセトン等非水溶媒と共にトロミルにて１２〜２４時間
混合し、噴霧造粒して成形に供する。The manufacturing method is as follows: raw material adjustment → molding → drying and degreasing → processing → sintering. The starting materials are fired and finally compounded so as to have the above-mentioned constituents. That is, when using normal pressure sintering, Si 3 N 4 , AlN, and Al 2 O 3 powders are mixed so that the Z value is 2.0 to 4.0, and the sintering aid, the binder, and the BN powder are added. What was added in a fixed amount was mixed with a non-aqueous solvent such as acetone for 12 to 24 hours by tromil, spray-granulated, and provided for molding.
【０００７】また、反応燒結による時には、Ｓｉ、Ａ
ｌ、Ａｌ2Ｏ3の各粉末を上記Ｚ値が窒化反応後に２．０
〜４．０になるよう調合し、バインダー及びＢＮ粉末を
所定量添加したものをアセトン等非水溶媒と共にトロミ
ルにて１２〜２４時間混合し、噴霧造粒して成形に供す
る。ここでＺ値を２．０〜４．０としたのは、２．０未
満であるとＡｌ2Ｏ3の固溶量が少ないためＳｉ3Ｎ4その
ものの性質に近くなり、耐蝕性、耐酸化性に不足を生ず
るためであり、一方Ｚが４．０を超えると耐蝕性等は向
上するものの、耐熱衝撃性と強度の低下を来すからであ
る。またＢＮ量を０．５〜５０重量％としたが、５０％
を超えるとＢＮがＳＩＡＬＯＮの生成及び燒結を阻害す
る傾向が強すぎ、強度の低下が著しく、実用上問題とな
り易いからである。When the reaction sintering is used, Si, A
1 and Al 2 O 3 powders each had a Z value of 2.0 after the nitriding reaction.
The mixture is blended so as to be about 4.0, and the binder and BN powder are added in a predetermined amount, and the mixture is mixed with a nonaqueous solvent such as acetone for 12 to 24 hours, spray-granulated, and subjected to molding. Here, the Z value is set to 2.0 to 4.0 because when it is less than 2.0, the solid solution amount of Al 2 O 3 is small, and the property is close to that of Si 3 N 4 itself, and the corrosion resistance and the acid resistance are reduced. This is because the chemical resistance is insufficient, and when Z exceeds 4.0, the corrosion resistance and the like are improved, but the thermal shock resistance and the strength are deteriorated. Also, the BN amount was set to 0.5 to 50% by weight, but 50%
If it exceeds BN, the tendency of BN to inhibit the production and sintering of SIALON is too strong, the strength is remarkably reduced, and it tends to be a problem in practical use.
【０００８】成形には通常単軸成形法または静水圧成形
法が用いられるが、場合によっては原料を造粒せずにス
リップキャスティングすることも可能である。成形体は
乾燥及びバインダー類の揮散除去（脱脂）後、加工を経
て燒結する。常圧燒結の場合は、窒素雰囲気下で１６５
０〜１８００℃、保持時間は５〜１０時間が望ましく、
高温であるほど保持時間は短くすべきである。反応燒結
の場合は窒素雰囲気下１４００〜１６００℃で行い、保
持時間は形状にもよるが５〜１０時間が望ましい。[0008] For the molding, a uniaxial molding method or a hydrostatic molding method is usually used, but in some cases it is also possible to carry out slip casting without granulating the raw material. The molded body is dried and volatilized to remove binders (degreasing), and then processed and sintered. In the case of normal pressure sintering, 165 in a nitrogen atmosphere
0 to 1800 ° C., holding time is preferably 5 to 10 hours,
The higher the temperature, the shorter the holding time should be. In the case of reaction sintering, it is performed at 1400 to 1600 ° C. in a nitrogen atmosphere, and the holding time is preferably 5 to 10 hours, although it depends on the shape.
【０００９】[0009]
【実施例】次に実施例より説明する。ＳＩＡＬＯＮ−Ｂ
Ｎ質として、ＢＮ量を３０重量％、ＳＩＡＬＯＮの化学
式Ｓｉ6-zＡｌzＯzＮ8-z におけるＺ値を計算上１．０
〜５．０まで変化させた試験体と、ＳＩＡＬＯＮのＺ値
を３．０とし、ＢＮ量を０〜６０重量％まで変化させた
試験体を作製した。次にＪＩＳ Ｒ １６０１に基づい
て試験サンプルを作製した。試験サンプルを５００℃〜
１０００℃まで変化させた温度に加熱し、１０分保持し
てから水に急冷した。それからＪＩＳ Ｒ １６０１に
基づいて曲げ強度を測定した。曲げ強度が急に下がる温
度を熱衝撃値（△Ｔ）として測定した。結果を表１〜表
２に示す。EXAMPLES Next, examples will be described. SIALON-B
As the N quality, the BN amount was 30% by weight, and the Z value in the SIALON chemical formula Si 6 -zAlzOzN 8 -z was calculated to be 1.0.
˜5.0, and a SALON Z value of 3.0 and a BN amount of 0 to 60% by weight were prepared. Next, a test sample was prepared based on JIS R 1601. Test sample at 500 ℃ ~
It was heated to a temperature changed to 1000 ° C., held for 10 minutes, and then rapidly cooled to water. Then, the bending strength was measured based on JIS R 1601. The temperature at which the bending strength suddenly dropped was measured as a thermal shock value (ΔT). The results are shown in Tables 1 and 2.
【００１０】[0010]
【表１】 [Table 1]
【００１１】[0011]
【表２】 [Table 2]
【００１２】次にＳＩＡＬＯＮ−ＢＮ質（Ｚ＝３．０、
ＢＮ＝３０重量％）にて１００Ｘ２５０Ｘ１０ｍｍの試
験体を作製し、中点に５ｋｇの重りをのせた。試験体を
２点で固定して（スパン＝２００ｍｍ）１２００℃に上
げた電気炉に３０分間保持してから出して保冷する操作
を最大１０回繰り返す。比較材質としてアルミナ質とジ
ルコニア質の各試験体に同様の試験を行なった。その結
果を表３に示す。Next, SIALON-BN quality (Z = 3.0,
A test piece of 100 × 250 × 10 mm was prepared with BN = 30 wt%), and a weight of 5 kg was placed on the midpoint. The test piece is fixed at two points (span = 200 mm), held in an electric furnace heated to 1200 ° C. for 30 minutes, and then taken out and kept cold, which is repeated up to 10 times. As a comparative material, the same test was performed on each of the alumina and zirconia specimens. Table 3 shows the results.
【００１３】[0013]
【表３】 [Table 3]
【００１４】[0014]
【発明の効果】上記実施例の結果の様に本発明のＳＩＡ
ＬＯＮ−ＢＮの熱処理用セッターは耐熱衝撃性及び耐変
形性はすべて従来のアルミナ質とジルコニア質のセッタ
ーより良いため、熱処理用セッターの寿命延長が可能に
成る。The SIA of the present invention is similar to the results of the above embodiment.
The thermal shock resistance and deformation resistance of the LON-BN heat treatment setter are all better than those of the conventional alumina-based and zirconia-based setters, so that the life of the heat treatment setter can be extended.
Claims (3)
セッターにおいて、その構成成分がＳＩＡＬＯＮ−ＢＮ
質であることを特徴とする熱処理用セッター。1. A setter for heat treatment of metal products, ceramic products, etc., wherein the constituents are SIALON-BN.
Setter for heat treatment, which is characterized by its quality.
zＯzＮ8-z におけるＺ値が２．０〜４．０であることを
特徴とすとる請求項１に記載の熱処理用セッター。2. The SIALON has a chemical formula of Si 6 -zAl.
The setter for heat treatment according to claim 1, wherein the Z value in zOzN 8 -z is 2.0 to 4.0.
とを特徴とする請求項１、２に記載の熱処理用セッタ
ー。3. The setter for heat treatment according to claim 1, wherein the BN is 0.5 to 50% by weight.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7162798A JPH08333172A (en) | 1995-06-05 | 1995-06-05 | Setter for thermal treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7162798A JPH08333172A (en) | 1995-06-05 | 1995-06-05 | Setter for thermal treatment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08333172A true JPH08333172A (en) | 1996-12-17 |
Family
ID=15761419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7162798A Pending JPH08333172A (en) | 1995-06-05 | 1995-06-05 | Setter for thermal treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08333172A (en) |
-
1995
- 1995-06-05 JP JP7162798A patent/JPH08333172A/en active Pending
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