JPH08327796A - Optical element - Google Patents

Abstract

PURPOSE: To make it possible to restrain the deformation of a reflective face by shaping a photo-detecting face of the main body of an optical element with the deformation of it due to thermal expansion taken into account beforehand so that the photo- detecting face will be smooth when the temperature in a prescribed place of it goes up to a prescribed value. CONSTITUTION: The area, where emitted light beams S and the like are incident, on a photo-detecting face 17a of the main body 17 of an optical element is shaped, for example, concavely with the deformation due to thermal expansion taken into account beforehand so that it will be smooth when the temperature goes up to a prescribed value. When the continuous incidence of the beams S on the photodetecting face 17a leads to the overheat of the main body 17 of the element and is about to cause the deformation of the photo-detecting face 17a, command signals 23a for separating a lever from the main body 19 of a chamber are outputted from a controller 23 to an actuator of a mechanism 21 for regulating received heat on the basis of temperature distribution detecting signals 22a outputted from a thermograph 22. This displaces a regulating member 21d in the direction where a narrow-width part of a slit 21c approaches the optical axis of infrared beams R from an introducing rod 20d, reducing the diameter of the beams R and lowering the temperature of the photo- detecting face 17a.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical element.

[0002]

2. Description of the Related Art When an electron moving at a speed close to the speed of light is bent in its traveling direction by a magnetic field or an electric field, it emits an electromagnetic wave (light) called radiation light in the tangential direction of the orbit of the electron.

FIG. 3 shows an example of the synchrotron radiation generating means. Reference numeral 1 is a linear accelerator, and the linear accelerator 1 has an electron generator 2 for emitting electrons (charged particles) e and an electron for one end. A straight tubular acceleration duct 3 connected to the generator 2;
A high frequency accelerating device 4 for accelerating the electrons e by applying a high frequency to the electrons e moving inside the acceleration duct 3.

One end of a curved tubular deflection duct 5 is connected to the other end of the acceleration duct 3, and the deflection duct 5
A deflection electromagnet 6 for bending the trajectory of the electron e moving inside is provided in the.

Reference numeral 7 is a synchrotron, and the synchrotron 7 has an endless duct 8 for causing the above-mentioned electrons e to form a circular orbit. The other end of the deflection duct 5 is connected.

The curved portion of the endless duct 8 is provided with a deflection electromagnet 9 for bending the trajectory of the electrons e moving inside the endless duct 8. Further, a required portion of the endless duct 8 is provided with a bending electromagnet 9.
A high frequency accelerating device 10 is provided to apply a high frequency to the electrons e moving inside the endless duct 8 to accelerate the electrons e.

Furthermore, the radiant light beam S emitted by bending the traveling direction of the electrons e moving at a speed close to the speed of light in the curved portion of the endless duct 8 at the required location is an endless duct. 8 is connected to one end of a straight circular beam channel 11 for guiding the beam to the outside.

Reference numeral 12 is a spectroscope (double-crystal spectroscope). The spectroscope 12 has a hollow chamber body 13 and a first crystal made of a single crystal such as silicon or germanium contained in the chamber body 13. Spectroscopic element body 14 and second
And the dispersive element body 15 (see FIGS. 4 and 5).

One end of the chamber body 13 is connected to the other end of the beam channel 11 described above, and the other end of the chamber body 13 is connected to the experimental device 16.

The spectroscope 12 includes a beam channel 11
The radiant light beam S incident on the chamber main body 13 from the above is Bragg-reflected by the reflection surface of the first dispersive element body 14 and the anti-slope surface of the second dispersive element body 15 shown in FIGS. The monochromatic light beam X having a wavelength in the hard X-ray region emitted from the spectroscopic element body 15 is guided to the experimental apparatus 16.

The first spectroscopic element body 14 is mounted on a holder (not shown) and is supported by the chamber body 13 (see FIG. 3) so as to be displaced in the following directions. ing. Rotation in the θ ₁ direction around the vertical axis z ₁ passing through the widthwise center of the reflecting surface of the first dispersive element body 14. Tilt in the ρ ₁ direction about the horizontal axis w ₁ passing through the vertical center of the reflecting surface of the first dispersive element body 14. Vertical movement along the vertical axis z ₁ .

The second spectroscopic element body 15 is also mounted on a holder (not shown) and is supported by the chamber body 13 so that it can be displaced in the following directions. Rotation in the θ ₂ direction around the vertical axis z ₂ that passes through the widthwise center of the reflecting surface of the second spectroscopic element body 15. Tilt in the ρ ₁ direction about the horizontal axis w ₁ passing through the vertical center of the reflecting surface of the first dispersive element body 14. Vertical movement along the vertical axis z ₂ . Movement in the horizontal direction along a horizontal axis y parallel to the radiation light beam S incident on the anti-slope of the first dispersive element body 14.

Further, each of the holders to which the first spectroscopic element body 14 or the second spectroscopic element body 15 is mounted is provided with a cooling medium passage (not shown) for circulating a cooling medium. Has been.

When the synchrotron radiation beam S is emitted by the above-mentioned synchrotron radiation generating means, the insides of the acceleration duct 3, the deflection duct 5, the endless duct 8, the beam channel 11, the chamber body 13 and the experimental apparatus 16 are set at an extremely high level. After reducing the pressure to a vacuum state so that the electrons e can move inside the acceleration duct 3, the deflection duct 5, and the endless duct 8 at a speed close to the speed of light, the electrons e are emitted from the electron generator 2.

The electrons e emitted from the electron generator 2 are
The deflection electromagnet 6 is accelerated by the high-frequency accelerating device 4.
It is incident on the endless duct 8 by being bent by the.

The electron e incident on the endless duct 8 has its trajectory bent at each curved portion by the deflection electromagnet 9 and is accelerated by the high frequency accelerating device 10, whereby a radiant light beam S is emitted from the electron e.

The radiant light beam S emitted at the curved portion of the endless duct 8 at a predetermined position is reflected by the beam channel 11.
And then enters the chamber body 13 of the spectroscope 12.

The radiant light beam S incident on the chamber main body 13 is Bragg-reflected by the first spectroscopic element main body 14 and the second spectroscopic element main body 15 (see FIGS. 4 and 5), and the second spectroscopic element main body. A monochromatic light beam X having a wavelength in the hard X-ray region emitted from 15 enters the experimental device 16.

At this time, by continuously circulating the cooling medium through the cooling medium passage described above, the radiation light beam S
When the light enters, the heat received by the first dispersive element body 14 and the second dispersive element body 15 is discharged to the outside to suppress the deformation of the reflecting surface due to thermal expansion, and the reflection efficiency of both the dispersive element bodies 14 and 15 is reduced. To prevent the decline of.

[0020]

However, when the intensity of the emitted light beam S is high, the beam cross-sectional area of the emitted light beam S is small even if the cooling medium is continuously circulated in the cooling medium passage. Due to this, deformation due to thermal expansion locally occurs on the reflecting surfaces of both spectroscopic element bodies 14 and 15, and the reflection efficiency of both spectroscopic element bodies 14 and 15 tends to decrease.

The present invention has been made in view of the above circumstances, and an object thereof is to provide an optical element capable of suppressing the deformation of a reflecting surface even when the intensity of light to be reflected is high. There is.

[0022]

To achieve the above object, in an optical element of the present invention, an optical element body having one surface as a light receiving surface, a cooling structure for cooling the optical element body, and the optical element described above. A non-contact type heater for irradiating the light receiving surface of the element body with a heat ray beam; and a heat receiving amount adjusting mechanism for adjusting the beam cross-sectional area of the heat ray beam with which the light receiving surface of the optical element body is irradiated from the non-contact type heater. A temperature distribution detector that detects a temperature distribution on the light receiving surface of the optical element body, and a controller that operates a heat receiving amount adjustment mechanism based on a temperature distribution detection signal output from the temperature distribution detector, A predetermined portion of the light receiving surface of the optical element body is formed in advance in a shape that allows for deformation due to thermal expansion so as to be smooth when the temperature of the predetermined portion rises to a certain value.

[0023]

In the optical element of the present invention, when the light is not incident on the light receiving surface of the optical element body or when the light starts to be incident, the light receiving portion of the optical element body which is in a supercooled state by the cooling structure is received. A heat ray beam is irradiated from a non-contact type heater to a predetermined portion of the surface, and a predetermined portion of the light receiving surface is flattened by thermal expansion.

Further, when light is continuously incident on the light receiving surface of the optical element body, the heat ray beam emitted from the non-contact heater to a predetermined portion of the light receiving surface of the optical element body which is about to be overheated. The beam diameter of is reduced by the heat receiving amount adjusting mechanism and thermal expansion is suppressed, so that a predetermined portion of the light receiving surface is kept flat.

[0025]

Embodiments of the present invention will be described below with reference to the drawings.

1 and 2 show an embodiment of the optical element of the present invention. In this embodiment, the optical element body 17, the holder (cooling structure) 18, the chamber body 19, the infrared heater (non-heater) is used. A contact type heater) 20, a heat receiving amount adjusting mechanism 21, a thermograph (temperature distribution detector) 22, and a controller 23 are provided.

The optical element body 17 is a spectroscopic element made of a single crystal of silicon, germanium, or the like, or a reflecting mirror made of metal or the like, and has a light receiving surface 17a on which the radiated light beam S or the like is incident. .

A predetermined portion of the light receiving surface 17a of the optical element body 17 (a portion on which the radiated light beam S or the like is incident) is smoothed when the temperature of the predetermined portion rises to a certain value. It is formed in advance into a shape (for example, a concave shape) that allows for deformation due to thermal expansion.

The holder 18 is made of oxygen-free copper or the like having high thermal conductivity.

Inside the holder 18, the holder 18 extends from a portion near one end of the holder 18 toward a portion near the other end.
The cooling medium flow path 18a is provided so as to extend along one surface.

The optical element body 17 has a light receiving surface 17a.
The anti-light receiving surface 17b, which is the back surface of the optical element main body 17, is mounted on the holder 18 so as to make surface contact with one surface of the holder 18, and the optical element main body 17 is cooled by continuously circulating the cooling medium through the cooling medium flow path 18a. It is supposed to be done.

The chamber body 19 is formed in a hollow box structure.

Connection pipes 19a and 19b are provided at one end and the other end of the chamber body 19 so as to face each other, and one connection pipe 19a is connected to the beam channel 11 (see FIG. 3). As described above, the other connecting pipe 19b is adapted to be connected to the experimental device 16 (see FIG. 3).

A heater mounting tube 19c and an opening 19d are provided in the upper portion of the chamber body 19, and the opening 19d is provided.
A window member 19e made of a transparent material such as glass is fitted in d so as to keep the inside of the chamber body 19 airtight.

An adjusting mechanism mounting tube 19f is provided on one side of the chamber body 19.

The optical element body 17 and the holder 1 described above
The reference numeral 8 indicates that the light receiving surface 17a of the optical element body 17 is positioned directly below the heater mounting tube 19c with a predetermined angle, and the holder 18 is fixed to the inner bottom portion of the chamber body 19 via the support legs 18b. The light (for example, the radiated light beam S) traveling toward the inside of the chamber body 19 through one of the connecting pipes 19a is incident on a predetermined portion of the light receiving surface 17a, and from a predetermined portion of the light receiving surface 17a. The emitted light (for example, the monochromatic light beam X having a wavelength in the hard X-ray region) is
It goes so as to proceed toward the outside of the chamber main body 19 via the other connecting pipe 19b.

Further, one end of the cooling medium flow path 18a of the holder 18 is provided with a flow rate adjusting valve 18c and the upstream end is downstream of the cooling medium supply pipe 18d which communicates with a cooling medium delivery source (not shown) such as a pump. The other end of the cooling medium flow passage 18a is connected to the upstream end of the cooling medium recovery pipe 18e, the downstream end of which communicates with the cooling medium delivery source via a heat exchanger (not shown). ing.

Predetermined portions of the cooling medium supply pipe 18d and the cooling medium recovery pipe 18e pass through the chamber body 19 so as to keep airtightness.

The infrared heater 20 has an infrared lamp 20a for emitting an infrared beam R and an elliptical reflecting mirror 20b for condensing the infrared beam R from the infrared lamp 20a, and supports the infrared lamp 20a. The heater main body 20c, an introducing rod 20d for emitting the infrared beam R condensed by the elliptical reflecting mirror 20b in a predetermined direction, the introducing rod 20d and the infrared lamp 2.
It has a lamp position adjusting mechanism 20e that adjusts the distance from 0a.

The heater body 20c is composed of the introduction rod 2
0d is located inside the heater mounting tube 19c, and is hermetically mounted on the heater mounting tube 19c through a linear introducer 20f for adjusting the relative position of the heater body 20c to the chamber body 19. ing.

The infrared heater 20 includes an infrared lamp 2
When 0a is turned on, the infrared beam R emitted from the infrared lamp 20a is irradiated through the introducing rod 20d to the vicinity of a predetermined position on the light receiving surface 17a of the optical element body 17, and when the linear introducer 20f is operated, the introduction is performed. Rod 20d
Are arranged to approach or separate from the light receiving surface 17a of the optical element body 17.

The heat receiving amount adjusting mechanism 21 is the adjusting mechanism mounting tube 1.
The supporting member 21a attached to 9f and the radiating light beam S and the infrared light beam R incident on the light receiving surface 17a of the optical element body 17 can be moved in a direction substantially orthogonal to the respective optical axes and are kept airtight. The support member 21
A rod-shaped moving member 21b inserted through a and a slit 21c having a gradually changing width are provided, and the distal end portion of the moving member 21b is positioned so that the slit 21c is located immediately below the introducing rod 20d of the infrared heater 20. An adjusting member 21d attached to the actuator 2 and an actuator 2 arranged outside the chamber body 19 and for moving the moving member 21b.
1e and.

This actuator 21e is composed of the moving member 2
1b includes a lever 21f that is connected to the base end portion of 1b and that moves in a direction substantially orthogonal to the optical axes of the emitted light beam S and the infrared beam R based on a command signal 23a described later. The closer to the chamber body 19, the wider the width of the slit 21c becomes.
As the adjustment member 21d is displaced in a direction approaching the optical axis of the infrared beam R emitted from d, and the lever 21f is separated from the chamber body 19, the narrower portion of the slit 21c is the light of the infrared beam R. The adjusting member 21d is displaced in a direction approaching the shaft.

That is, the slit 21 of the adjusting member 21d
By changing the relative position between c and the introducing rod 20d of the infrared heater 20, the beam diameter of the infrared beam R emitted from the introducing rod 20d to the light receiving surface 17a of the optical element body 17 is adjusted. It has become.

The thermograph 22 is arranged outside the chamber body 19 so as to face the window member 19e, detects the temperature distribution near a predetermined portion of the light receiving surface 17a of the optical element body 17, and outputs the temperature distribution detection signal 22a. It is configured to output.

Based on the temperature distribution detection signal 22a from the thermograph 22, the controller 23 moves the lever 21f to the chamber body 19 when the temperature of the light receiving surface 17a of the optical element body 17 is lower than a certain temperature. To the actuator 21e to output a command signal 23a
When the temperature of the light receiving surface 17a of the optical element body 17 is higher than a certain temperature, a command signal 23a for separating the lever 21f from the chamber body 19 is output to the actuator 21e. There is.

The operation of this embodiment will be described below.

For example, the light receiving surface 17 of the optical element body 17
When the radiant light beam S is incident on a to disperse the monochromatic light beam X having a wavelength in the hard X-ray region, the inside of the chamber body 19 is depressurized to an ultra-high vacuum state, and at the same time, a cooling medium such as a pump is sent. By operating a power source (not shown), the cooling medium delivery source, the cooling medium supply pipe 18d, the cooling medium flow path 18
a, the cooling medium recovery pipe 18e, a heat exchanger (not shown), and the cooling medium are continuously circulated through the cooling medium delivery source so that the optical element body 17 is cooled through the holder 18. Keep it.

The infrared lamp 2 of the infrared heater 20
0a is turned on, and the optical element body 1 is introduced from the introducing rod 20d.
The infrared beam R is applied to a predetermined portion of the light receiving surface 17a of the laser beam 7.

At this time, the cooling medium flow path 18 of the holder 18
Since the optical element body 17 is in a supercooled state due to the cooling medium flowing through a, and the temperature of the light receiving surface 17a of the optical element body 17 is lower than a certain value, the temperature distribution output from the thermograph 22. Based on the detection signal 22a,
From the controller 23 to the actuator 2 of the heat reception amount adjustment mechanism 21
A command signal 23a that causes the lever 21f to approach the chamber body 19 with respect to 1e is output, and the slit 21c
Of the infrared beam R emitted from the introducing rod 20d, the adjusting member 21d is displaced in the direction in which the wide portion of the adjusting rod 21d moves toward the light receiving surface 1 of the optical element body 17 from the introducing rod 20d.
The beam diameter of the infrared beam R with which 7a is irradiated expands.

When the beam diameter of the infrared beam R is expanded,
As the amount of received light increases, the temperature of the light receiving surface 17a begins to rise.

Further, when the temperature of the predetermined portion of the light receiving surface 17a rises to a certain value, the predetermined portion of the light receiving surface 17a becomes flat due to thermal expansion.

In this state, when the radiated light beam S is advanced toward the inside of the chamber body 19 through the one connecting pipe 19a, the radiated light beam S is applied to a predetermined portion of the light receiving surface 17a of the optical element body 17. The monochromatic light beam X having a wavelength in the hard X-ray region which is incident and is emitted from a predetermined portion of the light receiving surface 17a travels to the outside of the chamber body 19 via the other connecting tube 19b.

When the emitted light beam S continues to be incident on the light receiving surface 17a of the optical element body 17, the temperature of the light receiving surface 17a rises, and a predetermined portion of the light receiving surface 17a tends to be deformed by thermal expansion.

At this time, when the light receiving surface 17a of the optical element body 17 is about to be deformed due to the overheated state of the optical element body 17, the controller is based on the temperature distribution detection signal 22a output from the thermograph 22. 23 outputs a command signal 23a for moving the lever 21f away from the chamber body 19 to the actuator 21e of the heat receiving amount adjusting mechanism 21, and the narrow portion of the slit 21c emits the infrared beam R emitted from the introducing rod 20d. The adjusting member 21d is displaced in the direction of approaching the axis, and the introducing rod 20
The beam diameter of the infrared beam R emitted from d to the light receiving surface 17a of the optical element body 17 is reduced.

When the beam diameter of the infrared beam R is reduced,
As the amount of light received decreases, the temperature of the light receiving surface 17a begins to drop.

Further, when the temperature of the predetermined portion of the light receiving surface 17a drops to a certain value, the predetermined portion of the light receiving surface 17a becomes flat due to thermal expansion.

As described above, in this embodiment, a predetermined portion of the light receiving surface 17a of the optical element body 17 is preliminarily subjected to thermal expansion so as to be in a smooth state when the temperature of the predetermined portion rises to a certain value. The shape of the infrared beam R is adjusted so that the temperature of the light receiving surface 17a of the optical element body 17 is detected and the temperature of the light receiving surface 17a is kept constant. Therefore, the optical element body 1
Even if the intensity of the light such as the radiant light beam S that is incident on 7 is increased, a predetermined portion of the light receiving surface 17a can be held in a flat state, and the reflection efficiency of the optical element body 17 is always kept in an optimum state. You can

The optical element of the present invention is not limited to the above-mentioned embodiment, but a reflecting mirror or a diffraction grating may be used for the optical element body instead of the spectroscopic element.
It is needless to say that a two-crystal spectroscope can be formed by using two spectroscopic element bodies and that various changes can be made without departing from the scope of the present invention.

[0060]

As described above, in the optical element of the present invention, a predetermined portion of the light receiving surface of the optical element body is made smooth when the temperature of the predetermined portion rises to a certain value. When the light is not incident on the light-receiving surface or when light starts to be incident on the light-receiving surface of the optical element body that is in a supercooled state by the cooling structure, A non-contact type heater irradiates a predetermined position with a heat ray beam to flatten a predetermined part of the light receiving surface by thermal expansion, and when light is continuously incident on the light receiving surface, it is overheated. The heat beam adjusting mechanism reduces the beam diameter of the heat ray beam emitted from the infrared heater to a predetermined position on the light-receiving surface of the optical element body that is about to become a flat state at a predetermined position on the light-receiving surface by suppressing thermal expansion. In Since, it is possible to maintain at all times an optimum state the reflection efficiency of the optical element body even higher intensity of light incident on the optical element body, an excellent effect.

[Brief description of drawings]

FIG. 1 is a partially cut side view showing an embodiment of an optical element of the present invention.

FIG. 2 is a partially cut plan view showing an embodiment of the optical element of the present invention.

FIG. 3 is a conceptual diagram showing an example of radiation light generation means.

FIG. 4 is a conceptual diagram showing a state in which the spectral element bodies are close to each other in an example of a spectroscope.

FIG. 5 is a conceptual diagram showing a state in which the spectroscopic element bodies are separated from each other in an example of a spectroscope.

[Explanation of symbols]

 17 Optical Element Main Body 17a Light-Receiving Surface 18 Holder (Cooling Structure) 20 Infrared Heater (Non-contact Heater) 21 Heat-Reception Amount Adjustment Mechanism 22 Thermograph (Temperature Distribution Detector) 22a Temperature Distribution Detection Signal 23 Controller R Infrared Beam (Heat beam)

Claims (1)

[Claims] 1. An optical element body having one surface as a light receiving surface, a cooling structure for cooling the optical element body, and a non-contact type heater for irradiating a heat ray beam to the light receiving surface of the optical element body. A heat receiving amount adjusting mechanism for adjusting the beam cross-sectional area of the heat ray beam irradiated from the non-contact type heater to the light receiving surface of the optical element body, and a temperature distribution detector for detecting the temperature distribution of the light receiving surface of the optical element body. And a controller that operates a heat receiving amount adjusting mechanism based on a temperature distribution detection signal output from the temperature distribution detector, and a temperature of the light receiving surface of the optical element body is set to a predetermined position. An optical element characterized in that it is preliminarily formed into a shape that allows for deformation due to thermal expansion so as to be in a smooth state when rising to a certain value.