JPH08320715A - Tcp mounted device - Google Patents

Abstract

PURPOSE: To reduce a position shift defect due to TCP mounting and stress remaining on the TCP. CONSTITUTION: This device is equipped with a conveying means 12 which conveys the TCP 1 to a mount position on a substrate and positions the TCP 1 according to specific correction quantity information, a position correction control means 10 which acquires the position of the TCP 1 conveyed by the conveying means 12, calculates a correction quantity on the basis of the corresponding position information, and outputs the corresponding correction quantity information to the conveying means 12, and a connecting means 14 which bonds the TCP 1 whose position is corrected by the conveying means 12 to the substrate according to specific setting position information; and the position correction control means 10 is equipped with a lead height detection part 16 which detects the height of each lead of the TCP 1 conveyed by the conveying means 12 and a height-directional position correction part 18 which calculates the mean height of the respective leads and outputs the same height as the lead height mean value as setting position information to the connecting means 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a TCP mounting device, and more particularly to a TCP mounting device for mounting a TCP (Tape Carrer Package) and a pad of a substrate.

[0002]

2. Description of the Related Art T on a substrate in a conventional TCP mounting device
The CP positioning mechanism is generally a method of capturing a two-dimensional image from the upper surface or the lower surface when sucking and holding TCP, calculating the position of each lead or TCP itself in the XYθ direction, and correcting the amount of deviation from the reference mark on the substrate. Is.

Since the TCP body is made of a polyimide film, it is very soft, and the film bends in various directions, and the leads also follow this bend. Therefore, hitherto, as a method for correcting the warp of the film, a method of adsorbing and holding the outer periphery of the film and a method of pressing the film against the glass plate at the time of recognizing the lead have been dealt with.

[0004]

However, in the conventional method of sucking and holding the outer periphery of the film, if the suction force does not reach the bending correction force, a clearance may be formed between the film and the suction jig, and there is a possibility that the suction cannot be performed. There was an inconvenience. On the other hand, if the suction force is too large, the film will bend in the other direction.

The method of pressing against the glass plate at the time of lead recognition has a problem that the recognition accuracy is insufficient when the pressing into the glass plate is insufficient or excessive.

[0006]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a TCP mounting apparatus capable of eliminating the disadvantages of the conventional example and, in particular, reducing misalignment in TCP mounting and residual stress in TCP after mounting. It is in.

[0007]

Therefore, in the present invention,
As a first means, a transport means that transports the TCP to a mounting position on the board and positions the TCP based on predetermined correction amount information, and a transport means that transports the TCP.
A position correction control unit that captures the position of the CP, calculates a correction amount based on the position information, and outputs the correction amount information to the conveyance unit, and a TC that is position-corrected by the conveyance unit.
Connection means for bonding P to the substrate based on predetermined set position information. Of these, the position correction control means calculates the average value of the lead height detection units that detect the heights of the leads of the TCP conveyed by the conveyance means, and the lead height averages. The height direction position correction unit that outputs the same height as the value as the set position information to the connection unit is adopted.

As a second means, in addition to the structure of the first means, the lead height detection unit tilts the first camera for picking up an image of the TCP lead from above and a predetermined angle with respect to the first camera. And a second camera for picking up an image of the TCP lead from the same direction, and a read position comparison function for comparing the read positions in the image data from the first or second camera, and a read position comparison function from the read position comparison function. It is configured to have a lead height calculation function for calculating the height of the lead based on the lead position information.

As a third means, the position correction control means is
An inter-lead length calculation unit that calculates the length between the leads based on the height information of each lead, and a TCP correction amount that is calculated based on the inter-lead length, and the correction amount information is conveyed by the conveying means. And a plane direction position correction unit for outputting to.

[0010]

In the first means, first, the carrying means carries the TCP to the mounting position on the substrate. Then, the position correction control means recognizes the position of the TCP carried by the carrying means, and based on the TCP position information, the TC concerned.
Correct the position of P. At this time, first, the lead height detector detects the height of each lead of the TCP. Then, the height direction position correction unit calculates an average value of the lead heights and outputs the same height as the lead height average value to the connecting means as set position information. Further, the connecting means bonds the TCP whose position is corrected by the carrying means to the substrate based on the set position information. For this reason, since it is not mounted with a large deflection, the reaction force due to the correction after the TCP mounting is suppressed.

In the second means, when detecting the height of the lead, first, the first camera takes an image of the TCP lead from above, and before and after this, the second camera becomes the first camera. The TCP lead is imaged from a direction inclined by a predetermined angle. Further, the lead position comparison function compares the lead positions in the image data from the first or second camera, and then the lead height calculation function based on the lead position information from the lead position comparison function. Calculate the lead height.

In the third means, when correcting the position of the TCP, first, the lead-to-lead length calculation unit calculates the length between the leads based on the height information of each lead, and further the position in the plane direction. The correction unit calculates the TC based on the length between the leads.
The position of P is corrected.

[0013]

An embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing the structure of a TCP mounting apparatus according to the present invention. The TCP is transported to the mounting position on the board, and the TC is transferred based on the predetermined correction amount information.
Position correction control that captures the position of the transport unit 12 that positions P and the position of the TCP that is transported by this transport unit 12, calculates a correction amount based on the position information, and outputs the correction amount information to the transport unit 12. Means 10 and connection means 14 for bonding the TCP whose position has been corrected by the conveying means 12 to the substrate based on predetermined set position information.

Moreover, the position correction control means 10 calculates the lead height detecting section 16 for detecting the height of each lead of the TCP conveyed by the conveying means 12, and calculates the average value of the respective lead heights. A height direction position correction unit 18 that outputs the same height as the lead height average value to the connecting unit 14 as set position information is provided.

This will be described in detail.

FIG. 2 is a block diagram showing a detailed structure of the lead height detecting section 16. Here, the lead height detection unit 1
Reference numeral 6 denotes a first camera 28 that takes an image of the TCP lead from above, and a predetermined angle inclination θ with respect to the first camera 28.
Second camera 3 for picking up an image of the TCP lead from the same direction
0, and an image processor for image-processing the images from these first and second cameras. Further, this image processor is based on the lead position comparison function 24 for comparing the lead positions in the image data from the first or second camera 28, 30 and the lead position information from the lead position comparison function 24. A lead height calculation function 26 for calculating the height of the lead is provided. A ring illumination (not shown) is provided in the vicinity of the first camera 28.

Since the upper surface of the TCP lead is illuminated by this ring illumination, only the upper surface of the lead is imaged. By binarizing the captured image with a predetermined threshold value, the image data shown in FIG. 3 is obtained. The lead tip position on the XY plane is measured on the image of the first camera unit.

In the present embodiment, the measurement of the lead height h in the Z direction is performed by comparing the images taken by the first and second cameras 28 and 30. Taking the lead A as an example, the center position of the lead A is imaged at a distance b from the center of the screen for the first camera and a distance a for the second camera. The fact that the distance b is longer than the distance a is due to the influence of the inclination angle θ between the cameras, and the height h of the lead A is calculated by the following equation (1) using the distances a and b and the angle θ (FIG. 4). reference).

H = [(x2−x1 cos θ) / tan θ] / (camera magnification) ... Formula (1)

The height of all the leads can be measured by operating each lead in the same manner. Further, position correction control in the Z direction is performed based on the average value of the heights of all the leads. The height direction position correction unit 18 outputs the read height average value to the conveying unit 12 as set position information. The transport unit 12 corrects the position of the TCP in the height direction based on the set position information.

As shown in FIG. 5, the height average value is calculated based on the lead height of the TCP1 in which the deflection has occurred as shown in FIG. 5 (A). Next, as shown in FIG. 5B, the transporting unit 12 positions the TCP1 so that the position specified by this average height value is the upper surface of the substrate. Then, the deflection in the downward direction from the position of the height average value of TCP1 is corrected. Then, the upward deflection of the TCP is corrected by the pressure applied by the heat tool 3.

As described above, since the mounting position is corrected based on the average height of the leads, even if the TCP material is a soft material such as a polyimide film and is bent, the bending is corrected. Therefore, it is possible to effectively reduce the reaction force that occurs when the mounting is performed with the flexure generated. Therefore, it is possible to realize a high yield and to realize a high-density mounting. Since high performance can be achieved and residual stress is reduced, highly reliable mounting is possible.

Further, in this embodiment, the distance between the leads is calculated based on the lead height h calculated for each lead, and the mounting position after the deflection is corrected is calculated based on the distance between the leads. ing.

FIG. 6 is a block diagram showing the construction of an embodiment for calculating the lead position after the deflection is corrected.
Here, the position correction control means 10 calculates the length between the leads based on the height information of the leads, and the correction amount based on the length between the leads. Then, the plane direction position correction unit 22 that outputs the correction amount information to the transport unit 12 is provided.

The calculation in the embodiment shown in FIG. 6 is as follows.
6 is a TCP mounting position after the deflection is corrected by the method shown in FIG. FIG. 7 is a schematic diagram of the deflection correction, and d in the figure
The dimensions of 1, d2, and d3 are lead-to-lead distances obtained from the measurement results including deflection. This lead-to-lead distance is calculated from each lead height h and the position information of each lead captured by the first camera.

Since the image of TCP taken from the upper front is similar to the actual size, by extracting the position of each lead in the image data taken by the first camera, c1 to c3 shown in FIG. 8 are obtained. It is calculated. Further, the lead height detector 16 calculates the heights h1 to h4 of each lead. Here, the inter-lead distances d1 to d3 are calculated based on the height of each lead and the inter-lead distance.

The plane direction position correcting section 22 corrects the value obtained by summing the lead-to-lead distances to the TC after correcting the deflection in the X direction.
It is the mounting position of P. Further, the position in the Y direction is the Y of the tip of the lead having the same height as the average value of the lead height after the deflection is corrected.
Can be approximated to coordinates. If the TCP mounting position after the correction does not correspond to the mounting position on the predetermined board, the setting position information in the plane direction is output to the transporting unit 12 assuming that the bending state is not changed.

The conveying means 12 positions the deflected TCP in the plane direction based on the set position information in the plane direction. Then, after the deflection is corrected by the mounting, the mounting is accurately performed at a predetermined position on the substrate.

As described above, in the example shown in FIG. 6, the lead position on the XY plane and the height of each lead are measured in the lead position recognition to calculate the XY position after the deflection of the film is corrected. It becomes possible and highly accurate positioning can be realized by the position correction based on this data.

As described above, according to the present embodiment, the correction force is minimized by bonding while holding the TCP at the average position of the height based on the height data of the lead, and further, after the bending correction, Since the mounting position is calculated and the positioning is performed, it is possible to suppress the reaction force of the flexure correction that remains in the TCP after mounting and reduce the positioning defect, which has the effect of improving the connection reliability. Therefore, it is possible to realize a TCP mounted product that satisfies a high yield and high performance / reliability.

[0032]

Since the present invention is constructed and functions as described above, according to this, the lead height detecting unit detects the height of each lead of the TCP, and the height direction position correcting unit detects the height. Since the average value of the lead heights is calculated and the same height as the lead height average value is output to the connecting means as the setting position information, the connecting means is the average value of the lead heights, and thus the deflection occurrence Since the bonding is performed at the center position, the flexure is corrected before the mounting, and the large flexure is not mounted. Therefore, it is possible to effectively suppress the generation of the reaction force due to the correction after the TCP mounting,
Therefore, the residual stress after the TCP mounting is reduced,
It is possible to realize a high yield and to manufacture a high-performance and highly reliable TCP mounted product. in this way,
An outstanding T that can reduce the misalignment in TCP mounting and the residual stress in TCP after mounting.
A CP mounting device can be provided.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a TCP mounting apparatus according to the present invention.

FIG. 2 is a diagram showing a detailed configuration of a lead height detection unit shown in FIG.

FIG. 3 is an explanatory diagram showing an example of image data captured by the first and second cameras shown in FIG.

FIG. 4 is an explanatory diagram showing a lead height h calculated from the image data shown in FIG.

5 (A) to (C) are T according to the average value of the lead height.
It is explanatory drawing which shows the position correction of CP.

FIG. 6 is a block diagram showing a detailed configuration of a position correction control unit 10.

7 is a schematic perspective view of a TCP for explaining position correction in the plane direction in the configuration shown in FIG.

FIG. 8 is a front view of the TCP shown in FIG. 7 with a part thereof omitted.

[Explanation of symbols]

 10 Position Correction Control Means 12 Conveying Means 14 Connecting Means 16 Lead Height Detection Section 18 Height Direction Position Correction Section 20 Lead Length Calculation Section 22 Plane Direction Correction Section 24 Lead Position Comparison Function 26 Lead Height Calculation Function 28 First Camera 30 second camera

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical indication H01L 21/68 G06F 15/64 D

Claims (3)

[Claims] 1. A transport means for transporting the TCP to a mounting position on a board and positioning the TCP based on predetermined correction amount information, and a TCP transported by the transport means.
Position correction control means for capturing the position of the position and calculating a correction amount based on the position information and outputting the correction amount information to the conveying means, and TCP for which the position is corrected by the conveying means is set to predetermined position information. In a TCP mounting apparatus including a connecting means for bonding to the substrate based on the above, the position correction control means detects a height of each lead of the TCP carried by the carrying means, and a lead height detecting section. A height direction position correction unit that calculates an average value of the lead heights and outputs the same height as the lead height average value as the set position information to the connecting means. TCP mounting device. 2. The lead height detection unit includes a first camera that captures an image of the TCP lead from above, and a second camera that captures an image of the TCP lead from a direction inclined by a predetermined angle with respect to the first camera. And a lead position comparing function for comparing lead positions in image data from the first or second camera, and the height of the lead based on lead position information from the lead position comparing function. The TCP mounting apparatus according to claim 1, further comprising a lead height calculating function for calculating 3. The lead-to-lead length calculation unit for calculating the length between the leads based on the height information of the leads, and the TCP based on the lead-to-lead length. 2. The TCP mounting apparatus according to claim 1, further comprising: a plane direction position correction unit that calculates the correction amount and outputs the correction amount information to the conveying unit.