JPH08320231A - Gyro device and its manufacture - Google Patents

Abstract

PURPOSE: To provide an electrostatic bearing type acceleration detecting type gyro device constituted in such a way as to make the displacement of a gyro rotor actively zero. CONSTITUTION: Control DC voltage for generating electrostatic bearing power, and displacement detecting AC voltage for detecting the displacement of a gyro rotor 20 are applied to electrostatic bearing electrodes, and a displacement detecting current (iP) generated at a displacement detecting electrode part is detected by a displacement detecting circuit 35. A control arithmetic part 140 computes the displacement of the gyro rotor 20 and control DC voltage to be applied to the electrostatic bearing electrodes from the displacement detecting voltage VP outputted from the displacement detecting circuit 35.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration detecting gyro device suitable for use in a moving body such as an automobile, a ship and an aircraft, for detecting an angular velocity or an angular change and acceleration with respect to an inertial space. More specifically, the present invention relates to an extremely small acceleration detection type gyro device of a type in which a gyro rotor is floatingly supported by electrostatic supporting force.

[0002]

2. Description of the Related Art An example of a conventional gyro device will be described with reference to FIGS. This gyro device is disclosed in Japanese Patent Application No. 6-136074 filed on June 17, 1994 by the same applicant as the present applicant. See that application for details.

First, the structure of the gyro device will be described with reference to FIG. This gyro device is called an electrostatic gyro, and has a disk-shaped gyro rotor 20 that is floatingly supported by an electrostatic supporting force, and a gyro case 21 that houses the gyro rotor 20 therein.

Here, XYZ coordinates are set for the gyro device as shown in the figure. The Z axis is taken upward along the central axis of the gyro device, and the X axis and the Y axis are taken perpendicularly thereto. The spin axis of the gyro rotor 20 is arranged along the Z axis.

The gyro case 21 has an upper bottom member 22 and a lower bottom member 24, and an annular spacer 23 connecting them, which may be connected by a suitable fastening means such as a machine screw 25. Thus, a disk-shaped hollow portion 26 for housing the gyro rotor 20 is formed inside the gyro case 21.

As shown in FIG. 13A, the upper bottom member 22 and the lower bottom member 24 have holes 22A, 2
2A ′ is formed, and a cap 32 is loaded in the hole 22A of the upper bottom member 22. The cap 32 incorporates a getter member 33 for maintaining the cavity 26 at a high vacuum for a long period of time. A pipe 34 is connected to the hole 22A ′ of the lower bottom member 24, and the hollow portion 26 is evacuated and evacuated through the pipe 34.

The gyro rotor 20 is formed of a conductive material, and as shown in FIG. 13A, preferably has a thin central portion 20B and an outer thicker annular electrode portion 20.
It may be configured to have C and. A through hole 20A is formed in the central portion 20B along the central axis.

The gyro device has a displacement detection device for detecting the displacement of the gyro rotor 20 with respect to the gyro case 21, and the displacement detection device detects the displacement of the gyro rotor 20 in the radial direction. Such a displacement detecting device may include, for example, as shown in FIG. 13A, a light emitting element 27 and a light receiving element 28 which are respectively arranged on the upper surface and the lower surface inside the cavity portion 26 of the gyro case 21. The light receiving element 28 may be configured by being divided into four segments 28-1, 28-2, 28-3, 28-4 as shown in FIG. 13B.

The light emitting element 27 and the light receiving element 28 are respectively arranged on both sides of the hole 20A of the gyro rotor 20 so that the optical path thereof passes. When the gyro rotor 20 is displaced in the radial direction, the position of the hole 20A is displaced with respect to the optical path, so that the amount of light received by the light receiving element 28 among the light generated by the light emitting element 27 changes. Since the amounts of change in the amount of light received by the four light receiving element segments are different from each other, the magnitude and direction of the radial displacement of the gyro rotor 20 can be obtained.

Electrostatic support electrodes 29-1 to 29-4 and rotor rotation driving coils 30-1 to 30-4 are concentrically arranged on the inner surface of the upper bottom member 22, and similarly, the lower bottom portion is arranged. Electrostatic support electrodes 29'-1 to 29'-1 are concentrically provided on the inner surface of the material 24.
29'-4 and coils 30'-1 to 30 'for rotating the rotor.
0'-4 is arranged. Such an electrostatic supporting electrode 29-
1 to 29-4, 29'-1 to 29'-4 and rotor rotation driving coils 30-1 to 30-4, 30'-1 to 30 '
-4 is arranged corresponding to the electrode portion 20C of the gyro rotor 20 and spaced from it. The positional relationship between the electrostatic supporting electrodes 29-1 to 29-4, 29'-1 to 29'-4 and the electrode portion 20C of the gyro rotor 20 will be described in detail later.

As shown in FIG. 13B, for example, the first pair of electrostatic support electrodes 29-1, 29'-1 and the third pair of electrostatic support electrodes 29-3, 29'-3 are arranged on the X-axis. And the second pair of electrostatic support electrodes 29-2, 29'-2 and the fourth pair of electrostatic support electrodes 29-4, 29'-4 are arranged along the Y-axis. . Electrostatic support electrodes 29-1 to 29-4,
29'-1 to 29'-4 are coils 3 for rotor rotation drive.
It may be arranged between 0-1 to 30-4 and 30'-1 to 30'-4. Electrostatic support electrodes 29-1 to 29-4 and 2
9'-1 to 29'-4 may be formed in a fan shape as shown.

Rotor rotation drive coils 30-1 to 30-
When a driving AC voltage is applied to 4, 30'-1 to 30'-4, the gyro rotor 20 rotates at high speed with the Z axis as the spin axis. When the desired number of revolutions is reached, the AC voltage is cut off, but the gyro rotor 20 continues to coast for the duration of its subsequent use. Since the gyro rotor 20 is supported in a non-contact manner by the hollow portion 26 of the gyro case 21 maintained in a high vacuum, it continues to rotate for several months or longer.

Since no torque acts on the gyro rotor 20 from the outside, the spin axis direction of the gyro rotor 21 is constant with respect to the inertial space regardless of the movement of the gyro case 21 due to the law of inertia. Maintained in the direction.

The structure and operation of the Z constraint control system and the XY constraint control system and the rotor drive system 100 provided in the gyro device of this embodiment will be described with reference to FIG. The Z constraint control system functions to restrain the displacement of the gyro rotor 20 in the Z axis direction. That is, it has a function of levitating the gyro rotor 20 and holding it at a predetermined position. The XY constraint control system functions to restrain the displacement of the gyro rotor 20 in the XY axis directions, and the rotor drive system 100 functions to rotate the gyro rotor 20 around the spin axis.

Of the electrode portion 20C of the gyro rotor 20, a portion corresponding to the first pair of electrostatic supporting electrodes 29-1 and 29'-1 is referred to as a first portion P ₁ and a second pair of electrostatic electrodes is provided. a portion corresponding to the supporting electrode 29-2,29'-2 and a second portion P _2, a third pair of electrostatic supporting electrodes 29-3,29'-
The portion corresponding to 3 is the third portion P _3, and the portion corresponding to the fourth pair of electrostatic support electrodes 29-4 and 29′-4 is the fourth portion.
Part P ₄ .

First, the structure and operation of the Z constraint control system will be described. The Z restraint control system of this example is an electrostatic system, and the gyro rotor 20 is supported and restrained in a floating manner by an electrostatic force generated between the gyro rotor 20 and the electrostatic support electrode.

The Z-restraint control system of this example is based on the gyro rotor 2
_No. 0 electrode portion 20C (portions P ₁ and P _{3 in} FIG. 14) and four pairs of electrostatic support electrodes 29-1, 29′-1, 29-2, 29′− provided on both sides of the gyro rotor 20. 2, 29
-3, 29'-3, 29-4, 29'-4 (only 29-1, 29'-1, 29-3, 29'-3 are shown in FIG. 14) and each of these electrostatic supporting electrodes. Four connected transformers 41, 42, 43, 44 (41, 43 in FIG. 14)
(Only shown).

Here, for simplification, the gyro rotor 2
It is assumed that the displacement Δx in the X-axis direction of 0 and the displacement Δy in the Y-axis direction are zero. As shown in FIG. 14, the first and the third
The displacements Δx at the midpoints T1 and T4 of the transformers 41 and 43 of
An AC voltage (1 ± K ₁ Δx) V _TX modified by is applied, where the coefficient is (1 ± K ₁ Δx) =
It becomes 1. The point T1, T4 hence the reference frequency AC voltage V _TX of f _o is applied. Output terminals T2 and T3 of the first transformer 41 are respectively electrostatic supporting electrodes 29-1 and 29-2.
9'-1 is connected to the output terminal T of the third transformer 43.
5 and T6 are electrostatic support electrodes 29-3 and 29'-3, respectively.
It is connected to the.

The first pair of electrostatic support electrodes 29-1, 29 '.
The first portion P ₁ and the capacitor electrode portion 20C of -1 and the gyro rotor 20 (the capacitance and C.) Is configured, the such capacitor and a first transformer 41 (inductance and L. ) And form a resonance circuit. The resonance frequency f _{a of such a} resonance circuit [= 1 / 2π
√ (LC)] is set to the reference frequency f _o is smaller than value of the AC voltage V _TX applied to the first transformer 41.

Next, the operation of the Z-restraint control system of the gyro device of this example will be described with reference to FIG. FIG. 15 shows a first transformer 41 and electrostatic supporting electrodes 29-1, 2 connected to it.
9′-1 is a graph of a resonance curve showing the operation of the resonance circuit, in which the vertical axis represents the electrode voltage V _T of one electrode, for example, the electrostatic support electrode 29-1 arranged above the gyro rotor 20. The horizontal axis represents the frequency ratio (f _O / f _a ). Here, f _O is the reference frequency of the AC voltage V _TX as described above, and f _a is the resonance frequency f _a of the resonance circuit [= ½π√
(LC)].

As described above, at the operating point, the resonance frequency of the resonance circuit is
Wave number f_aIs the reference frequency f of the AC power supply _oSmaller and frequency
Number ratio (f_O/ F_a) Is greater than 1. Therefore, in FIG.
As shown, the electrode voltage V near the operating point_TIs a decreasing function
is there.

First of the electrode portion 20C of the gyro rotor 20
Consider a case where the portion P _{1 of} is displaced upward. Such a first
Portion P ₁ and the electrostatic supporting electrode 29- disposed above it.
The distance between 1 and 1 decreases, and the capacitance C between them increases. Therefore, the resonance frequency f _a [= 1 / 2π√ (LC)]
Decreases and the frequency ratio (f _O / f _a ) increases. As a result, as shown in the figure, the electrode voltage V of the electrostatic supporting electrode 29-1 is
_T becomes smaller than the operating voltage V _TO . Thus, the attractive force acting between the upper electrostatic support electrode 29-1 and the first portion P ₁ of the gyro rotor 20 becomes small.

The relationship between the first portion P ₁ of the gyro rotor 20 and the electrostatic support electrode 29'-1 located below it is just opposite. The distance between the first portion P ₁ and the electrostatic support electrode 29′-1 arranged below the first portion P ₁ increases, and the electrostatic capacitance C between them increases. Therefore, the resonance frequency f _a [= ½π√ (LC)] increases and the frequency ratio (f _O / f _a ) decreases. As a result, the electrostatic support electrode 2
The electrode voltage V _T of 9′-1 becomes higher than the operating voltage V _TO . Thus, the attractive force acting between the lower electrostatic support electrode 29′-1 and the first portion P ₁ of the gyro rotor 20 becomes large.

When the first portion P ₁ of the gyro rotor 20 is displaced upward, the force for biasing the first portion P ₁ upward becomes small, and the force for biasing it downward becomes large. The part P ₁ is relatively biased downward and operates so as to be returned to its original position.

According to the Z-restraint control system of this example, the first transformer 41 and the first pair of electrostatic supporting electrodes 29-1, 29'-
The first gyro rotor 2 including the
The displacement in the Z-axis direction of the first portion P ₁ of the zero electrode portion 20C is always maintained at zero, and the third transformer 43 and the third pair of electrostatic supporting electrodes 29-3 and 29′-3 are connected to each other. Due to the third resonance circuit including, the displacement in the Z-axis direction of the third portion P ₃ of the electrode portion 20C of the gyro rotor 20 is always maintained at zero. Similarly, by the second and fourth resonance circuits, the second and fourth portions P ₂ of the electrode portion 20C of the gyro rotor 20 are
The displacement of P _{4 in} the Z-axis direction is always maintained at zero.

The first portion P of the gyro rotor 20₁Is
The force Fz1 received from the gyro case 21 is the electrostatic support on both sides.
Voltage applied to holding electrodes 29-1 and 29'-1
A₁, B ₁Proportional to the difference between. Electrode of gyro rotor 20
Third part P of part 20C₃Operation, second and fourth parts
Minute P₂, P_FourThe operation of is also the same.

[0027]

[Number 1] _{Fz1 = K (A 1 -B 1} ) Fz2 = K (A 2 -B 2) Fz3 = K (A 3 -B 3) Fz4 = K (A 4 -B 4)

Next, the structure and operation of the rotor drive system 100 of this embodiment will be described with reference to FIG. 14 again. Rotor drive system 10
Reference numeral 0 denotes a gyro rotor 20, a driving AC power supply 101, and four pairs of coils connected thereto (in FIG. 14, only lower coils 30′-1, 30′-2, 30′-3, 30′-4 are shown. ) And. The basic phase V ₀ of the two-phase AC voltage is connected to the two coils 30'-1 and 30'-3 connected in series, and the 90 ° phase V ₉₀ of the two-phase AC voltage is the two coils connected in series. It is connected to 30'-2 and 30'-4.

Four pairs of coils 30-1, 30'-1, 30
-2, 30'-2, 30-3, 30'-3, 30-4,
When an alternating voltage is applied to 30′-4 from the driving AC power supply 101, a rotating magnetic field proportional to the frequency of the driving AC power supply 101 is generated in the cavity portion 26 of the gyro case 21, and the magnetic field and the gyro rotor 20 are generated. The gyro rotor 20 rotates due to the interaction with the eddy current generated therein.

Next, the configuration and operation of the XY constraint control system of the gyro device of this example will be described with reference to FIG. The XY restraint control system is a displacement detection device including an electrode portion 20C of the gyro rotor 20, electrostatic supporting electrodes 29-1 to 29-4, 29'-1 to 29'-4, a light emitting element 27 and a light receiving element 28. X and Y control system 5 for inputting the output signal of the displacement detection device
0 and 60. The gyro rotor 20 has X-axis and Y-axis.
Even if it is biased in the axial direction, the XY constraint control system
The position of the gyro rotor 20 in the X-axis and Y-axis directions is controlled so that the spin axis aligns with the central axis of the gyro device, that is, the Z-axis.

As shown in FIG. 16A, X control system 50 is a frequency f _o AC power source 50-1 and V _TX computing unit 50-2 supplies an AC voltage V _T of the two multipliers 50-3,50- Four
Have and. The V _TX calculator 50-2 inputs a signal indicating the displacement Δx of the gyro rotor 20 in the X-axis direction, which is supplied from the light receiving element 28 of the displacement detection device, and the coefficient 1 ± K ₁ Δ.
x (K ₁ is a constant) is calculated. One end of the AC power supply 50-1 is grounded and the other end is connected to the two multipliers 50-3 and 50-4. Thus, the two multipliers 50-3, 5
From 0-4, the AC voltage V _T (1 ± K ₁ Δx) corrected by the coefficient 1 ± K ₁ Δx is output. As shown in FIG. 16B, the Y control system 60 has the same configuration as the X control system 50.

Here, the electrode portion 20C of the gyro rotor 20 and the electrostatic supporting electrodes 29-1 to 29-4, 29'-1 to 29 '.
The positional relationship between -4 and -4 will be described. The electrode portion 20C of the gyro rotor 20 has electrostatic support electrodes 29-1 to 29-4, 2
9'-1 to 29'-4 are arranged concentrically with each other, but at the same time, are arranged radially inward or outward.

As shown in FIGS. 13 and 14, the electrode portion 20C of the gyro rotor 20 has electrostatic support electrodes 29-1 and 29-2.
A case will be described in which the elements 9-4 and 29'-1 to 29'-4 are arranged so as to be offset inward in the radial direction. As shown, the electrostatic support electrodes 29-1 to 29-4, 29'-
The outer diameter of 1-29'-4 is the electrode portion 2 of the gyro rotor 20.
It is formed to have an outer diameter larger than 0C, and the electrostatic supporting electrode is configured to protrude outward in the radial direction by a length δ ₂ from the gyro rotor 20.

Further, electrostatic supporting electrodes 29-1 to 29-4,
The inner diameters of 29'-1 to 29'-4 are formed to be larger than the inner diameter of the electrode portion 20C of the gyro rotor 20, so that the electrode portion 20C of the gyro rotor 20 is radially inward by the length δ _{1 by the} electrostatic supporting electrode 29-1. ~ 29-4, 29'-1 to 29'-4
It is configured to project more.

Thus, the electrode portion 20 of the gyro rotor 20
C is the electrostatic support electrodes 29-1 to 29-4, 29'-1 and 2
9'-4, the gyro rotor 20 is arranged so as to be radially inwardly offset by the first pair of electrostatic supporting electrodes 29-1, 29'-1 in the radial outward (X
Force Fx1 acts in the positive direction of the axis), and force Fx3 acts radially outward (in the negative direction of the X axis) by the third pair of electrostatic support electrodes 29-3, 29'-3. To do. These forces Fx1 and Fx3 change depending on the magnitude of the AC voltage applied to the midpoints T1 and T4 of the transformers 41 and 43, respectively. If the alternating voltages are equal, the two forces Fx1 and Fx3 are equally balanced.

Acceleration α in the X-axis direction is applied to the gyro rotor 20.
_X acts and the gyro rotor 20 moves the gyro case 2
It is assumed that the displacement is Δx in the positive direction of the X axis with respect to 1. The displacement Δx is output as a voltage signal by the light receiving element 28. Such a signal is supplied to the V _TX calculation unit 50-2 of the X control system 50, and a signal indicating the coefficient 1 ± K ₁ Δx is generated. Thus, the two multipliers 50-3, 5
Different voltage signals (1-K ₁ Δx) from 0-4
V _T , (1 + K ₁ Δx) V _T is generated.

The voltage signal (1 ± K ₁ Δx) V _T is applied to the midpoints T1 and T4 of the two transformers 41 and 43, respectively, and the electrostatic support electrodes 29-1 and 29'- of the first pair are applied. The force Fx1 is generated by 1 and the third pair of electrostatic support electrodes 2
A force Fx3 is generated by 9-3 and 29'-3. Force Fx1 acting on the gyro rotor 20 in the positive direction of the X axis
And the force Fx3 in the negative direction of the X axis are expressed by the following equations (2).

[0038]

Fx1 = k ₁ (1-K ₁ Δx) V _T Fx3 = k ₁ (1 + K ₁ Δx) V _T

K ₁ is a constant. The resultant force of the forces acting on the gyro rotor 20 in the X-axis direction is as follows.

[0040]

[Number 3] _{Fx1-Fx3 = -2k 1 K 1} V T · Δx

Thus, as represented by the equation (3), the force proportional to the displacement Δx pulls the gyro rotor 20 in the negative direction of the X axis, whereby the displacement becomes zero. The same applies when the gyro rotor 20 is biased in the Y-axis direction. In this way, the displacement amounts Δx and Δy are always maintained at zero even when the gyro rotor 20 is biased in the X-axis and Y-axis directions by the XY constraint control system of this example. That is, the spin axis of the gyro rotor 20 is always controlled so as to be aligned with the central axis of the gyro device, that is, the Z axis.

In the above description, the two transformers 41 and 4 are used.
The change amount of the voltage applied to the middle points T1 and T4 of 3 is the displacement Δ
Although it is assumed that the voltage is proportional to x, the actually applied voltage includes a term K _D (dΔx / dt) V _T due to damping in addition to the term K ₁ ΔxV _T proportional to the displacement Δx.

Referring to FIGS. 13 and 14, the electrode portion 20C of the gyro rotor 20 has electrostatic support electrodes 29-1 to 29-29.
-4, 29'-1 to 29'-4 are described as being arranged inwardly in the radial direction, but electrostatic support electrodes 29-1 to 29-4, 29'-1 to 29'-1. 29'-4
The same applies to the case of being displaced outward in the radial direction with respect to. However, in that case, the directions of the forces Fx1 and Fx3 acting on the gyro rotor 20 are opposite. Further, the gyro rotor 20 is accelerated in the Y-axis direction by α _Y
Acts, the gyro rotor 20 moves to the gyro case 21.
On the other hand, the same applies to the case where the displacement is Δy in the Y-axis direction.

The configuration and operation of the gyro operation unit and the acceleration operation unit of this example will be described with reference to FIGS. The gyro computing unit has an X gyro computing unit 51 that computes an angular velocity dφ / dt about the X axis and a Y gyro computing unit 61 that computes an angular velocity dθ / dt about the Y axis, and the acceleration computing unit is in the X axis direction. X acceleration calculation unit 53 for calculating acceleration and Y
It has a Y acceleration calculation unit 63 that calculates the acceleration in the axial direction and a Z acceleration calculation unit 73 that calculates the acceleration in the Z axis direction.

The configuration and operation of the X gyro calculator 51 and the X acceleration calculator 53 will be described with reference to FIG. The X gyro calculator 51 includes four voltage dividers 51-
1 to 51-4 and four rectifying sections 51-5 to 51-8 connected to each of the voltage dividing sections and two pairs of rectifying sections 51-5,
Two subtraction units 51-9 and 51-10 connected to 51-6 and 51-7 and 51-8, and a third subtraction unit 51-11 connected to these two subtraction units and an arithmetic unit 51- 12 and.

The X gyro calculator 51 has an input terminal 51a,
Two transformers 4 via 51b, 51c and 51d
The terminal outputs A ₁ , B ₁ and A ₃ , B ₃ of the output terminals T2, T3 and T5, T6 of ₁ , 43 are input. Since the terminal outputs A ₁ , B ₁ and A ₃ , B ₃ of the output terminals T2, T3 and T5, T6 of the two transformers 41, 43 are usually high voltages of 1000 V or more, each of these voltages is divided by four. Part 5
The voltage is divided into low voltages by 1-1 to 51-4, and is rectified into a DC voltage by the four rectifying units 51-5 to 51-8. Such a DC voltage signal is subtracted from the subtraction units 51-9, 51-10, 51.
Subtraction is performed at -11. Thus, the calculation unit 51-1
A gyro signal indicating the rotational angular velocity dφ / dt of the gyro rotor 20 around the X axis is obtained from the output terminal of 2.

Next, the operation of the X gyro calculator 51 will be described in detail.
Explained. Angular velocity dφ / dt was input around the X axis
Consider the case. Due to the spin motion of the gyro rotor 20
As shown in FIG. 14, the angular motion vector H is moved up along the Z axis.
Take in the direction. According to the law of inertia, the gyro rotor 20
The pin axis tends to continue to be placed along the Z axis direction.
On the other hand, the gyro case 21 has an angular velocity dφ / d about the X axis.
When rotationally displaced at t, the second pair of electrostatic support electrodes 29-
2, 29'-2 and a fourth pair of electrostatic support electrodes 29-4,
29'-4, the second and the second gyro rotor 20
Part P of 4₂, P _FourAnd the gap between the upper electrode and the lower electrode
There is a difference in the gap between them. The difference between the upper and lower gaps is Y
It becomes zero by the operation of the control system 60. At this time,
The second and fourth parts P of the gyro rotor 20₂,
P_FourAnd two opposite forces Fz2 along the Z-axis
Fz4 acts, and as a result,
Luk T_XOccurs.

[0048]

## EQU4 ## T _X = (Fz2-Fz4) × r

Here, r is the distance from the spin axis to the point of action of force.

The torque T _X causes the spin axis of the gyro rotor 20 to perform a precession motion around the Y axis at a small angle. By such precession movement, the electrostatic support electrodes 29-1, 29'-1 of the first pair and the electrostatic support electrodes 29-3, 29'-3 of the third pair and the first and second electrostatic support electrodes 29-1, 29'-3 of the gyro rotor 20 are formed. The gap between the _third parts P ₁ , P ₃ changes. That is, there is a difference between the upper gap and the lower gap.

Similarly, the operation of the X control system 50 is controlled so that the difference between the upper gap and the lower gap becomes zero. At this time, as described above, the gyro rotor 20
Two opposite forces Fz1 and Fz3 act on the first and third parts P ₁ and P _{3 of the} , respectively, whereby a torque T _Y represented by the following equation is generated.

[0052]

## EQU5 ## T _Y = (Fz1-Fz3) × r

The torque T _Y causes the spin axis of the gyro rotor 20 to perform precession movement around the X axis at a small angle. Such precession movement becomes the same movement as the input angular velocity dφ / dt, and as a result, the spin axis and the gyro case 21 integrally rotate about the X axis at the angular velocity dφ / dt.

From the equations (4) and (5), the equation of angular motion is formed, and the following equation is obtained by using the equation (1).

[0055]

H (dφ / dt) = (Fz3−Fz1) × r = [(A ₃ −B ₃ ) − (A ₁ −B ₁ )] × r × K H (dθ / dt) = (Fz4− Fz2) × r = _{[(A 4 -B 4) - (} A 2 -B 2) ] × r × K

Here, H is the angular momentum of the gyro rotor 20. Therefore,

[0057]

[Formula 7] dφ / dt = [(A ₃ −B ₃ ) − (A ₁ −B ₁ )] × Kr / H dθ / dt = [(A ₄ −B ₄ ) − (A ₂ −B ₂ )] × Kr / H

Thus, the X gyro operation unit 51 and the Y gyro operation unit 53 input the terminal outputs A ₁ , B ₁ , A ₂ , B ₂ , A ₃ , B ₃ , A ₄ , and B ₄ of the _four transformers. X gyro signal dφ / dt and Y gyro signal d
Output θ / dt.

Next, the structure and operation of the X acceleration calculator 53 will be explained.
Reveal The X acceleration calculation unit 53 is the X gyro calculation unit 51.
Output signals of the first pair of rectifying units 51-5 and 51-6
a₁, B ₁Of the second pair and the adder 53-1 for inputting
Output signal a of the rectifying units 51-7 and 51-8₃, B₃Enter
Connected to the adding unit 53-2 and the two adding units
And a subtraction unit 53-3.

X adders are added by the adders 53-1 and 53-2.
Sum a of internal outputs of the gyro operation unit 51 ₁+ B₁, A₃+ B
₃Is required. Such sum is the voltage applied to each electrode.
Sum A ₁+ B₁, A₃+ B₃It corresponds to. Accordingly
The outputs of the adders 53-1 and 53-2 are the X-axis, respectively.
It corresponds to directional forces Fx1 and Fx3.

The subtraction unit 53-3 adds the addition units 53-1 and 5-3.
Output 3-2₁+ B₁, A₃+ B ₃Difference of (a₁+
b₁)-(A₃+ B₃) Is required. The difference is (A
₁+ B₁)-(A₃+ B₃) Is supported. Therefore,
The output of the subtraction unit 53-3 is the force Fx1 and X in the positive direction of the X axis.
It corresponds to the difference from the force Fx3 in the negative direction of the shaft.

Thus, the subtraction unit 53-3 outputs a signal indicating the displacement Δx expressed by the equation (3),
From this, the acceleration α _X is obtained.

Since the configurations and operations of the Y gyro computing unit 61 and the Y acceleration computing unit 63 are the same, description thereof will be omitted.

The structure and operation of the Z acceleration calculator 73 will be described with reference to FIG. The Z acceleration calculation unit 73 has internal signals a ₁ , b ₁ and a ₃ , b ₃ of the X gyro calculation unit 51 and internal signals a ₂ , b ₂ and a ₄ , b _{4 of the} Y gyro calculation unit 61.
Is input to calculate the acceleration α _Z in the Z-axis direction.

Next, the operation of the Z acceleration calculator 73 will be described.
It In the above description, the mass of the gyro rotor 20 is set to zero.
Was calculated as, but is not really zero. Gyrolo
The mass of the data 20 is m, and this is divided into four parts.
Think Acceleration α in the Z-axis direction _ZWould work,
First and third parts P of the gyro rotor 20₁, P₃Made by
The applied forces Fz1 and Fz3 are calculated by the following formula 8
Is represented.

[0066]

Fz1 = mα _Z / 4− (H / r) (dφ / dt) Fz3 = mα _Z / 4 + (H / r) (dφ / dt)

The acceleration α _Z in the Z-axis direction can be obtained by calculating the sum of these two equations.

[0068]

Α _Z = (Fz1 + Fz3) × 2 / m = [(A ₃ −B ₃ ) + (A ₁ −B ₁ )] × 2 K / m

The acceleration α _Z in the Z-axis direction is the force F acting on the second and fourth portions P ₂ and P ₄ of the gyro rotor 20.
It can also be obtained by z2 and Fz4. Therefore,
In the Z acceleration calculation unit 73 of this example, four forces Fz1, Fz2, Fz3, F acting on each part of the gyro rotor 20 are used.
The acceleration α _{Z in the} Z-axis direction is calculated from z4.

[0070]

As described with reference to FIGS. 14, 15 and 16, the conventional Z-constraint control system and XY-constraint control system of the gyro device use the LC resonance circuit to control the gyro rotor. The displacements of the 20 in the Z-axis direction and the XY direction are always maintained at zero. For example,
In the first portion P ₁ of the electrode portion 20C of the gyro rotor 20, the AC power source 50-1 of the X control system 50 and the transformer 4 are provided.
An LC resonance circuit is configured by a system including 1 and the first pair of electrostatic support electrodes 29-1 and 29′-1.

The Z restraint control system and the XY restraint control system using the LC resonance circuit are the paths from the power source to the gyro rotor 20, that is, the AC power source 50-1 to the X control system 5 in the above example.
0, the transformer 41 and the first pair of electrostatic supporting electrodes 29-
There is a drawback that various errors occur in the route from the 1, 29'-1 to the gyro rotor 20. As such an error, stray capacitance occurs due to the increase in the size of the wiring and the coil.

Further, in the conventional Z, XY restraint control system, when adjusting the magnitude of the levitation force or the restoring force for the gyro rotor 20, the coefficient 1 ± K ₁ of the V _TX calculation unit 50-2 is used.
It was necessary to change Δx, and the operation was complicated. In particular, there is a drawback that control for levitating the gyro rotor 20 at the time of starting is difficult.

In view of the above point, an object of the present invention is to provide a gyro device having a restraint control system which can be controlled more easily.

In view of the above point, an object of the present invention is to provide an active restraint control system as compared with the conventional passive restraint control system.

[0075]

According to the present invention, for example, as shown in FIG. 1, a gyro case having a Z axis along the central axis direction, and an X axis and a Y axis orthogonal to the Z axis, and an inside of the gyro case. A disk-shaped gyro rotor that is supported in a non-contact manner by an electrostatic supporting force and has a spin axis in the central axis direction; electrode portions formed on both surfaces of the gyro rotor along the circumferential direction; and the gyro rotor. At least three pairs of electrostatic supporting electrodes corresponding to the electrode portions on both sides of the gyro rotor and spaced from the electrode portions on both sides of the gyro rotor. In a gyro device of acceleration detection type having a rotor drive system for rotating at high speed, each of the at least three pairs of electrostatic supporting electrodes corresponds to the gyro corresponding thereto. The electrode portion of the rotor is radially outwardly or radially inwardly biased, and a control DC voltage is applied to the at least three pairs of electrostatics in order to generate the electrostatic supporting force. A control calculator for applying to the supporting electrodes, and a displacement detecting AC voltage for detecting displacement of the gyro rotor superimposed on the controlling DC voltage to the at least three pairs of electrostatic supporting electrodes. When,
Displacement detection electrode portions formed in the central portion of both surfaces of the gyro rotor, and displacement detection electrodes provided in the gyro case corresponding to each of the displacement detection electrode portions and spaced apart therefrom. A displacement detection system including a displacement detection circuit that detects a displacement detection current flowing through the displacement detection electrode and outputs a displacement detection voltage signal that indicates displacement of the gyro rotor, and an output signal of the control calculation unit. A gyro output calculation unit for inputting and calculating a gyro output, wherein the control calculation unit receives the displacement detection voltage signal output from the displacement detection circuit and inputs the displacement detection voltage signal in the X-axis direction of the gyro rotor, Y Axial and Z-axis linear displacement and around Y-axis and X
It is configured to calculate the rotational displacement about the axis, calculate the correction amount of the control DC voltage so that the linear displacement and the rotational displacement of the gyro rotor become zero, and feed it back to the control DC voltage. It is characterized by being

According to the present invention, in the gyro device,
The control calculation unit calculates a displacement calculation unit that calculates a linear displacement and a rotational displacement of the gyro rotor, a PID calculation unit that calculates a force and a rotation moment to be applied to the gyro rotor, and a correction amount of the control DC voltage. And a control voltage calculation unit.

According to the present invention, in the gyro device,
The gyro output calculation unit is configured to input an output signal of the PID calculation unit of the control calculation unit and calculate a gyro output.

According to the present invention, in the gyro device,
The displacement detecting AC voltage includes an AC voltage component having different displacement detecting frequencies corresponding to the linear displacement and the rotational displacement of the gyro rotor.

According to the present invention, in the gyro device,
The electrostatic supporting electrodes include four pairs of electrostatic supporting electrodes that are spaced from each other at a central angle of 90 degrees in the circumferential direction.

According to the present invention, in the gyro device,
Of the four pairs of electrostatic supporting electrodes, the first pair of electrostatic supporting electrodes
AC voltage for displacement detection applied to the_1A, A
C_1B, The displacement detection applied to the second pair of electrostatic support electrodes.
AC output voltage_2A, AC_2B, A third pair of electrostatically supported charges
The displacement detection AC voltage applied to the pole is AC_3A, AC
_3B, The displacement detection applied to the fourth pair of electrostatic support electrodes
AC voltage for AC_4A, AC _4BThen they are
Is represented by. AC_1A= -EX-Eθ-EZ AC_1B= -EX + Eθ + EZ AC_2A= -EY-Eφ-EZ AC_2B= -EY + Eφ + EZ AC_3A= + EX + Eθ−EZ AC_3B= + EX-Eθ + EZ AC_4A= + EY + Eφ-EZ AC_4B= + EY-Eφ + EZ where ± EX is 180 ° out of phase with each other, and
AC for detecting linear displacement of the yellow rotor in the X-axis direction
The voltage components, ± EY, are 180 ° out of phase with each other
A signal for detecting the linear displacement of the gyro rotor in the Y-axis direction.
The flow voltage components, ± EZ, are 180 ° out of phase with each other.
For detecting the linear displacement of the gyro rotor in the Z-axis direction
The AC voltage components, ± Eθ, are 180 ° out of phase with each other
Note: To detect the rotational displacement of the gyro rotor around the Y axis.
AC voltage component of ± Eφ, phases are different from each other by 180 °
The rotational displacement around the X axis of the gyro rotor is detected.
AC voltage component for the purpose of
The above-mentioned displacement detection frequency is obtained.

According to the present invention, in the gyro device,
The correction amounts of the control DC voltage applied to the electrostatic support electrodes of the first and third pairs are ΔV _1A , ΔV _1B and ΔV _3A ,
ΔV _3B , the correction amount of the control DC voltage applied to the second and fourth pairs of electrostatic support electrodes is ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B , and the following relationship is satisfied. And ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0

According to the present invention, in the gyro device,
The displacement detecting circuit includes a field effect transistor.

According to the present invention, in the gyro device,
Each of the pair of electrostatic support electrodes of the electrostatic support electrode includes a pair of mutually spaced comb-shaped portions, each of the comb-shaped portions including a plurality of circumferential portions extending in the circumferential direction and And a connecting portion that connects the circumferential portions, and the circumferential portions of the two comb-shaped portions are arranged so as to alternately sandwich the other.

According to the present invention, in the gyro device,
The control DC voltages applied to the first and second comb-shaped portions of each of the electrostatic support electrodes have the same magnitude but different polarities.

According to the present invention, in the gyro device,
The electrode portion of the gyro rotor includes a plurality of annular portions corresponding to the respective circumferential portions of the comb-shaped portion of the electrostatic support electrode, and each of the circumferential portions of the comb-shaped portion of the electrostatic support electrode corresponds to the circular portion. The electrodes of the gyro rotor are arranged so as to be offset outward or inward in the radial direction with respect to each of the annular portions, so that the displacement of the gyro rotor in the X-axis direction and the Y-axis direction with respect to the central axis becomes zero. It is characterized by generating such a force.

According to the present invention, in the gyro device,
The gyro rotor is made of a conductive material, and the electrode portions are formed as projections formed on both surfaces of the gyro rotor.

According to the present invention, in the gyro device,
The gyro rotor is characterized by being made of single crystal silicon.

According to the present invention, in the gyro device,
The gyro case includes an upper bottom member and a lower bottom member made of an insulating material, and the electrostatic supporting electrode is configured as a metal thin film mounted on inner surfaces of the upper bottom member and the lower bottom member. And

According to the present invention, in the gyro device,
The upper bottom member and the lower bottom member of the gyro case are made of glass.

According to the present invention, in the gyro device,
The electrostatic supporting electrode is formed by a thin film forming technique including vapor deposition, ion plating, and photofabrication.

According to the present invention, in the gyro device,
The gyro case includes a spacer disposed between the upper bottom member and the lower bottom member, and the spacer is connected to the upper bottom member and the lower bottom member by anodic bonding.

According to the present invention, in the gyro device,
The gyro case is equipped with a stopper that also serves as a discharge, and the stopper has a function of limiting displacement of the gyro rotor and discharging static electricity accumulated in the gyro rotor to the outside.

According to the present invention, in the gyro device,
A recess is formed in the gyro case to accommodate the getter member, and the recess is connected to the inside of the gyro case by a passage.

According to the present invention, in the gyro device,
The rotor drive system includes a rotor drive electrode portion provided on both surfaces of the gyro rotor, a rotor drive electrode corresponding to the rotor drive electrode portion and spaced from the rotor drive electrode portion, and a rotor drive electrode for the rotor drive electrode. An AC voltage circuit for driving a rotor for applying an AC voltage for use in the rotor, the rotor driving electrode portion includes a plurality of electrode portions arranged in a row in a circumferential direction and spaced from each other. The driving electrode is characterized in that it includes a plurality of electrodes arranged in a row in the circumferential direction and spaced from each other.

According to the present invention, a method for manufacturing a gyro device having a gyro case and a disk-shaped gyro rotor supported in the interior of the gyro case in a non-contact manner by an electrostatic supporting force is made of a conductive material. Forming grooves on both sides of the plate material to form protrusions; cutting a circular portion from the plate material to separate it into a disc-shaped gyro rotor and an outer spacer surrounding the gyro rotor; Joining the upper bottom member and the lower bottom member to.

According to the present invention, in the method of manufacturing a gyro device, the spacer is joined to the upper bottom member and the lower bottom member by anodic bonding.

According to the present invention, in the method of manufacturing a gyro device, the upper bottom member and the lower bottom member made of an insulating material are prepared, and the inner surfaces of the upper bottom member and the lower bottom member are each made of a metal thin film. Forming an electrostatic supporting electrode that is

According to the present invention, in the method of manufacturing a gyro device, the electrostatic support electrodes formed on the upper bottom member and the lower bottom member include at least three pairs of electrostatic support electrodes, and the electrostatic support electrodes are provided. Each of which includes a pair of comb-shaped portions, the comb-shaped portion having a plurality of circumferential portions extending in the circumferential direction and a connecting portion connecting the circumferential portions, and the pair of comb-shaped portions The peripheral portions are alternately arranged so as to sandwich the other.

[0099]

The gyro device according to the present invention comprises the electrode portions formed on the upper surface and the lower surface of the gyro rotor, and at least three pairs of, for example, four pairs of electrostatic support electrodes formed on the inner surface of the gyro case corresponding thereto. Have, 4 of gyro case
The pair of electrostatic support electrodes are arranged so as to be biased inward or outward in the radial direction with respect to the electrode portion of the gyro rotor. The gyro device further includes a restraint control system for floatingly supporting the gyro rotor at a predetermined position by electrostatic force.

Displacement detection electrode portions and displacement detection electrodes are provided on both surfaces of the gyro rotor and the corresponding inner surface of the gyro case, respectively, and further, a rotor drive electrode portion for rotationally driving the gyro rotor and A rotor driving electrode is provided.

A control DC voltage for generating an electrostatic support force and a displacement detection AC voltage for detecting the displacement of the gyro rotor are applied to the electrostatic support electrodes. A displacement detection current is generated in the displacement detection electrode on the inner surface of the gyro case, and the displacement detection current is detected by the displacement detection circuit.

The displacement detection voltage signals output from the displacement detection circuit are all displacements of the gyro rotor, that is, linear displacements ΔX, ΔY and ΔZ in the X-axis direction, the Y-axis direction and the Z-axis direction and around the Y-axis. And rotational displacements Δθ and Δφ about the X axis. The control calculation unit inputs the displacement detection voltage output from the displacement detection circuit and calculates the displacement of the gyro rotor and the control DC voltage to be applied to the four pairs of electrostatic support electrodes.
Thus, the displacement of the gyro rotor detected by the displacement detection circuit is fed back to the control DC voltage,
The displacement of the gyro rotor is actively held at zero.

The control calculation unit further includes accelerations fx in the X-axis direction, Y-axis direction and Z-axis direction to be applied to the gyro rotor,
fy and fz and rotational moments fθ and fφ about the Y-axis and the X-axis are obtained, and forces Fx, Fy and Fz in the X-axis direction, Y-axis direction and Z-axis direction to be applied to the gyro rotor and around the Y-axis and X-axis. The torques Tθ and Tφ around the axis are obtained.
Thereby, the gyro output is calculated.

Each of the electrostatic supporting electrodes includes a pair of mutually spaced comb-shaped portions, and the comb-shaped portions connect the circumferential portions with a plurality of circumferential portions extending in the circumferential direction. Including the radius portion, the circumferential portions of the two comb-shaped portions are arranged so as to alternately sandwich the other.

By applying the control DC voltages ± V _1A to ± V _4B having the same absolute value and opposite signs to the comb-shaped portions of each pair, the potential of the gyro rotor 20 is always maintained at zero.

The upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are made of an insulating material such as glass, and the gyro rotor 20 and the spacer 23 surrounding it are made of a conductive material such as single crystal silicon (silicon). The gyro rotor 20 and the spacer 23 are made of the same material.

[0107]

1 shows an example of a gyro device according to the present invention. The gyro device of this example includes a thin disk-shaped gyro rotor 20 and a gyro case 21 that houses the gyro rotor 20 therein.

Here, XYZ coordinates are set for the gyro device as shown in the figure. The Z axis is taken upward along the central axis of the gyro device, and the X axis and the Y axis are taken perpendicularly thereto. The spin axis of the gyro rotor 20 is arranged along the Z axis.

As shown in FIG. 1A, the gyro case 21
Has an upper bottom member 22 and a lower bottom member 24, and a spacer 23 connecting them, and the spacer 23 is an annular inner wall 23A.
Have. Thus, the upper bottom member 22 and the lower bottom member 2
The inner surface of 4 and the inner wall 23 </ b> A of the spacer 23 form a disk-shaped sealed cavity 26 for housing the gyro rotor 20 inside the gyro case 21. The cavity 26 is evacuated by an appropriate method.

A recess 23B is formed outside the annular inner wall 23A of the spacer 23, and the recess 23B is connected to the cavity 26 by a passage 23C. The height of such passage 23C may be 2-3 μm. A getter member 33 is arranged in the recess 23B. Thereby, the cavity 26 can be maintained at a high degree of vacuum for a long period of time.

The gyro rotor 20 is made of a conductive material. Single crystal silicon (silicon) may be used as such a conductive material, for example. By using a single crystal material, it is possible to provide a gyro rotor with high accuracy that is less affected by thermal strain and aging. The upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are made of a non-conductive material such as glass. The spacer 23 may be formed of the same material as the gyro rotor 20. The method of manufacturing the gyro rotor 20 and the gyro case 21 will be described in detail later.

As shown on the right side of FIGS. 1A and 1B, a plurality of concentric annular electrode portions 200A, 200B, 200C, 2 are provided on the upper surface and the lower surface of the gyro rotor 20 of this example.
00D and 200A ', 200B', 200C'200
D'is formed. That is, a plurality of annular grooves 200a, 200b, 200c, 20 are concentrically formed on the upper surface and the lower surface.
0d and 200a ', 200b', 200c ', 200
d ′ is formed, and a protrusion-shaped annular electrode portion is formed by the annular groove.

On the upper and lower surfaces of the gyro rotor 20 of this example, annular electrode portions 200A, 200B, 200C, 2
00D and 200A ', 200B', 200C ', 20
Driving electrode portions 200E and 200E 'are formed inside 0D'. Such driving electrode portions 200E, 200
E'is configured as a plurality of fan-shaped protrusions formed between two concentric annular grooves 200d, 200e and 200d ', 200e' and may be annularly arranged in a row along the circumference. .

On the upper surface and the lower surface of the gyro rotor 20,
In the center, that is, the driving electrode portions 200E and 200E '
Displacement detection electrode portions 200F and 200F 'are formed inside. Such displacement detecting electrode portions 200F, 2
Recesses 200f and 200f 'are formed in the center of 00F'.

Ring-shaped electrode portions 200A and 200B formed as protrusions on the upper and lower surfaces of the gyro rotor 20,
200C, 200D and 200A ', 200B', 20
0C ', 200D', driving electrode portions 200E, 200
E ′ and the displacement detection electrode units 200F and 200F ′ may be formed on the same plane.

On the other hand, as shown on the left side of FIGS. 1A and 1B, at least three pairs of electrostatic support electrodes, in this example, the inner surface of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21 are provided. First, second, third and fourth pairs of electrostatic support electrodes 2
21, 231, 222, 232, 223, 233 and 2
24 and 234 are arranged. The four pairs of electrostatic support electrodes are arranged at an angular interval of 90 ° from each other along the circumferential direction. For example, the first and third pairs of electrostatic support electrodes 22
1, 231 and 223, 233 are arranged along the X axis, and the second and fourth pairs of electrostatic support electrodes 222, 232 and 224, 234 are arranged along the Y axis.

Each electrostatic support electrode is composed of a pair of comb-shaped portions.
For example, on the left side of FIG. 1B, a third pair of electrostatic support electrodes 22
3 and 233, the electrostatic support electrode 223 formed on the inner surface of the upper bottom member 22 is shown. The electrostatic supporting electrode 223 has two comb-shaped portions 223-1 and 2 that are spaced apart from each other.
23-2, two such combs being spaced from each other.

One comb-shaped portion 223-1 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223A, 223C extending in the circumferential direction. Similarly, the other comb-shaped portion 223-2 has a radial portion 223R extending in the radial direction and a plurality of circumferential portions 223B, 223D extending in the circumferential direction. The circumferential portion 223 of each comb-shaped portion 223-1, 223-2
A, 223C and 223B, 223D are alternately arranged so as to sandwich the other. Each comb-shaped part 223-1, 22
The terminal portion 2 is provided at the end of the radius portions 223R and 223R of 3-2.
23R 'and 223R' are respectively formed.

Four pairs of electrostatic supporting electrodes 221 are provided on the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21.
231, 222, 232, 223, 233 and 224,
Driving electrodes 225 and 235 are formed inside 234, respectively. The driving electrodes 225 and 235 may be formed in a plurality of fan shapes that are annularly arranged in a row along the circumference.

Displacement detection electrodes 226, 236 are formed on the inner surfaces of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21 at the center, that is, inside the driving electrodes 225, 235.
Are formed.

Next, the annular electrode portion 2 of the gyro rotor 20
00A, 200B, 200C, 200D and 200
A ′, 200B ′, 200C ′, 200D ′ and the electrostatic support electrodes 221, 222, 223, 224 and 231, of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21.
The dimensions and relative positional relationship of 232, 233, and 234 will be described.

The outer diameter D of the gyro rotor 20 may be 5 mm or less, and the thickness t may be 0.1 mm or less,
The mass may be 10 milligrams or less. In FIG. 1, 4
Book-shaped electrode parts 200A, 200B, 200C, 20
0D and 200A ', 200B', 200C ', 200
Although D'is shown in the figure, a large number of annular electrode parts are actually formed. For example, the radial width L of each electrode portion
Is about 10 μm and is formed at regular intervals at a pitch of about 20 μm, about 100 annular electrode parts are formed in an annular region having a width of about 2 mm in the radial direction. The radial width L and the pitch of each electrode portion are preferably as small as possible as long as the manufacturing method permits.

Electrostatic support electrodes 221, 222, 22 of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21.
The dimensions of 3, 224 and 231, 232, 233, 234 are the annular electrode portions 200A, 200B, 200C, 200.
D and 200A ', 200B', 200C ', 200
It may be formed corresponding to the dimension of D '. For example, in FIG. 1, each comb-shaped portion 223-1 of the third electrostatic supporting electrode 223,
223-2 circumferential portions 223A, 223C and 223B,
Although the 223D is shown as including four in total,
In reality, many circumferential portions are formed. For example, the radial width L of each circumferential portion is about 10 μm and about 20 μm.
When they are formed at equal intervals with a pitch of about 100, about 100 circumferential portions are formed in an annular region having a width of about 2 mm in the radial direction.

Next, the positional relationship between the electrode portion of the gyro rotor 20 and the electrostatic support electrode of the gyro case 21 will be described. For example, the electrode parts 200A, 2 of the gyro rotor 20
00B, 200C, 200D and 200A ', 200
The positional relationship between B ′, 200C ′, 200D ′ and the electrostatic support electrodes 223, 233 of the third pair will be described. The first electrode portions 200A and 200A ′ of the gyro rotor 20 correspond to the first circumferential portions 223A and 233A of the electrostatic support electrodes 223 and 233 of the third pair, and the second electrode portion 200 corresponds.
B, 200B 'for the third pair of electrostatic support electrodes 223.
The second circumferential portions 223B and 233B of the above correspond. Similarly, the third and fourth circumferential portions 2 are formed with respect to the third and fourth electrode portions 200C, 200C 'and 200D, 200D'.
23C, 233C and 223D, 233D correspond.

The gap δ between the electrode portion of the gyro rotor 20 and the corresponding electrostatic support electrode of the gyro case 21 may be several μm, for example δ = 2 to 3 μm.

Each electrode part 200A of the gyro rotor 20,
200B, 200C, 200D and 200A ', 200
B ′, 200C ′, and 200D ′ are circumferential portions 223A, 233A, 223 of the corresponding electrostatic supporting electrodes 223, 233.
B, 233B, 223C, 233C and 223D, 23
They are arranged concentrically with respect to 3D, but at the same time, they are arranged radially inward or outward.

For example, each electrode portion 2 of the gyro rotor 20
00A, 200B, 200C, 200D and 200
The width and pitch of A ′, 200B ′, 200C ′, and 200D ′ correspond to the circumferential portions 223A, 233A, 223B, 233B, 223C of the corresponding electrostatic support electrodes 223, 233.
The widths and pitches of 233C and 223D and 233D are equal to each other, and they are arranged so as to be radially inwardly or outwardly offset by a predetermined distance from each other.

Each electrode portion 200A of the gyro rotor 20,
200B, 200C, 200D and 200A ', 200
A case where B ′, 200C ′, and 200D ′ are arranged radially inward of the corresponding peripheral portions of the electrostatic support electrodes will be described by taking the third electrostatic support electrodes 223 and 233 as examples.

For example, the inner diameters of the first electrode portions 200A and 200A 'of the gyro rotor 20 are smaller than the inner diameters of the corresponding first circumferential portions 223A and 233A, respectively, and the outer diameters of the first electrode portions 200A and 200A' are smaller. Are smaller than the outer diameters of the corresponding first circumferential portions 223A and 233A, respectively. Similarly, the second, third and fourth electrode portions 200B, 200B ', 200C, 200C' and 2 of the gyro rotor 20 are also provided.
The inner diameters of 00D and 200D 'have corresponding second, third and fourth circumferential portions 223A, 233A, 223B, 233B,
223C, 233C and 223D, 233D, respectively, having an inner diameter smaller than that of the second, third, and fourth electrode portions 200B, 200B ', 200C, 200 of the gyro rotor 20.
The outer diameters of C'and 200D, 200D 'are the corresponding second,
Third and fourth circumferential portions 223A, 233A, 223B,
233B, 223C, 233C and 223D, 233D
Smaller than the outer diameter of.

Electrode portion of gyro rotor 20 and first and second electrodes
And a fourth pair of electrostatic support electrodes 221, 231, 222,
The positional relationship between 232, 224, and 234 is similar. In addition, the electrode portions 200A, 200 of the gyro rotor 20
B, 200C, 200D, 200A ', 200B', 2
The same applies when each of 00C 'and 200D' is arranged radially outward of each of the corresponding circumferential portions of the electrostatic support electrodes.

Here, the reason why the electrostatic supporting electrodes of this example are configured to include a pair of comb-shaped portions which are alternately arranged so as to sandwich the other will be described. With such a configuration, on the upper side and the lower side of the gyro rotor 20, the capacitance between each pair of comb-shaped portions and the corresponding electrode portion of the gyro rotor 20 is equal. For example, in the first electrostatic support electrodes 221 of the first pair of electrostatic support electrodes 221, 231, the first comb-shaped portion 221-1 (221A, 221C) and the first and the first gyro rotor 20 corresponding thereto are formed. The capacitance between the three electrode portions 200A and 200C is the second comb-shaped portion 221-2 (221B, 221D) and the corresponding second and third electrode portions 200C and 2C of the gyro rotor 20.
Equal to the capacitance between 00D and both are C _1A .

Therefore, the first comb-shaped portion 221-1 (221)
A control dc voltage applied to A, 221C) and control dc voltage applied to the second comb-shaped portion 221-2 (221B, 221D) are equal in magnitude but opposite in polarity, for example, ± V _1A . As a result, the potential of the gyro rotor 20 can be always zero. This will be described later again with reference to FIG.

The same applies to the second electrostatic support electrodes 231 of the first pair of electrostatic support electrodes 221 and 231. Also, the second, third and fourth electrostatic support electrodes 222, 232, 2
The same applies to 23, 233, 224, and 234.

Incidentally, the driving electrode portion 2 of the gyro rotor 20
00E, 200E 'and displacement detecting electrode portions 200F, 2
Driving electrode 2 of gyro case 21 corresponding to 00F '
The electrodes 25, 235 and the displacement detection electrodes 226, 236 may have the same shape and are arranged at the same position in the radial direction.

Discharge / combined stoppers 127 and 128 are provided at the center of the inner surface of the upper bottom member 22 and the lower bottom member 24 of the gyro case 21, that is, at the center of the displacement detection electrodes 226 and 236, respectively. Has been. The stoppers 127, 128 are arranged corresponding to the recesses 200f, 200f 'formed in the central portions of the upper and lower surfaces of the gyro rotor 20.

The discharge / combined stoppers 127 and 128 limit the displacement of the gyro rotor 20 in the Z-axis direction and the X-axis direction and the Y-axis direction to prevent the gyro rotor 20 from contacting the inner surface of the gyro case 21. It is provided to discharge static electricity accumulated in the gyro rotor 20.

When the gyro rotor 20 is displaced in the Z-axis direction and approaches the inner surface of the gyro case 21, the discharge / use stoppers 127 and 128 are set before the electrode portions of the gyro rotor 20 come into contact with the electrodes of the gyro case 21. The bottoms of the recesses 200f and 200f 'of 20 are in contact with each other. Further, when the gyro rotor 20 is displaced in the X-axis or Y-axis direction, before the gyro rotor 20 contacts the inner circumferential wall 23A of the gyro case 21, the discharge / combined stoppers 127, 1 are provided.
Reference numeral 28 denotes recesses 200f and 200f ′ of the gyro rotor 20.
Abut the inner wall of the circumference.

As a result, the displacement of the gyro rotor 20 in the Z-axis direction, the X-axis direction and the Y-axis direction is restricted, and the gyro rotor 20 is prevented from coming into contact with the inner surface of the gyro case 21. Further, when the gyro rotor 20 stops and lands, the discharge / combined stoppers 127, 128 come into contact with the recesses 200f, 200f ′ of the gyro rotor 20, so that the static electricity accumulated in the gyro rotor 20 causes the discharge / combined stoppers 127, 128 to be discharged. It is discharged to the outside via.

Electrostatic support electrodes 221 and 23 formed on the upper bottom member 22 or the lower bottom member 24 of the gyro case 21.
1, 222, 232, 223, 233, 224, 23
4, drive electrodes 225, 235 and displacement detection electrode 22
The 6, 236 and the external power supply or the external circuit may be electrically connected by a through hole connection. Upper bottom member 2
2 or the lower bottom member 24 is provided with a small hole, that is, a through hole, and a metal film is formed on the inner surface of the through hole. With such a metal film, the electrostatic supporting electrode, the driving electrode and the displacement detecting electrode are connected to an external power source or an external circuit.

As shown in FIG. 1A, a preamplifier 35, for example, a field effect transistor is arranged on the outer surface of the upper bottom member 22, and the preamplifier 35 is connected to the displacement detecting electrodes 226 and 236. . Upper bottom member 2
2 and the lower bottom member 24 have through holes 22A (only the through holes 22A provided in the upper bottom member 22 are shown)
Is provided, and the preamplifier 35 is connected to the displacement detection electrodes 226 and 326 by the metal thin film formed on the inner surface of the through hole 22A.

As will be described later with reference to FIG. 3, the comb-shaped portions of each pair are electrically connected. Therefore, for example, the comb-shaped portion 22 of the first electrostatic support electrode 223 of the third pair is formed.
A through hole 22B (only one is shown) is provided corresponding to each of the terminal portions 223R 'and 223R' of 3-1 and 223-2, and the metal thin film formed on the inner surface of the through hole 22B is an upper bottom member. It is connected to a common terminal provided on the outside of 22. As a result, the two comb-shaped portions 223-
The terminal portions 223R ′ and 223R ′ of 1, 223-2 are electrically connected. Similarly, the terminal portions 23 of the comb-shaped portions 231-1 and 231-2 of the first pair of second electrostatic supporting electrodes 231 are formed.
Through hole 24 corresponding to each of 1R 'and 231R'
A (only one shown) is provided, and such through hole 2
The metal thin film formed on the inner surface of 4A is connected to a common terminal provided outside the lower bottom member 24. Thereby 2
Terminal part 231 of two comb-shaped parts 231-1 and 231-2
R ′ and 231R ′ are electrically connected.

FIG. 2 shows an example of a control loop of the gyro device according to the present invention. The control loop of this example is the constraint control unit 150.
And a rotor drive system including a rotor drive unit 160, and a sequence control unit 170.

The restraint control section 150 of this embodiment detects the displacement detection current i _P and converts it into the displacement detection voltage V _P , that is, the preamplifier 35 and the displacement detection voltage V _P. Input _P to control DC voltage ± V _1A ~ ±
The control calculation unit 140 generates V _4A , ± V _1B to ± V _4B . DC control outputted by the control arithmetic unit 140 voltage _{± V 1A ~ ± V 4A,} ± V 1B ~ ± V 4B each displacement detection AC voltage _{AC 1A ~AC 4A, AC 1B ~AC} 4B is added static It is supplied to the electric support electrodes 221 to 224 and 231 to 234. The gyro device of this example has a control calculation unit 1
Gyro acceleration output computing unit 1 for inputting 40 output signals
45 is provided, which will be described later in detail.

Electrostatic support electrodes 221-224, 231-2
DC voltage for control ± 34_1A~ ± V _4A, ± V_1B~ ± V_4B
The gyro rotor 20 is applied with
Floatably supported and restrained in the sub-position. Electrostatic support electrode 2
Displacement detection AC voltage A to 21 to 224 and 231 to 234
C_1A~ AC_4A, AC_1B~ AC_4BBy applying
For detecting displacement formed on the inner surface of the gyro case 21
Displacement detection current i is applied to electrodes 226 and 236._PFlows. Such
Current i for detecting displacement_PIs the voltage by the preamplifier 35
Signal V_PIs converted to. Such voltage signal V_PIs a gyro
Includes all linear and rotational displacements of rotor 20.

Such voltage signal V_PTo the control calculation unit 140
Supplied. The gyro rotor is controlled by the control calculation unit 140.
20 Z-axis displacement ± Δz, X-axis displacement ± Δx
And Y-axis displacement ± Δy and rotation around X-axis and Y-axis
Displacement Δφ, Δθ (The direction of the arrow shown in the upper right of FIG. 2 is positive.
It ) Is detected. Furthermore, electrostatic displacement is
For control to be applied to the poles 221 to 224, 231 to 234
DC voltage ± V_1A~ ± V _4A, ± V_1B~ ± V_4BIs calculated
It Thus control DC voltage ± V_1A~ ± V_4A, ± V_1B~
± V_4BChanges, and the gyro rotor 20 has zero deviation.
Is returned to its original position.

The control loop or the restraint system of the present example is conventional in that the bias amount of the gyro rotor 20 is actually measured and the electrostatic force is positively changed so that the bias amount becomes zero. Unlike the passive restraint system of, it is configured as an active type.

Next, the operation of the restraint control system according to the present invention will be described in detail with reference to FIG. Although the gyro rotor 20 actually rotates at a high speed, four parts of the gyro rotor 20 at positions corresponding to the electrostatic support electrodes of the first, second, third, and fourth pairs are respectively P ₁ , P ₂ , P
₃ and P ₄ .

FIG. 3 shows the gyro device of this example in the XZ plane.
A cross section taken along is shown along the X-axis.
Placed first and third pairs of electrostatic support electrodes 221, 23
1 and 223, 233 and corresponding gyro rotor
First and third parts P of 20 ₁, P₃It is shown.
A second and fourth pair of electrostatically supporting electrodes arranged along the Y axis.
Second and fourth poles and corresponding gyro rotor 20
Part P₂And P_FourNot shown, but perpendicular to the page
It is arranged along the different directions.

The circumferential portion 2 of the first pair of electrostatic support electrodes 221
21A, 221B, 221C and 221D are electrode portions 200A, 200B and 200C on the upper surface of the gyro rotor 20,
It is compatible with 200D, and the first pair of electrostatic supporting electrodes 23
The circumferential portions 231A, 231B, 221C, 221D of No. 1 are electrode portions 200A ′, 200 on the lower surface of the gyro rotor 20.
B ′, 200C ′, 200D ′, and the circumferential portions 223A, 223B of the electrostatic support electrodes 223 of the third pair,
Reference numerals 223C and 223D correspond to the electrode portions 200A, 200B, 200C and 200D on the upper surface of the gyro rotor 20, and the circumferential portion 233 of the electrostatic support electrodes 233 of the third pair.
A, 233B, 233C and 233D are gyro rotors 2
Electrode parts 200A ′, 200B ′, 200 on the lower surface of 0
It corresponds to C'and 200D '.

First, the application of the control DC voltage will be described. The first comb-shaped portion 2 of the first pair of electrostatic supporting electrodes 221
The peripheral parts 221A and 221C of 21-1 are adders 36-1.
It is connected to the DC voltage −V _1A via A, and the circumferential portions 221B and 221D of the second comb-shaped portion 221-2 are added by the adder 36+.
1A is connected to the DC voltage + V _1A, and the circumferential portions 231A and 231C of the first comb-shaped portion 231-1 of the first pair of electrostatic support electrodes 231 are DC-directed via the adder 36-1B. It is connected to the voltage −V _1B, and the circumferential portions 231B and 231D of the second comb-shaped portion 231-2 are connected to the DC voltage + V _1B via the adder 36 + 1B.

Similarly, the circumferential portions 223A and 223C of the first comb-shaped portion 223-1 of the electrostatic support electrodes 223 of the third pair are connected to the DC voltage -V _3A via the adder 36-3A. , Circumferential portions 223B, 223 of the second comb-shaped portion 223-2
D is connected to the DC voltage + V _3A via the adder 36 + 3A, and the first comb-shaped portion 2 of the electrostatic support electrodes 233 of the third pair is connected.
The peripheral portions 233A and 233C of 33-1 are the adders 36-3.
Is connected to the DC voltage −V _3B via B, and the peripheral portions 233B and 233D of the second comb-shaped portion 233-2 are added by the adder 36+.
It is connected to the DC voltage + V _3B via 3B.

Next, the application of the detection AC voltage will be described. First and third pairs of electrostatic support electrodes 221, 231
223 and 233 are applied with the detection AC voltages AC _1A , AC _1B , AC _3A , and AC _3C superimposed on the control DC voltage. As shown, the first pair of adders 36-1A, 36-1
Detecting AC voltages AC _1A , AC _1B and AC _3A , AC _3C are applied to + 1A, 36-1B and 36 + 1B, and a third pair of adders 36-3A, 36 + 3A and 36-3B, 3
AC voltages AC _3A and AC _3C for detection are applied to 6 + 3B. Such detection AC voltages AC _1A , AC _1B , A
C _3A and AC _3C are represented as follows, respectively.

[0153]

[Equation 10] AC _1A = -EX-Eθ-EZ AC _1B = -EX + Eθ + EZ AC _3A = + EX + Eθ-EZ AC _3B = + EX-Eθ + EZ

Here, the detection AC voltages AC _1A , AC _1B ,
The terms on the right side of AC _3A and AC _3B are expressed as follows.

[0155]

+ EX = E ₀ cos (ω ₁ t + ζ ₁ ) −EX = E ₀ cos (ω ₁ t + η ₁ ) + E θ = E ₀ cos (ω ₄ t + ζ ₄ ) −E θ = E ₀ cos (ω ₄ t + η ₄ ). + EZ = E ₀ cos (ω ₃ t + ζ ₃ ) −EZ = E ₀ cos (ω ₃ t + η ₃ )

Here, ± EX is the X of the gyro rotor 20.
Voltage component for detecting linear displacement ΔX in the axial direction, ± E
θ is a voltage component for detecting the rotational displacement Δθ of the gyro rotor 20 around the Y axis, and ± EZ is a voltage component for detecting the linear displacement ΔZ of the gyro rotor 20 in the Z axis direction. ω ₁ , ω ₃ , and ω ₄ are displacement detection frequencies. The signs of ± EX, ± Eθ and ± EZ represent a phase difference of 180 degrees. Therefore, the phase differences ζ and η have the following relationship.

[0157]

[Equation 12] η ₁ = ζ ₁ ± 180 ° η ₃ = ζ ₃ ± 180 ° η ₄ = ζ ₄ ± 180 °

The gyro device of this example is cut along the YZ plane.
The cut cross section is not shown, but was placed along the Y axis
Second and fourth pairs of electrostatic support electrodes 222, 232 and 2
24, 234 and the corresponding gyro rotor 20
2 and the fourth part P₂And P _FourA similar discussion regarding
It holds. The second and fourth pairs of electrostatic support electrodes 222, 2
32 and 224 and 234, respectively, the first comb portion
And the second comb-shaped part have the same size but opposite polarity.
Pressure is applied.

The circumferential portions 222A and 222C of the first comb-shaped portion 222-1 of the second pair of electrostatic supporting electrodes 222 are connected to the DC voltage -V _2A, and the circumference of the second comb-shaped portion 222-2 is reduced. Part 2
22B and 222D are connected to a DC voltage + V _2A, and the circumferential portions 232A and 232C of the first comb-shaped portion 232-1 of the second pair of electrostatic support electrodes 232 are connected to a DC voltage −V _2B .
Circumferential portions 232B and 232D of the second comb-shaped portion 232-2 are connected to the DC voltage + V _2B .

Similarly, for the fourth pair of electrostatic support electrodes 224,
The circumferential portions 224A and 224C of the first comb-shaped portion 224-1 are
DC voltage-V_4AConnected to the second comb 224-2.
Circumferential portions 224B and 224D are DC voltage + V_4AConnected to
The first comb-shaped portion 23 of the fourth pair of electrostatic supporting electrodes 234.
The peripheral portions 234A and 234C of 4-1 are DC voltage -V._4BTo
Connected, the circumferential portion 234B of the second comb portion 234-2,
234D is DC voltage + V _4BIt is connected to the.

Detecting AC voltages AC _2A , AC _2B , AC _4A and AC _4C applied to the second and fourth pairs of electrostatic support electrodes 222, 232 and 224, 234 corresponding to the equation (10).
The following equation is obtained with respect to.

[0162]

[Equation 13] AC _2A = -EY-Eφ-EZ AC _2B = -EY + Eφ + EZ AC _4A = + EY + Eφ-EZ AC _4B = + EY-Eφ + EZ

AC voltage for detection AC _2A , AC _2B , AC _4A ,
Each term on the right side of AC _4B is expressed as follows.

[0164]

+ EY = E ₀ cos (ω ₂ t + ζ ₂ ) −EY = E ₀ cos (ω ₂ t + η ₂ ) + E φ = E ₀ cos (ω ₅ t + ζ ₅ ) −E φ = E ₀ cos (ω ₅ t + η ₅ ) + EZ = E ₀ cos (ω ₃ t + ζ ₃ ) −EZ = E ₀ cos (ω ₃ t + η ₃ )

Here, ± EY is the Y of the gyro rotor 20.
Voltage component for detecting linear displacement ΔY in the axial direction, ± E
φ is a voltage component for detecting the rotational displacement Δφ of the gyro rotor 20 around the X axis, and ± EZ is a voltage component for detecting the linear displacement ΔZ of the gyro rotor 20 in the Z axis direction. ω ₂ , ω ₃ , and ω ₅ are detection frequencies. The phase difference contained in such a voltage component is expressed as follows.

[0166]

[Equation 15] η ₂ = ζ ₂ ± 180 ° η ₃ = ζ ₃ ± 180 ° η ₅ = ζ ₅ ± 180 °

Next, the principle of the displacement detection system of this example will be described with reference to FIG. FIG. 4 shows an equivalent circuit of the restraint control system and the rotor drive system. In the equivalent circuit of the restraint control system, the first and third
Pair of electrostatic support electrodes 221, 231, and 223, 233
And the electrode portion 200 of the gyro rotor 20 corresponding thereto
A, 200A ', 200C and 200C' are replaced by capacitors. As described above, in the first electrostatic support electrode 221 of the first pair of electrostatic support electrodes 221, 231, between the first comb-shaped portion 221-1 and the first and third electrode portions 200A, 200C. Capacitance and the second comb-shaped portion 22
The electrostatic capacitances between 1-2 and the second and fourth electrode portions 200B and 200D are equal to C _1A , and the second electrostatic support electrode 2
31, the first comb-shaped portion 231-1 and the first and third comb-shaped portions 231-1.
Of the capacitance between the electrode portions 200A 'and 200C' of the second electrode and the second
221-2 and second and fourth electrode portions 200
The capacitance between B ′ and 200D ′ is equal to C _1B .

Similarly, a third pair of electrostatic support electrodes 223,
In the first electrostatic support electrode 223 of 233, the first comb-shaped portion 223-1 and the first and third electrode portions 200A, 20
The electrostatic capacitance between 0C and the electrostatic capacitance between the second comb-shaped portion 223-2 and the second and fourth electrode portions 200B and 200D is equal to C _3A , and in the second electrostatic support electrode 233, ,
First comb-shaped portion 233-1 and first and third electrode portions 200
The capacitance between A ′ and 200C ′ and the second comb-shaped portion 233.
-2 and the second and fourth electrode portions 200B ', 200D' capacitance between the equally C _3B. Displacement detection electrode 22
6, 236 and the corresponding capacitances of the displacement detection electrode portions 200F and 200F 'of the gyro rotor 20 are referred to as C _FA and C _FB , respectively.

For example, assume that the gyro rotor 20 is linearly displaced by ΔX in the X-axis direction, rotationally displaced by a rotation angle Δθ about the Y-axis, and linearly displaced by ΔZ in the Z-axis direction. Assuming that such displacement is sufficiently small, the capacitance of each capacitor is expressed as follows.

[0170]

## EQU16 ## C _1A = C ₀ (1 + ΔX + ΔZ + Δθ) C _1B = C ₀ (1 + ΔX-ΔZ-Δθ) C _3A = C ₀ (1-ΔX + ΔZ-Δθ) C _3B = C ₀ (1-ΔX-ΔZ + Δθ)

Here, C ₀ is the capacitance of each capacitor when all displacements are zero. Conversely, each displacement Δ
X, ΔZ, and Δθ can be represented by the capacitance of the capacitor.

[0172]

Equation 17] _{ΔX = (1 / 4C 0)} (C 1A + C 1B -C 3A -C 3B) Δθ = (1 / 4C 0) (C 1A -C 1B -C 3A + C 3B) ΔZ = (1 / 4C ₀ ) (C _1A -C _1B + C _3A -C _3B )

Further, in each electrostatic supporting electrode, two comb-shaped portions 221-1 and 221-2, 231-1 and 231-2, 2 are formed.
23-1 and 223-2, 233-1 and 233-2,
Control DC voltage of equal magnitude and opposite polarities ± V
_1A , ± V _1B , ± V _3A , and ± V _3B are applied, so that the potentials at the midpoints Q ₁ and Q ₃ of the two pairs of capacitors become zero. According to this example, since the control DC voltages having the same size but different polarities are applied to the comb-shaped portions of each pair of the electrostatic supporting electrodes, the potential of the gyro rotor 20 is zero.

First and third electrostatic supporting electrodes 221 and 23
1 and 223, 233 superimposed on the control DC voltage,
AC voltage for detection AC _1A , AC _1B and AC _3A , A respectively
When C _3B is applied, a displacement detecting AC current i _P is generated in the displacement detecting capacitor. Such displacement detection AC current i
_P is represented by the following formula. Incidentally, s and Laplace operator.

[0175]

[Equation 18] i _P = K ₁₃ (C _1A AC _1A + C _1B AC _1B + C _3A AC _3A + C _3B AC _3B ) K ₁₃ = 2 (C _FA + C _FB ) s / (2C _1A + 2C _1B + 2C _3A + 2C _3B + C _FA + C _FB )

Here, s is a Laplace operator. this
AC voltage for detection A represented by the formula of the equation 10
C_1A, AC_1BAnd AC_3A, AC_3BAnd the formula of Equation 16
Capacitance C represented_1A, C_1BAnd C_3A, C_3BSubstitute
When tidying up, displacement detection AC current i _PIs represented as
It

[0177]

## EQU19 ## i _P = K ₁₃ '(EXΔX + EθΔθ + EZΔZ) K ₁₃ ' = -8s (C _FA + C _FB ) / (8C ₀ + C _FA + C _FB )

The gyro device of this example is cut along the YZ plane.
The cut cross section is not shown, but was placed along the Y axis
Second and fourth pairs of electrostatic support electrodes 222, 232 and 2
24, 234 and the corresponding gyro rotor 20
2 and the fourth part P₂And P _FourA similar discussion regarding
It holds.

For example, the gyro rotor 20 is linearly displaced in the Y axis direction by ΔY and is linearly displaced in the Z axis direction by ΔZ.
It is assumed that it is rotationally displaced about the X axis by a rotation angle Δφ. Corresponding to the equation of Expression 16, the capacitance of each capacitor is expressed as follows.

[0180]

C _2A = C ₀ (1 + ΔY + ΔZ + Δφ) C _2B = C ₀ (1 + ΔY-ΔZ-Δφ) C _4A = C ₀ (1-ΔY + ΔZ-Δφ) C _4B = C ₀ (1-ΔY-ΔZ + Δφ)

Further, the displacements ΔX and Δ corresponding to the equation (17)
When Y and Δφ are expressed by the electrostatic capacity of the capacitor, it becomes as follows.

[0182]

Equation 21] _{ΔY = (1 / 4C 0)} (C 2A + C 2B -C 4A -C 4B) Δφ = (1 / 4C 0) (C 2A -C 2B -C 4A + C 4B) ΔZ = (1 / 4C _{0) (C 2A -C 2B +} C 4A -C 4B)

After all, the gyro rotor 20 moves Δ in the X-axis direction.
Linearly displaced by X, then linearly displaced by Y in the Y-axis direction, Z
It is linearly displaced by ΔZ in the axial direction, and the rotation angle is Δθ around the Y axis.
Rotationally displaced and rotationally displaced about the X axis by a rotational angle Δφ.
If the displacement detection AC current i _PIs given by
It

[0184]

_{I P} = K _I (EXΔX + EYΔY + EZΔZ + EθΔθ + EφΔφ) K _I = -8sC ₀ (C _FA + C _FB ) / (8C ₀ + C _FA + C _FB )

Here, K _I is a proportional constant and s is a Laplace operator. The displacement detecting AC current i _P is supplied to the preamplifier 35 via a resistor 36 having a resistance value R,
The displacement detection AC voltage V _P is converted. The displacement detecting AC voltage V _P is expressed by the following equation.

[0186]

(23) V _P = V _P (X) + V _P (Y) + V _P (Z) + V _P (θ) + V _P (φ)

Here, each term on the right side is each displacement ΔX, ΔY, Δ.
It is a voltage component corresponding to Z, Δθ, and Δφ, and is expressed as follows.

[0188]

V _P (X) = K _I EXΔX = K _V1 E ₀ ω ₁ ΔX sin (ω ₁ t + ζ ₁ ) V _P (Y) = K _I EYΔY = K _V2 E ₀ ω ₂ ΔY sin (ω ₂ t + ζ ₂ ) V _P (Z) = K _I EZΔZ = K _V3 E ₀ ω ₃ ΔZ sin (ω ₃ t + ζ ₃ ) V _P (θ) = K _I E θΔθ = K _V4 E ₀ ω ₄ Δθ sin (ω ₄ t + ζ ₄ ) V _P (φ ) = K _I E φΔφ = K _V5 E ₀ ω ₅ Δφ sin (ω ₅ t + ζ ₅ )

Here, K _{V1 to} K _V5 are constants determined by the capacitances C ₀ , C _FA , and C _FB of the capacitors. As is apparent from the equations (23) and (24), the output voltage V _P independently includes all displacements of the gyro rotor 20. Therefore, if the desired voltage component is taken out from the equation (23), the displacement corresponding to it can be obtained. For example, linear displacement ΔX, Δ
Even when two or more Y, ΔZ and rotational displacements Δθ, Δφ are superposed, each displacement can be obtained by extracting the corresponding voltage component. In addition, this equation shows that the output voltage V _P is a linear displacement Δ
It is shown that the amplitude is modulated by the displacement detection frequencies ω _{1 to} ω ₅ corresponding to X, ΔY, ΔZ and the rotational displacements Δθ, Δφ.

Next, the rotor drive system in the gyro device of the present invention will be described. As shown in FIGS. 2, 3 and 4,
The rotor drive system of this example includes drive electrode portions 200E and 200E 'formed on the upper and lower surfaces of the gyro rotor 20 and the upper bottom member 22 or the lower bottom member 2 of the gyro case 21.
4 includes driving electrodes 225 and 235 and a rotor driving unit 160. The rotor drive system of this example receives the command signal from the sequence control unit 170 and receives the drive electrode 22.
A driving voltage is applied to the gyro rotor 2 and
0 is started, rotated, and stopped.

As shown in FIG. 1B and as described above, the driving electrode portion 200E and the driving electrode 225 of the gyro rotor 20 and the driving electrode portion 200E 'and the driving electrode 235 are circles having the same radius. They are arranged in a row on the circumference and each is composed of a plurality of fan-shaped portions having the same shape.

Driving electrode portions 200E and 200 of this example
E'and the driving electrodes 225 and 235 form a three-phase electrode. According to the present example, the upper drive electrode portion 200E of the gyro rotor 20 includes four fan-shaped portions that are spaced from each other by a central angle of 90 °, and the lower drive electrode portion 200E '.
Includes four fan-shaped portions spaced from each other by a central angle of 90 °.

Correspondingly, the upper drive electrode 225 of the gyro case 21 includes twelve fan-shaped portions separated by the same central angle, and the lower drive electrode 235 has the same central angle. Includes twelve spaced sectors. Each of the twelve driving electrodes 225 or 235 comprises four sets of fan-shaped portions, and each set of fan-shaped portions has three fan-shaped portions,
That is, it is composed of first-phase, second-phase, and third-phase fan-shaped portions.

The corresponding phase sector portions of the driving electrodes 225 or 235 of each set are electrically connected to each other. For example, the four driving electrodes 225 or 235 of the first phase are connected to each other, and the four driving electrodes 225 or 23 of the second phase are connected.
5 are connected to each other, and the four driving electrodes 225 or 235 of the third phase are connected to each other.

A three-phase driving voltage is applied to the three-phase common terminal. The driving voltage may be a step voltage or a pulse voltage. The driving voltage is sequentially switched to the four adjacent fan portions of the next phase. The switching of the driving voltage is performed in synchronization with the rotation of the gyro rotor 20. As a result, the gyro rotor 20 rotates at high speed. Since the void portion 26 of the gyro case 21 is maintained in a vacuum, the driving voltage may be interrupted when the rotation speed of the gyro rotor 20 becomes high, but the driving voltage may be continuously applied.

The driving electrode portion 20 which constitutes a three-phase electrode
The 0E and 200E ′ and the driving electrodes 225 and 235 may be configured to include more fan-shaped portions. For example,
Each of the driving electrode portions 200E and 200E ′ may include five fan-shaped portions, and correspondingly, each of the driving electrodes 225 and 235 may include five sets (15) of fan-shaped portions. .

An equivalent circuit of the rotor drive system is shown on the right side of FIG. The drive electrode portion 200E of the gyro rotor 20 and the drive electrode 225 of the gyro case 22 are replaced with capacitors, and the drive electrode portion 200 of the gyro rotor 20 is replaced.
E ′ and the driving electrode 235 of the gyro case 24 are replaced with a capacitor. Each capacitor has a driving DC voltage VR for rotating the gyro rotor 20.
1, VR2, VR3 and detection AC voltages ACR1, ACR2, AC for detecting the rotation angles of the gyro rotor 20
R3 is applied.

The operation of the drive motor of this example will be described in detail with reference to FIG. In FIG. 5, the driving electrode portions 200 on the upper side of the gyro rotor 20 that are actually arranged in a circumferential shape are shown.
E and the corresponding upper drive electrodes 225 of the gyro case 22 are shown in a linear arrangement.

The driving electrode portion 200E on the upper side of the gyro rotor 20 has four fan-shaped portions 200E-1, 200E-2, 200E-3, 2 which are spaced from each other by a central angle of 90 °.
Including 00E-4. Correspondingly, gyro case 2
The upper driving electrode 225 of 2 includes 12 fan-shaped portions,
These consist of four sets, each set containing three, or three phase, fan sections. Reference numerals 225-1, 225-2, and 225 are respectively assigned to the first, second, and third phase fan portions of each set of fan portions.
-3 is added.

The four fan-shaped portions 225-1 of the first phase are electrically connected to each other, and the four fan-shaped portions 225 of the second phase 225-
2 are electrically connected to each other, and the four fan-shaped portions 225-3 of the third phase are electrically connected to each other.

A command signal from the sequence controller 170 is supplied to the rotor driver 160, and the three-phase driving electrodes 225-1, 225-2, 225 are supplied by the command signal.
-3, the driving DC voltages VR1, VR2, VR3 and the detection AC voltages ACR1, ACR2, ACR3 are applied.

Driving electrodes 22 for the first, second and third phases
5-1, 225-2, 225-3 has a predetermined switching time Δ
The driving DC voltages VR1, VR2, and VR3 are sequentially applied every t. As a result, the gyro rotor 20 is rotated around the central axis, that is, the spin axis by 360 at every switching time Δt.
Rotate by degrees / 12 = 30 degrees.

The graph shown on the lower side of FIG. 5 shows the rotation angle detection currents generated in the displacement detection electrodes 226 and 236 or the rotation angle detection voltages ACQ1, ACQ2 and ACQ3 corresponding thereto.
Is. The rotation angle detection signals ACQ1, ACQ2,
The rotation angle of the gyro rotor 20 is detected by the ACQ3.

For example, the first phase driving electrode 225-1
When the driving DC voltage VR1 is applied to the four driving electrode units 200E-1, 200E-2, 200E-3, 2
00E-4 is the first phase driving electrodes 225-1 and 225.
-1, 225-1, 225-1 until it matches, that is,
The gyro rotor 20 rotates about the central axis by 30 degrees, and when the driving DC voltage VR2 is applied to the driving electrodes 225-2 of the second phase, the four driving electrode units 200
E-1, 200E-2, 200E-3, and 200E-4 are the drive electrodes 225-2, 225-2, 225 of the second phase.
2, 225-2, that is, the gyro rotor 20 rotates about the central axis by 30 degrees.

The structure and operation of the rotor drive unit 160 will be described with reference to FIG. Displacement detection current i _p generated in the displacement detection electrode 226, 236 is converted to a voltage V _p for the displacement detected by the displacement detecting circuit 35, such a displacement detection voltage V _p is supplied to the rotor drive unit 160. Displacement detection current i _p is the rotation angle detection current ACQ shown on the lower side of FIG. 5
1, ACQ2, ACQ3. Therefore, the displacement detection voltage V _p includes a rotation angle detection voltage signal having a waveform as shown in the lower side of FIG.

The displacement detecting voltage V _P is synchronously detected by the three synchronous detectors 160-1, 160-2 and 160-3, and the three rotational angle detecting voltages ACQ1 having the waveforms shown in the lower side of FIG. , ACQ2, ACQ3 are obtained. The synchronous detectors 160-1, 160-2, 160-3 synchronously detect the displacement detection voltage V _P using the reference signals ACR1, ACR2, ACR3 having a predetermined cycle as reference signals. The output signals of the synchronous detectors 160-1, 160-2, 160-3 are supplied to the rotation angle calculation unit 160-7 via the filters 160-4, 160-5, 160-6.

The rotation angle calculator 160-7 calculates the rotation angle of the gyro rotor 20. That is, the four driving electrode portions 200E-1, 200E-2, 20 of the gyro rotor 20
0E-3 and 200E-4 are three-phase drive electrodes 225-
Which of the driving electrodes of 1, 225-2, 225-3 is located at the position corresponding to the driving electrode is obtained.

The commutation calculator 160-8 generates a switching signal based on the rotation angle of the gyro rotor 20. The rotor drive voltage generator 160-9 receives the switching signal supplied from the commutation calculator 160-8 and receives the three-phase drive electrodes 225-1, 225-2, 22.
Driving DC voltage VR1, VR2, VR supplied to 5-3
3 is generated.

Next, the operation of the sequence controller 170 will be described. The sequence control unit 170 has a start mode, a steady operation mode, and a stop mode, and supplies a command signal corresponding to each mode to the rotor drive unit 160. In the startup mode, the commutation calculation unit 160-7 generates a predetermined switching signal or switching time signal so that the rotation speed of the gyro rotor 20 increases. When the rotation speed of the gyro rotor 20 reaches a certain speed, the sequence controller 170 generates a steady operation mode signal and supplies it to the rotor driver 160.

In the steady operation mode, the commutation calculator 160-8 supplies a constant switching time signal to the rotor drive voltage generator 160-9. In the stop mode, a predetermined switching signal or switching time signal is generated so that the rotation speed of the gyro rotor 20 decreases.

FIG. 7 shows the configuration of the control operation unit 140 of the gyro device according to the present invention and the gyro acceleration output operation unit 145.
Indicates. The control calculation unit 140 of the present example inputs the output voltage V _P of the preamplifier 35 to zero the displacement of the gyro rotor 20 and the displacement calculation unit 141 that calculates linear displacements ΔX, ΔY, ΔZ and rotational displacements Δθ, Δφ. Linear acceleration (dimensionless amount) fx, f to be applied to the gyro rotor 20 in order to
PI for calculating y, fz and rotation moments fθ, fφ
D calculation unit 142 and change amounts of control DC voltage ΔV _1A , ΔV
_1B , ΔV _2A , ΔV _2B , ΔV _3A , ΔV _3B , ΔV _4A , ΔV _4B
And a control voltage generator 144 for generating control DC voltages V _1A , V _1B , V _2A , V _2B , V _3A , V _3B , V _4A and V _4B . The gyro device has a gyro acceleration output calculation unit 145. The gyro acceleration output calculation unit 145 inputs the accelerations fx, fy, fz and the rotational moments fθ, fφ output by the control calculation unit 140 and outputs the gyro output. α _X , α _Y ,
Calculate α _Z , dθ / dt, dφ / dt.

The configuration and operation of the displacement calculator 141 of this example will be described with reference to FIG. The displacement calculator 141 of this example is
The first synchronous detector 141-1 for synchronously detecting the voltage signal V _P with the reference signal of the frequency ω ₁ to obtain the voltage component V _P (X) of the first expression of the equation (24), and the reference signal of the frequency ω ₂ . The second synchronous detector 141- for synchronously detecting the voltage signal V _P by using the second equation (24) to obtain the voltage component V _P (Y) of the second equation.
2 and the third synchronous detector 141-3 for synchronously detecting the voltage signal V _P by the reference signal of the frequency ω ₃ to obtain the voltage component V _P (Z) of the third formula of the equation of the number 24, and the frequency ω ₄ fourth synchronization detector 1 to obtain a fourth equation of the voltage component V _P (theta) formula of synchronous detection number 24 a voltage signal V _P by the reference signal
41-4 and the reference signal of the frequency ω ₅ by the voltage signal V _P
Is detected synchronously and the voltage component V _P (φ) of the fifth equation of the equation of number 24
And a fifth synchronous detector 141-5 for determining

Incidentally, each synchronous detector 141-1, 141-
A filter 141- for rectifying an AC waveform into a DC waveform is provided on the output side of each of 2, 141-3, 141-4 and 141-5.
6, 141-7, 141-8, 141-9, 141-1
0 may be provided.

The output voltage of each filter is the linear displacement ΔX, ΔY, ΔZ and the rotational displacement Δθ, Δ as shown in the equation (24).
represents φ. The displacement signal is supplied to the PID calculator 142 and the control voltage calculator 143.

With reference to FIG. 9, the PID calculation unit 142 of this example.
The configuration and operation of will be described. The PID calculator 142 of this example
Are five PID operators 142-1, 142-2, 142
-3, 142-4, 142-5, each PID calculator has a linear displacement ΔX, ΔY, ΔZ and a rotational displacement Δ, respectively.
By inputting θ and Δφ, linear accelerations fx, fy and fz and rotational moments fθ and fφ are calculated.

FIG. 9 shows the configuration of the first PID calculator 142-1. The first PID calculator 142-1 inputs a linear displacement ΔX and performs a differential operation on a differential section 142-1A, a proportional section 142-1B on which a proportional operation is performed, and an integral section 14 on which an integral operation is performed.
2-1C and addition section 142 that adds the calculation results thereof-
With 1D. The output signal of the adder 142-1D is PI
This is the output signal of the D calculator 142-1. In FIG. 9, S is a Laplace operator, K _P is a proportional constant, T _D and T
_I is the differential time constant and the integral time constant.

The other three PID calculators included in the PID calculator 142 of this example, that is, the second, third, fourth and fifth PID calculators.
The configuration of the PID calculator 142-1 of
The PID calculator 142-1 may have the same configuration.

Output signals fx, f of the PID calculator 142
The y, fz, fθ, and fφ are supplied to the control voltage calculation unit 143 and the gyro acceleration output calculation unit 145. The gyro acceleration output calculation unit 145 includes the addition units 142-1D to 142-1D.
142-5D output signals fx, fy, fz, fθ, fφ
Instead, the output signals of the integrators 142-1C to 142-5C may be supplied.

Control voltage calculation according to the present embodiment with reference to FIG.
The configuration and operation of the unit 143 will be described. Control voltage according to this example
The pressure calculation unit 143 uses linear accelerations fx, fy, fz and rotations.
Change ΔV of control DC voltage from moments fθ and fφ
₁~ ΔV₈Is calculated. According to this example, first the linear acceleration
fx, fy, fz and rotation moments fθ, fφ and straight line
Displacement ΔX, ΔY, ΔZ and rotational displacement Δθ, Δφ are dimensionless
Then the actual displacement of the gyro rotor 20 becomes zero.
Force Fx, F to be applied to the gyro rotor 20
Calculate y, Fz and torques Tθ, Tφ. Such force F
x, Fy, Fz and torques Tθ, Tφ are dimensionless quantities
can get. Finally, such forces Fx, Fy, Fz and Tor
DC voltage V for control from Tθ, Tφ_1A~ V_4BChange Δ
V_1A~ ΔV _4BIs calculated.

The dimensionlessization of the input signal of the control voltage calculator 143 will be described with reference to FIG. As shown in FIG. 10A, the circumferential portion 221A of the electrostatic supporting electrode of the gyro case 21 corresponding to the electrode portion 200A of the gyro rotor 20 is considered as a schematic capacitor. Circumferential portion 22 of electrostatic supporting electrode
1A is a distance δ ₂ outward in the radial direction with respect to the electrode portion 200A.
It is only biased, and the part where the two overlap is a capacitor.

It is assumed that such a capacitor is arranged at a position of radius r, the width in the radial direction is L, the width in the circumferential direction is B, and the gap is δ. The linear displacements ΔX, ΔY, ΔZ and the rotational displacements Δθ, Δφ are made dimensionless by the following formula.

[0222]

ΔX _N = ΔX / L ΔY _N = ΔY / L ΔZ _N = ΔZ / δ Δθ _N = Δθ / (δ / r) Δφ _N = Δφ / (δ / r)

Here, the subscript N represents a dimensionless quantity. Next in FIG.
A method for making linear accelerations fx, fy, fz and rotational moments fθ, fφ dimensionless will be described with reference to 0B. The linear accelerations fx, fy, fz are calculated by the following equations.

[0224]

Fx _N = fx (C ₀ V ₀ ² / L) ^-1 fy _N = fy (C ₀ V ₀ ² / L) ^-1 fz _N = fz (C ₀ V ₀ ² / δ) ^-1 fθ _N = fθ (rC ₀ V ₀ ² / δ) ^-1 fφ _N = fφ (rC ₀ V ₀ ² / δ) ^-1

Here, the subscript N represents a dimensionless quantity. C ₀ is the electrostatic capacitance when the displacement of the gyro rotor 20 is zero, and is expressed as C ₀ = εBL / δ using the dielectric constant ε.
V ₀ is a control DC voltage when the displacement of the gyro rotor 20 is zero, r is a radius, and δ is a distance between the electrode portions. Forces Fx, Fy, F to be applied to the gyro rotor 20
z and torques Tθ and Tφ can be expressed as follows.

[0226]

Fx = fx _N Fy = fy _N Fz = fz _N Tθ = fθ _N Tφ = fφ _N

Next, the dimensionless forces Fx, Fy, Fz
And the change amount ΔV of the control DC voltage from the torques Tθ and Tφ
Calculate _{1A to} ΔV _4B .

First and third electrostatic supporting electrodes 221, 22
DC voltage for control applied to 3 ± V _1A , ± V _1B and ±
Amount of change in V _3A , ± V _3B ΔV _1A , ΔV _1B and ΔV _3A , ΔV
Think about _3B . Four variations ΔV _1A , ΔV _1B and Δ
V _3A and ΔV _3B are three dimensionless forces Fx and F, respectively.
It can be represented by z and torque Tθ. Similarly,
Consider the change amounts ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B of the control DC voltages ± V _2A , ± V _2B and ± V _4A , ± V _4B applied to the second and fourth electrostatic electrodes 222 and 224. . Four
Each of the three variations ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B can be represented by three dimensionless forces Fy, Fz and a torque Tφ.

Therefore, four variations ΔV _1A , ΔV _1B and Δ
Yet another condition is provided to determine V _3A , ΔV _3B and ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B .

[0230]

[Formula 28] ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0

The first expression is XZ of the gyro rotor 20.
A portion along the plane, that is, the first and third portions P₁, P
₃The sum of the changes in the control DC voltage at 0 is 0
The second equation is along the YZ plane of the gyro rotor 20.
Part, that is, the second and fourth parts P₂, P_FourSmell
That the sum of the changes in the control DC voltage is 0
It represents. By setting such conditions,
It is possible to prevent unnecessary charges from flowing into the ero rotor 20.
At the same time, the change amount ΔV of eight control DC voltages _1A~ Δ
V_4BThe value of can be uniquely determined.

Next, the dimensionless forces Fx, Fy, Fz
And the change amounts ΔV _{1A to} ΔV _4B of the control DC voltage are calculated by the torques Tθ and Tφ. Such an arithmetic expression is expressed as follows.

[0233]

Equation 29] _{ΔV 1A = (V 0/4} ) (Fx + Fz / 2 + Tθ) ΔV 1B = (V 0/4) (Fx-Fz / 2-Tθ) ΔV 3A = (V 0/4) (- Fx + Fz / 2 _{-Tθ) ΔV 3B = (V 0} /4) (- Fx-Fz / 2 + Tθ) ΔV 2A = (V 0/4) (Fy + Fz / 2 + Tφ) ΔV 2B = (V 0/4) (Fy-Fz / 2- _{Tφ) ΔV 4A = (V 0} /4) (- Fy + Fz / 2-Tφ) ΔV 4B = (V 0/4) (- Fy-Fz / 2 + Tφ)

The control voltage generator 144 includes four pairs of electrostatic supporting electrodes 221, 231, 222, 232, 223, 233.
Control DC voltages V _1A and V _1B to be supplied to 224 and 234,
V _2A , V _2B , V _3A , V _3B , V _4A and V _4B are generated. The control DC voltage is expressed by the following equation.

[0235]

[Formula 30] V _1A = V ₀ + ΔV _1A V _1B = V ₀ + ΔV _1B V _2A = V ₀ + ΔV _2A V _2B = V ₀ + ΔV _2B V _3A = V ₀ + ΔV _3A V _3B = V ₀ + ΔV _3B V _4A = V ₀ + ΔV _4A V _4B = V ₀ + ΔV _4B

V ₀ is a reference voltage. V _1A and V _1B are control DC voltages applied to the first pair of electrostatic support electrodes 221, 231 and V _2A and V _2B are second pair of electrostatic support electrodes 22.
2, 232 is a control DC voltage applied to the second and second 232, V _3A and V _3B are control DC voltages applied to the third pair of electrostatic support electrodes 223 and 233, and V _4A and V _4B are the fourth pair of electrostatic. Support electrode 2
This is a control DC voltage applied to 24 and 234.

Next, the force that actually acts on the gyro rotor 20 will be calculated. The formulas 1 to 9 described in the conventional example and the description corresponding thereto also hold true in the present invention. The electrostatic force acting on the _four parts P ₁ , P ₂ , P ₃ , P ₄ of the gyro rotor 20 corresponds to four pairs of electrostatic supporting electrodes 221,
231, 222, 232, 223, 233, 224, 2
DC voltage V _1A , V _1B , V _2A , V for control applied to 34
_It is proportional to the difference between _2B , _V3A , _V3B , _V4A and _V4B .

[0238]

Equation 31] _{Fz1 = K Z (V 1A -V} 1B) Fz2 = K Z (V 2A -V 2B) Fz3 = K Z (V 3A -V 3B) Fz4 = K Z (V 4A -V 4B)

K _Z is a constant determined by the shape of the capacitor formed by the electrostatic supporting electrode of the gyro case 21 and the electrode portion of the gyro rotor 20. The resultant force of the electrostatic force acting on the gyro rotor 20 is four parts P ₁ ,
It is the sum of electrostatic forces acting on P ₂ , P ₃ and P ₄ .

[0240]

Fz = K _Z (V _1A −V _1B + V _2A −V _2B + V _3A −V _3B + V _4A −V _4B )

As described above, the electrostatic supporting electrodes of the gyro case 21 are biased radially outward or inward from the electrode portion of the gyro rotor 20, which causes the gyro rotor 20 to move in the X-axis direction and the Y-axis direction. I am receiving power. The force in the X-axis direction that acts on the first and third portions P ₁ and P ₃ of the gyro rotor 20 is expressed as follows.

[0242]

Fx1 = K _X (V _1A + V _1B ) Fx2 = K _X (V _3A + V _3B )

The force acting on the gyro rotor 20 in the X-axis direction is the difference between the forces acting on the first and third portions P ₁ and P ₃ .

[0244]

Equation 34] _{Fx = Fx1-Fx2 = K X} (V 1A + V 1B -V 3A -V 3B)

Similarly, Y acting on the gyro rotor 20
The axial force is the second and fourth parts P ₂, P_FourAct on
It is the difference in power.

[0246]

Equation 35] _{Fy = Fy1-Fy2 = K Y} (V 2A + V 2B -V 4A -V 4B)

The above discussion is based on the first and second aspects of the gyro rotor 20.
And the third part P₁, P₃Electrostatic force Fz in the same direction as
1, when Fz3 acts and the second and fourth parts
P₂, P _FourAnd electrostatic forces Fz2 and Fz4 in the same direction are
This is the case when it works. First and first gyro rotor 20
Part P of 3₁, P₃Electrostatic force Fz1 in the opposite direction to
When Fz3 acts, the gyro rotor 20 is rotated around the Y axis.
A torque Tθ for rotating the motor is generated. Similarly, ja
The second and fourth parts P of the rotor 20₂, P_FourTo each other
When electrostatic forces Fz2 and Fz4 in the opposite directions act on the gyro
Rotor 20 generates torque Tφ that rotates about the X axis
Is done. The torques Tθ and Tφ are expressed by the following equation.
Be done.

[0248]

Tθ = (Fz3-Fz1) r Tφ = (Fz4-Fz2) r

The configuration and operation of the gyro acceleration output operation unit 145 according to the present invention will be described with reference to FIG. The gyro acceleration output calculation unit 145 of this example first performs the same calculation as the formula of Expression 26 to obtain the forces Fx, Fy, Fz and the torques Tθ, Tφ to be applied to the gyro rotor.
Such calculation is performed by the multipliers 145-1 to 145-5. The forces Fx, Fy, Fz and the torques Tθ, Tφ obtained by the multipliers 145-1 to 145-5 are dimensionless quantities.

Next, the force F to be applied to the gyro rotor 20
External force acceleration α from x, Fy, Fz and torques Tθ, Tφ
_X , α _Y , α _Z and angular velocities dθ / dt and dφ / dt are obtained. External force acceleration and angular velocity are expressed as follows.

[0251]

Α _X = Fx / mg α _Y = Fy / mg α _Z = Fz / mg dθ / dt = Tφ / H dφ / dt = Tθ / H

M is the mass of the gyro rotor 20, g is the gravitational acceleration, and H is the spin angular momentum of the gyro rotor 20. The right side of the equation (37) is the force or torque to be applied to the gyro rotor 20 so that the displacement of the gyro rotor 20 becomes zero, and is represented by the equation (32) to the equation (36). The left side is the external force acceleration or angular velocity acting on the gyro device.

An external force angular velocity dθ around the Y axis is applied to the gyro device.
When / dt acts, the gyro case 21 is rotationally displaced around the Y axis. The torque Tφ torques the gyro rotor 20 around the X axis. The gyro rotor 20 is rotationally displaced about the Y axis by the precession motion, and the rotational displacement about the Y axis with respect to the gyro case 21 becomes zero. When the external force angular velocity dφ / dt about the X axis acts on the gyro device, the torque Tθ torques the gyro rotor 20 about the Y axis. Gyro rotor 20
Rotates about the X axis by the precession motion, and the rotational displacement of the gyro rotor 20 about the X axis with respect to the gyro case 21 becomes zero.

A method of manufacturing the gyro rotor 20 and the spacer 23 of the gyro device of the present invention will be described with reference to FIG. A thin plate material or disk-shaped member made of a conductive material is prepared, and circular recesses having a depth δ are formed on the upper surface and the lower surface as shown in FIG. 12A.
00a, 200b, 200c, 200d, 200e, 2
00f, 200a ', 200b', 200c ', 200
The electrode parts are formed by forming d ', 200e', and 200f '. At the same time, the outer annular grooves for cutting 200g, 20
To form 0 g '.

As described with reference to FIG. 1, the recess 23B for accommodating the getter member 33 and the recess 23.
A passage 23C for connecting B and the void portion 26 is formed.

The depth δ of the circular recess formed first corresponds to the gap δ between the electrode portion of the gyro rotor 20 and the corresponding electrostatic support electrode of the gyro case 21. Such a depth may be a few μm, for example δ = 2-3 μm. Groove 2
00a, 200b, 200c, 200d, 200e, 2
00f, 200a ', 200b', 200c ', 200
The depth of d ', 200e', 200f 'may be any suitable size.

Next, the annular grooves for cutting 200g, 200g '
Is further shaved, and the central disk-shaped part is separated. The separated disk-shaped portion is the gyro rotor 20, and the remaining outer portion is the spacer 23.

According to this example, the gyro rotor 20 and the spacer 23 can be simultaneously manufactured from the same material. The gyro rotor 20 and the spacer 23 may be manufactured by a lithography technique or the like, for example, etching.

Next, the upper bottom member 22 of the gyro case 21.
A method of manufacturing the lower bottom member 24 will be described. First, a plate material or a disk-shaped member made of an insulating material such as glass is prepared. An electrostatic support electrode is formed on the inner surface of such a plate material or disk-shaped member. The electrostatic support electrode may be manufactured by forming a metal film by a suitable film forming technique. Thin film formation techniques include vapor deposition, ion plating, photofabrication, and the like. A through hole is formed in the plate material or the disk-shaped member, and a similar metal thin film is formed on the inner surface thereof. This forms a through-hole connection between the electrostatic support electrode and the external power supply or circuit. After the through hole connection is made, such through hole is sealed.

The gyro rotor 2 is sandwiched between the upper bottom member 22 and the lower bottom member 24 thus manufactured.
0 and the spacer 23 are inserted. A getter member 33 is arranged in the recess 23B. Next, the upper bottom member 22, the lower bottom member 24 and the spacer 23 are joined by a suitable joining method. Both are preferably joined by anodic bonding. Such joining may be done in a vacuum atmosphere.

Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-mentioned embodiments, and it is easily understood by those skilled in the art that various other configurations can be adopted without departing from the gist of the present invention. Be understood by.

[0262]

According to the present invention, the displacement detection AC voltage is applied to the electrostatic support electrodes by superimposing it on the control DC voltage, and the gyro rotor 2 is output from the output voltage of the displacement detection circuit.
All displacements of 0, that is, linear displacements in the XYZ axes and Y
There is an advantage that the rotational displacement about the axis and the X axis can be detected.

According to the present invention, unlike the conventional electrostatic gyro, an optical displacement detecting device including a light emitting element and a light receiving element is not used, so that there is an advantage that the gyro device can be downsized.

According to the present invention, a field effect transistor is used as the displacement detection circuit, and such a field effect transistor is provided adjacent to the displacement detection electrode, so that the displacement detection current is stable and has a small error. Can be detected.

According to the present invention, since it has a feedback loop for feeding back the displacement of the gyro rotor 20 detected by the displacement detection system to the control DC voltage,
There is an advantage that the position of the gyro rotor 20 can be actively controlled to make its displacement zero.

According to the present invention, the position of the gyro rotor 20 is controlled by the active control having the feedback loop, and the coil and the transformer are not used unlike the conventional passive electrostatic gyro, so that the device is miniaturized. There is an advantage that can be.

According to the present invention, since the position of the gyro rotor 20 is controlled by the active control, there is an advantage that the position of the gyro rotor 20 can be accurately and easily controlled. In particular, it becomes easy to support the gyro rotor 20 at a predetermined position in a floating manner at the time of startup.

According to the present invention, the gyro rotor 20 and the spacer 23 can be simultaneously manufactured from one thin plate material of a conductive material by the lithography technique or the like.
There is an advantage that a gyro device with low manufacturing cost and high accuracy can be obtained.

According to the present invention, since the gyro rotor 20 and the spacer 23 can use a single crystal metal such as silicon (silicon), it is possible to provide a highly accurate gyro device which is not affected by temperature changes and aging changes. There are advantages.

According to the present invention, since the spacer 23 is joined to the upper bottom member 21 and the lower bottom member 24 by anodic bonding, the gyro case 21 can be manufactured with the gyro rotor 20 enclosed in a vacuum. There is an advantage that can be.

According to the present invention, the four pairs of electrostatic supporting electrodes arranged on the inner surfaces of the upper bottom member 21 and the lower bottom member 24 are manufactured by forming the metal thin film electrodes by the thin film forming technique. Therefore, there is an advantage that the upper bottom member 21 and the lower bottom member 24 can be formed concentrically and in the same shape.

According to the present invention, each of the four pairs of electrostatic support electrodes formed on the inner surfaces of the upper bottom member 21 and the lower bottom member 24 includes a pair of comb-shaped portions, and the comb-shaped portions are staggered. Since it is arranged so as to sandwich the other, the gyro rotor 20
There is an advantage that the rate of change of the electrical energy (E = CV ² ) stored between the electrode part and the electrostatic support electrode of the gyro case 21 can be increased.

According to the present invention, each pair of comb-shaped portions of the electrostatic support electrode has a control DC voltage ± of the same absolute value and opposite sign.
Since V _1A to ± V _4B is applied, there is an advantage that the potential of the gyro rotor 20 can be always zero.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of a gyro device of the present invention.

FIG. 2 is an explanatory diagram for explaining a control loop of the gyro device of the present invention.

FIG. 3 is an explanatory diagram for explaining a restraint control system of the gyro device of the present invention.

FIG. 4 is a diagram showing an equivalent circuit of a restraint control system and a rotor drive system of the gyro device of the present invention.

FIG. 5 is an explanatory diagram illustrating the operation of the rotor drive system of the gyro device of the present invention.

FIG. 6 is a diagram showing a configuration example of a rotor drive unit of the gyro device of the present invention.

FIG. 7 is a diagram showing a configuration of a control calculation unit and a gyro acceleration output calculation unit of the gyro device of the present invention.

FIG. 8 is a diagram showing a configuration example of a displacement calculation unit of the gyro device of the present invention.

FIG. 9 is a diagram showing a configuration example of a PID calculation unit of the gyro device of the present invention.

FIG. 10 is an explanatory diagram for explaining the operation of the control voltage calculation unit of the gyro device of the present invention.

FIG. 11 is an explanatory diagram for explaining the operation of the gyro acceleration output calculation unit of the gyro device of the present invention.

FIG. 12 is an explanatory diagram for explaining a manufacturing method of the gyro rotor and the spacer of the gyro device of the present invention.

FIG. 13 is a diagram showing an example of a conventional gyro device.

FIG. 14 is an explanatory diagram for explaining the operations of the restraint control system and the rotor drive system of the conventional gyro device.

FIG. 15 is an explanatory diagram illustrating an operation of a Z control system of the gyro device.

FIG. 16 is a diagram showing a configuration example of an XY control system of a conventional gyro device.

FIG. 17: X gyro operation unit and X of conventional gyro device
It is a figure which shows the example of an acceleration calculation part.

FIG. 18: Y gyro operation unit and Y of conventional gyro device
It is a figure which shows the example of an acceleration calculation part.

FIG. 19 is a diagram showing an example of a Z acceleration calculation unit of a conventional gyro device.

[Explanation of symbols]

20 Gyro Rotor 20A Hole 20B Center Part 20C Electrode Part 21 Gyro Case 22 Upper Bottom Member 22A, 22A 'Hole 23 Spacer 23A Inner Wall 23B Recess 23C Passage 24 Lower Bottom Member 25 Screw 26 Cavity 27 Light-Emitting Element 28 Light-Receiving Element 29-1 , 29-2, 29-3, 29-4 electrode 29'-1, 29'-2, 29'-3, 29'-4 electrode 30-1, 30-2, 30-3, 30-4 coil 30 '-1, 30'-2, 30'-3, 30'-4 Coil 32 Cap 33 Getter member 34 Pipe 35 Preamplifier 36 Resistor 41, 42, 43, 44 Transformer 50 X control system 50-1 AC power supply 50-2 Arithmetic unit 50-3, 50-4 Multiplier 51 X Gyro arithmetic unit 51-1, 51-2, 51-3, 51-4 Voltage dividing unit 51-5, 51-6, 51-7, 5 -8 Rectification unit 51-9, 51-10, 51-11 Subtraction unit 51-12 Calculation unit 53 X acceleration calculation unit 53-1, 53-2 Addition unit 53-3 Subtraction unit 60 Y control system 60-1 AC power supply 60-2 operation part 60-3, 60-4 multiplier 61 Y gyro operation part 61-1, 61-2, 61-3, 61-4 voltage dividing part 61-5, 61-6, 61-7, 61 -8 Rectification part 61-9, 61-10, 61-11 Subtraction part 61-12 Calculation part 63 Y acceleration calculation part 63-1, 63-2 Addition part 63-3 Subtraction part 73 Z acceleration calculation part 73-1 73-2 Addition unit 73-3 Subtraction unit 100 Rotor drive system 101 Drive power supply 127, 128 Discharge / combined stopper 140 Control calculation unit 141 Displacement calculation unit 142 PID calculation unit 143 Control voltage calculation unit 144 Control voltage generator 145 Jai (B) Acceleration output calculation unit 150 Restraint control unit 160 Rotor drive unit 170 Sequence control unit 200A, 200B, 200C, 200D, 200E,
200F, 200A ', 200B', 200C ', 20
0D ', 200E', 200F 'electrode part 200a, 200b, 200c, 200d, 200e,
200f, 200g, 200a ', 200b', 200
c ', 200d', 200e ', 200f', 200g
Grooves 221, 222, 223, 224, 225, 226 Electrodes 231, 232, 233, 234, 235, 236 Electrodes

Front page continued (72) Inventor Takeshi Hojo 2-16-46 Minami Kamata, Ota-ku, Tokyo, Tokimec Co., Ltd. (72) Takafumi Nakaishi 2-16-46 Minami Kamata, Ota-ku, Tokyo In Tokimec Co., Ltd. (72) Inventor Shigeru Nakamura 2-16-46 Minami Kamata, Ota-ku, Tokyo Within Tokimec Co., Ltd. (72) Inventor Masayoshi Esashi 1-11-9 Yagiyama Minami, Taihaku-ku, Sendai City, Miyagi Prefecture

Claims (24)

[Claims] 1. A gyro case having a Z-axis along the central axis direction, and an X-axis and a Y-axis orthogonal to the Z-axis, and a gyro case that is non-contactably supported inside the gyro case by electrostatic supporting force. A disk-shaped gyro rotor having a spin axis, electrode portions formed along the circumferential direction on both sides of the gyro rotor, and electrode portions on both sides of the gyro rotor respectively corresponding to and spaced from it. An acceleration detection type having at least three pairs of electrostatic support electrodes spaced apart from each other in the circumferential direction by equiangular center angles, and a rotor drive system for rotating the gyro rotor at high speed around the spin axis. In the gyro device, each of the at least three pairs of electrostatic support electrodes is radially outward or radially inward with respect to the corresponding electrode portion of the gyro rotor. And a control calculation unit for applying a control DC voltage to the at least three pairs of electrostatic support electrodes in order to generate the electrostatic support force, and the control DC voltage. Applying a displacement detection AC voltage for detecting the displacement of the gyro rotor in a superimposed manner to the at least three pairs of electrostatic support electrodes; and a displacement detection electrode formed at the center of both surfaces of the gyro rotor. Section, a displacement detection electrode provided in the gyro case corresponding to each of the displacement detection electrode sections and spaced apart therefrom, and a displacement detection current flowing through the displacement detection electrode is detected to detect the gyroscope. A displacement detection system including a displacement detection circuit that outputs a displacement detection voltage signal that indicates the displacement of the rotor, a gyro output calculation unit that inputs the output signal of the control calculation unit and calculates the gyro output, The control calculation unit receives the displacement detection voltage signal output from the displacement detection circuit and receives the linear displacement in the X-axis direction, the Y-axis direction, and the Z-axis direction of the gyro rotor and Y.
A rotational displacement about the axis and the X-axis is calculated, a correction amount of the control DC voltage is calculated so that the linear displacement and the rotational displacement of the gyro rotor become zero, and the feedback amount is fed back to the control DC voltage. A gyro device characterized by being configured as follows. 2. The gyro device according to claim 1,
The control calculation unit calculates a displacement calculation unit that calculates a linear displacement and a rotational displacement of the gyro rotor, a PID calculation unit that calculates a force and a rotation moment to be applied to the gyro rotor, and a correction amount of the control DC voltage. A gyro device having a control voltage calculator. 3. The gyro device according to claim 1, wherein the gyro output calculation unit is a PI of the control calculation unit.
A gyro device configured to input an output signal of a D calculation unit to calculate a gyro output. 4. The gyro device according to claim 1, 2 or 3, wherein the displacement detection AC voltage is an AC voltage component having different displacement detection frequencies corresponding to linear displacement and rotational displacement of the gyro rotor. A gyro device including: 5. The gyro device according to claim 1, 2, 3 or 4, wherein the electrostatic supporting electrodes are arranged in a circumferential direction with respect to each other.
A gyro device comprising four pairs of electrostatic support electrodes spaced at a central angle of 0 degrees. 6. The gyro device according to claim 5,
Of the four pairs of electrostatic supporting electrodes, the first pair of electrostatic supporting electrodes
AC voltage for displacement detection applied to the_1A, A
C_1B, The displacement detection applied to the second pair of electrostatic support electrodes.
AC output voltage_2A, AC_2B, A third pair of electrostatically supported charges
The displacement detection AC voltage applied to the pole is AC _3A, AC
_3B, The displacement detection applied to the fourth pair of electrostatic support electrodes
AC voltage for AC_4A, AC_4BThen they are
A gyro device characterized by being represented by. AC_1A= -EX-Eθ-EZ AC_1B= -EX + Eθ + EZ AC_2A= -EY-Eφ-EZ AC_2B= -EY + Eφ + EZ AC_3A= + EX + Eθ−EZ AC_3B= + EX-Eθ + EZ AC_4A= + EY + Eφ-EZ AC_4B= + EY-Eφ + EZ where ± EX is 180 ° out of phase with each other, and
AC for detecting linear displacement of the yellow rotor in the X-axis direction
The voltage components, ± EY, are 180 ° out of phase with each other
A signal for detecting the linear displacement of the gyro rotor in the Y-axis direction.
The flow voltage components, ± EZ, are 180 ° out of phase with each other.
For detecting the linear displacement of the gyro rotor in the Z-axis direction
The AC voltage components, ± Eθ, are 180 ° out of phase with each other
Note: To detect the rotational displacement of the gyro rotor around the Y axis.
AC voltage component of ± Eφ, phases are different from each other by 180 °
The rotational displacement around the X axis of the gyro rotor is detected.
AC voltage component for the purpose of
The above-mentioned displacement detection frequency is obtained. 7. The gyro device according to claim 5, wherein the correction amounts of the control DC voltage applied to the electrostatic support electrodes of the first and third pairs are ΔV _1A , ΔV _1B and ΔV _3A. ,
ΔV _3B , the correction amount of the control DC voltage applied to the second and fourth pairs of electrostatic support electrodes is ΔV _2A , ΔV _2B and ΔV _4A , ΔV _4B , and the following relationship is satisfied. And a gyro device. ΔV _1A + ΔV _1B + ΔV _3A + ΔV _3B = 0 ΔV _2A + ΔV _2B + ΔV _4A + ΔV _4B = 0 8. The gyro device according to claim 1, 2, 3, 4, 5, 6 or 7, wherein the displacement detection circuit includes a field effect transistor. 9. The gyro device according to claim 1, 2, 3, 4, 5, 6, 7 or 8, wherein each pair of electrostatic support electrodes of said electrostatic support electrodes is separated from each other by a pair. The comb-shaped portions are provided, each of the comb-shaped portions having a plurality of circumferential portions extending in the circumferential direction and a connecting portion connecting the circumferential portions;
A gyro device characterized in that the circumferential portions of two comb-shaped portions are alternately arranged so as to sandwich the other. 10. The gyro device according to claim 9, wherein the control DC voltages applied to the first and second comb-shaped portions of the electrostatic support electrodes of the electrostatic support electrode have the same magnitude and are mutually different. A gyro device having different polarities. 11. The gyro device according to claim 9, wherein the electrode portion of the gyro rotor includes a plurality of annular portions corresponding to respective circumferential portions of the comb-shaped portion of the electrostatic supporting electrode, Each of the circumferential portions of the comb-shaped portion of the supporting electrode is radially offset outward or inward with respect to each of the corresponding annular portions of the electrode portion of the gyro rotor, whereby the above-mentioned A gyro device that generates a force such that displacements in an X-axis direction and a Y-axis direction with respect to a central axis line become zero. 12. The gyro device according to claim 1, wherein the gyro rotor is made of a conductive material, and the electrode portions are formed as protrusions formed on both sides of the gyro rotor. A gyro device characterized in that 13. The gyro device according to claim 12, wherein the gyro rotor is made of single crystal silicon. 14. The gyro device according to claim 1, wherein the gyro case includes an upper bottom member and a lower bottom member made of an insulating material, and the electrostatic support electrode includes the upper bottom member. And a gyro device configured as a metal thin film mounted on the inner surface of the lower bottom member. 15. The gyro device according to claim 14, wherein the upper bottom member and the lower bottom member of the gyro case are made of glass. 16. The gyro device according to claim 1, wherein the electrostatic supporting electrode is formed by a thin film forming technique including vapor deposition, ion plating, and photofabrication. Gyro device to do. 17. The gyro device according to claim 14, 15, or 16, wherein the gyro case includes a spacer arranged between the upper bottom member and the lower bottom member,
A gyro device, wherein the spacer is connected to the upper bottom member and the lower bottom member by anodic bonding. 18. The gyro device according to claim 1, wherein a stopper that also serves as a discharge is attached to the gyro case, and the stopper limits the displacement of the gyro rotor and the gyro. A gyro device having a function of discharging static electricity accumulated in a rotor to the outside. 19. The gyro device according to claim 1, wherein the gyro case has a recess for accommodating a getter member, and the recess is connected to the inside of the gyro case by a passage. A gyro device characterized by being present. 20. The gyro device according to claim 1, wherein the rotor drive system corresponds to a rotor drive electrode portion provided on both surfaces of the gyro rotor and the rotor drive electrode portion. And a rotor drive electrode spaced apart from the rotor drive electrode, and a rotor drive AC voltage circuit for applying a rotor drive AC voltage to the rotor drive electrode, wherein the rotor drive electrode portion is in a circumferential direction. A plurality of electrode portions spaced apart from each other arranged in a row, and the rotor driving electrode includes a plurality of electrodes spaced apart from each other arranged in a row in a circumferential direction. Gyro device. 21. A method of manufacturing a gyro device having a gyro case and a disk-shaped gyro rotor supported inside the gyro case in a non-contact manner by an electrostatic supporting force, wherein both sides of a plate material made of a conductive material. Forming a groove on the plate to form a protrusion, separating a circular portion from the plate material to separate it into a disc-shaped gyro rotor and an outer spacer surrounding the gyro rotor, and forming an upper bottom portion on both surfaces of the spacer. A method for manufacturing a gyro device, comprising: joining a material and a lower bottom member. 22. The method of manufacturing a gyro device according to claim 21, wherein the spacer is joined to the upper bottom member and the lower bottom member by anodic bonding. 23. The method of manufacturing a gyro device according to claim 21, wherein the upper bottom member and the lower bottom member made of an insulating material are prepared, and the inner surface of the upper bottom member and the lower bottom member is provided. Forming an electrostatic supporting electrode made of a metal thin film, respectively. 24. The method of manufacturing a gyro device according to claim 23, wherein the electrostatic support electrodes formed on the upper bottom member and the lower bottom member include at least three pairs of electrostatic support electrodes. Each of the support electrodes includes a pair of comb-shaped portions, the comb-shaped portions having a plurality of circumferential portions extending in the circumferential direction and a connecting portion connecting the circumferential portions, and the pair of comb-shaped portions. A method for manufacturing a gyro device, wherein the circumferential portions of the are arranged alternately so as to sandwich the other.