JPH0771965A - Gyroscope - Google Patents

Abstract

PURPOSE:To provide an electrostatic-bearing acceleration-detecting type gyroscope which is manufactured at a low cost and has a long life, excellent durability and a wide range of applications. CONSTITUTION:A gyro rotor 20 is supported without contact against a gyro case 21 by electrostatic bearing power, and is driven into spinning motion about an axis of spinning along the Z-axis by a rotor driving system. The gyro rotor 20 is disc-shaped and comprises thin films of metal serving as electrodes 29-1 to 29-4 on both sides of a plate made preferably of an insulating material. The gyroscope has a constraining control system that constrains the displacement of the gyro rotor 20 in the direction of the Z-axis (direction of the axis of spinning) relative to the gyro case 21 and a center-position control system that constrains the displacement of the gyro rotor 20 in the directions of the X-and Y-axes.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an acceleration detecting gyro device suitable for use in a moving body such as an automobile, a ship and an aircraft, for detecting an angular velocity or an angular change and acceleration with respect to an inertial space. More specifically, the present invention relates to an extremely small acceleration detection type gyro device of a type in which a gyro rotor is floatingly supported by electrostatic supporting force.

[0002]

2. Description of the Related Art FIG. 11 shows an example of a conventional gyro device. This gyro device is called an electrostatic gyro, and has a spherical gyro rotor 1 that is floatingly supported by electrostatic supporting force. The spin axis direction of the gyro rotor 1 is the Z axis as shown in the figure, and the two axes perpendicular to each other are the X axis and the Y axis, respectively.

The spherical gyro rotor 1 is housed in a spherical cavity inside the gyro case 2, and the cavity is maintained in vacuum. The gyro case 2 has a pair of electrodes 3 and 3 ′ arranged along the X-axis direction, a pair of electrodes 4 and 4 ′ arranged along the Y-axis direction, and arranged along the Z-axis direction. And a pair of electrodes 5 and 5 ', and an electrostatic support circuit (not shown) is connected to these electrodes.

The gyro rotor 1 is supported in non-contact with the gyro case 2 by the electrostatic force generated by the three pairs of electrodes. 90 along the equator of the gyro rotor 1 (the line where the gyro rotor intersects the XY plane)
Four coils 6-1, 6-2, 6- at angular intervals of °
3, 6-4 are arranged, and the gyro rotor 1 makes a rotational motion with the Z axis as the spin axis by the rotating magnetic field generated by the coil.

The equator of the gyro rotor 1 is marked with a (zig-zag) pattern 7 all around in the circumferential direction. Correspondingly, the gyro rotor 1 has 4 angular intervals of 90 ° along the equator of the gyro rotor 1. Two optical pickups 8-1, 8-2,
8-3 and 8-4 are arranged. When the gyro rotor 1 is rotationally displaced about the X axis, the Y axis, and the Z axis, the displacement of the corresponding pattern is detected by each optical pickup, and the angular displacement of the gyro rotor 1 is detected.

When operating this gyro device, first, the electrodes 3, 3 ', 4, 4',
A voltage is applied to 5, 5'to generate an electrostatic force, thereby supporting the gyro rotor 1 with respect to the gyro case 1 in a non-contact manner. Next, the four coils 6-1, 6-2,
An alternating voltage is applied to 6-3 and 6-4 to generate a rotating magnetic field. As a result, the gyro rotor 1 rotates at high speed with the Z axis as the spin axis. When the desired rotation speed is reached, the AC voltage is cut off, but the gyro rotor 1 continues to rotate by inertia during the subsequent use period. Since the gyro rotor 1 is supported in the cavity of the gyro case 1 maintained in a high vacuum in a non-contact manner, it continues to rotate for several months or longer.

Since no torque acts on the gyro rotor 1 from the outside, no matter what movement the gyro case 2 makes, the gyro rotor 1 will be operated according to the law of inertia.
The direction of the spin axis of is kept constant with respect to the inertial space.

Therefore, the gyro case 2 is installed by detecting the relative displacement of the zigzag pattern 7 provided on the equator of the gyro rotor 1 with respect to the gyro case 2 by the optical pickups 8-1 to 8-4. The angular displacement of the navigation body is detected with high accuracy.

[0009]

In the conventional gyro device, it was necessary to manufacture the gyro rotor 1 into a perfect spherical body. When the sphericity of the gyro rotor 1 is incomplete, the supporting force from the electrode has a torque component, and drift occurs when the posture angle changes. Therefore, it takes a lot of labor and time to process the spheres for manufacturing the gyro rotor 1, and the manufacturing cost is high.

The electrostatic support gyro is called a so-called integral gyro because its spin axis always indicates a fixed direction in the inertial space. This type of gyro has the drawback that when the main axis of the navigation body changes in angle with respect to the control axis of the gyro, it is not possible to directly detect the angular change or angular velocity of the main axis of the navigation body.

In view of the above problems, an object of the present invention is to provide a gyro device having a low manufacturing cost, a long life, excellent durability, and a wide range of applications.

[0012]

According to the present invention, as shown in FIGS. 1, 8 and 9, for example, a gyro rotor that rotates at high speed around a spin axis and a gyro rotor are supported in a non-contact manner by electrostatic supporting force. In the acceleration detection type gyro device having a gyro case that accommodates the gyro rotor, the gyro rotor is formed in a disc shape, and has electrode portions on both surfaces along a circumferential direction, and Four pairs of electrostatic electrodes, which correspond to the electrode portions on both sides of the gyro rotor and are spaced apart from each other, are arranged at an angular interval of 90 ° in the circumferential direction, and the central axis of the gyro case. A displacement detection device for detecting the displacement of the gyro rotor with respect to the two gyro cases that are orthogonal to each other and orthogonal to each other, and the gyro rotor is surrounded by the spin axis. Constraint control for restraining displacement of the gyro rotor in a direction along the central axis, including a rotor drive system for rotating at high speed, the four pairs of electrostatic electrodes, and electrode portions of the gyro rotor. A center position control system for controlling the gyro rotor so as to match the center axis with the system, the four pairs of electrostatic electrodes, and the displacement detection device.

According to the present invention, in the gyro device,
The rotor drive system corresponds to the electrode portions on both sides of the gyro rotor and the electrode portions on both sides of the gyro rotor, respectively, and is spaced from the electrode portions on both sides of the gyro case at 90 ° angular intervals in the circumferential direction. It is characterized by including four pairs of coils arranged.

According to the present invention, in the gyro device,
When the gyro rotor is displaced along the central axis with respect to the gyro case with respect to the gyro case, the restraint control system uses an electrostatic force caused by a change in a gap between the electrode portion of the gyro rotor and the four pairs of electrostatic electrodes. The gyro rotor is configured to generate a force that reduces the deviation of the gyro rotor.

According to the present invention, in the gyro device,
The inner diameter and the outer diameter of the electrostatic electrode are larger than the inner diameter and the outer diameter of the electrode portion of the gyro rotor, whereby the electrostatic electrode is arranged so as to be offset radially outward with respect to the electrode portion of the gyro rotor, Alternatively, the inner and outer diameters of the electrostatic electrode are smaller than the inner and outer diameters of the electrode portion of the gyro rotor, whereby the electrostatic electrode is arranged so as to be radially inwardly displaced with respect to the electrode portion of the gyro rotor. , Whereby the central position control system produces a force for aligning the gyro rotor with the central axis.

According to the present invention, in the gyro device,
The gyro rotor is characterized by including a disk-shaped member made of an insulating material and metal thin film electrode parts mounted on the upper and lower surfaces thereof.

According to the present invention, in the gyro device,
The electrode portion of the gyro rotor is characterized in that it is formed by a thin film forming technique such as vapor deposition, ion plating, and photofabrication.

According to the present invention, in the gyro device,
The electrode portion on each surface of the gyro rotor includes a plurality of concentrically arranged annular portions and a connecting portion that electrically connects the annular portions.

According to the present invention, in the gyro device,
The electrode portion on the lower surface corresponding to the electrode portion on the upper surface of the gyro rotor is electrically connected by a connecting portion.

According to the present invention, in the gyro device,
The electrostatic electrode includes a plurality of concentrically arranged annular parts and a connecting part for electrically connecting the annular parts, each of the annular parts of the electrostatic electrode being an annular part of an electrode part of the gyro rotor. Is arranged corresponding to each of the above.

According to the present invention, in the gyro device,
The gyro case is characterized in that it has a stopper that surrounds the outer circumference of the gyro rotor and is spaced apart from the outer circumference of the gyro rotor to limit the radial displacement of the gyro rotor.

According to the present invention, in the gyro device,
The stopper is formed as a plurality of protrusions protruding in the radial direction from an annular spacer.

According to the present invention, in the gyro device,
The annular spacer and the stopper include the same insulating material as the gyro rotor and metal thin films formed on both surfaces thereof by a thin film forming technique.

According to the present invention, in the gyro device,
The annular spacer and the stopper are configured to have the same thickness as the gyro rotor.

According to the present invention, in the gyro device,
The gyro rotor is made of a conductive material, and the electrode portion of the gyro rotor includes a plurality of annular electrode portions divided by a circumferential dividing line.

According to the present invention, in the gyro device,
The gyro rotor is characterized by being made of single crystal silicon.

According to the present invention, in the gyro device,
The electrostatic electrode includes a plurality of concentrically arranged annular parts and a connecting part for electrically connecting the annular parts, each of the annular parts of the electrostatic electrode being an annular part of an electrode part of the gyro rotor. Is arranged corresponding to each of the above.

According to the present invention, in the gyro device,
As shown in FIG. 1, the displacement detecting device includes a hole formed at a central position of the gyro rotor, and a light emitting element and a light receiving element arranged on both sides of the hole corresponding to the hole at corresponding positions of the gyro case. It is characterized by having.

According to the present invention, in the gyro device,
The electrostatic electrode is arranged on the inner surface of the gyro case.

According to the present invention, in a method for manufacturing a gyro device including a thin disk-shaped gyro rotor and a gyro case accommodating the gyro rotor, a thin metal film is formed on both surfaces of a thin plate material made of an insulating material by a thin film forming technique. The method includes producing an electrode and cutting the plate material into a circular shape to manufacture a gyro rotor.

According to the present invention, in the method for manufacturing a gyro device, an annular spacer of a metal thin film and a plurality of stoppers protruding inward in the radial direction from the spacer are formed on both surfaces of the plate material by a thin film forming technique. Forming a stopper so as to surround the electrode and spaced apart from the electrode; and cutting out the spacer and the stopper portion from the plate material to manufacture the spacer and the stopper as an integral member.

According to the present invention, in the method of manufacturing a gyro device, the gyro rotor can be arranged such that the intervals between the respective tips of the stoppers and the outer peripheral portion of the gyro rotor are the same. And arranging the spacer between an upper bottom member and a lower bottom member forming the gyro case.

[0033]

The gyro rotor 20 is supported by the electrostatic support force in a non-contact manner with respect to the gyro case 21, and the rotor drive system makes a spin motion around the spin axis along the Z axis. The gyro device has a restraint control system that restrains displacement of the gyro rotor 20 in the Z-axis direction (spin axis direction) with respect to the gyro case 21, and a center position control system that restrains displacement of the gyro rotor 20 in the XY axis directions.

The restraint control system is constituted by a resonance circuit composed of electrode portions on both surfaces of the gyro rotor 20, four pairs of electrostatic supporting electrodes arranged corresponding thereto, and four transformers. When the gyro rotor 20 is biased with respect to the gyro case 21 along the central axis, the gap between the electrode portion of the gyro rotor 20 and the four pairs of electrostatic electrodes changes. For example, the upper gap decreases and the lower gap increases. Such a change in the gap changes the electrostatic force as a change in the capacitance of the capacitor, and moves the gyro rotor 20 along the central axis in the direction of reducing the deviation of the gyro rotor 20.

The center position control system has a displacement detecting device for detecting the displacement of the gyro rotor 20 in the X-axis and Y-axis directions, and the displacement detecting device detects the displacement signal and applies it to the electrostatic supporting electrode. The applied voltage is changed.
Thereby, the electrostatic force in the X-axis and Y-axis directions is changed, and the displacement of the gyro rotor 20 in the X-axis and Y-axis directions is controlled to be zero. The electrode portions of the gyro rotor 20 are arranged so as to be offset radially outward or radially inwardly from the corresponding four pairs of electrostatic support electrodes, so that the gyro rotor 20 is aligned so as to be aligned with the central axis. The electrostatic force acting along the axial or Y-axis direction increases.

According to the gyro device of the present invention, the voltage values applied to the four pairs of electrostatic support electrodes are divided and subjected to an increase / decrease operation, whereby the angular velocities around the X axis and the Y axis and the X axis, Y
Accelerations in the axial and Z-axis directions are determined.

According to the gyro device of the present invention, since the gyro rotor 20 is formed in a disk shape, it can be manufactured by processing single crystal silicon (silicon) using a lithography technique.

According to the gyro device of the present invention, since the gyro rotor 20 is formed in a disk shape, the gyro rotor 20 is formed by forming metal thin film electrodes on both sides of a plate material made of an insulating material by a thin film forming technique. It can be manufactured.

Further, according to the gyro device of the present invention, since the gyro rotor 20 is formed in a disk shape, the gyro rotor 20 has metal thin film electrodes on both surfaces of a plate material made of a transparent insulating material by a thin film forming technique. By forming the electrodes, the electrodes on both surfaces can be manufactured with high accuracy and concentrically.

[0040]

Embodiments of the present invention will be described below with reference to FIGS. FIG. 1 shows a first example of a gyro device according to the present invention, which has a disk-shaped gyro rotor 20 and a gyro case 21 that houses the gyro rotor 20 therein.

Here, XYZ coordinates are set for the gyro device as shown in the figure. The Z axis is taken upward along the central axis of the gyro device, and the X axis and the Y axis are taken perpendicularly thereto. The spin axis of the gyro rotor 20 is arranged along the Z axis.

The gyro case 21 has an upper bottom member 22, a lower bottom member 24, and an annular spacer 23 connecting them, and the upper bottom member 22, the spacer 23, and the lower bottom member 24.
May be connected by any suitable fastening means, for example machine screw 25. Thus, the disk-shaped cavity portion 26 for housing the gyro rotor 20 is provided inside the gyro case 21.
Is formed.

As shown in FIG. 1A, the upper bottom member 22 and the lower bottom member 24 have holes 22A, 22 communicating with the cavity 26.
A'is formed, and the hole 22A of the upper bottom member 22 is loaded with a cap 32. The cap 32 holds the cavity 26 at a high vacuum level for a long period of time, and thus the getter member 3 is formed.
Built-in 3. A pipe 34 is connected to the hole 22A ′ of the lower bottom member 24, and the hollow portion 26 is evacuated and evacuated through the pipe 34.

The gyro rotor 20 is formed of a conductive material, and as shown in FIG. 1A, preferably has a thin central portion 20B and an outer thicker annular electrode portion 20C.
May be configured to have A through hole 20A is formed in the central portion 20B along the central axis.

The gyro rotor 20 of this example may be formed of, for example, single crystal silicon (silicon). By forming the gyro rotor 20 with a single crystal material, it is possible to provide a highly accurate gyro rotor that is less affected by thermal strain and aging. Gyro rotor 20 of this example
Can be mass-produced inexpensively with high accuracy by, for example, lithography technology. Further, the upper bottom member 22, the spacer 23, the lower bottom member 24, etc. can be mass-produced inexpensively by the lithography technique.

The gyro device has a displacement detection device for detecting the displacement of the gyro rotor 20 with respect to the gyro case 21, and the displacement detection device detects the displacement of the gyro rotor 20 in the radial direction. Such a displacement detecting device is, for example, as shown in FIG. 1A, a gyro case 2
It may include a light emitting element 27 and a light receiving element 28 which are respectively arranged on the upper surface and the lower surface inside the one hollow portion 26. The light receiving element 28 is preferably, as shown in FIG. 1B,
Four segments 28-1, 28-2, 28-3, 28
-4 may be divided.

The light emitting element 27 and the light receiving element 28 are arranged on both sides of the hole 20A of the gyro rotor 20 so that the optical path thereof passes. When the gyro rotor 20 is displaced in the radial direction, the position of the hole 20A is displaced with respect to the optical path, so that the amount of light received by the light receiving element 28 among the light generated by the light emitting element 27 changes. In this way, the magnitude and direction of the radial displacement of the gyro rotor 20 are obtained by the four light receiving element segments.

Electrostatic support electrodes 29-1 to 29-4 and rotor rotation driving coils 30-1 to 30-4 are concentrically arranged on the inner surface of the upper bottom member 22, and similarly the lower bottom portion is arranged. Electrostatic support electrodes 29'-1 to 29'-1 are concentrically provided on the inner surface of the material 24.
29'-4 and coils 30'-1 to 30 'for rotating the rotor.
0'-4 is arranged. Such an electrostatic supporting electrode 29-
1 to 29-4, 29'-1 to 29'-4 and rotor rotation driving coils 30-1 to 30-4, 30'-1 to 30 '
-4 is arranged corresponding to the electrode portion 20C of the gyro rotor 20 and spaced from it. The positional relationship between the electrostatic supporting electrodes 29-1 to 29-4, 29'-1 to 29'-4 and the electrode portion 20C of the gyro rotor 20 will be described in detail later.

As shown in FIG. 1B, for example, the first pair of electrostatic supporting electrodes 29-1, 29'-1 and the third pair of electrostatic supporting electrodes 29-3, 29'-3 are arranged on the X-axis. And the second pair of electrostatic support electrodes 29-2, 29'-2 and the fourth pair of electrostatic support electrodes 29-4, 29'-4 are arranged along the Y-axis. . Electrostatic support electrodes 29-1 to 29-4,
29'-1 to 29'-4 are coils 3 for rotor rotation drive.
It may be arranged between 0-1 to 30-4 and 30'-1 to 30'-4. Electrostatic support electrodes 29-1 to 29-4 and 2
9'-1 to 29'-4 are preferably fan-shaped as shown.

2 and 3, the structure and operation of the restraint control system, the rotor drive system 100, and the center position control system provided in the gyro device of this embodiment will be described. The constraint control system functions to constrain the displacement of the gyro rotor 20 in the Z-axis direction, the rotor drive system 100 functions to rotate the gyro rotor 20 around the spin axis, and the center position control system functions to control the gyro rotor 20. It functions to restrain the displacement in the XY axis directions.

First, the configuration and operation of the restraint control system provided in the gyro device of this embodiment will be described with reference to FIGS.
The restraint control system of this example is an electrostatic system, and the gyro rotor 2
The gyro rotor 20 is floatingly supported and constrained by the electrostatic force generated between 0 and the electrostatic support electrode.

The restraint control system of this example is based on the gyro rotor 20.
Electrode portion 20C (P in FIG. 2)₁, P ₃Part) and Jai
Four pairs of electrostatic support electrodes 2 provided on both sides of the rotor 20
9-1, 29'-1, 29-2, 29'-2, 29-
3, 29'-3, 29-4, 29'-4 (29 in FIG. 2)
-1, 29'-1, 29-3, 29'-3 only)
Four transformers connected to each of such electrostatic support electrodes
41, 42, 43, 44 (only 41 and 43 are shown in FIG. 2
2) and, as shown in FIG. 3, an X control system 50 and a Y control system.
60 and.

Of the electrode portion 20C of the gyro rotor 20, the portion corresponding to the first pair of electrostatic supporting electrodes 29-1 and 29'-1 is designated as the first portion P ₁ and the second pair of electrostatic electrodes is designated. a portion corresponding to the supporting electrode 29-2,29'-2 and a second portion P _2, a third pair of electrostatic supporting electrodes 29-3,29'-
The portion corresponding to 3 is the third portion P _3, and the portion corresponding to the fourth pair of electrostatic support electrodes 29-4 and 29′-4 is the fourth portion.
Part P ₄ .

The X control system 50 functions so as to always keep the displacements of the first and third parts P ₁ and P ₃ of the electrode portion 20C of the gyro rotor 20 in the Z axis direction at zero, and the Y control system 60.
Serves to always keep the displacements of the second and fourth portions P ₂ and P ₄ of the electrode portion 20C of the gyro rotor 20 in the Z-axis direction at zero.

As shown in FIG. 3, the X control system 50 includes an AC power supply 50-1 for supplying an AC voltage V _T and a V _TX calculation section 50-.
2 and two multipliers 50-3 and 50-4. V _TX
The calculation unit 50-2 inputs a signal indicating the displacement Δx of the gyro rotor 20 in the X-axis direction, which is supplied from the light receiving element 28 of the displacement detection device, and the coefficient 1 ± K ₁ Δx (K ₁ is a constant). Calculate One end of the AC power supply 50-1 is grounded and the other end is connected to the two multipliers 50-3 and 50-4. Thus, from the two multipliers 50-3, 50-4, the AC voltage V _T modified by the coefficient 1 ± K ₁ Δx
(1 ± K ₁ Δx) is output.

As shown in FIG. 2, the output terminals of the two multipliers 50-3 and 50-4 of the X control system 50 are connected to the midpoints T1 and T4 of the first and third transformers 41 and 43, respectively. Has been done. The output terminals T2 and T3 of the first transformer 41 are connected to the electrostatic supporting electrodes 29-1 and 29'-1, respectively,
The output terminals T5 and T6 of the third transformer 43 are connected to the electrostatic support electrodes 29-3 and 29′-3, respectively.

[0057] AC power source 50-1 of X control system 50 (the frequency is f _o.) And two transformers 41 and 43 (the inductance of the transformers and L.) And two pairs of electrostatic supporting electrode and the gyro A resonance circuit is formed by a capacitor (electrostatic capacitance is C) formed by the electrode portion 20C of the rotor 20, and the resonance frequency f _a [= ½π√ (LC)] of the resonance circuit is It is set to a frequency f _o less than the value.

Next, the operation of the restraint control system of the gyro device of this example will be described with reference to FIG. FIG. 4 shows the first transformer 4
1 and electrostatic support electrodes 29-1 and 29'- connected to it
2 is a graph of a resonance curve showing the operation of a resonance system including 1 and 1, wherein the vertical axis represents the electrode voltage V _T of one electrode, for example, the electrostatic support electrode 29-1 arranged above the gyro rotor 20, and the horizontal axis. Is the frequency ratio (f _O / f _a ). here,
f _O is the frequency of the AC power supply 50-1 as described above,
f _a is the resonance frequency of the resonance circuit f _a [= 1 / 2π√ (L
C)]. For simplification, the V _TX calculation unit 50-2
The coefficient output to the two multipliers 50-3 and 50-4 is (1 ± K ₁ Δx) = 1.

First of the electrode portion 20C of the gyro rotor 20
Part of P₁Consider the case where is displaced upward. Such a
Part P of 1₁And the electrostatic supporting electrode 29 disposed on the upper side thereof
The distance between -1 and -1 decreases, and the capacitance C between them increases.
To do. Therefore, the resonance frequency f _a[= 1 / 2π√ (L
C)] decreases and the frequency ratio (f_O/ F_a) Increases.
As a result, as shown in the figure, the electrode of the electrostatic supporting electrode 29-1 is
Voltage V_TIs the operating voltage V_TOIt gets smaller. Thus, on
Side electrostatic support electrode 29-1 and the first of the gyro rotor 20
Part P₁The attractive force acting between and becomes smaller.

The relationship between the first portion P ₁ of the gyro rotor 20 and the electrostatic support electrode 29'-1 located below it is just the opposite. The distance between the first portion P ₁ and the electrostatic support electrode 29′-1 arranged below the first portion P ₁ increases, and the electrostatic capacitance C between them increases. Therefore, the resonance frequency f _a [= ½π√ (LC)] increases and the frequency ratio (f _O / f _a ) decreases. As a result, the electrostatic support electrode 2
The electrode voltage V _T of 9′-1 becomes higher than the operating voltage V _TO . Thus, the attractive force acting between the lower electrostatic support electrode 29′-1 and the first portion P ₁ of the gyro rotor 20 becomes large.

In this way, when the first portion P ₁ of the gyro rotor 20 is displaced upward, the force for biasing the first portion P ₁ upward becomes small and the force for biasing it downward becomes large. The portion P _{1 of} is moved relatively downward so as to be returned to its original position.

According to the restraint control system of this example, the AC power source 50
-1, the transformer 41, and the first pair of electrostatic support electrodes 29-
The gyro rotor 2 is provided by the system including 1, 29'-1.
The displacement of the first portion P ₁ of the zero electrode portion 20C in the Z-axis direction is always maintained at zero. The force Fp1 that the first portion P ₁ of the gyro rotor 20 receives from the gyro case 21 corresponds to the difference between the voltages A ₁ and B ₁ applied to the electrostatic support electrodes 29-1 and 29′-1 on both sides. . Therefore, the first equation of the following equation 1 is established. K is a constant.

[0063]

[Number 1] _{Fp1 = K (A 1 -B 1} ) Fp2 = K (A 2 -B 2) Fp3 = K (A 3 -B 3) Fp4 = K (A 4 -B 4)

Third part of the electrode portion 20C of the gyro rotor 20
The same applies to the operation of the portion P _{3 and} the operations of the second and fourth portions P ₂ and P ₄ . Therefore, the second to fourth equations of the equation 1 are established.

Next, the structure and operation of the rotor drive system 100 of this example will be described. The rotor drive system 100 includes a gyro rotor 20, a driving AC power supply 101, and four pairs of coils (lower coils 30′-1, 30′- in FIG. 2) connected thereto.
2, 30'-3, 30'-4 only are shown). Two
The basic phase V ₀ of the phase alternating voltage is connected to the two coils 30'-1 and 30'-3 connected in series, and the 90 ° phase V ₉₀ of the two phase alternating voltage is the two coils 30 connected in series. '-
2, 30'-4.

Four pairs of coils 30-1, 30'-1, 30
-2, 30'-2, 30-3, 30'-3, 30-4,
When an alternating voltage is applied to 30′-4 from the driving AC power supply 101, a rotating magnetic field proportional to the frequency of the driving AC power supply 101 is generated in the cavity portion 26 of the gyro case 21, and the magnetic field and the gyro rotor 20 are generated. The gyro rotor 20 rotates due to the interaction with the eddy current generated therein.

Next, the structure and operation of the center position control system of the gyro device of the present invention will be described. The center position control system includes the electrode portion 20C of the gyro rotor 20 and the electrostatic support electrodes 29-1 and 29-2.
9-4, 29'-1 to 29'-4, a displacement detecting device including a light emitting element 27 and a light receiving element 28, and X and Y control systems 50, 60 for inputting output signals of the displacement detecting device. Even when the gyro rotor 20 is deviated in the X-axis and Y-axis directions, the center position control system controls the position of the gyro rotor 20 in the X-axis and Y-axis directions so that the spin axis aligns with the center axis of the gyro device, that is, the Z-axis. Is controlled.

First, the electrode portion 20C of the gyro rotor 20 and the electrostatic supporting electrodes 29-1 to 29-4, 29'-1 to 29'-.
The positional relationship with the No. 4 will be described. The electrode portion 20C of the gyro rotor 20 has electrostatic support electrodes 29-1 to 29-4, 2
9'-1 to 29'-4 are arranged concentrically with each other, but at the same time, are arranged radially inward or outward.

As shown in FIGS. 1 and 2, the electrode portion 20C of the gyro rotor 20 has electrostatic supporting electrodes 29-1 to 29-.
A case will be described in which they are arranged so as to be offset inward in the radial direction with respect to 4, 29'-1 to 29'-4. As shown, the electrostatic support electrodes 29-1 to 29-4 and 29'-1 to
The outer diameter of 29'-4 is the electrode portion 20C of the gyro rotor 20.
Is formed larger than the outer diameter of the gyro rotor 20, and the electrostatic supporting electrode is projected outward in the radial direction by a length δ ₂ from the gyro rotor 20.

Further, electrostatic supporting electrodes 29-1 to 29-4,
The inner diameters of 29'-1 to 29'-4 are formed to be larger than the inner diameter of the electrode portion 20C of the gyro rotor 20, so that the electrode portion 20C of the gyro rotor 20 is radially inward by the length δ _{1 by the} electrostatic supporting electrode 29-1. ~ 29-4, 29'-1 to 29'-4
It is configured to project more.

Thus, the electrode portion 20 of the gyro rotor 20 is
C is the electrostatic support electrodes 29-1 to 29-4, 29'-1 and 2
9'-4, the gyro rotor 20 is arranged so as to be radially inwardly offset by the first pair of electrostatic supporting electrodes 29-1, 29'-1 in the radial outward (X
Force Fx1 acts in the positive direction of the axis), and force Fx3 acts radially outward (in the negative direction of the X axis) by the third pair of electrostatic support electrodes 29-3, 29'-3. To do. These forces Fx1 and Fx3 change depending on the magnitude of the AC voltage applied to the midpoints T1 and T4 of the transformers 41 and 43, respectively. If the alternating voltages are equal, the two forces Fx1 and Fx3 are equally balanced.

Acceleration α in the X-axis direction is applied to the gyro rotor 20.
_X acts and the gyro rotor 20 moves the gyro case 2
It is assumed that the displacement is Δx in the positive direction of the X axis with respect to 1. The displacement Δx is output as a voltage signal by the light receiving element 28. Such a signal is supplied to the V _TX calculation unit 50-2 of the X control system 50, and a signal indicating the coefficient 1 ± K ₁ Δx is generated. Thus, the two multipliers 50-3, 5
Different voltage signals (1-K ₁ Δx) from 0-4
V _T , (1 + K ₁ Δx) V _T is generated.

The voltage signal (1 ± K ₁ Δx) V _T is applied to the midpoints T1 and T4 of the two transformers 41 and 43, respectively, and the electrostatic support electrodes 29-1 and 29'- of the first pair are applied. The force Fx1 is generated by 1 and the third pair of electrostatic support electrodes 2
A force Fx3 is generated by 9-3 and 29'-3. Force Fx1 acting on the gyro rotor 20 in the positive direction of the X axis
And the force Fx3 in the negative direction of the X axis are expressed by the following equations (2).

[0074]

Fx1 = k ₁ (1-K ₁ Δx) V _T Fx3 = k ₁ (1 + K ₁ Δx) V _T

K ₁ is a constant. The resultant force of the X-axis direction acting on the gyro rotor 20 is

[0076]

[Number 3] _{Fx1-Fx3 = -2k 1 K 1} V T · Δx

It becomes

In this way, the gyro rotor 20 is pulled in the negative direction of the X axis by the force proportional to the displacement Δx as expressed by the equation (3), and the displacement becomes zero. The same applies when the gyro rotor 20 is biased in the Y-axis direction. In this way, the center position control system of this example keeps the displacement amounts Δx and Δy always zero even when the gyro rotor 20 is deviated in the X-axis and Y-axis directions. That is, the spin axis of the gyro rotor 20 is always controlled so as to be aligned with the central axis of the gyro device, that is, the Z axis.

Referring to FIGS. 1 and 2, the gyro rotor 2
The electrode part 20C of 0 is the electrostatic supporting electrodes 29-1 to 29-
4 and 29′-1 to 29′-4, the case where the electrostatic support electrodes 29-1 to 29-4 and 29′-1 to 29 are arranged so as to be offset inward in the radial direction has been described. The same applies to the case of being arranged outwardly in the radial direction with respect to '-4. However, in that case, the directions of the forces Fx1 and Fx3 acting on the gyro rotor 20 are opposite.

The configuration and operation of the gyro operation unit and the acceleration operation unit of this example will be described with reference to FIGS. The gyro operation unit calculates the angular velocity dφ _X / dt around the X axis X
The acceleration calculation unit includes a gyro calculation unit 51 and a Y gyro calculation unit 61 that calculates an angular velocity dφ _Y / dt about the Y axis.
It has a Y acceleration calculation unit 63 that calculates the acceleration in the axial direction and a Z acceleration calculation unit 73 that calculates the acceleration in the Z axis direction.

The configuration and operation of the X gyro calculator 51 and the X acceleration calculator 53 will be described with reference to FIG. The X gyro calculator 51 includes four voltage dividers 51-1 as shown in the figure.
˜51-4 and four rectifying sections 51-5 to 51-8 connected to each of the voltage dividing sections and two pairs of rectifying sections 51-5 and 5-5.
1-6 and 51-7, 51-8, and two subtraction sections 51-9, 51-10 connected to the third subtraction section 51-11 and arithmetic section 51- connected to these two subtraction sections. 12 and.

The X gyro calculator 51 has an input terminal 51a,
Two transformers 4 via 51b, 51c and 51d
The terminal outputs A ₁ , B ₁ and A ₃ , B ₃ of the output terminals T2, T3 and T5, T6 of ₁ , 43 are input. Since the terminal outputs A ₁ , B ₁ and A ₃ , B ₃ of the output terminals T2, T3 and T5, T6 of the two transformers 41, 43 are usually high voltages of 1000 V or more, each of these voltages is divided by four. Part 5
The voltage is divided into low voltages by 1-1 to 51-4, and is rectified into a DC voltage by the four rectifying units 51-5 to 51-8. Such a DC voltage signal is subtracted from the subtraction units 51-9, 51-10, 51.
Subtraction is performed at -11. Thus, the calculation unit 51-1
A gyro signal indicating the rotational angular velocity dφ _X / dt of the gyro rotor 20 about the X axis is obtained from the output terminal of 2.

Next, the operation of the X gyro calculator 51 will be described in detail.
Explained. Angular velocity dφ around X axis _X/ Dt is entered
Think about the case. The spin motion of the gyro rotor 20
The angular motion vector H
Take in the direction. According to the law of inertia, the gyro rotor 20
The pin axis tends to continue to be placed along the Z axis direction.
On the other hand, the gyro case 21 has an angular velocity dφ about the X axis._X/
When rotationally displaced at dt, the second pair of electrostatic support electrodes 29-
2, 29'-2 and a fourth pair of electrostatic support electrodes 29-4,
29'-4, the second and the second gyro rotor 20
Part P of 4₂, P_FourAnd the gap between the upper electrode and the lower electrode
There is a difference in the gap between them. The difference between the upper and lower gaps is Y
It becomes zero by the operation of the control system 60. At this time,
The second and fourth parts P of the gyro rotor 20₂,
P_FourAnd two opposite forces Fp2 along the Z-axis
Fp4 acts, which causes
Luk T_XOccurs.

[0084]

## EQU4 ## T _X = (Fp2-Fp4) × r

Here, r is the distance from the spin axis to the point of action of force.

The torque T _X causes the spin axis of the gyro rotor 20 to perform precession motion around the Y axis at a small angle. By such precession movement, the electrostatic support electrodes 29-1, 29'-1 of the first pair and the electrostatic support electrodes 29-3, 29'-3 of the third pair and the first and second electrostatic support electrodes 29-1, 29'-3 of the gyro rotor 20 are formed. The gap between the _third parts P ₁ , P ₃ changes. That is, there is a difference between the upper gap and the lower gap.

Similarly, the operation of the X control system 50 controls such that the difference between the upper gap and the lower gap becomes zero. At this time, as described above, the gyro rotor 20
Two opposite forces Fp1 and Fp3 act on the first and third parts P ₁ and P _{3 of the} , respectively, whereby a torque T _Y represented by the following equation is generated.

[0088]

## EQU5 ## T _Y = (Fp1-Fp3) × r

Such torque T_YBy gyro rotor
The spin axis of 20 is preset at a small angle around the X axis.
Exercise. Such precession movement is the input angular velocity
dφ _XSame motion as / dt, resulting in spin axis
The wire and the gyro case 21 are integrated into an angular velocity around the X axis.
Degree dφ_XRotate at / dt.

By formulating the equation of angular motion from the equations of the equations 4 and 5, and using the equation of the equation 1, the following equation is obtained.

[0091]

## EQU6 ## H (dφ _X / dt) = (Fp3−Fp1) × r = [(A ₃ −B ₃ ) − (A ₁ −B ₁ )] × r × K H (dφ _Y / dt) = ( fp4-Fp2) × r = _{[(A 4 -B 4) - (} A 2 -B 2) ] × r × K

Here, H is the angular momentum of the gyro rotor 20. Therefore,

[0093]

## EQU7 ## dφ _X / dt = [(A ₃ -B ₃ )-(A ₁ -B
₁ )] × Kr / H dφ _Y / dt = [(A ₄ −B ₄ ) − (A ₂ −B ₂ )] ×
Kr / H

Thus, the X gyro operation unit 51 and the Y gyro operation unit 53 input the terminal outputs A ₁ , B ₁ , A ₂ , B ₂ , A ₃ , B ₃ , A ₄ , B ₄ of the _four transformers. And outputs an X gyro signal dφ _X / dt and a Y gyro signal dφ _Y / dt.

Next, the structure and operation of the X acceleration calculator 53 will be explained.
Reveal The X acceleration calculation unit 53 is the X gyro calculation unit 51.
Output signals of the first pair of rectifying units 51-5 and 51-6
a₁, B ₁Of the second pair and the adder 53-1 for inputting
Output signal a of the rectifying units 51-7 and 51-8₃, B₃Enter
Connected to the adding unit 53-2 and the two adding units
And a subtraction unit 53-3.

The addition unit 53-1 and 53-2 causes X di
Sum a of internal outputs of the gyro operation unit 51 ₁+ B₁, A₃+ B
₃Is required. Such sum is the voltage applied to each electrode.
Sum A ₁+ B₁, A₃+ B₃It corresponds to. According to
The outputs of the adders 53-1 and 53-2 are the X-axis, respectively.
It corresponds to directional forces Fx1 and Fx3.

The subtractor 53-3 adds the adders 53-1 and 5-3.
Output 3-2₁+ B₁, A₃+ B ₃Difference of (a₁+
b₁)-(A₃+ B₃) Is required. The difference is (A
₁+ B₁)-(A₃+ B₃) Is supported. Therefore,
The output of the subtraction unit 53-3 is the force Fx1 and X in the positive direction of the X axis.
It corresponds to the difference from the force Fx3 in the negative direction of the shaft.

Thus, the subtraction section 53-3 outputs a signal indicating the displacement Δx represented by the equation (3),
From this, the acceleration α _X is obtained.

Since the configurations and operations of the Y gyro computing unit 61 and the Y acceleration computing unit 63 are the same, the description thereof will be omitted.

Structure of Z acceleration calculation unit 73 with reference to FIG.
And the operation will be described. Z acceleration calculation unit 73 performs X gyro
Internal signal a of the calculation unit 51₁, B₁And a₃, B₃And Y Ja
Internal signal a of the white arithmetic unit 61₂, B₂And a_Four, B_FourTo
Input and acceleration in Z-axis direction α _ZIs calculated.

Next, the operation of the Z acceleration calculator 73 will be described.
It In the above description, the mass of the gyro rotor 20 is set to zero.
Was calculated as, but is not really zero. Gyrolo
The mass of the data 20 is m, and this is divided into four parts.
Think Acceleration α in the Z-axis direction _ZWould work,
First and third parts P of the gyro rotor 20₁, P₃Made by
Forces Fp1 and Fp3 to be applied are calculated by the following formula 8
Is represented.

[0102]

Equation 8] _{Fp1 = mα Z / 4- (H} / r) (dφ X / dt) Fp3 = mα Z / 4 + (H / r) (dφ X / dt)

The sum of these two equations can be calculated to obtain the acceleration α _Z in the Z-axis direction.

[0104]

Α _Z = (Fp1 + Fp3) × 2 / m = [(A ₃ −B ₃ ) + (A ₁ −B ₁ )] × 2 K / m

The acceleration α _Z in the Z-axis direction is the force F acting on the second and fourth portions P ₂ and P ₄ of the gyro rotor 20.
It can also be determined by p2 and Fp4. Therefore,
In the Z acceleration calculation unit 73 of this example, four forces Fp1, Fp2, Fp3, F acting on each portion of the gyro rotor 20 are used.
The acceleration α _{Z in the} Z-axis direction is calculated from p4.

FIG. 8 shows a second embodiment of the gyro device of the present invention. In this example, the gyro rotor 20 is divided into a plurality of annular segments by dividing lines in the circumferential direction. A plurality of annular grooves 200a, 200b and 200a ', 20 are concentrically formed on the upper surface and the lower surface of the gyro rotor 20.
0b ′ is formed, and the annular groove and the concave portion of the central portion 20B form a protruding annular segment, that is, the annular electrode portion 20.
0A, 200B, 200C and 200A ', 200
B ', 200C' are formed.

In the gyro case 21, the first, second, third and fourth pairs of electrostatic support electrodes 29-1, 29'-1,
29-2, 29'-2, 29-3, 29'-3, 29-
4, 29'-4 are arranged. Such electrostatic support electrodes are preferably fan-shaped, each of which is divided into annular segments by a plurality of concentrically arranged annular notches. For example, the electrostatic support electrodes 29'-3 below the third pair of electrostatic support electrodes have two notches 29 '.
-3A, 29'-3B with three segments 29 '
-3a, 29'-3b, 29'-3c. Adjacent segments are connected parts 29'-3A1, 2
They are connected by 9'-3B1 so that each segment is electrically connected.

The annular electrode portion 200 of the gyro rotor 20
A, 200B, 200C and 200A ', 200B',
The annular segments of 200C 'and each electrostatic support electrode have radial dimensions corresponding to each other, and are arranged at radial positions corresponding to each other.

For example, the positional relationship between the electrode portion of the gyro rotor 20 and the electrostatic support electrodes 29-1 and 29'-1 of the first pair will be described. With respect to the first electrode portions 200A and 200A ′ of the gyro rotor 20, the first segment 29-1 of the electrostatic support electrodes 29-1 and 29′-1 of the first pair.
a and 29'-1a correspond to each other. Similarly, for the second electrode portions 200B and 200B ', the second segment 2
9-1b and 29′-1b correspond to the third electrode portion 200C and 200C ′ and the third segment 29.
-1c and 29'-1c correspond.

Similar to the above-mentioned first example, the electrode portions 200A, 200B, 200C and 20 of the gyro rotor 20 are respectively.
0A ', 200B', and 200C 'are arranged concentrically with respect to each corresponding segment of the electrostatic support electrode, but at the same time are arranged radially inward or outward.

For example, the first electrode portions 200A, 200A 'of the gyro rotor 20 are arranged radially inward with respect to the first segments 29-1a, 29'-1a of the first pair of electrostatic support electrodes, or The second electrode portions 200B and 200B 'are arranged so as to be offset outward, and the second electrode portions 200B and 200B' are arranged in the second segment 29-.
1b and 29'-1b are arranged so as to be biased inward or outward in the radial direction, and the third electrode portions 200C and 20C are provided.
0C 'is arranged so as to be offset radially inward or outward with respect to the third segments 29-1c, 29'-1c.

As shown in FIG. 8, the electrode portions 200A, 200B, 200C, 200A 'and 2 of the gyro rotor 20 are arranged.
The case where each of 00B ′ and 200C ′ is arranged radially inward of each of the corresponding segments of the electrostatic support electrodes of the first pair will be described. For example, gyro rotor 2
The inner diameters of the first electrode portions 200A, 200A ′ of 0 are smaller than the inner diameters of the corresponding first segments 29-1a, 29′-1a, and the outer diameters of the first electrode portions 200A, 200A ′ are the corresponding first portions. Is smaller than the outer diameter of the segments 29-1a and 29'-1a. Similarly, the second electrode portions 200B and 200B ′ of the gyro rotor 20 and the third electrode portion 200
Each of the inner diameters of C and 200C 'corresponds to the corresponding second segment 29-1b, 29'-1b and third segment 29.
-1c, 29'-1c smaller than the inner diameter of each of the second electrode portion 200B, 200B 'and the third electrode portion 200
Each of the outer diameters of C and 200C 'corresponds to the corresponding second segment 29-1b, 29'-1b and third segment 29.
-1c, 29'-1c smaller than each of the outer diameter.

Electrode portions 200A, 2 of the gyro rotor 20
00B, 200C, 200A ', 200B', 200
The same is true if each of C'is located radially outward of each of the corresponding segments of the first pair of electrostatic support electrodes. Further, the electrode portion of the gyro rotor 20 and the electrostatic support electrodes 29-2, 29 'of the second, third and fourth pairs.
The positional relationship between -2, 29-3, 29'-3, 29-4, and 29'-4 is also the same.

Thus, by arranging the electrode portions of the gyro rotor 20 inwardly or outwardly in the radial direction with respect to the segments of the electrostatic support electrodes of the first pair,
Due to the same operation as described with reference to the first example, the forces Fx1 and Fx3 acting on the gyro rotor 20 radially outward or inward are generated, and the magnitudes thereof increase.

Further, the gyro rotor 20 has a plurality of electrode portions 200A, 200B, 200C, 200A ', 200.
By providing B ', 200C' and correspondingly dividing the electrostatic support electrode into a plurality of segments, the storage between the gyro rotor 20 and the electrostatic support electrode when the gyro rotor 20 is displaced in the radial direction. rate of change of electrical energy (E = CV ^2/2) to be increases. The rate of change of such electrical energy increases substantially in proportion to the number of divided electrode parts and the number of segments. Therefore, by increasing the number of divisions, it is possible to increase the magnitude of the forces Fx1 and Fx3 that act radially outward on the gyro rotor 20.

A third example of the gyro device of the present invention will be described with reference to FIG. This example is a modification of the second example of the gyro device shown in FIG. According to this example, the gyro rotor 20 includes a disk-shaped member 20G made of an insulating material,
The electrode portion 20 is provided on the upper surface and the lower surface of the disc-shaped member 20G.
2A, 202B, 202C, 202D and 202A ',
202B ', 202C', 202D 'are attached.

Although any insulating material may be used for the disk-shaped member 20G, a transparent material such as quartz glass is preferably used. When a transparent insulating material is used for the disk-shaped member 20G, a window for displacement detection may be provided in the central electrode portions 202D and 202D ′ instead of providing the central hole 20A for displacement detection.

The electrode portion is formed by vapor deposition, ion plating,
It may be produced by any desired thin film production technique such as photofabrication. Further, such an electrode portion is made of titanium,
It may be composed of a thin film made of a metal such as aluminum.

The outer diameter of the gyro rotor 20 is, for example, 5
It may be less than or equal to mm and its thickness may be less than or equal to 0.1 mm. The metal thin film electrode portion may have a thickness of 1 μm or less. The mass of the gyro rotor 20 may be, for example, 10 milligrams or less.

As shown in the figure, the gyro case 21 is provided with a plurality of fan-shaped electrostatic support electrodes 29-1 to 29-4 and 29'-1 to 29'-4 above and below the gyro rotor 20. ing. Such electrostatic supporting electrodes 29-1 to 29-
4, 29'-1 to 29'-4 may be the same as the electrostatic supporting electrodes of the second example shown in FIG.

Preferably, each of the upper surface electrode portions 202A, 202B, 202C and 202D of the gyro rotor 20 has a corresponding lower surface electrode portion 202A ', 202B', 20.
It is electrically connected to each of 2C 'and 202D'. Thereby, the electrode portions 202A-202A ′, 202 of each pair are
B-202B ', 202C-202C', 202D-2
02D 'can be maintained at the same potential. As described below, all electrode portions on the upper surface and the lower surface of the gyro rotor 20 may be electrically connected.

FIG. 9B shows the electrode portion mounted on the lower surface of the gyro rotor 20. Such an electrode part includes three concentric annular electrode parts 202A ′, 202B ′, 202C ′ and one center electrode part 202D ′, and an annular non-electrode part 202a ′, 202b ′, 202c between adjacent electrode parts. 'Is formed. Three annular electrode parts 202A ′, 202
B'and 202C 'constitute a restraint control system and a center position control system.

The center electrode portion 202D 'is, as described above,
A rotor drive motor of the rotor drive system 100 is configured.
By generating an eddy current inside thereof, a torque for rotating the gyro rotor 20 is generated. The center electrode portion 202D 'may be circular as shown, or may be any suitable shape.

Two adjacent electrode portions 202A 'and 20
2B ', 202B' and 202C ', 202C' and 2
02D 'is a radial connecting portion 202 between the electrode portions.
It is connected by A'-1, 202B'-1, and 202C'-1. Thus, the electrode parts 202A ′, 202B ′, 202 mounted on the lower surface of the gyro rotor 20
C'and 202D 'are electrically connected.

The electrode portions 202A, 202B, 202C and 202D mounted on the upper surface of the gyro rotor 20 are electrode portions 202A ', 202B' and 202 mounted on the lower surface.
It has the same configuration as C ′ and 202D ′.

The electrode parts 202A, 202B, 202C and 202D mounted on the upper surface of the gyro rotor 20 are connected to the electrode parts 202A ', 202B' and 202D mounted on the lower surface.
It is electrically connected to C ′ and 202D ′. For example, the connecting portion 204 is formed on the inner surface of the central hole A of the gyro rotor 20 or the connecting portion 203 is formed on the outer circumferential surface of the gyro rotor 20.
A may be formed so that they are electrically conductive.

Next, the electrode portions 202A, 202B, 202C mounted on the upper surface of the gyro rotor 20 and the electrostatic supporting electrodes 29- disposed correspondingly to the gyro case 21-
1 to 29-4 and the electrode parts 202A ′, 202B ′, 20 mounted on the lower surface of the gyro rotor 20.
The positional relationship between 2C 'and the electrostatic support electrodes 29'-1 to 29'-4 arranged on the gyro case 21 corresponding thereto will be described.

The positional relationship between the electrostatic support electrode of the gyro case 21 and the electrode portion of the gyro rotor 20 is the same as that in the case of the second example shown in FIG. That is, the gyro rotor 2
0 electrode parts 202A, 202B, 202C and 202
A ', 202B', 202C 'and corresponding electrostatic supporting electrodes 29-1 to 29 arranged in the gyro case 21.
-4 and 29'-1 to 29'-4 have radial dimensions corresponding to each other and are arranged at radial positions corresponding to each other.

Electrode portions 202A, 2 of the gyro rotor 20
02B, 202C and 202A ', 202B', 202
C'is the electrostatic support electrode 29'-1 of the gyro case 21.
.About.29'-4 are arranged concentrically with respect to .about.29'-4, but at the same time, are arranged radially inward or outward.

For example, the electrode portion 20 of the gyro rotor 20
2A, 202B, 202C and 202A ', 202
The positional relationship between B ′ and 202C ′ and the first pair of electrostatic support electrodes will be described. First electrode part 20 of gyro rotor 20
2A and 202A 'correspond to the first segments 29-1a and 29'-1a of the first pair of electrostatic support electrodes. Similarly, for the second electrode portions 202B, 202B ', the second segment 29 of the first pair of electrostatic support electrodes is provided.
-1b and 29'-1b correspond to the third electrode portion 2
The second segment 29-1c, 29'-1c of the first pair of electrostatic support electrodes corresponds to 02C, 202C '.

As shown in FIG. 9, for example, the electrode parts 202A, 202B, 202 mounted on the gyro rotor 20 are mounted.
Each of C and 202A ', 202B', 202C 'will be described as being located radially inward of each corresponding segment of the first pair of electrostatic support electrodes.
First electrode portions 202A, 202 of the gyro rotor 20
The inner diameter of A'corresponds to the corresponding first segment 29-1a,
29'-1a smaller than the inner diameter of the first electrode portion 202
The outer diameter of A, 202A 'is smaller than the outer diameter of the corresponding first segment 29-1a, 29'-1a.

Similarly, the second electrode portions 202B and 202B 'and the third electrode portions 202C and 20C of the gyro rotor 20 are also included.
Each of the 2C ′ inner diameters has a corresponding second segment 29-1b, 29′-1b and third segment 29
-1c, 29'-1c smaller than the inner diameter of each of the second electrode portion 202B, 202B 'and the third electrode portion 202
Each of the outer diameters of C and 202C 'is smaller than the outer diameter of the corresponding second segment 29-1b, 29'-1b and third segment 29-1c, 29'-1c.

Electrode portions 200A, 2 of the gyro rotor 20
00B, 200C and 200A ', 200B', 200
The same is true if each of C'is located radially outward of each of the corresponding segments of the first pair of electrostatic support electrodes. Further, the electrode portion of the gyro rotor 20 and the electrostatic support electrodes 29-2, 29 'of the second, third and fourth pairs.
The positional relationship between -2, 29-3, 29'-3, 29-4, and 29'-4 is also the same.

Thus, by arranging the electrode portions of the gyro rotor 20 inwardly or outwardly in the radial direction with respect to the segments of the electrostatic support electrodes of the first pair,
By the same operation as described with reference to the first and second examples, the forces Fx1 and Fx3 acting radially outward or inward with respect to the gyro rotor 20 are generated, and the magnitude thereof is increased. To do.

As shown in FIG. 9A, an annular spacer 23 is inserted between the upper bottom member 22 and the lower bottom member 24 so as to surround the gyro rotor 20. Spacer 2
Reference numeral 3 has an annular support member 23G and adjustment films 23A and 23A 'mounted on both surfaces thereof. The spacer 23 may be manufactured simultaneously with the gyro rotor 20 or by a similar method, as will be described later. In such a case, the spacer 2
The annular support member 23G of No. 3 is made of the same insulating material as the disk-shaped member 20G of the gyro rotor 20, and the adjustment films 23A and 23A 'of the spacer 23 are made of a metal thin film like the electrode portion of the gyro rotor 20. . As a result, the spacer 23 and the gyro rotor 20 can be manufactured to have exactly the same thickness.

An annular gap adjusting ring 22G may be attached to the upper bottom member 22 corresponding to the spacer 23,
An annular gap adjusting ring 24G may be attached to the lower bottom member 24 so as to correspond to the spacer 23. The gap adjusting rings 22G and 24G may be metal thin films similarly formed by using a thin film forming technique.

By adjusting the thickness of the gap adjusting rings 22G, 24G when assembling the gyro device, or by adjusting both the gap adjusting rings 22G, 24G and the adjusting films 23A, 23A 'of the spacer 23. , Gyro rotor 20 and gyro case 21
The gap between them is set to the optimum value. In this way, the gap adjusting rings 22G and 24G and the adjusting films 23A and 23
Instead of separately forming A ′, the gap adjusting ring 22G of the upper bottom member 22 and the adjusting film 2 on the upper side of the spacer 23 are formed.
3A may be integrally configured, and the gap adjustment ring 22G of the upper bottom member 22 and the adjustment film 23A on the upper side of the spacer 23 may be integrally configured.

As shown in FIG. 9B, the spacer 23 has stopper portions 23-1 to 23-4. The radial displacement of the gyro rotor 20 is limited by the stopper portion. The gap between the tips of the stoppers 23-1 to 23-4 and the outer edge of the gyro rotor 20 is set appropriately.
In this example, the stopper portions 23-1 to 23-4 are configured as a plurality of protrusion portions that protrude inward in the radial direction, but may be formed in an annular shape.

Next, with reference to FIG. 10, a method of manufacturing the gyro device of this embodiment, particularly a method of manufacturing the gyro rotor 20, will be described. The gyro rotor 20 and the spacer 23 are preferably manufactured in the same or a series of steps. First, a thin plate material 21 made of a transparent insulating material such as quartz glass.
Prepare 0. The plate member 210 may be rectangular as shown in the drawing, and usually has a size large enough to cut out the plurality of gyro rotors 20 and the spacers 23 from one plate member.

Next, the metal thin film electrodes 202A, 202B, 202C, and
202D and 202A ', 202B', 202C ', 2
02D 'and the adjustment films 23A and 23A' are formed.

According to this example, since the metal thin film is mounted on the transparent plate material 210, the self-aligned exposure method becomes possible. According to the self-alignment exposure method, first, the plate material 210
The electrode portions 202A, 202B, 202C, 2 are provided on one surface of
02D and the adjustment film 23A are formed. Next, the plate material 210
The electrode portion 2 already formed by applying a photosensitizer to the other surface of the
02A, 202B, 202C, 202D and adjustment film 23
Exposure from the A side. Lithographic techniques can be used here. Thereby, the electrode portions 202A ′, 202B ′, 202C ′, 202D ′ and the adjustment film 23A ′ are formed on the other surface of the plate material 210. According to the self-alignment exposure method, the same shape can be accurately and concentrically drawn on both sides.

The adjustment films 23A and 23A 'are used for the electrode portion 20.
It may be formed separately from 2A, 202B, 202C, 202D or by a different material. Next, the gyro rotor 20 and the spacer 23 are separated from the plate material 210. The order of separation is not limited. For example, first, the gyro rotor 20 is cut along the outer circumference thereof to separate the gyro rotor 20. Next, the inner circumference of the spacer 23 and the stopper 23-
The spacers 23 are separated by cutting along 1 to 23-4 and further along the outer periphery. Such cutting may be done, for example, by etching.

Next, a metal thin film connecting portion for electrically connecting the electrode portions 202A, 202B, 202C, 202D on the upper surface of the gyro rotor 20 and the electrode portions 202A ', 202B', 202C ', 202D' on the lower surface. 203A and / or 204 are formed. The connecting portion 203A and / or
Alternatively, 204 may be formed by any suitable thin film formation technique.

Finally, the electrode parts 202A, 202B, 202
C, 202D and 202A ', 202B', 202
The surface of C ′, 202D ′, 203A and / or 204 is oxidized to form an insulating film. With such an insulating film, the electrode portions 202A and 202B of the gyro rotor 20 are
202C, 202D and 202A ', 202B', 20
2C 'and 202D' are insulated from the electrostatic supporting electrodes 29-1 to 29-4 and 29'-1 to 29'-4 on the gyro case 21 side, and a capacitor is formed between them. The insulating film protects the electrode portion and prevents the gyro rotor 20 from adhering to the gyro case 21.

Thus, according to this example, the gyro rotor 2
Electrode portions 202A, 202B, 20 formed on the upper surface of 0.
2C, 202D and an electrode portion 202A 'formed on the lower surface,
202B ', 202C', 202D 'with high accuracy,
They can be formed concentrically and in the same shape. Further, since the spacer 23 is manufactured in the same process using the same raw material as that of the gyro rotor 20, the positional relationship between the spacer 23 and the gyro rotor 20 when the gyro device is assembled is as shown in FIG. 210 includes electrode portions 202A, 202B, 202C, 202D and 2
02A ′, 202B ′, 202C ′, 202D ′ and the adjustment films 23A, 23A ′ can be reproduced in the same positional relationship.

Therefore, in the assembled gyro device, it is possible to easily and accurately set the interval between the tip end portions of the stopper portions 23-1 to 23-4 of the spacer 23 and the outer periphery of the gyro rotor 20.

According to the present example, the electrode parts 202A, 202B, 202C, 2 formed on both surfaces of the gyro rotor 20.
02D and 202A ', 202B', 202C ', 20
Since 2D ′ is clearly separated by the surrounding insulating portion, the amount of change in electrical energy (E = CV ² ) with respect to the displacement of the gyro rotor 20 becomes large, and a large position control force can be generated, and the dynamic force can be generated. A wide range sensor can be provided.

According to this example, since the gyro rotor 20 forms the electrode portion by forming the metal thin film on the transparent insulating material by using the thin film forming technique, the gyro rotor 2
The electrode portions on both sides of 0 can be formed concentrically and symmetrically to each other.

Further, according to this example, since the electrode portion of the gyro rotor 20 is formed by forming a metal thin film using a thin film forming technique, an extremely thin and lightweight gyro rotor 20 can be manufactured.

Although the embodiments of the present invention have been described above in detail, those skilled in the art will understand that the present invention is not limited to the above-mentioned embodiments and various other configurations can be adopted without departing from the gist of the present invention. Easy to understand.

[0151]

According to the present invention, since the gyro rotor 20 is formed in a disk shape, there is an advantage that a gyro device having a low manufacturing cost and high accuracy can be obtained.

According to the present invention, since the gyro rotor 20 is formed in a disk shape and a single crystal metal such as silicon (silicon) can be used, a highly accurate gyro device that is not affected by temperature change or aging change is provided. There is an advantage that can be.

According to the present invention, since the gyro rotor 20 is formed in a disc shape and single crystal metal such as silicon can be used, there is an advantage that it can be mass-produced by a lithography technique or the like.

According to the present invention, main parts such as the disc-shaped gyro rotor 20, the upper bottom member, the lower bottom member, and the ring-shaped spacer that form the gyro case 21 are manufactured by a mass production technique such as lithography. Therefore, there is an advantage that a gyro device with low manufacturing cost can be provided.

According to the present invention, the gyro rotor 20 is manufactured by forming a metal thin film electrode on the disk-shaped member 20G made of an insulating material by a thin film forming technique. There is an advantage that it can be manufactured accurately and efficiently.

According to the present invention, the gyro rotor 20 is manufactured by forming a metal thin film electrode on the disk-shaped member 20G made of an insulating material by a thin film forming technique. Since it can be composed of small segments, it is possible to increase the rate of change of electric energy (E = CV ² ) stored between the electrode portion of the gyro rotor 20 and the electrostatic support electrode of the gyro case 21. There is.

According to the present invention, since the gyro rotor 20 is manufactured by forming the metal thin film electrodes on the disk-shaped member 20G made of a transparent insulating material by the thin film forming technique, the self-aligned exposure method is used. Thus, there is an advantage that the electrodes on both sides of the gyro rotor 20 can be formed concentrically and in the same shape.

According to the present invention, the plate member 2 made of an insulating material is used.
Since the gyro rotor 20 and the spacer 23 can be simultaneously manufactured in the same step or a series of steps by forming a metal thin film electrode and an adjustment film on the thin film 10 by the thin film forming technique, the manufacturing process of the gyro device is performed. There is an advantage that efficiency can be improved.

According to the present invention, the plate member 2 made of an insulating material is used.
Since the gyro rotor 20 and the spacer 23 can be simultaneously manufactured in the same process or a series of processes by forming a metal thin film electrode and an adjustment film on the thin film 10 by a thin film forming technique, in the assembled gyro device. , There is an advantage that the position of the spacer 23 with respect to the gyro rotor 20 can be accurately set.

According to the present invention, by dividing the AC voltage applied to the four pairs of electrostatic support electrodes and performing the addition / subtraction calculation,
Since the angular velocities around the X axis and the Y axis are detected, there is an advantage that a gyro device that can detect two accelerations perpendicular to the spin axis can be obtained.

According to the present invention, by dividing the AC voltage applied to the four pairs of electrostatic support electrodes and performing the addition / subtraction calculation,
Since the acceleration is detected in the spin axis direction (Z axis direction), the X axis direction, and the Y axis direction, it is possible to provide a gyro device having five functions as an inertial sensor.

According to the present invention, there is an advantage that the displacement of the gyro rotor 20 in the X-axis and Y-axis directions is detected by a simple position detecting device including a light emitting element and a light receiving element.

According to the present invention, the displacement of the gyro rotor 20 in the X-axis and Y-axis directions is detected by a simple position detecting device including a light emitting element and a light receiving element, and the gyro rotor is made to be zero. Advantageously, the electrostatic force acting on 20 is controlled and the gyro rotor 20 is arranged such that its spin axis is always aligned with the central axis of the gyro device.

[Brief description of drawings]

FIG. 1 is a diagram showing a first example of a gyro device of the present invention.

FIG. 2 is a diagram showing an example of a restraint control system and a rotor drive system of the gyro device of the present invention.

FIG. 3 is a diagram showing an example of an X control system and a Y control system of the gyro device of the present invention.

FIG. 4 is an explanatory diagram illustrating a bearing action of an electrostatic force of the gyro device.

FIG. 5 is an X gyro operation unit and X of the gyro device of the present invention.
It is a figure which shows the example of an acceleration calculation part.

FIG. 6 is a Y gyro operation unit and Y of the gyro device of the present invention.
It is a figure which shows the example of an acceleration calculation part.

FIG. 7 is a diagram showing an example of a Z acceleration calculator of the gyro device of the present invention.

FIG. 8 is a diagram showing a second example of the gyro device of the present invention.

FIG. 9 is a diagram showing a third example of the gyro device of the present invention.

FIG. 10 is an explanatory diagram illustrating a manufacturing method of a third example of the gyro device of the present invention.

FIG. 11 is a diagram showing an example of a conventional electrostatic gyro device.

[Explanation of symbols]

1 Gyro rotor 2 Gyro case 3, 3 ', 4, 4', 5, 5'electrode 6-1, 6-2, 6-3, 6-4 Coil 7 pattern 8-1, 8-2, 8-3 , 8-4 Optical pickup 20 Gyro rotor 20A Hole 20B Center part 20C Electrode part 20G Disc-shaped member 21 Gyro case 22 Upper bottom member 22A, 22A 'hole 22G Adjustment ring 23 Spacer 23-1, 23-2, 23-3 , 23-4 Stopper 23A, 23A 'Adjustment film 24 Lower bottom member 24G Adjustment ring 25 Screw 26 Cavity 27 Light emitting element 28 Light receiving element 29-1, 29-2, 29-3, 29-4 Electrode 29'-1 , 29'-2, 29'-3, 29'-4 Electrodes 30-1, 30-2, 30-3, 30-4 Coil 30'-1, 30'-2, 30'-3, 30'- 4 coil 32 cap 33 get Member 34 pipe 41, 42, 43, 44 transformer 50 X control system 50-1 AC power supply 50-2 arithmetic unit 50-3, 50-4 multiplier 51 X gyro arithmetic unit 51-1, 51-2, 51- 3, 51-4 Dividing unit 51-5, 51-6, 51-7, 51-8 Rectifying unit 51-9, 51-10, 51-11 Subtracting unit 51-12 Computing unit 53 X acceleration computing unit 53- 1, 53-2 Addition unit 53-3 Subtraction unit 60 Y control system 60-1 AC power supply 60-2 Calculation unit 60-3, 60-4 Multiplier 61 Y Gyro calculation unit 61-1, 61-2, 61- 3, 61-4 Dividing unit 61-5, 61-6, 61-7, 61-8 Rectifying unit 61-9, 61-10, 61-11 Subtracting unit 61-12 Computing unit 63 Y Acceleration computing unit 63- 1, 63-2 Adder 63-3 Subtractor 73 Z acceleration calculation 73-1, 73-2 addition part 73-3 subtraction part 100 rotor drive system 101 drive power supply 200A, 200B, 200C electrode part 200A ', 200B', 200C 'electrode part 202A, 202B, 202C, 202D electrode part 202A' , 202B ', 202C', 202D 'electrode part 210 plate material

[Procedure amendment]

[Submission date] August 4, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] 0137

[Correction method] Change

[Correction content]

By adjusting the thickness of the gap adjusting rings 22G, 24G when assembling the gyro device, or by adjusting both the gap adjusting rings 22G, 24G and the adjusting films 23A, 23A 'of the spacer 23. , Gyro rotor 20 and gyro case 21
The gap between them is set to the optimum value. In this way, the gap adjusting rings 22G and 24G and the adjusting films 23A and 23
Instead of separately forming A ′, the gap adjusting ring 22G of the upper bottom member 22 and the adjusting film 2 on the upper side of the spacer 23 are formed.
3A may be integrally configured, and the gap adjustment ring 24G of the lower bottom member 24 and the lower adjustment film 23A ′ of the spacer 23 may be integrally configured.

 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Isao Masawa 2-16-46 Minami Kamata, Ota-ku, Tokyo Within Tokimec Co., Ltd. (72) Inventor Shigeru Nakamura 2-16-46 Minami-Kamata, Ota-ku, Tokyo In Tokimec Co., Ltd. (72) Inventor Kazuaki Tani 2-16-46 Minami Kamata, Ota-ku, Tokyo In Tokimec Co., Ltd.

Claims (21)

[Claims] 1. An acceleration detection type gyro device comprising: a gyro rotor that rotates at high speed around a spin axis; and a gyro case that accommodates the gyro rotor supported in a non-contact manner by electrostatic supporting force inside. The gyro rotor is formed in a disk shape and has electrode portions on both sides along the circumferential direction, and the gyro rotor has a plurality of electrode portions on both sides corresponding to and spaced from the electrode portions on both sides, respectively. 4 pairs of electrostatic electrodes arranged at 90 ° angular intervals to each other, and displacement of the gyro rotor with respect to the two gyro cases in the two radial directions orthogonal to the central axis of the gyro case and orthogonal to each other are detected. A displacement detection device, a rotor drive system for rotating the gyro rotor at high speed around the spin axis, the four pairs of electrostatic electrodes, and A gyro rotor including an electrode part of the gyro rotor, and a constraint control system for constraining displacement of the gyro rotor in a direction along the central axis, the four pairs of electrostatic electrodes, and the displacement detection device. And a center position control system for controlling so as to match the center axis with the gyro device. 2. The gyro device according to claim 1,
The rotor driving system corresponds to the electrode portions on both sides of the gyro rotor and the electrode portions on both sides of the gyro rotor, respectively, and is separated from the electrode portions on both sides of the gyro case at an angular interval of 90 ° to each other in the gyro case. A gyro device including four pairs of coils arranged. 3. The gyro device according to claim 1, wherein the restraint control system includes the electrode portion of the gyro rotor and the four pairs when the gyro rotor is biased with respect to the gyro case along the central axis. A gyro device configured to generate a force for reducing the bias of the gyro rotor by an electrostatic force caused by a change in a gap between the gyro rotor and the electrostatic electrode. 4. The gyro device according to claim 1, 2 or 3, wherein an inner diameter and an outer diameter of the electrostatic electrode are larger than an inner diameter and an outer diameter of an electrode portion of the gyro rotor, whereby the electrostatic electrode is attached to the gyro. It is arranged radially outwardly offset with respect to the electrode portion of the rotor, or the inner diameter and outer diameter of the electrostatic electrode are smaller than the inner diameter and outer diameter of the electrode portion of the gyro rotor, whereby the electrostatic electrode is The gyro rotor is arranged so as to be biased radially inward with respect to the electrode portion of the gyro rotor, whereby the center position control system generates a force for aligning the gyro rotor with the center axis. apparatus. 5. The gyro device according to claim 1, 2, 3 or 4, wherein the gyro rotor includes a disk-shaped member made of an insulating material and metal thin film electrode parts mounted on the upper and lower surfaces thereof. Characteristic gyro device. 6. The gyro device according to claim 5,
A gyro device, wherein the electrode portion of the gyro rotor is formed by a thin film forming technique such as vapor deposition, ion plating, and photofabrication. 7. A gyro device according to claim 1, 2, 3, 4, 5 or 6, wherein the electrode portions on each surface of the gyro rotor have a plurality of concentrically arranged annular portions and the annular portions are electrically connected. A gyro device including a connection portion that is physically connected. 8. The gyro device according to claim 7,
A gyro device, wherein an electrode portion on a lower surface corresponding to an electrode portion on an upper surface of the gyro rotor is electrically connected by a connecting portion. 9. The gyro device according to claim 7, wherein the electrostatic electrode includes a plurality of concentrically arranged annular parts and a connecting part electrically connecting the annular parts. A gyro device, wherein each of the annular portions of the electrode is arranged corresponding to each of the annular portions of the electrode portion of the gyro rotor. 10. The gyro device according to claim 1, wherein the gyro case surrounds the outer circumference of the gyro rotor and is spaced apart from the outer circumference of the gyro rotor in order to limit radial displacement of the gyro rotor. A gyro device having a stopper provided therein. 11. The gyro device according to claim 10, wherein the stopper is formed as a plurality of protrusions protruding in a radial direction from an annular spacer. 12. The gyro device according to claim 11, wherein the annular spacer and the stopper include the same insulating material as the gyro rotor and metal thin films formed on both surfaces thereof by a thin film forming technique. Gyro device. 13. The gyro device according to claim 12, wherein the annular spacer and the stopper are configured to have the same thickness as the gyro rotor. 14. The gyro device according to claim 1, 2, 3 or 4, wherein the gyro rotor is made of a conductive material, and an electrode portion of the gyro rotor is divided into a plurality of annular parts by circumferential dividing lines. A gyro device including the electrode part of. 15. The gyro device according to claim 14, wherein the gyro rotor is made of single crystal silicon. 16. The gyro device according to claim 14, wherein the electrostatic electrode includes a plurality of concentrically arranged annular portions and a connecting portion electrically connecting the annular portions,
A gyro device, wherein each of the annular portions of the electrostatic electrode is arranged corresponding to each of the annular portions of the electrode portion of the gyro rotor. 17. The gyro device according to claim 1, wherein the displacement detection device has a hole formed at a central position of the gyro rotor and the gyro case on both sides of the hole corresponding to the hole. A gyro device having a light emitting element and a light receiving element which are arranged at corresponding positions. 18. The gyro device according to claim 1, wherein the electrostatic electrode is arranged on an inner surface of the gyro case. 19. A method of manufacturing a gyro device including a thin disk-shaped gyro rotor and a gyro case accommodating the gyro rotor, wherein a metal thin film electrode is formed on both sides of a thin plate made of an insulating material by a thin film forming technique. And manufacturing a gyro rotor by cutting the plate material into a circular shape, and manufacturing the gyro device. 20. The method of manufacturing a gyro device according to claim 19, wherein an annular spacer of a metal thin film and a plurality of stoppers protruding inward in the radial direction from the spacer are formed on both surfaces of the plate material by a thin film forming technique. Forming the stopper so as to surround the electrode and spaced apart from the electrode, and cutting out the spacer and the stopper portion from the plate material to manufacture the spacer and the stopper as an integral member. Method of manufacturing gyro device. 21. The method of manufacturing a gyro device according to claim 20, wherein the gyro rotor is arranged such that a distance between each of the tips of the stopper and an outer peripheral portion of the gyro rotor is the same. As possible, disposing the spacer between an upper bottom member and a lower bottom member forming the gyro case, the method of manufacturing a gyro device.